JP2014239386A - Piezoelectric type electroacoustic transducer and electronic apparatus - Google Patents

Piezoelectric type electroacoustic transducer and electronic apparatus Download PDF

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JP2014239386A
JP2014239386A JP2013121951A JP2013121951A JP2014239386A JP 2014239386 A JP2014239386 A JP 2014239386A JP 2013121951 A JP2013121951 A JP 2013121951A JP 2013121951 A JP2013121951 A JP 2013121951A JP 2014239386 A JP2014239386 A JP 2014239386A
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piezoelectric
metal plate
elastic member
electroacoustic transducer
piezoelectric film
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康晴 大西
Yasuharu Onishi
康晴 大西
黒田 淳
Atsushi Kuroda
淳 黒田
大介 杉井
Daisuke Sugii
大介 杉井
元喜 菰田
Motoyoshi Komoda
元喜 菰田
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NEC Casio Mobile Communications Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a small piezoelectric type electroacoustic transducer which achieves high sound quality and has an impact stability, and to provide an electronic apparatus.SOLUTION: A piezoelectric type electroacoustic transducer includes: a metal plate 12 having a groove part 12a on a main surface; a first elastic member 13 buried in the groove part; a piezoelectric film 14 joined to the metal plate and the first elastic member on the main surface of the metal plate; a frame 10 having a through slot 10a; and a second elastic member 11 which is joined to the metal plate and a wall surface of the through slot. The first elastic member is disposed at a position that is overlapped with at least an end part of the piezoelectric film when viewed from the upper side of the main surface of the metal plate.

Description

本発明は、圧電型電気音響変換器及びそれを用いた電子機器に関する。   The present invention relates to a piezoelectric electroacoustic transducer and an electronic apparatus using the same.

携帯電話機、スマートフォン等の携帯型の電子機器においては、音響部品として動電型電気音響変換器が利用されている。動電型電気音響変換器は、永久磁石とボイスコイルと振動膜から構成されている。動電型電気音響変換器の動作原理は、永久磁石を用いたステータの磁気回路の作用によりボイスコイルに固定された振動膜(例えば、有機フィルム等)が振動し、音波を発生させるものである。   In portable electronic devices such as mobile phones and smartphones, electrodynamic electroacoustic transducers are used as acoustic components. The electrodynamic electroacoustic transducer is composed of a permanent magnet, a voice coil, and a diaphragm. The principle of operation of the electrodynamic electroacoustic transducer is that a vibration film (for example, an organic film) fixed to a voice coil vibrates by the action of a magnetic circuit of a stator using a permanent magnet to generate sound waves. .

ところで、近年、携帯電話機、ラップトップ型パーソナルコンピュータ等の携帯型の電子機器の需要が増えており、電気音響変換器の小型化への要求が高まりつつある。しかしながら、導電型電気音響変換器の音響性能において重要な示強量である音圧レベルは、振動膜の空気に対する体積排除によって決定される。従って、導電型電気音響変換器を小型化する場合、振動膜の放射面面積が減少するため、音圧レベルが低下する問題があった。   Incidentally, in recent years, demand for portable electronic devices such as mobile phones and laptop personal computers has increased, and there has been an increasing demand for miniaturization of electroacoustic transducers. However, the sound pressure level, which is an important indication in the acoustic performance of the conductive electroacoustic transducer, is determined by the volume exclusion of the diaphragm against air. Therefore, when the conductive electroacoustic transducer is downsized, there is a problem that the sound pressure level is lowered because the radiation surface area of the diaphragm is reduced.

一方、導電型電気音響変換器において、音圧レベルを向上する手段として、磁気回路の磁気発生力を高め、振動膜の振幅を増加させる手段がある。しかしながら、この手段においては、磁束密度の増加や駆動電流の増加が必要とされ、永久磁石の体積増加やボイスコイルの太線化により、磁気回路の厚みが増加し、小型化が困難という問題がある。また、導電型電気音響変換器では、電流量増大に伴う消費電力の増加などの問題もある。   On the other hand, in the electroconductive electroacoustic transducer, as means for improving the sound pressure level, there is means for increasing the magnetism of the magnetic circuit and increasing the amplitude of the diaphragm. However, this means requires an increase in magnetic flux density and an increase in drive current, and there is a problem in that the thickness of the magnetic circuit increases due to the increase in the volume of the permanent magnet and the thickening of the voice coil, making it difficult to reduce the size. . In addition, the conductive electroacoustic transducer also has problems such as an increase in power consumption accompanying an increase in the amount of current.

一方、小型かつ薄型の電気音響変換器を実現する手段として、圧電アクチュエータを用いた圧電型電気音響変換器がある(例えば、特許文献1参照)。この圧電型電気音響変換器は、圧電アクチュエータの圧電効果を利用して、電気信号の入力による電歪作用により、振動振幅を発生させるものである。圧電アクチュエータは、例えば、上下層を電極材料で挟まれたシート状の圧電セラミックス自体が振動し、圧電セラミックスが駆動源として機能する。そのため、圧電型電気音響変換器は、永久磁石やボイスコイルなどの多数の部材から構成される磁気回路を有する導電型電気音響変換器と比べて、部材点数が少なく、薄型化に優位である。   On the other hand, as means for realizing a small and thin electroacoustic transducer, there is a piezoelectric electroacoustic transducer using a piezoelectric actuator (see, for example, Patent Document 1). This piezoelectric electroacoustic transducer uses a piezoelectric effect of a piezoelectric actuator to generate a vibration amplitude by an electrostrictive action by inputting an electric signal. In the piezoelectric actuator, for example, a sheet-like piezoelectric ceramic itself having upper and lower layers sandwiched between electrode materials vibrates, and the piezoelectric ceramic functions as a drive source. Therefore, the piezoelectric electroacoustic transducer has a smaller number of members and is superior in thinning compared to a conductive electroacoustic transducer having a magnetic circuit composed of a large number of members such as permanent magnets and voice coils.

特開2000−23286号公報JP 2000-23286 A

以下の分析は、本願発明者により与えられる。   The following analysis is given by the inventor.

