JP2015033834A - Liquid jet head and liquid jet device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid jet head which improves the durability of an actuator unit and achieves high reliability, and to provide a liquid jet device.SOLUTION: A liquid jet head includes: an actuator unit having a pressure camber 21, a diaphragm 10 which generates a pressure in the pressure chamber 21; and a piezoelectric element 11 formed at the diaphragm 10; a case part 110 in which the actuator unit is housed and the housing space is sealed; and a decompression mechanism 130 which decompresses the sealed space in the case part by motive power.

Description

  The present invention relates to a liquid ejecting head and a liquid ejecting apparatus.

In order to realize liquid ejection, the liquid ejecting head includes an actuator unit including a pressure chamber, a vibration plate that generates pressure in the pressure chamber, and a piezoelectric element formed on the vibration plate.
As a related technology, when the sealing case that houses the piezoelectric element that generates the pressure for ejecting ink and the drying unit are connected, the internal pressure of the sealing case and the drying unit is configured to be lower than the atmospheric pressure. An ink jet head is known (see Patent Document 1).
In addition, a hollow fiber membrane air dryer made up of a number of hollow fiber membranes is disposed in a case covering the piezoelectric element, and the compressed air from the compressor passes through the inside of the hollow fiber membranes, and is dried air from the other end of the hollow fiber membranes. The structure discharged | emitted in a case is known (refer patent document 2).

JP 2009-262421 A JP 2006-248078 A

  The performance of the piezoelectric element is likely to deteriorate in a humid environment. Therefore, it is necessary to improve the reliability of the product in which the actuator unit is mounted by avoiding a state where a lot of moisture exists around the piezoelectric element. The document described above is for drying the periphery of a piezoelectric element, but further ingenuity has been required to prevent the deterioration of the piezoelectric element as described above.

  SUMMARY An advantage of some aspects of the invention is to provide a liquid ejecting head and a liquid ejecting apparatus that improve the durability of an actuator unit and have high reliability.

  One aspect of the present invention includes an actuator unit including a pressure chamber, a vibration plate that generates pressure in the pressure chamber, and a piezoelectric element formed on the vibration plate; A case part that seals the accommodated space; and a pressure-reducing mechanism that decompresses the space in the sealed case part with power.

  According to this configuration, the pressure reducing mechanism actively depressurizes the space in the case portion that is sealed with the actuator unit accommodated by power. Thereby, the inside of the space is in a low humidity state, the actuator unit is prevented from being deteriorated, and a liquid ejecting head having high reliability as a product is obtained.

In one aspect of the present invention, the liquid ejecting head includes a plate on which the actuator unit is directly or indirectly mounted, and the case portion seals the space by adhering to the plate.
According to this configuration, the actuator unit can be sealed in a space surrounded by the case portion and the plate.

In one aspect of the present invention, the decompression mechanism may decompress the space in the case part via an exhaust part provided in the plate. Alternatively, the depressurization mechanism may depressurize the space in the case part via an exhaust part provided in the case part.
That is, the exhaust part that connects the space in the case part and the pressure reducing mechanism can be provided at various positions in consideration of the size and weight of the pressure reducing mechanism.

In one aspect of the present invention, the liquid ejecting head is capable of deforming the compliance plate, a reservoir that stores the liquid supplied to the pressure chamber, a compliance plate that deforms according to pressure fluctuations in the reservoir, and the like. And a specific space secured adjacent to the compliance plate, and an open path that opens the specific space to the atmosphere, and the space in the case portion is blocked from the specific space and the open path. Yes.
According to the said structure, possibility that the deformation | transformation of a compliance plate will be inhibited under the influence of the pressure reduction by a pressure reduction mechanism can be excluded.

In one aspect of the present invention, the liquid ejecting head is movable within a certain range along a certain direction, moved to a position where it can come into contact with a cap provided at a predetermined position within the certain range, When the space in the case portion and the space in the cap communicate with each other, the pressure reducing mechanism depressurizes the space in the case portion through the cap.
According to this configuration, the decompression by the decompression mechanism is executed at the timing when the liquid ejecting head moves to a position where it can come into contact with the cap. That is, it is not necessary to directly mount the pressure reducing mechanism on the liquid ejecting head. Such a feature may be regarded as a feature of a liquid ejecting head, or may be regarded as a feature of a product having a liquid ejecting head and a pressure reducing mechanism.

