JP2014215294A - MEMS element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a MEMS element which has enhanced sensitivity and allows miniaturization by arranging in an X shape lengths of flexible beams connected to a mass body displaced to detect inertia and maximizing the lengths of the beams in a limited space.SOLUTION: A MEMS element 100 of the present invention comprises: a mass body 110; flexible beams 120 connected to the two end parts of the mass body 110, arranged in an X shape and provided with sensing means 140; and a pair of support parts 130 coupled to the flexible beams 120 and arranged in parallel with each other on the two sides of the mass body 110.

Description

  The present invention relates to a MEMS device.

  MEMS (Micro Electro Mechanical Systems) is a technology for manufacturing ultra-fine mechanical structures such as ultra-high density integrated circuits, sensors, and actuators (actuators) by processing silicon, quartz, glass, etc. . MEMS devices have micrometer precision (parts per million) and are structurally capable of mass production of micro products at low cost by applying semiconductor micro-process technology that repeats processes such as vapor deposition and etching. is there.

  Among MEMS elements, sensors are used for military purposes such as satellites, missiles, unmanned aircraft, etc., for air bag, ESC (Electronic Stability Control), black box for vehicles, and camcorder hand tremor prevention. It is used for various applications such as mobile phone and game machine motion detection and navigation.

  Such a sensor generally employs a configuration in which a mass body is bonded to an elastic substrate such as a membrane to measure acceleration, angular velocity, force, or the like. With the above configuration, the sensor measures the inertial force applied to the mass body to calculate the acceleration, or measures the Coriolis force applied to the mass body to calculate the angular velocity, and is applied directly to the mass body. Measure the external force and calculate the force.

  Specifically, a method for measuring acceleration and angular velocity using a sensor will be described as follows. First, acceleration can be obtained by Newton's law of motion “F = ma”. Here, “F” is the inertial force acting on the mass body, “m” is the mass of the mass body, and “a” is the acceleration to be measured. Of these, the acceleration (a) can be obtained by sensing the inertial force (F) acting on the mass body and dividing it by the mass (m) of the mass body of a constant value. Further, the angular velocity can be obtained by Coriolis Force (F = 2 mΩ × v) equation. Here, “F” is the Coriolis force acting on the mass body, “m” is the mass of the mass body, “Ω” is the angular velocity to be measured, and “v” is the motion speed of the mass body. Among these, since the velocity (v) of the mass body and the mass (m) of the mass body are already recognized values, if the Coriolis force (F) acting on the mass body is detected, the angular velocity (Ω) is obtained. be able to.

  Meanwhile, as disclosed in Patent Document 1, the sensor according to the related art includes a beam (Beam) extending in the X-axis direction and the Y-axis direction in order to drive the mass body or sense the displacement of the mass body. .

  However, in the sensor according to the prior art, the tension acting on the beam increases rapidly as the mass body displacement increases. As described above, if the beam tension increases, the rigidity of the beam also increases, thereby causing a problem that the driving displacement and the sensing displacement of the mass body are limited. Further, as the rigidity of the beam increases, the resonance frequency changes and noise (noise) increases.

US Patent Application Publication No. 2009/0282918

  The present invention is to solve the above-mentioned problems of the prior art, and the first aspect of the present invention is that the length of a flexible beam connected to a mass body that is displaced in order to detect inertia is X-shaped. The MEMS element can be miniaturized by arranging and maximizing the length of the beam in a limited space, and is provided with improved sensitivity.

  The second aspect of the present invention includes an angular velocity detection unit and an acceleration detection unit, and is connected by two support units arranged in parallel, so that the partition wall partitioning the acceleration detection unit and the angular velocity detection unit is not required, and the size is reduced. This is to provide a MEMS device that can be made into a single chip.

  A MEMS device according to a first embodiment of the present invention includes a mass body; a flexible beam connected to both ends of the mass body, arranged in an X shape, and formed with sensing means; and the flexible beam is combined. And a pair of support portions disposed in parallel to each other on both sides of the mass body.

  In the MEMS device according to the first embodiment of the present invention, the mass body includes a rhombus central mass body; and a plurality of peripheral mass bodies respectively connected to corners of the central mass body, and the peripheral mass bodies are adjacent to each other. A flexible beam may be disposed in the space portion, which is connected to the central mass body so that a space portion is formed between the peripheral mass body and the surrounding mass body.

  In the MEMS device according to the first embodiment of the present invention, the support portion protrudes toward one end of the flexible beam, and a protruding coupling portion corresponding to the end portion of the flexible beam is formed at both ends. Can be done.

  An MEMS device according to a second embodiment of the present invention includes an acceleration detecting unit including a first mass body and a flexible beam in which the first mass body is connected, arranged in an X shape, and formed with sensing means; And an angular velocity detection unit including a second mass body and a flexible part to which the second mass body is connected and a sensing unit and a driving unit are formed, and the acceleration detection unit and the angular velocity detection unit are a pair of parallel units. Connected to the support.

  In the MEMS device according to the second embodiment of the present invention, the flexible portion of the angular velocity detection unit may have a first movable portion having one end connected to both sides of the center of the second mass body and the other end connected to a support unit. The flexible part may include a second flexible part having one end coupled to both ends of the second mass body and the other end connected to the support part.

  In the MEMS device according to the second embodiment of the present invention, the first flexible part and the second flexible part may be disposed in an orthogonal direction.

  In the MEMS device according to the second embodiment of the present invention, the angular velocity detector includes the first flexible portion coupled to the center of the second mass body in the Y-axis direction, and the second flexible portion serving as the second mass. The second mass body is coupled to both ends of the body, and can rotate with respect to the Y-axis direction.

  In the MEMS device according to the second embodiment of the present invention, the second flexible part may be formed with sensing means and driving means.

  In the MEMS device according to the second embodiment of the present invention, the second flexible part may be coupled to both ends of the second mass body in the X-axis direction.

In the MEMS device according to the second embodiment of the present invention, the first flexible part may have a width (W ₁ ) in the Z-axis direction larger than a thickness (t ₁ ) in the X-axis direction.

In the MEMS device according to the second embodiment of the present invention, the second flexible part may have a width (W ₂ ) in the Y-axis direction larger than a thickness (t ₂ ) in the Z-axis direction.

