JP2015047792A - Liquid jet head and liquid jet device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To add a function as a circuit board to a nozzle plate 10 thereby simplifying a constitution.SOLUTION: A liquid jet head 1 includes a piezoelectric substrate 2 which is equipped with: groove rows 5 in which slender long discharge groove 3 and non-discharge groove 4, which penetrate from an upper surface US to a lower surface LS, are alternately arranged in a standard direction K; common driving electrodes 13a which are disposed on both side faces of the discharge groove 3; individual driving electrodes 13b which are disposed on both side faces of the non-discharge groove 4; a common land electrodes 15a which are electrically connected to the common driving electrodes 13a and are disposed on the lower surface LS; and individual land electrodes 15b which are electrically connected to the individual driving electrodes 13b and are disposed on the lower surface LS, and a nozzle plate 10 which is equipped with: a nozzle 11 communicating with the discharge groove 3; individual penetration electrodes 16b which are electrically connected to the individual land electrodes 15b; individual wires 17b which are electrically connected to the individual penetration electrodes 16b and are disposed on a wiring surface HS on a side opposite to the piezoelectric substrate 2, and which is joined to the lower surface LS of the piezoelectric substrate 2.

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus that eject and record liquid droplets on a recording medium.

  In recent years, an ink jet type liquid ejecting head has been used in which ink droplets are ejected onto recording paper or the like to record characters and figures, or a liquid material is ejected onto the surface of an element substrate to form a functional thin film. In this method, a liquid such as ink or a liquid material is guided from a liquid tank to a channel via a supply pipe, and a liquid is discharged from a nozzle communicating with the channel by applying pressure to the liquid filled in the channel. When ejecting droplets, the liquid ejecting head and the recording medium are moved to record characters and figures, or a functional thin film having a predetermined shape is formed.

  In recent years, as this type of liquid ejecting head, a piezoelectric substrate having a plurality of grooves formed in parallel with the surface and a liquid chamber for supplying liquid to the grooves, and the surface of the piezoelectric substrate so as to close the upper opening of the grooves 2. Description of the Related Art Piezo-type liquid ejecting heads that include a cover plate that is bonded to a nozzle plate, a nozzle that communicates with a groove, and a nozzle plate that is bonded to a piezoelectric substrate have been put into practical use. The grooves of the piezoelectric substrate are partitioned by side walls, and drive electrodes are installed on the side walls. The drive electrode on each side wall is drawn out to the front or back surface of the piezoelectric substrate via the wiring electrode, and is electrically connected to an external circuit via the flexible circuit board.

  Patent Document 1 describes a liquid jet head including four nozzle rows. FIG. 7 is an exploded perspective view of the liquid jet head described in Patent Document 1. In FIG. The liquid ejecting head includes the liquid chamber unit 106 in which four nozzle rows are formed, the actuator unit 104 in which four piezoelectric element members 142 are installed on the upper surface of the base member 141, and the actuator unit 104 in the storage unit 152. The frame unit 105 supplies the liquid to the liquid chamber unit 106. The liquid chamber unit 106 includes a nozzle plate 101 in which four nozzle rows are formed in parallel, and four liquid chambers for pressurizing liquid, and the liquid chambers in each row communicate with the nozzles 111 in each row. The flow path member 102 joined to the nozzle plate 101 and the vibration member 103 joined to the flow path member 102 so as to close the liquid chamber and independently transmitting vibration to each liquid chamber in each row. Is done. The four piezoelectric element members 142 of the actuator unit 104 are joined corresponding to the four rows of liquid chambers. The piezoelectric element member 142 transmits vibration to each liquid chamber in each row independently. The frame unit 105 includes four common liquid chambers 151 that supply liquid to the liquid chambers in each row.

  Here, the base member 141 that holds the four piezoelectric element members 142 includes a through hole 144 between the piezoelectric element member 142 in the second row and the piezoelectric element member 142 in the third row. The flexible circuit board (FPC cable 143) is passed through the through hole 144. That is, the first row of piezoelectric element members 142 and the fourth row of piezoelectric element members 142 are connected to two FPC cables 143 along the outer surface of the base member 141. The second row of piezoelectric element members 142 and the third row of piezoelectric element members 142 are connected to two FPC cables 143 that pass through the through holes 144 of the base member 141. Each FPC cable 143 is connected to a side surface of each piezoelectric element member 142 and is electrically connected to a terminal of each piezoelectric element.

  Patent Document 2 and Patent Document 3 describe a liquid ejecting head that uses an electrorheological fluid as ink. The electrorheological fluid increases in viscosity when a voltage is applied and becomes solid or semi-solid, and when the voltage is released, the viscosity decreases and the fluidity increases. An electrode is provided for each nozzle, and ink is selectively ejected by changing the fluidity of the ink in the nozzle. Specifically, a plurality of nozzles are formed in a nozzle plate that closes one liquid chamber, and a pair of electrodes are installed on the nozzle opening end on the back surface of the liquid chamber side of the nozzle plate and the nozzle opening end on the discharge side surface. A drive voltage is selectively applied to the electrodes to change the ink in the nozzle to a solid or liquid and eject the ink.

