JP2015040668A - Exhaust device - Google Patents

Exhaust device Download PDF

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JP2015040668A
JP2015040668A JP2013172722A JP2013172722A JP2015040668A JP 2015040668 A JP2015040668 A JP 2015040668A JP 2013172722 A JP2013172722 A JP 2013172722A JP 2013172722 A JP2013172722 A JP 2013172722A JP 2015040668 A JP2015040668 A JP 2015040668A
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exhaust
exhaust duct
opening
air volume
rotation
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JP6285663B2 (en
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正己 堀江
Masami Horie
正己 堀江
慎 坂上
Shin Sakagami
慎 坂上
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Okamura Corp
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Abstract

PROBLEM TO BE SOLVED: To provide an exhaust device which includes an airflow meter durable for a long-time use in an atmosphere of a corrosive gas, in which the airflow meter can be inspected and replaced without disassembling piping, and which can maintain a proper opening wind speed with small energy consumption by controlling an exhaust air amount according to an opening degree of a housing.SOLUTION: An exhaust device includes: a processing chamber; a housing for covering the processing chamber; a door for opening/closing an opening of the housing; exhaust means for exhausting gas in the processing chamber to the outdoors via an exhaust duct; air amount detection means for detecting the exhaust air amount of the gas flowing in the exhaust duct. In the air amount detection means, an impeller for rotating by receiving the flow of the gas flowing in the exhaust duct is arranged in the exhaust duct, and rotation detection means for detecting the rotation of the impeller is arranged outside of the exhaust duct.

Description

本発明は、局所排気装置、卓上フード、簡易フード、安全キャビネット、バイオハザード用キャビネット、クリーンベンチ等の排気装置に関する。   The present invention relates to an exhaust device such as a local exhaust device, a table hood, a simple hood, a safety cabinet, a biohazard cabinet, and a clean bench.

特許文献1には、ドラフトチャンバ等における可変風量制御装置に関する技術が開示されている。特許文献1の可変風量制御装置は、オリフィスを排気ダクト管内に設け、前後のオリフィスの圧力差から排気ダクト管内の排気風量を算出し、算出した換気風量が目標の換気風量と略一致するように排気ダクト管内のダンパ開度を調節している。   Patent Document 1 discloses a technique related to a variable air volume control device in a draft chamber or the like. In the variable air volume control device of Patent Document 1, an orifice is provided in the exhaust duct pipe, the exhaust air volume in the exhaust duct pipe is calculated from the pressure difference between the front and rear orifices, and the calculated ventilation air volume substantially matches the target ventilation air volume. The damper opening in the exhaust duct pipe is adjusted.

特開2012−247121号公報JP 2012-247121 A

しかしながら、特許文献1にあっては、ダクト管内に流れる空気には、酸、アルカリ等の腐食性物質が含まれることがあり、オリフィスの圧力取入れ口に腐食性物質が付着すると、圧力取入れ口が腐食してしまう。オリフィスの圧力取入れ口が腐食してしまうと、風量を正確に検出できず、適切に排気風量を制御できないという問題がある。また、オリフィスが正常に動作していないことに、作業者が気付かないで実験等を行ってしまうこともある。   However, in Patent Document 1, corrosive substances such as acid and alkali may be included in the air flowing in the duct pipe, and when corrosive substances adhere to the pressure inlet of the orifice, the pressure inlet is It will corrode. If the pressure inlet of the orifice corrodes, there is a problem that the air volume cannot be detected accurately and the exhaust air volume cannot be controlled appropriately. Further, an experiment or the like may be performed without the operator noticing that the orifice is not operating normally.

この対策として、オリフィスを耐酸性、耐アルカリ性に優れた材料を使用して作ることもできるが、コスト高となってしまう。また、風速計として、特許文献1の圧力検出方式ではなく、熱線式風速計、サーミスタ風速計を使用することもできるが、腐食性ガス雰囲気では、風速検出部が腐食してしまうので、特許文献1の課題を解決することはできない。   As a countermeasure, the orifice can be made using a material excellent in acid resistance and alkali resistance, but the cost becomes high. In addition, a hot-wire anemometer or a thermistor anemometer can be used as an anemometer, instead of the pressure detection method disclosed in Patent Document 1. However, in a corrosive gas atmosphere, the wind speed detector is corroded. One problem cannot be solved.