  In the MEMS device according to the second embodiment of the present invention, the supporting part includes a coupling part to which the first flexible part is coupled and a protruding part to which the second flexible part is coupled, and the protruding part. Can protrude toward the second mass.

  In the MEMS device according to the second embodiment of the present invention, the second mass body has protruding coupling portions at both ends, and one end of the second flexible portion is coupled to the protruding coupling portion of the second mass body. The other end may be coupled to the protrusion of the support.

  In the MEMS device according to the second exemplary embodiment of the present invention, one end of the second flexible part coupled to the support part may be compared with the other end of the second flexible part coupled to the second mass body. It can be located close to the rotation axis (Y axis) of the second mass body.

  In the MEMS device according to the second embodiment of the present invention, the first flexible part may be coupled to the upper side of the weight center (C) of the second mass body with respect to the Z-axis direction.

  In the MEMS device according to the second embodiment of the present invention, the first mass body of the acceleration detecting unit includes a rhombus center mass body and a plurality of peripheral mass bodies respectively connected to corner portions of the center mass body. The peripheral mass body may be connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam may be disposed in the space portion.

  In the MEMS device according to the second embodiment of the present invention, the support portion has a protruding coupling portion protruding toward one end of the flexible beam of the acceleration detecting portion and corresponding to the end portion of the flexible beam. They can be formed at both ends.

  An MEMS device according to a third embodiment of the present invention includes an acceleration detecting unit including a first mass body and a flexible beam in which the first mass body is connected, arranged in an X shape, and formed with sensing means; And an angular velocity detection unit including a second mass body and a flexible part to which the second mass body is connected and a sensing unit and a driving unit are formed, and the acceleration detection unit and the angular velocity detection unit are a pair of parallel units. The flexible part of the angular velocity detection unit is connected to a support part, and a first flexible part having one end connected to both sides of the center part of the second mass body and the other end connected to the support part; A second flexible part having one end coupled to both ends of the two mass bodies and the other end connected to the first flexible part, wherein the first flexible part and the second flexible part are orthogonal to each other. Placed in.

  In the MEMS device according to the third embodiment of the present invention, the angular velocity detector includes the first flexible portion coupled to the center of the second mass body in the Y-axis direction, and the second flexible portion serving as the second mass. The second mass body is coupled to both ends of the body in the X-axis direction, and can rotate with respect to the Y-axis direction.

  In the MEMS device according to the third embodiment of the present invention, sensing means and driving means may be formed in the second flexible part.

In the MEMS device according to the third embodiment of the present invention, the first flexible part may have a width (W ₁ ) in the Z-axis direction larger than a thickness (t ₁ ) in the X-axis direction.

In the MEMS device according to the third embodiment of the present invention, the second flexible part may have a width (W ₂ ) in the Y-axis direction larger than a thickness (t ₂ ) in the Z-axis direction.

  In the MEMS device according to the third embodiment of the present invention, the first mass body of the acceleration detection unit includes a rhombus center mass body and a plurality of peripheral mass bodies respectively connected to corner portions of the center mass body. The peripheral mass body may be connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam may be disposed in the space portion.

  In the MEMS device according to the third embodiment of the present invention, the support portion has a protruding coupling portion that protrudes toward one end of the flexible beam of the acceleration detecting portion and that corresponds to the end portion of the flexible beam. They can be formed at both ends.

  An MEMS device according to a fourth embodiment of the present invention includes an acceleration detecting unit including a first mass body and a flexible beam in which the first mass body is connected, arranged in an X shape, and formed with sensing means; And a second mass body, a flexible portion in which the second mass body is connected, and a sensing means and a driving means are formed, and the second mass body and the flexible portion are connected to each other, and the inside of the second mass body And an angular velocity detection unit including an anchor positioned at a position where the acceleration detection unit and the angular velocity detection unit are coupled to a pair of parallel support units.

  In the MEMS device according to the fourth embodiment of the present invention, the second mass body includes a one-side mass body, an other-side mass body, and a connection mass body, and the connection mass body includes the one-side mass body and the other. The side mass bodies are connected to each other so as to form a space portion, and the one side mass body and the other side mass body can be connected to the support portion by the flexible portion.

  In the MEMS device according to the fourth embodiment of the present invention, the flexible part has a first end connected to the central part of the one-side mass body and the other-side mass body, and the other end connected to the support part. A flexible portion; and a second flexible portion having one end coupled to the connecting mass body and the other end coupled to an anchor, wherein the first flexible portion and the second flexible portion are disposed in an orthogonal direction. be able to.

In the MEMS device according to the fourth embodiment of the present invention, the first flexible part may have a width (W ₁ ) in the Z-axis direction larger than a thickness (t ₁ ) in the X-axis direction.

In the MEMS device according to the fourth embodiment of the present invention, the second flexible part may have a width (W ₂ ) in the Y-axis direction larger than a thickness (t ₂ ) in the Z-axis direction.

  In the MEMS device according to the fourth exemplary embodiment of the present invention, the first mass body of the acceleration detection unit includes a rhombus center mass body and a plurality of peripheral mass bodies respectively connected to corner portions of the center mass body. The peripheral mass body may be connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam may be disposed in the space portion.

  In the MEMS device according to the fourth embodiment of the present invention, the support portion has a protruding coupling portion protruding toward one end of the flexible beam of the acceleration detecting portion and corresponding to the end portion of the flexible beam. They can be formed at both ends.

  The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

  Prior to the detailed description of the invention, the terms and words used in the specification and claims should not be construed in the usual lexicographic sense, and the inventor shall best understand his or her invention. In order to explain the method, the concept of the term should be construed according to the principle that the technical idea of the present invention can be defined according to the principle that the concept of the term can be appropriately defined.

  According to the present invention, the length of the flexible beam connected to the mass body that is displaced to detect the inertia is arranged in an X shape so that the length of the beam is maximized in a limited space. Possible to obtain a MEMS element with improved sensitivity, including an angular velocity detection unit and an acceleration detection unit, connected by two support units arranged in parallel, and partitioning the acceleration detection unit and the angular velocity detection unit This eliminates the need for a part, and a MEMS device that can be miniaturized into a single chip can be obtained.