  The liquid ejecting apparatus having the liquid ejecting head of each aspect described above can also be regarded as an invention. Further, a method for manufacturing a liquid ejecting head or a liquid ejecting apparatus can also be regarded as an invention.

FIG. 6 is an exploded perspective view illustrating a part of the main configuration of the liquid ejecting head. FIG. 6 is a partial cross-sectional view according to an example of a liquid ejecting head. FIG. 10 is a partial cross-sectional view according to another example of a liquid ejecting head. It is the schematic which shows an example of an inkjet printer. FIG. 6 is a diagram illustrating a liquid ejecting head that moves in a main scanning direction.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 illustrates the main configuration of the liquid jet head 140 according to the present embodiment in an exploded perspective view. Here, the liquid ejecting head 140 will be described as an ink jet recording head that ejects (discharges) ink. The liquid ejecting head 140 is configured by laminating a plurality of plate-like members in a certain laminating direction. Further, since the liquid ejecting head 140 forms a liquid flow path, the whole or a part of the liquid ejecting head 140 can also be called a flow path unit. In the example of FIG. 1, the liquid ejecting head 140 includes the vibration plate 10, the pressure chamber plate 20, the communication plate 30, the seal plate 40, the reservoir plate 50, the compliance plate 60, in order from one side to the other side in the stacking direction. A nozzle plate 70 is provided.

  In FIG. 1 (and FIGS. 2 and 3), these members 10, 20, 30, 40, 50, 60, and 70 are distinguished for convenience, but these members 10, 20, 30, 40, 50, It is not necessary for all the members 60 and 70 to be individual members, and some of them may be generated integrally. Further, the liquid ejecting head 140 may be configured not to include a part of these members 10, 20, 30, 40, 50, 60, and 70, or may be configured to include other members (not shown). May be. Hereinafter, the stacking direction is referred to as the Z direction. Further, the description will be made assuming that the diaphragm 10 side in the Z direction is “upper side” and the nozzle plate 70 side is “lower side”.

  The diaphragm 10 seals the upper surface of the pressure chamber plate 20. The pressure chamber plate 20 has a plurality of pressure chambers 21 as a part of the liquid flow path. The pressure chamber 21 penetrates the pressure chamber plate 20 and is formed in a long shape. The pressure chambers 21 are juxtaposed in the Y direction orthogonal to the X direction with the longitudinal direction parallel to the X direction. Both the X and Y directions are perpendicular to the Z direction. The pressure chamber 21 and the pressure chamber 21 are separated by a partition wall 22. In the present application, even if the direction and position of each component of the liquid ejecting head 140 are expressed as parallel, orthogonal, vertical, etc., they do not mean strictly parallel, orthogonal, vertical, but product performance. In addition, it also includes an error that is permissible and an error that may occur during product manufacture.

  The communication plate 30 is in contact with the lower surface of the pressure chamber plate 20. The communication plate 30 has a plurality of first through holes 31 that communicate with each pressure chamber 21 on one end side in the longitudinal direction of the pressure chamber 21, and a one-to-one correspondence with each pressure chamber 21 on the other end side in the longitudinal direction. And a plurality of second communication holes 32 communicating with each other. Both the first communication hole 31 and the second communication hole 32 penetrate the communication plate 30.

  The seal plate 40 is in contact with the lower surface of the communication plate 30. The seal plate 40 includes a plurality of third communication holes 41 that communicate one-to-one with each first through hole 31 on one end side in the longitudinal direction of the pressure chamber 21, and each second communication hole on the other end side in the longitudinal direction. 32 and a plurality of fourth communication holes 42 communicating one-to-one. Both the third communication hole 41 and the fourth communication hole 42 pass through the seal plate 40.

  The reservoir plate 50 is in contact with the lower surface of the seal plate 40. The reservoir plate 50 includes a plurality of fifth communication holes 52 that communicate with the fourth communication holes 42 on a one-to-one basis, and a reservoir 51. Both the fifth communication hole 52 and the reservoir 51 pass through the reservoir plate 50. The reservoir 51 has a shape in which a length comparable to the length of a later-described nozzle row 72 is secured in the Y direction. The reservoir 51 communicates with each third communication hole 41 on the upper side. In other words, the reservoir 51 is sealed by the seal plate 40 except for a range where the upper side is opposed to each third communication hole 41. The reservoir 51 can also be called a common liquid chamber or a common ink chamber.

