JP2015045937A5 - - Google Patents

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JP2015045937A5
JP2015045937A5 JP2013175680A JP2013175680A JP2015045937A5 JP 2015045937 A5 JP2015045937 A5 JP 2015045937A5 JP 2013175680 A JP2013175680 A JP 2013175680A JP 2013175680 A JP2013175680 A JP 2013175680A JP 2015045937 A5 JP2015045937 A5 JP 2015045937A5
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periodic disturbance
value
model
disturbance observer
torque ripple
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図6は、特許文献1及び非特許文献によって公知となっている周期外乱オブザーバのn次トルクリプル周波数成分に関する制御ブロック図を示したものである。
1はトルクリプル補償値演算部で、正弦波/余弦波の制御指令rn(通常は0)と周期外乱オブザーバ3による推定値dTA^n, dTB^nとの差分にそれぞれ正弦波/余弦波値を乗算してそれを加算することでトルクリプル補償指令Tc*nを生成し制御対象2に出力される。制御対象2では、周期性の外乱(以下周期外乱dTnという)が発生することがある。例えば、制御対象がモータであればコギングトルなどによる回転数に同期した外乱であるトルクリプルがこれに相当し、振動や騒音の要因となる。
FIG. 6 is a control block diagram relating to the n-th order torque ripple frequency component of the periodic disturbance observer known from Patent Document 1 and Non-Patent Document.
Reference numeral 1 denotes a torque ripple compensation value calculation unit. The difference between the control command rn (usually 0) of the sine wave / cosine wave and the estimated values dT A ^ n and dT B ^ n by the periodic disturbance observer 3 is a sine wave / cosine wave, respectively. A torque ripple compensation command Tc * n is generated by multiplying the values and adding them, and is output to the controlled object 2. In the controlled object 2, a periodic disturbance (hereinafter referred to as a periodic disturbance dTn) may occur. For example, the controlled object corresponds to the torque ripple which is a disturbance synchronizing rotation speed due to cogging torque click if the motor becomes a factor of vibration and noise.

図1は、本発明の第1の実施例を示す周期外乱オブザーバによる制御構成を示したもので、10はモデル補正手段、20は本発明による演算部である。本発明の説明に先立ってモデル補正手段10による補正・学習について説明する。なお図1における記号は次の通りである。
n:プラント(制御対象)、d^n:周期外乱推定値(システム同定モデル)、
n:制御対象出力(図6のTAn, TBnに相当)、
n:n次制御指令、dn:n次外乱値、
d^n.t:時刻tのn次補償指令(図6のdTA^n, dTB^nに相当)、
p^n:同定モデル、y^n:d^n.を外乱としたときの同定モデルp^nのプラントの推定出力、
PDO:周期外乱オブザーバ、yn.t:時刻tのn次出力、s領域の値であるものは添字のカンマ後にて時刻tであることを表す。
FIG. 1 shows a control configuration by a periodic disturbance observer according to the first embodiment of the present invention, wherein 10 is a model correcting means, and 20 is an arithmetic unit according to the present invention. Prior to the description of the present invention, correction / learning by the model correction means 10 will be described. The symbols in FIG. 1 are as follows.
p n : Plant (control target), d ^ n : Periodic disturbance estimated value (system identification model),
y n : Control target output (corresponding to T A n and T B n in FIG. 6),
r n: n The following control command, d n: n Tsugigairan value,
d ^ n .t: nth-order compensation command at time t (corresponding to dT A ^ n and dT B ^ n in FIG. 6),
p ^ n : Identification model, y ^ n : Estimated output of the plant of the identification model p ^ n , where d ^ n .
PDO: Periodic disturbance observer, y n .t: n-order output at time t, value in s region indicates time t after the comma of the subscript.

この実施例は、システムモデル推定の誤差を低減するものである。周期外乱オブザーバPDOのシステムモデル誤差補正結果にも誤差は存在する上、2慣性系とした仮定に対して相違がある場合(実際には2慣性系以上の多慣性系である場合)にも誤差は生じる。このため、システムモデル誤差補正を繰り返してシステムモデル推定を実施している状態において、実施例1から(12)式のK/j1,K/j2、または実施例2からj1,j2,Kが求まったら過去値との平均処理例えば、移動平均を行って各値を更新する。 This embodiment reduces the error of system model estimation. There is an error in the system model error correction result of the periodic disturbance observer PDO, and there is an error even when there is a difference from the assumption of the two-inertia system (actually, it is a multi-inertia system more than two-inertia system). Will occur. Therefore, in the state where the system model error correction is repeatedly performed and the system model estimation is performed, K / j 1 , K / j 2 of the first to (12) formulas, or j 1 , j 2 of the second embodiment. , K is obtained, an average process with the past value , for example, a moving average is performed to update each value.

JP2013175680A 2013-08-27 2013-08-27 Periodic disturbance automatic suppression method Active JP6171729B2 (en)

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JP2015045937A JP2015045937A (en) 2015-03-12
JP2015045937A5 true JP2015045937A5 (en) 2016-05-12
JP6171729B2 JP6171729B2 (en) 2017-08-02

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JP6760975B2 (en) * 2015-06-19 2020-09-23 エーエスエムエル ネザーランズ ビー.ブイ. Control system, positioning system, lithography equipment and device manufacturing method

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