1 is a plan view schematically showing a MEMS device according to a first embodiment of the present invention. It is a schematic sectional drawing about the AA line of the MEMS element shown in FIG. It is a schematic sectional drawing about the BB line of the MEMS element shown in FIG. It is explanatory drawing which shows roughly the one part process of the MEMS element manufacturing process by 1st Example of this invention. FIG. 5 is a plan view schematically showing a MEMS device according to a second embodiment of the present invention. It is a schematic sectional drawing about CC line of an angular velocity detection part in the MEMS element shown in FIG. It is a schematic sectional drawing about the DD line | wire of an angular velocity detection part in the MEMS element shown in FIG. It is a schematic explanatory drawing about the drive of an angular velocity detection part in the MEMS element shown in FIG. It is a graph which shows the change of the tension | tensile_strength by the rotation angle of a mass body in the angular velocity detection part of the MEMS element shown in FIG. FIG. 6 is a use state diagram schematically showing driving of an angular velocity detection unit in the MEMS element shown in FIG. 5. FIG. 6 is a use state diagram schematically showing driving of an angular velocity detection unit in the MEMS element shown in FIG. 5. FIG. 6 is a plan view schematically showing a MEMS device according to a third embodiment of the present invention. FIG. 6 is a plan view schematically showing a MEMS device according to a fourth embodiment of the present invention. It is a schematic block diagram of an angular velocity detection part in the MEMS element shown in FIG. It is a schematic sectional drawing about the EE line | wire of an angular velocity detection part in the MEMS element shown in FIG. FIG. 6 is an explanatory view schematically showing a part of the MEMS element manufacturing process according to the second embodiment of the present invention shown in FIG.

  Objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments with reference to the accompanying drawings. In this specification, it should be noted that when adding reference numerals to the components of each drawing, the same components are given the same number as much as possible even if they are shown in different drawings. I must. The terms “first”, “second”, “one side”, “other side” and the like are used to distinguish one component from another component, and the component is the term It is not limited by. Hereinafter, in describing the present invention, detailed descriptions of known techniques that may obscure the subject matter of the present invention are omitted.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  1 is a plan view schematically showing a MEMS device according to a first embodiment of the present invention, FIG. 2 is a schematic cross-sectional view taken along line AA of the MEMS device shown in FIG. 1, and FIG. It is a schematic sectional drawing about the BB line of the MEMS element shown.

  As shown, the MEMS element 100 includes a mass body 110, a flexible beam 120, and a support part 130. Sensing means 140 is formed on the flexible beam 120, and the electrode pad 150 is formed on the support part 130. Is formed. A pair of support portions 130 are arranged in parallel to each other on both sides of the mass body.

  More specifically, the mass body 110 is displaced by an inertial force, a Coriolis force, an external force, a driving force, and the like, and includes a central mass body 110a and a plurality of peripheral mass bodies 110b, 110c, 110d, and 110e. In addition, the central mass body 110a is formed in a diamond shape, and the peripheral mass bodies 110b, 110c, 110d, and 110e are integrally formed so as to extend from corners of the central mass body 110a, and are formed in a triangular shape.

  In addition, as shown in the figure, the peripheral mass bodies 110b, 110c, 110d, and 110e are connected to the central mass body so as to be separated from the adjacent peripheral mass bodies to form a space portion, and the space portions are flexible. A beam 120 is disposed.

  By being configured as described above, the mass body 110 formed of the central mass body 110a and the peripheral mass bodies 110b, 110c, 110d, and 110e is generally rectangular.

  Next, one end of the flexible beam 120 is connected to the central mass body 110 a and the other end is connected to the support part 130. Accordingly, the mass body 110 is supported in a floating state so as to be displaceable by the flexible beam 120 and the support unit 130.

  More specifically, the flexible beam 120 is coupled to four surfaces of the central mass body 110a and arranged in an X shape.

  As a result, the flexural rigidity is inversely proportional to the cube of the length, so that the flexible beam 120 is arranged in an X shape, so that the length is increased by √2 times compared to the case where it is arranged in a + shape. Thus, an effect of 2√2 times reduction in rigidity can be obtained, and the sensitivity is improved about 3 times.

  Further, as described above, the sensing unit 140 is formed on one surface of the flexible beam 120. The sensing unit 140 may be formed using a piezoelectric body, a piezoresistive body, a capacitance detection electrode, or the like for sensing the displacement of the mass body 110.

  In addition, the flexible beam 120 may include not only the sensing unit 140 but also a driving unit (not shown) that generates a displacement of the mass body 110. At this time, the driving means can be formed using a piezoelectric method or a capacitance method.

  Next, a pair of the support parts 130 are arranged in parallel so as to face each other on both sides of the mass body 110. In addition, the flexible beam 120 is coupled to the support part 130 and protrudes toward one end of the flexible beam so that the flexible beam 120 disposed in an X shape can be coupled more stably. Protruding coupling portions 131 corresponding to the ends of the flexible beam 120 are formed at both ends.

  With this configuration, the MEMS device 100 according to the first embodiment of the present invention has the maximum length of the beam by connecting the mass body 110 to the flexible beam 120 arranged in an X shape. Therefore, the sensitivity is improved, and the support unit 130 is disposed in parallel on the both sides of the mass body 110, so that downsizing is realized.

  The MEMS device according to the first embodiment of the present invention may include an acceleration sensor and an angular velocity sensor.

  FIG. 4 is an explanatory view schematically showing a part of the MEMS device manufacturing process according to the first embodiment of the present invention.

  As shown in the figure, when a plurality of the MEMS elements 100 are aligned and diced as indicated by a dotted line, the individual MEMS elements shown in FIG. 1 can be obtained.

  For this purpose, the device wafer and a lower cap wafer (not shown) are bonded after wafer level bonding and then diced. Also, the lower cap can be replaced with an ASIC or other sensor chip. In this case, electrical connection can be established by wafer bonding between the element and the hub chip by half dicing. In addition, if TSV (Through Silicon Via technology) is used, electrical connection is made through the support portion, and therefore full dicing can be applied.

  FIG. 5 is a plan view schematically showing a MEMS device according to a second embodiment of the present invention, FIG. 6 is a schematic cross-sectional view taken along the line CC of the angular velocity detector in the MEMS device shown in FIG. FIG. 6 is a schematic cross-sectional view taken along the line DD of the angular velocity detection unit in the MEMS element shown in FIG. 5.

