JP2014224294A - Heat treatment apparatus, and manufacturing method of metal product - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heat treatment apparatus and a manufacturing method of a metal product where solidification of evaporated metal does not inhibit movement of a metal sample within a closed space.SOLUTION: A heat treatment apparatus 2 for heat-treating a workpiece using a liquid metal includes a glove box 11 with throughholes, a vessel arranged in the glove box 11 to contain the liquid metal, workpiece transfer mechanisms 70, 90, 100 installed movably along the throughholes to transfer the workpiece within the glove box 11, and a seal mechanism 20 to seal the glove box 11. The seal mechanism 20 blocks a gap between the throughhole and the workpiece transfer mechanism and is equipped with workpiece side sealing rigs 20A-20C that expand and contract following movement of the workpiece transfer mechanism.

Description

  The present invention relates to a heat treatment apparatus and a metal product manufacturing method.

  In order to improve the strength of a metal material, it is known to perform a predetermined heat treatment on the metal material. In addition, the rate of temperature increase or the rate of temperature decrease in heat treatment has a great influence on the change in physical properties of the metal material. For this reason, by using a liquid metal having an extremely high thermal conductivity compared to water (for example, the thermal conductivity of liquid lithium is approximately 100 times that of water) in contact with the metal material, heating using electricity or gas can be performed. Compared with cooling using water or oil, extremely high temperature rising and cooling rates can be obtained. As a result, it is possible to produce a metal material having characteristics that could not be obtained by heat treatment using a liquid metal.

  For example, the heat treatment apparatus described in Patent Document 1 includes a tank containing liquid metal, a temperature control unit that adjusts the temperature of the liquid metal in the tank, and a moving mechanism that puts and removes the metal material into and from the liquid metal in the tank. And a container for housing the tank and the moving mechanism. However, this liquid metal has a very high activity and easily reacts with oxygen, hydrogen, nitrogen, water and the like. In order to prevent an accident caused by this reaction, the container in the heat treatment apparatus needs to have a sealed structure and be filled with an inert gas.

JP 2010-255023 A

  By the way, in a closed container, a liquid metal will evaporate with the heat from a temperature control part. Furthermore, the evaporated metal condenses and solidifies by contacting with a lower temperature part than the melting furnace. For example, a moving mechanism used in the heat treatment apparatus described in Patent Document 1 slides a metal sample along a rail provided in an upper portion in a sealed container. For this reason, if a metal condenses and solidifies to the sliding part of the holder holding a rail or a metal sample, it will become impossible to slide a metal sample.

  Furthermore, in the heat treatment apparatus as in Patent Document 1, in order to perform the heat treatment, that is, to put a metal sample in and out of the liquid metal, it is necessary to operate the moving mechanism from outside the sealed container.

  Therefore, in view of such a situation, the present invention intends to provide a heat treatment apparatus and a metal product manufacturing method in which the movement of a metal sample in a sealed space is not hindered by solids derived from evaporated metal.

  Means for solving the above-mentioned problems is a heat treatment apparatus for performing heat treatment using a liquid metal on a metal object, and a container in which a through hole is formed, and the liquid disposed in the internal space of the container A tank for containing metal, a workpiece moving mechanism that is inserted into the through-hole while being movable or pivotable, and holds the workpiece in the internal space of the container, and the workpiece moving mechanism A controller that controls the container, and a sealing mechanism that imparts airtightness to the container, and the controller is disposed outside the container, and the sealing mechanism is a gap between the through-hole and the workpiece moving mechanism. And a workpiece-side sealing tool that can be deformed following the operation of the workpiece moving mechanism.

  The object to be processed is preferably moved between an immersion state immersed in the liquid metal and a retracted state retracted from the immersion state by an operation of the object movement mechanism. It is preferable that the object to be processed moves between the immersion state and the retracted state by a linear movement operation of the object movement mechanism.

  The object to be processed side sealing tool includes a container side fixing part provided to be in close contact with the container, a locking tool side fixing part provided to be in close contact with the object to be processed, and the container side. It is preferable to have a cylindrical portion extending from the fixing portion to the locking device side fixing portion. Moreover, it is preferable that the said cylinder part has a bellows structure.

  The tank has a first tank in which the liquid metal at a first temperature is stored, and a second tank in which the liquid metal at a second temperature different from the first temperature is stored, and the processing target The body moving mechanism has a rotating shaft that passes through the through hole, and the object to be processed is rotated around the rotating shaft by the rotating operation of the object moving mechanism around the rotating shaft. It is preferable that it is movable and can be shifted between a state located above the first tank and a state located above the second tank by the rotation operation. The apparatus further includes a connection lid connected to the workpiece moving mechanism, and the connection lid is retracted from the closed position and the closed position for closing the opening of the tank by the movement operation of the workpiece moving mechanism. The connecting lid moves between the open positions, and the connection lid has the closed position with respect to at least one of the first tank and the second tank when the object to be processed is in the immersion state with respect to the first tank. It is preferable to become. Furthermore, when the one where the temperature of the liquid metal stored in the first tank and the second tank is lower is defined as a low-temperature tank, a low-temperature tank cooling mechanism for cooling the low-temperature tank is provided, and the low-temperature tank cooling mechanism Has a heat transfer medium flow pipe provided in the tank through which the heat transfer medium flows, and both open ends of the heat transfer medium flow pipe are preferably arranged outside the container.

  And a recovery mechanism for recovering the liquid metal evaporated in the internal space of the container, the recovery mechanism including a recovery case disposed outside the container, and a filter disposed in the internal space of the recovery case; A feed pipe for sending gas in the internal space of the container to the internal space of the recovery case; a return pipe for sending gas in the internal space of the recovery case to the internal space of the container; and the return pipe It is preferable to have a pump provided in the. Moreover, it is preferable that the said feed pipe has a container side feed opening opened in the internal space of the said container, and the said container side feed opening faces the opening of the said tank above the said tank. Furthermore, it is preferable that the return pipe has a container-side return opening that opens in the internal space of the container, and the container-side return opening faces upward on the outer periphery of the tank.

