JP2015068491A - Air passage opening/closing valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air passage opening/closing valve capable of driving an opening/closing valve mechanism disposed on a middle portion of an air passage to be closed, when a fluid pressure of a monitoring object becomes a prescribed pressure or more.SOLUTION: An air passage opening/closing valve (1) opens and closes an air passage for detection through a valve element receiving a fluid pressure of a monitoring object, and the air passage opening/closing valve (1) includes a valve case (2), an air passage (3) for detection formed on the valve case (2) where pressurized air is supplied to a first port (3a) at one end portion, and a second port (3d) at the other end portion is opened to the atmospheric air, an opening/closing valve mechanism (4) capable of opening and closing a middle portion of the air passage (3) for detection, a compression spring (5) for biasing a valve element (4A) of the opening/closing valve mechanism (4) in a valve opening direction, a valve closing mechanism (6) capable of closing the opening/closing valve mechanism (4) against biasing force of the compression spring (5) by making the fluid pressure of the monitoring object supplied from the external act on the valve element (4A) of the opening/closing valve mechanism (4), and a biasing force adjustment mechanism (22) capable of adjusting the biasing force of the compression spring (5).

Description

  The present invention relates to an air passage opening / closing valve that opens and closes a detection air passage, and more particularly to an air passage opening / closing valve that maintains a closed state when a fluid pressure to be monitored is equal to or higher than a predetermined pressure.

  An air passage is formed inside the case member of the fluid pressure device, pressurized air for detection is supplied to one end of the air passage, the other end of the air passage is held open to the atmosphere, and a middle portion of the air passage An open / close valve that opens and closes the open / close valve is closed, and when the position of the movable member of the fluid pressure device changes, the open / close valve is closed, and a change in the air pressure on one end side of the air passage is detected. Techniques for detecting changes in position are known.

  On the other hand, a pilot-type on-off valve that opens and closes a fluid passage, which is driven to open by a spring and is driven to close by a pilot fluid pressure, is also known.

  For example, Patent Document 1 discloses a check valve integrated pressure switching valve device. The on-off valve device includes an on-off valve that opens and closes a refrigerant passage for high-pressure refrigerant, a diaphragm actuator connected to the high-pressure valve body of the on-off valve, and a pressure equalizing hole that guides the high-pressure refrigerant in the refrigerant passage to the inner surface side of the diaphragm actuator. When the supply of the high-pressure refrigerant stops, the on-off valve is closed by the diaphragm actuator, and when the supply of the high-pressure refrigerant continues, the high-pressure refrigerant introduced from the pressure equalizing hole Reduce the driving force and open the on-off valve.

  Patent Document 2 discloses a pilot type on-off valve that is a pilot type on-off valve as a water supply valve and includes a solenoid actuator.

JP 2005-315444 A JP 2008-196669 A

There is a technical need to monitor whether or not the hydraulic pressure in a specific oil chamber is maintained at a predetermined pressure or higher in a fluid pressure device such as a clamping device for clamping a workpiece.
Since the on-off valve devices of Patent Documents 1 and 2 employ a diaphragm actuator, the on-off valve cannot be configured to open and close using the fluid pressure to be monitored.

  Here, it is conceivable to attach a hydraulic pressure sensor for detecting the hydraulic pressure of the specific oil chamber to the fluid pressure device. However, it is necessary to modify the existing fluid pressure device to attach the hydraulic pressure sensor. Is also expensive, which is disadvantageous in terms of production costs. Moreover, since a lead wire is connected to the hydraulic pressure sensor, a failure is likely to occur.

  An object of the present invention is to provide an air passage opening / closing valve configured to drive the opening / closing valve mechanism interposed in the middle of the air passage when the fluid pressure to be monitored exceeds a predetermined pressure. .

  An air passage opening / closing valve according to claim 1 is an air passage opening / closing valve that opens and closes a detection air passage via a valve body that receives a fluid pressure to be monitored, the valve case and a detection formed in the valve case. A detection air passage in which pressurized air is supplied to one end and the other end is opened to the atmosphere, an on-off valve mechanism capable of opening and closing a middle portion of the detection air passage, A compression spring that biases the valve body of the on-off valve mechanism in the valve opening direction, and a fluid pressure to be monitored supplied from the outside acts on the valve body of the on-off valve mechanism to resist the biasing force of the compression spring And a valve closing mechanism capable of closing the opening / closing valve mechanism.

