JP2015105824A - Static load bearing device of electro-dynamic vibration generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a static load bearing device of an electro-dynamic vibration generator that enables the overall size of the electro-dynamic vibration generator to be made compact and its vibration characteristics to be adversely affected in no way.SOLUTION: A static load bearing device of an electro-dynamic vibration generator comprises: an exciting coil 2 for generating a magneto-static field; a yoke 1 comprising a ferromagnetic body for forming a magnetic circuit magnetized by the exciting coil 2 to form a static field and a magnetic gap 4; a drive coil 5 arranged in the magnetic gap 4 to generate vibration; and a vibration table 6 formed integrally with the drive coil 5. A lower supporting mechanism 30 receiving a shaft 32 disposed downward continuously in the central part of the vibration table 6 to be vertically movable in the upper central part of the yoke 1 is provided, a pneumatic spring 40 surrounding airtight the lower supporting mechanism 30 is provided between the lower part of the vibration table 6 and the upper part of the yoke, and a first air chamber 41 within the pneumatic spring 40 and a second air chamber 42 disposed within the yoke 1 are communicated with each other through a communicating hole 43 bored through the yoke 1.

Description

  The present invention relates to a static load holding device for an electrodynamic vibration generator used in a vibration test system or the like.

  FIG. 6 shows a conventional example of a vibration test system for in-vehicle devices. This is disclosed in Patent Document 1, and the electrodynamic vibration generator 100 includes an outer magnetic pole 101, an inner magnetic pole 102, an excitation coil 103, a movable coil 104, a vibration table 105, and an air spring 106. Yes. The excitation coil 103 is excited by a DC current to generate a DC magnetic field, and a DC magnetic field across the movable coil 104 is formed in the magnetic gap G between the outer magnetic pole 101 and the inner magnetic pole 102.

  An alternating current is passed through the movable coil 104, and the movable coil 104 vibrates in a direct current magnetic field formed in the gap G at a frequency based on the frequency of the alternating current. The movable coil 104 is fixed to a vibration table 105 supported by an air spring 106 installed on the upper surface of the inner magnetic pole 102 so as to be movable up and down. The vibration table 105 vibrates when the movable coil 104 vibrates. A device under test 107 is placed on the vibration table 105, and the device under test 107 vibrates with the vibration of the vibration table 105, and the vibration characteristics at this time can be measured.

  Another example is shown in FIG. This is disclosed in Patent Document 2, and an electrodynamic vibration generator 110 includes an outer magnetic pole 111, an inner magnetic pole 112, upper and lower excitation coils 113, a movable coil 114, a vibration table 115, a shaft 116, and a bearing 118. And an air spring 119. The exciting coil 113 is excited by a direct current input from the power supply unit 120 to generate a direct current magnetic field, and a direct current across the movable coil 114 is formed in a gap G between the outer magnetic pole 111 and the inner magnetic pole 112 that are magnetic bodies. A magnetic field is formed.

An alternating current is supplied to the movable coil 114, and the movable coil 114 vibrates in the direct current magnetic field formed in the gap G at a frequency based on the frequency of the alternating current. The movable coil 114 is fixed to a vibration table 115 supported by an air spring 119 installed in the inner magnetic pole 112. When the movable coil 114 vibrates, the vibration table 115 is guided by a bearing 118 and vertically. Vibrate in the direction.
The electrodynamic vibration generator disclosed in Patent Document 3 also uses a similar air spring.

  The above-described air springs 106 and 119 shown in FIGS. 6 and 7 support the weight of the movable part including the DUT and the movable coils 104 and 114 attached to the vibration tables 105 and 115, The position is held at the center position in the height direction of the magnetic gap G, and the movable coils 104 and 114 vibrate up and down around the position.

  In a vibration generator, it is necessary to always keep the swing width of the movable part constant. Therefore, when the object to be tested is placed on the movable part, the constant position, that is, the neutral position (hereinafter referred to as “neutral position”). Must be controlled to maintain. Therefore, in order to return the movable part that sank due to the weight of the DUT to the neutral position, pressure is applied to the movable part with a regulator using air supplied from an air compressor or factory air source, and the movable part is pushed up, There is known a method of maintaining a neutral position by pushing up a movable part with an air spring or a bellophram.

  However, a complicated structure is required to install a regulator for controlling the air pressure in the vibration generator body, an air compressor for injecting air into the regulator, a hose that draws in the factory air source, and a vent. In addition, there is a problem that the installation area becomes large.