  A reservoir tank that is disposed outside the container and has a sealing property; and a liquid metal transfer mechanism that transfers the liquid metal between the tank and the reservoir tank, the liquid metal transfer mechanism including the tank A tank-side opening that opens in the liquid metal stored in the tank, a tank-side opening that opens in the liquid metal stored in the reservoir tank, and an internal space of the communication pipe in the container. A switching valve that can be switched between an open state that opens to the space and a blocking state that blocks the internal space of the communication pipe from the internal space of the container, and a positive pressure or It is preferable to have an atmospheric pressure control mechanism for controlling the atmospheric pressure in the internal space of the reservoir tank so as to be a negative pressure. Further, it is preferable that the switching valve is provided outside the container.

  It is preferable that a pressure fluctuation absorption mechanism that absorbs pressure fluctuation in the internal space of the container is provided, and the pressure fluctuation absorption mechanism includes an elastic member that closes an opening formed in the container. The container is preferably a glove box.

  Further, the means for solving the above-mentioned problem is a method for manufacturing a metal product having a heat treatment process for performing a heat treatment using a liquid metal on an object to be processed, wherein the heat treatment process uses the above heat treatment apparatus. Features.

  According to the above means, the object to be processed can be smoothly moved while maintaining the sealed state in the sealed space in which the liquid metal is accommodated.

It is a perspective view which shows the outline | summary of the heat processing apparatus. It is a perspective view which shows the outline | summary of the inside of a heat processing apparatus. It is sectional drawing in the YZ surface which shows the outline | summary of a hanging table and a table moving mechanism. It is sectional drawing which shows the outline | summary of a 1st side surface seal part. It is sectional drawing which shows the outline | summary of an upper surface seal part. (A) is explanatory drawing which shows the outline | summary of the storage container in a retracted state, (B) is explanatory drawing which shows the outline | summary of the storage container in an immersion state. It is explanatory drawing which shows the positional relationship of a 1st-3rd tank and the circular orbit of a to-be-processed object. (A) (B) is sectional drawing which shows the outline | summary of a 2nd side surface seal part. It is explanatory drawing which shows the outline | summary of a collection | recovery mechanism. It is explanatory drawing which shows the outline | summary of a feed pipe and a return pipe. It is a top view which shows the outline | summary of the return pipe when it sees from the information of a tank. It is explanatory drawing which shows the outline | summary of a cooling mechanism. It is explanatory drawing which shows the outline | summary of a reservoir tank and a molten metal transfer machine. It is explanatory drawing which shows the outline | summary of a reservoir tank and a molten metal transfer machine. (A) (B) is explanatory drawing which shows the outline | summary of the container by which the balloon was mounted | worn with opening. (C) is explanatory drawing which shows the outline | summary of the opening | closing which the balloon was mounted | worn with the lid | cover opening / closing mechanism and became the obstruction | occlusion state. (A) is explanatory drawing which shows the outline | summary of the container in which the opening was formed. (B) is sectional drawing which shows the outline | summary of the container in which opening was formed.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

  As shown in FIGS. 1 and 2, the heat treatment apparatus 2 includes a container 10, a seal mechanism 20 that imparts airtightness to the container 10, a pump unit 30 that evacuates the internal space of the container 10, and an internal space of the container 10. A gas supply unit 31 for supplying an inert gas to the gas generator and a controller 40 for controlling each part are provided.

  The container 10 includes a so-called glove box 11 having a rectangular parallelepiped shape and a carry-in box 12 provided on a side surface of the glove box 11. Here, three directions X to Z orthogonal to each other are defined as follows. The X direction is a direction in which one side forming the bottom surface of the glove box 11 extends, and the Y direction is a direction in which the other side forming the bottom surface of the glove box 11 extends. The Z direction is the height direction of the glove box 11.

  The glove box 11 has an observation window 11W and a glove 11G on the side surface. The carry-in box 12 has a carry-in port 12E on the side surface. Further, an internal space (hereinafter referred to as a processing space) 11KA of the glove box 11 and an internal space (hereinafter referred to as a carry-in space) 12KA of the carry-in box 12 communicate with each other. Then, by closing the carry-in port 12E, the processing space 11KA and the carry-in space 12KA become a sealed space. Further, the container 10 has a partition plate 15. The partition plate 15 is movable between a blocking position (not shown) that blocks the processing space 11KA and the loading space 12KA, and a communication position (see FIG. 2) where the processing space 11KA and the loading space 12KA communicate. is there. Therefore, when the partition plate 15 is in the blocking position, the processing space 11KA and the carry-in space 12KA are separate sealed spaces.

  The pump unit 30 includes a processing space pump 30A for evacuating the processing space 11KA and a loading space pump 30B for evacuating the loading space 12KA. Further, the gas supply unit 31 includes a processing space gas supply 31A that supplies a predetermined inert gas (for example, argon gas) to the processing space 11KA, and a loading space that supplies a predetermined inert gas to the loading space 12KA. Gas supply device 31A.

  Furthermore, the heat treatment apparatus 2 includes a housing rod 50 that accommodates a metal object, a suspension table 60 that suspends the housing rod 50, a table moving mechanism 70 that moves the suspension table 60 in the X direction, a metal Of the first to third tanks 81 to 83 for storing M, the immersion moving mechanism 90 provided above the first to third tanks 81 to 83 to lock the storage rod 50, the suspension table 60 and the immersion moving mechanism 90 In the meantime, the processing space 11KA includes a transport movement mechanism 100 that transports the storage basket 50.

  Here, the object to be processed is formed from a metal material (for example, iron, aluminum, titanium, or an alloy thereof). Examples of the metal M include lithium and sodium.

  As shown in FIGS. 2 to 3, the housing rod 50 is made of a material (for example, stainless steel) that does not melt and deform in a high-temperature environment, and is provided in the collar portion 51 that houses the object to be processed. And a handle 52.

  The suspension table 60 includes a horizontal plate 61 and an L-shaped suspension arm 62 that stands from the upper surface of the horizontal plate 61 and can suspend the handle 52. The suspension arm 62 includes a pre-treatment arm for suspending the housing rod 50 that accommodates the object to be processed and a post-treatment arm for suspending the housing rod 50 that accommodates the object to be processed. An arm.