さらに、オリフィスの健全性を確保するために、オリフィスを定期的に点検することも行われているが、排気ダクトに取付けられたオリフィスを点検するには、ドラフトチャンバに接続される配管を分解する必要があり、点検作業に多大な時間とコストを要してしまうという問題もある。また、オリフィスが故障して交換する場合においても、ドラフトチャンバに接続される配管を分解する必要があり、交換作業に多大な時間とコストを要してしまう。   Furthermore, in order to ensure the soundness of the orifice, the orifice is regularly inspected, but in order to inspect the orifice attached to the exhaust duct, the pipe connected to the draft chamber is disassembled. There is also a problem that the inspection work requires a lot of time and cost. Further, even when the orifice is broken and replaced, it is necessary to disassemble the pipe connected to the draft chamber, which requires a lot of time and cost for the replacement work.

また、特許文献1の可変風量制御装置は、排気ダクト管内の排気風量を算出し、算出した換気風量が目標の換気風量となるように排気ダクト管内のダンパ開度を調節するのみであり、筐体の開口の開口度合いを考慮していない。その結果、筐体の開口面積が最大の条件で、排気風量を設定すると、開口面積が小さくなると、開口部の風速が必要以上に速くなり、排気に要するエネルギが必要以上に大きくなる問題がある。逆に、筐体の開口面積が最小の条件で、排気風量を設定すると、開口面積が大きくなると、開口部分の流速が低下し、開口部分を流れる空気が逆流してしまうこともある。   Further, the variable air volume control device of Patent Document 1 only calculates the exhaust air volume in the exhaust duct pipe, and only adjusts the damper opening in the exhaust duct pipe so that the calculated ventilation air volume becomes the target ventilation air volume. It does not consider the degree of opening of the body opening. As a result, when the exhaust air volume is set under the condition that the opening area of the housing is the maximum, if the opening area becomes small, the wind speed of the opening becomes higher than necessary, and the energy required for the exhaust becomes larger than necessary. . Conversely, if the exhaust air volume is set with the minimum opening area of the housing, when the opening area increases, the flow velocity of the opening portion decreases, and the air flowing through the opening portion may flow backward.

本発明は、このような問題点に着目してなされたもので、腐食性ガスの雰囲気内で使用しても、長期間の使用に耐えることができる風量計を備え、配管を分解しないで、風量計を点検、交換できる排気装置を提供することを目的とする。また、筐体の開口の度合いに応じて、排気風量を制御することにより、エネルギー消費が少なく、適切な開口風速を保つことができる排気装置を提供することを目的とする。   The present invention has been made paying attention to such problems, and equipped with an air flow meter that can withstand long-term use even in an atmosphere of corrosive gas, without disassembling the piping, An object of the present invention is to provide an exhaust device capable of checking and replacing an air flow meter. It is another object of the present invention to provide an exhaust device that can reduce the energy consumption and maintain an appropriate opening air speed by controlling the amount of exhaust air according to the degree of opening of the housing.

