JP2015068731A - Magnetic medium optical inspection method and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To correct a change of sensor sensitivity with the passage of time to maintain high detection sensitivity, and to detect a defect by using a plurality of APD sensors calibrated for a difference in sensitivity between each sensor and maintaining almost equal detection sensitivity.SOLUTION: A magnetic medium optical inspection device according to the present invention is configured by including: a table unit for rotating a magnetic medium and also moving it in one direction; a laser irradiation unit for irradiating the surface of the magnetic medium with a laser from an inclined direction; a scattered light image formation unit for condensing scattered light surrounding the regular reflected light of a reflected light from the magnetic medium and forming an image of scattered light; an image detector for detecting the formed image of scattered light; signal processing means for processing a signal obtained by detecting the image of scattered light and detecting a defect on the surface of the magnetic medium; and a sensitivity correction unit for detecting a chronological change in the image detector on the basis of a signal obtained by detecting, with the image detector, the image of scattered light from a PSL of the magnetic medium coated with the PSL and correcting the sensitivity of the image detector.

Description

  The present invention relates to a method and apparatus for inspecting a magnetic medium (magnetic disk), and more particularly, to an optical inspection method and apparatus for a magnetic medium that optically inspects minute defects on the surface of the magnetic medium.

  An aluminum (Al) substrate or a glass substrate is used as the magnetic disk substrate. Depending on the application, crystallized glass (SX) or amorphous glass (MEL) is used as the glass substrate, and in each type of glass, a plurality of types of glass having different components are used.

  In the glass or aluminum substrate, a minute dent (pit) defect or a minute protrusion (bit) defect may occur on the surface of the substrate during the processing step. For magnetic media (magnetic disks) made by forming a magnetic film on a substrate, cleaning and polishing, diamond-like carbon (DLC) coating, heat treatment, etc. are performed in the post-sputtering process of the magnetic film. However, micro-defects may form on the surface during such surface treatment or transfer between processes, or fine dust and other dust may adhere to the substrate. The magnetic disk is likely to be rejected as a defective product in the final inspection process.

  Therefore, it is desirable to remove the substrate or magnetic media having a high probability of being defective as described above from the initial stage of the hard disk drive production line, that is, the media manufacturing process, in order to maintain a high yield of hard disk drive production. .

  In this optical inspection apparatus for detecting defects on magnetic media, as described in Patent Document 1, specularly reflected light is branched out of the reflected light of a laser that scans the surface and specularly reflected. There is a configuration including a scattered light receiving optical system that detects scattered light around the light. In Patent Document 1, a highly sensitive photomultiplier tube is used as a detector of the scattered light receiving optical system in order to detect minute defects.

  However, some highly sensitive light receiving elements of photomultiplier tubes have deterioration characteristics. At that time, characteristic defects may be distributed on a plurality of disks depending on the state of the production line, and in order to detect such defects reliably, it is necessary to correct the light receiving sensitivity according to the defects. is there. In other words, an optical inspection device for detecting defects on a substrate or magnetic media has a light receiving sensitivity that is dependent on the optical characteristics of the target defect depending on the characteristic optical characteristics of the defect according to the production line or the deterioration state of the light receiving element. A calibration function that maintains a certain level according to the characteristics may be required.

  Patent Documents 1 and 2 include a detection optical system that detects scattered light from a minute defect from a magnetic disk surface irradiated with a laser with an avalanche photodiode (APD) that is a highly sensitive detector. A magnetic disk inspection apparatus is described.

JP 2011-137721 A JP 2008-1111830 A

  During the production process of a magnetic disk, characteristic micro defects may be distributed over a plurality of disks depending on the state of the production line. In such a high-sensitivity optical inspection apparatus for detecting minute defects, the specularly reflected light is branched out of the reflected light of the laser irradiated on the disk, and the weak scattered light around the specularly reflected light is APD or the like. There is a configuration having a scattered light receiving optical system for detection using a highly sensitive photomultiplier tube.

  When weak scattered light is detected using such a high-sensitivity detector, it is necessary to adjust the sensitivity for each disc production lot or each specified production number in accordance with the optical characteristics of the target defect. In addition, when a photomultiplier tube such as APD is used as the light receiving element, the sensitivity changes over time due to deterioration of the light receiving element itself, so the light receiving sensitivity is maintained at a certain level by adjusting the applied voltage, etc. It is necessary to maintain accuracy.

