JP2015015333A - Laser apparatus and laser output correction method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser apparatus which is able to simultaneously emit a plurality of laser light with a preset desired output by using a plurality of laser oscillators, and to provide a laser output correction method.SOLUTION: A laser apparatus comprises: one output unit 38 for outputting a setting signal Ss corresponding to an output of preset desired laser light L; a plurality of laser oscillators 16 for oscillating a plurality of laser light L; and a plurality of calculation units 40 which are provided so as to correspond to the plurality of laser oscillators 16 and output laser control signals SI obtained by correcting the setting signals Ss on the basis of characteristics of the corresponding laser oscillators 16, respectively. The plurality of laser oscillators 16 respectively oscillate laser light L on the basis of the laser control signal SI output from the corresponding calculation unit 40.

Description

  The present invention relates to a laser device that emits a plurality of laser beams simultaneously and a laser output correction method.

  Conventionally, in the laser processing field such as laser welding and laser marking, the original laser beam generated by one laser oscillator is branched into a plurality of beams, and the plurality of branched laser beams are transmitted through an optical fiber to a laser processing head. A multi-branch / optical fiber transmission type laser apparatus is known.

  As such a laser apparatus, a technical idea has been proposed in which a plurality of branch mirrors are used to split the original laser beam into a plurality of beams and to emit a plurality of laser beams at the same time (see Patent Document 1).

JP 2007-190560 A

  However, in the conventional technique such as Patent Document 1 described above, for example, when the position or angle of the first branch mirror that branches the original laser beam is adjusted, it is necessary to adjust the remaining branch mirror. There is a problem that it takes time to adjust these branch mirrors.

  As a method of simultaneously emitting a plurality of laser beams without using such a branching mirror, for example, one output unit that outputs a setting signal corresponding to a preset output of a desired laser beam, and the setting signal It is conceivable to provide a plurality of laser oscillators that oscillate laser light based on this.

  However, each laser oscillator has individual differences (inherent variations). For this reason, for example, even if the same setting signal is input to a plurality of laser oscillators, the output of the laser light oscillated from each laser oscillator varies, and a plurality of laser lights can be emitted with the same output. It may not be possible. That is, there is a problem that even if a plurality of laser beams can be emitted simultaneously, it is difficult to emit a plurality of laser beams at a desired output set in advance.

  The present invention has been made in consideration of such problems, and a laser device capable of simultaneously emitting a plurality of laser beams with a predetermined desired output using a plurality of laser oscillators, and An object of the present invention is to provide a laser output correction method.

[1] A laser apparatus according to the present invention includes:
One output unit for outputting a setting signal corresponding to the output of a desired laser beam set in advance;
A plurality of laser oscillators for oscillating laser light;
A plurality of units corresponding to a plurality of laser oscillators, and a calculation unit that corrects a setting signal based on the characteristics of the corresponding laser oscillator and outputs a laser control signal;
With
The plurality of laser oscillators oscillate laser light for each laser oscillator based on a laser control signal output from a corresponding arithmetic unit.

  According to the laser device of the present invention, a plurality of laser oscillators are provided corresponding to a plurality of laser oscillators, and an arithmetic unit that corrects a setting signal based on the characteristics of the corresponding laser oscillators and outputs a laser control signal is provided. Thus, in order to correct individual differences (inherent variations) of each laser oscillator to which these arithmetic units correspond, a plurality of laser oscillators are used to simultaneously emit a plurality of laser beams at a preset desired output. It becomes possible to do.

[2] In the above laser apparatus, a plurality of laser oscillators are provided corresponding to the plurality of laser oscillators, and the output of the laser light oscillated from the laser oscillators is measured and a measurement signal corresponding to the measurement output of the laser light is output A measuring unit to perform,
A plurality of laser oscillators corresponding to a plurality of laser oscillators, and a feedback control unit that feedback-controls a laser control signal based on a measurement signal;
With
It is preferable that the plurality of laser oscillators oscillate laser light for each laser oscillator based on the laser control signal output from the corresponding feedback control unit.

  According to such a configuration, feedback control is performed based on the measurement signal corresponding to the measurement output, and the plurality of laser oscillators each oscillate laser light based on the laser control signal corrected by the feedback control. Therefore, individual differences (inherent variations) of laser oscillators can be corrected with higher accuracy.