前記課題を解決するために、本発明の排気装置は、
処理室と前記処理室を覆う筐体と、前記筐体の前面の開口を開閉する扉と、前記処理室内の気体を排気ダクトを介して室外に排気する排気手段と、前記排気ダクトを流れる気体の排気風量を検出する風量検出手段と、を備えた排気装置であって、前記風量検出手段は、前記排気ダクトを流れる気体の流れを受けて回転する羽根車を排気ダクト内に配置し、前記羽根車の回転を検出する回転検出手段を前記排気ダクトの外側に配置したことを特徴としている。
この特徴によれば、排気ダクトを流れる気体の流れを受けて回転する羽根車を排気ダクト内に配置し、羽根車の回転を検出する回転検出手段を排気ダクトの外側に配置することにより、回転検出手段を腐食性ガスに触れないようにすることができるので、腐食による故障を防止でき、腐食性雰囲気で長期間使用することができる。また、回転検出手段を排気ダクトの外側に配置したので、排気ダクトを分解せずに回転検出手段の点検、交換を行うことができる。
In order to solve the above-described problem, an exhaust device of the present invention includes:
A processing chamber, a casing covering the processing chamber, a door for opening and closing an opening on the front surface of the casing, an exhaust means for exhausting the gas in the processing chamber to the outside through an exhaust duct, and a gas flowing through the exhaust duct An air volume detecting means for detecting the exhaust air volume of the exhaust air flow detecting means, wherein the air volume detecting means arranges an impeller that rotates in response to the flow of gas flowing through the exhaust duct in the exhaust duct, and A rotation detecting means for detecting the rotation of the impeller is arranged outside the exhaust duct.
According to this feature, the impeller that rotates in response to the flow of gas flowing through the exhaust duct is disposed in the exhaust duct, and the rotation detecting means that detects the rotation of the impeller is disposed outside the exhaust duct, thereby rotating Since the detection means can be kept away from corrosive gas, failure due to corrosion can be prevented, and the detection means can be used for a long time in a corrosive atmosphere. Further, since the rotation detection means is disposed outside the exhaust duct, the rotation detection means can be inspected and replaced without disassembling the exhaust duct.

本発明の排気装置は、
前記風量検出手段が、前記羽根車を支持する回転軸と、前記回転軸を回転自在に支持する軸受と、前記軸受を支持するブラケットと、前記回転軸に取付けた回転検出板と、前記ブラケットに取付けられた前記回転検出板の回転を検出するセンサと、を一体に構成し、前記風量検出手段を前記排気ダクト外側から挿入して、前記排気ダクトに取付けることを特徴としている。
この特徴によれば、風量検出手段を排気ダクト外側から挿入したので、排気ダクトを分解せずに風量検出手段の取付け、分解、点検を行うことができる。
The exhaust device of the present invention is
The air volume detection means includes a rotating shaft that supports the impeller, a bearing that rotatably supports the rotating shaft, a bracket that supports the bearing, a rotation detection plate attached to the rotating shaft, and a bracket. And a sensor for detecting the rotation of the attached rotation detection plate, and the air volume detecting means is inserted from the outside of the exhaust duct and attached to the exhaust duct.
According to this feature, since the air volume detecting means is inserted from the outside of the exhaust duct, the air volume detecting means can be attached, disassembled and inspected without disassembling the exhaust duct.

本発明の排気装置は、
前記排気装置は、前記扉の開閉位置を検出する開閉位置検出手段をさらに備え、前記風量検出手段の検出結果と前記開閉位置検出手段の検出結果とから、前記筐体の前面の開口を流れる風速を演算し、前記演算した風速が目標風速に略一致するように、前記排気手段を制御することを特徴としている。
この特徴によれば、風量検出手段の検出結果と開閉位置検出手段の検出結果とから演算した風速が、目標風速とが略一致するように排気風量を制御するので、前記筐体の開口の開口度合いが変化しても、適切な開口部の風速を保つことができるので、開口部の風速が必要以上に速くなって、排気装置が多大なエネルギを消費することを抑えることができる。逆に、開口部の風速が低下して、開口部分を流れる空気が逆流してしまうことを防止することができる。
The exhaust device of the present invention is
The exhaust device further includes an opening / closing position detecting means for detecting an opening / closing position of the door, and the wind speed flowing through the opening on the front surface of the housing from the detection result of the air volume detection means and the detection result of the opening / closing position detection means. And the exhaust means is controlled so that the calculated wind speed substantially coincides with the target wind speed.
According to this feature, the exhaust air volume is controlled so that the wind speed calculated from the detection result of the air volume detection means and the detection result of the opening / closing position detection means substantially matches the target wind speed. Even if the degree changes, it is possible to maintain the appropriate wind speed of the opening, so that the wind speed of the opening is increased more than necessary, and the exhaust device can be prevented from consuming a great deal of energy. Conversely, it is possible to prevent the air flowing through the opening from flowing backward due to a decrease in the wind speed of the opening.

