JP2014231458A - Observation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an observation device and an observation method which enables simultaneous observation of objects having a contrast difference in one visual field.SOLUTION: Provided is an observation device used for observing a portion to be observed, where a high luminance part and a low luminance part exist mixed. The device includes: an observation means for observing an area of the high luminance part and an area of the low luminance part; an adjustment means for equalizing/approximating a light quantity of the area of the high luminance part with/to a light quantity of the area of the low luminance part; and a monitor means for allowing the observation means to observe both areas having each light quantity equalized/approximated by the adjustment means, and projecting both of these areas simultaneously.

Description

  The present invention relates to an observation apparatus and an observation method, and more particularly to an observation apparatus and an observation method for observing a sample melting / crystal growth portion in a single crystal growth apparatus.

  As shown in FIGS. 9 and 10, the single crystal growing apparatus has two symmetrical ellipsoidal mirrors 81 and 82, and faces each other so that one of the focal points F0 and F0 (see FIG. 9) coincides. Combined to form a heating furnace. The inner surfaces of the spheroid mirrors 81 and 82, that is, the reflection surfaces are subjected to gold plating in order to reflect infrared rays with high reflectivity. Near the other focal points F1 and F2 of the spheroid mirrors 81 and 82, heating sources, for example, infrared lamps 83 and 84 such as halogen lamps are fixedly arranged. A heated portion 85 is located at the coincident focal point F0 (see FIG. 10) of each of the spheroid mirrors 81 and 82, and a raw material rod 87 fixed to the lower end of the upper crystal drive shaft 86 extending vertically from above, A seed crystal rod 89 fixed to the upper end of the lower crystal drive shaft 88 extending in the vertical direction from the bottom. The upper crystal drive shaft 86 and the lower crystal drive shaft 88 are hermetically held by holding members 90 and 91 as shown in the figure, can be rotated by a drive motor such as a servo motor (not shown), and have a synchronous or relative speed. It is held up and down freely.

  A space m1 in which the raw material rod 87 and the seed crystal rod 89 are disposed is partitioned from a space m2 in which infrared lamps 83 and 84 are disposed, and a transparent quartz tube 93 that forms a single crystal growth chamber 92 is provided. The single crystal growth chamber 92 is filled with an inert gas suitable for crystal growth.

  According to this single crystal growing apparatus, the infrared rays irradiated from the infrared lamps 83 and 84 disposed at the first and second focal points F1 and F2 of the spheroid mirrors 81 and 82 are transmitted to the spheroid mirrors 81 and 82, respectively. The light is reflected by 82, condensed on the heated portion 85 located at the common focal point F0, and heated by infrared rays. By heating and melting the lower end of the raw material rod 87 and the upper end of the seed crystal rod 89 of the heated portion 85 by the radiation energy by the infrared heating, the heated portion between the raw material rod 87 and the seed crystal rod 89 is heated and melted. A melt zone is formed in the portion 85.

  Then, the upper crystal drive shaft 86 with the raw material rod 87 fixed to the lower end and the lower crystal drive shaft 88 with the seed crystal rod 89 fixed to the upper end are rotated together and slowly moved downward with synchronization or relative speed. Thus, the melting zone 94 between the raw material rod 87 and the seed crystal rod 89 gradually moves to the raw material rod 87 side, and then the crystal grows to grow a single crystal. In FIG. 11, 87a indicates a solid-liquid interface on the raw material rod 87 side, and 89a indicates a solid-liquid interface on the seed crystal rod 89 side.

  In the single crystal growing apparatus, infrared lamps 83 and 84 are used as a heating source. On the other hand, in recent years, a laser source is used as a heating source (Patent Document 1). Compared to a heating source such as an infrared lamp, the entire heating energy of the laser source can be supplied directly to the heated part, and the conventional spheroidal mirror is not required and the configuration is remarkably simplified, and inspection and maintenance are also possible. It becomes easy. Further, the laser source is not limited to one focal point of the spheroid mirror as in the case of a conventional infrared lamp due to the straightness of the laser, so it can be arranged away from the heated part. It becomes easy to arrange a plurality of laser sources around the heated portion.

