JP2015043356A - Power module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a joint structure which inhibits the deterioration of heat radiation performance and improves the reliability in a power module.SOLUTION: A power module includes: a heat sink having multiple fins; a cushioning material where a periphery of a side surface and both sides of a main surface are coated by a solder material, the cushioning material joined to the heat sink through the solder material; a ceramic substrate where a first conductor layer is formed on a first main surface leaving a first blank part at an outer periphery and a second conductor layer is formed on a second main surface leaving a second blank part at an outer periphery; and a semiconductor element fixed to the second conductor layer. The first conductor layer is joined to the cushioning material through the solder material, and the cushioning material is wider than the semiconductor element.

Description

  The present invention relates to a power module, and more particularly, to a power module in which a circuit is configured using a ceramic substrate having a conductor layer formed on both sides of a main surface.

In the power module, a so-called DBC (registered trademark: Direct Bonded Copper) in which a Cu or Al conductor layer is fixed to both surfaces of a ceramic material such as Si ₃ N ₄ , Al ₂ O ₃ , and AlN by brazing or diffusion bonding. A substrate or a DBA (registered trademark: Direct Brazed Aluminum) substrate is used. These insulating substrates are bonded to a heat sink made of Cu, Al, or an alloy thereof by solder.

  The linear expansion coefficient of the ceramic material is 4 to 7 ppm / K, whereas the linear expansion coefficient of the heat sink is 18 ppm / K for Cu and 23 ppm / K for Al. There is a large gap between the linear expansion coefficients of the two, and a distortion caused by the linear expansion occurs between the insulating substrate and the heat sink. There remains room for improvement in reliability of power modules.

  In order to relieve the thermal strain due to the difference in linear expansion coefficient, a structure in which a buffer material having a linear expansion coefficient positioned between an insulating substrate and a heat sink is laminated between solder joint materials has been proposed (for example, Patent Document 1). . As the buffer material, a material having a higher thermal conductivity than the solder joint material is used in order not to reduce the heat dissipation. The thickness of the bonding layer affects the heat dissipation and reliability. Increasing the thickness of the bonding layer reduces heat dissipation, and decreasing it decreases reliability. Thus, the influence of the thickness of the bonding layer on the heat dissipation and reliability is in a trade-off relationship.

  In Patent Document 1, in order to make the heat dissipation properties of the structure in which the buffer material is laminated on the solder joint material and the structure without the buffer material, the thickness of the solder joint material above and below the buffer material is not included in the buffer material. It is necessary to make it smaller than the structure. At that time, when the increase in the strain amount due to the decrease in the thickness of the solder joint material is larger than the strain amount reduction due to the buffer material relaxing the difference in the linear expansion coefficient, the reliability is lowered.

  In order to solve this point, a structure in which only the corners of the buffer material laminated on the solder joint material are removed has been proposed (for example, Patent Document 2). Here, by increasing the thickness of the corners of the solder joint material, which is the starting point of peeling, and reducing the amount of plastic strain, the reliability is improved while minimizing the decrease in heat dissipation.

  The ratio of the cost of the semiconductor element to the total cost of the power module is large. In order to reduce the cost of the power module, it is effective to reduce the size of the semiconductor element. On the other hand, when the size is reduced, the heat generation density of the semiconductor element increases, so that a heat dissipation measure becomes important. Thermally conductive grease is used for bonding between the insulating substrate and the heat sink (hereinafter referred to as bonding under the substrate). The use of grease with low thermal conductivity makes it difficult to improve heat dissipation and hinders the reduction in size of the semiconductor element. In order to improve heat dissipation, solder joints are being considered in place of grease joints under the substrate. What is most concerned when solder bonding is applied to bonding under the substrate is the reliability of the bonding layer. One of the factors that determine the reliability of the joint is thermal stress caused by a difference in linear expansion coefficient between the materials to be joined.

  The heat sink is made of a metal such as Cu or Al. The linear expansion coefficient of the heat sink is 18 ppm / K for Cu and 23 ppm / K for Al. The insulating substrate is composed of an insulating layer and a conductor layer. The conductor layer is formed on both sides of the main surface of the insulating layer. The linear expansion coefficient of the insulating layer (ceramic material) is 4 to 7 ppm / K. Cu or Al is used for the conductor layer. For example, the insulating layer and the conductor layer are brazed and integrated with a bonding material such as Ag brazing. At this time, the apparent linear expansion coefficient of the entire insulating substrate is 7 to 12 ppm / K depending on the material and thickness of the insulating layer and the conductor layer. That is, a linear expansion coefficient difference of 10 ppm / K or more is generated between the heat sink and the insulating substrate.