  The air passage opening / closing valve according to claim 2 is characterized in that, in the invention according to claim 1, an urging force adjusting mechanism capable of adjusting an urging force of the compression spring is provided in the valve case.

  According to a third aspect of the present invention, there is provided the air passage opening / closing valve according to the first or second aspect, wherein the valve case communicates with a spring accommodating hole for accommodating the compression spring and one end of the spring accommodating hole, and the valve body is movable. And a valve body housing hole for housing the housing.

  According to a fourth aspect of the present invention, in the invention according to the third aspect, the valve case includes a first port at one end of the air passage, a second port at the other end of the air passage, and the valve closing. It is characterized by comprising a port forming member in which a fluid pressure introducing hole of the mechanism is formed.

  According to the first aspect of the present invention, a valve case, a detection air passage formed in the valve case, an on-off valve mechanism capable of opening and closing a middle portion of the detection air passage, and a valve body of the on-off valve mechanism A compression spring that urges the valve in the valve opening direction, and the fluid pressure to be monitored supplied from the outside acts on the valve body of the on-off valve mechanism to close the on-off valve mechanism against the urging force of the compression spring. A valve-closing valve mechanism, so that it is possible to detect that the on-off valve mechanism is closed from the air pressure at one end of the detection air passage, and the monitoring fluid pressure is equal to or higher than a predetermined pressure. This can be detected via the air pressure.

  According to the invention of claim 2, since the urging force adjusting mechanism capable of adjusting the urging force of the compression spring is provided in the valve case, the versatility of the air passage opening / closing valve is enhanced.

  According to a third aspect of the present invention, the valve case includes a spring accommodating hole that accommodates the compression spring, and a valve element accommodating hole that communicates with one end of the spring accommodating hole and movably accommodates the valve element. Therefore, it is advantageous in manufacturing the air passage opening / closing valve.

  According to the invention of claim 4, the valve case includes a first port at one end of the air passage, a second port at the other end of the air passage, and a fluid pressure introduction hole of the valve closing mechanism. Since the formed port forming member is provided, it is advantageous in manufacturing the air passage opening / closing valve.

It is a top view of the air passage on-off valve concerning Example 1 of the present invention. It is the II-II sectional view taken on the line of FIG. 1 in a valve opening state. FIG. 3 is a view corresponding to FIG. 2 in a closed state. It is the IV-IV sectional view taken on the line of FIG. It is sectional drawing, such as a work pallet in the work preparation station which concerns on Example 2 of this invention. It is sectional drawing, such as a work pallet in a work processing station. It is a top view of a pilot type check valve with an air passage on-off valve. It is a left view of the pilot type check valve of FIG. It is a longitudinal cross-sectional view (hydraulic distribution state) of the pilot type check valve of FIG. It is a longitudinal cross-sectional view (valve closed state) of the pilot type check valve of FIG. It is a longitudinal cross-sectional view (valve open state) of the pilot type check valve of FIG. FIG. 6 is a hydraulic / pneumatic circuit diagram (unclamp operation state) of the work pallet and its peripheral devices in FIG. 5. FIG. 6 is a hydraulic / pneumatic circuit diagram (clamping operation state) of the work pallet of FIG. 5 and its peripheral devices.

  Hereinafter, modes for carrying out the present invention will be described based on examples.

The air passage opening / closing valve according to this embodiment will be described.
As shown in FIGS. 1 to 4, the air passage opening / closing valve 1 is an air passage opening / closing valve that opens and closes the detection air passage 3 via a valve body that receives a fluid pressure to be monitored.
The air passage opening / closing valve 1 includes a valve case 2, a detection air passage 3 formed in the valve case 2, an opening / closing valve mechanism 4, a compression spring 5, and a valve closing mechanism 6. In the following description, “fluid pressure” may mean “pressurized fluid”.

The valve case 2 is formed in a short cylindrical shape, but may be formed in a shape other than this shape. The valve case 2 includes a case main body 2a and a circular plate-shaped port forming member 2b fitted from below into a circular concave portion 7 in a lower end side portion of the case main body 2a. The port forming member 2b is configured to be fixed to the case main body 2a by two bolts 8.
Two vertical bolt holes 9 are formed in the valve case 2 in a penetrating manner. The bolt (2) is inserted into the two bolt holes 9 with the valve case 2 placed on the base member 10 of the external device. The valve case 2 is fixed to the base member 10 by an illustration (not shown).