Therefore, Patent Document 4 proposes a compact electrodynamic vibration generator 110 ′ that can easily perform neutral positioning of the movable part with a simpler mechanism as shown in FIG.
That is, this electrodynamic vibration generator 110 ′ is characterized in that the vibration generator 110 shown in FIG. The air chamber 130 is formed by a space inside the outer magnetic pole 111 other than the vibration table 115, the excitation coil 113, and the movable coil 114, and is completely blocked from the outer space by the sealing means S.

  The air chamber 130 communicates with the second air chamber 131 through the opening 131a, and the second air chamber 131 is provided with a volume varying means 140. The volume changing means 140 is constituted by a piston 141 inserted into the second air chamber 131 from the outside of the outer magnetic pole 111, and the tip of the piston 141 can move in contact with the inner wall of the second air chamber 131 in an airtight state. A piston ring 142 is provided.

  When the test object T is placed on the vibration table 115 and the piston 141 of the volume varying means 140 is pushed inside the vibration generator 100 ′, the air inside the air chamber 130 completely blocked from the outside is obtained. The volume will be reduced. When the temperature of the gas is constant, the product of the pressure and the volume is constant, so that the pressure inside the vibration generator 110 ′ increases as the volume decreases. That is, the pressure applied to the vibration table 115 from the air chamber 130 side increases, and as a result, the vibration table 115 to which the pressure has been applied rises until it is balanced with the external pressure. In this manner, the volume of the air chamber 130 can be changed according to the weight of the movable part with a compact structure.

JP 2000-258288 A JP 2005-62097 A International Publication No. 2009/130818 Pamphlet JP 2005-148006 A

  As described above, in the electrodynamic vibration generator 100 described in the above-mentioned Patent Document 1, when the weight of the vibration table 105 (movable part) including the movable coil 104 and the DUT changes, the air spring 106 is used. If the pushing pressure is constant, there is a problem that the neutral position of the movable coil 104 changes and the measurement accuracy of the vibration characteristics deteriorates.

  In the electrodynamic vibration generator 110 described in Patent Document 2, in addition to the above-described problem, the lower end of the shaft 116 below the vibration table 115 is supported by the air spring 119. There was a problem that the overall height was bulky and a compact design was not possible. The vibration generator described in Patent Document 3 has the same problem.

  In the electrodynamic vibration generator 110 ′ described in Patent Document 4, the air chamber 130 and the volume variable means 140 are provided. In order to seal the air chamber 130 from the outside air, the vibration table 115, the outer magnetic pole 111, However, since the vibration table 115 vibrates, there is a problem of affecting the vibration characteristics.

  Accordingly, an object of the present invention is to provide a static load holding device for an electrodynamic vibration generator that can be made compact as a whole and that does not adversely affect vibration characteristics.

In order to solve the above problems, the static load holding device of the electrodynamic vibration generator of the present invention is:
An exciting coil for generating a static magnetic field;
A yoke made of a ferromagnetic material for forming a magnetic circuit and a magnetic gap by a static magnetic field generated by the exciting coil;
A drive coil for generating vibration disposed in the magnetic gap;
A vibration table formed integrally with the drive coil,
A lower support mechanism is provided for receiving a shaft continuously provided downward at the center of the vibration table so as to be movable up and down at the upper center of the yoke.
An air spring is provided between the lower part of the vibration table and the upper part of the yoke so as to surround the lower support mechanism in an airtight state.
The first air chamber in the air spring and the second air chamber provided in the yoke are communicated with each other through a communication hole provided in the yoke.

  In the present invention, the lower support mechanism is provided in the first air chamber inside the air spring, and the second air chamber and the first air chamber provided in the yoke are communicated by the communication hole. As a result, the air chamber cross-sectional area can be increased. As a result, it is possible to cope with an increase in static load, to shorten the shaft at the center of the lower support mechanism, and to reduce the weight of the movable part.

  By providing an upper support mechanism that suppresses lateral shaking during vertical vibration of the vibration table around the vibration table, the support of the vibration table by the shaft and the lower support mechanism can be shared with the upper support mechanism, Further, the weight of the movable part can be reduced by shortening the shaft, and the entire electrodynamic vibration generator can be reduced in size.

  By enabling the lower end of the shaft to protrude into the second air chamber, it is possible to suppress an increase in the size of the entire electrodynamic vibration generator even if the shaft is somewhat long.

