JP2015059835A - Magnetic device having contact detection part and contact detection method for magnetic device - Google Patents

Magnetic device having contact detection part and contact detection method for magnetic device Download PDF

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JP2015059835A
JP2015059835A JP2013193776A JP2013193776A JP2015059835A JP 2015059835 A JP2015059835 A JP 2015059835A JP 2013193776 A JP2013193776 A JP 2013193776A JP 2013193776 A JP2013193776 A JP 2013193776A JP 2015059835 A JP2015059835 A JP 2015059835A
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rod
magnetic device
contact
head
magnetic
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JP6221549B2 (en
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清水 哲也
Tetsuya Shimizu
哲也 清水
木野 義浩
Yoshihiro Kino
義浩 木野
山本 卓
Taku Yamamoto
卓 山本
努 大坪
Tsutomu Otsubo
努 大坪
哲也 保木
Tetsuya Hogi
哲也 保木
将吾 寺田
Shogo Terada
将吾 寺田
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Murata Machinery Ltd
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Abstract

PROBLEM TO BE SOLVED: To prevent wear and breakage due to contact between a movable part and a stationary part in a magnetic device having the movable part and the stationary part disposed in a non-contact state and using magnetic interaction.SOLUTION: A metal ring 20 which is a conductive member and is attached to a bobbin 14 which is an insulator is provided on a detection head 4 serving as a stationary part. Voltage is applied between a rod 6 to be detected serving as a movable part and the metal ring 20, and based on current flowing between the rod 6 to be detected and the metal ring 20, contact between the rod 6 to be detected and the metal ring 20 is detected by a contact detection circuit 12.

Description

この発明は、磁気装置での可動部と固定部間の接触検出に関する。   The present invention relates to contact detection between a movable part and a fixed part in a magnetic device.

特許文献1(特許4047947)は、検出ヘッドのボビン内を進退するロッドの位置を磁気的に検出することを開示している。ロッドには磁性体から成る磁気マークが設けられ、ボビンには励磁コイルと検出コイルとが設けられている。励磁コイルに電流を流すと、検出コイルには誘導電流が生じ、誘導電流の位相はロッドとボビンとの位置関係により変化する。そこでこの位相を求めることにより、ボビンとロッドとの相対位置を検出できる。   Patent Document 1 (Patent 4047947) discloses magnetically detecting the position of a rod that moves forward and backward in a bobbin of a detection head. The rod is provided with a magnetic mark made of a magnetic material, and the bobbin is provided with an excitation coil and a detection coil. When a current is passed through the exciting coil, an induced current is generated in the detection coil, and the phase of the induced current changes depending on the positional relationship between the rod and the bobbin. Thus, by obtaining this phase, the relative position between the bobbin and the rod can be detected.

磁気マークとして磁性体の代わりに永久磁石を用いることも知られ、また励磁コイルを検出コイルとして兼用することも知られ、コイルに代えてホール素子等の他の磁気素子を用いることも知られている。さらにロッドとボビンとの組合せに限らず、磁気マークを平板状に配置し、コイルあるいはホール素子等を平板状のベースに配置することも知られている。   It is also known to use a permanent magnet instead of a magnetic material as a magnetic mark, and it is also known to use an exciting coil as a detection coil, and to use another magnetic element such as a Hall element instead of the coil. Yes. Furthermore, not only the combination of a rod and a bobbin, it is also known that a magnetic mark is arranged in a flat plate shape, and a coil or a hall element is arranged on a flat plate base.

特許4047947Patent 4047947

検出ヘッドとロッド等の被検出部材は本来は非接触のはずであるが、これらの部材の取り付け具合、熱変形、あるいは経時変化等により、被検出部材が検出ヘッドと接触することがある。すると被検出部材あるいは検出ヘッドが摩耗し、検出性能に影響が生じ、極端な場合故障に至ることがある。   The detection head and the detection target member such as the rod should be non-contact in nature, but the detection target member may come into contact with the detection head due to the attachment state of these members, thermal deformation, change with time, or the like. Then, the member to be detected or the detection head is worn, and the detection performance is affected. In extreme cases, failure may occur.

