JP2015102689A5 - - Google Patents

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Publication number
JP2015102689A5
JP2015102689A5 JP2013243317A JP2013243317A JP2015102689A5 JP 2015102689 A5 JP2015102689 A5 JP 2015102689A5 JP 2013243317 A JP2013243317 A JP 2013243317A JP 2013243317 A JP2013243317 A JP 2013243317A JP 2015102689 A5 JP2015102689 A5 JP 2015102689A5
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JP
Japan
Prior art keywords
vibrating
beams
vibration
piezoelectric body
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013243317A
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English (en)
Japanese (ja)
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JP2015102689A (ja
JP6231361B2 (ja
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Publication date
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Priority to JP2013243317A priority Critical patent/JP6231361B2/ja
Priority claimed from JP2013243317A external-priority patent/JP6231361B2/ja
Publication of JP2015102689A publication Critical patent/JP2015102689A/ja
Publication of JP2015102689A5 publication Critical patent/JP2015102689A5/ja
Application granted granted Critical
Publication of JP6231361B2 publication Critical patent/JP6231361B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013243317A 2013-11-25 2013-11-25 振動素子および光走査装置 Expired - Fee Related JP6231361B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013243317A JP6231361B2 (ja) 2013-11-25 2013-11-25 振動素子および光走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013243317A JP6231361B2 (ja) 2013-11-25 2013-11-25 振動素子および光走査装置

Publications (3)

Publication Number Publication Date
JP2015102689A JP2015102689A (ja) 2015-06-04
JP2015102689A5 true JP2015102689A5 (cg-RX-API-DMAC10.html) 2017-01-12
JP6231361B2 JP6231361B2 (ja) 2017-11-15

Family

ID=53378420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013243317A Expired - Fee Related JP6231361B2 (ja) 2013-11-25 2013-11-25 振動素子および光走査装置

Country Status (1)

Country Link
JP (1) JP6231361B2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6802125B2 (ja) * 2017-08-24 2020-12-16 株式会社豊田中央研究所 振動ジャイロ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11212002A (ja) * 1998-01-23 1999-08-06 Seiko Epson Corp 空間光変調器および投写型表示装置
JP2006310577A (ja) * 2005-04-28 2006-11-09 Canon Inc 反射ミラー装置およびそれを用いた露光装置
WO2012115264A1 (ja) * 2011-02-25 2012-08-30 日本電気株式会社 光走査装置
WO2013161271A1 (ja) * 2012-04-23 2013-10-31 キヤノン電子株式会社 光走査装置及び画像読取装置

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