The port forming member 2b is formed with a first port 3a at one end of the air passage 3, a second port 3d at the other end of the air passage 3, and a fluid pressure introducing hole 6a of the valve closing mechanism 6. .
Seal members 11 are attached to the upper and lower ends of the first and second ports 3a and 3d, and the seal member 11 is also attached to the lower end of the fluid pressure introduction hole 6a.

  A flat valve housing hole 13 having a circular shape in plan view is formed in the lower end portion of the central portion of the case main body 2a, and a vertical spring housing hole continuous with the upper end of the valve body housing hole 13 is formed in the central portion of the case main body 2a. 14 is formed. The valve element 4A of the on-off valve mechanism 4 includes a disc part 4a that is movably accommodated in the valve element accommodating hole 13, a projecting part 4b that projects upward from the center of the upper end of the disc part 4a, and a disc part. And a rod-shaped pressure receiving portion 4c that extends downward from the central portion of the lower end of 4a and is inserted into the fluid pressure introducing hole 6a. The outer peripheral side of the pressure receiving portion 4 c is sealed with a seal member 12.

  The thickness of the disc portion 4 a is slightly smaller than the height of the valve body accommodation hole 13, and the diameter of the disc portion 4 a is set slightly smaller than the diameter of the valve body accommodation hole 13.

  The detection air passage 3 includes a first port 3a, an upstream air passage 3b, a part of the valve body accommodation hole 13, a part of the spring accommodation hole 14, a downstream air passage 3c, and a second port. 3d is a continuous passage. The first port 3 a is connected to the first air passage 15 of the base member 10, and the first air passage 15 is connected to the pressurized air supply source 17 via the external air passage 16. A sensor 18 or a pressure switch is connected, and the pressurized air supply source 17 and the air pressure sensor 18 are electrically connected to the control unit 19.

The second port 3d is connected to the second air passage 20 of the base member 10, and the second air passage 20 is opened to the atmosphere via or without an external air passage.
The fluid pressure introduction hole 6a is connected to the fluid pressure supply passage 21 of the base member 10, and the fluid pressure supply passage 21 is supplied with a fluid pressure (hydraulic pressure or pressurized air) to be monitored from an external fluid pressure device.

The on-off valve mechanism 4 is configured to be able to open and close a middle portion of the detection air passage 3.
The on-off valve mechanism 4 includes a valve body housing hole 13, a valve body 4A, a valve seat 4d formed on the upper end wall of the valve body housing hole 13 where the upstream air passage 3b is opened, and an upper end surface of the valve body 4A. The valve seat 4d is provided with a valve face 4e that is formed close to and opposite to the valve seat 4d. When the valve surface 4e is separated from the valve seat 4d, the valve is opened, and when the valve surface 4e is in close contact with the valve seat 4d, the valve is closed. The compression spring 5 is accommodated in the spring accommodation hole 14 in a compressed state, and this compression spring 5 biases the valve body 4A of the on-off valve mechanism 4 in the valve opening direction (downward).

  The valve case 2 is provided with an urging force adjusting mechanism 22 that can adjust the urging force of the compression spring 5. The urging force adjusting mechanism 22 includes a screw hole 23 in the upper end wall of the spring accommodation hole 14, a screw member 24 that is attached to the screw hole 23 so as to be able to advance and retreat in the vertical direction, and a screw near the upper end of the spring accommodation hole 14. It has a spring receiving member 25 sandwiched between the lower end of the member 24 and the upper end of the compression spring 5. An operation hole 24 a for engaging a hexagon wrench is formed at the upper end of the screw member 24.

  The valve closing mechanism 6 opens and closes the fluid pressure to be monitored supplied from the fluid pressure supply passage 21 to the fluid pressure introducing hole 6 a on the valve body 4 </ b> A of the opening / closing valve mechanism 4 against the urging force of the compression spring 5. The valve mechanism 4 can be closed.