  For example, when a lead-free solder such as Sn3.0Ag0.5Cu is used for the joining layer, the dissimilar material joint is brittle against thermal stress generated at the joint interface. It has been confirmed through experiments that the degradation mechanism due to metal fatigue, in which microcracks develop due to plastic deformation, is delaminated at a stretch due to brittle fracture, leading to a decrease in heat dissipation. For this reason, the thickness of the bonding layer is larger than 200 μm, for example, 300 μm, and such stress is dispersed.

  The thermal conductivity of copper is 355 W / mK, whereas the thermal conductivity of solder is 60 W / mK. Since the increase in the thickness of the bonding layer affects the heat conduction, a structure capable of relaxing the thermal stress without increasing the thickness of the bonding layer as much as possible is required.

  In order to increase the linear expansion coefficient of the insulating substrate, the conductor layer is preferably thickened. However, if a conductor layer that is many times thicker than the insulating layer is formed, the linear expansion mismatch between the insulating layer and the conductor layer becomes large, and the bonding reliability between the insulating layer and the conductor layer cannot be maintained. In reality, the ratio of the insulating layer to the conductor layer is limited to about 1: 1 to 1: 2.5. The linear expansion coefficient of the insulating substrate is about 7 to 12 ppm / K.

  Copper is more expensive and denser than Al. If Cu is used as a material in order to lower the linear expansion coefficient of the heat sink, the cost and weight increase as a contradiction. Moreover, it is necessary to circulate an antifreeze liquid in the vehicle-mounted water-cooled heat sink. Since an Al-made radiator is interposed in the cooling path, the corrosion degradation of the heat sink proceeds.

  When Al—SiC is employed for the heat sink, the linear expansion coefficient is 7 to 12 ppm / K. Although the effect of alleviating the linear expansion is great, the manufacturing process for impregnating SiC with Al is necessary, and the price is much higher than that of Al. Therefore, it can be said that Al is a good material for the heat sink in the on-vehicle power semiconductor device.

  Regarding the relaxation of the difference in linear expansion coefficient, a method of increasing the linear expansion coefficient of the insulating substrate, a method of decreasing the linear expansion coefficient of the heat sink, and a material in which the linear expansion coefficient is located between the insulating substrate and the heat sink were laminated. A method of forming a bonding layer has been considered.

JP 2007-250638 A JP 2007-150040

  Patent Document 2 is a technique for bonding under a semiconductor element. Although the length of the side of the buffer material may be smaller than the length of the side of the semiconductor element, it is desirable that the length is larger from the viewpoint of heat dissipation. The reason is that the semiconductor element generates heat due to a loss of current during operation, and the bonding layer under the semiconductor element needs to have a function of efficiently dissipating the heat.

  In the under-substrate bonding, it is necessary to optimize the size of the buffer material in order to improve the reliability while suppressing a decrease in heat dissipation. This is because there are places where heat dissipation is important and places where it is not important in the planar direction of the bonding layer, depending on the position of the semiconductor element mounted on the insulating substrate. Like patent documents 1 and 2, the probability that a void remains increases, so that a joining layer becomes a multilayer by buffer material. An object of the present invention is to obtain a joint structure with improved reliability while suppressing a decrease in heat dissipation.

  The power module according to the present invention includes a heat sink having a plurality of fins, a buffer material bonded to the heat sink via the solder material, the periphery of the side surface and both sides of the main surface being coated with the solder material, A ceramic substrate having a first conductor layer formed on the main surface leaving a first margin on the outer periphery, and a second conductor layer formed on the second main surface leaving a second margin on the outer periphery; And a semiconductor element fixed to the second conductor layer. The first conductor layer and the buffer material are joined via a solder material, and the width of the buffer material is larger than the width of the semiconductor element.

  According to the present invention, the buffer material is provided between the insulating substrate and the heat sink in the sub-substrate bonding. The amount of plastic strain at the outer periphery of the bonding layer is reduced, and the reliability of the bonding layer can be improved.

