JP2014210234A - Magnetic gas flow controller and magnetic gas flow control method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic gas flow controller and a magnetic gas flow control method capable of efficiently separating specific gas molecules from a mixture gas in which gases having different molar magnetic susceptibility without using an adsorbent or the like.SOLUTION: A magnetic gas flow controller for separating a specific gas from a mixture gas, in which gases different in molar magnetic susceptibility are present, by controlling a gas flow of the mixture gas comprises: magnets disposed so that magnetic poles face each other; a tubular body that has an interior in which a gas can circulate, that passes between the magnetic poles, and that has an opening in an end portion of each of the magnetic poles in which a magnetic field gradient is formed; and a gas flow formation mechanism feeding the mixture gas into the tubular body. A gas flow biased in a direction different from a straight direction from the opening is formed by an action of the magnetic field gradient, thereby separating the specific gas.

Description

  The present invention relates to a magnetic airflow control device and a magnetic airflow control method.

  Many techniques for separating substances using a magnetic field are known. The target substance is not particularly limited as long as it is magnetized by magnetic induction, such as iron, manganese, cobalt, nickel, alloys thereof, magnetite, ferrite, and neodymium. However, most of them are directed to magnetic particles floating in the liquid. There are few known methods for separating and controlling magnetic fine particles and magnetic molecules present in the air.

By the way, ozone has long been known as an oxidant with a very high reaction activity, and industries such as “cleaning”, “water purification”, “sterilization / deodorization”, and “bleaching” using its oxidizing power. Applications are already widespread. The greatest advantage of ozone is that it can be finally stabilized as oxygen molecules. In other words, unlike conventional cleaning agents, ozone water is self-degradable, has no persistence on the surface, and surplus ozone that has not been used is naturally decomposed. As a very gentle active species, it will continue to attract attention in many fields. Current application fields vary depending on ozone concentration 0.5-10 mg / l: Sterilization Bleaching Deodorization 5-20 mg / l: Organic removal Metal removal Chemical oxide film formation> 60 mg / l: Typical applications include resist stripping .

  The ozone water concentration can be controlled over a wide range by setting conditions, but about 20 mg / l of ozone water is effective in removing fine particles, organic substances, and metals, and is the most popular among functional waters. Is. Further, high-concentration ozone water of 100 mg / l or more can be used for resist stripping in process steps, and has attracted attention as an environmentally friendly technique instead of a conventional solvent method.

  At present, when a large amount of ozone is used for industrial use, an ozonizer utilizing discharge is often used. When an ozonizer using discharge is used, a mixed gas of “nitrogen + oxygen + ozone” is generated when the source gas is air, and a mixed gas of “oxygen + ozone” is generated when the source gas is oxygen. To do. Since there is also an equilibrium point of view, there is a limit to the ozone concentration during the ozone production reaction. An ozonizer is a device that generates ozone by supplying oxygen gas or air between parallel electrodes, applying a high voltage, and exciting oxygen by silent discharge generated between the electrodes. The ozone yield of the ozonizer is usually about 2% to 3% when air is used as a raw material and about 5% when oxygen gas is used as a raw material with respect to a theoretical value.

  However, in order to utilize the action of ozone, the higher the ozone concentration, the better. For example, a method of obtaining high concentration ozone of 10% or more is desired. Until now, the use of ozone has been promoted by using a mixed gas of oxygen and ozone with a low ozone concentration (on the order of several percent at the highest), but there was no method that could easily generate high-concentration ozone. Is the essential reason. Unlike conventional mixed atmospheres of low-concentration oxygen and ozone, the use of high-concentration ozone has the potential to select and extract reaction processes.

  As a result, for example, high-quality oxide films can be formed at temperatures as low as about 500 ° C. compared to conventional oxidation of silicon semiconductors, or much higher corrosion than electrolytic polishing in passivation of metal surfaces. Various excellent effects are expected, such as the formation of a surface with resistant gas resistance. Even if it is not a new applied technology, if high-concentration ozone can be produced, it can contribute to the miniaturization of the entire apparatus system, so that a great effect can be expected in the industrial field using existing ozone.