Next, the operation and effect of the air passage opening / closing valve 1 will be described.
When pressurized air is supplied from the pressurized air supply source 17 to the first port 3a of the detection air passage 3 via the external air passage 16, and the on-off valve mechanism 4 is in the open state, the pressurized air Is discharged from the second port 3d.
When the pressure of the fluid pressure to be monitored is less than the predetermined pressure, as shown in FIG. 2, the on-off valve mechanism 4 keeps the valve open state, so the air pressure sensor 18 detects the pressure “low”, The control unit 19 detects that the fluid pressure to be monitored is less than a predetermined pressure.

  When the pressure of the fluid pressure to be monitored becomes equal to or higher than a predetermined pressure, as shown in FIG. 3, the on-off valve mechanism 4 maintains the closed state, so that the air pressure sensor 18 detects the pressure “high” and the control unit 19 It is detected that the fluid pressure to be monitored is equal to or higher than a predetermined pressure. In this way, it is possible to detect that the pressure of the fluid pressure to be monitored is equal to or higher than the predetermined pressure via the air pressure sensor 18 or the pressure switch, which is less expensive than the hydraulic sensor, without using the hydraulic sensor.

  Since the urging force adjusting mechanism 22 capable of adjusting the urging force of the compression spring 5 is provided, the versatility of the air passage opening / closing valve 1 is enhanced. The valve case 2 includes a spring accommodating hole 14 that accommodates the compression spring 5 and a valve element accommodating hole 13 that communicates with one end of the spring accommodating hole 14 and movably accommodates the valve element 4A. This is advantageous in manufacturing the on-off valve 1.

  The valve case 2 includes a first port 3 a at one end of the detection air passage 3, a second port 3 d at the other end of the detection air passage 3, and a fluid pressure introduction hole 6 a of the valve closing mechanism 6. Since the port forming member 2b is provided, the first and second ports 3a and 3d and the fluid pressure introducing hole 6a can be efficiently machined, which is advantageous in manufacturing the air passage opening / closing valve 1.

  A pilot check valve 100 with an air passage opening / closing valve to which the present invention is applied, a work pallet 30 incorporating the pilot check valve 100 and its peripheral devices will be described. As shown in FIG. 5, the work pallet 30 includes one or a plurality of clamping devices 31 for clamping the work W, and a pilot check valve 100 with an air passage opening / closing valve.

  FIG. 5 is a diagram illustrating a state in which the work pallet 30 is set in a work preparation station that attaches / detaches the work W to / from the work pallet 30. FIG. 6 is a diagram illustrating a state in which the work pallet 30 is set in a work processing station that performs machining on the work. In this embodiment, the clamping hydraulic pressure in the clamping oil chamber 31a (see FIGS. 12 and 13) of the clamping device 31 corresponds to the “monitored fluid pressure”. “Hydraulic pressure” may mean “pressurized oil”.

  As shown in FIG. 5, the work pallet 30 includes a pallet main body 32, a clamp device 31, a work support member 33, a pilot check valve 100 with an air passage opening / closing valve, an air passage connection coupler 34, and a hydraulic passage. The couplers 35 and 36 for connection and the annular engagement member 52 of the clamp device 50 for fixing the work pallet are provided. In FIG. 5, PA indicates pressurized air supplied from the pressurized air supply source 37, CL indicates clamping hydraulic pressure supplied from the hydraulic pressure supply source 39, and UCL is supplied from the hydraulic pressure supply source 39. Indicates unclamping hydraulic pressure.

  The clamp device 31 includes an output member 31a driven up and down by a hydraulic cylinder, a clamp arm 31b fixed to the upper end portion of the output member 31a, and a turning mechanism for turning the output member 31a by 90 ° when the output member 31a is raised and lowered. (Not shown). Various clamping devices can be adopted as the clamping device 31.

  In the work preparation station, the work pallet 30 is placed on the base member 41 and fixed by a plurality of work pallet fixing clamp devices 50. The clamp device 50 includes a clamp mechanism 51 mounted on the base member 41 and an annular engagement member 52 mounted on the work pallet 30. The base member 41 is provided with a pressurized air passage 42 and its coupler 43, a clamping oil passage 44 and its coupler 45, an unclamping oil passage 46 and its coupler 47.