  Patent Document 1 and Patent Document 2 describe using a high-sensitivity APD (Avalanche Photo Diode) sensor for the detection optical system, but the detection sensitivity of this APD sensor varies depending on the applied voltage. To do. If the applied voltage is not appropriate, the defect detection sensitivity will be low, or the sensitivity will be too high and the noise signal will increase, making it impossible to accurately detect defects on the surface of the magnetic disk. In order to maintain the detection sensitivity of the APD sensor adjusted in the initial state at a high level, it is necessary to correct the change in sensor sensitivity over time. However, neither Patent Document 1 nor Patent Document 2 describes correcting a change in sensor sensitivity over time.

  Patent Document 1 describes a defect inspection apparatus that simultaneously inspects both surfaces of a magnetic medium (magnetic disk). The detection sensitivity of the APD sensor used for this inspection generally has individual differences. When inspecting both sides of the magnetic media at the same time, the detection sensitivity of the APD sensor used for inspecting the front side surface and the APD sensor used for inspecting the back side surface should be kept at the first match. However, in Patent Document 1, there is no particular description about maintaining the detection sensitivity of the APD sensor that is initially fitted.

  The present invention makes it possible to maintain a high detection sensitivity by correcting changes in sensor sensitivity over time, and a plurality of APD sensors in which sensitivity differences between individuals are combined when a plurality of APD sensors are used simultaneously. The present invention provides an optical inspection method and apparatus for a magnetic medium using a highly sensitive APD sensor that can detect defects while maintaining substantially the same detection sensitivity.

  In order to solve the above-described problems, according to the present invention, an optical inspection apparatus for magnetic media has a magnetic film formed on the surface of a substrate, and particles having a known size are attached to the surface of the magnetic film. A table unit that mounts the magnetic medium and rotates the magnetic medium and moves it in one direction perpendicular to the central axis of rotation, and the surface of the magnetic medium that is rotated by the table unit and moves in one direction The laser irradiation part that irradiates the laser from the direction inclined to the surface and the specular reflection light out of the reflected light from the particle of a known size attached to the surface of the magnetic medium irradiated with the laser by this laser irradiation part is removed. A scattered light image forming unit that collects scattered light around the specularly reflected light to form an image of the scattered light, and a scattered light image from a particle of a known size formed by the scattered light image forming unit. An image detector to detect; A signal processing means for detecting defects on the surface of a magnetic medium by processing a signal obtained by detecting an image of scattered light from a particle of a known size by an image detector, and a size known by an image detector And a sensitivity correction unit that corrects the sensitivity of the image detector by detecting a change with time of the image detector based on a signal obtained by detecting an image of scattered light from the particles.

  In order to solve the above problems, according to the present invention, in an optical inspection method for magnetic media, a magnetic film is formed on a surface of a substrate, and particles having a known size are attached to the surface of the magnetic film. The magnetic media placed on the table is rotated and moved in one direction perpendicular to the center axis of rotation, and the magnetic media rotated in one direction is rotated by the table. Irradiate the laser from the direction inclined to the surface, remove the specularly reflected light from the particles of known size attached to the surface of the magnetic media irradiated with this laser, The scattered light is collected to form an image of the scattered light, and the scattered light image from the particle having a known size is detected by an image detector, and the particle having a known size is detected by the image detector. Obtained by detecting the image of scattered light from The signal is processed to detect defects on the surface of the magnetic media, and the image detector detects changes in the image detector over time based on the signal obtained by detecting the image of scattered light from particles of a known size. Detection was performed to correct the sensitivity of the image detector.

  According to the present invention, high detection sensitivity can be stably maintained by correcting changes in sensor sensitivity over time. Further, when a plurality of APD sensors are used at the same time, it becomes possible to detect defects while maintaining substantially the same detection sensitivity using a plurality of APD sensors combined with sensitivity differences between individuals.

  In addition, according to the present invention, it is possible to set and maintain the optimum light receiving element applied voltage corresponding to the surface state that changes depending on the production lot of the disk to be inspected. Even when a detector whose characteristics change with time, such as APD, is used by checking the change in the characteristics of the detector and adjusting the voltage applied to the detector. Accuracy and defect detection sensitivity can be maintained at a certain level, so that the pass / fail judgment of the product by the optical magnetic disk inspection device can be made stable in the magnetic disk test process. .