JP 2008-68555 A JP-A-7-214777 JP-A-8-1929

  In the liquid ejecting head described in Patent Document 1, a large number of liquid chambers and nozzles installed in the flow path member 102 of the liquid chamber unit 106, between the large number of grooves formed in the piezoelectric element member 142 and the liquid chamber unit 106. It is necessary to perform alignment between the nozzle 111 of the plate 101 and between the piezoelectric element member 142 and the FPC cable 143. Therefore, there are many assembly steps and productivity is low. In addition, the liquid ejecting heads described in Patent Document 2 and Patent Document 3 are systems that discharge ink droplets by applying an electric field to ink composed of an electrorheological fluid filled in a nozzle to change the viscosity of the ink. The structure and driving principle are completely different from those of a piezo-type liquid jet head.

  The liquid jet head according to the present invention is provided on the both sides of the discharge groove, and a row of elongated discharge grooves penetrating from the upper surface to the lower surface and an elongated non-discharge groove penetrating from the upper surface to the lower surface alternately. Common drive electrodes, individual drive electrodes installed on both side surfaces of the non-ejection groove, a common land electrode electrically connected to the common drive electrode and installed on the lower surface, and electrically connected to the individual drive electrodes A piezoelectric substrate including an individual land electrode connected to the lower surface, a nozzle communicating with the ejection groove, an individual through electrode electrically connected to the individual land electrode, and an electric current to the individual through electrode. And a nozzle plate that is connected to the lower surface, and is connected to the lower surface of the piezoelectric substrate.

  The nozzle plate extends from the lower surface and is bent toward the upper surface.

  In addition, the individual land electrode is electrically connected to the two individual drive electrodes installed on the side surface of the two non-ejection grooves adjacent to each other with the ejection groove interposed therebetween.

  The nozzle plate includes a common through electrode that is electrically connected to the common land electrode, and a common wiring that is electrically connected to the common through electrode and disposed on a surface opposite to the piezoelectric substrate side. It was decided to prepare.

  In addition, the nozzle plate includes a common wiring that is electrically connected to the common land electrode and is installed on the surface of the piezoelectric substrate side.

  In addition, the common drive electrode installed in one of the ejection grooves and the other common drive electrode installed in the other one of the ejection grooves are electrically connected via the common wiring; did.

  In addition, the common wiring is installed on the nozzle plate across the non-ejection groove in a plan view seen from the normal direction of the lower surface.

  The opening in the lower surface of the non-ejection groove is longer in the groove direction than the opening in the lower surface of the ejection groove.

  Further, the individual wiring is covered with a protective film.

  Further, a plurality of the groove rows are arranged in parallel to the reference direction.

  Further, of the two adjacent groove rows, the other end portion of the discharge groove included in the groove row on one side and the one end portion of the non-discharge groove included in the groove row on the other side. And are overlapped with each other in the thickness direction of the piezoelectric substrate.

  The liquid ejecting apparatus according to the aspect of the invention includes the liquid ejecting head, a moving mechanism that relatively moves the liquid ejecting head and the recording medium, a liquid supply pipe that supplies liquid to the liquid ejecting head, and the liquid And a liquid tank for supplying the liquid to the supply pipe.

  The liquid ejecting head according to the present invention is installed on the both sides of the ejection grooves, in which the elongated ejection grooves penetrating from the upper surface to the lower surface and the elongated non-ejection grooves penetrating from the upper surface to the lower surface are alternately arranged in the reference direction. A common drive electrode, individual drive electrodes installed on both side surfaces of the non-ejection groove, a common land electrode electrically connected to the common drive electrode and installed on the lower surface, and a lower surface electrically connected to the individual drive electrode A piezoelectric substrate having an individual land electrode installed on the nozzle, a nozzle communicating with the ejection groove, an individual through electrode electrically connected to the individual land electrode, and a piezoelectric substrate electrically connected to the individual through electrode. An individual wiring installed on the surface opposite to the side, and a nozzle plate joined to the lower surface. This simplifies the configuration by adding a function as a circuit board to the nozzle plate.

FIG. 3 is a schematic partial exploded perspective view of the liquid ejecting head according to the first embodiment of the invention. FIG. 3 is a schematic cross-sectional view of the liquid jet head according to the first embodiment of the present invention. FIG. 3 is an explanatory diagram of a liquid ejecting head according to the first embodiment of the invention. FIG. 6 is a schematic cross-sectional view of a liquid jet head according to a second embodiment of the present invention. FIG. 10 is an explanatory diagram of a liquid jet head according to a third embodiment of the present invention. FIG. 10 is a schematic perspective view of a liquid ejecting apparatus according to a fourth embodiment of the invention. It is an exploded perspective view of a conventionally known liquid jet head.

(First embodiment)
FIG. 1 is a schematic partially exploded perspective view of a liquid jet head 1 according to the first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view of the liquid jet head 1 according to the first embodiment of the present invention. FIG. 3 is an explanatory diagram of the liquid jet head 1 according to the first embodiment of the present invention. 2A is a schematic cross-sectional view of the ejection groove 3 in the groove direction M, and FIG. 2B is a schematic cross-sectional view of the non-ejection groove 4 in the groove direction M. FIG. 3A is a schematic plan view of the liquid jet head 1 viewed from the nozzle plate 10 side, and the protective film 10a is omitted. FIG. 3B is a schematic cross-sectional view of the portion XX.