  The clamp mechanism 51 on the base member 41 includes a clamp main body 53, an output member 54 including a piston portion 54a that can be moved up and down in a cylinder hole of the clamp main body 53, and an output rod 54b that extends upward from the piston portion 54a. The unclamping oil chamber 55 formed on the lower side of the piston portion 54a, the disc spring laminated body 56 accommodated in a compressed state in the annular accommodating chamber on the upper side of the piston portion 54a, the ball lock mechanism 57, and the annular engagement A horizontal positioning mechanism 58 for positioning the member 52 in the horizontal direction, a seating surface 59 for seating the annular engagement member 52 (formed at the upper end of the clamp body 53), and an air passage for supplying pressurized air for cleaning 60 (which is connected to a pressurized air supply source 37), an air passage 61 for pressurized air for seating detection, and a hydraulic pressure supply source 39. An oil pressure passage 62.

  The ball lock mechanism 57 includes a plurality of steel balls 63 mounted in a plurality of horizontal holding holes formed in the upper part of the cylindrical portion 53 a of the clamp body 53, and an output rod 54 b corresponding to the plurality of steel balls 63. And a plurality of formed engaging recesses 64. The annular engagement member 52 includes an annular tapered surface 65 formed in the vicinity of the outer periphery of the upper end of the central hole. The ball lock mechanism 57 fixes the annular engagement member 52 by pressing the annular tapered surface 65 downward with a plurality of steel balls 63.

  In the clamp device 50, the output member 54 is moved upward by the hydraulic pressure supplied to the unclamping oil chamber 55, and the steel ball 63 is partially retracted to the engagement recess 64, so that the steel ball 63 is engaged with the annular tapered surface 65. It will not match and will be in an unclamped state. When the hydraulic pressure of the unclamping oil chamber 55 is released and the output member 54 is lowered by the elastic force of the disc spring laminated body 56, the steel ball 63 is pushed outward by the output rod 54 b and is engaged with the annular tapered surface 65. And it will be in a clamped state in order to press the annular taper surface 65 below.

  The horizontal positioning mechanism 58 includes an annular tapered surface 58a formed on the outer peripheral surface of the lower portion of the cylindrical portion 53a and having a smaller diameter as it extends upward. The annular engagement member 52 has an annular elastic wall portion 58b formed on the annular engagement member 52 so as to be fitted and closely attached to the annular tapered surface 58a, and an annular shape formed on the outer peripheral side of the annular elastic wall portion 58b. And a groove 58c. The annular groove 58c may be filled with a synthetic resin material that is soft and excellent in elasticity to prevent foreign matter from entering.

  In the clamped state, the annular elastic wall portion 58b is elastically deformed in the diameter increasing direction, the annular elastic wall portion 58b is brought into close contact with the annular tapered surface 58a, and the annular engagement member 52 is positioned with high accuracy in the horizontal direction. Is done. At this time, the lower end surface of the annular engagement member 52 is in close contact with the seating surface 59 and is positioned with high accuracy in the vertical direction.

  Pressurized air is supplied to the air nozzle 61a opened on the seating surface 59 of the clamp body 53 through the air passages 42 and 61, and the air passage 42 is connected to the pressurized air supply source 37 through the external air passage 42a. The air pressure sensor 38 is connected to the external air passage 42 a, and the pressurized air supply source 37 and the air pressure sensor 38 are electrically connected to the control unit 40. Therefore, the seating of the work pallet 30 can be detected via the air pressure detected by the air pressure sensor 38.

  Pressurized air is supplied from the air passage 42 through the couplers 43 and 34 and the air passage 34a to the air nozzle 33b opened on the work seating surface 33a of the work support member 33 of the work pallet 30 and is detected by the air pressure sensor 38. The seating of the workpiece W can be detected via the air pressure.

  The first hydraulic port 101 of the pilot check valve 100 can supply / discharge hydraulic pressure from the hydraulic supply source 39 via the oil passage 44, the couplers 45 and 35, and the oil passage 35a. The first hydraulic port 101 can be connected to the second hydraulic port 102 via an oil passage in the check valve 100, and the second hydraulic port 102 is connected to the clamp oil chamber 31a of the clamp device 31 by an oil passage 35b. .

  The pilot port 103 of the check valve 100 is connected to the unclamping oil chamber 31b of the clamping device 31 by an oil passage 36a. The oil passage 36a is connected to the oil pressure supply source 39 through the oil passage 36b, the couplers 36 and 47, and the oil passage 46. It is connected to the.

