JP2014225582A5 - - Google Patents

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Publication number
JP2014225582A5
JP2014225582A5 JP2013104519A JP2013104519A JP2014225582A5 JP 2014225582 A5 JP2014225582 A5 JP 2014225582A5 JP 2013104519 A JP2013104519 A JP 2013104519A JP 2013104519 A JP2013104519 A JP 2013104519A JP 2014225582 A5 JP2014225582 A5 JP 2014225582A5
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JP
Japan
Prior art keywords
substrate
mold
imprint apparatus
holding
duct
Prior art date
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Application number
JP2013104519A
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English (en)
Japanese (ja)
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JP6193615B2 (ja
JP2014225582A (ja
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Priority to JP2013104519A priority Critical patent/JP6193615B2/ja
Priority claimed from JP2013104519A external-priority patent/JP6193615B2/ja
Publication of JP2014225582A publication Critical patent/JP2014225582A/ja
Publication of JP2014225582A5 publication Critical patent/JP2014225582A5/ja
Application granted granted Critical
Publication of JP6193615B2 publication Critical patent/JP6193615B2/ja
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JP2013104519A 2013-05-16 2013-05-16 インプリント装置および物品の製造方法 Active JP6193615B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013104519A JP6193615B2 (ja) 2013-05-16 2013-05-16 インプリント装置および物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013104519A JP6193615B2 (ja) 2013-05-16 2013-05-16 インプリント装置および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2014225582A JP2014225582A (ja) 2014-12-04
JP2014225582A5 true JP2014225582A5 (zh) 2016-06-30
JP6193615B2 JP6193615B2 (ja) 2017-09-06

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ID=52124048

Family Applications (1)

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JP2013104519A Active JP6193615B2 (ja) 2013-05-16 2013-05-16 インプリント装置および物品の製造方法

Country Status (1)

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JP (1) JP6193615B2 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016170729A1 (en) * 2015-04-22 2016-10-27 Canon Kabushiki Kaisha Imprint apparatus, method of imprinting, and method of manufacturing article
JP6661397B2 (ja) * 2015-04-22 2020-03-11 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6884048B2 (ja) * 2017-06-19 2021-06-09 キヤノン株式会社 インプリント装置、および物品製造方法
JP7187180B2 (ja) 2018-05-31 2022-12-12 キヤノン株式会社 インプリント装置および物品の製造方法
JP7495814B2 (ja) * 2020-05-13 2024-06-05 キヤノン株式会社 インプリント装置、および物品の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006013401A (ja) * 2004-06-29 2006-01-12 Canon Inc 微細加工装置
US7248332B2 (en) * 2004-07-13 2007-07-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8394203B2 (en) * 2008-10-02 2013-03-12 Molecular Imprints, Inc. In-situ cleaning of an imprint lithography tool
NL2004685A (en) * 2009-07-27 2011-01-31 Asml Netherlands Bv Imprint lithography apparatus and method.
JP5864934B2 (ja) * 2011-07-21 2016-02-17 キヤノン株式会社 インプリントシステム及び物品の製造方法

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