1 is a block diagram showing a schematic configuration of an optical inspection apparatus for magnetic media in an embodiment of the present invention. 1 is a block diagram showing a schematic configuration of a regular reflection light detection optical system and a low angle detection optical system of an optical inspection apparatus for magnetic media in an embodiment of the present invention. FIG. It is a front view of the 4-part dividing sensor of the regular reflection light detection optical system of the optical inspection apparatus of the magnetic media in one Example of this invention. 1 is a block diagram showing a schematic configuration of a high-angle detection optical system of an optical inspection apparatus for magnetic media in an embodiment of the present invention. FIG. It is a block diagram which shows the structure of the outline of the surface displacement measuring part of the optical inspection apparatus of the magnetic media in one Example of this invention. It is a top view of the disk of the magnetic media which is a sample. It is a flowchart which shows the method of correct | amending the sensitivity of the low angle detector of the optical inspection apparatus of the magnetic media in one Example of this invention. It is a graph which shows the relationship between the detection voltage of the low angle detector of the optical inspection apparatus of the magnetic media in one Example of this invention, and the number of detection defects (peak count number). It is a graph which shows the relationship between the peak output voltage of a defect detected with the low angle detector of the optical inspection apparatus of the magnetic media in one Example of this invention, and a peak count number. It is a graph which shows the relationship between the applied voltage and peak count number of the low angle detector of the optical inspection apparatus of the magnetic media in one Example of this invention.

  The present invention relates to a glass substrate or an aluminum substrate, or an apparatus for inspecting defects on the surface of a magnetic disk formed by forming a magnetic film thereon, and the substrate or the disk is irradiated with illumination (laser) light from the substrate. By detecting scattered light and adjusting the detection peak voltage of the target defect to a specified voltage, the measurement accuracy of the apparatus is kept at a certain level.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1A shows a schematic configuration of a disk surface defect inspection apparatus 1000 according to the present embodiment. A sample 1 to be inspected is a substrate for a magnetic disk, and is made of a glass material. As a sample, a glass substrate, an aluminum substrate, a magnetic disk, or the like can be used. The disk surface defect inspection apparatus 1000 simultaneously inspects both the front surface and the back surface of the sample 1.

  The disk surface defect inspection apparatus 1000 includes an illumination unit 100, a low angle detection optical system 200, a high angle detection optical system 300, an illumination unit 100 ′, a low angle detection optical system 200 ′, a high angle detection optical system 300 ′, and an A / D. A conversion unit 400, a processing unit 500, an input / output unit 600, a stage control unit 185, and an overall control unit 700 are provided.

  The illumination unit 100 irradiates the surface of the sample 1 with illumination light. The low-angle detection optical system 200 collects the light that is regularly reflected and scattered from the surface side of the sample 1 irradiated with the illumination light in a low-angle direction (a direction with a small angle with the normal direction of the surface of the sample 1). To detect. The high angle detection optical system 300 collects and detects light scattered from the surface side of the sample 1 in a high angle direction (a direction having a large angle with the normal direction of the surface of the sample 1).

  The illumination unit 100 ′ illuminates the back surface side of the sample 1 with illumination light. The mirror 101 converts the path of the illumination light to irradiate the back surface of the sample 1 with the illumination light emitted from the illumination unit 100 ′. The low-angle detection optical system 200 ′ collects the light that is regularly reflected and scattered in the low-angle direction (the direction with a small angle with the normal direction of the surface of the sample 1) from the back side of the sample 1 irradiated with the illumination light. To detect. The high angle detection optical system 300 ′ collects and detects light scattered from the back side of the sample 1 in a high angle direction (a direction with a large angle with the normal direction of the surface of the sample 1).

  The A / D converter 400 detects the respective analog detection signals output by detecting the regular reflection / scattered light from the sample 1 by the low angle detection optical systems 200 and 200 ′ and the high angle detection optical systems 300 and 300 ′. Is converted into a digital signal (A / D conversion). The processing unit 500 receives and processes signals from each detector converted by the A / D conversion unit 400. The input / output means 600 inputs the processing conditions of the processing unit 500 and outputs the processing result. The overall control unit 700 controls the entire disk surface defect inspection apparatus 1000. The stage controller 185 controls the stage means 180 that moves the sample 1 in one direction while placing and rotating the sample 1.

  The illumination means 100 and 100 ′ include a laser light source that outputs a laser having a desired wavelength.

  Since the low-angle detection optical systems 200 and 200 ′ and the high-angle detection optical systems 300 and 300 ′ have basically the same functions, the following description is a low-angle detection optical system that inspects the surface of the sample 1 200 and the high-angle detection optical system 300 will be described.

  The low-angle detection optical system 200 detects reflected / scattered light including specularly reflected light that has been irradiated by the illumination unit 100 and reflected / scattered on the surface of the sample 1 and advanced in the low-angle direction among the directions indicated by dotted lines. It is an optical system.

  As shown in FIG. 1B, the low-angle detection optical system 200 includes a regular reflection light detection system 210 including a mirror 201, an objective lens 203, a converging lens 204, a pinhole plate 205, and a regular reflection light detector 206. Yes.