  As described above, in the workpiece preparation station, the clamp device 31 is clamp-driven, and the clamp device 50 of the base member 41 is released in a state where the workpiece W is clamped, and the couplers 45, 35, 47, 36, 43, and 34 are released. Then, the work pallet 30 is conveyed onto the table 70 of the machining center of the work processing station shown in FIG. 6, and the work pallet 30 is fixed by the clamping device 50A equipped on the table 70. At the same time, the coupler 34 is connected to the coupler 71 of the table 70. Note that the hydraulic pressure charged in the clamp oil chamber 31a of the clamp device 31 is blocked by the pilot check valve 100, so that the clamp state can be maintained even if the couplers 45, 35, 47, and 36 are separated. .

  Since the clamp device 50A provided on the table 70 is the same as the clamp device 50, the description thereof is omitted. Pressurized air is supplied from the pressurized air supply source 37A to the air nozzle 61aA opened on the seating surface 59A via the external air passage 72a and the air passage 72, and an air pressure sensor 38A is connected to the external air passage 72a. The pressurized air supply source 37A and the air pressure sensor 38A are electrically connected to the control unit 40A. Therefore, the seating of the work pallet 30 on the seating surface 59A can be confirmed by the air pressure sensor 38A and the control unit 40A.

  Next, the pilot type check valve 100 with an air passage opening / closing valve will be described with reference to FIGS. The air passage opening / closing valve 80 is an air passage opening / closing valve that opens and closes the detection air passage 82 via a valve body 84 that receives the monitored hydraulic pressure, and is similar to the air passage opening / closing valve of the first embodiment. A brief explanation.

  The air passage opening / closing valve 80 is a valve case 81 and a detection air passage 82 formed in the valve case 81, and pressurized air is supplied to the first port 82 a at one end and the first air passage 82 at the other end. The detection air passage 82 in which the two ports 82b are opened to the atmosphere, the on-off valve mechanism 83 that can open and close the middle portion of the detection air passage 82, and the compression that biases the valve body 84 of the on-off valve mechanism 83 in the valve opening direction The hydraulic pressure (fluid pressure to be monitored) of the spring 85 and the clamp oil chamber 31 a of the clamp device 31 is applied to the valve body 84 of the on-off valve mechanism 83 to close the on-off valve mechanism 83 against the urging force of the compression spring 85. And a valve closing mechanism 86 capable of being valved. A hydraulic pressure having the same pressure as that of the clamp oil chamber 31 a of the clamp device 31 is introduced into the hydraulic pressure introduction hole 86 a (fluid pressure introduction hole) of the valve closing mechanism 86. In the air passage opening / closing valve 80, when the oil pressure in the oil pressure introduction hole 86a is equal to or higher than a predetermined pressure, the valve closing state is maintained.

  The valve case 81 is provided with an urging force adjusting mechanism 87 capable of adjusting the urging force of the compression spring 85 via a screw member 87a. The valve case 81 includes a spring accommodating hole 88 that accommodates the compression spring 85, and a valve element accommodating hole 89 that communicates with one end of the spring accommodating hole 88 and accommodates the valve element 84 movably in the left-right direction. A first port 82a communicating with the valve body accommodating hole 89 and a second port 82b communicating with the spring accommodating hole 88 and opened to the atmosphere are formed. The first port 82 a communicates with the air passage 34 b in the work pallet 30. The valve case 81 of the air passage opening / closing valve 80 is fixed to the valve case 104 with four bolts 90 in a state where the valve case 81 is in contact with one end surface of the valve case 104 of the pilot check valve 100.

Next, the pilot type check valve 100 will be described.
As shown in FIGS. 7 to 11, the pilot type check valve 100 includes a valve case 104, an accommodation hole 105 formed in the valve case 104, a check valve mechanism 106 and a pilot mechanism accommodated in the accommodation hole 105. 107, an auxiliary valve case 108, a first hydraulic port 101, a second hydraulic port 102, and a pilot port 103 are provided. The check valve mechanism 106 includes a check valve case 109, a valve body 110, and a compression spring 111 that urges the valve body 100 in the valve closing direction. The valve case 104 is fixed to the work pallet 30 by four bolts 91.