  The table moving mechanism 70 includes a holder 71 that can hold the horizontal plate 61 of the hanging table 60, and a first side surface through hole 11A formed on the side surface of the glove box 11 on the X direction side (see FIG. 4A). The table slide bar 72 having one end positioned outside the glove box 11 and the other end connected to the holder 71, the wheel 73 provided on the lower surface of the horizontal plate 61, and the axis of the table slide bar 72 And a slide mechanism 74 for moving the table slide bar 72 in the 72AX direction.

  As shown in FIG. 4A, the first side surface through hole 11A extends in the X direction. The table slide bar 72 extending in the X direction is movable along the first side surface through hole 11A, that is, on its own axis line 72AX, while being inserted into the first side surface through hole 11A. The slide mechanism 74 includes a screw shaft 74A coaxially arranged with respect to the table slide bar 72, a connecting tool 74R that connects the table slide bar 72 and the screw shaft 74A, and a nut that fits the screw shaft 74A. 74N, a nut fixture 74F that fixes the nut 74N to the glove box 11, and a motor 74M that rotates the screw shaft 74A around the X direction. As shown in FIG. 4 (B), the connecting tool 74R includes a receiving tool 74RA fixed to one end of the table slide bar 72, and a member extending from the end of the screw shaft 74A and engaging with the receiving tool 74RA. And a concentric shaft 74RF. The receiving tool 74RA has a hole insertion into which the engagement shaft 74RF can be inserted. Further, a stopper 74RK is formed at the tip of the engagement shaft 74RF. The dimension of the retainer 74RK is larger than the insertion hole formed in the receiver 74RA. Therefore, the engaging shaft 74RF inserted into the insertion hole of the receiver 74RA is locked to the receiver 74RA in its own axial direction, and is inserted into the insertion hole of the receiver 74RA around its own axis. It can rotate freely. By driving the motor 74M, the screw shaft 74A moves in the X direction with respect to the nut 74N. As a result, the suspension table 60 moves in the X direction in the processing space 11KA following the movement of the table slide bar 72.

  The first to third tanks 81 to 83 shown in FIG. 2 each have a heater. The metal M accommodated in the first to third tanks 81 to 83 is heated by this heater until it becomes liquid.

  As shown in FIGS. 2 and 5, the immersion moving mechanism 90 is inserted into the upper surface through-hole 11 </ b> C formed in the glove box 11, and one end is located outside the glove box 11 and the other end is located in the processing space 11 </ b> KA. Immersion bar 91, arms 92 </ b> A to 92 </ b> C provided at the other end of the immersion bar 91, a hook locking tool 93 provided at the tip of the arms 92 </ b> A to 92 </ b> C, and the axis of the immersion bar 91. The slide mechanism 94 moves the immersion rod 91 on 91AX, and the rotation motor 95 rotates the immersion rod 91 around the axis 91AX of the immersion rod 91.

  The upper surface through hole 11 </ b> C extends in the Z direction on the upper surface of the glove box 11. In addition, the immersion rod 91 is movable along the upper surface through hole 11C while being inserted into the upper surface through hole 11C, and is rotatable about its own axis 91AX. The linear movement on its own axis 91AX and the rotation around the axis 91AX are possible. The rotation motor 95 includes a motor body 95M and a rotation shaft 95F that is rotated by the motor body 95M. Since the rotating shaft 95F is fixed to one end side of the dip rod 91, the dip rod 91 rotates around the axis 91AX by driving the motor body 95M. Furthermore, the slide mechanism 94 is fitted to the screw shaft 94A, a screw shaft 94A arranged so as to be coaxial with the dip rod 91, a connector 94R for connecting the motor body 95M and the screw shaft 94A, and the screw shaft 94A. A nut 94N for fixing the nut 94N to the glove box 11, and a motor 94M for rotating the screw shaft 94A around the Z direction. As shown in FIG. 5B, the connecting tool 94R includes a receiving tool 94RA fixed to the motor body 95M, and an engagement shaft 94RF extending from the end of the screw shaft 94A and engaging with the receiving tool 94RA. Have. The receiver 94RA has a hole insertion into which the engagement shaft 94RF can be inserted. Further, a stopper 94RK is formed at the tip of the engagement shaft 94RF. The dimension of the retainer 94RK is larger than the insertion hole formed in the receiver 94RA. Therefore, the engaging shaft 94RF inserted into the insertion hole of the receiver 94RA is locked to the receiver 94RA in its own axial direction, and is inserted into the insertion hole of the receiver 94RA around its own axis. It can rotate freely.

  For this reason, the immersion rod 91 moves linearly in the Z direction by driving the motor 94M. As a result, by the linear movement of the immersion rod 91 in the Z direction, the storage rod 50 is in an immersion state (see FIG. 6B) located in the liquid metal M stored in an arbitrary tank (for example, the tank 81). Then, it moves between the retracted state retracted from the immersed state (see FIG. 6A). Further, the dip rod 91 is rotated around the Z direction by driving of the rotation motor 95. Then, by the rotation of the immersion rod 91 around the axis 91AX, the housing rod 50 maintains the retracted state (see FIG. 6A), the upper position of the first tank 81, the upper position of the second tank 82, And move between the upper positions of the third tank 83.

  As shown in FIG. 7, it is preferable that the 1st-3rd tanks 81-83 are distribute | arranged around the axis line 91AX of the immersion rod 91 inserted in 11C of upper surface through-holes. In addition, when viewed from the Z direction, the first to third tanks 81 to 83 are preferably located at a position overlapping the track C1 of the workpiece S about the axis 91AX. For example, the track C1 of the object to be processed is preferably circular.