It is sectional drawing which shows the power module of Embodiment 1 by this invention. It is a top view which shows the relationship between an insulating substrate and a semiconductor element. It is a top view which shows the 1st structure of a joining layer. It is a top view which shows the 2nd structure of a joining layer. FIG. 3 is a cross-sectional view for explaining the roles of a solder sheet and a buffer material in the first embodiment. It is sectional drawing which shows the power module of Embodiment 2 by this invention. FIG. 10 is a cross-sectional view for explaining the roles of a solder sheet and a buffer material in the second embodiment. It is sectional drawing which shows the power module of Embodiment 3 by this invention. It is sectional drawing explaining the structure of the buffer material of Embodiment 3 by this invention.

  Embodiments of a power module (power semiconductor device) according to the present invention will be described below in detail with reference to the drawings. In addition, this invention is not limited to the following description, In the range which does not deviate from the summary of this invention, it can change suitably.

Embodiment 1 FIG.
FIG. 1 is a cross-sectional view of a power module 100 according to the first embodiment. As shown in the figure, the insulating substrate 1 is configured to have a conductor layer 1a and a conductor layer 1b on both sides of a ceramic substrate 1c. A semiconductor element 2 and a bonding layer 7 are bonded to the insulating substrate 1. The heat sink 3 is bonded to the insulating substrate 1 by a bonding layer 7. The bonding layer 7 between the insulating substrate 1 and the heat sink 3 has a structure in which the buffer material 6 and the solder bonding material 5 are combined. The buffer material 6 has a thermal conductivity larger than that of the solder bonding material 5 and has a linear expansion coefficient between the insulating substrate 1 and the heat sink 3. The semiconductor element 2 and the conductor layer 1a are joined by a solder layer 4. For the solder layer 4, a lead-free solder such as Sn3.0Ag0.5Cu is used.

  The heat sink 3 has a plurality of fins 3f and is made of a metal such as Cu or Al. The linear expansion coefficient of the heat sink 3 is 18 ppm / K for Cu and 23 ppm / K for Al. The linear expansion coefficient of the ceramic substrate 1c is 4 to 7 ppm / K. Cu or Al is used for the conductor layers 1a and 1b. For example, the ceramic substrate 1c and the conductor layers 1a and 1b are brazed and integrated with a material such as Ag brazing. The apparent linear expansion coefficient of the entire insulating substrate 1 is 7 to 12 ppm / K depending on the material and thickness of the insulating layer and the conductor layer. The insulating substrate 1 is bonded to the mounting surface 3 a of the heat sink 3 via the bonding layer 7.

FIG. 2 shows the relationship between the insulating substrate 1 and the semiconductor element 2. Four semiconductor elements 2 w to z are bonded to the conductor layer 1 a of the insulating substrate 1. The conductor layer 1a is smaller than the ceramic substrate 1c, and a blank portion 1d is left around the ceramic substrate 1c. Similarly, the conductor layer 1b is smaller than the ceramic substrate 1c, and a blank portion is left around the ceramic substrate 1c. For the ceramic substrate 1c, Si ₃ N ₄ , Al ₂ O ₃ , AlN, or the like is used. The conductor layer 1a and the conductor layer 1b are fixed to both surfaces of the ceramic substrate 1c by brazing or diffusion bonding.

  As the power semiconductor element 2, in addition to the element formed of silicon (Si), a element formed of a wide band gap semiconductor having a band gap larger than that of silicon can be suitably used. Examples of the wide band gap semiconductor include silicon carbide (SiC), a gallium nitride material, and diamond. When a wide band gap semiconductor is used, the allowable current density is high and the power loss is also low, so that the apparatus using the semiconductor element 2 can be downsized.

  FIG. 3 shows the configuration of the bonding layer. The bonding layer 7 has a structure in which the buffer material 6 and the solder bonding material 5 are combined. Both the main surface and the periphery of the side surface of the plate-shaped cushioning material 6 are covered with the bonding material 5. The buffer material 6 does not have a portion exposed from the solder joint material 5. The buffer material 6 is provided so that the end portion thereof is located on the center side of the bonding layer 7 in comparison with the end portion of the bonding layer 7 in both the X direction and the Y direction, and is at least directly below the semiconductor elements 2w to z. . That is, the width of the buffer material 6 is larger than the width of the semiconductor elements 2w to z. With such a structure, the thickness of the bonding layer 7 is about 400 μm. In addition, the thickness of the bonding layer 7 is preferably 1000 μm or less from the viewpoint of heat dissipation. The thickness of the bonding layer on the outer peripheral portion of the bonding layer excluding the bonding layer directly below the semiconductor element is increasing.