しかしながら、圧電型電気音響変換器は、内部損失が低い圧電セラミックスを振動源とするため、有機フィルムを通して振幅を発生させる動電型電気音響変換器と比べて、機械品質係数Qが高い傾向にある。例えば、動電型電気音響変換器の機械品質係数Qは3〜5程度であるのに対して、圧電型電気音響変換器の機械品質係数Qでは約50程度である。   However, since the piezoelectric electroacoustic transducer uses piezoelectric ceramics having a low internal loss as a vibration source, the mechanical quality factor Q tends to be higher than that of an electrodynamic electroacoustic transducer that generates amplitude through an organic film. . For example, the mechanical quality factor Q of the electrodynamic electroacoustic transducer is about 3 to 5, whereas the mechanical quality factor Q of the piezoelectric electroacoustic transducer is about 50.

機械品質係数Qは共振時に先鋭度を示すため、圧電型電気音響変換器では、基本共振周波数近傍では音圧が高く、基本共振周波数以外の帯域では音圧が減衰するという特性がある。すなわち、圧電型電気音響変換器では、音圧レベル周波数特性において、音響特性の山谷が発生し、特定周波数の音が強調されたたり、消失されたりして、音楽再生などに十分な音質が得られないという問題がある。   Since the mechanical quality factor Q indicates sharpness at the time of resonance, the piezoelectric electroacoustic transducer has a characteristic that the sound pressure is high near the fundamental resonance frequency and the sound pressure is attenuated in a band other than the fundamental resonance frequency. In other words, in the piezoelectric electroacoustic transducer, in the sound pressure level frequency characteristics, peaks and valleys in the acoustic characteristics occur, and the sound of a specific frequency is emphasized or lost, so that sufficient sound quality for music reproduction and the like is obtained. There is a problem that can not be.

また、圧電型電気音響変換器では、脆性材料であるセラミックスを用いるため、落下時の衝撃安定性が弱く、携帯電話機などの携帯型の電子機器に搭載した場合の信頼性確保に課題がある。   In addition, since piezoelectric electroacoustic transducers use ceramics, which are brittle materials, impact stability when dropped is weak, and there is a problem in securing reliability when mounted on portable electronic devices such as cellular phones.

本発明の主な課題は、小型かつ高音質で衝撃安定性を有する圧電型電気音響変換器及び電子機器を提供することである。   A main object of the present invention is to provide a piezoelectric electroacoustic transducer and an electronic device that are small in size, have high sound quality, and have impact stability.

本発明の第1の視点においては、圧電型電気音響変換器において、主面に溝部を有する金属板と、前記溝部に埋め込まれた第1弾性部材と、前記金属板の前記主面上にて前記金属板及び前記第1弾性部材に接合された圧電体膜と、貫通口を有するフレームと、前記金属板と接合するとともに前記貫通口の壁面と接合する第2弾性部材と、を備え、前記第1弾性部材は、前記金属板の前記主面の上側から見て、少なくとも前記圧電体膜の端部と重なる位置に配設されることを特徴とする。   In a first aspect of the present invention, in the piezoelectric electroacoustic transducer, a metal plate having a groove on a main surface, a first elastic member embedded in the groove, and the main surface of the metal plate A piezoelectric film bonded to the metal plate and the first elastic member; a frame having a through hole; and a second elastic member bonded to the metal plate and to the wall surface of the through hole; The first elastic member is disposed at a position overlapping at least an end portion of the piezoelectric film as viewed from above the main surface of the metal plate.

本発明の第2の視点においては、電子機器において、前記圧電型電気音響変換器が実装されることを特徴とする。   In a second aspect of the present invention, the electronic electroacoustic transducer is mounted in an electronic device.

本発明によれば、小型かつ高音質で衝撃安定性を有する圧電型電気音響変換器及び電子機器を提供することができる。   According to the present invention, it is possible to provide a piezoelectric electroacoustic transducer and an electronic device that are small, have high sound quality, and have impact stability.

本発明の一実施形態に係る圧電型電気音響変換器の構成を模式的に示した断面図である。It is sectional drawing which showed typically the structure of the piezoelectric type electroacoustic transducer which concerns on one Embodiment of this invention. 本発明の一実施形態に係る圧電型電気音響変換器の構成を模式的に示した展開斜視図である。It is the expansion | deployment perspective view which showed typically the structure of the piezoelectric type electroacoustic transducer which concerns on one Embodiment of this invention. 本発明の一実施形態に係る圧電型電気音響変換器の変形例の構成を模式的に示した断面図である。It is sectional drawing which showed typically the structure of the modification of the piezoelectric electroacoustic transducer which concerns on one Embodiment of this invention. 比較例に係る圧電型電気音響変換器の構成を模式的に示した断面図である。It is sectional drawing which showed typically the structure of the piezoelectric type electroacoustic transducer which concerns on a comparative example. 本発明の一実施形態に係る圧電型電気音響変換器の周波数音圧特性を模式的に示した図である。It is the figure which showed typically the frequency sound pressure characteristic of the piezoelectric electroacoustic transducer which concerns on one Embodiment of this invention.

[実施形態]
本発明の一実施形態に係る圧電型電気音響変換器について図面を用いて説明する。図1は、本発明の一実施形態に係る圧電型電気音響変換器の構成を模式的に示した断面図である。図2は、本発明の一実施形態に係る圧電型電気音響変換器の構成を模式的に示した展開斜視図である。図3は、本発明の一実施形態に係る圧電型電気音響変換器の変形例の構成を模式的に示した断面図である。
[Embodiment]
A piezoelectric electroacoustic transducer according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view schematically showing a configuration of a piezoelectric electroacoustic transducer according to an embodiment of the present invention. FIG. 2 is a developed perspective view schematically showing the configuration of the piezoelectric electroacoustic transducer according to one embodiment of the present invention. FIG. 3 is a cross-sectional view schematically showing a configuration of a modified example of the piezoelectric electroacoustic transducer according to the embodiment of the present invention.