[3] In the above laser apparatus, each of the plurality of measurement units may be incorporated in a corresponding laser oscillator. In this case, the laser device can be downsized.

[4] In the above laser device, the plurality of arithmetic units multiply the value of the setting signal by a preset proportional gain based on the characteristics of the corresponding laser oscillator,
By adding a deviation set in advance based on the characteristics of the corresponding laser oscillator to the multiplication value obtained by multiplication,
It is preferable to correct the setting signal.

  According to such a configuration, the calculation unit corrects the setting signal using the proportional gain and deviation set in advance based on the characteristics of the corresponding laser oscillator, so that individual differences (inherent variations) of the laser oscillators are corrected. It can be corrected with high accuracy.

[5] The laser device includes an adjustment unit that calculates a proportional gain and a deviation based on a desired output set for each of the plurality of laser beams and the characteristics of the corresponding laser oscillator, and outputs the proportional gain and deviation to the calculation unit. Good.

  According to such a configuration, even when a desired output is set for each of a plurality of laser beams, the adjustment unit can adjust the proportional gain and deviation based on the desired output and the characteristics of the laser oscillator. Since it calculates and outputs to a calculating part, each laser oscillator can each oscillate the laser beam of the desired output set beforehand. For this reason, it is possible to easily change the output of any laser light among the plurality of laser lights, and it is possible to easily switch the output ON / OFF for any laser light.

[6] A laser output correction method according to the present invention includes:
Outputting a setting signal corresponding to an output of a desired laser beam set in advance from one output unit;
In a plurality of arithmetic units provided corresponding to a plurality of laser oscillators, based on the characteristics of the corresponding laser oscillators, the setting signal is corrected so that the output of the laser beam becomes a preset desired output, and the laser Outputting a control signal;
Oscillating laser light from a laser oscillator based on a laser control signal;
It is characterized by having.

  According to the laser output correction method according to the present invention, in the plurality of arithmetic units, based on the characteristics of the corresponding laser oscillator, the setting signal is corrected so that the output of the laser beam becomes a preset desired output, Since the method includes the step of outputting the laser control signal, a plurality of laser beams can be emitted simultaneously with a predetermined desired output using a plurality of laser oscillators.

  According to the present invention, it is possible to simultaneously emit a plurality of laser beams with a predetermined desired output using a plurality of laser oscillators without adjusting the optical system.

It is a schematic diagram which shows the structure of the laser apparatus which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the structure of the laser oscillator shown by FIG. 3A is a plan view showing an example of welding using the laser apparatus shown in FIG. 1, and FIG. 3B is a side view showing a side surface of the workpiece shown in FIG. 3A. It is a schematic diagram which shows the laser apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram which shows the laser apparatus which concerns on the 3rd Embodiment of this invention.

  Hereinafter, preferred embodiments of a laser apparatus and a laser output correction method according to the present invention will be described in detail with reference to the accompanying drawings.

(First embodiment)
The laser apparatus 10 according to the present embodiment is a laser apparatus that can simultaneously emit a plurality of laser beams having a set output using a plurality of laser oscillators. For example, workpiece processing (cutting, welding, marking, etc.) ) And soldering.

  As shown in FIG. 1, the laser device 10 includes a laser device body 12 that emits four laser beams La, Lb, Lc, and Ld (hereinafter, collectively referred to as laser beam L), and four laser beams. A control unit 14 that controls the outputs of the laser beams La, Lb, Lc, and Ld, and an emission unit (not shown) that emits the four laser beams La, Lb, Lc, and Ld to the workpiece.

  In the laser apparatus main body 12, since the configuration for emitting the laser beam La and the configuration for emitting the other laser beams Lb, Lc, and Ld are the same, the configuration for emitting the laser beam La will be described below. The description of the configuration that emits the laser beams Lb, Lc, and Ld is omitted.

  The laser device main body 12 is configured to emit the laser light La as a laser oscillator 16a that oscillates the laser light La, a transmission fiber 18a that transmits the laser light La oscillated from the laser oscillator 16a, and a transmission fiber 18a. It has a collimating lens 20a for collimating the emitted laser beam La and an emission unit (not shown) for emitting the collimated laser beam La to the workpiece.

