JP2014212591A - Linear driving unit - Google Patents

Linear driving unit Download PDF

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JP2014212591A
JP2014212591A JP2013086577A JP2013086577A JP2014212591A JP 2014212591 A JP2014212591 A JP 2014212591A JP 2013086577 A JP2013086577 A JP 2013086577A JP 2013086577 A JP2013086577 A JP 2013086577A JP 2014212591 A JP2014212591 A JP 2014212591A
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guide shaft
linear actuator
hole
linear
drive unit
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JP6087709B2 (en
JP2014212591A5 (en
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西谷 仁志
Hitoshi Nishitani
仁志 西谷
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Canon Inc
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Canon Inc
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction

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Abstract

PROBLEM TO BE SOLVED: To provide a linear driving unit which reduces an amount of abrasion powder generated in a linear actuator and diffusing to a driven member side space of a dust-proof wall through a through hole.SOLUTION: A linear driving unit includes: a linear actuator 1 which enables driving in a straight manner; a wall member 5 which isolates a region where the linear actuator is driven in the straight manner from other regions; and a guide shaft 3 having a transmission portion 4 connected with the linear actuator and a driven member. The wall member is provided with bearing parts 5a, 5b which support the guide shaft extending in a straight driving direction; a through hole 5c through which the transmission portion penetrates; and a surface 5d contacting with the guide shaft at a part of or an entire periphery of the through hole.

Description

本発明は、リニアアクチュエータを有するリニア駆動ユニットに関し、特に、摩耗粉が発生しやすいリニアアクチュエータ、異物を嫌う光学装置、等に応用されるリニア駆動ユニットである。 The present invention relates to a linear drive unit having a linear actuator, and in particular, is a linear drive unit applied to a linear actuator that easily generates wear powder, an optical device that dislikes foreign matters, and the like.

図4は、従来のリニア駆動ユニットを利用したレンズ鏡筒を説明する図である。図4(a)はレンズ鏡筒の正面図及び側面図(一部断面)である。図4(a)において、101は外枠、102はフォーカスレンズ、103はフォーカスレンズホルダ、104、105はフォーカスレンズホルダ103を支持し光軸方向(図示A)に案内するガイド軸である。また、106はフォーカスレンズホルダ103を光軸方向に駆動するリニア駆動ユニットである。図示されていないマイコンからの移動命令に従い、リニア駆動ユニット106が相当の距離を移動することにより、フォーカスレンズホルダ103に把持されたフォーカスレンズ102を合焦位置に到達させることができる。図4(b)はリニア駆動ユニット106の拡大図である。図4(b)において、201はリニアアクチュエータであって超音波振動する2つの突起を有する振動子、202は振動子ホルダ、203は振動子201を加圧するばね、204は振動子の突起が当接し摩擦駆動するスライダーである。また、205はスライダー204の裏面に回転摺動するローラ、206はばね203とローラ205の反力を受ける板金部材、207はレンズホルダ103と連結される駆動伝達部位である。図示されていない高周波給電手段により振動子201が超音波振動し、スライダー204に沿って摩擦駆動を行うことができる。 FIG. 4 is a diagram for explaining a lens barrel using a conventional linear drive unit. FIG. 4A is a front view and a side view (partial cross section) of the lens barrel. In FIG. 4A, 101 is an outer frame, 102 is a focus lens, 103 is a focus lens holder, and 104 and 105 are guide shafts that support the focus lens holder 103 and guide it in the optical axis direction (A in the figure). Reference numeral 106 denotes a linear drive unit that drives the focus lens holder 103 in the optical axis direction. When the linear drive unit 106 moves a considerable distance in accordance with a movement command from a microcomputer (not shown), the focus lens 102 held by the focus lens holder 103 can reach the in-focus position. FIG. 4B is an enlarged view of the linear drive unit 106. In FIG. 4B, 201 is a linear actuator having a vibrator having two protrusions that vibrate ultrasonically, 202 is a vibrator holder, 203 is a spring that pressurizes the vibrator 201, and 204 is a protrusion of the vibrator. It is a slider that contacts and frictionally drives. Reference numeral 205 denotes a roller that rotates and slides on the back surface of the slider 204, 206 denotes a sheet metal member that receives the reaction force of the spring 203 and the roller 205, and 207 denotes a drive transmission portion connected to the lens holder 103. The vibrator 201 is ultrasonically vibrated by a high-frequency power supply means (not shown), and friction drive can be performed along the slider 204.