ここでは磁気的な位置検出装置について説明したが、リニアアクチュエータの場合も同様である。リニアアクチュエータは永久磁石と駆動コイルとを備え、これらの一方が固定部、他方が可動部となり、両者は非接触に保たれる。ここで可動部と固定部とが接触すると、摩耗が生じてアクチュエータの動作精度に影響し、極端な場合には故障が生じる。   Although the magnetic position detecting device has been described here, the same applies to a linear actuator. The linear actuator includes a permanent magnet and a drive coil, one of which is a fixed part and the other is a movable part, and both are kept in non-contact. Here, when the movable portion and the fixed portion come into contact with each other, wear occurs and affects the operation accuracy of the actuator, and in an extreme case, a failure occurs.

この発明の課題は、磁気装置での可動部と固定部間の接触を検出することにある。   An object of the present invention is to detect contact between a movable part and a fixed part in a magnetic device.

この発明は、可動部と固定部とを備え、かつ可動部と固定部間の磁気相互作用を用いる磁気装置であって、
前記可動部と前記固定部は非接触に配置され、
前記可動部と前記固定部間の接触を検出する接触検出部を備えていることを特徴とする。
The present invention is a magnetic device comprising a movable part and a fixed part, and using a magnetic interaction between the movable part and the fixed part,
The movable part and the fixed part are arranged in a non-contact manner,
A contact detection unit that detects contact between the movable unit and the fixed unit is provided.

またこの発明は、可動部と固定部とを備え、可動部と固定部間の磁気相互作用を用い、かつ可動部と固定部は非接触に配置されている磁気装置に対して、
前記可動部と前記固定部間の接触を接触検出部により検出する、磁気装置のための接触検出方法にある。
Further, the present invention provides a magnetic device that includes a movable part and a fixed part, uses a magnetic interaction between the movable part and the fixed part, and the movable part and the fixed part are arranged in a non-contact manner.
In the contact detection method for a magnetic device, the contact detection unit detects contact between the movable part and the fixed part.

可動部と固定部は、実施例のように丸棒状の部材と円筒状の部材との組合せの他、2枚の対向する板状の部材、あるいは角棒状の部材と角筒状の部材との組合せ等でも良い。接触検出部は、実施例のように電気的な接触を検出するものの他、静電容量式の近接センサにより、可動部と固定部間の静電容量を検出するもの等でも良い。ただしこのようにすると接触検出部が大がかりになる。この発明では、可動部と固定部との接触を検出できるので、両者の接触による摩耗、精度の低下、故障等が無い。この明細書において、磁気装置に関する記載はそのまま磁気装置のための接触検出方法にも当てはまる。   The movable part and the fixed part are not only a combination of a round bar-like member and a cylindrical member as in the embodiment, but also two opposing plate-like members, or a square bar-like member and a square-cylindrical member. Combinations may be used. The contact detection unit may be one that detects electrical contact as in the embodiment, or may be one that detects the capacitance between the movable unit and the fixed unit using a capacitive proximity sensor. However, this will increase the size of the contact detection unit. In the present invention, since the contact between the movable part and the fixed part can be detected, there is no wear, deterioration in accuracy, failure, etc. due to the contact between both. In this specification, the description related to the magnetic device also applies to the contact detection method for the magnetic device as it is.

磁気装置は位置センサ、リニアアクチュエータ等であり、
・ ヘッドを、前記棒状部材との相対位置を検出する検出ヘッドとすると、位置センサとなり、
・ ヘッドに、前記棒状部材と相対移動させる駆動コイルを設けると、リニアアクチュエータとなる。
Magnetic devices are position sensors, linear actuators, etc.
When the head is a detection head that detects the relative position with the rod-shaped member, it becomes a position sensor,
-If the head is provided with a drive coil that moves relative to the rod-shaped member, a linear actuator is obtained.