  As shown in FIG. 2, the laser oscillator 16 a is disposed on both sides of the laser diode unit 22 that emits the excitation light, the active fiber 24 that oscillates the laser light La based on the excitation light, and the active fiber 24. A pair of reflective elements 26 and 28 are included. In the following description, a laser diode is referred to as LD, and for example, the laser diode unit 22 is referred to as an LD unit 22. Similarly, a laser diode power supply 30 to be described later is represented as an LD power supply 30, and a laser diode 32 is represented as an LD32.

  The LD unit 22 includes an LD power source 30, a plurality of LDs 32 that emit pumping light based on a drive current supplied from the LD power source 30, and a combiner 34 that couples the pumping light guided from each LD 32. The LD power supply 30 supplies a driving current having a magnitude corresponding to a signal (a laser control signal Sla described later) input from the control unit 14 to each LD 32. Each LD 32 is configured as a so-called fiber coupling laser diode (hereinafter referred to as FC-LD). That is, an extraction optical fiber 36 for extracting the excitation light from the LD 32 is coupled to each LD 32, and an emission side end of the extraction optical fiber 36 is coupled to the combiner 34.

  Although not shown in detail, the active fiber 24 is an optical fiber including a core doped with a rare earth element ion such as Yb, and the laser light La is generated by exciting the rare earth element ion with excitation light. Oscillates. If the active fiber 24 is configured as a so-called double clad fiber, the laser light La can be efficiently oscillated.

  The pair of reflection elements 26 and 28 amplify the laser beam La oscillated from the active fiber 24. The reflection element 26 located on the combiner 34 side is configured such that excitation light from the combiner 34 toward the active fiber 24 passes and the laser light La is totally reflected. The reflection element 28 located on the transmission fiber 18a side is configured so that a part of the laser light La is reflected and the remainder of the laser light La passes.

  In the present embodiment, each of the reflective elements 26 and 28 is configured as FBG (Fiber Bragg Grating). In this case, it is possible to oscillate the laser beam La more efficiently than in the case where the reflecting elements 26 and 28 are configured by mirrors. However, it goes without saying that each of the reflection elements 26 and 28 may be constituted by a mirror.

  The laser oscillator 16a configured as described above oscillates a laser beam La of 1070 nm using excitation light of 915 nm to 980 nm, for example. The wavelengths of the excitation light and the laser light La can be arbitrarily set.

  In the laser apparatus main body 12, the configuration for emitting the laser light La is as described above. As shown in FIG. 1, the configuration and function for emitting the laser beams Lb, Lc, and Ld are the same as described above. It is.

  The control unit 14 includes one output unit (control board) 38 and a plurality of calculation units 40a, 40b, 40c, and 40d (hereinafter, these may be collectively referred to as the calculation unit 40).

  The output unit 38 outputs a setting signal Ss corresponding to a desired output set in advance for the laser beams La, Lb, Lc, and Ld. Here, the preset desired output is a common output of laser beams La, Lb, Lc, and Ld preset by the user or the like to the laser apparatus 10 via an operation unit (not shown). In other words, it refers to the common target output of the laser beams La, Lb, Lc, and Ld set for the laser device 10.

  The setting signal Ss is an analog voltage signal, and laser control signals Sla, Slb, Slc, and Sld (hereinafter, collectively referred to as a laser control signal S1), which will be described later, are also analog voltage signals. However, the setting signal Ss and the laser control signal S1 may be digital voltage signals.

  The arithmetic units 40a, 40b, 40c, and 40d are proportional in advance according to individual differences (inherent variations) of the laser oscillators 16a, 16b, 16c, and 16d (hereinafter, collectively referred to as the laser oscillator 16). Gains Aa, Ab, Ac, Ad (hereinafter collectively referred to as proportional gain A) and deviations Ba, Bb, Bc, Bd (hereinafter collectively referred to as deviation B) are respectively set. ing.

  The calculation units 40a, 40b, 40c, and 40d perform calculations for correcting the setting signal Ss supplied from the output unit 38 based on these proportional gains Aa, Ab, Ac, Ad and deviations Ba, Bb, Bc, Bd. The laser control signals Sla, Slb, Slc, and Sld obtained as a result of the calculation are output to the LD power sources 30 of the laser oscillators 16a, 16b, 16c, and 16d, respectively.