圧電型電気音響変換器1は、圧電アクチュエータ2の電歪効果を利用して振動振幅を発生させる圧電型の電気音響変換器である(図1、図2参照)。圧電型電気音響変換器1は、例えば、携帯電話機、スマートフォン等の携帯型の電子機器に実装される。圧電型電気音響変換器1は、フレーム10の貫通口10a内に、環状の弾性部材11を介して金属板12が装着され、金属板12上に圧電体膜14を介して電極15が配されている。圧電型電気音響変換器1は、主な構成部として、フレーム10と、弾性部材11と、金属板12と、弾性部材13と、圧電体膜14と、電極15と、リード線16、17と、を有する。   The piezoelectric electroacoustic transducer 1 is a piezoelectric electroacoustic transducer that generates vibration amplitude using the electrostrictive effect of the piezoelectric actuator 2 (see FIGS. 1 and 2). The piezoelectric electroacoustic transducer 1 is mounted on, for example, a portable electronic device such as a mobile phone or a smartphone. In the piezoelectric electroacoustic transducer 1, a metal plate 12 is mounted in a through-hole 10 a of a frame 10 via an annular elastic member 11, and an electrode 15 is disposed on the metal plate 12 via a piezoelectric film 14. ing. The piezoelectric electroacoustic transducer 1 includes, as main components, a frame 10, an elastic member 11, a metal plate 12, an elastic member 13, a piezoelectric film 14, an electrode 15, and lead wires 16 and 17. Have.

フレーム10は、弾性部材11と金属板12と圧電体膜14と電極15とから組み立てられた圧電アクチュエータ2を支持(又は保持)する部材である。フレーム10は、弾性部材11を介して金属板12を支持する。フレーム10は、上側(図1の上側)から見て環状に形成されており、中央を貫通した貫通口10aを有する。貫通口10aは、上方から見て円形状(楕円形状、矩形状でも可)に形成されている。フレーム10は、貫通口10a内の内壁面にて、環状の弾性部材11の外周端部と全周に渡って接合(接着、圧入等でも可)している。フレーム10には、例えば、樹脂材料や、真鍮、ステンレス等を用いることができる。   The frame 10 is a member that supports (or holds) the piezoelectric actuator 2 that is assembled from the elastic member 11, the metal plate 12, the piezoelectric film 14, and the electrode 15. The frame 10 supports the metal plate 12 via the elastic member 11. The frame 10 is formed in an annular shape when viewed from the upper side (the upper side in FIG. 1), and has a through-hole 10a penetrating the center. The through-hole 10a is formed in a circular shape (may be elliptical or rectangular) when viewed from above. The frame 10 is joined (adhered, press-fitted, or the like) over the entire outer periphery of the annular elastic member 11 on the inner wall surface in the through-hole 10a. For the frame 10, for example, a resin material, brass, stainless steel, or the like can be used.

弾性部材11は、金属板12をフレーム10に対して弾性的に取り付けるための部材であり、圧電アクチュエータ2の構成部材である。弾性部材11は、中央部に円形状の開口部11aを有する。弾性部材11は、上側(図1の上側)から見て、環状に形成されている。弾性部材11は、上側(図1の上側)の面における内側の周縁部にて、円形状の金属板12の下側(図1の下側)の面における周縁部と接合している。弾性部材11は、外周端部にて、フレーム10の貫通口10aの内壁面に接合(接着等でも可)している。弾性部材11には、金属板12の振動が伝播し、座屈により振幅を発生させる。弾性部材11には、例えば、多孔質材、ウレタン系材料(例えば、ウレタンフォーム)、内部損失の高い樹脂材料、カーボン系材料等を用いることができる。   The elastic member 11 is a member for elastically attaching the metal plate 12 to the frame 10 and is a constituent member of the piezoelectric actuator 2. The elastic member 11 has a circular opening 11a at the center. The elastic member 11 is formed in an annular shape when viewed from the upper side (the upper side in FIG. 1). The elastic member 11 is joined to the peripheral edge on the lower surface (lower side in FIG. 1) of the circular metal plate 12 at the inner peripheral edge on the upper surface (upper in FIG. 1). The elastic member 11 is joined (adhered or the like) to the inner wall surface of the through hole 10a of the frame 10 at the outer peripheral end. The vibration of the metal plate 12 propagates to the elastic member 11 and generates an amplitude by buckling. For the elastic member 11, for example, a porous material, a urethane-based material (for example, urethane foam), a resin material with a high internal loss, a carbon-based material, or the like can be used.