好ましくは、前記可動部と前記固定部の一方は、非磁性の絶縁体上に配置された磁気素子から成るヘッドであり、
前記可動部と前記固定部の他方は、永久磁石の列もしくは磁性体と非磁性体との列から成る棒状部材であり、
前記接触検出部は、
前記絶縁体に取り付けられている導電性部材と、
前記導電性部材と前記棒状部材間に電圧を加えると共に、前記導電性部材と前記棒状部材間を流れる電流からヘッドと棒状部材の接触を検出する接触検出回路、
とから成り、
前記導電性部材は、前記接触検出回路以外とは電気的に絶縁されており、
かつ前記導電性部材と前記棒状部材間のクリアランスが、前記ヘッドと前記棒状部材間のクリアランスの最小値となるようにされている。
Preferably, one of the movable part and the fixed part is a head composed of a magnetic element disposed on a nonmagnetic insulator,
The other of the movable part and the fixed part is a rod-shaped member composed of a row of permanent magnets or a row of magnetic and non-magnetic materials,
The contact detector is
A conductive member attached to the insulator;
A contact detection circuit that applies a voltage between the conductive member and the rod-shaped member, and detects contact between the head and the rod-shaped member from a current flowing between the conductive member and the rod-shaped member;
And
The conductive member is electrically insulated from other than the contact detection circuit,
In addition, the clearance between the conductive member and the rod-shaped member is set to the minimum clearance between the head and the rod-shaped member.

このようにすると、導電性部材と棒状部材間を流れる電流の有無により、簡単に接触を検出できる。また導電性部材は絶縁体に取り付けられ、接触検出回路以外とは電気的に絶縁されているので、導電性部材と棒状部材とが接触しないと、検出回路に電流が流れることはない。なお導電性部材以外の位置での、ヘッドと棒状部材とのクリアランスを、導電性部材と棒状部材間のクリアランスよりも大きくすると、ヘッドと棒状部材とが実際に接触する前に、導電性部材と棒状部材とが接触したことを検出できる。非磁性の絶縁体は例えば合成樹脂である。   If it does in this way, a contact can be easily detected by the presence or absence of the electric current which flows between an electroconductive member and a rod-shaped member. In addition, since the conductive member is attached to an insulator and is electrically insulated from the parts other than the contact detection circuit, current does not flow through the detection circuit unless the conductive member and the rod-shaped member are in contact with each other. If the clearance between the head and the rod-shaped member at a position other than the conductive member is larger than the clearance between the conductive member and the rod-shaped member, before the head and the rod-shaped member actually contact each other, It can be detected that the rod-shaped member has come into contact. The nonmagnetic insulator is, for example, a synthetic resin.

より好ましくは、前記絶縁体は円筒状のボビンであり、前記棒状部材は丸棒状で、前記ボビン内に挿通され、前記導電性部材は、前記ボビンの両端に設けられている一対の金属リングである。ボビンの両端に金属リングを設けることにより、簡単に接触を検出できる。   More preferably, the insulator is a cylindrical bobbin, the bar-shaped member is a round bar-like shape, inserted into the bobbin, and the conductive member is a pair of metal rings provided at both ends of the bobbin. is there. Contact can be easily detected by providing metal rings at both ends of the bobbin.

また好ましくは、前記絶縁体は円筒状のボビンであり、前記棒状部材は丸棒状で、前記ボビン内に挿通され、前記導電性部材は、前記ボビンの内面に設けられている非磁性の導電性膜である。この場合、無電解メッキ等で簡単に導電性膜を成膜できる。また導電性膜は非磁性なので、ヘッドのコイル、ホール素子等と、棒状部材との磁気相互作用を妨げない。非磁性の導電性膜は例えばAl膜、Cu膜等がある。導電性膜はボビンの内面全体に設けても良いが、コイル状、リング状等のパターンとしても良い。   Preferably, the insulator is a cylindrical bobbin, the bar-shaped member is a round bar, is inserted into the bobbin, and the conductive member is a nonmagnetic conductive material provided on the inner surface of the bobbin. It is a membrane. In this case, the conductive film can be easily formed by electroless plating or the like. Further, since the conductive film is non-magnetic, it does not hinder the magnetic interaction between the head coil, Hall element, etc., and the rod-shaped member. Examples of the nonmagnetic conductive film include an Al film and a Cu film. The conductive film may be provided on the entire inner surface of the bobbin, but may be a pattern such as a coil shape or a ring shape.