  The mirror 201 of the regular reflection light detection system 210 reflects regular reflection light traveling in the low angle direction from the surface of the sample 1. The objective lens 203 condenses the regular reflection light reflected by the mirror 201. The converging lens 204 converges regular reflection light from the sample 1 collected by the objective lens 203. The pinhole plate 205 has a pinhole that is located at the convergence point of the regular reflection light by the converging lens 204 and allows the regular reflection light converged to pass therethrough, and blocks stray light other than the regular reflection light. The regular reflection light detector 206 detects the regular reflection light that has passed through the pinhole of the pinhole plate 205.

  As shown in FIG. 1B, the low angle detection optical system 200 further includes a first Fresnel lens 202, a second Fresnel lens 207, a pinhole plate 208, and a low angle detector 209.

  The first Fresnel lens 202 serves as an objective lens that collects scattered light around the specularly reflected light that has not been reflected by the mirror 201. The second Fresnel lens 207 serves as a converging lens that converges the light collected by the first Fresnel lens 202 (scattered light around the specularly reflected light from the sample 1). The pinhole plate 208 has a pinhole that is located at the convergence point of the second Fresnel lens 207 and allows the converged light to pass therethrough, and shields the unconverged light. The low angle detector 209 detects light that has passed through the pinhole plate 208.

  Here, as shown in FIG. 1C, the regular reflection light detector 206 is configured by a four-divided sensor in which the detection surface is divided into four detection elements 2061 to 2064. However, the regular reflection light detector 206 is not limited to a four-divided sensor, and may be a six-divided sensor or an eight-divided sensor. In FIG. 1C, the detection element is shown as a rectangle, but a quadrant sensor in which a circle is divided into four may be used.

  The high angle detection optical system 300 includes a Fresnel lens 301, a converging lens 302, a pinhole plate 303, and a high angle detector 304 as shown in FIG. 1D.

  The Fresnel lens 301 serves as an objective lens that collects scattered light that has been emitted from the illumination unit 100 and that has traveled in the high angle direction out of the light reflected and scattered by the surface of the sample 1. The converging lens 302 converges the light collected by the Fresnel lens 301. The pinhole plate 303 has a pinhole that is located at the convergence point of the converging lens 302 and allows the converged light to pass therethrough, and shields the unconverged light. The high angle detector 304 detects light that has passed through the pinhole plate 303.

  Analog signals output from the detectors 206, 209, and 304 that have detected the light reflected and scattered from the surface of the sample 1 are amplified by the A / D converters 401 to 403 of the A / D converter 400, respectively. D-converted and input to the processing unit 500. Similarly, the analog signals output from the low angle detection optical system 200 ′ and the high angle detection optical system 300 ′ that detect the light reflected and scattered by the back surface of the sample 1 are respectively A / D converted by the A / D converter 400. Amplified by the converters 401 ′ to 403 ′, A / D converted, and input to the processing unit 500.

  Processing of output signals from the low-angle detection optical system 200 and the high-angle detection optical system 300 for inspecting the surface of the sample 1 and a low-angle detection optical system 200 ′ for inspecting the back surface of the sample 1 performed by the processing unit 500 The processing of the output signal from the high angle detection optical system 300 ′ is the same processing. Therefore, the following description will explain processing of signals output from the low angle detection optical system 200 and the high angle detection optical system 300 that inspect the surface of the sample 1.

  The processing unit 500 includes a defect candidate detection unit 511, a defect candidate continuity determination unit 512, an uneven defect determination unit 513, a defect feature amount extraction unit 514, a defect classification unit 515, a defect distribution calculation unit 516, and a substrate quality determination unit 517. Yes.

  The defect candidate detection unit 511 receives the output signals from the detectors 206, 209 and 304 A / D converted by the A / D conversion unit 400 and detects defect candidates. The defect candidate continuity determination unit 512 uses the position information on the sample 1 where the defect candidates acquired from the stage control unit 185 and the stage 180 are detected for the defect candidates detected by the defect candidate detection unit 151. The connection / continuity of defect candidates is determined. The unevenness defect determination unit 513 receives the detection signal from the regular reflection light detector 206 and determines the unevenness defect on the surface of the sample 1.

  The defect feature amount extraction unit 514 extracts a defect feature amount for each defect candidate for which the defect candidate continuity determination unit 512 determines the connection / continuity and the unevenness defect determination unit 513 determines the defect unevenness. The defect classification unit 515 classifies the defect candidates for which the feature amount is obtained by the defect feature amount extraction unit 514 for each defect type based on the feature amount. The defect distribution calculation unit 516 obtains a distribution on the sample 1 for each defect type classified by the defect classification unit 515. The substrate quality determination unit 517 determines the quality of the sample 1 based on the number and distribution of defects for each defect type obtained by the defect distribution calculation unit 516.