金属板12は、金属よりなる板状部材であり、圧電アクチュエータ2の構成部材である。金属板12は、上側(図1の上側)から見て円形状(楕円形状でも可)に形成されている。金属板12は、フレーム10の貫通口10aの内壁面から離れており、下側(図1の下側)の面における外周側の周縁部(外周端部でも可)にて、環状の弾性部材11と接合(接着、貼合等でも可)している。金属板12は、圧電体膜14及び電極15に対して外径が大きい。金属板12は、上側(図1の上側)の面における中央にて、圧電体膜14と接合(接着等でも可)している。金属板12は、圧電体膜14及び電極15を支持する支持部材であると同時に、電気伝導が可能であるため、圧電体膜14の電極としても使用できる。金属板12には、上側(図1の上側、圧電体膜14側)の面における圧電体膜14の外周端面と重なる部分において所定深さの溝部12aが形成されている。溝部12aは、圧電体膜14の端部(端面)に沿って環状に形成されている。溝部12aの外側の側壁面は、圧電体膜14の端部(端面)よりも径方向外側に配されている。溝部12aの内側の側壁面は、圧電体膜14の端部(端面)よりも径方向内側に配されている。溝部12aには、弾性部材13が埋め込まれている。金属板12は、リード線17と電気的に接続されており、リード線17からの電気信号を圧電体膜14に印加させる役割を持つ。金属板12には、導電性を有し、かつ、震動板として機能する金属材料(合金等の金属系材料を含む)が用いられ、例えば、リン青銅、ステンレス材料等を用いることができる。   The metal plate 12 is a plate-like member made of metal and is a constituent member of the piezoelectric actuator 2. The metal plate 12 is formed in a circular shape (may be an elliptical shape) when viewed from the upper side (the upper side in FIG. 1). The metal plate 12 is separated from the inner wall surface of the through-hole 10a of the frame 10, and is an annular elastic member at the outer peripheral side peripheral portion (or the outer peripheral end portion is acceptable) on the lower (lower side in FIG. 1) surface. 11 (bonding, bonding, etc. are also possible). The metal plate 12 has a larger outer diameter than the piezoelectric film 14 and the electrode 15. The metal plate 12 is joined (adhered or the like) to the piezoelectric film 14 at the center of the upper surface (upper side in FIG. 1). The metal plate 12 is a support member that supports the piezoelectric film 14 and the electrode 15, and at the same time can conduct electricity, and therefore can be used as an electrode of the piezoelectric film 14. In the metal plate 12, a groove 12a having a predetermined depth is formed at a portion overlapping the outer peripheral end surface of the piezoelectric film 14 on the upper surface (upper side in FIG. 1, the piezoelectric film 14 side). The groove 12 a is formed in an annular shape along the end (end surface) of the piezoelectric film 14. The side wall surface on the outer side of the groove portion 12 a is disposed on the radially outer side than the end portion (end surface) of the piezoelectric film 14. The side wall surface on the inner side of the groove portion 12 a is disposed on the radially inner side with respect to the end portion (end surface) of the piezoelectric film 14. An elastic member 13 is embedded in the groove 12a. The metal plate 12 is electrically connected to the lead wire 17 and has a role of applying an electric signal from the lead wire 17 to the piezoelectric film 14. The metal plate 12 is made of a metal material (including a metal material such as an alloy) that has conductivity and functions as a vibration plate. For example, phosphor bronze, a stainless material, or the like can be used.

弾性部材13は、金属板12に溝部12aに埋め込まれた弾性材料よりなる部材であり、圧電アクチュエータ2の構成部材である。弾性部材13は、溝部12a内にて金属板12と接合している。弾性部材13は、上側(図1の上側)から見て、溝部12aに沿って環状に形成されている。弾性部材13は、上側(図1の上側)から見て、少なくとも圧電体膜14の端部(端面)と重なる位置に配設される。弾性部材13は、圧電体膜14の端部に沿って配設され、弾性部材13の上側(図1の上側)の面における内側の周縁部にて圧電体膜14の下面(図1の下側の主面)における周縁部と接合している。弾性部材13には、例えば、多孔質材、ウレタン系材料(例えば、ウレタンフォーム)、内部損失の高い樹脂材料、カーボン系材料等を用いることができる。   The elastic member 13 is a member made of an elastic material embedded in the groove 12 a in the metal plate 12 and is a constituent member of the piezoelectric actuator 2. The elastic member 13 is joined to the metal plate 12 in the groove 12a. The elastic member 13 is formed in an annular shape along the groove 12a when viewed from the upper side (the upper side in FIG. 1). The elastic member 13 is disposed at a position that overlaps at least the end portion (end surface) of the piezoelectric film 14 when viewed from the upper side (the upper side in FIG. 1). The elastic member 13 is disposed along the end portion of the piezoelectric film 14, and the lower surface of the piezoelectric film 14 (lower side in FIG. 1) at the inner peripheral edge of the upper surface (upper side in FIG. 1) of the elastic member 13. Side main surface). For the elastic member 13, for example, a porous material, a urethane-based material (for example, urethane foam), a resin material with a high internal loss, a carbon-based material, or the like can be used.

圧電体膜14は、金属板12と電極15との間に介在した圧電性を有する膜状(シート状、フィルム状)の部材であり、圧電アクチュエータ2の構成部材である。圧電体膜14は、上面(図1の上側の主面)にて電極15と接合(接着、貼合等でも可)し、下面(図1の下側の主面)にて金属板12と接合(接着、貼合等でも可)している。圧電体膜14の外周端部は、金属板12の溝部12aに埋め込まれた弾性部材13と重なるように配されている。圧電体膜14は、下側(図1の下側)の面における周縁部にて弾性部材13と接合(接着、貼合等でも可)している。すなわち、圧電体膜14の周縁部が弾性部材13と接合することで、音響特性と落下衝撃時の安定性を向上させることができる。圧電体膜14は、上側(図1の上側)から見て円形状(楕円形状でも可)に形成されている。圧電体膜14は、フレーム10、弾性部材11、金属板12、弾性部材13、及び、電極15のそれぞれと同心となるように配されている。圧電体膜14は、フレーム10の貫通口10aの内壁面から離れている。圧電体膜14には、圧電材料が用いられ、例えば、PZT(Pb(Zr、Ti1−x)O;チタン酸ジルコン酸鉛)等の圧電セラミックス、ポリフッ化ビニリデン、フッ化ビニリデン及び三フッ化エチレンのコポリマーなどの圧電有機材料を用いることができる。圧電体膜14に圧電有機材料を用いれば、落下時の衝撃安定性を有する。なお、圧電体膜14が金属膜(電極15と同様なもの)とユニットになっている場合、圧電体膜14と金属板12との間には金属膜があってもよい。 The piezoelectric film 14 is a film-like (sheet-like, film-like) member having piezoelectricity interposed between the metal plate 12 and the electrode 15, and is a constituent member of the piezoelectric actuator 2. The piezoelectric film 14 is joined (adhered or bonded, etc.) to the electrode 15 on the upper surface (upper main surface in FIG. 1), and the metal plate 12 on the lower surface (lower main surface in FIG. 1). Bonding (adhesion, bonding, etc. is also possible). The outer peripheral end of the piezoelectric film 14 is disposed so as to overlap the elastic member 13 embedded in the groove 12 a of the metal plate 12. The piezoelectric film 14 is bonded to the elastic member 13 (adhesion, bonding, or the like is possible) at the peripheral edge on the lower surface (lower side in FIG. 1). That is, the peripheral portion of the piezoelectric film 14 is joined to the elastic member 13, so that the acoustic characteristics and stability at the time of drop impact can be improved. The piezoelectric film 14 is formed in a circular shape (may be an elliptical shape) when viewed from the upper side (the upper side in FIG. 1). The piezoelectric film 14 is disposed so as to be concentric with the frame 10, the elastic member 11, the metal plate 12, the elastic member 13, and the electrode 15. The piezoelectric film 14 is separated from the inner wall surface of the through hole 10 a of the frame 10. A piezoelectric material is used for the piezoelectric film 14, for example, piezoelectric ceramics such as PZT (Pb (Zr x , Ti 1-x ) O 3 ; lead zirconate titanate), polyvinylidene fluoride, vinylidene fluoride, and three Piezoelectric organic materials such as copolymers of fluorinated ethylene can be used. If a piezoelectric organic material is used for the piezoelectric film 14, it has impact stability when dropped. When the piezoelectric film 14 is a unit with a metal film (similar to the electrode 15), there may be a metal film between the piezoelectric film 14 and the metal plate 12.