  Specifically, for example, the calculation unit 40a calculates the laser control signal Sla using a calculation formula of Sla = Aa × Ss + Ba. That is, the arithmetic unit 40a multiplies the value of the setting signal Ss by a preset proportional gain Aa based on the characteristics of the corresponding laser oscillator 16a, and the corresponding laser oscillator 16a is multiplied by the multiplication value obtained by the multiplication. By adding a deviation Ba set in advance based on the above characteristics, the setting signal Ss is corrected, and a laser control signal Sla is output to the laser oscillator 16a. The calculation units 40b, 40c, and 40d also output the laser control signals Slb, Slc, and Sld using the same calculation formula as the calculation unit 40a.

  When the setting signal Ss is an analog signal, the calculation unit 40 performs calculation after converting it to a digital signal by A / D conversion, and converts it to an analog signal by D / A conversion and outputs the laser control signal Sl. To do. However, the calculation unit 40 may perform analog calculation.

  The laser apparatus 10 according to the present embodiment is basically configured as described above. Hereinafter, the operation of the laser apparatus 10 and a laser output correction method using the laser apparatus 10 will be described.

  When using the laser apparatus 10, first, the user sets the output of the laser beams La, Lb, Lc, and Ld. Specifically, for example, by selecting one desired value as a desired output and inputting the desired value to the laser device 10 via an operation unit (not shown), the laser beams La, Lb, Lc, What is necessary is just to set the output of Ld. Subsequently, the user inputs oscillation start signals of the laser beams La, Lb, Lc, and Ld to the control unit 14. When the oscillation start signal is input, the output unit 38 outputs one setting signal Ss corresponding to a desired output of the laser beams La, Lb, Lc, and Ld. The setting signal Ss is input to the calculation units 40a, 40b, 40c, and 40d.

  The calculation units 40a, 40b, 40c, and 40d are proportional gains Aa, Ab, Ac, Ad and deviations Ba, Bb that are set in advance according to the characteristics of the setting signal Ss and the corresponding laser oscillators 16a, 16b, 16c, 16d. , Bc, and Bd, the laser control signals Sla, Slb, Slc, and Sld are calculated and output to the laser oscillators 16a, 16b, 16c, and 16d, respectively. Specifically, for example, the calculation unit 40a calculates the laser control signal Sla using the calculation formula of Sla = Aa × Ss + Ba, and outputs it to the corresponding laser oscillator 16a.

  Laser control signals Sla, Slb, Slc, and Sld are input to the LD power sources 30 of the laser oscillators 16a, 16b, 16c, and 16d, respectively. Thereby, each LD power supply 30 supplies each LD 32 with a drive current corresponding to the input laser control signals Sla, Slb, Slc, and Sld.

  When the drive current is supplied to each LD 32, excitation light is emitted from each LD 32 and coupled (combined) by each combiner 34, and the coupled excitation light passes through the core of each active fiber 24, thereby causing the active fiber to pass. Laser beams La, Lb, Lc, and Ld are oscillated from 24, respectively. Laser light La, Lb, Lc, Ld oscillated from each active fiber 24 is amplified by reciprocating a plurality of times between the pair of reflection elements 26, 28, and the laser light La, Lb, Lc and Ld are emitted from the transmission fiber 18, respectively.

  The laser beams La, Lb, Lc, and Ld emitted from the transmission fiber 18 are collimated by the collimator lens 20 and then irradiated to the workpiece through an emission unit (not shown) to process the workpiece (cut, weld, Marking, etc.) and soldering. The emission unit may have a galvano scanner.

  3A and 3B show an example in which the first workpiece 42 and the second workpiece 44 are welded using laser beams La, Lb, Lc, and Ld. As shown in FIGS. 3A and 3B, the plurality of laser beams La, Lb, Lc, and Ld are simultaneously emitted from an emission unit (not shown) to weld the first workpiece 42 and the second workpiece 44 together.

  If a plurality of laser beams La, Lb, Lc, and Ld are not emitted at the same time, thermal distortion may occur due to a part of the laser beams irradiated prior to the other laser beams. Due to this thermal strain, the second workpiece 44 may be lifted or misaligned, and there is a possibility that another laser beam irradiated with delay may be irradiated to a place different from the desired place. Absent. In the laser device 10 according to the present embodiment, a plurality of laser beams La, Lb, Lc, and Ld can be emitted simultaneously, so that such inconvenience is avoided.