  According to the present invention, there is provided a lower support mechanism for receiving a shaft, which extends downward from the central portion of the vibration table, so as to be movable up and down at the upper central portion of the yoke, and a lower portion between the lower portion of the vibration table and the upper portion of the yoke. By providing an air spring surrounding the support mechanism in an airtight state, the first air chamber inside the air spring and the second air chamber provided inside the yoke are communicated with each other through a communication hole provided in the yoke. A static load holding device for an electrodynamic vibration generator that can be made compact and does not adversely affect the vibration characteristics can be obtained.

It is the schematic which shows the structure of the electrodynamic type vibration generator which concerns on this invention. It is front sectional drawing (AA sectional drawing of FIG. 3) which shows Embodiment 1 of the electrodynamic type vibration generator which concerns on this invention. It is BB sectional drawing of FIG. 3 which shows the stopper part detail of Embodiment 1 of the electrodynamic type vibration generator which concerns on this invention. It is CC sectional drawing of FIG. 3 which shows the roller part detail of Embodiment 1 of the electrodynamic type vibration generator which concerns on this invention. It is a top view which shows Embodiment 1 of the electrodynamic type vibration generator which concerns on this invention. It is front sectional drawing which shows Embodiment 2 of the electrodynamic type vibration generator which concerns on this invention. It is a top view which shows Embodiment 2 of the electrodynamic type vibration generator which concerns on this invention. It is the schematic which shows the example of the conventional electrodynamic type vibration generator. It is the schematic which shows the other example of the conventional electrodynamic type vibration generator. It is the schematic which shows the other example of the conventional electrodynamic type vibration generator.

  As shown in FIG. 1, an electrodynamic vibration generator provided with a static load holding device according to the present invention includes a yoke 1 made of a ferromagnetic material having an inner magnetic pole 1a, an outer magnetic pole 1b, and an exciting coil housing portion 1c. The exciting coil 2 housed in the exciting coil housing part 1c for generating a static magnetic field in the yoke 1, the drive coil 5 for generating vibration disposed in the magnetic gap 4 formed in the yoke 1, and the drive coil 5 and a vibration table 6 to which a device under test is attached.

  As the material of the yoke 1, a magnetic material having high magnetic permeability and high strength, for example, a low carbon steel such as SS400 can be suitably used. As a material of the vibration table 6, a non-magnetic high-strength metal such as an aluminum alloy, or a synthetic resin such as a carbon fiber can be suitably used.

  A shaft 34 is continuously provided in the central portion of the vibration table 6 downward, and a shaft hole 33 provided in the upper central portion of the yoke 1 includes a ball spline 32 and the like that receive the shaft 34 so as to be movable up and down. A lower support mechanism 30 is provided.

  Between the lower part of the vibration table 6 and the upper part of the yoke 1, there is provided an air spring 40 such as a rubber film surrounding the lower support mechanism 30 in an airtight state, and a first air chamber 41 inside the air spring 40. The second air chamber 42 provided in the yoke 1 is communicated with a communication hole 43 provided in the yoke 1.

  Further, an upper support mechanism 20 having a guide roller 21 that abuts on the side of the vibration table 6 is provided at the upper portion of the yoke 1 so that the vibration table 6 does not shake laterally when the vibration table 6 vibrates up and down.

  In the present invention, a direct current is passed through the exciting coil 2 to form a direct current magnetic field (static magnetic field) in the yoke 1 composed of the inner magnetic pole 1 a and the outer magnetic pole 1 b, which is disposed in the magnetic gap 4 provided in the yoke 1. By passing an alternating current of a predetermined frequency through the drive coil 5 that has been made, the drive coil 5 and the vibration table 6 integrated therewith vibrate up and down at a predetermined frequency. A test object is attached to the vibration table 6, and various vibration resistance tests can be performed by vibrating the test object at a predetermined frequency and a predetermined amplitude.

  Here, if the weight of the movable part including the drive coil 5, the vibration table 6, and the DUT (not shown) is W, this W becomes a static load on the air spring 40, and the first air in the air spring 40 The air in the chamber 41 and the second air chamber 42 communicating with the chamber 41 is compressed, and the static load W is supported by the reaction of the compressed air spring 40. The spring constant and air pressure of the air spring 40 are set so that the center in the height direction of the drive coil 5 is the center position of the magnetic gap 4 at the neutral position when the movable portion is not vibrating up and down.

  When the drive coil 5 vibrates, the first air chamber 41 and the second air chamber 42 are installed for the purpose of mitigating pressure fluctuations to the air spring 40, and the first air chamber 42 is provided to provide the first air chamber 41 and the second air chamber 42. The apparent volume of the air chamber 41 is increased, and the natural frequency of the air spring 40 can be reduced.

Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings.
2A to 2C and FIG. 3 show an electrodynamic vibration generator according to Embodiment 1 of the present invention. In these drawings, the yoke 1 is divided into a first yoke 11, a second yoke 12, a third yoke 13, and a fourth yoke 14, and is fixed integrally with a bolt or the like. The first yoke 11 is a base portion of the entire yoke 1, and a second yoke 12 serving as the inner magnetic pole 1a (see FIG. 1) is positioned at the center of the first yoke 11 and fixed with bolts.

  A third yoke 13 serving as the outer magnetic pole 1b (see FIG. 1) is fixed to the outer periphery of the first yoke 11 with bolts. The exciting coil 2 is housed inside the third yoke 13, and the fourth yoke 14 is fixed to the third yoke 13 with bolts so as to cover the upper part of the exciting coil 2. Note that a bush 15 that forms a magnetic gap 4 (see FIG. 1) between the fourth yoke 14 and the outer periphery of the second yoke 12 is fixed with bolts.

  The vibration table 6 is formed integrally with the cylindrical body 7, and a cylindrical drive coil 5 is connected to the lower part of the cylindrical body 7 so as to be movable up and down in the magnetic gap 4 (see FIG. 1). A shaft attachment flange 31 is attached to the center of the lower surface of the vibration table 6, and a hollow slide shaft 34 is further fixed to the lower portion of the shaft attachment flange 31. The slide shaft 34 is supported by a linear bearing 32 including a bush holder 35 and a ball bush 36 mounted in a shaft hole 33 opened in the center of the second yoke 12 so as to be movable up and down. The lower support mechanism 30 is formed by the slide shaft 34 and the linear bearing 32. A ball spline can be used as the linear bearing 32. This ball spline consists of a spline shaft with a transfer groove for steel balls and an outer outer cylinder. The outer cylinder incorporates a cage, side rings, and steel balls, and the spline shaft moves smoothly up and down. It can be moved.

  An air spring mounting flange 37 is fixed to the upper portion of the lower support mechanism 30, and the outer periphery of the shaft mounting flange 31 is surrounded between the air spring mounting flange 37 and the shaft mounting flange 31 below the vibration table 6. The air spring 40 is attached to. An air hole 40 a is provided in the outer peripheral wall of the shaft mounting flange 31 so that the first air chamber 41 (see FIG. 1) inside the air spring 40 communicates with the inside of the shaft mounting flange 31. Further, the first air chamber 41 (see FIG. 1) inside the air spring 40 and the second air chamber 42 formed in the first yoke 11 communicate with each other through the air hole 40a and the hollow portion of the shaft 34. .

  The first air chamber 41 and the second air chamber 42 are installed for the purpose of alleviating pressure fluctuations to the air spring 40 when the drive coil 5 is driven and the vibration table 6 vibrates. Is provided in communication with the first air chamber 41, the apparent volume of the first air chamber 41 is increased, and the natural frequency of the air spring 40 can be reduced.

  The upper part of the yoke 1 is surrounded by a cover 60, and a flexible duster bar 61 is connected between the cover 60, which is a fixed part, and the vibration table 7 that vibrates up and down. As shown in FIGS. 2B and 3, a table stopper 62 that restricts the vertical movement stroke of the vibration table 7 is provided on the side of the vibration table 7, and a convex portion 63 a of the stopper ring 63 fixed to the yoke 1. And the vibration table 7 can move up and down between the upper step portion 64 of the yoke 1.

  As shown in FIG. 2C, the upper portion of the yoke 1 is formed at a plurality of locations (four locations in the example of FIG. 3) on the upper portion of the cylindrical body 7 so as not to cause lateral shaking when the vibration table 6 vibrates up and down. An upper support mechanism 20 having a guide roller 21 in contact with the vertical wall 7a is provided.

  As shown in FIG. 2A, a laser displacement meter 71 is provided on the upper portion of the yoke 1 to measure the vertical position and displacement of the vibration table 6, and whether the vibration table 6 is driven with a target displacement amount. Also, it is used to monitor and control whether the center of vibration of the vibration table 6 is an appropriate position.

  An upper duct 72 is attached to the cover 60 so as to relieve fluctuations in atmospheric pressure in the cover 60 when the vibration table 6 vibrates up and down. A lower duct 73 is provided at the bottom of the yoke 1 so that air is supplied to and exhausted from the exciting coil 2 so that the exciting coil 2 is cooled by air.