  As shown in FIGS. 2 and 8A, the transport movement mechanism 100 is inserted into the second side surface through-hole 11B formed on the side surface of the glove box 11 on the Y direction side, and one end is positioned outside the glove box 11. At the same time, the other end of the transport slide rod 101 positioned in the processing space 11KA, the hook hook 102 provided on the other end of the transport slide rod 101 to lock the housing rod 50, and the axis 101AX direction of the transport slide rod 101 are provided. And a slide mechanism 103 that moves the transport slide bar 101. The second side surface through-hole 11B extends in the Y direction. Thus, the transport slide rod 101 inserted into the second side surface through hole 11B can move in the Y direction. Since the slide mechanism 103 has the same structure as the slide mechanism 74, a detailed description of the slide mechanism 103 is omitted. By such movement of the transport slide rod 101, the hook hook 102 can be moved from the hanging arm 62 of the hanging table 60 to the hook locking tool 93 of the immersion moving mechanism 90. In addition, as shown to FIG. 8 (B), the internal diameter of the 2nd side surface through-hole 11B may become large as it goes inside from the outer side. As a result, the transport slide rod 101 inserted into the second side surface through-hole 11B can move not only in the Y direction but also in the X direction and the Z direction.

  As shown in FIG. 1, the sealing mechanism 20 includes a first side seal portion 20 </ b> A that covers a gap between the first side surface through hole 11 </ b> A and the table slide bar 72, and a gap between the second side surface through hole 11 </ b> B and the transport slide bar 101. A second side seal portion 20B that covers the upper surface, and an upper surface seal portion 20C that covers the gap between the upper surface through hole 11C and the immersion rod 91.

  As shown in FIG. 4A, the first side seal portion 20A is made of metal, and is provided with a stick side seal sleeve 20AX provided so as to be in close contact with the peripheral surface on one end side of the table slide bar 72. A container-side seal sleeve 20AY provided so as to be in close contact with the peripheral edge of the first side surface through hole 11A in the glove box 11, and a cylindrical seal cylinder 20AT extending from the rod-side seal sleeve 20AX to the container-side seal sleeve 20AY. And having. Since the seal cylinder 20AT has a bellows structure, it can be deformed, that is, can be expanded and contracted following the movement of the table slide bar 72. Airtightness in the first side surface through hole 11A is obtained by the first side surface seal portion 20A having such a bellows structure.

  Further, as shown in FIG. 5A, the upper surface seal portion 20C is made of metal, and includes a rod side seal sleeve 20CX provided along the peripheral surface on one end side of the immersion rod 91, and a globe. The container 11 includes a container-side seal sleeve 20CY provided so as to be in close contact with the peripheral edge portion of the upper surface through-hole 11C, and a cylindrical seal cylinder 20CT extending from the rod-side seal sleeve 20CX to the container-side seal sleeve 20CY. Further, as shown in FIG. 5C, the upper surface seal portion 20C has a seal ring 20CR disposed between the rod side seal sleeve 20CX and the immersion rod 91. The seal ring 20CR holds the immersion rod 91 and closes the gap between the rod-side seal sleeve 20CX and the immersion rod 91. And the immersion rod 91 hold | maintained at the seal ring 20CR can be rotated around the axis line 91AX. Since the seal cylinder 20CT also has a bellows structure, it can expand and contract following the linear movement of the immersion rod 91. The upper surface seal portion 20C provides airtightness in the upper surface through hole 11C.

  As shown in FIG. 8, the second side seal part 20B also has the same structure as the first side seal part 20A. Therefore, the conveyance slide rod 101 can be moved in the Y direction by the second side surface seal portion 20B, and airtightness in the second side surface through hole 11B is obtained.

  As shown in FIGS. 1 and 2, the controller 40 controls each part such as the partition plate 15, the pump unit 30, the gas supply unit 31, the motors 74 </ b> M, 94 </ b> M, and 95, the motor of the slide mechanism 103, and the like. Note that the operation of the partition plate 15 between the blocking position and the communication position may use the globe 11G without depending on the controller 40.

  Next, the usage method of the heat processing apparatus 2 is demonstrated.

  First, using the globe 11G, the partition plate 15 is brought into the communication position (see FIG. 2), and the suspension table 60 is sent to the carry-in space 12KA. After that, the partition plate 15 is set to the blocking position using the globe 11G. Thereby, the processing space 11KA and the carry-in space 12KA are separated by the partition plate 15. Next, the carry-in port 12E is opened, and the storage rod 50 that stores the object to be processed is suspended from the suspension arm 62 of the suspension table 60. Thereafter, the carry-in port 12E is closed.

  The controller 40 individually evacuates the internal space of the container 10, that is, the processing space 11KA and the carry-in space 12KA, by driving the vacuum pumps 30A and 30B. Thereafter, the controller 40 individually fills the processing space 11KA and the carry-in space 12KA with the inert gas by driving the gas supply unit 31. After that, using the globe 11G, the partition plate 15 is brought into the communication position (see FIG. 2), and the suspension table 60 is fitted into the holder 71 waiting in the processing space 11KA. Thereby, the hanging table 60 can be moved in the X direction in accordance with the operation of the table moving mechanism 70.

  Next, the controller 40 heats the metal M accommodated in the first to third tanks 81 to 83 by the respective heaters. Thereby, the metal M accommodated in the first to third tanks 81 to 83 is melted and becomes liquid (molten metal). At this time, the molten metals in the first to third tanks 81 to 83 are maintained at different temperatures.

  Thereafter, the storage rod 50 is removed from the suspension arm 62 by the operation of the transport slide rod 101, and the removed storage rod 50 is locked to the hook hook 102. Subsequently, by the operation of the transport slide rod 101, the storage rod 50 locked by the rod hooking tool 102 is conveyed to the rod locking device 93 of the immersion rod 91 and transferred to the rod locking device 93.

  By the operation of the immersion rod 91, the housing rod 50 locked to the immersion rod 91 is positioned above the first tank 81, that is, in the retracted state (see FIG. 6A). Then, by lowering the housing rod 50 in the Z direction as it is, the housing rod 50 moves from the retracted state (see FIG. 6A) to the immersed state (see FIG. 6B). Thereby, the to-be-processed object S accommodated in the said accommodating container 50 is immersed in the molten metal M. FIG.

  The controller 40 measures the elapsed time after reaching the immersion state with a built-in timer or the like. After the predetermined first heat treatment time has elapsed, the controller 40 raises the dip rod 91 so that the housing rod 50 is retracted from the immersed state (see FIG. 6B) (see FIG. 6A). Move to. As a result, the workpiece S accommodated in the housing 50 is pulled up from the metal M melted in the first tank 81. Thereby, the rapid heating process in the first tank 81 can be performed for a predetermined time.