  Here, the buffer material 6 has a higher thermal conductivity than the solder joint material 5 in order to diffuse heat. As a result, reliability is improved while minimizing a decrease in heat dissipation. Specifically, Cu, Ni, and Fe are used as the material of the buffer material 6. When using Fe, it is preferable to perform plating in order to improve the wettability with the solder. Compared to the thermal conductivity of the solder joint material (approximately 30 W / mK to 60 W / mK), the thermal conductivity of Cu is as large as 300 W / mK to 400 W / mK. By using the buffer material 6, the thermal resistance in the direction penetrating the laminated structure is reduced. It can also be expected to spread heat in the horizontal direction.

  FIG. 4 shows another configuration of the bonding layer. Four buffer materials 6 are provided so as to correspond to the semiconductor elements 2w to z. The buffer material 6w is provided immediately below the semiconductor element 2w, and the width is larger than the width of the semiconductor element 2w. Similarly, the buffer material 6x is provided immediately below the semiconductor element 2x, and its width is larger than the width of the semiconductor element 2x. Similarly, the buffer material 6y is provided immediately below the semiconductor element 2y, and its width is larger than the width of the semiconductor element 2y. Similarly, the buffer material 6z is provided immediately below the semiconductor element 2z, and its width is larger than the width of the semiconductor element 2z.

  FIG. 5 shows a method for forming the bonding layer. First, when the plate material (buffer material 6) is sandwiched between the solder sheets 10 having a thickness of about 100 to 200 μm and then hot pressing is performed, the solder sheets 10 are melted. The solder joint material 5 formed by melting the solder sheet 10 covers the periphery of the side surface of the buffer material 6 and both sides of the main surface. In the case of solder bonding, air surrounded by the solder sheet 10 and the buffer material 6 cannot come out of the bonding layer and may remain as a void inside the bonding layer. The probability that voids remain as the bonding layer becomes multilayer due to the buffer material 6 increases. In addition, when the bonding area is large, air is not easily discharged out of the bonding layer 7 and voids are easily generated.

  Since Patent Document 2 is bonding under a semiconductor element, the bonding area is small, and even when a plate-shaped cushioning material is used, voids are hardly generated. However, voids are more likely to occur in the under-substrate bonding than in the under-semiconductor element bonding. For example, when four semiconductor elements 2 are mounted as shown in the figure, the area of the bonding layer is at least four times or more.

  When the buffer material 6 is thicker than the solder bonding material 5, the thickness of the bonding layer 7 is defined by the buffer material 6. If the solder bonding material 5 is insufficient with respect to the thickness of the bonding layer 7, voids are generated inside the bonding layer. Therefore, it is desirable that the buffer material 6 has a thickness not more than three times that of the solder joint material 5. In addition, as the buffer material 6 becomes thinner than the solder bonding material 5, the effect of the buffer material is reduced. Therefore, the buffer material 6 is preferably 1/10 or more thicker than the solder bonding material 5.

  By removing the buffer material 6 also at the ends of the bonding layer other than the corners of the bonding layer, the occurrence and progress of peeling can be suppressed. In the bonding between the semiconductor element 2 and the insulating substrate 1, the reduction of the buffer material 6 having a high thermal conductivity basically affects the heat dissipation. However, if it is in a range excluding the portion directly under the semiconductor element 2 in the under-substrate bonding, the influence of heat dissipation is small even when there is no buffer material 6 having a high thermal conductivity. Moreover, since the junction structure under the center part of the insulating substrate in which the semiconductor element exists does not change, it is possible to suppress a decrease in thermal resistance.

  According to the structure according to the first embodiment, the buffer material 6 can reduce the difference in linear expansion coefficient between the insulating substrate 1 and the heat sink 3. Furthermore, since the end portion of the buffer material 6 is located closer to the center side of the bonding layer than the end portion of the bonding layer in both the X direction and the Y direction, and the four corners of the bonding layer are chamfered, the end portion of the bonding layer is It consists only of the solder joint material 5. Therefore, the thickness of the bonding layer at the end of the bonding layer increases, and the amount of strain at the end of the bonding layer can be reduced. With these effects, the reliability of the bonding layer 7 can be improved. Further, since the buffer material 6 having a high thermal conductivity is large enough to include all of the semiconductor elements 2 in the plane direction, the heat dissipation right under the semiconductor elements 2 as the heat generation source is maintained.