  As shown in FIGS. 1 and 2, the liquid jet head 1 includes a piezoelectric substrate 2, a cover plate 8 bonded to the upper surface US of the piezoelectric substrate 2, and a nozzle bonded to the lower surface LS of the piezoelectric substrate 2. Plate 10. In the piezoelectric substrate 2, ejection grooves 3 that penetrate from the upper surface US to the lower surface LS and are elongated in the groove direction M and non-ejection grooves 4 that penetrate from the upper surface US to the lower surface LS and are elongated in the groove direction M are alternately arranged in the reference direction K. The lower surface LS is electrically connected to the groove row 5, the common drive electrode 13a installed on both side surfaces of the ejection groove 3, the individual drive electrode 13b installed on both side surfaces of the non-ejection groove 4, and the common drive electrode 13a. Common land electrode 15a and individual land electrode 15b electrically connected to the individual drive electrode 13b and installed on the lower surface LS.

  The nozzle plate 10 includes a nozzle 11 communicating with the ejection groove 3, a common through electrode 16a electrically connected to the common land electrode 15a, an individual through electrode 16b electrically connected to the individual land electrode 15b, and a common through electrode. The common wiring 17a that is electrically connected to 16a and installed on the surface opposite to the piezoelectric substrate 2 side, and the surface that is electrically connected to the individual through electrode 16b and opposite to the piezoelectric substrate 2 side And an individual wiring 17b installed in the network. The nozzle plate 10 extends from the lower surface LS of the piezoelectric substrate 2 and is bent from the side surface SS of the piezoelectric substrate 2 toward the upper surface US.

  The cover plate 8 includes a liquid chamber 9 a that communicates with one end portion in the groove direction M of the discharge groove 3 and a liquid chamber 9 b that communicates with the other end portion in the groove direction M of the discharge groove 3. None of the liquid chambers 9 a and 9 b communicate with the non-ejection groove 4. That is, the non-ejection groove 4 does not open in a region where the liquid chambers 9a and 9b open on the piezoelectric substrate 2 side.

  As described above, the nozzle plate 10 is provided with the function as a circuit board by installing the individual through electrode 16b and the individual wiring 17b electrically connected to the individual through electrode 16b. Simplified. Further, when the nozzle plate 10 is bonded to the piezoelectric substrate 2, the alignment of the nozzle 11 and the ejection groove 3, the alignment of the individual land electrode 15b and the individual through electrode 16b, and electrical connection are performed in the same process. Can do. In the present embodiment, the common through electrode 16a and the common wiring 17a electrically connected to the common through electrode 16a are installed in the nozzle plate 10, and the alignment between the common land electrode 15a and the common through electrode 16a Electrical connection can also be made in the same process.

  This will be specifically described. PZT ceramics can be used as the piezoelectric substrate 2. The piezoelectric substrate 2 is subjected to polarization processing. For example, a piezoelectric substrate 2 that is uniformly polarized in the vertical direction of the upper surface US or the lower surface LS can be used. Further, a chevron type piezoelectric substrate 2 in which a piezoelectric substrate that is polarized in the direction perpendicular to the upper surface US or the lower surface LS and a piezoelectric substrate that is polarized in the opposite direction is used is used. Can do. Any piezoelectric material may be used at least on the side wall between adjacent grooves, and a non-piezoelectric material may be used in the peripheral region of the piezoelectric substrate 2.

  As shown in FIG. 2A, the discharge groove 3 penetrates from the upper surface US to the lower surface LS of the piezoelectric substrate 2 and is formed in a convex shape downward. As shown in FIG. 2B, the non-ejection groove 4 penetrates from the upper surface US to the lower surface LS of the piezoelectric substrate 2 and is formed in a convex shape upward. One end portion of the non-ejection groove 4 is formed into a shallow groove by grinding the piezoelectric substrate 2 on the lower surface LS side straight while leaving the piezoelectric substrate 2 on the upper surface US side. The opening 14 b of the non-ejection groove 4 that opens to the lower surface LS of the piezoelectric substrate 2 is longer in the groove direction M than the opening 14 a of the ejection groove 3 that opens to the lower surface LS of the piezoelectric substrate 2. Each groove is formed by grinding using a dicing blade in which abrasive grains such as diamond are embedded in the outer periphery of the disk-shaped blade. The ejection grooves 3 are ground from the upper surface US side using a dicing blade, and the non-ejection grooves 4 are ground from the lower surface LS side using a dicing blade. Therefore, the outer shape of the dicing blade is transferred to both end portions of the discharge groove 3 and the other end portion of the non-discharge groove 4 to form inclined surfaces.

  The common drive electrodes 13a are installed on the lower surface LS side of the piezoelectric substrate 2 on both sides of the ejection groove 3 so as to be electrically separated from each other on the lower surface LS side. The individual drive electrodes 13b are disposed on the lower surface LS side of the piezoelectric substrate 2 on both side surfaces of the non-ejection groove 4 so as to be electrically separated from each other. The width in the groove direction M of the common drive electrode 13a substantially matches the width in the groove direction M of the opening 14a that opens to the lower surface LS of the ejection groove 3. One side of the individual drive electrode 13b extends to the side surface SS on one side of the non-ejection groove 4, and the other side of the individual drive electrode 13b is the same as the common drive electrode 13a in the groove direction M or the other side than the common drive electrode 13a. Installed on the side.