Oxygen gas has a strong paramagnetism with a molar magnetic susceptibility of about 3449 × 10 ⁻⁶ cm ³ / mol at room temperature and 1 atm, while ozone has a molar magnetic susceptibility of about 7 × 10 ⁻⁶ cm ³ / mol, It has only a molar magnetic susceptibility of about 0.2%. In particular, since the ozone gas component of the ozonizer with oxygen source is only oxygen + ozone, if only the oxygen flow component can be separated from the ozone gas flow by magnetic force, the oxygen gas flow and the ozone gas flow are separated from the gas flow generated by the ozonizer. As a result, it is considered that an air flow having a high ozone concentration can be generated.

  Several techniques for separating oxygen in the air using a magnetic field are known. For example, Patent Document 1 discloses a technique for increasing the proportion of oxygen in a mixed gas such as air. In this method, an even number of four or more magnets are arranged around the gas flow path so that the poles are directed in the radial direction to form a magnetic field gradient from the center to the circumferential direction, and the mixed gas is allowed to pass through the gas flow path. In order to collect oxygen in the outer peripheral part. However, with this method, as described in the specification after amendment of the procedure, only an effect of increasing the concentration of oxygen contained in air by 20.49% by only 0.01% can be obtained.

  Patent Document 2 discloses that oxygen in a mixed gas containing ozone and oxygen is moved using magnetic force, and is separated and adsorbed by zeolite or molecular sieves to remove oxygen in the mixed gas, thereby reducing the ozone concentration. A relatively enhanced technique is disclosed. Moreover, since the apparatus of this patent document 2 is equipped with the circulation duct which re-supplys generated gas to the inlet of an ozonizer, after supplying the generated gas with which ozone concentration became high to the customer, surplus generated gas is removed. It can be recycled and reused in addition to the source gas. Since the product gas contains a large amount of ozone, it is stated that the ozone production efficiency will be higher than when only fresh oxygen gas is used as the raw material. A low device will be provided.

  In addition, the device that adsorbs and captures oxygen molecules to improve the ozone concentration in the remaining gas has no effect when the adsorbent and the capture structure are saturated, so the adsorbent and other materials are periodically regenerated. Need to do. For this reason, it is necessary to provide a regeneration step for releasing the adsorbed oxygen with the magnetic field gradient eliminated.

JP-A-5-309224 JP 2003-206107 A

  As described above, techniques for separating paramagnetic oxygen molecules using a magnetic field have been proposed. However, there are problems such as low efficiency and a need for a regeneration process.

  The present invention has been made in response to the above-described conventional circumstances, and can efficiently separate specific gas molecules from a mixed gas in which gases having different molar magnetic susceptibility coexist without using an adsorbent or the like. An object of the present invention is to provide a magnetic airflow control device and a magnetic airflow control method.

  One aspect of the magnetic airflow control device according to the present invention is a magnetic airflow control device that separates a specific gas by controlling the airflow of a mixed gas in which gases having different molar magnetic susceptibility are mixed, and is disposed so that the magnetic poles face each other. A magnet that allows gas to flow therethrough, a tubular body that passes between the magnetic poles and opens at the end of the magnetic pole in which a magnetic field gradient is formed, and an airflow formation that feeds the mixed gas into the tubular body A mechanism for separating the specific gas by forming an airflow deflected in a direction different from a direction straight from the opening by the action of the magnetic field gradient in the opening portion of the tubular body. And

  One aspect of the magnetic airflow control method of the present invention is a magnetic airflow control method for separating a specific gas by controlling the airflow of a mixed gas in which gases having different molar magnetic susceptibility are mixed, and arranged so that the magnetic poles face each other. A magnet that allows gas to flow therethrough, a tubular body that passes between the magnetic poles and opens at the end of the magnetic pole in which a magnetic field gradient is formed, and an airflow formation that feeds the mixed gas into the tubular body And using the mechanism to form an airflow deflected in a direction different from a direction straight from the opening by the action of the magnetic field gradient in the opening portion of the tubular body to separate the specific gas. To do.

  According to the present invention, there is provided a magnetic airflow control device and a magnetic airflow control method capable of efficiently separating specific gas molecules from a mixed gas in which gases having different molar magnetic susceptibility coexist without using an adsorbent or the like. can do.