図4(c)は振動子201と振動子ホルダ202の平面図及び正面図(一部断面)である。図4(c)において、301は振動子ホルダ202を光軸方向に直線的に案内するガイド軸、302は振動子ホルダ202に形成されたガイド軸301の軸受部である。また、303は振動子201の裏面に貼り付けられた圧電素子、304は圧電素子303とばね203の間に設けられた加圧板である。スライダー204だけでは振動子の直進性が保証できないが、ガイド軸301の案内作用により、振動子201と振動子ホルダ202は直線的に駆動することができる。以上のようなリニア駆動ユニットの作用及び機能の詳細について特許文献1に開示されている。 FIG. 4C is a plan view and a front view (partial cross section) of the vibrator 201 and the vibrator holder 202. 4C, reference numeral 301 denotes a guide shaft that linearly guides the vibrator holder 202 in the optical axis direction, and 302 denotes a bearing portion of the guide shaft 301 formed on the vibrator holder 202. Reference numeral 303 denotes a piezoelectric element attached to the back surface of the vibrator 201, and 304 denotes a pressure plate provided between the piezoelectric element 303 and the spring 203. Although the straightness of the vibrator cannot be guaranteed with the slider 204 alone, the vibrator 201 and the vibrator holder 202 can be linearly driven by the guide action of the guide shaft 301. The details of the operation and function of the linear drive unit as described above are disclosed in Patent Document 1.

圧電素子の超音波振動を利用したリニアアクチュエータは、小型で、高駆動力が得られ、広い速度レンジに対応でき、低騒音であるという特徴を有している優れたアクチュエータである。しかし、摩擦駆動を行うため摩耗粉が発生するという潜在的な課題がある。この課題は異物を嫌う装置、特にレンズ鏡筒等の光学機器において重大な不具合となりうる。レンズに異物の付着することによって、撮影画像に欠陥を生じる場合があること、異物が外部から見えることにより製品の品位を落とすこと、等がその不具合の例である。この課題に対する対策のため、従来から防塵壁を設けることが行われており、図4(b)において、208が防塵壁である。 A linear actuator using ultrasonic vibration of a piezoelectric element is an excellent actuator that is small in size, has a high driving force, can be used in a wide speed range, and has low noise. However, there is a potential problem that abrasion powder is generated due to friction drive. This problem can be a serious problem in an apparatus that dislikes foreign matter, particularly in an optical apparatus such as a lens barrel. Examples of such defects include the case where a foreign object adheres to the lens, which may cause a defect in a photographed image, and that the quality of a product is degraded when the foreign object is visible from the outside. In order to cope with this problem, a dustproof wall has been conventionally provided. In FIG. 4B, 208 is a dustproof wall.

図5は、図4(b)のB−B断面における振動子201、振動子ホルダ202、伝達部位207、ガイド軸301、防塵壁208等を図示したものである。(a)は振動子201と振動子ホルダ202が紙面の最下端側に到達した状態の図、(b)は振動子201と振動子ホルダ202が紙面の最上端側に到達した状態の図、(c)は防塵壁の右から見た側面図、である。図示の通り、伝達部位207は防塵壁208を通過してレンズホルダ103と連結されなければ直進駆動の伝達ができないので、図に示すCのような孔が必要である。故に、防塵壁208で或る程度の防塵効果があるものの、十分な防塵対策とは言い得ない。 FIG. 5 illustrates the vibrator 201, the vibrator holder 202, the transmission portion 207, the guide shaft 301, the dust-proof wall 208, and the like in the BB cross section of FIG. 4B. (A) is a diagram in a state in which the vibrator 201 and the transducer holder 202 have reached the lowermost side of the paper surface, (b) is a diagram in a state in which the vibrator 201 and the vibrator holder 202 have reached the uppermost side of the paper surface, (C) is the side view seen from the right of a dust-proof wall. As shown in the drawing, since the transmission part 207 cannot transmit the straight drive unless it passes through the dust-proof wall 208 and is connected to the lens holder 103, a hole like C shown in the drawing is necessary. Therefore, although the dustproof wall 208 has a certain degree of dustproof effect, it cannot be said that it is a sufficient dustproof measure.