  As shown in the figure, the MEMS element 200 includes an acceleration detection unit 210 for detecting displacement of the first mass body 211 and an angular velocity detection unit 220 for driving and detecting displacement of the second mass body 221. The part 210 and the angular velocity detection part 220 are formed of the MEMS element 200 formed into one chip by a support part 230 connected in parallel on both sides.

  That is, the angular velocity detection unit 210 and the acceleration detection unit 220 are connected to a pair of parallel support units 230.

  More specifically, the acceleration detection unit 210 includes a first mass body 211, a flexible beam 212, and a support unit 230, and the flexible beam 212 is disposed in an X shape. 211 and a support part 230 are connected to form a sensing means 213, and an electrode pad 231 is formed on the support part 230.

  The acceleration detection unit 210 is the same as the MEMS element shown in FIG. 1, and the detailed technical configuration, shape, and organic combination thereof are also the same.

  Next, the angular velocity detection unit 220 includes a second mass body 221, a first flexible part 222, a second flexible part 223, and a support part 230. The support part 230 is formed with a coupling part 232 and a protrusion part 233.

  The second flexible part 223 includes a sensing unit 224 and a driving unit 225. As described above, the support unit 230 includes an electrode pad 231.

  More specifically, the second mass body 221 is displaced by inertial force, Coriolis force, external force, driving force, and the like, and the first flexible portion 222 is coupled to both sides in the Y-axis direction at the center. The second flexible part 223 is coupled to both ends in the X-axis direction.

  In addition, protruding coupling portions 221 a may be further formed at both ends of the second mass body 221. The protruding coupling part 221a is for coupling the second flexible part 222 and the second mass body 221, and is formed integrally with the second mass body 221 or separately from the second mass body 221. It can be bonded to the two mass body 221. And although the said mass body 221 was shown as a hexahedron, it is not limited to this, It is clear that it can be formed in all the shapes known to the technical field of this invention.

  Next, the first flexible part 222 is a hinge having a predetermined thickness in the X-axis direction and having a surface formed by the Y-axis and the Z-axis, as shown in the cross-sectional views of FIGS. 6 and 7.

  The second flexible portion 223 is a beam having a predetermined thickness in the Z-axis direction and a surface formed by the X-axis and the Y-axis.

  In addition, the first flexible part 222 and the second flexible part 223 are disposed in a direction orthogonal to each other.

  Hereinafter, in the MEMS device 200 according to the second embodiment of the present invention, the shape, organic coupling, and implementation of the technology of the first flexible part 222 and the second flexible part 223 of the angular velocity detecting unit 220 will be described in detail.

  The first flexible part 222 connects the second mass body 221 and the coupling part 232 such that the mass body 221 causes displacement with reference to the coupling part 232 of the support part 230.

  That is, one end of the first flexible portion 222 is coupled to both sides of the center portion of the mass body 221 in the Y-axis direction, and the other end is coupled to the coupling portion 232 of the support portion 230. With this configuration, the mass body 221 is fixed to the coupling portion 232 of the support portion 230 and rotates with respect to the Y-axis direction, and the first flexible portion 222 serves as a hinge for this purpose. do.

  Next, the second flexible part 223 has one end connected to the mass body 221 and the other end connected to the protruding part 233 of the support part 230. More specifically, the second flexible part 223 has one end coupled to the projecting coupling part 221a formed at both ends of the mass body 221, and the other end in the X-axis direction coupled to the projecting part 233, respectively. Is done. That is, as shown in FIG. 5, one end of the second flexible part 223 is coupled to a pair of projecting parts 233 that project toward the second mass body 221 in the support parts 230 arranged in parallel, The ends are respectively coupled to the protruding coupling portions 221a.

  At this time, the other end of the second flexible part 223 connected to the protruding part 233 is rotated by the mass body 221 compared to one end of the second flexible part 223 connected to the protruding coupling part 221a of the mass body 221. It is formed close to the axis (Y axis). That is, the protrusion 233 to which the second flexible portion 223 is fixed is positioned closer to the rotation axis (Y axis) of the mass body 110. If the protrusion 233 to which the second flexible part 223 is fixed exactly coincides with the rotation axis (Y axis) of the second mass 221, the second flexible part 223 is rotated even if the second mass 221 rotates. The length of no change.

  Therefore, like the angular velocity detector 220 of the MEMS element 200 according to the second embodiment of the present invention, the protrusion 233 to which the second flexible part 223 is fixed is on the rotation axis (Y axis) of the second mass 221. If the second mass body 221 is rotated, the change in the length of the second flexible part 223 can be minimized when the second mass body 221 rotates.

  That is, as shown in FIG. 9, one end of the second flexible part 223 connected to the protrusion 233 is compared to the other end of the second flexible part 223 connected to the second mass body 221. When it is located far from the rotation axis of the two mass bodies, it can be confirmed that the tension suddenly increases depending on the rotation angle of the mass body as indicated by line A.

  On the other hand, one end of the second flexible part 223 connected to the protrusion 233 has a rotation axis (Y of the mass 221 compared to the other end of the second flexible part 223 connected to the second mass 221. 9, that is, when implemented like the angular velocity detection unit 220 of the MEMS element 200 shown in FIG. 5, the tension is loosened according to the rotation angle of the second mass 221 as shown by the line B in FIG. 9. Will increase.

  As a result, in the MEMS element 200 according to the second embodiment of the present invention, when the second mass body 221 of the angular velocity detector rotates, the tension acting on the second flexible part 223 does not increase rapidly. Therefore, since the rigidity of the second flexible part 223 does not increase abruptly, it is possible to obtain an effect capable of preventing the driving displacement and the sensing displacement of the second mass body 221 from being limited.

  In addition, since the tension of the second flexible portion 223 does not change abruptly, there is an advantage that noise (Noise) can be prevented from increasing while the resonance frequency changes abruptly.

  FIG. 8 is a schematic explanatory diagram for driving the angular velocity detector in the MEMS element shown in FIG.

  Based on FIG.7 and FIG.8, the drive of the 2nd mass body of the said angular velocity detection part is demonstrated in detail.

As illustrated, the second flexible portion 223 has a width (W ₂ ) in the Y-axis direction larger than a thickness (t ₂ ) in the Z-axis direction, and the first flexible portion 222 has a width (W ₁ ) in the Z-axis direction. ) Can be formed larger than the thickness (t ₁ ) in the X-axis direction.