  Next, due to the rotation operation of the immersion rod 91 by the controller 40, the housing rod 50 that accommodates the workpiece S moves from a position above the first tank 81 to a position above the second tank 82. Become. Then, after a predetermined time has elapsed since the first tank 81 is pulled up from the molten metal M, the controller 40 performs a dipping state (see FIG. 6B) and a retracted state (see FIG. The housing rod 50 is moved between (see FIG. 6A). Thereby, the rapid cooling process in the second tank 82 can be performed for a predetermined time.

  And the to-be-processed object to which predetermined | prescribed heat processings, such as the above-mentioned rapid heating process and rapid cooling process, were carried out, the accommodation rod 50 is removed from the rod locking tool 93 by rotation operation of the immersion rod 91 and operation | movement of the conveyance slide rod 101. At the same time, the removed storage rod 50 is moved to a predetermined suspension arm 62. After that, by carrying the storage rod 50 to a predetermined tank by the operation of the transfer slide rod 101 and the immersion rod 91, a predetermined heat treatment is performed on another object to be processed stored in the storage rod 50. Can do.

  Since the heat treatment apparatus 2 includes the sealing mechanism 20, the object to be processed S in the container 10 can be moved while maintaining the hermeticity of the container 10. The seal mechanism 20 can expand and contract like a so-called bellows structure and does not have a so-called sliding portion. Therefore, even if the evaporated metal M adheres to the seal mechanism 20, the seal mechanism 20 itself remains stretchable. As a result, the object to be processed in the container 10 can be moved smoothly.

  Further, since the upper surface seal portion 20C includes the seal cylinder 20CT having the bellows structure and the seal ring 20CX, the dip rod 91 and the like can be linearly moved and rotated. For this reason, the object to be processed in the container 10 can be easily moved. Since the controller 40 controls linear movement and rotation of the immersion rod 91 and the like, heat treatment under desired conditions can be automated. Further, an operation of returning the object to be processed after the heat treatment to the suspension arm 62 (post-treatment arm), or an object to be processed before the heat treatment is performed on the suspension arm 62 (pre-treatment arm). ) Is also based on the moving operation of the dip rod 91 and the like controlled by the controller 40, so that a predetermined heat treatment can be automatically and continuously performed on a plurality of objects to be processed.

  In addition, it is preferable that the immersion moving mechanism 90 has the 1st-3rd lids 121-123 which block | close the opening of the 1st-3rd tanks 81-83 further. And when the storage container 50 is in the immersion state (see FIG. 6B), the first to third lids 121 to 123 are in the closed positions for closing the openings of the first to third tanks 81 to 83, respectively. When the container 50 is in the retracted state (see FIG. 6A), the first to third lids 121 to 123 are open positions that open the openings of the first to third tanks 81 to 83, respectively. Thereby, when the storage container 50 is in the immersed state (see FIG. 6B), not only the tank in which the storage container 50 is immersed, but also the opening of another tank can be closed. Therefore, evaporation of the molten metal in all the tanks can be suppressed.

  In addition, although the heat processing apparatus 2 of the said embodiment is equipped with three tanks (1st tank 81-3rd layer 83) which accommodates the liquid metal M, this invention is not limited to this, The heat processing apparatus 2 is Two or four or more tanks containing the liquid metal M may be provided.

  In addition, although the heat processing apparatus 2 of the said embodiment is equipped with the accommodating rod 50 in order to hold | maintain a to-be-processed object, this invention is not limited to this, The heat processing apparatus 2 is a to-be-processed instead of the accommodating trough 50. You may provide the suspension member which can suspend a body directly.

  2 and 3, the table moving mechanism 70 preferably includes a cover 75 that covers the wheels 73, particularly the axle 73X. As a result of the cover 75 becoming difficult for the evaporated metal to adhere to the axle 73X, smooth movement of the table moving mechanism 70 can be ensured.

  Moreover, in the said embodiment, although each seal | sticker part 20A-20C was provided in the outer side of the glove box 11, this invention is not restricted to this, You may provide in the glove box 11 inside.

  In addition, when the storage container 50 is in the retracted state (see FIG. 6A), it has a separate lid that closes the openings of the first to third tanks 81 to 83 and a moving mechanism that can horizontally move the separate lid. Also good. The moving mechanism that can move the separate lid horizontally may be the same structure as the table moving mechanism 70.

  In addition, you may use what was formed from elastic bodies, such as a synthetic resin, as sealing cylinder 20AT-20CT. The seal cylinders 20AT to 20CT made of an elastic body such as a synthetic resin are stretchable due to the forming material. For this reason, the bellows structure can be omitted. Further, the seal cylinder 20CT made of an elastic body such as synthetic resin can be twisted and deformed due to the forming material. For this reason, the seal ring 20CR can be omitted.

  Furthermore, as shown in FIG. 9, the heat treatment apparatus 2 preferably includes a recovery mechanism 130 that recovers the evaporated metal M in the internal space of the container 10. The recovery mechanism 130 is configured to send the recovery case 131 disposed outside the container 10, the filter 132 disposed in the internal space of the recovery case 131, and the gas in the internal space of the container 10 to the internal space of the recovery case 131. A feed pipe 133, a return pipe 134 for sending the gas in the internal space of the collection case 131 to the internal space of the container 10, a pump 135 provided in the return pipe 134, and a feed side provided in the feed pipe 133 The on-off valve 136 and a return-side on-off valve 137 provided on the return pipe 134 are provided.

  One end of the feed tube 133 opens in the internal space of the container 10, and the other end opens in the internal space of the collection case 131. Similarly, one end of the return pipe 134 opens in the internal space of the container 10, and the other end opens in the internal space of the collection case 131. When the controller 40 opens the feed-side on-off valve 136 and the return-side on-off valve 137 and the pump 135 starts operation, a gas containing evaporated metal flows from the container 10 toward the collection case 131. In the collection case 131, when the gas containing evaporated metal passes through the filter 132, the evaporated metal is condensed by contact with the filter 132. As a result, the filter 132 can filter out the metal from the gas containing the evaporated metal. The gas that has passed through the filter 132 returns to the internal space of the container 10 through the return pipe 134.