特に好ましくは、前記接触検出回路は、前記導電性部材と前記棒状部材間の電流により発光するフォトカプラを備えている。このようにすると、導電性部材を他の個所から容易に絶縁しながら、接触を検出できる。   Particularly preferably, the contact detection circuit includes a photocoupler that emits light by a current between the conductive member and the rod-shaped member. If it does in this way, a contact can be detected, insulating a conductive member easily from other parts.

特に好ましくは、前記ボビンの両外側に、空気流により前記ヘッドと前記棒状部材とのクリアランスを保つエアベアリングが設けられている。このようにすると、ヘッドを棒状部材に対し非接触とし、所定のクリアランスで支持できる。   Particularly preferably, air bearings are provided on both outer sides of the bobbin to maintain a clearance between the head and the rod-like member by an air flow. If it does in this way, a head can be made non-contact with respect to a rod-shaped member, and it can support with predetermined clearance.

実施例の位置センサの要部断面図Sectional drawing of the principal part of the position sensor of an Example 図1の部分拡大断面図Partial enlarged sectional view of FIG. 接触検出用の導電性膜を備えるボビンの断面図Sectional view of a bobbin with a conductive film for contact detection 実施例のリニアアクチュエータの断面図Sectional view of the linear actuator of the embodiment 平板状の位置センサに関する実施例を模式的に示す図The figure which shows the Example regarding a flat position sensor typically

以下に本発明を実施するための最適実施例を示す。この発明の範囲は、特許請求の範囲の記載に基づき、明細書とこの分野の周知技術を参酌し、当業者の理解に従って定められるべきである。   In the following, an optimum embodiment for carrying out the present invention will be shown. The scope of the present invention should be determined in accordance with the understanding of those skilled in the art based on the description of the scope of claims, taking into consideration the specification and well-known techniques in this field.

図1〜図5に実施例とその変形とを示し、同じ符号は同じものを表す。図1は位置センサ2の実施例を示し、4は検出ヘッドで、6は被検出ロッドで丸棒状をしており、磁気マーク7,8が所定のピッチで交互に設けられている。実施例では、可動の被検出ロッド6(以下「ロッド6」)が、固定の検出ヘッド4(以下「ヘッド4」)に対し、図1のx方向に進退するが、ロッド6を固定し、可動のヘッド4の位置を検出しても良い。磁気マーク7,8は永久磁石、あるいは磁性体と非磁性体等で構成する。駆動回路10はヘッド4を駆動し、接触検出回路12はヘッド4とロッド6との接触を検出する。   1 to 5 show an embodiment and modifications thereof, and the same reference numerals denote the same parts. FIG. 1 shows an embodiment of the position sensor 2, 4 is a detection head, 6 is a rod to be detected and is round, and magnetic marks 7 and 8 are alternately provided at a predetermined pitch. In the embodiment, the movable detection rod 6 (hereinafter referred to as “rod 6”) moves forward and backward in the x direction of FIG. 1 with respect to the fixed detection head 4 (hereinafter referred to as “head 4”). The position of the movable head 4 may be detected. The magnetic marks 7 and 8 are composed of permanent magnets or magnetic and nonmagnetic materials. The drive circuit 10 drives the head 4, and the contact detection circuit 12 detects contact between the head 4 and the rod 6.

合成樹脂製で非磁性かつ絶縁性の円筒状のボビン14の外周に、励磁コイル16と検出コイル18とが設けられ、ボビン14の両端には金属リング20が設けられている。ボビン14の両外側で、例えば金属リング20から離れた位置に、一対のエアベアリング22が設けられて、例えば5-20μm程度のクリアランスでロッド6を非接触に支持する。なお金属リング20とロッド6のクリアランスは、エアベアリング22とロッド6のクリアランス以下である。また24はヘッドのハウジングである。エアベアリング22は多孔質の焼結金属から成る内周部を有し、コンプレッサ、エアポンプ、タンク、空気パイプ等の空気源26から空気流を供給し、ロッド6とのクリアランスへ向けて、内周部から空気を噴射し、ロッド6を支持する。   An excitation coil 16 and a detection coil 18 are provided on the outer periphery of a non-magnetic and insulating cylindrical bobbin 14 made of synthetic resin, and metal rings 20 are provided on both ends of the bobbin 14. A pair of air bearings 22 are provided on both outer sides of the bobbin 14, for example, at positions away from the metal ring 20, and support the rod 6 in a non-contact manner with a clearance of, for example, about 5-20 μm. The clearance between the metal ring 20 and the rod 6 is equal to or less than the clearance between the air bearing 22 and the rod 6. Reference numeral 24 denotes a head housing. The air bearing 22 has an inner peripheral portion made of a porous sintered metal, supplies an air flow from an air source 26 such as a compressor, an air pump, a tank, an air pipe, etc., toward the clearance with the rod 6, Air is jetted from the part to support the rod 6.