JP 2007-145629 A

  However, in the case of melting by a laser source, the sample is melted only at the focused focal point. For this reason, a sample fusion | melting part becomes high-intensity by heat_generation | fever. On the other hand, the solidified portion (facet forming portion) after crystal growth has no heat generation and has low luminance. There is no visible reflected light. That is, as shown in FIG. 7, the amount of light at the sample melting portion (melting position) 100 is large, and the amount of light at the facet forming portion 101 is almost zero.

  In such a state, when the sample melting part 100 and the solidified part 101 are to be observed with the same camera, the contrast difference is large and simultaneous observation of the sample melting part 100 and the solidified part 101 cannot be performed. That is, as shown in FIG. 8, it cannot be observed simultaneously by the halation 102 of the melting part 100. In this case, if the operation of suppressing the halation 102 of the melting part 100 is performed, the solidified part 101 becomes too dark to be observed.

  In view of the above problems, the present invention provides an observation apparatus and an observation method capable of simultaneously observing an object having a contrast difference within one field of view.

  An observation apparatus according to the present invention is an observation apparatus that observes an observation site in which a high-luminance part and a low-luminance part are mixed, and includes an observation unit that observes an area of a high-luminance part and an area of a low-luminance part, Adjusting means for making the light amount of the area of the light area equal to or approximating the light amount of the area of the low-brightness area, and monitoring means for observing both areas where the light amount is the same or approximated by the adjusting means with the observation means, It is equipped with.

  According to the observation apparatus of the present invention, the amount of light can be made substantially the same in the area of the high luminance part and the area of the low luminance part by the adjusting means. With the observation means, it is possible to observe the area of the high luminance part and the area of the low luminance part with the same amount of light. Then, the monitor means can simultaneously project both areas observed by the observation means.

  An area designating unit for designating a high-luminance area or a low-luminance area in the site to be observed is provided. The observation unit may observe the area where the light amount is adjusted by the adjustment unit and the area where the light amount is not adjusted by the adjustment unit.

  The adjustment means can adjust the sensitivity of the camera constituting the observation means. Here, the camera can be composed of a CCD camera or a CMOS camera. A filter or the like can be used to adjust the sensitivity of the camera. The adjusting means can also be performed by software processing of the image captured by the observing means. Software processing can be performed by a personal computer. The area adjusted by the adjusting means is preferably a high brightness area.

  The observation method of the present invention is an observation method for observing a site to be observed in which a high-luminance part and a low-luminance part are mixed. Then, the area of the high luminance part and the area of the low luminance part are projected simultaneously.

  In this observation method, after the amount of light in the area of the high luminance portion is brought close to the amount of light in the area of the low luminance portion, the area of the high luminance portion and the area of the low luminance portion can be projected simultaneously.

  In addition, a site to be observed in which the high luminance portion and the low luminance portion are mixed can be used as the sample melting / crystal growing portion in the single crystal growing apparatus. The single crystal growing apparatus can use laser light as a heating means.

  In the present invention, both areas (high brightness area and low brightness area) observed by the observation means can be projected simultaneously with substantially the same amount of light. (Observation site) can be observed simultaneously.

  If the light quantity of the area designated by the area designation means is close to the light quantity of the other area, the controllability is stable. Further, the adjustment means can adjust the sensitivity of the camera constituting the observation means, can be performed by software processing of the image captured by the observation means, and the adjustment means can be configured easily.

  In the single crystal growth apparatus, when laser light is used as the heating means, the sample melting portion has high luminance due to heat generation, and the solidified portion (facet formation portion) after crystal growth has no heat generation and low luminance. For this reason, the observation site where the high luminance portion and the low luminance portion coexist is optimal for the sample melting / crystal growth portion in the single crystal growth apparatus using laser light as the heating means.

