JP2015042426A - Sample fixed base of abrasive machine and abrasive machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample fixed base for use in abrasive machining of cross-sections such as semiconductor/electronic components and achieving reductions in unsuccessful abrasion and abrasive time, and an abrasive machine including the sample fixed base and an observation tool.SOLUTION: A sample 9 to be subjected to cross-sectional machining by an abrasive machine including a sample base 10 formed out of a magnetic material is held between two plates 1 and 4, with the plates 1 and 4 fastened together by wing bolts 2 and nuts 5. A convex portion 6 of the nut 5 used for fastening is positioned to contact a bottom surface of the sample base 10, and a magnet 7 provided flush with the plate 4 is magnetized and fixed to the sample base 10, thereby facilitating attaching the magnet 7 to the sample base 10. Since the abrasive machine further includes an observation tool that enables a user to visually determine a remaining allowance for abrasion, time of repetition work for checking the remaining allowance can be reduced.

Description

  The present invention relates to a sample fixing table and a polishing machine for sandwiching a sample used in a table polishing machine for cross-sectional polishing.

  Work that relies on intuition is performed for manual polishing of samples wrapped in resin. In addition, manual polishing and general Ar ion irradiation pretreatment are processed with a remaining margin of about 100 μm in dedicated mechanical polishing.

JP 2007-181860 JP

  Polishing time is required to prevent failure of polishing in a hand polishing machine or a polishing machine. This is because there are many repeated operations to check the remaining cost. Therefore, the sample fixing base and the polishing machine used in the polishing machine of the invention solve the above problems.

  In the sample fixing base of the present invention, the two plate plates sandwiching the sample are provided with through holes, a magnet is provided flush with the surface of one plate plate, the nut that fits the counterbore is convex, and the through holes are When the butterfly bolt is passed through and tightened with a nut, and the butterfly bolt is loosened, the sample can be freely attached and detached and attached to the sample stage provided in the polishing machine.

The polishing machine of the present invention is an observation tool for viewing the sample mounted on the sample fixing table described above with a magnifying glass or a CCD camera of the observation tool. take
The fastening that pushes the screw tip of the shaft to the observation tool is fixed, and the shaft base is provided with a through hole, a through screw hole, and a through hole, and one of the shafts is inserted into the through hole and the screw hole is used. Then, the surface of the shaft is pressed and fastened with the tip of the butterfly bolt, and an observation tool is provided in the polishing machine by fastening the screw with a screw hole provided on the upper surface of the polishing machine.

  The sample fixing table and observation tool of the polishing machine are equipped with a dedicated jig for the Ar ion device on the sample fixing table, and with the observation tool, the polishing of the pretreatment of the Ar ion device is about 10 μm of the remaining allowance ( For example, when the magnification of the observation tool is 25, it is possible to visually check the remaining margin of about 10 μm.) This shortens the irradiation time of the Ar ion apparatus, and is more efficient and labor saving than a hand polishing or polishing machine.

  A highly versatile sample fixing base is to clamp a sample having a range of several millimeters to 2 cm by lengthening a butterfly bottle (size). For example, in non-resin embedding, it is useful to apply a thumb-sized semiconductor and a small chip to inspection / investigation. Since the above is different from general resin embedding, it is possible to reduce the cost and environmental impact of resin curing time and materials.

 In the present invention, the sample stand of magnetic material such as iron provided in the polishing machine is a semi-automatic type or manual type as described in the following examples, and the magnet and nut provided in the sample fixing stand are fixed to the sample stand. Can be easily installed with a single touch.

The sample fixing base is shown in the oblique view. The sample fixing table and sample table are shown in the side view. The sample fixing table, the observation tool, and the sample table are shown in a side view. The observation tool is shown in a side view.