  The processing unit 500 further outputs the output from the low-angle detector 209 that detects the reflected light from the correction disk by irradiating the correction disk coated with standard particles of known dimensions from the illumination unit 100. An APD application voltage determination unit 510 that determines a voltage to be applied to the low angle detector 209 based on the APD application voltage is provided.

  The processing unit 500 has a display screen 601 and is connected to an input / output means 600 that inputs inspection conditions and outputs inspection results. Further, the processing unit 500 and the input / output means 600 are connected to the overall control unit 700. The overall control unit 700 drives a stage unit 180 including a spindle unit 181 for placing the sample 1 and rotating the sample 1 and a rectilinear stage 182 movable in at least one axial direction within a plane in which the sample 1 rotates. The stage controller 185 to be controlled, the illumination unit 100, the processing unit 500, and the input / output unit 600 are controlled.

  With the above configuration, the overall control unit 700 controls the stage control unit 185 to drive and control the spindle unit 181 and the rectilinear stage 182 of the stage unit 180, thereby placing the stage unit 180 on the stage unit 180 as shown in FIG. The sample 1 is rotated in the θ direction, and starts moving at a constant speed in a direction perpendicular to the center of rotation (radius (r) direction of the sample 1).

  In this state, the surface of the rotating sample 1 placed on the stage unit 180 is irradiated with laser from the illumination unit 100, and is reflected / scattered on the surface of the sample 1 and is directed toward the Fresnel lens 201. The regular reflection light is detected by the regular reflection light detector 206, and the scattered light around the regular reflection light is detected by the low angle detector 209. Scattered light directed from the surface of the sample 1 toward the Fresnel lens 301 of the high-angle detection optical system 300 is detected by the first high-angle detector 304.

  By inspecting the surface of the sample 1 spirally from the inner periphery to the outer periphery of the sample 1 by moving the sample 1 straight while rotating the sample 1, the entire surface on the front side of the sample 1 can be inspected. it can.

  During the inspection, the surface displacement measuring unit 190 shown in FIG. 1E detects the reflected light of the light beam projected from the projector 191 on the surface of the sample 1 by the detector 192 having a plurality of pixels, and detects the reflected light at the detection position of the reflected light. A corresponding detection signal is output. The signal output from the detector 192 is processed by the overall control unit 700 to obtain the amount of variation in the height of the surface of the sample 1, and low angle detection is performed by an autofocus means (not shown) according to the obtained amount of variation. The height of the optical system 200 and the high angle detection optical system 300 with respect to the surface of the sample 1 is controlled. Thereby, it is possible to always perform a stable inspection.

  In this example, the configuration using the pinhole plates 205, 208, and 303 for shielding stray light in each of the low angle detection optical system 200 and the high angle detection optical system 300 has been described. It is not something that can be done. That is, in the case where the polarizing plate is inserted in the optical path of the laser emitted from the illumination light source 100 and the sample 1 is polarized and illuminated, a polarizing filter may be used instead of the pinhole plates 205, 208, and 303. Good.

  When a single wavelength laser is used as the laser emitted from the illumination light source 100, a wavelength selection filter may be used instead of the pinhole plates 205, 208, and 303. Further, it may be configured to use a polarizing filter and a wavelength selection filter in combination so as to pass light of a specific polarization component having a specific wavelength.

  Next, a correction method of the low angle detector 209 in the present embodiment will be described. The low-angle detector 209 includes a photomultiplier tube (PMT or Avalanche Photo Diode: APD) or MPPC (Multi-Ply) to detect weak scattered light from minute defects on the substrate or magnetic medium. -Use a highly sensitive detector such as Pixel Photon Counter.

  When a photomultiplier tube is used as such a highly sensitive detector, the photomultiplier tube converts incident light into electrons, amplifies it, and outputs it. The applied voltage to the photomultiplier tube is If it is used in a constant state, the sensitivity (amplification factor) has a characteristic that changes (deteriorates) over time. For this reason, in order to perform inspection while maintaining the defect detection sensitivity constant, it is necessary to control the voltage applied to the photomultiplier tube in response to the sensitivity deterioration. Further, in order to match the sensitivity of the photomultiplier tube used for the inspection of the surface of the magnetic disk and the photomultiplier tube used for the inspection of the back surface, it is necessary to control the voltage applied to the photomultiplier tube.