又、図5(d)、(e)、(f)のように、更に伝達部位207と一体となって移動する壁207aを設けても、或る程度の防塵効果の向上があるものの、隙間Eが存在するので、やはり十分な防塵対策とは言えない。又、この隙間Eを弾性体によって封止することも可能ではあるが、摩擦負荷が増大し、かつ、その摩擦部材の摩耗粉が生じるので、適当な防塵対策と言えない。又、十分な防塵対策の例として蛇腹状のカバーを設ける特許文献2に記載の例があるが、小型化が望まれるレンズ鏡筒においては適当な防塵対策とは言えない。 Further, as shown in FIGS. 5D, 5E, and 5F, even if a wall 207a that moves integrally with the transmission portion 207 is provided, the dustproof effect is improved to some extent, but the gap Since E exists, it is still not a sufficient dustproof measure. Although it is possible to seal the gap E with an elastic body, the frictional load increases and wear powder of the friction member is generated, which is not an appropriate dustproof measure. Further, as an example of a sufficient dust-proof measure, there is an example described in Patent Document 2 in which a bellows-like cover is provided.

特開2001-292584号公報Japanese Patent Laid-Open No. 2001-292584 特開2006-202654号公報JP 2006-202654 A

従って、十分な防塵が達成できないことは、圧電素子の超音波振動を利用したリニアアクチュエータを採用したリニア駆動ユニットの潜在的な課題であり、特に、異物を嫌い、かつ、小型化が望まれるレンズ鏡筒等の光学機器にとって大きな課題であった。 Therefore, the fact that sufficient dust prevention cannot be achieved is a potential problem of a linear drive unit that employs a linear actuator that utilizes ultrasonic vibrations of a piezoelectric element. This was a major problem for optical instruments such as a lens barrel.

上記課題を解決するために、本発明のリニア駆動ユニットは、直進駆動可能なリニアアクチュエータと、前記リニアアクチュエータに隣接して設けられ前記リニアアクチュエータが直進駆動する領域と他の領域を空間的に隔離する壁部材と、前記リニアアクチュエータと当該リニア駆動ユニットの被駆動部材とに連結される伝達部位を有する直進駆動方向に延在するガイド軸と、を備える。そして、前記壁部材に、前記ガイド軸を支持する軸受部と、前記伝達部位が貫通する貫通孔と、前記貫通孔の周囲の一部又は全部において前記ガイド軸に接する面と、が設けられている。 In order to solve the above-described problems, a linear drive unit according to the present invention spatially separates a linear actuator that can be driven in a straight line, a region that is provided adjacent to the linear actuator and that drives the linear actuator, and another region. And a guide shaft extending in the rectilinear drive direction having a transmission portion connected to the linear actuator and a driven member of the linear drive unit. The wall member is provided with a bearing portion that supports the guide shaft, a through-hole through which the transmission portion passes, and a surface that contacts the guide shaft in part or all of the periphery of the through-hole. Yes.

本発明のリニア駆動ユニットでは、伝達部位を介してリニアアクチュエータと一体に設けられ直進駆動方向に延在するガイド軸が、壁部材の軸受部によって直進案内され、かつ、壁部材の貫通孔の周囲の一部又は全部に設けられた面に接している。これにより貫通孔が封止され、この封止構成により、リニアアクチュエータで発生した摩耗粉が貫通穴を通して壁部材の被駆動部材側の空間に拡散する量を低減ないし激減させることが可能となる。 In the linear drive unit of the present invention, the guide shaft that is provided integrally with the linear actuator via the transmission portion and extends in the straight drive direction is guided straight by the bearing portion of the wall member, and around the through hole of the wall member. It touches the surface provided in part or all of the. As a result, the through hole is sealed. With this sealing configuration, it is possible to reduce or drastically reduce the amount of wear powder generated by the linear actuator diffusing into the space on the driven member side of the wall member through the through hole.

本発明のリニア駆動ユニットの実施例の説明図。Explanatory drawing of the Example of the linear drive unit of this invention. 本発明のリニア駆動ユニットの実施例の説明図。Explanatory drawing of the Example of the linear drive unit of this invention. 本発明のリニア駆動ユニットの実施例の説明図。Explanatory drawing of the Example of the linear drive unit of this invention. 従来のリニア駆動ユニットの説明図。Explanatory drawing of the conventional linear drive unit. 従来のリニア駆動ユニットの説明図。Explanatory drawing of the conventional linear drive unit.

