JP2015110844A5

JP2015110844A5 -

Info

Publication number: JP2015110844A5
Application number: JP2015040979A
Authority: JP
Filing date: 2015-03-03
Publication date: 2015-10-08
Anticipated expiration: 2032-08-22

Description

本発明者らは、上記の課題を解決するために、本発明の希土類元素オキシフッ化物粉末溶射材料として、希土類元素オキシフッ化物粒子の外形のアスペクト比が２以下、粒度分布がＤ ₅₀ ＝２８〜５０μｍ、Ｄ ₁₀ ＝１８〜３０μｍ、Ｄ ₉₀ ＝４８〜８０μｍで、嵩密度が０．８ｇ／ｃｍ³以上２ｇ／ｃｍ³以下、炭素を０．５質量％以下、酸素を３質量％以上１５質量％以下含有する溶射材料をプラズマ溶射すること、これにより炭素含有量が０．１質量％以下、酸素含有量が３質量％以上１５質量％以下の溶射皮膜を基材に形成することが有効であることを知見し、本発明をなすに至った。 In order to solve the above-mentioned problems, the present inventors have used the rare earth element oxyfluoride powder sprayed material of the present invention as the rare earth element oxyfluoride particles having an external aspect ratio of 2 or less and a particle size distribution of D ₅₀ = 28 to ₅₀ μm. D ₁₀ = 18-30 μm, D ₉₀ = 48-80 μm , bulk density of 0.8 g / cm ³ or more and 2 g / cm ³ or less, carbon of 0.5 mass% or less, oxygen of 3 mass% or more and 15 mass%. It is effective to plasma spray a thermal spray material contained below, thereby forming a thermal spray coating having a carbon content of 0.1% by mass or less and an oxygen content of 3% by mass to 15% by mass on a substrate. This has been found and the present invention has been made.

従って、本発明は、下記の溶射材料及び溶射部材を提供する。
〔１〕
希土類元素オキシフッ化物粒子の外形のアスペクト比が２以下、粒度分布がＤ ₅₀ ＝２８〜５０μｍ、Ｄ ₁₀ ＝１８〜３０μｍ、Ｄ ₉₀ ＝４８〜８０μｍで、嵩密度が０．８ｇ／ｃｍ³以上２ｇ／ｃｍ³以下、炭素を０．５質量％以下、酸素を３質量％以上１５質量％以下含有することを特徴とする希土類元素オキシフッ化物粉末溶射材料。
〔２〕
希土類元素がＹ及びＬａからＬｕまでの３Ａ族元素から選ばれる１種又は２種以上である〔１〕に記載の溶射材料。
〔３〕
希土類元素がＹ、Ｇｄ及びＥｒから選ばれる〔２〕に記載の溶射材料。
〔４〕
基材に、〔１〕〜〔３〕のいずれかに記載の溶射材料をプラズマ溶射することにより、炭素含有量が０．１質量％以下、酸素含有量が３質量％以上１５質量％以下の溶射皮膜を形成してなることを特徴とする希土類元素オキシフッ化物溶射部材。 Accordingly, the present invention provides the following thermal spray material and thermal spray member.
[1]
The external aspect ratio of the rare earth element oxyfluoride particles is 2 or less, the particle size distribution is D ₅₀ = 28 to ₅₀ μm, D ₁₀ = 18 to 30 μm, D ₉₀ = 48 to ₈₀ μm, and the bulk density is 0.8 g / cm ³ or more to 2 g. / Cm ³ or less, carbon containing 0.5% by mass or less and oxygen containing 3% by mass or more and 15% by mass or less.
[2]
The thermal spray material according to [1], wherein the rare earth element is one or more selected from Y and a group 3A element from La to Lu.
[3]
The thermal spray material according to [2], wherein the rare earth element is selected from Y, Gd, and Er.
[4]
By plasma spraying the thermal spray material according to any one of [1] to [3] on a base material, the carbon content is 0.1 mass% or less and the oxygen content is 3 mass% or more and 15 mass% or less. A rare earth element oxyfluoride sprayed member characterized by forming a sprayed coating.

溶射材料の平均粒子径は１０〜１００μｍ、好ましくは１５〜６０μｍである。これは、溶射材料の粒子の大きさが小さすぎると、フレーム中で蒸発してしまうなど、溶射歩留まりが低下するおそれがあり、粒子が大きすぎるとフレーム中で完全に溶融せず、溶射膜の品質が低下するおそれがあるからである。また、造粒後の粉末である溶射材料粉末が内部まで充填していることは、粉末を取り扱う上で割れたりせずに安定していること、空隙部が存在するとその空隙部に好ましくないガス成分を含有し易いのでそれを避けることができること等の理由から、必要なことである。この点で、溶射材料の嵩密度は０．８〜２ｇ／ｃｍ³であり、好ましくは１．２〜１．８ｇ／ｃｍ³である。
なお、平均粒子径はレーザー光回折法による粒度分布測定装置によって求めることができ、質量平均値Ｄ₅₀（即ち、累積質量が５０％となるときの粒子径又はメジアン径）として測定することができる。また、粒度分布は、後述する実施例１〜３のとおり、Ｄ ₅₀ ＝２８〜５０μｍ、Ｄ ₁₀ ＝１８〜３０μｍ、Ｄ ₉₀ ＝４８〜８０μｍとすることができる。
The average particle size of the thermal spray material is 10 to 100 μm, preferably 15 to 60 μm. This is because if the particle size of the sprayed material is too small, it may evaporate in the flame, such as evaporation, and if the particle size is too large, the sprayed material will not melt completely in the frame. This is because the quality may be lowered. In addition, the thermal spray material powder, which is the powder after granulation, is filled to the inside, is stable without cracking when handling the powder, and if there is a void, undesired gas in the void This is necessary for reasons such as being easy to contain components and avoiding them. In this respect, the thermal spray material has a bulk density of 0.8 to 2 g / cm ³ , preferably 1.2 to 1.8 g / cm ³ .
The average particle diameter can be determined by a particle size distribution measuring apparatus using a laser beam diffraction method, and can be measured as a mass average value D ₅₀ (that is, a particle diameter or a median diameter when the cumulative mass is 50%). . Further, particle size distribution, as in Example 1-3 to be described later, can be _{_{D 50 = 28~50μm, D 10 =}} 18~30μm, and D ₉₀ = 48~80μm to.

Claims

The external aspect ratio of the rare earth element oxyfluoride particles is 2 or less, the particle size distribution is D ₅₀ = 28 to ₅₀ μm, D ₁₀ = 18 to 30 μm, D ₉₀ = 48 to ₈₀ μm, and the bulk density is 0.8 g / cm ^{3 to} 2 g. / Cm ³ or less, carbon containing 0.5% by mass or less and oxygen containing 3% by mass or more and 15% by mass or less.

The thermal spray material according to claim 1, wherein the rare earth element is one or more selected from Y and a Group 3A element from La to Lu.

The thermal spray material according to claim 2, wherein the rare earth element is selected from Y, Gd, and Er.

By plasma spraying the thermal spray material according to any one of claims 1 to 3 on a substrate, the carbon content is 0.1 mass% or less, and the oxygen content is 3 mass% or more and 15 mass% or less. A rare earth element oxyfluoride sprayed member characterized by forming a sprayed coating.