  As shown in FIGS. 2A and 2B, the common land electrode 15a is installed in the vicinity of one end of the opening 14a of the discharge groove 3 that opens in the lower surface LS of the piezoelectric substrate 2, It is electrically connected to a common drive electrode 13a installed on both side surfaces of the ejection groove 3. The individual land electrode 15 b is installed on the lower surface LS between the common land electrode 15 a and the side surface SS of the piezoelectric substrate 2, and is formed on the side surface of the two non-ejection grooves 4 adjacent to each other with the ejection groove 3 interposed therebetween. It electrically connects with the individual drive electrode 13b to be installed.

  The nozzle plate 10 can use a flexible film made of polyimide resin or the like. The nozzle plate 10 is bonded to the lower surface LS of the piezoelectric substrate 2 and is further bent upward from the side surface SS on the groove direction M side of the piezoelectric substrate 2. The nozzle plate 10 includes a common through electrode 16a penetrating in the plate thickness direction at a position corresponding to the common land electrode 15a, and an individual through electrode 16b penetrating in the plate thickness direction at a position corresponding to the individual land electrode 15b. The nozzle plate 10 further includes a common wiring 17a that is electrically connected to the common through electrode 16a and an individual wiring 17b that is electrically connected to the individual through electrode 16b on the surface opposite to the piezoelectric substrate 2 side. Prepare.

  As shown in FIG. 3, the common wiring 17 a includes a common land electrode 15 a installed at one end of the ejection groove 3 and another common land installed at one end of the other ejection groove 3. The electrode 15a is electrically connected through the common through electrode 16a. That is, the common drive electrode 13a installed in one discharge groove 3 and the common drive electrode 13a installed in the other discharge groove 3 are electrically connected via the common wiring 17a. The common wiring 17a is installed in a straight line in the reference direction K across the non-ejection groove 4 in a plan view seen from the normal direction of the lower surface LS of the piezoelectric substrate 2, and is near the end of the nozzle plate 10 in the reference direction K. In the groove direction M.

  The individual wiring 17b is electrically connected to two individual drive electrodes 13b installed on the side of the non-ejection groove 4 adjacent to the non-ejection groove 4 with the ejection groove 3 interposed therebetween via the individual through electrode 16b and the individual land electrode 15b. Connecting. The individual wires 17b are electrically independent from the individual wires 17b installed on the side surfaces of the other non-ejection grooves 4, and a plurality of individual through electrodes 16b are routed in parallel in the groove direction M.

  A protective film 10a made of an insulator is provided on the surface of the nozzle plate 10 opposite to the piezoelectric substrate 2, and the common wiring 17a and the individual wiring 17b are covered with the protective film 10a. Thereby, even when a conductive liquid adheres to the surface of the nozzle plate 10 on the droplet discharge side, the wiring does not corrode. One end of the nozzle plate 10 is connected to a circuit board (not shown). A driver IC can be mounted on the nozzle plate 10 extending from the lower surface LS of the piezoelectric substrate 2 to form a COF (chip on film).

  The cover plate 8 can be made of a ceramic material or a plastic material. The cover plate 8 is preferably made of a material whose thermal expansion coefficient approximates that of the piezoelectric substrate 2. For example, PZT ceramics can be used. Since the non-ejection groove 4 of the piezoelectric substrate 2 is convex from the lower surface LS toward the upper surface US, the non-ejection groove 4 does not communicate with the two liquid chambers 9. Accordingly, it is not necessary to provide a slit for communicating with the ejection groove 3 and closing the non-ejection groove 4 inside the liquid chamber 9, and the configuration is simplified.

  The liquid jet head 1 is driven as follows. The liquid supplied to one liquid chamber 9 a of the cover plate 8 flows into the discharge groove 3 from one end of the discharge groove 3 and fills the discharge groove 3 with the liquid. Further, the liquid flows out into the other liquid chamber 9b and is discharged to the outside. When the common wiring 17a of the nozzle plate 10 is connected to GND, the common drive electrode 13a installed on the side walls of all the ejection grooves 3 is connected to GND via the common through electrode 16a and the common land electrode 15a. . On the other hand, when a driving signal is given to the individual wiring 17b, the driving signal is individually driven on the ejection groove 3 side of the two non-ejection grooves 4 adjacent to each other across the ejection groove 3 via the individual through electrode 16b and the individual land electrode 15b. It is transmitted to the electrode 13b. As a result, the two side walls sandwiching the ejection groove 3 undergo a thickness-slip deformation, a pressure fluctuation is induced in the liquid in the ejection groove 3, and a droplet is ejected from the nozzle 11.

  In addition to the liquid circulation method in which the liquid is supplied from one of the two liquid chambers 9 and the liquid is discharged from the other, a method of supplying the liquid from the two liquid chambers 9 to the discharge groove 3 may be used. In addition, the common land electrode 15a and the individual land electrode 15b are disposed on the lower surface LS on one side of the ejection groove 3, but instead, the common land electrode 15a is disposed on one side in the groove direction M of the opening 14a. The individual land electrode 15b may be installed on the other side of the opening 14a. Accordingly, the common through electrode 16a and the individual through electrode 16b are also installed on one side and the other side of the opening 14a. As a result, the installation interval between the common land electrode 15a and the individual land electrode 15b, and the common through electrode 16a and the individual through electrode 16b is widened, and connection is facilitated.