  The compliance plate 60 is in contact with the lower surface of the reservoir plate 50, and the nozzle plate 70 is in contact with the lower surface of the compliance plate 60. The compliance plate 60 has a plurality of sixth communication holes 62 that communicate with the fifth communication holes 52 on a one-to-one basis. The sixth communication hole 62 passes through the compliance plate 60. The compliance plate 60 seals the lower side of the reservoir 51 with the upper surface. In the compliance plate 60, the range for sealing the reservoir 51 is formed to be thinner than the other ranges, which is referred to as a thin film portion 61. The thin film part 61 has elasticity. A space 63 (see FIG. 2) is secured between the thin film portion 61 and the nozzle plate 70. The space 63 corresponds to a “specific space” secured adjacent to the compliance plate 60. The thin film portion 61 plays a role of relieving the pressure fluctuation in the reservoir 51 by deforming in the space 63 according to the pressure fluctuation in the reservoir 51 (bending toward the nozzle plate 70 side).

  The nozzle plate 70 has a plurality of nozzles 71 as through holes for ejecting ink. The communication holes 32, 42, 52, 62 described above are flow paths for communicating the pressure chambers 21 and the nozzles 71 one to one. Accordingly, in the example of FIG. 1 (and FIGS. 2 and 3), the nozzle 71 communicates with the sixth communication hole 62 on a one-to-one basis. As illustrated in FIG. 1, the nozzle plate 70 includes nozzle rows 72 in which nozzles 71 are arranged at predetermined intervals along the Y direction. The nozzle plate 70 includes a plurality of nozzle rows 72 in which a plurality of nozzles 71 are formed along the Y direction, arranged in parallel in the X direction, and one nozzle row 72 and the other nozzle row 72 are shifted in the Y direction. It is also possible to adopt a configuration (so-called staggered arrangement).

  FIG. 2 is a partial cross-sectional view of the liquid ejecting head 140 and includes the cross section shown in FIG. The cross section is a plane perpendicular to the Y direction. As shown in FIG. 2, one pressure chamber 21 communicates with one nozzle 71 through communication holes 32, 42, 52, 62. Further, the piezoelectric element 11 is provided on the surface of the diaphragm 10 on the side opposite to the pressure chamber plate 20 side so as to substantially correspond to each position of the pressure chamber 21. The piezoelectric element 11 is configured by laminating a first electrode 12, a piezoelectric layer 13 made of a ceramic material such as PZT, and a second electrode 14 in order from the diaphragm 10 side. For example, the second electrode 14 is an individual electrode provided for each piezoelectric element 11 corresponding to the pressure chamber 21, and the first electrode 12 is a common electrode provided in common to the plurality of piezoelectric elements 11.

  A control circuit board 100 is connected to the second electrode 14 via a pattern or cables (flexible board or the like) 90, and a drive voltage is applied from the control circuit board 100. On the other hand, the potential of the first electrode 12 is held at a predetermined level (for example, the ground level). With this configuration, the piezoelectric element 11 is deformed according to the drive voltage. Liquid is supplied to the reservoir 51 from the outside via a liquid supply path (not shown). The liquid supplied to the reservoir 51 is temporarily stored in the reservoir 51 and supplied to the pressure chambers 21 through the communication holes 41 and 31. When the diaphragm 10 bends as the piezoelectric element 11 is deformed as described above, the pressure increases in the pressure chamber 21, and the liquid in the pressure chamber 21 is ejected from the nozzle 71 in accordance with the increase in the pressure. In such a liquid flow path from the reservoir 51 to the nozzle 71, the reservoir 51 side is the upstream side, and the nozzle 71 side is the downstream side.

  A configuration including the pressure chamber plate 20 having the pressure chamber 21, the vibration plate 10 that generates pressure in the pressure chamber 21, and the piezoelectric element 11 formed on the vibration plate 10 can be referred to as an “actuator unit”. As shown in FIG. 2, the periphery of the actuator unit is covered with a case portion 110. Specifically, the end of the opening of the case portion 110 is bonded to the reservoir plate 50, thereby sealing the space 110 a in the case portion 110. Actuator units (in the example of FIG. 2, the communication plate 30 and the seal plate 40) are accommodated in the sealed space 110a. The reservoir plate 50 corresponds to an example of a plate on which the actuator unit is directly or indirectly mounted.