  In this way, the gas sequentially passes through the circulation path formed by the recovery mechanism 130, that is, the recovery case 131 having the feed pipe 133, the filter 132, the return pipe 134, and the container 10. In a certain gas, the concentration of evaporated metal can be suppressed. As a result, the solid matter derived from the evaporated metal is less likely to adhere to the inner wall of the container 10.

  The container-side feed opening 133 </ b> X that opens in the internal space of the container 10 in the feed pipe 133 is preferably located above the first tank 81 and faces the first tank 81, as shown in FIGS. The container-side feed opening 133X is preferably located above the opening 81X of the first tank 81. Thereby, even when the molten metal M stored in the first tank 81 evaporates, the evaporated metal can be reliably sent to the recovery case 131 by the feed pipe 133.

  Of the return pipes 134, the container side return openings 134 </ b> Y that open in the internal space of the container 10 are preferably positioned around the first tank 81. Moreover, it is preferable that the container side return opening 134Y faces upward. Furthermore, when there are a plurality of container-side return openings 134Y, it is preferable that they are arranged in a ring around the first tank 81. Thereby, in the vicinity of the opening 81 </ b> X of the first tank 81, a gas flow is generated from below to above. Such a gas flow makes it easier for the evaporated metal to flow directly above the first tank 81. As a result, the evaporated metal can be reliably sent to the collection case 131 via the feed pipe 133 that opens above the first tank 81.

  Further, the first container-side feed opening 133X is arranged in an annular shape so as to face the container-side return opening 134Y, and the second container-side feed opening 133X is arranged inside the first container-side return opening 134Y. It is preferable. Furthermore, it is preferable that the second container side feed opening 133 </ b> X is directly opposed to the opening 81 </ b> X of the first tank 81. Thereby, around the path R formed from the opening 81X of the first tank 81 to the second container-side feed opening 133X, a constant gas flow from the container-side return opening 134Y to the first container-side feed opening 133X. Therefore, the metal evaporated in the first tank 81 is unlikely to deviate from the path R. As a result, the evaporated metal can be reliably sent to the recovery case 131.

  In addition, in the internal space of the container 10, it is preferable that the feed pipe 133 and the return pipe 134 are provided so as to be removed from the movement path of the housing rod 50 and the first to third lids 121 to 123.

  In the above embodiment, the recovery mechanism 130 is provided for the first tank 81, but the present invention is not limited to this, and the recovery mechanism 130 may be provided in each of the second tank 82 and the third layer 83.

  By the way, the molten metal M stored in the second tank 82 or the second tank 82 that performs the rapid cooling process while the heat treatment is performed on the object to be processed is a surrounding heat source (the heater of the first tank 81 or the third layer 83, The temperature rises due to the molten metal. For this reason, it is preferable that the heat processing apparatus 2 is provided with the cooling mechanism 140 which cools the molten metal M stored in the 2nd tank 82, as shown in FIG.

  The cooling mechanism 140 is disposed outside the container 10 and the heat transfer medium circulation pipe 141 that forms a circulation path for circulating a heat transfer medium (a refrigerant such as He or the like) in the internal space and the external space of the container 10. The cooling device 142 provided in the heat transfer medium flow pipe 141 and the pump 143 provided outside the container 10 and provided in the heat transfer medium flow pipe 141 are provided. The heat transfer medium flow pipe 141 is provided in contact with the second tank 82. In addition, the heat transfer medium flow pipe 141 is preferably arranged in a spiral around the second tank 82.

  When the pump 135 starts operation under the control of the controller 40, the heat transfer medium flows through the circulation path. Further, under the control of the controller 40, the cooling device 142 cools the heat transfer medium flowing through the heat transfer medium flow pipe 141. Thereby, the temperature of the heat transfer medium flowing through the heat transfer medium flow pipe 141 can be maintained within a predetermined range.

  In this way, in the internal space of the container 10, heat exchange is performed between the second tank 82 or the molten metal M stored in the second tank 82 and the heat transfer medium flowing through the heat transfer medium flow pipe 141. Is called. For this reason, while performing heat processing, the temperature of the molten metal M stored in the 2nd tank 82 or the 2nd tank 82 can be maintained in a desired range.

  In the heat transfer medium circulation pipe 141, the heat transfer medium may flow from the upper side to the lower side of the second tank 82. Thereby, the temperature of the molten metal M stored above the second tank 82 is lower than the temperature of the molten metal M stored below the second tank 82. In this way, the temperature distribution of the molten metal M generated in the second tank 82 induces convection of the molten metal M in the second tank 82, and as a result, the entire molten metal M stored in the second tank 82. Cooling can be performed efficiently.

  When the heat transfer medium is air, the heat transfer medium flow pipe 141 between the cooling device 142 and the container 10 is opened to the outside, and the path of the heat transfer medium is released to the external space of the container 10. Also good.

  In the heat treatment apparatus 2 of the above embodiment, the heat transfer medium flow pipe 141 is provided so as to contact the second tank 82, but the present invention is not limited to this, and the heat transfer medium flow pipe 141 is the second tank. 82 may be built in.

  As shown in FIG. 13, the heat treatment apparatus 2 includes a reservoir tank 151 disposed outside the container 10, and a molten metal transfer mechanism 152 that transfers the molten metal M between the reservoir tank 151 and the internal space of the container 10. It is preferable to comprise. The reservoir tank 151 and the molten metal transfer mechanism 152 are provided in the first tank 81 as a pair. Note that the reservoir tank 151 and the molten metal transfer mechanism 152 may be individually provided for the first tank 81 to the third layer 83.

  The reservoir tank 151 includes a sealed space in which the molten metal M can be stored, and a heater (not shown) that adjusts the temperature of the molten metal M stored in the sealed space.

  The molten metal transfer mechanism 152 includes a communication pipe 152T, a switching valve 152B provided in the communication pipe 152T, and an atmospheric pressure control mechanism 160.