Thus, since the width (W ₁ ) in the Z-axis direction of the first flexible part 222 is larger than the thickness (t ₁ ) in the X-axis direction, does the second mass body 221 rotate with respect to the X-axis? While translation in the Z-axis direction is restricted, it can rotate relatively freely with reference to the Y-axis.

  More specifically, the second mass body 221 is based on the Y axis as the rigidity when the first flexible portion 222 is rotated with respect to the X axis is larger than the rigidity when the first flexible portion 222 is rotated with respect to the Y axis. While it can rotate freely, it is limited to rotate about the X axis.

  Similarly, as the rigidity when the first flexible portion 222 is translated in the Z-axis direction is larger than the rigidity when the first flexible portion 222 is rotated with respect to the Y-axis, the second mass body 221 is based on the Y-axis. While it can rotate freely, translation in the Z-axis direction is limited. Accordingly, as the value of (the rigidity when rotating with respect to the X axis or the rigidity when translating in the Z axis direction) / (the rigidity when rotating with respect to the Y axis) of the first flexible portion 222 increases, The second mass body 221 freely rotates with respect to the Y axis, but is limited to rotate with respect to the X axis or to translate in the Z axis direction.

Further, if the relationship among the width (W ₁ ) in the Z-axis direction, the length (L) in the Y-axis direction, the thickness (t ₁ ) in the X-axis direction and the rigidity in each direction of the first flexible portion 222 is arranged. It is as follows.

(1) Rigidity when rotating with respect to the X axis of the first flexible portion 222 or rigidity when translating in the Z-axis direction ∝t ₁ × W ₁ ³ / L ³

(2) Rigidity と き t ₁ ³ × W ₁ / L when rotating with respect to the Y axis of the first flexible portion 222

According to the above two formulas, the rigidity of the first flexible part 222 (the rigidity when the X axis is rotated with respect to the reference or the rigidity when the X axis is translated in the Z axis direction) / (the rigidity when rotating with respect to the Y axis) The value is proportional to (W ₁ / (t ₁ L)) ² .

However, since the first flexible portion 222 according to the present embodiment has a width (W ₁ ) in the Z-axis direction larger than a thickness (t ₁ ) in the X-axis direction, (W ₁ / (t ₁ L)) ² is As a result, the value of (stiffness when rotating in the X-axis direction or rigidity when translating in the Z-axis direction) / (stiffness when rotating with respect to the Y-axis) value of the first flexible portion 222 is increased. It becomes like this.

  As described above, depending on the characteristics of the first flexible part 222, the second mass body 221 can freely rotate with respect to the Y axis, but can rotate with respect to the X axis or translate in the Z axis direction. Limited.

  On the other hand, since the second flexible portion 223 has a relatively high rigidity in the longitudinal direction (X-axis direction), the second mass body 221 rotates around the Z-axis or translates in the X-axis direction. Can be limited. Further, since the first flexible portion 222 has a relatively high rigidity in the longitudinal direction (Y-axis direction), the second mass body 221 can be restricted from translating in the Y-axis direction.

  Eventually, due to the characteristics of the first flexible part 222 and the second flexible part 223, the second mass body 221 can rotate with respect to the Y axis, but rotates with respect to the X axis or the Z axis. Then, translation in the Z-axis, Y-axis, or X-axis direction is limited. That is, Table 1 shows the direction in which the second mass body 221 can move.

  As described above, the second mass body 221 can rotate with respect to the Y axis, but is restricted from moving in the remaining direction, so that the displacement of the mass body 221 can be changed in a desired direction (Y axis). Can be generated only for the force of rotation). As a result, the angular velocity detector 220 of the MEMS device 200 according to the second embodiment of the present invention can prevent the occurrence of crosstalk when measuring acceleration or force, and can resonate when measuring angular velocity. Mode interference can be eliminated.

  10A and 10B are usage state diagrams schematically showing driving of the angular velocity detector in the MEMS element shown in FIG.

  As shown in the drawing, the second mass body 221 rotates about the Y axis as a rotation axis, so that a bending stress in which a compressive stress and a tensile stress are combined is generated in the second flexible portion 223, and the first flexible body Torsional stress is generated in the portion 222 with reference to the Y axis. At this time, in order to generate a large amount of talk (Torque) in the mass body 221, the first flexible portion 222 can be provided above the weight center (C) of the mass body 221 with respect to the Z-axis direction.

  On the other hand, when the second flexible part 223 is formed relatively wider than the first flexible part 222 when viewed on the plane formed by the X axis and the Y axis, the second flexible part 223 is formed. The unit 223 may include a sensing unit 224 that senses the displacement of the second mass body 221. Here, the sensing means 224 is for sensing the displacement of the second mass body 221 rotating with respect to the Y axis. The sensing means 224 is not particularly limited, and can be formed using a piezoelectric method, a piezoresistive method, a capacitance method, an optical method, or the like.

  In addition, the second flexible part 223 may include a driving unit 225 that generates a displacement of the second mass body 221. At this time, the driving means can be formed using a piezoelectric method or a capacitance method.

  Next, the coupling part 232 and the protruding part 233 of the support part 230 support the first flexible part 222 and the second flexible part 223, respectively, and secure a space in which the second mass body 221 can cause displacement. When a displacement occurs in the second mass body 221, it serves as a reference.

  Further, the positions of the coupling part 232 and the protruding part 233 are not particularly limited as long as they are provided outside the second mass body 221. However, when the mass body 221 rotates with respect to the Y axis, in order to prevent a sudden increase in the tension acting on the second flexible portion 223, the second flexible portion 223 is The protruding portion 233, which is positioned adjacent to the second mass body 221, and to which one end of the second flexible portion 223 is coupled, is disposed adjacent to the second mass body 221 with respect to the Y axis. be able to.

  With this configuration, the MEMS element 200 according to the second embodiment of the present invention includes the acceleration detection unit 210 and the angular velocity detection unit 220 at the same time, and is connected by two support units arranged in parallel to detect acceleration. The partition part which divides the part 210 and the angular velocity detection part 220 becomes unnecessary, and it becomes possible to obtain a MEMS element which can be miniaturized and made into one chip.

  FIG. 11 is a plan view schematically showing a MEMS device according to a third embodiment of the present invention.

  As shown in the figure, the MEMS element 300 differs from the MEMS element 200 according to the second embodiment shown in FIG.