  The liquid ejecting head 140 includes a decompression mechanism 130. The decompression mechanism 130 is connected to the exhaust part 120 that connects the inside and outside of the case part 110. The exhaust unit 120 may be a simple exhaust port, or may be configured of a material (for example, a porous material) that allows moisture to pass through. Moreover, the exhaust part 120 is arrange | positioned in the position which planarly overlaps with the piezoelectric element 11 of the case part 110 in this embodiment. Although part of the case part 110 is the exhaust part 120, the space 110 a is closed by the case part 110 and the reservoir plate 50 except for the exhaust part 120, and the exhaust part 120 is connected to the decompression mechanism 130. Since it is connected, it can be said that it is substantially sealed. The above-described cables 90 pass through the case portion 110 in order to connect the piezoelectric element 11 in the space 110a and the control circuit board 100 outside the space 110a. And In addition, the exhaust part 120 may be provided with two or more in the direction (Y direction) where the piezoelectric element 11 and the pressure chamber 21 of the case part 110 are arranged.

  In such a configuration, the decompression mechanism 130 decompresses the space 110a with power. The power is, for example, the pump 132, and the pressure reducing mechanism 130 lowers the atmospheric pressure in the space 110a by the pump 132 that operates by receiving power supply. For example, a diaphragm pump can be employed as the pump 132. At this time, moisture in the space 110 a and a gas (gas) containing moisture are discharged to the outside through the exhaust unit 120 and the decompression mechanism 130. In other words, by reducing the pressure, the moisture is evaporated at a low temperature and discharged to the outside, thereby promoting the drying in the space 110a.

  In the actuator unit, the pressure chamber 21 filled with the liquid is sealed by the diaphragm 10. The vibration plate 10 has an extremely thin plate thickness (for example, several microns) in order to ensure an amount (displacement amount) of displacement due to deformation of the piezoelectric element 11. Therefore, the liquid in the pressure chamber 21 may leak to the outside through the thin diaphragm 10. If the moisture leaked through the diaphragm 10 is left untreated, the piezoelectric element 11 can be deteriorated. In this situation, the present embodiment reliably dehumidifies the space (the space 110a) in which the piezoelectric elements 11 that are likely to leak moisture through the vibration plate 10 and easily deteriorate due to the adhesion of moisture are disposed. . Thereby, the durability of the actuator unit is improved, and the highly reliable liquid jet head 140 is provided.

  The liquid ejecting head 140 constitutes a part of the liquid ejecting apparatus, as will be described later. Therefore, the power supplied to the decompression mechanism 130 is a part of the power supplied to the liquid ejecting apparatus. There are various timings at which the decompression mechanism 130 operates (decompresses the space 110a). For example, the decompression mechanism 130 may always operate during the period when the liquid ejecting apparatus is in the power-on state. Alternatively, the pressure reducing mechanism 130 may be operated during a period in which the liquid ejecting apparatus is powered on and the liquid ejecting head 140 is operating. Alternatively, the decompression mechanism 130 may operate so that the humidity in the space 110a becomes a predetermined target value. For example, the decompression mechanism 130 is equipped with an IC, and a humidity sensor is provided in the space 110a. The IC may monitor the output from the humidity sensor and control the operation of the decompression mechanism 130 (for example, feedback control) so that the humidity indicated by the output approaches the target value.

  The decompression mechanism 130 includes a backflow valve 131 for preventing backflow. By providing the backflow valve 131, the atmospheric pressure in the space 110a is maintained in a reduced pressure state even when the decompression mechanism 130 is not operating, and external air flows into the space 110a via the exhaust part 120. Is preventing.

  Here, the space 63 sandwiched between the compliance plate 60 and the nozzle plate 70 needs to be open to the atmosphere rather than a sealed space in order to ensure that the compliance plate 60 (thin film portion 61) is deformed. is there. In addition, the space 63 needs to be a space that is not affected by the decompression mechanism 130 in order to ensure that the compliance plate 60 (thin film portion 61) is deformed. Therefore, in the present embodiment, as shown in FIG. 2, the space 63 is configured to be open to the atmosphere via the path 53. The path 53 is, for example, a hole through which a part thereof passes through the reservoir plate 50, and the space 63 and the path 53 are paths that are not in contact (blocked) with the liquid flow path or the space 110 a. That is, the case part 110 is joined to the plate (reservoir plate 50 in the embodiment) to form a sealed space 110a, but the space 63 is in contrast to the plate (reservoir plate 50) to which the case part 110 is joined. The space 110a is spaced apart from the side opposite to the side on which the space 110a is formed, and is led out from the position overlapping the reservoir 51 in a plane toward the region not covered with the case portion 110. Thereby, the said deformation | transformation of the compliance plate 60 is ensured and the flow of the liquid in a flow path is optimized. The path 53 corresponds to an example of an open path that opens a specific space to the atmosphere.