  A plurality of laser devices 10 according to the present embodiment are provided corresponding to the plurality of laser oscillators 16a, 16b, 16c, and 16d, and the setting signal is based on the characteristics of the corresponding laser oscillators 16a, 16b, 16c, and 16d. Arithmetic units 40a, 40b, 40c, and 40d that correct Ss and output laser control signals Sla, Slb, Slc, and Sld are provided. Accordingly, in order to correct individual differences (inherent variations) of the laser oscillators 16a, 16b, 16c, and 16d to which the arithmetic units 40a, 40b, 40c, and 40d correspond, a plurality of laser oscillators 16a, 16b, and 16c are corrected. , 16d, a plurality of laser beams La, Lb, Lc, Ld can be emitted simultaneously with a preset desired output.

  In the laser apparatus 10 according to the present embodiment, the plurality of arithmetic units 40a, 40b, 40c, and 40d are proportional gains Aa and Ab that are set in advance based on the characteristics of the corresponding laser oscillators 16a, 16b, 16c, and 16d. , Ac and Ad are multiplied by the value of the setting signal Ss, and deviations Ba, Bb, which are set in advance based on the characteristics of the corresponding laser oscillators 16a, 16b, 16c and 16d are obtained with respect to the multiplication value obtained by the multiplication. The setting signal Ss is corrected by adding Bc and Bd. Thereby, the plurality of arithmetic units 40a, 40b, 40c, and 40d can accurately correct individual differences (inherent variations) of the corresponding laser oscillators 16a, 16b, 16c, and 16d.

  Furthermore, according to the laser output correction method using the laser device 10 according to the present embodiment, the plurality of arithmetic units 40a, 40b, 40c, and 40d are based on the characteristics of the corresponding laser oscillators 16a, 16b, 16c, and 16d. Thus, there is a step of correcting individual differences (inherent variations) of the laser oscillators 16a, 16b, 16c, and 16d and outputting laser control signals Sla, Slb, Slc, and Sld. For this reason, a plurality of laser beams La, Lb, Lc, and Ld can be simultaneously emitted with a predetermined desired output by using the plurality of laser oscillators 16a, 16b, 16c, and 16d.

  Furthermore, according to the present embodiment, the output from the single output unit 38 is branched and supplied to the plurality of laser oscillators 16a, 16b, 16c, and 16d. Therefore, the output unit 38 can be shared by the plurality of laser oscillators 16a, 16b, 16c, and 16d, and the manufacturing cost can be reduced.

(Second Embodiment)
Next, a laser apparatus 50 according to a second embodiment of the present invention will be described with reference to FIG. The laser device 50 according to the second embodiment is different from the first embodiment in that a measurement optical system 52 and a feedback control unit 54 are provided. In the second embodiment, the other configuration is the same as that of the first embodiment, and therefore, the same reference numerals are given and detailed description thereof is omitted.

  In the laser apparatus 50 according to the second embodiment, the laser apparatus main body 12 includes a measurement optical system 52 for measuring the output of the laser light L emitted from the transmission fiber 18 therein, and the control unit 14 includes: A feedback control unit 54 that corrects the laser control signal Sl based on the measurement signals Sma, Smb, Smc, and Smd (hereinafter, collectively referred to as Sm) output from the measurement optical system 52 is included.

  As can be understood from FIG. 4, the measurement optical system 52 includes four measurement optical systems 52a, 52b, 52c, and 52d provided corresponding to the four laser oscillators 16a, 16b, 16c, and 16d, respectively. Since the measurement optical systems 52a, 52b, 52c, and 52d all have the same configuration, the measurement optical system 52a will be described here, and the description of the measurement optical systems 52b, 52c, and 52d will be omitted.

  The measurement optical system 52a is collected by a branch mirror 56a for branching the laser light La collimated by the collimator lens 20a, a condenser lens 58a for condensing the branched laser light La, and a condenser lens 58a. A measurement unit (power monitor) 60a that receives the emitted laser beam La. The reflectance of the branch mirror 56a is set to about 1%, for example. The laser beam La transmitted through the branch mirror 56a is used for workpiece processing (cutting, welding, marking, etc.) and soldering.