It is a simplified block diagram which shows the structure of the observation apparatus which shows embodiment of this invention. It is principal part sectional drawing of the said observation apparatus. It is a principal part cutting simple top view of the said observation apparatus. It is a simplified block diagram which shows the observation method which shows embodiment of this invention. It is a monitor screen figure of the state which observes the sample with the said observation apparatus. It is a simplified block diagram which shows the structure of the observation apparatus which shows other embodiment of this invention. It is a simplified perspective view which shows a sample fusion | melting part. It is a monitor screen figure of the state which is observing a sample with the conventional observation method. It is sectional drawing of the conventional single crystal growth apparatus. FIG. 10 is a sectional view taken along line DD of FIG. 9. It is an enlarged view which shows the fusion | melting part thru | or the solidification part of the single crystal growth sample.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  2 and 3 show a single crystal growing apparatus using laser light as a heating means. In this case, the laser source 11 (11A, 11B, 11C, 11D, 11E) is, for example, circumferentially as shown in FIG. Are arranged at a predetermined pitch (specifically, a pitch of 72 degrees). The laser beam irradiation unit 14 includes a raw material rod 16 fixed to the lower end of the upper crystal drive shaft 15 extending in the vertical direction from above, and a seed crystal rod 18 fixed to the upper end of the lower crystal drive shaft 17 extending in the vertical direction from below. Is a match. The upper crystal drive shaft 15 and the lower crystal drive shaft 17 are hermetically held by holding members 19 and 20, and are rotatably held by a drive motor such as a servo motor (not shown) and can be moved up and down synchronously or asynchronously. Yes.

  The space m1 in which the raw material rod 16 and the seed crystal rod 18 are disposed is partitioned from the space m2 in which the laser source 11 is disposed, and a transparent quartz tube 22 that forms a single crystal growth chamber 21 is provided. The crystal growth chamber 21 is filled with an atmosphere gas suitable for crystal growth.

  According to the single crystal growing apparatus, the laser L (L1, L2, L3, L4, L5) irradiated from the laser source 11 (11A, 11B, 11C, 11D, 11E) is concentrated on the heated portion. And heat with laser. Then, the upper crystal drive shaft 15 having the raw material rod 16 fixed to the lower end and the lower crystal drive shaft 17 having the seed crystal rod 18 fixed to the upper end are rotated and moved slowly downward synchronously or asynchronously.

  As shown in FIG. 1, the single crystal growth apparatus includes an observation apparatus for observing a sample melting / crystal growth part (the heated part 14 and the non-observation part S). The observation apparatus includes an observation unit 26 for observing the sample melting / crystal growth part, an adjustment unit 27 for adjusting the amount of light in the observation area of the observation unit 26, and a monitor unit 28 for displaying the image observed by the observation unit 26. Is. That is, the laser beam irradiation forms a melted portion 24 and a solidified portion (facet forming portion) 25 after crystal forming.

  In this case, the melting portion 24 has high luminance due to heat generation, and the solidified portion 25 does not generate heat and has low luminance. Therefore, as shown in FIG. 5, the observation area includes a high-luminance area H1 and a low-luminance area H2. As shown in FIG. 1, the observation apparatus designates areas H1 and H2. The specifying means 30 is provided. The observation means 26 can observe the high luminance area H1 and the low luminance area H2 shown in FIG. Specifically, a CCD camera, a CMOS camera, or the like can be used. The designation means 30 can be configured by a control means comprising a microcomputer in which a ROM (Read Only Memory), a RAM (Random Access Memory), etc. are connected to each other via a bus with a central processing unit (CPU) as the center. A storage means is connected to the control means. A storage device as a storage means includes an HDD (Hard Disc Drive), a DVD (Digital Versatile Disk) drive, a CD-R (Compact Disc-Recordable) drive, an EEPROM (Electronically Erasable and Programmable Read Only Memory), or the like. The ROM stores programs executed by the CPU and data.