本発明の排気装置として、ヒュームフードに適用した例を示す図である。It is a figure which shows the example applied to the fume hood as the exhaust apparatus of this invention. (a)は風量検出手段の構成を示す横断面図であり、(b)は(a)の側面図である。(A) is a cross-sectional view which shows the structure of an air volume detection means, (b) is a side view of (a). 風量検出手段を排気ダクトへの取付け、取外しを示す横断面図である。It is a cross-sectional view which shows attachment and removal of an air volume detection means to an exhaust duct.

本発明に係る排気装置を実施するための形態を実施例に基づいて以下に説明する。   EMBODIMENT OF THE INVENTION The form for implementing the exhaust apparatus which concerns on this invention is demonstrated below based on an Example.

本発明に係る排気装置として、化学実験等を行う際に使用されるヒュームフードを例にとり、図1から図3を参照して説明する。図1の符号1は、本発明が適用されたヒュームフードで、筐体前面の開口を開閉する扉6を部分的に開いた状態を示す。筐体2の内部には処理室3を有し、この処理室3内の空気を排気するための排気ダクト4が筐体2の上部に設けられている。   As an exhaust apparatus according to the present invention, a fume hood used when performing a chemical experiment or the like will be described as an example with reference to FIGS. 1 to 3. Reference numeral 1 in FIG. 1 is a fume hood to which the present invention is applied, and shows a state in which a door 6 that opens and closes an opening on the front surface of the housing is partially opened. The housing 2 has a processing chamber 3, and an exhaust duct 4 for exhausting the air in the processing chamber 3 is provided at the top of the housing 2.

排気ダクト4には、排気ダクト4を流れる気体の風量を検出する風量検出手段20が取付けられている。排気ダクト4は、仮想線で示すように室外へ延長された排気ダクト9と接続連通し、排気ダクト9には排気手段としての排気ファン10を作動させることで、図1に示すように筐体前面の開口から内部の処理室3へ向かう吸込風12の流れが作られるようになっている。また、排気ファン10を駆動するモータは、制御装置14に備えられたインバータ電源(図示せず)により可変速駆動され、モータ11の回転速度を制御することにより排気風量を制御できるようになっている。   An air volume detecting means 20 for detecting the air volume of the gas flowing through the exhaust duct 4 is attached to the exhaust duct 4. The exhaust duct 4 is connected to and communicated with an exhaust duct 9 extended to the outside as indicated by a virtual line, and an exhaust fan 10 as an exhaust means is operated in the exhaust duct 9 so that a housing as shown in FIG. A flow of the suction air 12 from the front opening toward the internal processing chamber 3 is created. The motor for driving the exhaust fan 10 is driven at a variable speed by an inverter power supply (not shown) provided in the control device 14, and the exhaust air volume can be controlled by controlling the rotational speed of the motor 11. Yes.

筐体2の前面の開口は、その上方に強化ガラス等で構成された固定ガラス板5が固定されている。また、固定ガラス板5の下方位置には、扉6が設けられ、使用者は把持辺8を掴んで扉6を昇降させることで、筐体2の開口面積を変えることができる。   A fixed glass plate 5 made of tempered glass or the like is fixed above the opening on the front surface of the housing 2. Further, a door 6 is provided at a position below the fixed glass plate 5, and the user can change the opening area of the housing 2 by grasping the gripping side 8 and raising and lowering the door 6.

扉6の位置は、開口位置センサ13によって検出可能となっており、開口位置センサ13の出力は、後述の制御装置14に入力され、昇降扉の開口面積が算出される。   The position of the door 6 can be detected by the opening position sensor 13, and the output of the opening position sensor 13 is input to the control device 14 described later, and the opening area of the lifting door is calculated.