駆動回路10は、励磁回路28から角周波数ωの交流電流を励磁コイル16に加え、検出コイル18を流れる電流を信号処理回路30により処理し、磁気マーク7,8を基準とする、ヘッド4とロッド6の相対位置を検出し、出力部32から上位コントローラへ出力する。これらの詳細は例えば特許文献1(特許4047947)に記載されている。なお検出コイル18を励磁コイル16に兼用しても良く、またコイル以外に、ホール素子、磁気抵抗素子等の他の磁気素子を用いても良い。   The drive circuit 10 applies an alternating current having an angular frequency ω from the excitation circuit 28 to the excitation coil 16, processes the current flowing through the detection coil 18 by the signal processing circuit 30, and uses the magnetic marks 7 and 8 as a reference. The relative position of the rod 6 is detected and output from the output unit 32 to the host controller. These details are described in, for example, Patent Document 1 (Patent 4047947). The detection coil 18 may also be used as the exciting coil 16, and other magnetic elements such as a Hall element and a magnetoresistive element may be used in addition to the coil.

一対の金属リング20は、並列にフォトカプラ38の発光ダイオード側に接続され、34は直流電源で、交流電源でも良く、36は抵抗である。電源34〜フォトカプラ38により接触検出回路12を構成し、金属リング20は接触検出回路以外のものから電気的に絶縁されている。そして接触検出回路の他方の入力にロッド6を接続する。金属リング20は接触検出回路以外のものから電気的に絶縁されているので、フォトカプラ38に電流が流れるのは、いずれかの金属リング20がロッド6に接触した場合に限られる。なお図1の左下の鎖線に示すように、ロッド6を例えばアースし、電源34の負側もアースしても良く、電源34とロッド6との間を直接配線する必要はない。   The pair of metal rings 20 are connected in parallel to the light emitting diode side of the photocoupler 38, 34 may be a direct current power supply, an alternating current power supply, and 36 is a resistor. The contact detection circuit 12 is configured by the power source 34 to the photocoupler 38, and the metal ring 20 is electrically insulated from other than the contact detection circuit. Then, the rod 6 is connected to the other input of the contact detection circuit. Since the metal ring 20 is electrically insulated from other than the contact detection circuit, the current flows through the photocoupler 38 only when one of the metal rings 20 contacts the rod 6. 1, the rod 6 may be grounded, for example, and the negative side of the power supply 34 may be grounded, and there is no need to wire directly between the power supply 34 and the rod 6.

ロッド6と、ボビン14及びリング20とのクリアランスを図2に示す。C1はロッド6とボビン14とのクリアランスで、クリアランスが一定でない場合はその最小値である。C2はロッド6とリング20とのクリアランスで、クリアランスC2をクリアランスC1以下、好ましくはクリアランスC1未満とすることにより、ロッド6がボビン14に接触する前に、確実に金属リング20をロッド6に接触させることができる。   The clearance between the rod 6 and the bobbin 14 and ring 20 is shown in FIG. C1 is the clearance between the rod 6 and the bobbin 14, and is the minimum value when the clearance is not constant. C2 is the clearance between the rod 6 and the ring 20. By making the clearance C2 less than the clearance C1, preferably less than the clearance C1, the metal ring 20 is surely brought into contact with the rod 6 before the rod 6 comes into contact with the bobbin 14. Can be made.

図3は、金属リング20の代わりに導電性膜40を用いた例を示す。導電性膜40はCu,Al等の非磁性の金属膜で、例えば無電解メッキにより、ボビン14の内面に設けられ、同様に接触検出回路12に接続されて、導電性膜40とロッドとの接触を検出する。   FIG. 3 shows an example in which a conductive film 40 is used instead of the metal ring 20. The conductive film 40 is a non-magnetic metal film such as Cu or Al, and is provided on the inner surface of the bobbin 14 by, for example, electroless plating. Similarly, the conductive film 40 is connected to the contact detection circuit 12 to connect the conductive film 40 and the rod. Detect contact.