本発明では、直進駆動可能なリニアアクチュエータと、伝達部位によりリニアアクチュエータと一体にされたガイド軸と、リニアアクチュエータが直進駆動する領域と他の領域を空間的に隔離する壁部材と、を備える。そして、壁部材に、ガイド軸を支持する軸受部と、伝達部位が貫通する貫通孔と、貫通孔の周囲の一部又は全部にガイド軸に接する面と、が設けられている。ガイド軸に接する面は、貫通孔が効果的に封止されるようにガイド軸の表面形状に合わせた形状になっている。例えば、ガイド軸が円筒形であれば、ガイド軸に接する面は円筒面である。ガイド軸の断面は楕円形などの種々の形状であり得るので、それに合わせてガイド軸に接する面も種々の形状をとり得る。ただし、ガイド軸の直進駆動の摺動抵抗を低く抑えるためには、ガイド軸の断面は円形などの、曲線で画される形状が好ましい。後述の実施例では、ガイド軸と軸受部は、壁部材のリニアアクチュエータ側の表面に設けられているが、被駆動部材側の表面に設けられてもよい。また、ガイド軸に接する面は、貫通孔の周囲の全部に設けられることが封止の観点から好ましいが、貫通孔の周囲の一部に設けられても封止機能の向上が図られる。 The present invention includes a linear actuator that can be linearly driven, a guide shaft that is integrated with the linear actuator by a transmission portion, and a wall member that spatially separates the region where the linear actuator is linearly driven from the other region. The wall member is provided with a bearing portion that supports the guide shaft, a through-hole through which the transmission site passes, and a surface that contacts the guide shaft in part or all of the periphery of the through-hole. The surface in contact with the guide shaft has a shape that matches the surface shape of the guide shaft so that the through hole is effectively sealed. For example, if the guide shaft is cylindrical, the surface in contact with the guide shaft is a cylindrical surface. Since the cross section of the guide shaft may have various shapes such as an ellipse, the surface in contact with the guide shaft may have various shapes in accordance with the shape. However, in order to keep the sliding resistance of the guide shaft in a straight drive, the cross section of the guide shaft is preferably a curved shape such as a circle. In the embodiments described later, the guide shaft and the bearing portion are provided on the surface of the wall member on the linear actuator side, but may be provided on the surface of the driven member side. In addition, the surface in contact with the guide shaft is preferably provided in the entire periphery of the through hole from the viewpoint of sealing, but the sealing function can be improved even if it is provided in a part of the periphery of the through hole.

以下、発明を実施するための形態について説明する。
図1は本発明の実施例であるリニア駆動ユニットの図である。(a)は振動子1と振動子ホルダ2が紙面の最下端側に到達した状態の図、(b)は振動子1と振動子ホルダ2が紙面の最上端側に到達した状態の図、(c)は防塵壁の右から見た側面図、であり、従来例の図5に相当する図である。図1において、1はリニアアクチュエータである超音波モータの振動子、2は振動子ホルダ、5はリニアアクチュエータに隣接して設けられた壁部材である防塵壁である。これらの作用及び機能については、従来例と同様であるので説明を省略する。
Hereinafter, modes for carrying out the invention will be described.
FIG. 1 is a diagram of a linear drive unit according to an embodiment of the present invention. (A) is a diagram in a state where the vibrator 1 and the transducer holder 2 have reached the lowermost side of the paper surface, (b) is a diagram in a state where the vibrator 1 and the vibrator holder 2 have reached the uppermost side of the paper surface, (C) is the side view seen from the right of a dust-proof wall, and is a figure equivalent to FIG. 5 of a prior art example. In FIG. 1, 1 is a vibrator of an ultrasonic motor that is a linear actuator, 2 is a vibrator holder, and 5 is a dust-proof wall that is a wall member provided adjacent to the linear actuator. Since these operations and functions are the same as those of the conventional example, description thereof will be omitted.

