JP2014229854A5 - - Google Patents

Claims (7)

A substrate,
A plurality of pixel electrodes spaced apart from each other on the substrate;
An organic film including a photoelectric conversion layer disposed on the plurality of pixel electrodes and between the pixel electrodes in a continuous film;
A counter electrode disposed on the organic film;
A protective film disposed on the counter electrode;
The step between the upper surface of the pixel electrode and the surface of the substrate is 3 nm or more and 100 nm or less,
The taper angle of the end of the pixel electrode is 10 ° or more and 90 ° or less,
The internal stress of the protective film is −600 MPa or more and less than −200 MPa,
The photoelectric conversion element whose product of the film thickness of the said protective film and internal stress is more than -40,000 Mpa * nm and less than -14,000 Mpa * nm.   The photoelectric conversion element according to claim 1, wherein the protective film includes an aluminum oxide layer and a silicon oxynitride layer.   The photoelectric conversion element according to claim 1, wherein the protective film comprises only a silicon oxynitride layer.   The photoelectric conversion element according to claim 1, wherein the internal stress is −400 MPa or more and less than −200 MPa. The inclination angle is 30 ° or more, the photoelectric conversion element of any of the preceding claims, 1 is 90 ° or less. The step is 5nm or more, photoelectric conversion element according to claim 1 to 5 any one of claims is 40nm or less. The image pick-up element provided with the organic photoelectric conversion element of any one of Claim 1 to 6 .