  The communication pipe 152T includes a tank-side opening end 152TX that opens in the molten metal M stored in the first tank 81, a tank-side opening end 152TY that opens in the molten metal M stored in the reservoir tank 151, and the container 10. A container-side opening end 152TZ that opens outside the first tank 81. The tank side opening end 152TX and the tank side opening end 152TY are always in communication. On the other hand, the container-side opening end 152TZ is blocked from the tank-side opening end 152TX and the tank-side opening end 152TY by the switching valve 152B (blocked state), and the tank-side opening end 152TX and the tank-side opening end 152TY. It is possible to switch between an open state (release state).

  The atmospheric pressure control mechanism 160 includes a container-side atmospheric pressure sensor 161 that detects the atmospheric pressure in the internal space of the container 10, a container-side vent pipe 162 that communicates with the internal space of the container 10, and a container-side atmospheric pressure provided in the container-side vent pipe 162. An adjustment pump 163, a container-side on-off valve 164 that opens and closes the container-side aeration pipe 162 provided in the container-side aeration pipe 162 between the container 10 and the container-side air pressure adjustment pump 163, and an atmospheric pressure in the internal space of the reservoir tank 151 A tank side air pressure sensor 166 for detecting the pressure, a tank side air pipe 167 communicating with the internal space of the reservoir tank 151, a tank side air pressure adjusting pump 168 provided in the tank side air pipe 167, and the container 10 and tank side air pressure adjustment. A tank-side on-off valve 169 that opens and closes the tank-side vent pipe 167 and is provided in the tank-side vent pipe 167 between the pumps 168.

  While reading the sensing signals from the atmospheric pressure sensors 161 and 166, the controller 40 opens and closes the on-off valves 164 and 169 and turns on and off the pumps 163 and 168, thereby transferring the container 10 to the reservoir tank 151. Between an outflow state in which the molten metal M flows, an inflow state in which the molten metal M flows from the reservoir tank 151 to the container 10, and a stopped state in which no movement of the molten metal M occurs between the container 10 and the reservoir tank 151. Perform switching operation. Here, in the outflow state, the pressure in the internal space of the container 10 is higher than the pressure in the internal space of the reservoir tank 151 with the switching valve 152B closed. On the other hand, in the inflow state, the pressure in the internal space of the container 10 is lower than the pressure in the internal space of the reservoir tank 151 with the switching valve 152B closed. In the stop state, the switching valve 152B is open, and the atmospheric pressure in the internal space of the container 10 is equal to the atmospheric pressure in the internal space of the reservoir tank 151. Moreover, it is preferable that the part provided with the switching valve 152B among the switching valve 152B and the communication pipe 152T is located outside the container 10. Note that the switching valve 152B may be in the internal space of the container 10 (see FIG. 14).

  The heat treatment apparatus 2 may have a temperature adjustment mechanism that adjusts the molten metal transfer mechanism 152, that is, the temperature of the communication pipe 152T and the switching valve 152B to be equal to or higher than the freezing point of the molten metal M. The temperature control mechanism includes, for example, a jacket disposed around the communication pipe 152T and the switching valve 152B, a temperature controller that adjusts the temperature of the heat transfer medium supplied to the inside of the jacket, and a jacket and a temperature controller. And a circulation path for circulating the heat transfer medium therebetween. By this temperature control mechanism, the molten metal M is prevented from solidifying in the communication pipe 152T and the switching valve 152B.

  By the way, when each rod 72, 91, 101 is operated, the bellows structure in each seal portion 20A, 20B, 20C expands and contracts. As a result, according to the volume change of the internal space of each seal portion 20A, 20B, 20C, the container 10 The pressure in the interior space will fluctuate. When such pressure fluctuations in the internal space, particularly when the pressure increases, the operability of each of the bars 72, 91, 101 is deteriorated. In order to ensure the operability of each of the rods 72, 91, 101, it is preferable that the heat treatment apparatus 2 includes a pressure fluctuation absorbing mechanism 180. In addition, when operating each part of the internal space of the container 10 using the globe 11G (see FIG. 1), the pressure of the internal space of the container 10 fluctuates, resulting in poor operability of the globe 11G. The operability of the globe 11G can be secured by the pressure fluctuation absorbing mechanism 180 described below.

  As shown in FIG. 15, the pressure fluctuation absorbing mechanism 180 absorbs pressure fluctuation in the internal space of the container 10 and has a balloon 181 that closes the opening 11 </ b> H formed in the container 10. The forming material of the balloon 181 is an elastic material, for example, rubber. As shown in FIG. 16, the opening of the balloon 181 engages with the rib 11HR formed on the periphery of the opening 11H, and binds the opening of the balloon 181 to the rib 11HR using a binding member (not shown).

  When the volume occupied by the seal portions 20A, 20B, 20C and the globe 11G in the internal space of the container 10 increases, the balloon 181 expands following this volume increase (see FIG. 15). For this reason, even if the volume which each seal | sticker part 20A, 20B, 20C and the globe 11G occupies increases, the pressure of the internal space of the container 10 is maintained constant. As a result, the operability of the rods 72, 91, 101 and the globe 11G can be ensured.

  Further, the pressure fluctuation absorbing mechanism 180 includes a lid 183 that closes the opening 11H, and a lid opening / closing mechanism 185 that moves the lid 183 between a closed state in which the opening 11H is closed and an open state in which the opening 11H is opened to the outside. Have. The lid opening / closing mechanism 185 includes a lid pressing member 185T that presses the lid 183, a holding member 185H that holds the lid pressing member 185T, a convex member 185B that protrudes from the outer wall surface of the container 10, a convex member 185B, And a connecting shaft 185X for connecting the holding member 185H. The holding member 185H is supported by the convex member 185B in a state in which the holding member 185H can swing about the connecting shaft 185X. The lid 183 and the holding member 185H may be fixed, but as shown in the figure, a bolt is used as the lid pressing member 185T, and a screw hole that can be screwed with a screw of the bolt is used as the holding member 185H. A formed holding plate may be used. The airtightness of the opening 11H can be ensured by tightening the bolt after closing the lid 183. If the internal space of the container 10 is evacuated while the opening 11H is closed by the lid 183, the balloon 11 does not need to be drawn into the internal space of the container 10 during the evacuation.