  The nozzle plate 10 may be formed long in the reference direction K instead of being formed long in the groove direction M and bent along the side surfaces of the piezoelectric substrate 2 and the cover plate 8 in the reference direction K. In this case, the common land electrode 15a and the individual land electrode 15b are arranged separately on both ends of the opening 14a, and the individual wirings 17b may be arranged in the reference direction K so as to cross the ejection grooves 3 and the non-ejection grooves 4. . The upward pulling out of the nozzle plate 10 may be appropriately selected according to the arrangement of other components.

(Second embodiment)
FIG. 4 is a schematic cross-sectional view of the liquid jet head 1 according to the second embodiment of the present invention. FIG. 4 is a schematic cross-sectional view of a portion corresponding to the portion XX in FIG. The difference from the first embodiment is that the common wiring 17a is installed on the surface of the nozzle plate 10 on the piezoelectric substrate 2 side. Hereinafter, differences from the first embodiment will be mainly described, and description of the same parts will be omitted. The same portions or portions having the same function are denoted by the same reference numerals.

  Hereinafter, a description will be given with reference to FIG. On the lower surface LS of the piezoelectric substrate 2, the openings 14 a and the openings 14 b of the ejection grooves 3 and the non-ejection grooves 4 are alternately opened in the reference direction K. A common drive electrode 13a is installed on the side surface of the ejection groove 3, a common land electrode 15a is installed on the lower surface LS on one side of the opening of the ejection groove 3, and the common drive electrode 13a and the common land electrode 15a are electrically connected. Connected. One side of the opening 14 b of the non-ejection groove 4 extends to the side surface SS of the piezoelectric substrate 2. Individual drive electrodes 13b are provided on the side surfaces of the non-ejection grooves 4, between the non-ejection grooves 4 adjacent to each other with the ejection grooves 3 interposed therebetween, and on the lower surface LS near the side surface SS of the piezoelectric substrate 2, the individual land electrodes 15b. Is installed. The individual land electrode 15 b electrically connects the two individual drive electrodes 13 b installed on the side surface of the two non-ejection grooves 4 adjacent to each other with the ejection groove 3 interposed therebetween. The above configuration is the same as that of the first embodiment. Furthermore, as shown in FIG. 4, the corner between the two common land electrodes 15a adjacent to the reference direction K between the side surface of the non-ejection groove 4 and the lower surface LS of the piezoelectric substrate 2 is chamfered. Part 20 is formed.

  The nozzle plate 10 is electrically connected to the common land electrode 15a and connected to the common wiring 17a installed on the surface of the piezoelectric substrate 2, the individual through-electrode 16b electrically connected to the individual land electrode 15b, and the individual through-hole. An individual wiring 17b that is electrically connected to the electrode 16b and is installed on the surface opposite to the piezoelectric substrate 2 is provided. The common wiring 17a is installed on the surface of the nozzle plate 10 on the piezoelectric substrate 2 side so as to straddle the non-ejection groove 4 in a plan view seen from the normal direction of the lower surface LS of the piezoelectric substrate 2. Here, between the adjacent common land electrodes 15a, the chamfered portion 20 is formed at the corner between the side surface of the non-ejection groove 4 and the lower surface LS, so that the individual drive electrode 13b and the common wiring 17a are separated from each other, Electrical short circuit is prevented. Since other configurations are the same as those of the first embodiment, description thereof is omitted.

  Thus, since the common wiring 17a is installed on the surface of the nozzle plate 10 on the piezoelectric substrate 2 side, no through electrode is interposed between the common land electrode 15a and the common wiring 17a, and the structure of the nozzle plate 10 is improved. In addition to simplification, the resistance between the common drive electrode 13a and the drive circuit is reduced.

(Third embodiment)
FIG. 5 is an explanatory diagram of the liquid jet head 1 according to the third embodiment of the present invention. FIG. 5A is a schematic cross-sectional view along the groove direction M of the second ejection groove 3b included in the second groove row 5b of the liquid jet head 1, and FIG. 5B shows the piezoelectric substrate 2 on the lower surface LS. FIG. 5C is a partial schematic plan view seen from below, and FIG. 5C is a partial schematic plan view showing the liquid jet head 1 viewed from below the lower surface LS, and the protective film 10a is omitted. The liquid jet head 1 according to this embodiment includes four rows of groove rows 5. The same portions or portions having the same function are denoted by the same reference numerals.

  As shown in FIG. 5A, the liquid ejecting head 1 includes a piezoelectric substrate 2, a cover plate 8 that is joined to the upper surface US of the liquid ejecting head 1, and a nozzle plate 10 that is joined to the lower surface LS of the piezoelectric substrate 2. With. The piezoelectric substrate 2 includes four rows of first to fourth groove rows 5a to 5d in parallel with the reference direction K. In each groove row 5, elongated ejection grooves 3 that penetrate from the upper surface US to the lower surface LS and elongated non-ejection grooves 4 that penetrate from the upper surface US to the lower surface are alternately arranged in the reference direction K. As shown in FIG. 5B, the pitches P of the ejection grooves 3 arranged in the reference direction K of each groove row 5 are equal. The first groove row 5a and the second groove row 5b are arranged with a deviation of P / 2 in the reference direction K, the third groove row 5c and the fourth groove row 5d are arranged with a deviation of P / 2 in the reference direction K, and the second The groove row 5b and the third groove row 5c are arranged with a shift of P / 4 in the reference direction K. Accordingly, when viewed from the groove direction M, the ejection grooves 3 of the first to fourth groove rows 5a to 5d are arranged at a pitch (P / 4).