  More specifically, the MEMS element 300 includes an acceleration detection unit 310 for detecting the displacement of the first mass body 311 and an angular velocity detection unit 320 for driving and detecting the displacement of the second mass body 321, and the acceleration detection. The unit 310 and the angular velocity detection unit 320 are MEMS elements formed into one chip by support units 330 connected in parallel to both sides.

  That is, the angular velocity detection unit 310 and the acceleration detection unit 320 are connected to a pair of parallel support units 330.

  More specifically, the acceleration detection unit 310 includes a first mass body 311, a flexible beam 312 and a support unit 330, and the flexible beam 312 is arranged in an X shape. , A sensing means 313 is formed, and an electrode pad 331 is formed on the support 330.

  The acceleration detection unit 310 is the same as the MEMS element shown in FIG. 1, and the detailed technical configuration, shape, and organic combination thereof are also the same.

  Next, the angular velocity detection unit 320 includes a second mass body 321, a first flexible portion 322, a second flexible portion 323, and a support portion 330. The support part 330 is formed with an electrode pad 331 and a coupling part 332.

  The second flexible part 323 includes a sensing unit 324 and a driving unit 325.

  Further, the angular velocity detection unit 320 has an organic coupling relationship between the support unit, the first flexible unit, and the second flexible unit, as compared with the angular velocity detection unit 220 of the MEMS element 200 according to the second embodiment shown in FIG. Is different.

  More specifically, the angular velocity detection unit 320 includes a first flexible part 322 coupled to the center of the second mass body 321 on both sides in the Y-axis direction, and second flexible parts on both ends in the X-axis direction. 323 are combined. In addition, the first flexible part 322 is connected to the coupling part 333 of the support part 330, one end of the second flexible part 323 is coupled to the first flexible part 322, and the other end to the second mass body 321. Combined.

  That is, by coupling the second flexible portion 323 to the first flexible portion, one end of the second flexible portion 323 substantially coincides with the rotation axis (Y axis) of the second mass body 321. .

  Therefore, even if the second mass body 321 rotates with respect to the Y axis, the length of the second flexible portion 323 is hardly changed. That is, when the second mass body 321 rotates, if the change in the length of the second flexible portion 323 is minimized, the tension acting on the second flexible portion 323 does not increase rapidly. Therefore, since the rigidity of the second flexible part 323 does not increase abruptly, there is an effect that it is possible to prevent the driving displacement and the sensing displacement of the second mass body 321 from being limited.

  In addition, since the tension of the second flexible portion 323 does not change abruptly, there is an advantage that noise (Noise) can be prevented from increasing while the resonance frequency changes abruptly. Meanwhile, as described above, the second flexible part 323 can be connected to the protruding coupling part 321a formed on the second mass body 321.

  The detailed technical configuration, shape, organic combination and technical implementation of the angular velocity detector 320 of the MEMS device according to the third embodiment of the present invention are the same as those of the angular velocity detector 320 of the MEMS device according to the second embodiment. Therefore, the description thereof is omitted.

  FIG. 12 is a plan view schematically showing a MEMS device according to a fourth embodiment of the present invention, and FIG. 13 is a schematic cross-sectional view taken along line EE of the angular velocity detector in the MEMS device shown in FIG.

  As shown in the figure, the MEMS element 400 is different from the MEMS element 200 according to the second embodiment shown in FIG.

  More specifically, the MEMS element 400 includes an acceleration detection unit 410 for detecting displacement of the first mass body 411 and an angular velocity detection unit 420 for driving and detecting displacement of the second mass body 421. The part 410 and the angular velocity detection part 420 are formed of the MEMS element 400 formed into one chip by the support part 430 connected in parallel to both sides.

  That is, the angular velocity detection unit 410 and the acceleration detection unit 420 are connected to a pair of parallel support units 230.

  More specifically, the acceleration detection unit 410 includes a first mass body 411, a flexible beam 412 and a support unit 430, and the flexible beam 412 is arranged in an X shape. , A sensing unit 413 is formed, and an electrode pad 431 is formed on the support part 430.

  The acceleration detection unit 410 is the same as the MEMS element shown in FIG. 1, and the detailed technical configuration, shape, and organic combination thereof are also the same.

  Next, the angular velocity detection unit 420 is different from the angular velocity detection units 220 and 320 of the MEMS element according to the second and third embodiments described above in the presence or absence of the anchor 426.

  More specifically, the angular velocity detector 420 includes a second mass body 421, a first flexible part 422, a second flexible part 423, an anchor 426, and a support part 430. In addition, as described above, the electrode pad 431 is formed on the support portion 430, and in addition, a coupling portion 432 for coupling the first flexible portion 422 is formed.

  In addition, the second flexible part 423 includes a sensing unit 424 and a driving unit 425.

  The second mass body 421 includes a one-side mass body 421a, another-side mass body 421b, and a connecting mass body 421c. Further, the one-side mass body 421a and the other-side mass body 421b have the same size and shape, and can be arranged parallel to the X-axis direction.

  Further, the connecting mass body 421c is connected so that a space portion is formed by separating the one-side mass body 421a and the other-side mass body 421b, and FIG. 12 shows the one-side mass body 421a as an example. And those connected to both ends of the other-side mass body 421b.

  In addition, the one side mass body 421a, the other side mass body 421b, and the connection mass body 421c of the second mass body 421 may be integrally configured to have a hollow portion therein.

  The first flexible portion 422 is coupled to the center portions of the one-side mass body 421a and the other-side mass body 421b in the Y-axis direction toward the support portion 430, respectively. The first flexible part 422 is coupled to the coupling part 432 of the support part 430, so that the second mass body 421 is supported in a floating state so as to be displaceable.

  Next, the anchor 426 supports the second flexible portion 423 so that the second mass body 421 causes displacement, and serves as a reference when the second mass body 421 is displaced. Here, the position of the anchor 426 is not particularly limited as long as the anchor 426 is provided so as to be positioned in the space part inside the second mass body 421. For example, the anchor 426 may be provided in a space between the one-side mass body 421a and the other-side mass body 421b. In addition, the anchor 426 is positioned at an intermediate portion of the second mass body 421 with respect to the X-axis direction, and the second flexible portion 423 is connected to both ends.

  The second flexible part 423 serves to connect the second mass body 421 and the anchor 423 so that the second mass body 421 causes displacement with respect to the anchor 426.