電極15は、圧電体膜14上に形成された導電体よりなる膜状の部材である。電極15は、圧電体膜14と接合(接着、貼合等でも可)している。電極15は、上側(図1の上側)から見て円形状(楕円形状でも可)に形成されている。電極15は、弾性部材11、13に対して離れて配されている。電極15は、フレーム10の貫通口10aの内壁面から離れている。電極15は、リード線16と電気的に接続されており、リード線16からの電気信号を圧電体膜14に印加させる役割を持つ。電極15には、導電材料(金属、合金等の金属系材料を含む)が用いられ、例えば、銀箔を用いることができ、金属板12の材料と同様なリン青銅、ステンレス材料等を用いることができる。   The electrode 15 is a film-like member made of a conductor formed on the piezoelectric film 14. The electrode 15 is bonded to the piezoelectric film 14 (adhesion, bonding, or the like is also possible). The electrode 15 is formed in a circular shape (may be an elliptical shape) when viewed from the upper side (the upper side in FIG. 1). The electrode 15 is disposed away from the elastic members 11 and 13. The electrode 15 is separated from the inner wall surface of the through hole 10 a of the frame 10. The electrode 15 is electrically connected to the lead wire 16 and serves to apply an electric signal from the lead wire 16 to the piezoelectric film 14. For the electrode 15, a conductive material (including metal materials such as metals and alloys) is used. For example, silver foil can be used, and phosphor bronze, stainless material, etc. similar to the material of the metal plate 12 can be used. it can.

なお、図1では金属板12上に圧電体膜14、電極15を有する単層型の圧電アクチュエータ2を用いているが、図3のように金属板12上に圧電体膜14、電極15、圧電体膜18、電極19、圧電体膜20、電極21が積層した積層型の圧電アクチュエータ2を用いてもよい。積層型の圧電アクチュエータ2の場合、電極15と電極21とが配線22等によって電気的に接続されるとともに、電極15と金属板12とが配線23等によって電気的に接続され、電極21がリード線16に電気的に接続され、金属板12がリード線17に電気的に接続される。積層型の圧電アクチュエータ2を利用することで、電界強度を向上でき、電圧印加量の低減や、振動振幅の拡大が可能となる。   In FIG. 1, the single-layer piezoelectric actuator 2 having the piezoelectric film 14 and the electrode 15 on the metal plate 12 is used. However, as shown in FIG. 3, the piezoelectric film 14, the electrode 15, A stacked piezoelectric actuator 2 in which the piezoelectric film 18, the electrode 19, the piezoelectric film 20, and the electrode 21 are stacked may be used. In the case of the multilayer piezoelectric actuator 2, the electrode 15 and the electrode 21 are electrically connected by the wiring 22 or the like, and the electrode 15 and the metal plate 12 are electrically connected by the wiring 23 or the like, and the electrode 21 is the lead The metal plate 12 is electrically connected to the lead wire 17. By using the laminated piezoelectric actuator 2, the electric field strength can be improved, the voltage application amount can be reduced, and the vibration amplitude can be increased.

リード線16、17は、対応する電極15、金属板12に電気信号を供給するための配線である。リード線16、17は、コントローラ、アンプ回路などに電気的に接続される。リード線16、17には、導電線材(例えば、銅線材)だけでなく金属箔(例えば、銅箔)を用いてもよい。   The lead wires 16 and 17 are wirings for supplying electric signals to the corresponding electrodes 15 and the metal plate 12. The lead wires 16 and 17 are electrically connected to a controller, an amplifier circuit, and the like. For the lead wires 16 and 17, not only a conductive wire (for example, copper wire) but also a metal foil (for example, copper foil) may be used.

以上の圧電型電気音響変換器1は、以下のようにして製造することができる。まず、金属板12の上面(図1の上側)の所定の位置に溝部12aを形成し、溝部12aに弾性部材13を埋め込む。その後、弾性部材11、金属板12(弾性部材13含む)、圧電体膜14、電極15を貼り合わせて圧電アクチュエータ2を作製し、圧電アクチュエータ2をフレーム10の貫通口10a内に装着する。   The piezoelectric electroacoustic transducer 1 described above can be manufactured as follows. First, the groove part 12a is formed in the predetermined position of the upper surface (upper side of FIG. 1) of the metal plate 12, and the elastic member 13 is embedded in the groove part 12a. Thereafter, the elastic member 11, the metal plate 12 (including the elastic member 13), the piezoelectric film 14, and the electrode 15 are bonded together to produce the piezoelectric actuator 2, and the piezoelectric actuator 2 is mounted in the through-hole 10 a of the frame 10.