  In the adjacent first groove row 5a and second groove row 5b, the end of the first discharge groove 3a on the second groove row 5b side and the end of the second non-discharge groove 4b on the first groove row 5a side are They are separated and overlap in the thickness direction of the piezoelectric substrate 2. Furthermore, the end of the second ejection groove 3b on the first groove row 5a side and the end of the first non-ejection groove 4a on the second groove row 5b side are separated from each other, and the thickness direction of the piezoelectric substrate 2 Overlap. The same configuration is provided between the third groove row 5c and the fourth groove row 5d. In the second groove row 5b and the third groove row 5c, the second discharge groove 3b and the third discharge groove 3c overlap in the reference direction K, and are close to or communicate with each other on the upper surface US of the piezoelectric substrate 2. Further, the second non-ejection groove 4 b and the third non-ejection groove 4 c overlap in the reference direction K, and are close to or communicate with each other on the lower surface LS of the piezoelectric substrate 2. As a result, the length of the piezoelectric substrate 2 in the groove direction M can be shortened.

  A common drive electrode 13 a is installed on the side surface of the ejection groove 3, and an individual drive electrode 13 b is installed on the side surface of the non-ejection groove 4. A common land electrode 15a and an individual land electrode 15b are provided on the lower surface LS of the piezoelectric substrate 2. The common land electrode 15a is installed in the vicinity of the other end portion of the opening 14a of the ejection groove 3 and is electrically connected to the common drive electrode 13a. The individual land electrode 15 b is located between two openings 14 b of the non-ejection groove 4 adjacent to each other with the ejection groove 3 interposed therebetween, and is disposed on one side of the opening 14 a of the ejection groove 3. Two individual drive electrodes 13b installed on the side surface on the ejection groove 3 side are electrically connected.

  The nozzle plate 10 is electrically connected to the nozzle 11 connected to the ejection groove 3 of each groove row 5, the common through electrode 16 a electrically connected to the common land electrode 15 a, and the common through electrode 16 a and connected to the piezoelectric substrate 2. Common wiring 17a installed on the surface opposite to the side (hereinafter referred to as wiring surface HS). The nozzle plate 10 further includes an individual through electrode 16b that is electrically connected to the individual land electrode 15b, and an individual wire 17b that is electrically connected to the individual through electrode 16b and installed on the wiring surface HS. A protective film 10a is formed on the wiring surface HS, and the common wiring 17a and the individual wiring 17b are covered with the protective film 10a.

  As shown in FIG. 5C, the common wiring 17a extends in the reference direction across the first non-ejection groove 4a along the common through electrode 16a that is electrically connected to the common land electrode 15a of the first groove row 5a. K is linearly formed. The common wiring 17a is further installed corresponding to each common land electrode 15a of the second to fourth groove rows 5b to 5d, and is grooved toward the common through electrode 16a electrically connected to each common land electrode 15a. It branches in a straight line in the direction M, and is electrically connected to each common through electrode 16a. On the other hand, a large number of individual wirings 17b are formed in parallel with the groove direction M. One side of each individual wiring 17b is electrically connected to a drive circuit or driver IC (not shown). The other end of each individual wiring 17b is installed corresponding to each individual land electrode 15b of the first to fourth groove rows 5a to 5b and is electrically connected to each individual land electrode 15b. 16b is electrically connected.

  The cover plate 8 includes a plurality of liquid chambers 9 a to 9 e for supplying the liquid to the discharge groove 3 or discharging the liquid from the discharge groove 3. The liquid chamber 9a communicates with the other end of the first discharge groove 3a. In the liquid chamber 9b, one end of the first discharge groove 3a communicates with the other end of the second discharge groove 3b. In the liquid chamber 9c, one end of the second discharge groove 3b communicates with the other end of the third discharge groove 3c. The liquid chamber 9d communicates with one end of the third discharge groove 3c and the other end of the fourth discharge groove 3d. One end of the fourth discharge groove 3d communicates with the liquid chamber 9e. The non-ejection grooves 4 of the groove rows 5 do not open in the liquid chambers 9a to 9e. For example, the liquid can be supplied to the liquid chambers 9b and 9d, discharged from the liquid chambers 9a, 9c, and 9e and circulated, or circulated in the opposite direction. Moreover, you may supply a liquid to all the liquid chambers 9a-9e.