  The measurement unit 60a includes, for example, a photodiode (not shown), measures the output of the branched laser light La, and outputs a measurement signal Sma corresponding to the measurement output of the laser light La.

  Here, the measurement signal Sma is an analog voltage signal, and the other measurement signals Smb, Smc, and Smd are analog voltage signals as well. Laser control signals Sla ', Slb', Slc ', and Sld' (to be referred to collectively as Sl 'hereinafter), which will be described later, are also analog voltage signals. However, the measurement signal Sm and the laser control signal Sl ′ may be digital voltage signals.

  As can be understood from FIG. 4, the feedback control unit 54 constituting the control unit 14 includes feedback control units 54a, 54b, 54c, 54d provided corresponding to the four laser oscillators 16a, 16b, 16c, 16d, respectively. Consists of. Since the feedback control units 54a, 54b, 54c, and 54d all operate in the same manner, only the feedback control unit 54a will be described here, and description of the feedback control units 54b, 54c, and 54d will be omitted.

  Based on the laser control signal Sla and the measurement signal Sma, the feedback control unit 54a performs an operation for correcting the laser control signal Sla so that the output of the laser light La becomes a predetermined output, and the laser control signal Sla 'is output. The feedback control unit 54a performs, for example, PI control or PID control. The control gain (eg, proportional gain, integral gain, differential gain) of the feedback control unit 54a can be arbitrarily determined, but is set to a magnitude that does not cause hunting or overshoot. In this embodiment, since the laser oscillator 16a is configured as a fiber laser device, the response of the laser oscillator 16a becomes worse as the preset output is smaller. Therefore, the control gain is set to such a magnitude that hunting and overshoot are sufficiently suppressed according to the set output.

  According to the present embodiment, feedback control is performed based on the measurement signals Sma, Smb, Smc, Smd corresponding to the measurement output, and the laser control signals Sla ′, Slb ′, Slc ′ after being corrected by the feedback control. , Sld ′, the laser oscillators 16a, 16b, 16c, and 16d oscillate laser beams La, Lb, Lc, and Ld. Therefore, individual differences (inherent variations) between the laser oscillators 16a, 16b, 16c, and 16d can be corrected with higher accuracy.

  In addition, this embodiment is not limited to the structure mentioned above. For example, the measurement units 60a, 60b, 60c, and 60d may be incorporated in the laser oscillators 16a, 16b, 16c, and 16d. In this case, since the configuration of the measurement optical system 52 can be reduced in size, the laser device 50 can be reduced in size.

(Third embodiment)
Next, a laser apparatus 70 according to a third embodiment of the present invention will be described with reference to FIG. The laser device 70 according to the third embodiment is different from the first embodiment in that an adjustment unit 72 is provided in the control unit 14. In the third embodiment, other configurations are the same as those in the first embodiment, and thus the same reference numerals are assigned and detailed description thereof is omitted.

  Based on the desired output preset for each of the plurality of laser beams La, Lb, Lc, and Ld and the characteristics of the laser oscillators 16a, 16b, 16c, and 16d, the adjustment unit 72 performs proportional gains Aa, Ab, Ac, Ad and deviations Ba, Bb, Bc, and Bd are calculated and output to the arithmetic units 40a, 40b, 40c, and 40d.

  When the desired output preset for each of the plurality of laser beams La, Lb, Lc, and Ld is the same, the adjustment unit 72 is preset based on the characteristics of the laser oscillators 16a, 16b, 16c, and 16d. The proportional gains Aa, Ab, Ac, Ad and the deviations Ba, Bb, Bc, Bd are output to the calculation units 40a, 40b, 40c, 40d.

  On the other hand, the output of an arbitrary laser beam L can be set to an output different from the outputs of other laser beams L.

  In this case, the adjusting unit 72 is based on the desired output set for each of the plurality of laser beams La, Lb, Lc, and Ld and the characteristics of the corresponding laser oscillators 16a, 16b, 16c, and 16d. Aa, Ab, Ac, Ad and deviations Ba, Bb, Bc, Bd are calculated and output to the computing units 40a, 40b, 40c, 40d.