また、圧電型電気音響変換器1は、以下のようにして動作する。圧電体膜14は、金属板12及び電極15に電気信号を印加することにより、電歪効果により振動を発生し、振幅運動を発生し、音波を放射する。すなわち、圧電体膜14に電圧を印加することで、圧電体膜14の主面に対して径広がり運動が発生する。この伸縮運動が成長することで、圧電体膜14を拘束する金属板12、及び弾性部材11に横方向の振動を伝播する。フレーム10の拘束による座屈運動により、圧電体膜14の主面に対して垂直方向に振幅が発生し、これが音波に変換される。この振動メカニズムの中で、駆動力となる圧電体膜14の端部が応力集中箇所になる。この応力集中箇所を内部損失の大きい弾性部材13により拘束することで、振動の先鋭度を低下させ、圧電型電気音響変換器1の機械品質係数Qを低減させることができる。また、応力集中箇所である圧電体膜14の端部を伸縮性に富む弾性部材13で拘束することで、圧電体膜14の端部の振動可動範囲を拡大させ、振動振幅を拡大させることができる。さらに、弾性部材13の介在により金属板12の剛性を低減させることができ、圧電型電気音響変換器1自体の基本共振周波数を低下させることができる。また、落下時に応力集中箇所である圧電体膜14の端部の振動が弾性部材13による吸収されることで落下時の衝撃安定性も向上するという効果を奏する。   The piezoelectric electroacoustic transducer 1 operates as follows. The piezoelectric film 14 generates vibration due to an electrostrictive effect by applying an electric signal to the metal plate 12 and the electrode 15, generates an amplitude motion, and emits a sound wave. That is, when a voltage is applied to the piezoelectric film 14, a diameter spreading motion is generated with respect to the main surface of the piezoelectric film 14. As the expansion and contraction motion grows, lateral vibration is propagated to the metal plate 12 that restrains the piezoelectric film 14 and the elastic member 11. Due to the buckling movement caused by the restraint of the frame 10, an amplitude is generated in a direction perpendicular to the main surface of the piezoelectric film 14, and this is converted into a sound wave. In this vibration mechanism, the end portion of the piezoelectric film 14 serving as a driving force becomes a stress concentration location. By constraining this stress concentration location with the elastic member 13 having a large internal loss, the sharpness of vibration can be reduced and the mechanical quality factor Q of the piezoelectric electroacoustic transducer 1 can be reduced. Further, by constraining the end portion of the piezoelectric film 14 that is a stress concentration location with the elastic member 13 rich in elasticity, the vibration movable range of the end portion of the piezoelectric film 14 can be expanded and the vibration amplitude can be increased. it can. Furthermore, the rigidity of the metal plate 12 can be reduced by the interposition of the elastic member 13, and the fundamental resonance frequency of the piezoelectric electroacoustic transducer 1 itself can be reduced. In addition, the vibration at the end of the piezoelectric film 14 that is a stress concentration portion at the time of dropping is absorbed by the elastic member 13, so that the impact stability at the time of dropping is also improved.

次に、本発明の一実施形態に係る圧電型電気音響変換器の周波数音圧特性について、比較例を比較しながら図面を用いて説明する。図4は、比較例に係る圧電型電気音響変換器の構成を模式的に示した断面図である。図5は、本発明の一実施形態に係る圧電型電気音響変換器の周波数音圧特性を模式的に示した図である。   Next, the frequency sound pressure characteristics of the piezoelectric electroacoustic transducer according to one embodiment of the present invention will be described with reference to the drawings while comparing comparative examples. FIG. 4 is a cross-sectional view schematically showing a configuration of a piezoelectric electroacoustic transducer according to a comparative example. FIG. 5 is a diagram schematically showing the frequency sound pressure characteristics of the piezoelectric electroacoustic transducer according to one embodiment of the present invention.

なお、図4の比較例に係る圧電型電気音響変換器101は、図1の実施形態に係る金属板12における溝部12a、及び、弾性部材11、13をなくし、金属板12の周縁部を環状のフレーム25、26で挟み込んで接合させたものである。その他の構成は、実施形態と同様である。   In addition, the piezoelectric electroacoustic transducer 101 according to the comparative example of FIG. 4 eliminates the groove 12a and the elastic members 11 and 13 in the metal plate 12 according to the embodiment of FIG. The frames 25 and 26 are sandwiched and joined. Other configurations are the same as in the embodiment.

図5の周波数音圧特性を参照すると、比較例に係る圧電型電気音響変換器(図4の101)では、周波数音圧特性において複数のピークを有するのに対して、本実施形態に係る圧電型電気音響変換器(図1の1)では、周波数音圧特性が比較的に平坦である。   Referring to the frequency sound pressure characteristic of FIG. 5, the piezoelectric electroacoustic transducer according to the comparative example (101 in FIG. 4) has a plurality of peaks in the frequency sound pressure characteristic, whereas the piezoelectric according to the present embodiment. In the type electroacoustic transducer (1 in FIG. 1), the frequency sound pressure characteristics are relatively flat.

本実施形態によれば、金属板12を弾性部材11を介してフレーム10に支持するとともに、金属板12に形成された溝部12aに埋め込まれた弾性部材13により応力集中箇所となる圧電体膜14の端部を拘束することで、小型のまま、圧電体膜14の端部の振動可動範囲を拡大させ、振動振幅を拡大させることができるので、音圧レベル周波数特性において、音響特性の山谷が平坦化され、高い音質が得られるようになる。また、落下時に、圧電アクチュエータ2の振動が弾性部材11により吸収されるとともに、応力集中箇所である圧電体膜14の端部の振動が弾性部材13により吸収されることで、落下時の衝撃安定性を向上させることができる。このように、本実施形態に係る圧電型電気音響変換器1によれば、落下時の強度が高いため、携帯電話機などの携帯型の電子機器用の電気音響変換器として好適であり、小型・薄型の音響デバイスとして工業価値は大きい。   According to the present embodiment, the metal plate 12 is supported by the frame 10 via the elastic member 11, and the piezoelectric film 14 that becomes a stress concentration location by the elastic member 13 embedded in the groove 12 a formed in the metal plate 12. Since the vibration movable range of the end portion of the piezoelectric film 14 can be expanded and the vibration amplitude can be expanded with the end portion of the piezoelectric film 14 being small, Flattening and high sound quality can be obtained. In addition, when the actuator is dropped, the vibration of the piezoelectric actuator 2 is absorbed by the elastic member 11, and the vibration of the end portion of the piezoelectric film 14 that is a stress concentration portion is absorbed by the elastic member 13, thereby stabilizing the impact at the time of dropping. Can be improved. As described above, the piezoelectric electroacoustic transducer 1 according to the present embodiment is suitable as an electroacoustic transducer for a portable electronic device such as a cellular phone because of its high strength when dropped. Industrial value is great as a thin acoustic device.