図2は、排気ダクト4を流れる排気の風量を検出する風量検出手段20を示し、排気ダクトを流れる気体の流れを受けて回転する羽根車21、羽根車を支持する回転軸22と、回転軸を回転自在に支持する軸受23、24と、軸受24を支持するブラケット25と、回転検出手段28とを備え、回転検出手段28は、回転軸22に取付けた回転検出板26とブラケット25に取付けられた回転センサ27とから構成される。羽根車21は排気ダクト4の内側に配置し、回転検出手段28を構成する回転検出板26と回転センサ27は、排気ダクト4の外側に配置される。   FIG. 2 shows an air volume detecting means 20 for detecting the air volume of the exhaust gas flowing through the exhaust duct 4. The impeller 21 rotates in response to the flow of gas flowing through the exhaust duct, the rotary shaft 22 that supports the impeller, and the rotary shaft. Bearings 23, 24 that support the bearing 24, a bracket 25 that supports the bearing 24, and a rotation detection means 28. The rotation detection means 28 is attached to the rotation detection plate 26 and the bracket 25 attached to the rotary shaft 22. Rotation sensor 27. The impeller 21 is arranged inside the exhaust duct 4, and the rotation detection plate 26 and the rotation sensor 27 that constitute the rotation detection means 28 are arranged outside the exhaust duct 4.

回転検出手段28は、羽根車21が排気の流れを受けて回転すると、回転軸22に取付けられた回転検出板26も回転し、回転検出板26に設けられた孔29の移動を、回転センサ27が検出するものである。後述のように、回転センサ27の出力信号は、制御装置14に入力され、制御装置14は、回転センサ27の出力信号に基づいて、排気ダクト4内に流れる排気風量を算出する。   When the impeller 21 receives the flow of exhaust gas and rotates, the rotation detection means 28 also rotates the rotation detection plate 26 attached to the rotation shaft 22, and the rotation sensor 28 detects the movement of the hole 29 provided in the rotation detection plate 26. 27 detects. As will be described later, the output signal of the rotation sensor 27 is input to the control device 14, and the control device 14 calculates the amount of exhaust air flowing in the exhaust duct 4 based on the output signal of the rotation sensor 27.

排気ダクト4を流れる気体には、腐食性ガスが含まれることがあるため、腐食性ガスに触れる羽根車21は、腐食性ガスに強い合成樹脂、金属または繊維強化プラスチック等により製作されている。一方、回転検出手段28を構成する回転検出板26、回転センサ27は、排気ダクト4の外側に配置して、腐食性ガスと接触しないようにしたので、光電センサ等、安価な汎用の回転検出手段を使用することができる。   Since the gas flowing through the exhaust duct 4 may contain corrosive gas, the impeller 21 that is in contact with the corrosive gas is made of a synthetic resin, metal, fiber reinforced plastic, or the like that is resistant to the corrosive gas. On the other hand, the rotation detection plate 26 and the rotation sensor 27 constituting the rotation detection means 28 are arranged outside the exhaust duct 4 so as not to come into contact with corrosive gas. Means can be used.

このように、風量検出手段20の羽根車は耐食性の高い材料で製作し、回転センサ27は、排気ダクト4の外側に配置して、腐食性ガスと接触しないようにしたので、風量検出手段20は、腐食性ガスの雰囲気内で使用しても、長期間の使用に耐えることができる。また、回転検出手段を排気ダクトの外側に配置したので、風量検出手段を排気ダクトに取付けた状態で、回転検出板26、回転センサ27の点検、交換を行うことができる。さらに、回転検出手段を排気ダクトの外側に配置したので、回転検出板26の回転を目視によっても、確認でき、従来の風量検出装置のように、風量検出装置が動作していないことに、作業者が気付かないということも防ぐ効果がある。   As described above, the impeller of the air volume detecting means 20 is made of a material having high corrosion resistance, and the rotation sensor 27 is arranged outside the exhaust duct 4 so as not to come into contact with corrosive gas. Can withstand long-term use even in an atmosphere of corrosive gas. Further, since the rotation detection means is disposed outside the exhaust duct, the rotation detection plate 26 and the rotation sensor 27 can be inspected and replaced with the air volume detection means attached to the exhaust duct. Further, since the rotation detection means is arranged outside the exhaust duct, the rotation of the rotation detection plate 26 can be confirmed by visual observation, and the air flow detection device is not operating like the conventional air flow detection device. It also has the effect of preventing the person from noticing.