  The adjusting means 27 reduces the amount of light in the high-luminance area H1 shown in FIG. 5, and can be configured with a diaphragm filter attached to the observation means 26 composed of a CCD camera, a CMOS camera, or the like. That is, the sensitivity of the image sensor of the camera is reduced.

  And as the adjustment means 27, the light quantity of the high-luminance area H1 is reduced, and it approximates the light quantity of the low-luminance area H2. Here, the term “close” means that the high-luminance area H1 and the low-luminance area H2 can be observed with one same camera such as a CCD camera or a CMOS camera constituting the observation means 26. For this reason, the light amount of the high-luminance area H1 and the light amount of the low-luminance area H2 may be the same or slightly different.

  The monitor means 28 is provided with a monitor screen (display screen) M as shown in FIG. 5 and is an image taken by the observation means 26, and an image whose light amount has been adjusted by the adjusting means 27. Is displayed on the monitor screen M.

  Next, an observation method used in the observation apparatus configured as described above will be described with reference to FIG. On the monitor screen M on which the image taken by the observation means 26 is displayed, the designation means 30 designates a high-luminance area H1 (step S1). The high-luminance area H1 includes the dissolving portion 24. Thereafter, the amount of light in the high-luminance area H1 is adjusted (step S2). In this case, the sensitivity of the image sensor of the camera that constitutes the observation means 26 is reduced.

  Then, an image in which the amount of light in the high-luminance area H1 is reduced is taken into the camera constituting the observation means 26 (step S3), and this image is displayed on the monitor screen (step S4).

  Thus, in the observation method using the observation apparatus, the light intensity can be made substantially the same in the adjustment unit 27 in both the high-luminance area H1 and the low-luminance area H2. With the observation means 26, it is possible to observe the area H1 of the high luminance part and the area H2 of the low luminance part where the amount of light is substantially the same. Then, the monitor means 28 can project both areas observed by the observation means 26 at the same time.

  As described above, in the present invention, both areas (the high-luminance area H1 and the low-luminance area H2) observed by the observation means 26 can be projected simultaneously with substantially the same amount of light. It is possible to simultaneously observe an object (observed site S) having a contrast difference. For this reason, the operator (operator) can observe the melt | dissolving part 24 and the solidification part (facet formation part) 25 after crystal forming simultaneously, and can grasp | ascertain the state of these parts accurately. Based on this observation, the irradiation energy of the laser beam in the single crystal growth apparatus is adjusted, and the rotational speed and the descending speed of the raw material rod 16 and the lower crystal drive shaft 17 are adjusted at the lower end. For this reason, it is possible to grow a single crystal stably and with high accuracy.

  When the light quantity of the area designated by the area designation means 30 is close to the light quantity of the other area, the controllability is stable. Further, the adjusting means 27 can adjust the sensitivity of the camera constituting the observation means 26, and the adjusting means 26 can be easily configured.

  As described above, in the single crystal growth apparatus, when laser light is used as the heating means, the sample melting portion has high luminance due to heat generation, and the solidified portion (facet forming portion) after crystal growth has no heat generation and low luminance. For this reason, the observation site where the high luminance portion and the low luminance portion coexist is optimal for the sample melting / crystal growth portion in the single crystal growth apparatus using laser light as the heating means.

  The adjustment means 27 can be performed by software processing of the image captured by the observation means 26. That is, as shown in FIG. 6, an adjusting means 27 made up of a personal computer (personal computer) or the like may be interposed between the camera constituting the observation means 26 and the monitor means 28. Then, software processing that has the effect of reducing the sensitivity of the image sensor is performed by software arithmetic processing means pre-programmed in the adjusting means 27. In this way, the adjustment means 26 can be easily configured even by performing software processing. Further, the adjusting means 27 may be constituted by a control means constituting the specifying means 30, or the specifying means 30 may be constituted by a personal computer constituted by the adjusting means 27.