なお、本出願において図面参照符号を付している場合は、それらは、専ら理解を助けるためのものであり、図示の態様に限定することを意図するものではない。   Note that, in the present application, where reference numerals are attached to the drawings, these are only for the purpose of helping understanding, and are not intended to be limited to the illustrated embodiments.

(付記)
本発明の第1の視点においては、圧電型電気音響変換器において、主面に溝部を有する金属板と、前記溝部に埋め込まれた第1弾性部材と、前記金属板の前記主面上にて前記金属板及び前記第1弾性部材に接合された圧電体膜と、貫通口を有するフレームと、前記金属板と接合するとともに前記貫通口の壁面と接合する第2弾性部材と、を備え、前記第1弾性部材は、前記金属板の前記主面の上側から見て、少なくとも前記圧電体膜の端部と重なる位置に配設されることを特徴とする。
(Appendix)
In a first aspect of the present invention, in the piezoelectric electroacoustic transducer, a metal plate having a groove on a main surface, a first elastic member embedded in the groove, and the main surface of the metal plate A piezoelectric film bonded to the metal plate and the first elastic member; a frame having a through hole; and a second elastic member bonded to the metal plate and to the wall surface of the through hole; The first elastic member is disposed at a position overlapping at least an end portion of the piezoelectric film as viewed from above the main surface of the metal plate.

本発明の前記圧電型電気音響変換器において、前記第1弾性部材は、前記圧電体膜の端部に沿って配設されるとともに、前記第1弾性部材の内側の周縁部にて前記圧電体膜の周縁部と接合することが好ましい。   In the piezoelectric electroacoustic transducer of the present invention, the first elastic member is disposed along an end portion of the piezoelectric film, and the piezoelectric body is disposed at an inner peripheral edge of the first elastic member. It is preferable to join with the peripheral edge of the film.

本発明の前記圧電型電気音響変換器において、前記圧電体膜は、前記金属板の前記主面の上側から見て、円形に形成されており、前記第1弾性部材は、前記金属板の前記主面の上側から見て、環状に形成されていることが好ましい。   In the piezoelectric electroacoustic transducer of the present invention, the piezoelectric film is formed in a circular shape when viewed from the upper side of the main surface of the metal plate, and the first elastic member is the metal plate of the metal plate. It is preferable that it is formed in an annular shape when viewed from the upper side of the main surface.

本発明の前記圧電型電気音響変換器において、前記金属板は、前記金属板の前記主面の上側から見て、円形に形成されており、前記第2弾性部材は、前記金属板の前記主面の上側から見て、環状に形成されており、前記フレームは、前記金属板の前記主面の上側から見て、環状に形成されていることが好ましい。   In the piezoelectric electroacoustic transducer according to the present invention, the metal plate is formed in a circular shape when viewed from above the main surface of the metal plate, and the second elastic member is the main plate of the metal plate. The frame is preferably formed in an annular shape when viewed from above the surface, and the frame is formed in an annular shape when viewed from above the main surface of the metal plate.

本発明の前記圧電型電気音響変換器において、前記第2弾性部材は、前記第2弾性部材の内側の周縁部にて前記金属板の周縁部と接合することが好ましい。   In the piezoelectric electroacoustic transducer according to the present invention, it is preferable that the second elastic member is joined to a peripheral portion of the metal plate at an inner peripheral portion of the second elastic member.

本発明の前記圧電型電気音響変換器において、前記圧電体膜は、前記フレーム、前記第1弾性部材、前記金属板、前記第2弾性部材、及び、前記電極のそれぞれと同心となるように配されていることが好ましい。   In the piezoelectric electroacoustic transducer of the present invention, the piezoelectric film is arranged so as to be concentric with each of the frame, the first elastic member, the metal plate, the second elastic member, and the electrode. It is preferable that

本発明の前記圧電型電気音響変換器において、前記圧電体膜は、圧電有機材料よりなることが好ましい。   In the piezoelectric electroacoustic transducer of the present invention, it is preferable that the piezoelectric film is made of a piezoelectric organic material.

本発明の前記圧電型電気音響変換器において、前記フレームは、前記貫通口内において前記第2弾性部材の端部と全周に渡って接合されていることが好ましい。   In the piezoelectric electroacoustic transducer according to the aspect of the invention, it is preferable that the frame is bonded to the end of the second elastic member over the entire circumference in the through hole.

本発明の前記圧電型電気音響変換器において、前記圧電体膜上にて電極と他の圧電体膜とが交互に積層していることが好ましい。   In the piezoelectric electroacoustic transducer of the present invention, it is preferable that electrodes and other piezoelectric films are alternately stacked on the piezoelectric film.

本発明の第2の視点においては、電子機器において、前記圧電型電気音響変換器が実装されることを特徴とする。   In a second aspect of the present invention, the electronic electroacoustic transducer is mounted in an electronic device.

なお、本発明の全開示(請求の範囲及び図面を含む)の枠内において、さらにその基本的技術思想に基づいて、実施形態ないし実施例の変更・調整が可能である。また、本発明の請求の範囲の枠内において種々の開示要素(各請求項の各要素、各実施形態ないし実施例の各要素、各図面の各要素等を含む)の多様な組み合わせないし選択が可能である。すなわち、本発明は、請求の範囲及び図面を含む全開示、技術的思想にしたがって当業者であればなし得るであろう各種変形、修正を含むことは勿論である。   It should be noted that the embodiments and examples may be changed and adjusted within the scope of the entire disclosure (including claims and drawings) of the present invention and based on the basic technical concept. Various combinations or selections of various disclosed elements (including each element of each claim, each element of each embodiment or example, each element of each drawing, etc.) are included within the scope of the claims of the present invention. Is possible. That is, the present invention naturally includes various variations and modifications that could be made by those skilled in the art according to the entire disclosure including the claims and the drawings, and the technical idea.