図2(a)、(b)は振動子ホルダ2、ガイド軸3、リニアアクチュエータとリニア駆動ユニットの被駆動部材とに連結される伝達部位4の構造を示すための図であり、(a)は単体図、(b)は一体となった図である。図示の通り、リニア駆動する方向に延在するガイド軸3の孔(破線)と振動子ホルダ2の孔(破線)に伝達部位5を矢印の方向へ挿入し固定することにより、3部品は、(b)に示す通り一体的に固定することができる。図2(c)は、防塵壁5の形状を示す図であり、左から左側面図、正面図、右側面図、及びA〜Cの断面図が示されている。図2(c)において、5a、5bはガイド軸3の軸受部、5cは伝達部位4が通る貫通孔、5dは、貫通孔5cの周囲に形成された、ガイド軸に接する面である円筒面である。ここでは、円筒面5dは、ガイド軸3の半周面と隙間無く接する半径を有する。また、ガイド軸は円形の断面を有し、ガイド軸に接する面は円筒面の一部をなし、この円筒面の一部と軸受部5a、5bの円筒面が同一の円筒の面をなしている。 FIGS. 2A and 2B are views for showing the structure of the transmission portion 4 connected to the vibrator holder 2, the guide shaft 3, the linear actuator, and the driven member of the linear drive unit. Is a single view, and (b) is an integrated view. As shown in the figure, by inserting and fixing the transmission portion 5 in the direction of the arrow in the hole (broken line) of the guide shaft 3 extending in the linear driving direction and the hole (broken line) of the vibrator holder 2, the three parts are It can be fixed integrally as shown in (b). FIG.2 (c) is a figure which shows the shape of the dust-proof wall 5, and the left view from the left, a front view, a right view, and sectional drawing of AC are shown. 2C, 5a and 5b are bearing portions of the guide shaft 3, 5c is a through-hole through which the transmission site 4 passes, and 5d is a cylindrical surface formed around the through-hole 5c and in contact with the guide shaft. It is. Here, the cylindrical surface 5d has a radius that is in contact with the half circumferential surface of the guide shaft 3 without a gap. The guide shaft has a circular cross section, and the surface in contact with the guide shaft forms a part of a cylindrical surface, and a part of this cylindrical surface and the cylindrical surface of the bearing portions 5a and 5b form the same cylindrical surface. Yes.

図3(a)は組立順を示す図である。図示の通り、ガイド軸3を軸受5a、5bに挿入した後、貫通孔5cを通じて伝達部位4を矢印の方向へ挿入し固定することにより、(b)の通り組立てることができる。図3(c)は組立後のガイド軸3と防塵壁3の軸受部5a、5b、貫通孔5c、円筒面5dの関係を示した図である。図示の通り、全ての範囲でガイド軸3に対して、防塵壁5の軸受部5a、5bと円筒面5dが接している。ここで、ガイド軸3は切削加工で製作され、防護壁5の軸受部5a、5bと円筒面5dは射出成型で製作されるので、10μm〜30μmの隙間にすることが可能である。 FIG. 3A is a diagram showing the assembly order. As shown in the drawing, after the guide shaft 3 is inserted into the bearings 5a and 5b, the transmission part 4 is inserted and fixed in the direction of the arrow through the through-hole 5c, and can be assembled as shown in (b). FIG. 3C is a diagram showing the relationship between the assembled guide shaft 3 and the bearing portions 5a and 5b, the through hole 5c, and the cylindrical surface 5d of the dust-proof wall 3. As illustrated, the bearing portions 5a and 5b of the dust-proof wall 5 and the cylindrical surface 5d are in contact with the guide shaft 3 in the entire range. Here, since the guide shaft 3 is manufactured by cutting, and the bearing portions 5a and 5b of the protective wall 5 and the cylindrical surface 5d are manufactured by injection molding, a gap of 10 μm to 30 μm can be formed.

以上の説明の通り、本発明のリニア駆動ユニットは、リニアアクチュエータと一体に設けられ直進駆動方向に延在するガイド軸が、壁部材の軸受部によって直進案内され、かつ、壁部材の貫通孔の周囲の面に接することにより貫通孔を封止している。更に、前述の通り、ガイド軸と軸受部及び貫通孔周囲の面の隙間は10μm〜30μmであり、接する幅は1mm以上設定することができる。従って、30μmを超え、特に有害となる大きさの摩耗粉は壁部材の外部へ流出する可能性はない。又、1μm程度の摩耗粉も、この隙間を通じて外部へ流出する可能性は、従来例に比べて非常に低い。更に、この隙間には摺動性を向上させるために潤滑用のグリスやオイルを塗布することが一般的であるから、グリスやオイルによっても摩耗粉の流出が防止される。そのため、この隙間を通じて摩耗粉が壁部材の外部へ流出する可能性は、現実には極めて低い。 As described above, in the linear drive unit of the present invention, the guide shaft provided integrally with the linear actuator and extending in the straight drive direction is guided straight by the bearing portion of the wall member, and the through hole of the wall member is provided. The through-hole is sealed by contacting the surrounding surface. Furthermore, as described above, the gap between the guide shaft, the bearing portion, and the surface around the through hole is 10 μm to 30 μm, and the contacting width can be set to 1 mm or more. Accordingly, there is no possibility that wear powder having a size exceeding 30 μm and particularly harmful will flow out of the wall member. Moreover, the possibility that the wear powder of about 1 μm will flow out to the outside through this gap is very low as compared with the conventional example. Further, since it is common to apply grease or oil for lubrication to this gap in order to improve slidability, the outflow of wear powder is also prevented by the grease or oil. Therefore, the possibility that the wear powder flows out of the wall member through this gap is extremely low in reality.