  In the above embodiment, the light amount of the high-luminance area H1 is adjusted (decreased). Conversely, the light amount of the low-luminance area H2 is adjusted without adjusting the light amount of the high-luminance area H1. You may do it. That is, the amount of light in the low-luminance area H2 may be increased. Thus, if the light quantity of the low-luminance area H2 is increased so that the light quantity of the high-luminance area H1 and the light quantity of the low-luminance area H2 are the same or approximate, the CCD constituting the observation means 26 A high brightness area H1 and a low brightness area H2 can be observed with one same camera such as a camera or a CMOS camera.

  Moreover, you may make it adjust both the light quantity of the area H1 of high brightness | luminance, and the light quantity of the area H2 of low brightness | luminance. Even in this case, the light quantity in the luminance area H1 and the light quantity in the low-luminance area H2 can be made the same or approximate, and the same camera such as a CCD camera or a CMOS camera constituting the observation means 26 can be used. The area H1 and the low brightness area H2 can be observed.

  As described above, the embodiments of the present invention have been described. However, the present invention is not limited to the above-described embodiments, and various modifications are possible. For example, solid-state lasers, semiconductor lasers, liquid lasers, Alternatively, various lasers such as a gas laser can be used. Further, in the single crystal growth apparatus shown in FIG. 2, five laser sources 11 are arranged at a pitch of 72 degrees along the circumferential direction of the sample and irradiate laser light from five directions. The number of laser sources 11 arranged around the sample is not limited to this, and the number of laser sources 11 arranged around the sample is arbitrary.

  In addition, the observation apparatus of the present invention is not limited to a single crystal growth apparatus, and may be any apparatus that observes an observation site in which a high luminance part and a low luminance part are mixed. For example, a welding part (arc welding) Part) and the like.

26 observation means 27 adjustment means 28 monitor means 30 designation means S member to be observed

Claims (10)

An observation apparatus for observing an observed site in which a high luminance part and a low luminance part are mixed,
Observation means for observing the area of the high luminance part and the area of the low luminance part,
An adjusting means for making the light amount of the area of the high luminance portion the same as or close to the light amount of the area of the low luminance portion;
An observation apparatus comprising: monitor means for observing both areas whose light amounts are the same or approximated by the adjusting means with the observation means and projecting both areas simultaneously.   An area designating unit for designating a high-luminance area or a low-luminance area in the site to be observed is provided, and the adjusting unit brings the light amount of the area designated by the area designating unit closer to the light amount of the other area. The observation apparatus according to claim 1, wherein the observation unit observes an area in which the light amount is adjusted by the adjustment unit and an area in which the light amount is not adjusted by the adjustment unit.   The observation device according to claim 1, wherein the adjustment unit adjusts sensitivity of a camera constituting the observation unit.   The observation apparatus according to claim 1, wherein the adjustment unit performs software processing of an image captured by the observation unit.   The observation apparatus according to any one of claims 1 to 4, wherein the area to be adjusted by the adjusting means is a high brightness area.   The observation site according to any one of claims 1 to 5, wherein the site to be observed in which the high luminance portion and the low luminance portion are mixed is a sample melting / crystal growth portion in a single crystal growth apparatus. apparatus.   The observation apparatus according to claim 6, wherein the single crystal growing apparatus uses laser light as heating means. An observation method for observing an observation site in which a high luminance part and a low luminance part are mixed,
An observation method, wherein the amount of light in the high-luminance portion area and the amount of light in the low-luminance portion area are made the same or approximate, and then the high-luminance portion area and the low-luminance portion area are projected simultaneously.   9. The observation method according to claim 8, wherein after the amount of light in the area of the high luminance portion is made close to the amount of light in the area of the low luminance portion, the area of the high luminance portion and the area of the low luminance portion are projected simultaneously.   The site to be observed in which the high-intensity part and the low-intensity part coexist is the sample melting / crystal growth part in the single crystal growth apparatus, and this single crystal growth apparatus uses laser light as heating means. Item 10 or the observation method according to Item 9.

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