Embodiment 2. FIG.
FIG. 6 is a partial cross-sectional view of the power module according to the second embodiment. As the cushioning material 6 according to the second embodiment, a material having a cavity such as a sponge-like foam metal, a mesh-like plain woven wire mesh, a metal foil laminate, or the like is used. The laminate of metal foils consists of metal foils cut into strips, and the laminates are arranged by changing the orientation of the metal foils in the vertical and horizontal directions for each layer. It is better to spot weld so that the metal foil does not fall apart. As shown in the figure, the cushioning material 6 has a cavity 6a formed therein. The cavities 6a are connected to each other and communicate to the side surface and the surface layer. Since the material of the cushioning material 6 is connected in the joining plane direction and can be handled as a unit, handling property can be secured and productivity is high. According to the cushioning material 6 according to the second embodiment, gas can escape to the outer periphery of the cushioning material. At the time of hot pressing, the solder bonding material 5 is melted and the cavity 6a is filled with solder. Details are shown below.

  In the under-substrate bonding, the cause of the reduction in heat dissipation is peeling of the bonding layer due to a void inside the bonding layer immediately after bonding and thermal stress. The peeling of the bonding layer due to thermal stress is as described above. In the case of a flux-cored solder bonding material, voids in the bonding layer are mainly generated when the flux is volatilized and remains in the bonding layer. In order to prevent voids due to flux, it is also possible to use a fluxless solder joint material. However, even if a fluxless solder bonding material is used, voids are generated in the bonding layer when the solder bonding material takes air into the bonding layer.

  FIG. 7 is a cross-sectional view of the power module before and after joining according to the present embodiment. The cushioning material 6 has a cavity, and the cavity is three-dimensionally connected to the surface layer. The cushioning material 6 according to the second embodiment can secure more air escape paths than the plate material according to the first embodiment. Since it is considered that the probability that air is completely surrounded by the solder sheet 10 and the buffer material 6 is reduced, voids inside the bonding layer 7 can be reduced after bonding, and heat dissipation is improved. At this time, when the cushioning material 6 has a sponge shape, a mesh shape, a laminated shape, or the like, it is possible to prevent a large bubble from remaining even if a small void is trapped without being discharged.

  That is, when the bonding layer 7 includes a sponge-like, mesh-like, or laminated cushioning material, an unwetting portion that allows gas to pass through remains until the entire surface is completely wetted. If there is no buffer material and it is just a space, if there is a gas trapped inside when the solder melts, the remaining air will escape from the state surrounded by the molten solder It is necessary to create a liquid / gas interface that newly connects the enclosed space with the outside. On the other hand, when the buffer material is included, the gas / solid interface exists until the entire surface of the buffer material is coated with the liquid, and the surface area of the gas / solid interface is compared with the case where the buffer material is not present. It is getting bigger.

  Since the surface area of the buffer material is larger than the surface area of the ceramic substrate and heat sink that are in contact with the upper and lower sides of the bonding layer, the entire surface of the buffer material is completely wetted by the molten solder, and the interface between the ceramic substrate and the heat sink and solder ends Later. For this reason, the solid / gas interface is always maintained until the entire surface of the buffer material becomes the solid / liquid interface. This action prevents the solid / gas interface from being changed to a solid / liquid interface on the surface of the ceramic substrate and the surface of the heat sink in the absence of a buffer material, and as a result, the gas is prevented from being left inside. However, the gas is left behind after the entire surface is wet.

  Since this left-over gas is limited to a small space inside the mesh, sponge, or laminate, there cannot be a large void that is in contact with the upper and lower surfaces of the bonding layer at the same time. As a result, even if there is a void, it means that the size is equal to or smaller than the space divided by the cushioning material. Thus, it became possible to prevent the generation of large voids due to the fact that the surface area of the buffer material was made larger than the soldering surface of the ceramic substrate or the heat sink and the effect of finely dividing the space to be soldered.

Embodiment 3 FIG.
FIG. 8 is a cross-sectional view of the power module according to the third embodiment. As shown in the figure, the cushioning material 6 is provided with protrusions 6 a in the vicinity of the corners with respect to the planar direction of the heat sink 3. Similarly, the cushioning material 6 is provided with protrusions 6 b in the vicinity of the corners with respect to the planar direction of the insulating substrate 1. The conductor layer 1b of the insulating substrate 1 may be formed with a depression (or hole) 1d that can accommodate the protrusion 6b at a position corresponding to the protrusion 6b. Similarly, the heat sink 3 may be formed with a recess (or hole) 3b that fits the protrusion 6a at a position corresponding to the protrusion 6a.