  Thus, since the common wiring 17a and the individual wiring 17b are formed on the wiring surface HS of the nozzle plate 10, each ejection groove 3 and each non-ejection groove 4 even when a plurality of groove arrays 5 are formed on the piezoelectric substrate 2. The electrode wiring can be drawn out to the drive circuit or the like from the common drive electrode 13a and the individual drive electrode 13b installed in the drive circuit. Further, when the nozzle plate 10 is bonded to the piezoelectric substrate 2, the plurality of ejection grooves 3 and the plurality of nozzles 11 are aligned, and at the same time, the plurality of common land electrodes 15a, the plurality of common through electrodes 16a, and Since the plurality of individual land electrodes 15b and the plurality of individual through electrodes 16b can be aligned, the number of assembling steps can be reduced. Further, the nozzle plate 10 functions as a flexible circuit board, and the number of parts can be reduced. Note that one end of the nozzle plate 10 is connected to a circuit board (not shown). In addition, a driver IC can be mounted on the nozzle plate 10 extending from the lower surface LS of the piezoelectric substrate 2 to form a COF.

  In the present embodiment, the four groove rows 5a to 5d are formed. However, the present invention is not limited to this, and can be applied to two or more groove rows. In addition, the end of the ejection groove 3 and the non-ejection groove 4 of the adjacent groove row 5 is configured to overlap in the plate thickness direction of the piezoelectric substrate 2 or in the reference direction K. The groove 3 and the non-ejection groove 4 may not be overlapped in the plate thickness direction, or may not be overlapped in the reference direction K. In addition, the nozzle plate 10 is formed long in the groove direction M and is bent upward along the side surface SS of the piezoelectric substrate 2 in the groove direction M. Instead, the nozzle plate 10 is placed on one side in the reference direction K. The piezoelectric substrate 2 can be long and bent upward along the side surface in the reference direction K of the piezoelectric substrate 2. In this case, the common wiring 17a can be drawn out to the other side in the reference direction K to be shared, and the individual wiring 17b can be drawn out in parallel for each groove row 5 on one side in the reference direction K.

  Further, in this embodiment, the nozzle plate 10 is a single layer, and the common wiring 17a and the individual wiring 17b are installed on one wiring surface HS. Instead, the nozzle plate 10 is formed of a plurality of layers of two or more layers, The common wiring 17a and the individual wirings 17b can be dispersed on a plurality of wiring surfaces HS using one surface of each layer as a wiring surface. For example, two wiring surfaces HS are configured with the nozzle plate 10 as two layers, the common and individual wirings 17a and 17b of the first and second groove rows 5a and 5b are installed on the first wiring surface HS, and the third and The common and individual wirings 17a and 17b of the fourth groove rows 5c and 5d are installed on the second wiring surface HS and dispersed. As a result, even when the number of groove rows 5 is further increased, the common and individual drive electrodes 13a and 13b can be electrically connected to the drive circuit.

  In the first to third embodiments, the nozzle plate 10 extends from one end of the lower surface LS in the groove direction M and is bent toward the upper surface US. Instead, the nozzle plate 10 is grooved M or the reference of the lower surface LS. You may extend from the both ends of the direction K, and you may bend | fold to the upper surface US side along the both-sides surfaces of the piezoelectric substrate 2 and the cover plate 8. In the first to third embodiments, the example in which the nozzle plate 10 also functions as a flexible circuit board is shown. However, a rigid board is used as the nozzle plate 10 and a driver IC or the like is mounted on the surface of the rigid board. One side of the common wiring 17a and the individual wiring 17b can be connected to a driver IC or the like. Further, the groove row 5 may be two rows, three rows, or more than five rows. Further, the end of the ejection groove 3 and the end of the non-ejection groove 4 of the adjacent groove row 5 do not have to overlap with the plate thickness direction or the reference direction K of the piezoelectric substrate 2. However, the liquid jet head 1 can be formed in a compact manner if it is configured so as to overlap with the plate thickness direction or the reference direction K.

(Fourth embodiment)
FIG. 6 is a schematic perspective view of a liquid ejecting apparatus 30 according to the fourth embodiment of the present invention. The liquid ejecting apparatus 30 includes a moving mechanism 40 that reciprocates the liquid ejecting heads 1 and 1 ′, and a flow path unit that supplies the liquid to the liquid ejecting heads 1 and 1 ′ and discharges the liquid from the liquid ejecting heads 1 and 1 ′. 35, 35 ′, liquid pumps 33, 33 ′ and liquid tanks 34, 34 ′ communicating with the flow path portions 35, 35 ′. The liquid ejecting heads 1 and 1 ′ use any of the first to third embodiments already described.

  The liquid ejecting apparatus 30 includes a pair of conveying units 41 and 42 that convey a recording medium 44 such as paper in the main scanning direction, liquid ejecting heads 1 and 1 ′ that eject liquid onto the recording medium 44, and a liquid ejecting head. 1, 1 ′ carriage unit 43, liquid tanks 34, 34 ′ and liquid pumps 33, 33 ′ that supply the liquid stored in the liquid tanks 34, 34 ′ to the flow path portions 35, 35 ′, the liquid jet head 1, And a moving mechanism 40 that scans 1 ′ in the sub-scanning direction orthogonal to the main scanning direction. A control unit (not shown) controls and drives the liquid ejecting heads 1, 1 ′, the moving mechanism 40, and the conveying units 41 and 42.