1、101 圧電型電気音響変換器
2 圧電アクチュエータ
10、25、26 フレーム
10a 貫通口
11 弾性部材(第2弾性部材)
11a 開口部
12 金属板
12a 溝部
13 弾性部材(第1弾性部材)
14 圧電体膜
15 電極
16、17 リード線
18 圧電体膜
19 電極
20 圧電体膜
21 電極
22、23 配線
DESCRIPTION OF SYMBOLS 1,101 Piezoelectric electroacoustic transducer 2 Piezoelectric actuator 10, 25, 26 Frame 10a Through-hole 11 Elastic member (2nd elastic member)
11a Opening 12 Metal plate 12a Groove 13 Elastic member (first elastic member)
14 Piezoelectric film 15 Electrode 16, 17 Lead wire 18 Piezoelectric film 19 Electrode 20 Piezoelectric film 21 Electrode 22, 23 Wiring

Claims (10)

主面に溝部を有する金属板と、
前記溝部に埋め込まれた第1弾性部材と、
前記金属板の前記主面上にて前記金属板及び前記第1弾性部材に接合された圧電体膜と、
貫通口を有するフレームと、
前記金属板と接合するとともに前記貫通口の壁面と接合する第2弾性部材と、
を備え、
前記第1弾性部材は、前記金属板の前記主面の上側から見て、少なくとも前記圧電体膜の端部と重なる位置に配設されることを特徴とする圧電型電気音響変換器。
A metal plate having a groove on the main surface;
A first elastic member embedded in the groove,
A piezoelectric film bonded to the metal plate and the first elastic member on the main surface of the metal plate;
A frame having a through hole;
A second elastic member joined to the metal plate and joined to the wall surface of the through hole;
With
The piezoelectric electroacoustic transducer, wherein the first elastic member is disposed at a position overlapping at least an end portion of the piezoelectric film as viewed from above the main surface of the metal plate.
前記第1弾性部材は、前記圧電体膜の端部に沿って配設されるとともに、前記第1弾性部材の内側の周縁部にて前記圧電体膜の周縁部と接合することを特徴とする請求項1記載の圧電型電気音響変換器。   The first elastic member is disposed along an end portion of the piezoelectric film, and is joined to a peripheral portion of the piezoelectric film at an inner peripheral portion of the first elastic member. The piezoelectric electroacoustic transducer according to claim 1. 前記圧電体膜は、前記金属板の前記主面の上側から見て、円形に形成されており、
前記第1弾性部材は、前記金属板の前記主面の上側から見て、環状に形成されていることを特徴とする請求項1又は2記載の圧電型電気音響変換器。
The piezoelectric film is formed in a circular shape when viewed from above the main surface of the metal plate,
3. The piezoelectric electroacoustic transducer according to claim 1, wherein the first elastic member is formed in an annular shape when viewed from the upper side of the main surface of the metal plate.
前記金属板は、前記金属板の前記主面の上側から見て、円形に形成されており、
前記第2弾性部材は、前記金属板の前記主面の上側から見て、環状に形成されており、
前記フレームは、前記金属板の前記主面の上側から見て、環状に形成されていることを特徴とする請求項1乃至3のいずれか一に記載の圧電型電気音響変換器。
The metal plate is formed in a circular shape when viewed from the upper side of the main surface of the metal plate,
The second elastic member is formed in an annular shape when viewed from above the main surface of the metal plate,
The piezoelectric electroacoustic transducer according to any one of claims 1 to 3, wherein the frame is formed in an annular shape when viewed from above the main surface of the metal plate.
前記第2弾性部材は、前記第2弾性部材の内側の周縁部にて前記金属板の周縁部と接合することを特徴とする請求項1乃至4のいずれか一に記載の圧電型電気音響変換器。   5. The piezoelectric electroacoustic conversion according to claim 1, wherein the second elastic member is joined to a peripheral portion of the metal plate at an inner peripheral portion of the second elastic member. vessel. 前記圧電体膜は、前記フレーム、前記第1弾性部材、前記金属板、前記第2弾性部材、及び、前記電極のそれぞれと同心となるように配されていることを特徴とする請求項1乃至5のいずれか一に記載の圧電型電気音響変換器。   The piezoelectric film is disposed so as to be concentric with each of the frame, the first elastic member, the metal plate, the second elastic member, and the electrode. 5. The piezoelectric electroacoustic transducer according to claim 5. 前記圧電体膜は、圧電有機材料よりなることを特徴とする請求項1乃至6のいずれか一に記載の圧電型電気音響変換器。   The piezoelectric electroacoustic transducer according to any one of claims 1 to 6, wherein the piezoelectric film is made of a piezoelectric organic material. 前記フレームは、前記貫通口内において前記第2弾性部材の端部と全周に渡って接合されていることを特徴とする請求項1乃至7のいずれか一に記載の圧電型電気音響変換器。   The piezoelectric electroacoustic transducer according to any one of claims 1 to 7, wherein the frame is joined to the end of the second elastic member over the entire circumference in the through hole. 前記圧電体膜上にて電極と他の圧電体膜とが交互に積層していることを特徴とする請求項1乃至8のいずれか一に記載の圧電型電気音響変換器。   9. The piezoelectric electroacoustic transducer according to claim 1, wherein electrodes and other piezoelectric films are alternately stacked on the piezoelectric film. 請求項1乃至9のいずれか一に記載の圧電型電気音響変換器が実装されることを特徴とする電子機器。   10. An electronic apparatus on which the piezoelectric electroacoustic transducer according to any one of claims 1 to 9 is mounted.
JP2013121951A 2013-06-10 2013-06-10 Piezoelectric type electroacoustic transducer and electronic apparatus Pending JP2014239386A (en)

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