  On the other hand, the regular reflection light detector 206 is for measuring a change in the reflection angle of the regular reflection light with respect to the disk surface, and a quadrant sensor or the like with little deterioration in characteristics can be used. Therefore, the regular reflection light detector 206 does not need to perform sensitivity correction.

  In this embodiment, in order to control the voltage applied to the photomultiplier tube, which is the low angle detector 209, in the case where the same type of magnetic disk is continuously inspected, it is periodically or at an arbitrary timing. In addition, when inspecting different types of magnetic disks, the reference disk is transported to the tester prior to the inspection of the different types of magnetic disks, and the optical light receiving element is corrected. The calibration of the light receiving element is performed, and the test accuracy of the apparatus is configured to be kept constant regardless of the surface state of the disk and the deterioration state of the light receiving element. In addition, as a photomultiplier tube, a case where an APD array sensor (hereinafter simply referred to as APD) in which APDs are arranged in an array will be described in the following embodiments.

  As a specific correction method, a laser beam is irradiated on the surface of the magnetic disk while rotating the magnetic disk with a standard particle such as PSL (Polystyrene Latex) having a known size attached to the surface, and the PSL is Of the reflected light from the surface of the magnetic disk, the specularly reflected light is separated by the mirror 201 from the reflected light incident on the low-angle detection optical system 200, and scattered light around the specularly reflected light from which the specularly reflected light is separated. An image is formed, and this scattered light image is detected by a low angle detector (APD) 209. The detection signal output from the low angle detector (APD) 209 that has detected the scattered light image is A / D converted by the A / D converter 401 and input to the processing unit 500.

The detection signal input to the processing unit 500 is compared with a threshold value P _s set in advance by the APD applied voltage determination unit 510, and the detection signal having a level larger than the threshold value P _s indicates scattered light from the PSL on the disk surface. It is extracted as a detected signal. FIG. 4A shows an example in which the detection signal input to the processing unit 500 is plotted in relation to the signal count number (defect number) for each voltage level of the detection voltage corresponding to the peak value of each signal.

FIG. 4A shows two waveforms 441 and 442 when detected by changing the voltage applied to the APD. Actually, the frequency of occurrence of the extracted signal varies and does not have a smooth shape like the waveforms 441 and 442. In this case, the voltage level most frequently generated at the detection voltage higher than the threshold value P _s (the signal level at which the most defects are counted: P _{n for} the waveform 441 and P _{m for the} waveform 442) PSL detection signal level (voltage level) at the voltage applied to the APD at that time, and the number of detected defects at that time is the number of detected PSLs (N _n in the case of the waveform 441 and Nm in the case of the waveform 442 in the case of FIG. 4A). To do.

This is repeated while changing the voltage applied to the APD 209 to obtain a histogram distribution curve 410 (FIG. 4B) of detected peak voltages corresponding to the number of defects detected on the vertical axis and P _n and P _m of FIG. 4A on the horizontal axis. From this graph, the seek detected defect number _{N i} of when the detected peak voltage is defined voltage _{P 0,} obtains the voltage applied to APD209, adjusting the voltage applied to the control unit 700 in APD209. Regarding detection of PSL, depending on the diameter and scan pitch of the laser spot, a plurality of detection points may be generated for one PSL, so that a program process for linking the detection points is required.

Here, in the graph shown in FIG. 4A, the peak of the peak of the detection voltage histogram having a level larger than the threshold P _s (in the waveform 441, the point of the detection voltage P _n and the number of detected defects N _n , and in the waveform 442). In order to detect the detection voltage P _m and the number of detected defects N _m ), it is necessary to have a mechanism capable of performing the peak detection more quantitatively by applying a moving average to the histogram curve. Furthermore, in this method, since the ideal applied voltage cannot be specified by one measurement, it is necessary to repeat measurement and correction several times by forming a continuous sequence by software.

  FIG. 3 is a flowchart showing a correction method in this embodiment. A case where an APD is used as the low angle detector 209 will be described.

  First, a correction disk having PSL particles of a known size adhered to the surface is rotatably held on the spindle unit 181 of the disk surface inspection apparatus 1000 (S301). Next, the spindle unit 181 holding the correction disk is rotated. When the predetermined number of rotations is reached, a laser is irradiated onto the inspection target surface (here, the upper surface) of the correction disk (S302).

  Scattered light obtained by reflecting and removing specularly reflected light from the inspection target surface irradiated with the laser by the mirror 201 is detected by the low angle detector (APD) 209 of the low angle detection optical system 200 (S303). . At this time, the voltage applied to the low angle detector (APD) 209 is set to an initial voltage.