以上の構成により、ガイド軸が防塵壁の軸受部によって直進案内されることにより、直進駆動の摺動抵抗を低く抑える効果が得られる。同時に、ガイド軸が防塵壁の貫通孔の周囲の面に接していることにより、貫通孔を有効に封止し防塵機能を十分にする効果が得られる。 With the above configuration, the guide shaft is linearly guided by the bearing portion of the dust-proof wall, so that an effect of suppressing the sliding resistance of the linear drive can be obtained. At the same time, since the guide shaft is in contact with the surface around the through-hole of the dust-proof wall, an effect of effectively sealing the through-hole and making the dust-proof function sufficient can be obtained.

本発明は、レンズ鏡筒等のリニア駆動ユニットを有する装置に利用可能である。 The present invention is applicable to an apparatus having a linear drive unit such as a lens barrel.

1・・振動子(リニアアクチュエータ)、2・・振動子ホルダ、3・・ガイド軸、4・・伝達部材、5・・防護壁(壁部材)、5a、5b・・軸受部、5c・・貫通孔、5d・・ガイド軸に接する面 1 .. Vibrator (Linear actuator) 2 .... Vibrator holder 3 .... Guide shaft 4 .... Transmission member 5 .... Protective wall (wall member) 5a, 5b ... Bearing part 5c ... Through-hole, 5d ・ ・ A surface in contact with the guide shaft

Claims (3)

直進駆動可能なリニアアクチュエータと、
前記リニアアクチュエータに隣接して設けられ前記リニアアクチュエータが直進駆動する領域と他の領域を空間的に隔離する壁部材と、
前記リニアアクチュエータと当該リニア駆動ユニットの被駆動部材とに連結される伝達部位を有する直進駆動方向に延在するガイド軸と、
を備えたリニア駆動ユニットであって、
前記壁部材に、前記ガイド軸を支持する軸受部と、前記伝達部位が貫通する貫通孔と、前記貫通孔の周囲の一部又は全部において前記ガイド軸に接する面と、が設けられていることを特徴とするリニア駆動ユニット。
A linear actuator that can be driven straight,
A wall member that is provided adjacent to the linear actuator and spatially separates an area in which the linear actuator is linearly driven from another area;
A guide shaft extending in a straight drive direction having a transmission portion coupled to the linear actuator and a driven member of the linear drive unit;
A linear drive unit comprising:
The wall member is provided with a bearing portion that supports the guide shaft, a through-hole through which the transmission site passes, and a surface that contacts the guide shaft in part or all of the periphery of the through-hole. A linear drive unit characterized by
前記ガイド軸は円形の断面を有し、前記ガイド軸に接する面は円筒面の一部をなし、前記円筒面の一部と前記軸受部の円筒面が同一の円筒の面をなすことを特徴とする請求項1に記載のリニア駆動ユニット。 The guide shaft has a circular cross section, a surface in contact with the guide shaft forms a part of a cylindrical surface, and a part of the cylindrical surface and the cylindrical surface of the bearing portion form the same cylindrical surface. The linear drive unit according to claim 1. 前記リニアアクチュエータは超音波モータであることを特徴とするリニア駆動ユニット。 The linear drive unit, wherein the linear actuator is an ultrasonic motor.
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CN116472491A (en) * 2020-11-24 2023-07-21 三美电机株式会社 Optical element driving device, camera module, and camera mounting device

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JPH08290360A (en) * 1995-04-19 1996-11-05 Nikon Corp Dressing device of grinding wheel for grinding
JPH09150343A (en) * 1995-11-24 1997-06-10 Unisia Jecs Corp Dustproof cover
JP2006202654A (en) * 2005-01-21 2006-08-03 Horon:Kk Stage
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JPH0687772U (en) * 1993-05-31 1994-12-22 富士機工株式会社 Transmission for vehicle
JPH08290360A (en) * 1995-04-19 1996-11-05 Nikon Corp Dressing device of grinding wheel for grinding
JPH09150343A (en) * 1995-11-24 1997-06-10 Unisia Jecs Corp Dustproof cover
JP2006202654A (en) * 2005-01-21 2006-08-03 Horon:Kk Stage
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116472491A (en) * 2020-11-24 2023-07-21 三美电机株式会社 Optical element driving device, camera module, and camera mounting device

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