図4は実施例のリニアアクチュエータ41を示し、永久磁石43,44がロッド42に交互に配列されている。ボビン14の内面に導電性膜40が設けられているが、金属リング20をボビン14の両端に設けても良い。45は駆動コイル、46は駆動回路で、空気源26あるいは空気パイプを備え、これらをヘッド41として、ヘッド41の両端のエアベアリング22で支持する。ロッド42は支柱48,48に固定され、ヘッド47はエアベアリング22により非接触でロッド42により支持されて移動し、ロッド42とヘッド47の接触を、導電性膜40により検出する。ヘッド47には図示しないハンド等の部材を取り付け、駆動コイル45により所望の位置まで移動する。他の点では、図1〜図3の各実施例と同様で、同じ符号は同じものを表す。   FIG. 4 shows a linear actuator 41 of the embodiment, in which permanent magnets 43 and 44 are alternately arranged on the rod 42. Although the conductive film 40 is provided on the inner surface of the bobbin 14, the metal rings 20 may be provided on both ends of the bobbin 14. Reference numeral 45 denotes a drive coil, and 46 denotes a drive circuit, which includes an air source 26 or an air pipe, and these are supported as head 41 by air bearings 22 at both ends of the head 41. The rod 42 is fixed to the columns 48, 48, and the head 47 is supported by the rod 42 without contact by the air bearing 22 and moves, and the contact between the rod 42 and the head 47 is detected by the conductive film 40. A member such as a hand (not shown) is attached to the head 47 and moved to a desired position by the drive coil 45. Other points are the same as those of the embodiments of FIGS.

図5は平板状の位置センサ50を示し、51は絶縁体のベースで平板状であり、検出コイル18と励磁コイル52とが取り付けられている。永久磁石56が直線上に配列されて、平板状の磁石列54を構成し、励磁コイル52と検出コイル18とにより、磁石列54に対するベース51の位置を検出する。なお磁石列が棒状部材に対応し、ベース51と磁石列54の一方が可動で、他方が固定である。ベース51と磁石列54との接触を、導電性膜40と接触検出回路12とで検出するが、導電性膜40に代えて、ベース50の両端等に、金属部材を設けて磁石列との接触を検出しても良い。この場合、金属部材と磁石列54とのクリアランスを、ベース51と磁石列54とのクリアランス以下とする。   FIG. 5 shows a flat position sensor 50, 51 is a flat plate with an insulator base, and a detection coil 18 and an excitation coil 52 are attached thereto. Permanent magnets 56 are arranged in a straight line to form a flat magnet array 54, and the position of the base 51 with respect to the magnet array 54 is detected by the excitation coil 52 and the detection coil 18. The magnet row corresponds to a rod-shaped member, one of the base 51 and the magnet row 54 is movable, and the other is fixed. The contact between the base 51 and the magnet array 54 is detected by the conductive film 40 and the contact detection circuit 12, but instead of the conductive film 40, metal members are provided at both ends of the base 50, etc. Contact may be detected. In this case, the clearance between the metal member and the magnet array 54 is set to be equal to or less than the clearance between the base 51 and the magnet array 54.

実施例には以下の特徴がある。
・ ヘッド4等とロッド6等の接触を未然に検出でき、位置センサ2の摩耗と性能の低下及び故障を防止できる。
・ 金属リング20あるいは導電性膜40を設けることにより、簡単かつ正確にヘッド4等とロッド6等の接触を検出できる。
・ エアベアリング22を用いることにより、ヘッド4等とロッド6等を非接触で支持できる。
・ フォトカプラ38を用いることにより、ヘッド4等とロッド6等の接触による電流を正確に検出できる。
The embodiment has the following characteristics.
The contact between the head 4 etc. and the rod 6 etc. can be detected in advance, so that the position sensor 2 can be prevented from being worn, degraded in performance and failure.
-By providing the metal ring 20 or the conductive film 40, the contact between the head 4 and the rod 6 and the like can be detected easily and accurately.
By using the air bearing 22, the head 4 and the rod 6 and the like can be supported in a non-contact manner.
By using the photocoupler 38, the current due to the contact between the head 4 and the rod 6 can be accurately detected.