  In the middle of the path 53, a moisture resistance path 80 is provided for suppressing release of moisture into the atmosphere. Some moisture in the reservoir 51 may leak into the space 63 via the thin film portion 61 of the compliance plate 60 or the like. When the leaked moisture is released to the atmosphere through the path 53, the viscosity of the liquid in the flow path increases. For example, if the liquid is ink, printing with the thickened ink is performed, which reduces the image quality. Connected. Therefore, a moisture resistance path 80 is provided. In the moisture resistance path 80, when air passes, the moisture in the air is confined in a minute space existing innumerably inside, thereby preventing the moisture from being released to the atmosphere. That is, the presence of the moisture resistance path 80 suppresses the thickening of the liquid in the flow path. As the material of the moisture resistance path 80, for example, an elastomer or the like is used.

The plate to which the case part 110 is bonded may be other than the reservoir plate 50. That is, the space 110 a that houses the actuator unit may be sealed, and for example, the case portion 110 may be bonded to the communication plate 30 or the seal plate 40. The communication plate 30 and the seal plate 40 also correspond to an example of a plate on which the actuator unit is directly or indirectly mounted. Furthermore, the case portion 110 may be bonded to another member (not shown), thereby sealing the space 110a as a result.
Further, the exhaust part 120 is not necessarily formed in the case part 110. For example, the exhaust part 120 may be formed at a predetermined position of a plate on which the actuator unit is directly or indirectly mounted.

  FIG. 3 shows an example in which the exhaust part 120 is formed on the reservoir plate 50 by a partial cross-sectional view of the liquid ejecting head 140 as in FIG. In the example of FIG. 3, the reservoir plate 50 is formed with a through hole 54 at a position that connects the outside and the space 110 a and does not interfere with the reservoir 51, the communication hole 52, or the path 53. That is, in the reservoir plate 50, a path 53 that leads the space 63 to the atmosphere and a through hole 54 that leads to the exhaust part 120 are formed on both sides of the reservoir 51 and the fifth communication hole 52. An exhaust part 120 is provided in the through hole 54. The decompression mechanism 130 may be connected to the exhaust part 120 at such a position from the outside. In other words, the decompression mechanism 130 may decompress the space 110a via the exhaust part 120 provided on the plate on which the actuator unit is directly or indirectly mounted. In FIG. 3, the decompression mechanism 130 is not shown. 2 and 3 can be said to indicate that there are a plurality of options for the position where the decompression mechanism 130 is disposed.

  The liquid ejecting head 140 constitutes a part of an ink jet recording head unit including an ink supply path (liquid supply path) communicating with an ink cartridge or the like, and is mounted on the ink jet printer 200. The ink jet printer 200 is an example of a liquid ejecting apparatus.

  FIG. 4 is a schematic diagram illustrating an example of the inkjet printer 200. In the ink jet printer 200, for example, ink cartridges 202 </ b> A and 202 </ b> B are detachably provided in an ink jet recording head unit (hereinafter, head unit 202) having a plurality of liquid ejecting heads 140. A carriage 203 on which the head unit 202 is mounted is provided on a carriage shaft 205 attached to the apparatus main body 204 so as to be movable in the axial direction. The driving force of the driving motor 206 is transmitted to the carriage 203 through a plurality of gears and a timing belt 207 (not shown), so that the carriage 203 moves along the carriage shaft 205 (along the main scanning direction).

  The apparatus main body 204 is provided with a platen 208 along the carriage shaft 205, and the print medium S supplied by a roller or the like (not shown) is conveyed on the platen 208. Then, ink is ejected from the nozzle 71 of the liquid ejecting head 140 to the transported print medium S, and an arbitrary image is printed on the print medium S. The ink jet printer 200 is not limited to the head unit 202 that moves as described above. For example, a so-called line head type printer that performs printing only by moving the print medium S with the liquid ejecting head 140 fixed. It may be.