図3は、風量検出手段20を排気ダクト4への取付けを説明する図である。風量検出手段は、図3に示すように、羽根車21、回転軸22と、軸受23、24と、ブラケット25と、回転検出板26、回転センサ27を一体に構成しているので、排気ダクト4に設けた取付け孔32に風量検出手段20を挿入し、取付け孔31に軸受23を篏合して、さらにブラケット25をボルト33によって排気ダクト4に固定することで、風量検出手段20の取付けを完了することができる。また、逆の手順で、風量検出手段20を排気ダクト4から取外すことができる。   FIG. 3 is a view for explaining how the air volume detection means 20 is attached to the exhaust duct 4. As shown in FIG. 3, the air volume detecting means integrally includes an impeller 21, a rotating shaft 22, bearings 23 and 24, a bracket 25, a rotation detecting plate 26, and a rotation sensor 27. The air volume detecting means 20 is inserted into the mounting hole 32 provided in the position 4, the bearing 23 is engaged with the mounting hole 31, and the bracket 25 is fixed to the exhaust duct 4 with the bolt 33. Can be completed. Further, the air volume detection means 20 can be removed from the exhaust duct 4 by the reverse procedure.

このように、風量検出手段20を排気ダクト4の外側から挿入して、排気ダクト4に取付け可能な構造としたので、排気ダクト4を分解しなくとも、風量検出手段20を排気ダクト4に取付けることができる。同様に、排気ダクト4を分解しなくとも、風量検出手段20のみを排気ダクト4から取外すことができるので、風量検出手段20の点検、交換作業が容易となる。   As described above, since the air volume detecting means 20 is inserted from the outside of the exhaust duct 4 and can be attached to the exhaust duct 4, the air volume detecting means 20 is attached to the exhaust duct 4 without disassembling the exhaust duct 4. be able to. Similarly, since only the air volume detection means 20 can be removed from the exhaust duct 4 without disassembling the exhaust duct 4, the inspection and replacement work of the air volume detection means 20 is facilitated.

風量検出手段20の風量検出方法について説明する。風量検出手段20は、排気ダクト4を模擬した試験ダクトに設置し、規定の風量を流して、羽根車21の回転を回転検出板26に設けられた孔29の移動を回転センサ27によって検出し、前記回転センサ27の出力をカウントして、羽根車21の回転速度を演算し、検出した回転速度と風量との関連データを採取する。制御装置14には、風量検出手段20の回転速度と風量との関連データが保存され、後述のように、制御装置14は、回転検出手段28の出力から羽根車21の回転速度を検出することで、排気ダクト4内に流れる排気風量を検出することができるようになる。   The air volume detection method of the air volume detection means 20 will be described. The air volume detection means 20 is installed in a test duct simulating the exhaust duct 4 and flows a specified air volume, and the rotation sensor 27 detects the movement of the hole 29 provided in the rotation detection plate 26 when the impeller 21 rotates. The output of the rotation sensor 27 is counted, the rotation speed of the impeller 21 is calculated, and related data between the detected rotation speed and the air volume is collected. The control device 14 stores data related to the rotational speed of the air volume detection means 20 and the air volume. As will be described later, the control apparatus 14 detects the rotational speed of the impeller 21 from the output of the rotation detection means 28. Thus, the amount of exhaust air flowing in the exhaust duct 4 can be detected.

次に、制御装置14の動作について説明する。図1に示すように、制御装置14は、開口位置センサ13からの検出信号と、風量検出手段20に設けられた回転検出手段28からの検出信号とをそれぞれ入力し、開口位置センサ31からの検出信号から開口部面積を割出し、回転検出手段28の検出信号から排気ダクトを流れる排気風量を検出し、排気風量を開口部面積で割って、開口部を流れる空気の風速を算出する。   Next, the operation of the control device 14 will be described. As shown in FIG. 1, the control device 14 inputs a detection signal from the opening position sensor 13 and a detection signal from the rotation detection means 28 provided in the air volume detection means 20. The area of the opening is calculated from the detection signal, the amount of exhaust air flowing through the exhaust duct is detected from the detection signal of the rotation detecting means 28, and the wind speed of the air flowing through the opening is calculated by dividing the amount of exhaust air by the area of the opening.