  More specifically, the second flexible part 423 is formed to extend in the X-axis direction, one end is connected to the connecting mass body 421c of the second mass body 421, and the other end is connected to the anchor 426.

  At this time, one end of the second flexible part 423 connected to the anchor 426 is more than the other end of the second flexible part 423 connected to the connection mass body 421c of the second mass body 421. It is located close to the rotation axis (Y axis) of the mass body 421.

  That is, a portion where the second flexible portion 423 is fixed (one end of the second flexible portion 423) is close to the rotation axis (Y axis) of the second mass body 421. If the fixed portion of the second flexible part 423 (one end of the second flexible part 423) coincides with the rotation axis (Y axis) of the second mass body 421, the second mass body 421 rotates. However, the length of the second flexible portion 423 does not change.

  Accordingly, the fixed part of the second flexible part 423 (the other end of the second flexible part 423) is the second mass body like the angular velocity detecting part 420 of the MEMS element according to the fourth embodiment of the present invention. If the second mass body 421 rotates when the second mass body 421 rotates, a change in the length of the second flexible portion 423 can be minimized. As described above, when the second mass body 421 rotates, if the change in the length of the second flexible portion 423 is minimized, the tension acting on the second flexible portion 423 does not increase rapidly.

  Eventually, since the rigidity of the second flexible part 423 does not increase abruptly, it is possible to prevent the driving displacement and the sensing displacement of the second mass body 421 from being limited. In addition, since the tension of the second flexible portion 423 does not change abruptly, there is an advantage that noise (Noise) can be prevented from increasing while the resonance frequency changes abruptly.

  In addition, the first flexible part 422 connects the second mass body 421 and the support part 430 so that the second mass body 421 causes displacement with reference to the anchor 426 or the fixing part 432 of the support part 430. To play a role.

  Further, the first flexible part 422 and the second flexible part 423 are arranged in a direction orthogonal to each other.

That is, the first flexible portion 422 is formed to correspond to the Y axis, while the second flexible portion 423 is formed to extend in the X axis direction, and the width (W ₂ ) is in the Z axis direction. greater than the thickness of the _{(t 2),} the first flexible portion 422 can be Z-axis direction of the width _{(W 1)} is larger than the thickness of the X-axis direction _{(t 1).}

  Due to the characteristics of the first flexible part 422 and the second flexible part 423, the second mass body 421 has a Y axis similar to the angular velocity detection part 220 of the MEMS element 200 according to the first embodiment described above. Can be rotated with reference to the X axis or the Z axis, and translation in the Z axis, Y axis or X axis direction is limited.

  The detailed technical configuration, shape, organic combination and technical implementation of the MEMS device angular velocity detector 420 according to the fourth embodiment of the present invention are the same as those of the MEMS device according to the second embodiment. Since it is the same, the description is omitted.

  In addition, the MEMS device according to the present invention can be used in various fields. For example, the MEMS device according to the present invention may be implemented on a single chip including an angular velocity sensor, an acceleration sensor, an actuator, or the like.

  FIG. 12 is an explanatory view schematically showing a part of the MEMS device manufacturing process according to the second embodiment of the present invention.

  As shown in the figure, when a plurality of the MEMS elements 200 are aligned and diced as indicated by a dotted line, the individual MEMS elements shown in FIG. 5 can be obtained.

  For this purpose, dicing is performed after wafer level bonding of an element wafer and a lower cap wafer (not shown). Also, the lower cap can be replaced with an ASIC or other sensor chip. In this case, electrical connection can be established by wafer bonding between the element and the hub chip by half dicing. In addition, if TSV (Through Silicon Via technology) is used, full dicing (Full dicing) can be applied by making electrical connection through the support portion.

  As described above, the present invention has been described in detail based on the specific embodiments. However, the present invention is only for explaining the present invention, and the present invention is not limited thereto. It will be apparent to those skilled in the art that modifications and improvements within the technical idea of the present invention are possible.

  All simple variations and modifications of the present invention belong to the scope of the present invention, and the specific scope of protection of the present invention will be apparent from the appended claims.

  The present invention can be used for various purposes, from military use such as satellites, missiles, unmanned aircraft, to airbags, ESCs, black boxes for vehicles, camcorder hand shake prevention, mobile phone and game machine motion detection, and navigation. Applicable for use.

DESCRIPTION OF SYMBOLS 100 MEMS element 110 Mass body 110a Center mass body 110b, 110c, 110d, 110d, 110e Peripheral mass body 120 Flexible beam 130 Support part 131 Protrusion coupling part 140 Sensing means 200 MEMS element 210 Acceleration detection part 211 1st mass body 212 Flexible beam 220 Angular velocity detection unit 221 Second mass 221a Protrusion coupling unit 222 First flexible unit 223 Second flexible unit 224 Sensing unit 225 Driving unit 230 Support unit 231 Electrode pad 232 Coupling unit 233 Projection unit 300 MEMS element 310 Acceleration detection unit 311 First mass body 312 Flexible beam 320 Angular velocity detection unit 321 Second mass body 322 First flexible unit 323 Second flexible unit 324 Sensing unit 325 Driving unit 330 Support unit 331 Electrode pad 332 Coupling unit 400 MEMS Element 410 Acceleration detection unit 411 First mass body 412 Flexible beam 420 Angular velocity detection unit 421 Second mass body 421a One side mass body 421b Other side mass body 421c Connection mass body 422 First flexible portion 423 Second flexible portion 424 sensing means 425 driving means 426 anchor 430 supporting portion 431 electrode pad 432 coupling portion

Claims (31)