  The signal detected by the low angle detector (APD) 209 that is generated by the PSL attached to the inspection target surface of the correction disk and from which the specular reflection light has been removed is detected by the APD applied voltage determination unit of the processing unit 500. In 510, the signal is compared with a preset reference level, a signal having a peak level larger than the reference level is detected as a defect, and the number thereof is counted and stored (S304). The reference level to be compared with the detection signal in the APD applied voltage determination unit 510 uses a signal having the same level as the reference signal used for defect detection in the defect candidate detection unit 511, but is not necessarily the same level. By this S304, the waveform 441 or 442 of FIG. 4A is obtained.

Then it is determined whether the voltage applied to APD209 has reached a prescribed value _{P 0} (S305), (NO in S305). If not reached the predetermined value, by increasing the applied voltage APD209 (S306 ) And S303 are executed. On the other hand, (YES at S305) if the setting voltage of APD209 is judged to have reached the prescribed value _{P 0} in S305, the horizontal axis from the stored data, and the vertical axis the number of defects, the applied voltage in S304 A histogram distribution curve 410 of the detected peak voltage as shown in FIG. 4B is obtained from a plurality of avalanche curves 441 and 442 for each applied voltage as shown in FIG. 4A connecting the plotted points. Then, the correction value of the voltage applied to the APD 209 so that the detected peak voltage becomes P ₀ is determined (S307), and the voltage applied to the APD 209 is corrected (S308).

When the magnetic disk produced on the magnetic disk production line is sequentially inspected by the disk surface defect inspection apparatus 1000 while maintaining the initially applied voltage to the APD 209, the detection sensitivity of the APD 209 deteriorates with time. To go. As a countermeasure, the detection peak voltage is set to P ₀ by processing along the flow described with reference to FIG. The correction value of the voltage applied to the APD 209 is determined, and the voltage applied to the APD 209 is corrected.

  By controlling the voltage applied to the APD 209 by the method as described above, the inspection can be performed while maintaining the defect detection sensitivity constant, and the reliability of the inspection result can be maintained high.

  As another countermeasure method, the voltage applied to the APD 209 is controlled using a relationship such as a curve 420 shown in the graph of FIG. 4C obtained by plotting the relationship between the applied voltage to the APD 209 and the detected peak voltage. There is also a method.

Specifically, the peak level of the defect detection signal output from the APD 209 using a correction disk in which PSL particles having the same size as that used in the flow of FIG. (Corresponding to the detection voltage P _n , P _m ) of the defect, the detected voltage P _i of the defect detected by this monitoring is periodically or periodically applied to the applied voltage V _{i at} that time using the graph of FIG. 4C. Ask for. Next, a difference voltage (V ₀ −V _i ) from the applied voltage V ₀ set first in the graph of FIG. 4C is obtained. By adding the calculated difference voltage (V ₀ -V _i ) to the voltage currently applied to the APD 209, the detection peak voltage is reset to P ₀ and the detection sensitivity of the APD 209 is maintained. can do.

  Further, a correction disk in which PSL particles of a known size are attached to the surface for each type of magnetic disk to be inspected is created, and data as shown in FIGS. 4A to 4C is stored in the database of the processing unit 500. This makes it possible to cope with changes in the type of magnetic disk to be inspected.

  The processing as shown in FIG. 3 is executed for each type of magnetic disk to generate data as shown in the graphs of FIGS. 4A to 4C, and the voltage applied to the APD 209 by the method described above is used using this data. By controlling, it becomes possible to perform inspection while keeping the sensitivity of defect detection constant, and the reliability of the inspection result can be maintained high.

  In the disk surface defect inspection apparatus 1000 shown in FIG. 1A, the processing flow described in FIG. 3 is performed for the low-angle detection optical system 200 on the front side and the low-angle detection optical system 200 ′ on the back side of the magnetic disk in FIG. By obtaining a plurality of avalanche curves for each applied voltage as shown, and adjusting each APD 209 based on the relationship shown in the graph of FIG. 4B created therefrom, the front side low angle detection optical system 200 and the back side The sensitivity can be adjusted to be equal to that of the low angle detection optical system 200 ′.

  According to the present embodiment, it is possible to stably maintain high detection sensitivity by correcting the change in sensor sensitivity over time. Further, when a plurality of APD sensors are used simultaneously in an inspection apparatus that inspects both surfaces of a magnetic disk at the same time, a plurality of APD sensors combined with sensitivity differences between individuals are used to maintain substantially the same detection sensitivity and to detect defects. Detection is now possible.

