JP2015065010A5 - - Google Patents

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Publication number
JP2015065010A5
JP2015065010A5 JP2013197960A JP2013197960A JP2015065010A5 JP 2015065010 A5 JP2015065010 A5 JP 2015065010A5 JP 2013197960 A JP2013197960 A JP 2013197960A JP 2013197960 A JP2013197960 A JP 2013197960A JP 2015065010 A5 JP2015065010 A5 JP 2015065010A5
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JP
Japan
Prior art keywords
plasma generation
generation container
adhesion
wall surface
preventing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013197960A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015065010A (ja
JP6307825B2 (ja
Filing date
Publication date
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Priority to JP2013197960A priority Critical patent/JP6307825B2/ja
Priority claimed from JP2013197960A external-priority patent/JP6307825B2/ja
Publication of JP2015065010A publication Critical patent/JP2015065010A/ja
Publication of JP2015065010A5 publication Critical patent/JP2015065010A5/ja
Application granted granted Critical
Publication of JP6307825B2 publication Critical patent/JP6307825B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013197960A 2013-09-25 2013-09-25 防着板支持部材、プラズマ源およびイオンビーム照射装置 Active JP6307825B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013197960A JP6307825B2 (ja) 2013-09-25 2013-09-25 防着板支持部材、プラズマ源およびイオンビーム照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013197960A JP6307825B2 (ja) 2013-09-25 2013-09-25 防着板支持部材、プラズマ源およびイオンビーム照射装置

Publications (3)

Publication Number Publication Date
JP2015065010A JP2015065010A (ja) 2015-04-09
JP2015065010A5 true JP2015065010A5 (cg-RX-API-DMAC7.html) 2016-03-24
JP6307825B2 JP6307825B2 (ja) 2018-04-11

Family

ID=52832749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013197960A Active JP6307825B2 (ja) 2013-09-25 2013-09-25 防着板支持部材、プラズマ源およびイオンビーム照射装置

Country Status (1)

Country Link
JP (1) JP6307825B2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7237877B2 (ja) * 2020-03-13 2023-03-13 株式会社東芝 イオン源装置
US12154753B2 (en) * 2021-09-13 2024-11-26 Applied Materials, Inc. Device to control uniformity of extracted ion beam

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002151473A (ja) * 2000-11-13 2002-05-24 Tokyo Electron Ltd プラズマ処理装置及びその組立方法
US7374636B2 (en) * 2001-07-06 2008-05-20 Applied Materials, Inc. Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
JP2003247057A (ja) * 2002-02-20 2003-09-05 Seiko Epson Corp 防着治具および薄膜形成装置
JP5329072B2 (ja) * 2007-12-03 2013-10-30 東京エレクトロン株式会社 処理容器およびプラズマ処理装置
JP5578865B2 (ja) * 2009-03-25 2014-08-27 東京エレクトロン株式会社 誘導結合プラズマ処理装置のカバー固定具およびカバー固定装置
TWI502617B (zh) * 2010-07-21 2015-10-01 應用材料股份有限公司 用於調整電偏斜的方法、電漿處理裝置與襯管組件
JP2013020737A (ja) * 2011-07-08 2013-01-31 Nissin Ion Equipment Co Ltd 防着板支持部材およびこれを備えたイオン源

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