  The check valve case 109 has a housing recess 109a, a central hole 109b formed in a wall on one end of the housing recess 109a, and a first hole that is formed in communication with the first hydraulic port 101 and communicates with the center hole 109b. A transverse oil passage 112, a second transverse oil passage 113 formed in communication with the second hydraulic port 102 and communicated with the accommodating recess 109a, and an annular valve formed in a protruding shape on the inner peripheral side of the central hole 109b And a seat 114. A first annular filter 112a facing the first transverse oil passage 112 and a second annular filter 113a facing the second transverse oil passage 113 are also mounted.

  The valve body 110 has a valve surface 110a formed of an annular member made of synthetic resin, and a plurality of passage grooves 110b formed on the outer peripheral portion. The valve body 110 is movably mounted in the axial direction in the housing recess 109a. The compression spring 111 is attached to the recess 108a of the auxiliary valve case 108 and the recess 110c of the valve body 110 in a compressed state to urge the valve body 110 in the valve closing direction. The recesses 108 a and 110 c communicate with the second transverse oil passage 113, communicate with the hydraulic pressure introduction hole 86 a, and communicate with the second hydraulic port 102.

  The pilot mechanism 107 includes a cylinder forming member 114 and a piston member 115 that is movably attached to the cylinder forming member 114 in the axial direction. The piston member 115 includes a piston portion 115a and a rod portion 115b, and the piston portion 115a is configured to receive a hydraulic pressure introduced from the pilot port 103 into the pilot oil chamber 107a. The rod portion 115b extends from the piston portion 115a through the through hole 114a of the cylinder forming member 114 toward the check valve mechanism 106, and is inserted into the center hole 109b.

  The pilot port 103 is connected to the unclamping oil chamber 31B of the clamping device 31 by an oil passage 36a. The pilot port 103 is connected to the hydraulic pressure supply source 39 through the oil passages 36a and 36b, the couplers 36 and 47, and the oil passage 46. Are connected (see FIG. 5).

  When the hydraulic oil is filled into the clamping oil chamber 31a of the clamping device 31, the hydraulic pressure is supplied to the first hydraulic port 101 and flows from the first hydraulic port 101 to the clamping oil chamber 31a via the second hydraulic port 102, Since the hydraulic pressure in the unclamping oil chamber 31b is discharged, the check valve mechanism 106 is opened and the air passage opening / closing valve 80 is closed as shown in FIG. The control unit 40 can monitor the hydraulic pressure charged in the clamping oil chamber 31a.

  When the hydraulic oil filling to the clamping oil chamber 31a is completed, the check valve mechanism 106 is closed by the urging force of the compression spring 111 and the air passage opening / closing valve 80 is maintained closed as shown in FIG. Therefore, it can be monitored by the air pressure sensor 38 and the control unit 40 whether or not the hydraulic pressure filled in the clamping oil chamber 31a is equal to or higher than a predetermined pressure.

  In the state of FIG. 10, since the hydraulic pressure of a predetermined pressure is sealed in the clamping oil chamber 31a, the couplers 35, 45, 36, 47, 34, 43 are separated while the workpiece W is maintained in the clamped state. can do. Therefore, the work pallet 30 can be transported to the work processing station and used for machining. Even during this machining, the air passage opening / closing valve 80 remains closed as long as the hydraulic pressure of the predetermined pressure or higher is maintained in the clamping oil chamber 31a. Therefore, the air pressure sensor 38A and the control unit 40A The oil pressure in the clamping oil chamber 31a can be monitored.

  When the workpiece pallet 30 is transported to the workpiece preparation station after the machining of the workpiece W is completed and the clamp device 31 is released from the clamp, the hydraulic pressure is supplied to the unclamping oil chamber 31b. As shown in FIG. 11, the pilot mechanism 107 switches the check valve mechanism 106 to the open state. Therefore, the hydraulic pressure in the clamping oil chamber 31 a flows from the second hydraulic port 102 through the check valve mechanism 106 to the first hydraulic port 101 and is discharged to the hydraulic supply source 39.

  The hydraulic circuit such as the clamp device 31 and the pilot check valve 100 with an air passage opening / closing valve is as shown in FIGS. 12 and 13 are diagrams showing a case where the work pallet 30 is in the work preparation station. The electromagnetic on-off valve 39 a is provided on the hydraulic pressure supply source 39 side and is driven and controlled by the control unit 40. FIG. 12 shows a state where the clamp device 31 is released from the clamp, and FIG. 13 shows a case where the clamp device 31 is in a clamped state.