  In addition, according to the present embodiment, it is possible to set and maintain the optimum light receiving element applied voltage corresponding to the surface state that changes depending on the production lot of the disk to be inspected. Even when a detector whose characteristics change with time, such as APD, is used by checking the change in the characteristics of the detector and adjusting the voltage applied to the detector. Accuracy and defect detection sensitivity can be maintained at a certain level, so that the pass / fail judgment of the product by the optical magnetic disk inspection device can be made stable in the magnetic disk test process. .

  As mentioned above, although the invention made by the present inventor has been specifically described based on the embodiments, it is needless to say that the present invention is not limited to the above embodiments and can be variously modified without departing from the gist thereof. Yes.

  DESCRIPTION OF SYMBOLS 1 ... Sample 100, 100 '... Illuminating means 180 ... Stage means 200, 200' ... Low angle detection optical system 206 ... Regular reflection light detector 209 ... Low angle detector 300 , 300 '... high angle detection optical system 400 ... A / D conversion unit 500 ... processing unit 600 ... input / output unit 700 ... overall control unit.

Claims (8)

A magnetic film is formed on the surface of the substrate, and a magnetic medium having particles of a known size attached to the surface of the magnetic film is placed on the surface to rotate the magnetic medium and perpendicular to the central axis of rotation. A table part that moves in one direction,
A laser irradiation unit configured to irradiate a laser from a direction inclined to the surface of the magnetic medium rotated by the table unit and moving in the one direction;
The specularly reflected light is removed from the reflected light from particles of a known size adhered to the surface of the magnetic medium irradiated with the laser by the laser irradiation unit, and the scattered light around the specularly reflected light is collected. A scattered light image forming unit that forms an image of the scattered light by light;
An image detector for detecting an image of scattered light from the particle having a known size formed by the scattered light image forming unit;
Signal processing means for detecting a defect on the surface of the magnetic medium by processing a signal obtained by detecting an image of scattered light from a particle having a known size with the image detector;
Based on a signal obtained by detecting an image of scattered light from a particle having a known size by the image detector, a change with time of the image detector is detected to correct the sensitivity of the image detector. An optical inspection apparatus for magnetic media, comprising a sensitivity correction unit.   The optical inspection apparatus for magnetic media according to claim 1, wherein the sensitivity correction unit detects an image of the scattered light from a particle having a known size attached to the surface of the magnetic media. An optical system for a magnetic medium, characterized in that the sensitivity of the image detector is corrected by detecting a change with time of the image detector based on a plurality of signals obtained by detecting the detector under different detection conditions. Inspection device.   3. The optical inspection apparatus for magnetic media according to claim 1, wherein the image detector is an APD array sensor in which APDs are arranged in an array.   The optical inspection apparatus for magnetic media according to claim 1 or 2, wherein the laser irradiation unit, the scattered light image forming unit, and the image detector are surfaces of the magnetic medium placed on the table unit. An optical inspection apparatus for magnetic media, wherein the optical inspection apparatus is disposed on the back side and the back side. A magnetic medium having a magnetic film formed on the surface of the substrate and particles having a known size adhered to the surface of the magnetic film is placed on the table portion, and the magnetic medium is rotated and rotated at the central axis. Move it in a direction perpendicular to it,
Irradiating the laser from a direction inclined to the surface of the magnetic medium rotated by the table portion and moving in the one direction;
The specularly reflected light is removed from the reflected light from particles of a known size attached to the surface of the magnetic medium irradiated with the laser, and the scattered light around the specularly reflected light is collected to Forms an image of scattered light,
An image detector detects an image of scattered light from the particle having the known size formed,
Processing the signal obtained by detecting the image of the scattered light with the image detector to detect defects on the surface of the magnetic media;
Based on a signal obtained by detecting an image of scattered light from a particle having a known size by the image detector, a change with time of the image detector is detected to correct the sensitivity of the image detector. An optical inspection method for magnetic media.   6. The optical inspection method for a magnetic medium according to claim 5, wherein the sensitivity is corrected when the magnetic medium having a particle having a known size attached thereto is used as the magnetic medium. Detecting a change with time of the image detector based on a plurality of signals obtained by detecting a detection condition of the image detector for detecting a light image, and correcting the sensitivity of the image detector. An optical inspection method for magnetic media.   7. The optical inspection method for magnetic media according to claim 5, wherein the image detector is an APD array sensor in which APDs are arranged in an array.   The optical inspection method for a magnetic medium according to claim 5 or 6, wherein irradiating the laser, forming the scattered light image, and detecting the scattered light image with an image detector, An optical inspection method for a magnetic medium, which is performed simultaneously on the front surface side and the back surface side of the magnetic medium placed on the table portion.

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