2 位置センサ
4 検出ヘッド
6 被検出ロッド
7,8 磁気マーク
10 駆動回路
12 接触検出回路
14 ボビン
16 励磁コイル
18 検出コイル
20 金属リング
22 エアベアリング
24 ハウジング
26 空気源
28 励磁回路
30 信号処理回路
32 出力部
34 直流電源
36 抵抗
38 フォトカプラ
40 導電性膜
41 リニアアクチュエータ
42 ロッド
43,44 永久磁石
45 駆動コイル
46 駆動回路
47 ヘッド
48 支柱
50 位置センサ
51 ベース
52 励磁コイル
54 磁石列
56 永久磁石

C1,C2 クリアランス
2 Position sensor 4 Detection head 6 Detected rods 7 and 8 Magnetic mark 10 Drive circuit 12 Contact detection circuit 14 Bobbin 16 Excitation coil 18 Detection coil 20 Metal ring 22 Air bearing 24 Housing 26 Air source 28 Excitation circuit 30 Signal processing circuit 32 Output Unit 34 DC power supply 36 Resistance 38 Photocoupler 40 Conductive film 41 Linear actuator 42 Rod 43, 44 Permanent magnet 45 Drive coil 46 Drive circuit 47 Head 48 Strut 50 Position sensor 51 Base 52 Excitation coil 54 Magnet array 56 Permanent magnet

C1, C2 clearance

Claims (9)