  In the first embodiment, a magnetic circuit (static magnetic field) is generated in the yoke 1 surrounding the exciting coil 2 by passing a direct current through the exciting coil 2. The yoke 1 is provided with a magnetic gap 4 (see FIG. 1), and a static magnetic field generated in the magnetic gap 4 by passing an alternating current of a predetermined frequency through a drive coil 5 disposed in the magnetic gap 4. The drive coil 5 vibrates in a direction perpendicular to the direction of the magnetic flux by the force acting between the alternating current flowing in the drive coil 5. The drive coil 5 is integrally provided with a vibration table 6, and the device under test attached to the vibration table 6 vibrates at the frequency of the alternating current flowing through the drive coil 5.

  In the first embodiment, the lower support mechanism 30 is provided in the first air chamber 41 inside the air spring 40, and the second air chamber 42 and the first air chamber 41 provided inside the yoke 1 are By communicating with each other through the air hole 40a which is a communication hole, the cross-sectional area of the air chamber can be increased. Thereby, while being able to respond to the increase in static load, the shaft 34 at the center of the lower support mechanism 30 can be shortened, and the weight of the movable part can be reduced.

  In addition, by providing the upper support mechanism 20 around the vibration table 6 so as to suppress lateral shaking during the vertical vibration of the vibration table 6, the upper table 20 supports the vibration table 6 by the shaft 34 and the lower support mechanism 30. Furthermore, the weight of the movable part can be reduced by shortening the shaft 34, and the entire electrodynamic vibration generator can be reduced in size.

  4 and 5 show an electrodynamic vibration generator according to Embodiment 2 of the present invention. The yoke 1 is divided into a first yoke 17, a second yoke 18, and a third yoke 19. Divided and configured to be fixed integrally with bolts or the like. The first yoke 17 has a lower inner portion including the exciting coil storage portion 1c among the inner inner magnetic pole 1a and the outer magnetic pole 1b. The second yoke 18 has a middle portion of the outer magnetic pole 1b including the magnetic gap 4 and the degaussing coil storage 1d. The third yoke 19 is an upper portion of the outer magnetic pole 1b that covers the upper portion of the demagnetizing coil 3 housed in the degaussing coil housing portion 1d.

The vibration table 6 is formed integrally with the cylindrical body 7, and a cylindrical drive coil 5 is connected to the lower portion of the cylindrical body 7 so as to be movable up and down in the magnetic gap 4. A moving space is secured inside the exciting coil housing 1c below the magnetic gap 4 and inside the demagnetizing coil housing 1d above so that the drive coil 5 can freely move up and down.
In addition to the magnetic gap 4 in which the drive coil 5 is disposed, the yoke 1 is formed with a gap 8 for allowing the cylinder 7 connecting the drive coil 5 and the vibration table 6 to move up and down.

  The upper portion of the yoke 1 is in contact with vertical walls 7a formed at a plurality of locations (four locations in the example of FIG. 5) on the upper portion of the cylindrical body 7 so as not to be laterally shaken when the vibration table 6 vibrates up and down. An upper support mechanism 20 having a guide roller 21 is provided. Further, a flange 31 is attached to the center of the bottom of the vibration table 6, and a linear bearing 32 is attached to the lower part of the flange 31. A shaft hole 33 for inserting the outer cylinder of the linear bearing 32 is provided in the upper center portion of the yoke 1, and the lower support mechanism 30 is configured by the linear bearing 32 and the shaft hole 33.

  A bellows-like air spring 40 is provided between the bottom of the vibration table 6 and the top of the yoke 1 so as to be extendable and contracted, and a first air chamber 41 communicating with the inside of the air spring 40 is provided above and below the shaft hole 33. , A second air chamber 42 is formed. The air spring 40 supports the weight of the movable part including the test object attached to the vibration table 6 so that the position of the drive coil 5 is held at the center position in the height direction of the magnetic gap 4. The drive coil 5 vibrates up and down around the position.

The first air chamber 41 and the second air chamber 42 are installed for the purpose of mitigating pressure fluctuations to the air spring 40 when the drive coil 5 vibrates, and the second air chamber 42 is connected to the first air chamber 41. By providing the communication, the apparent volume of the first air chamber 41 is increased, and the natural frequency of the air spring 40 can be reduced.
At the bottom of the yoke 1, vibration isolators 50 using a vibration isolating material such as an anti-vibration rubber 51 are provided at a plurality of locations, and vibration is difficult to propagate to a target to which the electrodynamic vibration generator of the present embodiment is attached. I am doing so.