Mass body;
A flexible beam connected to both ends of the mass body, arranged in an X-shape and formed with sensing means; and a pair of flexible beams combined and arranged parallel to each other on both sides of the mass body A MEMS element including a support part. The mass body is
A rhomboid central mass; and a plurality of peripheral masses respectively connected to corners of the central mass;
The peripheral mass body is connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam is disposed in the space portion. Item 4. The MEMS element according to Item 1.   2. The support part according to claim 1, wherein the support part protrudes toward one end of the flexible beam, and a protruding coupling part corresponding to the end part of the flexible beam is formed at both ends. The MEMS element as described. An acceleration detection unit including a first mass body, a flexible beam connected to the first mass body, arranged in an X shape, and formed with sensing means; and a second mass body and the second mass body And an angular velocity detection unit including a flexible unit formed with a sensing unit and a driving unit,
The acceleration detection unit and the angular velocity detection unit are MEMS elements connected to a pair of parallel support units.   The flexible part of the angular velocity detection unit includes a first flexible part having one end connected to both sides of the center part of the second mass body and the other end connected to a support part, and both end parts of the second mass body. 5. The MEMS device according to claim 4, further comprising: a second flexible portion having one end coupled to the first end and the other end coupled to the support portion.   The MEMS element according to claim 5, wherein the first flexible part and the second flexible part are arranged in an orthogonal direction. The angular velocity detector
The first flexible part is coupled to the center of the second mass body in the Y-axis direction;
The MEMS element according to claim 5, wherein the second flexible part is coupled to both ends of the second mass body, and the second mass body rotates with respect to the Y-axis direction.   The MEMS device of claim 7, wherein the second flexible part includes a sensing unit and a driving unit.   The MEMS element according to claim 7, wherein the second flexible part is coupled to both ends of the second mass body in the X-axis direction. 8. The MEMS element according to claim 7, wherein the first flexible part has a width (W ₁ ) in the Z-axis direction larger than a thickness (t ₁ ) in the X-axis direction. 8. The MEMS element according to claim 7, wherein the second flexible part has a width (W ₂ ) in the Y-axis direction larger than a thickness (t ₂ ) in the Z-axis direction.   The support portion includes a coupling portion to which the first flexible portion is coupled and a protruding portion to which the second flexible portion is coupled, and the projecting portion projects toward the second mass body. The MEMS element according to claim 5, wherein: The second mass body has protruding coupling portions formed at both ends,
The MEMS device according to claim 12, wherein one end of the second flexible part is coupled to the projecting and coupling part of the second mass body, and the other end is coupled to the projecting part of the supporting part.   One end of the second flexible part coupled to the support part is closer to the rotation axis (Y axis) of the second mass body than the other end of the second flexible part coupled to the second mass body. The MEMS device according to claim 13, wherein the MEMS device is located close to the MEMS device.   6. The MEMS element according to claim 5, wherein the first flexible part is coupled to the upper side of the weight center (C) of the second mass body with respect to the Z-axis direction. The first mass body of the acceleration detection unit includes a rhombus center mass body and a plurality of peripheral mass bodies respectively connected to corner portions of the center mass body,
The peripheral mass body is connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam is disposed in the space portion, The MEMS element according to claim 4.   The support portion may protrude toward one end of the flexible beam of the acceleration detection portion, and a protruding coupling portion corresponding to the end portion of the flexible beam may be formed at both ends. The MEMS element according to claim 4. An acceleration detection unit including a first mass body, a flexible beam connected to the first mass body, arranged in an X shape, and formed with sensing means; and a second mass body and the second mass body And an angular velocity detection unit including a flexible unit formed with a sensing unit and a driving unit,
The acceleration detection unit and the angular velocity detection unit are connected to a pair of parallel support units,
The flexible part of the angular velocity detector is
One end is connected to both sides of the center of the second mass body, the other end is connected to the support portion, one end is coupled to both ends of the second mass body, and the other end is the A second flexible part coupled to the first flexible part,
The MEMS element, wherein the first flexible part and the second flexible part are arranged in an orthogonal direction. The angular velocity detector
The first flexible part is coupled to the center of the second mass body in the Y-axis direction;
The MEMS device according to claim 18, wherein the second flexible part is coupled to both ends of the second mass body in the X-axis direction, and the second mass body rotates with respect to the Y-axis direction. .   The MEMS device of claim 19, wherein the second flexible part includes a sensing unit and a driving unit. 20. The MEMS element according to claim 19, wherein the first flexible part has a width (W ₁ ) in the Z-axis direction larger than a thickness (t ₁ ) in the X-axis direction. The MEMS element according to claim 19, wherein the second flexible part has a width (W ₂ ) in the Y-axis direction larger than a thickness (t ₂ ) in the Z-axis direction. The first mass body of the acceleration detection unit includes a rhombus center mass body and a plurality of peripheral mass bodies respectively connected to corner portions of the center mass body,
The peripheral mass body is connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam is disposed in the space portion, The MEMS device according to claim 18.   The support portion may protrude toward one end of the flexible beam of the acceleration detection portion, and a protruding coupling portion corresponding to the end portion of the flexible beam may be formed at both ends. The MEMS element according to claim 18. An acceleration detection unit including a first mass body, a flexible beam connected to the first mass body, arranged in an X shape, and formed with sensing means; and a second mass body and the second mass body And an angular velocity detecting unit including a flexible part formed with sensing means and a driving means, and an anchor located inside the second mass body, the second mass body being connected to the flexible part. ,
The acceleration detection unit and the angular velocity detection unit are MEMS elements connected to a pair of parallel support units.   The second mass body includes a one-side mass body, an other-side mass body, and a connection mass body, and the connection mass body forms a space portion by separating the one-side mass body and the other-side mass body from each other. 26. The MEMS device according to claim 25, wherein the one side mass body and the other side mass body are connected to the support portion by a flexible portion. The flexible part is
A first flexible part having one end connected to the center of each of the one side mass body and the other side mass body, and the other end connected to the support part; and one end coupled to the connection mass body, and the other end A second flexible portion coupled to the anchor;
The MEMS element according to claim 25, wherein the first flexible part and the second flexible part are arranged in an orthogonal direction. Wherein the first flexible member is characterized in that the Z-axis direction of the width (W ₁₎ is formed larger than the thickness of the X-axis direction (t _1), MEMS device of claim 27. It said second flexible section, Y-axis direction of the width (W ₂₎ is characterized in that it is formed larger than the thickness of the Z-axis direction (t _2), MEMS device of claim 27. The first mass body of the acceleration detection unit includes a rhombus center mass body and a plurality of peripheral mass bodies respectively connected to corner portions of the center mass body,
The peripheral mass body is connected to the central mass body so that a space portion is formed between adjacent peripheral mass bodies, and a flexible beam is disposed in the space portion, The MEMS device according to claim 25.   The support portion may protrude toward one end of the flexible beam of the acceleration detection portion, and a protruding coupling portion corresponding to the end portion of the flexible beam may be formed at both ends. The MEMS device according to claim 25.

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