  The sample fixing base will be described with reference to FIGS. 1 and 2. The two plate plates sandwiching the sample 9 have the end surface protruding several millimeters near the center of the sample 9 position. Plate plate 1 for fastening sample 9 with butterfly bolt 2 is provided with through holes 3 provided on the left and right sides and plate plate 4 is provided with counterbore 11 (not shown) of an interference fit, and magnet 7 is flush with nut 5 from plate plate 4. This is a sample fixing base having a structure protruding on the convex 6. The fixing for clamping the sample 9 is a tightening torque of the fingertips of the butterfly bolt 2 so that the plate plate is slightly curved. The sample base 10 of magnetic material provided in the polishing machine is polished by the magnet 7 of the plate plate 4 and the protrusion 6 of the nut 5 and the sample 9 is detachable and reusable by loosening the butterfly bolt 2 attached to the plate plate 1 It becomes a simple sample fixing base.

  The observation tool 13 will be described with reference to FIG. 4. In order to observe how the sample is polished with the observation tool provided in the polishing machine, the observation table 18, the observation tool 15, the through hole 16 (not shown), and the through screw hole 19 are used. Using this, the observation tool 15 is inserted into a through hole 16 (not shown), and the screw 14 at the tip of the shaft 20 is fastened to the through screw hole 19 to be fastened. A through hole 33 (not shown), a screw hole 23, and a through hole 26 provided in the shaft base 22 are formed by connecting a shaft surface inserted into the through hole 26 of one of the shafts 20 into the butterfly using the screw hole 23. The fastening that presses the tip of the bolt 24 is fixed. The shaft base 22 is fixed by fastening a screw 17 using a through hole 33 (not shown) and a screw hole 27 in the upper surface portion 25 of the polishing machine. The focus of the subject can be adjusted by loosening the butterfly bolt 24 and using the shaft 20, and with a sample fixing base that clamps the sample, it is more efficient and labor-saving than work that relies on general intuition and mechanical polishing operations Is intended.

  The sample fixing base will be described with reference to FIG. 1 and FIG. The plate plate 1 that sandwiches the sample 9 between the two plates is provided with through holes 3 on the left and right, and one plate plate 4 is fastened with a nut 5 that fits a counterbore through hole (not shown) and a butterfly bolt 2 that passes through the through hole 3 To do. The magnet 7 fitted to the counterbore (not shown) of the plate plate 4 is provided in the same manner, and is fixed to the magnetic material sample base 10 and the sample fixing base consisting of the positioning with the nut 5 protruding to the convex 6 is the sample base. 10 and polishing in the fixed state.

  The use of the observation tool will be described with reference to FIG. 3. The sample fixing table 30 and the sample table 10 with the sample 9 mounted on the upper surfaces of the polishing plate 31 and the paper 29 are magnetized and fixed. The magnet A34 and the magnetic material sample stage 10 are fixedly supported. The polishing method for observing how the sample 9 is polished with an observation tool in a semi-automatic type and a manual type is intended to reduce polishing failure (reducing mental work load) and shorten the polishing time.

1 Plate plate
2 Butterfly bolt
3 Through hole
4 Plate plate
5 Nut
6 Convex
7 Magnet
9 samples
10 Sample stage
12 counterbore (not shown)
13 Observation tool
14 screw
16 Through hole (not shown)
17 screw
18 Observatory
19 Through screw hole
20 shaft
22 Shaft base
23 Screw hole
24 butterfly bottle
25 Polishing machine top surface
26 Through hole
27 Screw hole
28 Polishing jig
29 paper
30 Sample holder
31 Polishing machine
33 Through hole (not shown)
34 Magnet A

Claims (2)

  A sample fixing base attached to a sample base made of a magnetic material provided in a polishing machine, comprising two plate plates having a through hole and sandwiching the sample, and a butterfly inserted into the through hole and fastened by a nut A sample fixing base comprising a bolt and a magnet provided so as to be flush with one surface of the plate plate. 2. A polishing machine comprising: the sample fixing base according to claim 1; and an observation tool for observing how the sample sandwiched between the sample fixing bases is polished.

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