  Each calculation unit 40a, 40b, 40c, 40d corrects the setting signal Ss based on the adjusted proportional gains Aa, Ab, Ac, Ad and deviations Ba, Bb, Bc, Bd output from the adjustment unit 72. The obtained laser control signals Sla, Slb, Slc, and Sld are output to the laser oscillators 16a, 16b, 16c, and 16d, respectively.

  According to such a configuration, even when different outputs are set for each of the plurality of laser beams La, Lb, Lc, and Ld, the adjustment unit 72 is configured for each of the laser beams La, Lb, Lc, and Ld. Based on the set desired output and the characteristics of the laser oscillators 16a, 16b, 16c, and 16d, proportional gains Aa, Ab, Ac, Ad and deviations Ba, Bb, Bc, Bd are calculated, and an arithmetic unit 40a , 40b, 40c, and 40d. Therefore, each of the laser oscillators 16a, 16b, 16c, and 16d oscillates the laser beams La, Lb, Lc, and Ld with desired outputs set in advance. As a result, the laser device 70 can simultaneously emit a plurality of laser beams La, Lb, Lc, and Ld with a preset desired output.

  Therefore, the laser device 70 can change the output ratio by easily changing the output of any laser light among the plurality of laser lights La, Lb, Lc, Ld, for example, and any laser light. The output can be easily switched ON / OFF.

  In addition, this embodiment is not limited to the structure mentioned above. For example, the laser oscillator 16 is not limited to the example configured as a fiber laser device, and can be configured as various laser devices such as a YAG laser device and an LD device.

  The present invention is not limited to the above-described embodiment, and it is naturally possible to adopt various configurations without departing from the gist of the present invention.

16, 16a, 16b, 16c, 16d ... laser oscillator 38 ... output unit 40, 40a, 40b, 40c, 40d ... calculation unit 54, 54a, 54b, 54c, 54d ... feedback control unit 60a, 60b, 60c, 60d ... measurement (Power monitor)
A, Aa, Ab, Ac, Ad ... proportional gain B, Ba, Bb, Bc, Bd ... deviation Sl, Sla, Slb, Slc, Sld ... laser control signal Sm, Sma, Smb, Smc, Smd ... measurement signal Ss ... Setting signal

Claims (6)

One output unit for outputting a setting signal corresponding to the output of a desired laser beam set in advance;
A plurality of laser oscillators for oscillating the laser beam;
A plurality of units corresponding to the plurality of laser oscillators, and correcting the setting signal based on the characteristics of the corresponding laser oscillators, and outputting a laser control signal;
With
A plurality of the laser oscillators oscillate the laser beam based on the laser control signal output from the corresponding calculation unit for each of the laser oscillators. The laser device according to claim 1, wherein
A plurality of measurement units provided corresponding to the plurality of laser oscillators, and measuring the output of the laser light oscillated from the laser oscillator and outputting a measurement signal corresponding to the measurement output of the laser light;
A plurality of laser oscillators corresponding to the plurality of laser oscillators, and a feedback control unit that feedback-controls the laser control signal based on the measurement signal;
With
The plurality of laser oscillators oscillate the laser beam based on the laser control signal output from the corresponding feedback control unit for each of the laser oscillators. The laser device according to claim 2, wherein
A plurality of the measurement units, wherein each of the measurement units is built in the corresponding laser oscillator. In the laser apparatus of any one of Claims 1-3,
The plurality of arithmetic units are:
Multiplying the value of the set signal by a preset proportional gain based on the characteristics of the corresponding laser oscillator;
By adding a deviation set in advance based on the characteristics of the corresponding laser oscillator to the multiplication value obtained by the multiplication,
A laser apparatus that corrects the setting signal. The laser device according to claim 4, wherein
An adjustment unit that calculates the proportional gain and the deviation based on a desired output set for each of the plurality of laser beams and the characteristics of the corresponding laser oscillator, and outputs the proportional gain and the deviation to the calculation unit is provided. Laser device to do. Outputting a setting signal corresponding to an output of a desired laser beam set in advance from one output unit;
In a plurality of arithmetic units provided corresponding to a plurality of laser oscillators, based on the characteristics of the corresponding laser oscillators, the setting signal is corrected so that the output of the laser light becomes a preset desired output. Outputting a laser control signal;
Oscillating the laser beam from the laser oscillator based on the laser control signal;
A laser output correction method comprising:

Images