  Instead of the balloon 181, the globe 11G may be used. For example, when two globes 11G are used at the same time, the third globe 11G functions as a substitute for the balloon 181.

  In addition, each mechanism shown to FIGS. 9-16 is not limited to the heat processing apparatus 2, It can utilize widely.

2 Heat treatment apparatus 10 Container 11 Glove box 11A Side surface through hole 11B Side surface through hole 11C Upper surface through hole 11KA Processing space 11W Observation window 12 Loading box 12E Loading port 12KA Loading space 15 Partition plate 20 Seal mechanism 20A Side seal part 20AT Seal cylinder 20AX Rod Side seal ring 20AY Container side seal ring 20B Side seal part 20C Top face seal part 20CT Seal cylinder 20CX Rod side seal ring 20CY Container side seal ring 30 Pump unit 31 Gas supply unit 40 Controller 50 Storage rod 60 Suspension table 61 Horizontal plate 62 Arm 70 Table movement mechanism 71 Clamping tool 72 Table slide bar 72X Axis line 74 Slide mechanism 75 Cover 81-83 Tank 90 Immersion movement mechanism 91 Immersion bar 91X Axis lines 92A-92C Arm 93 籠 Locking tool 9 Slide mechanism 95 rotates the motor 100 transport the moving mechanism 101 transporting the slide rod 101X axis 102 basket hooking member 103 slide mechanism 121-123 lid

Claims (16)

A heat treatment apparatus for performing a heat treatment using a liquid metal on a metal object,
A container having a through-hole formed therein;
A tank that is arranged in the internal space of the container and contains the liquid metal;
A workpiece moving mechanism that is inserted into the through-hole while being movable or rotatable, and that holds the workpiece in the internal space of the container;
A controller for controlling the object moving mechanism;
A sealing mechanism for imparting airtightness to the container,
The controller is disposed outside the container;
The sealing mechanism includes a processing object side sealing tool that closes a gap between the through hole and the processing object moving mechanism and is deformable following the operation of the processing object moving mechanism. apparatus.   The heat treatment according to claim 1, wherein the object to be processed moves between an immersion state immersed in the liquid metal and a retracted state retracted from the immersion state by an operation of the object movement mechanism. apparatus.   The heat treatment apparatus according to claim 2, wherein the object to be processed moves between the immersion state and the retracted state by a linear movement operation of the object to be processed moving mechanism. The object to be processed side sealing tool is:
A container side fixing portion provided so as to be in close contact with the container;
A locking tool side fixing portion provided so as to be in close contact with the processing object locking tool;
4. The heat treatment apparatus according to claim 1, further comprising: a cylinder portion extending from the container side fixing portion to the locking tool side fixing portion. 5.   The heat treatment apparatus according to claim 4, wherein the cylindrical portion has a bellows structure. The tank is
A first tank in which the liquid metal at a first temperature is stored;
A second tank in which the liquid metal at a second temperature different from the first temperature is stored,
The workpiece moving mechanism has a rotation shaft that passes through the through hole,
The object to be processed is rotatable around the rotation axis by a rotation operation of the object moving mechanism around the rotation axis, and above the first tank by the rotation operation. 6. The heat treatment apparatus according to claim 1, wherein the heat treatment apparatus is capable of transitioning between a state located at a position above the second tank and a state located above the second tank. A connecting lid connected to the workpiece moving mechanism;
The connection lid is moved between a closed position for closing the opening of the tank and an open position retracted from the closed position by a movement operation of the workpiece moving mechanism,
The connection lid is in the closed position with respect to at least one of the first tank and the second tank when the object to be processed is in the immersion state with respect to the first tank. 6. The heat treatment apparatus according to 6. When the lower temperature of the liquid metal stored in the first tank and the second tank is defined as a low temperature tank, a low temperature tank cooling mechanism for cooling the low temperature tank is provided,
The low temperature bath cooling mechanism is
A heat transfer medium flow pipe provided in the tank and through which the heat transfer medium flows;
The heat treatment apparatus according to claim 6 or 7, wherein both open ends of the heat transfer medium flow pipe are disposed outside the container. And a recovery mechanism for recovering the liquid metal evaporated in the internal space of the container,
The recovery mechanism is
A collection case arranged outside the container;
A filter disposed in the internal space of the collection case;
A feed pipe for sending the gas in the internal space of the container to the internal space of the recovery case;
A return pipe for sending the gas in the internal space of the recovery case to the internal space of the container;
The heat treatment apparatus according to claim 1, further comprising a pump provided in the return pipe. The feed pipe has a container-side feed opening that opens in the internal space of the container,
The heat treatment apparatus according to claim 9, wherein the container side feed opening faces the opening of the tank above the tank. The return pipe has a container side return opening that opens in the internal space of the container,
The heat treatment apparatus according to claim 9 or 10, wherein the container-side return opening faces upward on an outer periphery of the tank. A reservoir tank disposed outside the container and having a sealing property;
A liquid metal transfer mechanism for transferring the liquid metal between the tank and the reservoir tank,
The liquid metal transfer mechanism is
A communication pipe having a tank side opening that opens in the liquid metal stored in the tank, and a tank side opening that opens in the liquid metal stored in the reservoir tank;
A switching valve that can be switched between an open state in which the internal space of the communication pipe is opened with respect to the internal space of the container and a shut-off state in which the internal space of the communication pipe is blocked from the internal space of the container;
11. An air pressure control mechanism that controls the air pressure in the internal space of the reservoir tank so as to be positive or negative with respect to the internal space of the container. The heat treatment apparatus according to claim 1.   The heat treatment apparatus according to claim 11, wherein the switching valve is provided outside the container. A pressure fluctuation absorbing mechanism for absorbing pressure fluctuation in the internal space of the container;
The pressure fluctuation absorbing mechanism is
The heat treatment apparatus according to claim 1, further comprising an elastic member that closes an opening formed in the container.   The heat treatment apparatus according to claim 13, wherein the container is a glove box. A method of manufacturing a metal product having a heat treatment step of performing a heat treatment using a liquid metal on an object to be processed,
The method of manufacturing a metal product, wherein the heat treatment step uses the heat treatment apparatus according to any one of claims 1 to 14.

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