  In the second embodiment, a magnetic circuit (static magnetic field) is generated in the yoke 1 surrounding the exciting coil 2 by passing a direct current through the exciting coil 2. The yoke 1 is provided with a magnetic gap 4, and a static magnetic field generated in the magnetic gap 4 and the drive coil 5 are caused to flow by passing an alternating current of a predetermined frequency through the drive coil 5 disposed in the magnetic gap 4. The drive coil 5 vibrates in a direction orthogonal to the direction of the magnetic flux due to the force acting between the alternating current and the alternating current. The drive coil 5 is integrally provided with a vibration table 6, and the device under test attached to the vibration table 6 vibrates at the frequency of the alternating current flowing through the drive coil 5.

  In the second embodiment, the lower support mechanism 30 is provided in the first air chamber 41 inside the air spring 40, and the second air chamber 42 and the first air chamber 41 provided inside the yoke 1 are By making these communicate, the cross-sectional area of the air chamber can be increased. Thereby, while being able to respond to the increase in static load, the shaft 34 at the center of the lower support mechanism 30 can be shortened, and the weight of the movable part can be reduced.

  In addition, by providing the upper support mechanism 20 around the vibration table 6 so as to suppress lateral shaking during the vertical vibration of the vibration table 6, the upper table 20 supports the vibration table 6 by the shaft 34 and the lower support mechanism 30. Furthermore, the weight of the movable part can be reduced by shortening the shaft 34, and the entire electrodynamic vibration generator can be reduced in size.

  Note that leakage magnetic flux is generated outside the magnetic circuit formed in the yoke 1 due to the magnetic resistance of the magnetic gap 4, magnetic saturation of the yoke 1, and the like. The demagnetizing coil 3 is provided in the vicinity of 6 to generate a magnetic flux in the reverse direction that is substantially the same size as the leakage magnetic flux, thereby canceling the leakage magnetic flux and thereby reducing the influence of the magnetic flux on the DUT. .

  INDUSTRIAL APPLICABILITY The present invention can be used compactly as a static load holding device for an electrodynamic vibration generator that does not adversely affect vibration characteristics and can be suitably used for vibration tests of in-vehicle devices and other devices. .

DESCRIPTION OF SYMBOLS 1 Yoke 1a Inner magnetic pole 1b Outer magnetic pole 1c Excitation coil accommodating part 1d Demagnetizing coil accommodating part 2 Exciting coil 3 Demagnetizing coil 4 Magnetic gap 5 Drive coil 6 Shaking table 7 Cylindrical body 7a Vertical wall 8 Gap 11 1st yoke 12 2nd yoke 13 Third yoke 14 Fourth yoke 15 Bush 17 First yoke 18 Second yoke 19 Third yoke 20 Upper support mechanism 21 Guide roller 30 Lower support mechanism 31 Shaft mounting flange 32 Linear bearing 33 Shaft hole 34 Shaft 35 Bush holder 36 Ball bushing 37 air spring mounting flange 40 air spring 40a air hole 41 first air chamber 42 second air chamber 43 communication hole 50 vibration isolator 51 vibration isolator rubber 60 cover 61 dust bar 62 table stopper 63 stopper ring 63a convex portion Fourth step portion 71 laser displacement meter 72 upper duct 73 lower duct

Claims (3)

An exciting coil for generating a static magnetic field;
A yoke made of a ferromagnetic material for forming a magnetic circuit and a magnetic gap by a static magnetic field generated by the exciting coil;
A drive coil for generating vibration disposed in the magnetic gap;
A vibration table formed integrally with the drive coil,
A lower support mechanism is provided for receiving a shaft continuously provided downward at the center of the vibration table so as to be movable up and down at the upper center of the yoke.
An air spring is provided between the lower part of the shaking table and the upper part of the yoke to surround the lower support mechanism in an airtight state,
A static load of an electrodynamic vibration generator, wherein the first air chamber in the air spring and the second air chamber provided in the yoke are communicated with each other through a communication hole provided in the yoke. Holding device.   The static load holding device for an electrodynamic vibration generator according to claim 1, wherein an upper support mechanism is provided around the shaking table to suppress lateral shaking during vertical vibration of the shaking table.   The static load holding device for an electrodynamic vibration generator according to claim 1 or 2, wherein a lower end of the shaft can protrude into the second air chamber.

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