  The pair of conveying means 41 and 42 includes a grid roller and a pinch roller that extend in the sub-scanning direction and rotate while contacting the roller surface. A grid roller and a pinch roller are moved around the axis by a motor (not shown), and the recording medium 44 sandwiched between the rollers is conveyed in the main scanning direction. The moving mechanism 40 couples a pair of guide rails 36 and 37 extending in the sub-scanning direction, a carriage unit 43 slidable along the pair of guide rails 36 and 37, and the carriage unit 43 to move in the sub-scanning direction. An endless belt 38 is provided, and a motor 39 that rotates the endless belt 38 via a pulley (not shown) is provided.

  The carriage unit 43 mounts a plurality of liquid jet heads 1, 1 ′, and ejects, for example, four types of liquid droplets of yellow, magenta, cyan, and black. The liquid tanks 34 and 34 'store liquids of corresponding colors and supply them to the liquid jet heads 1 and 1' via the liquid pumps 33 and 33 'and the flow path portions 35 and 35'. Each liquid ejecting head 1, 1 ′ ejects droplets of each color according to the drive signal. An arbitrary pattern is recorded on the recording medium 44 by controlling the timing at which liquid is ejected from the liquid ejecting heads 1, 1 ′, the rotation of the motor 39 that drives the carriage unit 43, and the conveyance speed of the recording medium 44. I can.

  In this embodiment, the moving mechanism 40 moves the carriage unit 43 and the recording medium 44 to perform recording, but instead, the carriage unit is fixed and the moving mechanism is the recording medium. It may be a liquid ejecting apparatus that records the image by moving it two-dimensionally. That is, the moving mechanism may be any mechanism that relatively moves the liquid ejecting head and the recording medium.

DESCRIPTION OF SYMBOLS 1 Liquid ejecting head 2 Piezoelectric substrate 3 Discharge groove, 3a 1st discharge groove, 3b 2nd discharge groove, 3c 3rd discharge groove, 3d 4th discharge groove 4 Non-discharge groove, 4a 1st non-discharge groove, 4b 2nd Non-ejection groove, 4c Third non-ejection groove, 4d Fourth non-ejection groove 5 Groove row, 5a First groove row, 5b Second groove row, 5c Third groove row, 5d Fourth groove row 8 Cover plates 9a, 9b 9c, 9d, 9e Liquid chamber 10 Nozzle plate 10a Protective film 11 Nozzle 13a Common drive electrode, 13b Individual drive electrode 14a, 14b Opening 15a Common land electrode, 15b Individual land electrode 16a Common through electrode, 16b Common through electrode 17a Common Wiring, 17b Individual wiring 20 Chamfered portion K Reference direction, M groove direction, US upper surface, LS lower surface, HS wiring surface, SS side surface

Claims (12)

A row of elongated discharge grooves penetrating from the upper surface to the lower surface and an elongated non-discharge groove penetrating from the upper surface to the lower surface alternately arranged in a reference direction; a common drive electrode installed on both side surfaces of the discharge groove; Individual drive electrodes installed on both sides of the discharge groove, a common land electrode electrically connected to the common drive electrode and installed on the lower surface, and electrically connected to the individual drive electrode and installed on the lower surface A piezoelectric substrate comprising individual land electrodes,
A nozzle that communicates with the ejection groove, an individual through electrode that is electrically connected to the individual land electrode, and a surface that is electrically connected to the individual through electrode and opposite to the piezoelectric substrate side. A liquid ejecting head comprising: an individual wiring; and a nozzle plate joined to the lower surface.   The liquid ejecting head according to claim 1, wherein the nozzle plate extends from the lower surface and is bent toward the upper surface.   The said individual land electrode is electrically connected with two said individual drive electrodes installed in the side surface by the side of the said ejection groove of the two said non-ejection grooves adjacent on both sides of the said ejection groove. Liquid jet head.   The nozzle plate includes a common through electrode electrically connected to the common land electrode, and a common wiring electrically connected to the common through electrode and disposed on a surface opposite to the piezoelectric substrate side. The liquid jet head according to claim 1.   The liquid ejecting head according to claim 1, wherein the nozzle plate includes a common wiring that is electrically connected to the common land electrode and is disposed on a surface of the piezoelectric substrate side.   5. The common drive electrode installed in one of the ejection grooves and the other common drive electrode installed in the other one of the ejection grooves are electrically connected via the common wiring. 5. The liquid jet head according to 5.   The liquid ejecting head according to claim 6, wherein the common wiring is disposed on the nozzle plate across the non-ejection groove in a plan view seen from the normal direction of the lower surface.   8. The liquid jet head according to claim 1, wherein an opening portion that opens in the lower surface of the non-ejection groove has a longer length in the groove direction than an opening portion that opens in the lower surface of the ejection groove. .   The liquid jet head according to claim 1, wherein the individual wiring is covered with a protective film.   The liquid ejecting head according to claim 1, wherein a plurality of the groove rows are arranged in parallel in a reference direction.   Of the two adjacent groove rows, the other end portion of the ejection groove included in the one groove row and the one end portion of the non-ejection groove included in the other groove row are separated from each other. The liquid ejecting head according to claim 10, which overlaps in a thickness direction of the piezoelectric substrate. A liquid ejecting head according to claim 1;
A moving mechanism for relatively moving the liquid ejecting head and the recording medium;
A liquid supply pipe for supplying a liquid to the liquid ejecting head;
And a liquid tank that supplies the liquid to the liquid supply pipe.

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