制御装置14は、算出された開口部の風速が、設定された目標風速を下回る場合には、制御装置14に備えられたインバータ電源の出力を制御し、排気ファン10を駆動するモータの回転速度を上昇させて排気風量を増加させ、逆に、算出された開口部の風速が、設定された目標風速を上回る場合には、モータの回転速度を低下させて排気風量を減少させるように制御する。   When the calculated wind speed of the opening is lower than the set target wind speed, the control device 14 controls the output of the inverter power supply provided in the control device 14 and the rotational speed of the motor that drives the exhaust fan 10. To increase the exhaust air volume, and conversely, if the calculated wind speed of the opening exceeds the set target wind speed, control is performed to decrease the exhaust air volume by decreasing the motor rotation speed. .

このように、制御装置14は、開口部の風速が、所望の風速となるように制御するので、作業者が扉6の開口度合いを変えても、開口部の風速を適正な風速に保つことができる。その結果、開口部の風速が必要以上に速くなり、排気ファン10がエネルギを多大に消費したり、逆に、開口部の風速が低下して、開口部分を流れる空気が逆流してしまうことを防ぐことができる。   Thus, since the control device 14 controls the wind speed of the opening to be a desired wind speed, even if the operator changes the degree of opening of the door 6, the air speed of the opening is maintained at an appropriate wind speed. Can do. As a result, the wind speed of the opening becomes faster than necessary, and the exhaust fan 10 consumes a lot of energy, or conversely, the wind speed of the opening decreases and the air flowing through the opening flows backward. Can be prevented.

このように、本発明の排気装置は、腐食性雰囲気中で長期間使用しても耐久性を有する風量計を備えるので、排気装置の信頼性、安全性を向上することができる。また、排気ダクトを分解しないで、風量計を点検、交換できるので、短時間でメンテナンスを終了できるので、ランニングコストを低減できる。また、筐体の開口の度合いに応じて、排気風量を制御することができるので、エネルギー消費が少なく、適切な開口風速を保つことができる。さらに、回転検出手段を排気ダクトの外側に配置したので、回転検出板の回転を目視によっても、確認でき、従来の風量検出装置のように、風量検出装置が動作していないことに、作業者が気付かないということを防ぐこともできる。   Thus, since the exhaust device of the present invention includes an air flow meter that is durable even when used in a corrosive atmosphere for a long period of time, the reliability and safety of the exhaust device can be improved. Further, since the air flow meter can be inspected and replaced without disassembling the exhaust duct, the maintenance can be completed in a short time, so that the running cost can be reduced. Moreover, since the amount of exhaust air can be controlled according to the degree of opening of the housing, energy consumption is low and an appropriate opening air speed can be maintained. Furthermore, since the rotation detection means is arranged outside the exhaust duct, the rotation of the rotation detection plate can be confirmed by visual observation, and the air flow detection device is not operating like the conventional air flow detection device. Can also prevent you from noticing.

実施例においては、排気装置として、ヒュームフードを例にとり説明したが、これに限らず、局所排気装置、卓上フード、簡易フード、安全キャビネット、バイオハザード用キャビネット、クリーンベンチ等の排気装置にも適用できる。   In the embodiments, the fume hood is described as an example of the exhaust device, but the present invention is not limited to this, and the present invention is also applicable to an exhaust device such as a local exhaust device, a table hood, a simple hood, a safety cabinet, a biohazard cabinet, and a clean bench. it can.