可動部と固定部とを備え、かつ可動部と固定部間の磁気相互作用を用いる磁気装置であって、
前記可動部と前記固定部は非接触に配置され、
前記可動部と前記固定部間の接触を検出する接触検出部を備えていることを特徴とする、磁気装置。
A magnetic device comprising a movable part and a fixed part, and using a magnetic interaction between the movable part and the fixed part,
The movable part and the fixed part are arranged in a non-contact manner,
A magnetic device comprising a contact detection unit that detects contact between the movable unit and the fixed unit.
前記可動部と前記固定部の一方は、非磁性の絶縁体上に配置された磁気素子から成るヘッドであり、
前記可動部と前記固定部の他方は、永久磁石の列もしくは磁性体と非磁性体との列から成る棒状部材であり、
前記接触検出部は、
前記絶縁体に取り付けられている導電性部材と、
前記導電性部材と前記棒状部材間に電圧を加えると共に、前記導電性部材と前記棒状部材間を流れる電流からヘッドと棒状部材の接触を検出する接触検出回路、
とから成り、
前記導電性部材は、前記接触検出回路以外とは電気的に絶縁されており、
かつ前記導電性部材と前記棒状部材間のクリアランスが、前記ヘッドと前記棒状部材間のクリアランスの最小値となるようにされていることを特徴とする、請求項1の磁気装置。
One of the movable part and the fixed part is a head composed of a magnetic element disposed on a nonmagnetic insulator,
The other of the movable part and the fixed part is a rod-shaped member composed of a row of permanent magnets or a row of magnetic and non-magnetic materials,
The contact detector is
A conductive member attached to the insulator;
A contact detection circuit that applies a voltage between the conductive member and the rod-shaped member, and detects contact between the head and the rod-shaped member from a current flowing between the conductive member and the rod-shaped member;
And
The conductive member is electrically insulated from other than the contact detection circuit,
2. The magnetic device according to claim 1, wherein a clearance between the conductive member and the rod-shaped member is set to a minimum value of a clearance between the head and the rod-shaped member.
前記絶縁体は円筒状のボビンであり、
前記棒状部材は丸棒状で、前記ボビン内に挿通され、
前記導電性部材は、前記ボビンの両端に設けられている金属リングである、ことを特徴とする、請求項2の磁気装置。
The insulator is a cylindrical bobbin;
The rod-like member is in the shape of a round bar, inserted through the bobbin,
The magnetic device according to claim 2, wherein the conductive member is a metal ring provided at both ends of the bobbin.
前記絶縁体は円筒状のボビンであり、
前記棒状部材は丸棒状で、前記ボビン内に挿通され、
前記導電性部材は、前記ボビンの内面に設けられている非磁性の導電性膜である、ことを特徴とする、請求項2の磁気装置。
The insulator is a cylindrical bobbin;
The rod-like member is in the shape of a round bar, inserted through the bobbin,
The magnetic device according to claim 2, wherein the conductive member is a nonmagnetic conductive film provided on an inner surface of the bobbin.
前記接触検出回路は、前記導電性部材と前記棒状部材間の電流により発光するフォトカプラを備えている、ことを特徴とする、請求項2〜4のいずれかの磁気装置。   The magnetic device according to claim 2, wherein the contact detection circuit includes a photocoupler that emits light by a current between the conductive member and the rod-shaped member. 前記ボビンの両外側に、空気流により前記ヘッドと前記棒状部材とのクリアランスを保つエアベアリングが設けられている、ことを特徴とする、請求項2〜5のいずれかの磁気装置。   6. The magnetic device according to claim 2, wherein air bearings are provided on both outer sides of the bobbin to maintain a clearance between the head and the rod-like member by an air flow. 前記ヘッドは、前記棒状部材に対するヘッドの位置を検出する検出ヘッドで、
磁気装置は位置センサである、ことを特徴とする、請求項2〜6のいずれかの磁気装置。
The head is a detection head that detects a position of the head with respect to the rod-shaped member,
The magnetic device according to claim 2, wherein the magnetic device is a position sensor.
前記ヘッドは、ヘッドと前記棒状部材とを相対移動させる駆動コイルを備え、
磁気装置はリニアアクチュエータである、ことを特徴とする、請求項2〜6のいずれかの磁気装置。
The head includes a drive coil that relatively moves the head and the rod-shaped member;
The magnetic device according to claim 2, wherein the magnetic device is a linear actuator.
可動部と固定部とを備え、可動部と固定部間の磁気相互作用を用い、かつ可動部と固定部は非接触に配置されている磁気装置に対して、
前記可動部と前記固定部間の接触を接触検出部により検出する、ことを特徴とする、磁気装置のための接触検出方法。
For a magnetic device comprising a movable part and a fixed part, using a magnetic interaction between the movable part and the fixed part, and the movable part and the fixed part being arranged in a non-contact manner,
A contact detection method for a magnetic device, wherein a contact detection unit detects contact between the movable part and the fixed part.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104792254A (en) * 2015-04-13 2015-07-22 中国核动力研究设计院 Online monitoring device and online monitoring method for thrust bearing wear loss of fully-sealed pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0556623A (en) * 1991-08-21 1993-03-05 Hitachi Ltd Cylindrical linear motor and elevator mounted with same
JP2002034208A (en) * 2000-05-27 2002-01-31 Papst Motoren Gmbh & Co Kg Motor
JP2005278359A (en) * 2004-03-26 2005-10-06 Rikogaku Shinkokai Spindle motor and spindle motor device
JP2007132466A (en) * 2005-11-11 2007-05-31 Smc Corp Moment resistant countermeasure static pressure gas bearing mechanism
WO2009041185A1 (en) * 2007-09-25 2009-04-02 Kabushiki Kaisha Yaskawa Denki Cylindrical linear motor, and its stator manufacturing method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0556623A (en) * 1991-08-21 1993-03-05 Hitachi Ltd Cylindrical linear motor and elevator mounted with same
JP2002034208A (en) * 2000-05-27 2002-01-31 Papst Motoren Gmbh & Co Kg Motor
JP2005278359A (en) * 2004-03-26 2005-10-06 Rikogaku Shinkokai Spindle motor and spindle motor device
JP2007132466A (en) * 2005-11-11 2007-05-31 Smc Corp Moment resistant countermeasure static pressure gas bearing mechanism
WO2009041185A1 (en) * 2007-09-25 2009-04-02 Kabushiki Kaisha Yaskawa Denki Cylindrical linear motor, and its stator manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104792254A (en) * 2015-04-13 2015-07-22 中国核动力研究设计院 Online monitoring device and online monitoring method for thrust bearing wear loss of fully-sealed pump

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