  FIG. 5 shows a modification of the present embodiment. FIG. 5 shows the liquid ejecting head 140 that is mounted on the carriage 203 and moves in the main scanning direction SD. However, the carriage 203 is not shown. The main scanning direction SD is assumed to be parallel to the X direction. The liquid ejecting head 140 mounted on the carriage 203 can move within a certain range along the main scanning direction SD, and a predetermined position where the cap 210 can be contacted is included in the certain range. In FIG. 5, the liquid ejecting head 140 at a predetermined position that can come into contact with the cap 210 is indicated by a chain line. The cap 210 is a member used for cleaning the nozzle 71 and is stored in the ink jet printer 200. The cap 210 is accessible to the liquid ejecting head 140 at the predetermined position, and seals the nozzle surface 73 of the liquid ejecting head 140 in a state of being closest to the liquid ejecting head 140.

  The nozzle surface 73 is a surface where the nozzle 71 in the nozzle plate 70 is opened to the outside. In the modification described with reference to FIG. 5, the cap 210 is connected to the decompression mechanism 130. In the modification, the exhaust unit 120 is formed in a range (for example, a nozzle formation surface) sealed by the cap 210 on the surface of the liquid jet head 140. The decompression mechanism 130 moves to a position where the liquid ejecting head 140 can come into contact with the cap 210, and when the cap 210 seals the liquid ejecting head 140 (the space 110a in the case portion 110 and the cap 210 When the space communicates), the space 110 a is depressurized via the cap 210. Further, when the cap 210 is detached from the surface of the liquid ejecting head 140, a backflow valve for preventing a backflow is provided on the liquid ejecting head 140 side so that the reduced pressure state in the space 110a in the case portion 110 can be maintained. It has been. According to such a modification, the decompression mechanism 130 is not directly mounted on the liquid ejecting head 140. Therefore, it is possible to avoid the liquid ejecting head 140 from becoming large or heavy. Further, the cleaning of the nozzle 71 using the cap 210 can be executed simultaneously with the pressure reduction of the space 110a.

The present invention can also be applied to a liquid ejecting head or a liquid ejecting apparatus that ejects liquid other than ink. For example, as liquid ejecting heads, color material ejecting heads used for manufacturing color filters such as liquid crystal displays, electrode material ejecting heads used for forming electrodes such as organic EL displays and FEDs (electrolytic emission displays), and biochip manufacturing Examples include a bio-organic material ejecting head used, and the present invention can be applied to a liquid ejecting apparatus equipped with such a liquid ejecting head.
The configuration in which the various embodiments and modifications described so far are combined is also the content disclosed by the present invention.

DESCRIPTION OF SYMBOLS 10 ... Vibration plate, 11 ... Piezoelectric element, 20 ... Pressure chamber plate, 21 ... Pressure chamber, 30 ... Communication plate, 40 ... Seal plate, 50 ... Reservoir plate, 51 ... Reservoir, 53 ... Path, 60 ... Compliance plate, 61 ... Thin film part, 63 ... Space (specific space), 70 ... Nozzle plate, 71 ... Nozzle, 72 ... Nozzle row, 73 ... Nozzle surface, 80 ... Moisture resistance path, 110 ... Case part, 110a ... Space, 120 ... Exhaust part , 130 ... Decompression mechanism, 140 ... Liquid ejecting head, 200 ... Inkjet printer, 210 ... Cap

Claims (7)

An actuator unit comprising: a pressure chamber; a diaphragm that generates pressure in the pressure chamber; and a piezoelectric element formed on the diaphragm;
A case portion that houses the actuator unit and seals the housing space;
A liquid ejecting head, comprising: a pressure reducing mechanism that depressurizes a space in the sealed case portion by power. A plate for directly or indirectly mounting the actuator unit;
The liquid ejecting head according to claim 1, wherein the case portion seals the space by adhering to the plate.   The liquid ejecting head according to claim 2, wherein the decompression mechanism decompresses a space in the case portion via an exhaust portion provided on the plate.   The liquid ejecting head according to claim 1, wherein the decompression mechanism decompresses a space in the case part via an exhaust part provided in the case part.   It is movable within a certain range along a certain direction, moved to a position where it can come into contact with a cap provided at a predetermined position within the certain range, and the space in the case portion and the space in the cap communicated. 3. The liquid ejecting head according to claim 1, wherein the pressure reducing mechanism decompresses the space in the case portion via the cap. A reservoir for storing liquid to be supplied to the pressure chamber;
A compliance plate that deforms in response to pressure fluctuations in the reservoir;
A specific space secured adjacent to the compliance plate to allow deformation of the compliance plate;
An open path that opens the specific space to the atmosphere,
The liquid ejecting head according to claim 1, wherein the space in the case portion is blocked from the specific space and the open path. A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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