1 ヒュームフード
2 筐体
3 処理室
4 排気ダクト
5 固定板ガラス
6 昇降扉
7 昇降ガラス板
8 把持辺
9 排気ダクト
10 排気手段(排気ファン)
11 モータ
12 吸気風
13 開口位置センサ
14 制御装置
15 化粧パネル
20 風量検出手段
21 羽根車
22 回転軸
23 軸受
24 軸受
26 回転検出板
27 回転センサ
28 回転検出手段
29 孔
31 取付け孔
32 取付け孔
33 ボルト
DESCRIPTION OF SYMBOLS 1 Fume hood 2 Case 3 Processing chamber 4 Exhaust duct 5 Fixed plate glass 6 Elevating door 7 Elevating glass plate 8 Grip side 9 Exhaust duct 10 Exhaust means (exhaust fan)
DESCRIPTION OF SYMBOLS 11 Motor 12 Intake air 13 Opening position sensor 14 Control device 15 Cosmetic panel 20 Air volume detection means 21 Impeller 22 Rotating shaft 23 Bearing 24 Bearing 26 Rotation detection plate 27 Rotation sensor 28 Rotation detection means 29 Hole 31 Mounting hole 32 Mounting hole 33 Bolt

Claims (4)

処理室と前記処理室を覆う筐体と、前記筐体の前面の開口を開閉する扉と、前記処理室内の気体を排気ダクトを介して室外に排気する排気手段と、前記排気ダクトを流れる気体の排気風量を検出する風量検出手段と、を備えた排気装置であって、前記風量検出手段は、前記排気ダクトを流れる気体の流れを受けて回転する羽根車を排気ダクト内に配置し、前記羽根車の回転を検出する回転検出手段を前記排気ダクトの外側に配置したことを特徴とする排気装置。   A processing chamber, a casing covering the processing chamber, a door for opening and closing an opening on the front surface of the casing, an exhaust means for exhausting the gas in the processing chamber to the outside through an exhaust duct, and a gas flowing through the exhaust duct An air volume detecting means for detecting the exhaust air volume of the exhaust air flow detecting means, wherein the air volume detecting means arranges an impeller that rotates in response to the flow of gas flowing through the exhaust duct in the exhaust duct, and An exhaust system characterized in that a rotation detecting means for detecting the rotation of the impeller is arranged outside the exhaust duct. 前記風量検出手段が、前記羽根車を支持する回転軸と、前記回転軸を回転自在に支持する軸受と、前記軸受を支持するブラケットと、前記回転軸に取付けた回転検出板と、前記ブラケットに取付けられた前記回転検出板の回転を検出するセンサと、を一体に構成し、前記風量検出手段を前記排気ダクト外側から挿入して、前記排気ダクトに取付けることを特徴とした請求項1に記載の排気装置。   The air volume detection means includes a rotating shaft that supports the impeller, a bearing that rotatably supports the rotating shaft, a bracket that supports the bearing, a rotation detection plate attached to the rotating shaft, and a bracket. The sensor for detecting the rotation of the attached rotation detection plate is integrally formed, and the air volume detection means is inserted from the outside of the exhaust duct and attached to the exhaust duct. Exhaust system. 前記排気装置は、前記扉の開閉位置を検出する開閉位置検出手段をさらに備え、前記風量検出手段の検出結果と前記開閉位置検出手段の検出結果とから、前記筐体の前面の開口を流れる風速を演算し、前記演算した風速が目標風速に略一致するように、前記排気手段を制御することを特徴とする請求項1または2に記載の排気装置。   The exhaust device further includes an opening / closing position detecting means for detecting an opening / closing position of the door, and the wind speed flowing through the opening on the front surface of the housing from the detection result of the air volume detection means and the detection result of the opening / closing position detection means. The exhaust device according to claim 1 or 2, wherein the exhaust means is controlled so that the calculated wind speed substantially coincides with a target wind speed. 前記排気装置は、局所排気装置、卓上フード、簡易フード、安全キャビネット、バイオハザード用キャビネットまたはクリーンベンチであることを特徴とする請求項1ないし3のいずれかに記載の排気装置。   The exhaust device according to any one of claims 1 to 3, wherein the exhaust device is a local exhaust device, a table hood, a simple hood, a safety cabinet, a biohazard cabinet, or a clean bench.
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