  FIG. 9 shows the arrangement of the protrusions 6 a and the protrusions 6 b formed on the cushioning material 6. Since the cushioning material 6 has four corners, it is difficult for the peeling to progress. Four pairs of protrusions 6 a and protrusions 6 b are arranged at the corners of the cushioning material 6. The heat sink 3 preferably has depressions 3b formed at locations corresponding to the four protrusions 6a. The conductor layer 1b is preferably formed with depressions 1d at locations corresponding to the four protrusions 6b.

  The peeling of the bonding layer 7 is caused by thermal stress due to the difference in linear expansion coefficient during the temperature cycle. Since the thermal stress increases as the difference in linear expansion coefficient increases, the amount of plastic strain increases and peeling tends to progress. Accordingly, when the difference in linear expansion coefficient is large unlike the bonding layer having a small difference in linear expansion coefficient, it is considered that the reliability is improved by increasing the thickness of the bonding layer. Further, the displacement of the insulating substrate 1 from the desired range with respect to the heat sink 3 affects subsequent processes.

  Furthermore, if the position of the semiconductor element 2 with respect to the insulating substrate 1 is biased, the expected cooling effect on the heat sink 3 may not be exhibited. Therefore, the position of the insulating substrate 1 with respect to the heat sink 3 is often controlled by a jig. However, the use of a jig is not preferable because of an increase in the cost of the jig, the necessity of a jig fixing portion, and an increase in the jig arrangement process.

  According to such a configuration, the minimum thickness of the bonding layer can be defined according to the difference in linear expansion coefficient between the end portions of the upper and lower shock absorbing materials of the shock absorbing material 6, so that the amount of strain at the end of the bonding layer can be increased. It is possible to prevent the decrease in reliability. Further, the position of the insulating substrate 1 with respect to the heat sink 3 can be controlled by using a recess or a hole provided in the buffer material 6 without using a jig.

  When SiC is used for the semiconductor element, the semiconductor element is operated at a higher temperature than that of Si in order to take advantage of the characteristics. In a power module equipped with a SiC device, higher reliability is required as a semiconductor element. Therefore, the merit of the present invention for realizing a highly reliable power module becomes more effective.

  It should be noted that the present invention can be freely combined with each other within the scope of the invention, and each embodiment can be appropriately modified or omitted.

DESCRIPTION OF SYMBOLS 1 Insulating board | substrate, 1a conductive layer, 1b conductive layer, 1c ceramic substrate, 1d hollow, 2 semiconductor element, 3 heat sink, 3a mounting surface, 3b hollow, 4 solder layer, 5 solder joint material, 6 cushioning material, 6a protrusion, 6b Protrusion, 7 bonding layer, 10 solder sheet, 100 power module

Claims (11)

A heat sink having a plurality of fins;
A buffer material that is coated with a solder material on both sides of the side surface and the main surface, and is joined to the heat sink via the solder material;
A first conductor layer is formed on the first main surface leaving a first margin on the outer periphery, and a second conductor layer is formed on the second main surface leaving a second margin on the outer periphery. A substrate,
A semiconductor element fixed to the second conductor layer,
The first conductor layer and the buffer material are joined via the solder material,
The width of the buffer material is larger than the width of the semiconductor element.   The power module according to claim 1, wherein the buffer material is made of a plate-like metal.   The power module according to claim 1, wherein the cushioning material is made of a foam metal.   The power module according to claim 1, wherein the buffer material is made of a wire mesh.   2. The power module according to claim 1, wherein the cushioning material is made of a laminate of metal foils cut into strips, and the laminate is arranged by changing the orientation of the metal foil for each layer. .   6. The power module according to claim 2, wherein the cushioning material is formed with a protrusion toward the ceramic substrate and a protrusion toward the heat sink. 7.   The power module according to any one of claims 2 to 6, wherein the cushioning material has a polygonal shape, and a corner portion is notched.   The power module according to any one of claims 2 to 7, wherein the thermal conductivity of the buffer material is larger than the thermal conductivity of the solder material.   The power module according to claim 8, wherein a linear expansion coefficient of the cushioning material is larger than a linear expansion coefficient of the ceramic substrate and smaller than a linear expansion coefficient of the heat sink.   The power module according to claim 1, wherein the semiconductor element is formed of a wide band gap semiconductor.   The power module according to claim 10, wherein the wide band gap semiconductor is one of silicon carbide, a gallium nitride-based material, and diamond.