Next, the operation and effect of the pilot check valve 100 with an air passage opening / closing valve will be supplementarily described. Since the air passage opening / closing valve 80 has the same operations and effects as the air passage opening / closing valve 1 of the first embodiment, the description thereof is omitted.
Since the work pallet 30 is equipped with the pilot check valve 100, the couplers 35, 45, 36, 47, 34, 43 can be separated in a state where the oil pressure for the clamping oil chamber 31a is filled.

  Since the pilot check valve 100 is provided with the air passage opening / closing valve 80, it is possible to monitor whether or not the hydraulic pressure filled in the clamping oil chamber 31a is maintained via the air passage opening / closing valve 80. In addition, in the work pallet 30, since the pressurized air can be supplied from the common air passage 34 a to the air nozzle 33 b and the air passage opening / closing valve 80, the air passage of the work pallet 30 is simplified. Since the pressurized air is supplied also from the air passage 42 or the air passage 72 where the air passage 34a branches to the air nozzle 61a of the clamp device 50, the air passage formed in the work pallet 30, the base member 41, and the table 70 can be simplified. In addition, it can be confirmed from the detection signals of the common air pressure sensors 38, 38A that the hydraulic pressure in the clamping oil chamber 31a is equal to or higher than a predetermined pressure.

Next, an example in which the above embodiment is partially changed will be described.
1) In the air passage opening / closing valve 1, a spring smaller than that shown in the figure may be employed as the compression spring 5, and a spring other than the coil spring may be employed.
2) The diameter of the pressure receiving portion 4 c is not limited to that shown in the figure, and is appropriately set depending on the magnitude of the fluid pressure to be monitored and the elastic force of the compression spring 5.
3) Instead of the opening / closing valve mechanism 4, an opening / closing valve mechanism having a poppet valve structure incorporated in the pilot check valve 100 of the second embodiment may be provided, or an opening / closing valve mechanism having a spool valve structure may be provided.

4) Although the air passage opening / closing valve 80 is provided on the upper surface of the work pallet 30, it may be provided on the side surface of the work pallet 30, or may be provided in a housing recess formed in the work pallet 30.
5) The air passage opening / closing valve 80 may be configured to supply pressurized air via an independent air passage and a coupler.
6) In addition, those skilled in the art can implement the above-described embodiment with some modifications.

  The present invention provides an air passage opening / closing valve for various uses that opens and closes a detection air passage via a valve body that receives a fluid pressure to be monitored.

1,80 Air passage on-off valve 2, 81 Valve case 2b Port forming member 3, 82 Detection air passage 3a, 82a First port 3d, 82b Second port 4, 83 On-off valve mechanism 4A, 84 Valve body 5, 85 Compression Springs 6, 86 Valve closing mechanism 6a, Fluid pressure introduction hole 86a Hydraulic introduction holes 13, 89 Valve body accommodation holes 14, 88 Spring accommodation holes 22, 87 Energizing force adjustment mechanism

Claims (4)

An air passage opening / closing valve that opens and closes a detection air passage through a valve body that receives a fluid pressure to be monitored,
A valve case,
A detection air passage formed in the valve case, the detection air passage being supplied with pressurized air at one end and being opened to the atmosphere at the other end;
An on-off valve mechanism capable of opening and closing a middle portion of the detection air passage;
A compression spring that biases the valve body of the on-off valve mechanism in the valve opening direction;
A valve closing mechanism capable of closing the on-off valve mechanism against an urging force of the compression spring by applying a fluid pressure to be monitored supplied from the outside to the valve body of the on-off valve mechanism. Features an air passage opening / closing valve.   The air passage opening / closing valve according to claim 1, wherein an urging force adjusting mechanism capable of adjusting an urging force of the compression spring is provided in the valve case.   2. The valve case according to claim 1, further comprising: a spring housing hole for housing the compression spring; and a valve body housing hole communicating with one end of the spring housing hole and movably housing the valve body. Or the air passage opening and closing valve of 2.   The valve case includes a port forming member in which a first port at one end of the air passage, a second port at the other end of the air passage, and a fluid pressure introducing hole of the valve closing mechanism are formed. The air passage opening / closing valve according to claim 3, wherein