The figure which shows typically schematic structure of the magnetic airflow control apparatus which concerns on one Embodiment of this invention. It is a figure which shows typically the example of the state of the magnetic field distribution in embodiment, (a) is a figure which shows the whole magnetic field distribution, (b) is a figure which expands and shows a part of magnetic field distribution. The figure which shows typically the principal part schematic structure of the magnetic airflow control apparatus of FIG. The figure which shows typically the principal part schematic structure of a modification. The figure which shows typically the principal part schematic structure of another modification. The graph which shows the experimental result in embodiment. It is a figure for demonstrating the generation | occurrence | production state of the airflow of nitrogen gas in embodiment, (a) shows the case without a magnetic field application, (b) shows the case with a magnetic field application. It is a figure for demonstrating the generation | occurrence | production state of the airflow of the mixed gas in embodiment, (a), (b) shows the case without a magnetic field application, (c), (d) shows the case with a magnetic field application. Figure. The figure which shows typically the generation | occurrence | production state of the flow of nitrogen gas at the time of applying a magnetic field. The figure which shows typically the generation | occurrence | production state of the airflow of mixed gas at the time of applying a magnetic field.

  Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a diagram schematically showing a schematic configuration of a magnetic airflow control device 100 according to an embodiment of the present invention. In the present embodiment, a mixed gas of ozone (O ₃ ) and oxygen (O ₂ ) generated from the ozonizer 120 that generates ozone by barrier discharge is introduced into the magnetic airflow control device 100, and the magnetic airflow is generated from the mixed gas. A case will be described in which a part of oxygen is separated and recovered by the control device 100 and the relative ozone concentration in the mixed gas is increased.

  The magnetic airflow control device 100 is provided with magnets 101 and 103 so that the magnetic poles 102 and 104 are close to each other, and a tubular body 105 serving as a gas flow path is provided between the magnetic poles 102 and 104. Has been. The proximal end side of the tubular body 105 is connected to the gas outlet of the ozonizer 120, and the tubular body 105 extends so as to pass between the magnetic poles 102 and 104. 104 is arranged so as to open at a portion where the magnetic field gradient at the end of 104 is formed.

  In the present embodiment, the magnets 101 and 103 are composed of electromagnets, and power supplies 107 and 108 for energizing the magnets 101 and 103 are provided. Further, an interval adjusting mechanism 109 for changing the interval between the magnet 101 and the magnet 103 is provided.

  As the tubular body 105, for example, resin piping can be used. The resin pipe may be a straight pipe or a bent pipe. The Reynolds number (Re) in the flow path of the tubular body 105 is preferably 2500 or less. Accordingly, a stable gas flow in a laminar flow state is formed in the flow path of the tubular body 105, so there is little disturbance and stable separation can be performed.

  An oxygen cylinder 121 is connected to the ozonizer 120, and a flow rate controller 122 for controlling the flow rate of oxygen gas supplied from the oxygen cylinder 121 to the ozonizer 120 is connected between the oxygen cylinder 121 and the ozonizer 120. It is arranged. The flow rate of the ozone gas supplied from the ozonizer 120 can be controlled by controlling the flow rate of the oxygen gas supplied to the ozonizer 120 by the flow rate controller 122.

  Further, an ozone gas outlet portion of the ozonizer 120 and an opening (exit) portion of the tubular body 105 are provided with gas concentration meters 130a. 130b is disposed. Since the magnetic field gradient is formed in the opening portion of the tubular body 105, the deflected air flow 140 in which the traveling direction is bent as a result of being more strongly affected by the magnetic field gradient, and the straight air flow that goes straight as it is less affected by the magnetic field gradient. 150 two airflows are formed. Hereinafter, the point where such two airflows are formed will be described.

Oxygen has a strong paramagnetism with a magnetic susceptibility of about 3449 × 10 ⁻⁶ cm ³ / mol at room temperature and 1 atm, while ozone has a magnetic susceptibility of about 7 × 10 ⁻⁶ cm ³ / mol, % Magnetic susceptibility only. A magnetic force F _m acting on a unit volume of gas is expressed by the following equation (1).
F _m = χV (B / μ ₀ ) dB / dz (1)
Here, χ: magnetic susceptibility of fluid mass, V: volume of mass, μ ₀ : permeability of vacuum, B: magnetic flux density, Z: distance in the vertical direction. When transforming equation (1),
F _m = (1/2) (χV / μ ₀ ) dB ² / dz (2)
It is easy to understand. (2) the orientation of the magnetic force F _m is the equation, rather than the orientation of the N-S, it can be seen that determined by the gradient of B ^2.

For example, if a 6T (Tesla) superconducting magnet is used to generate a magnetic field of 6 × 10 ⁴ gauss and a magnetic field gradient dB / dx of 1 × 10 ⁴ gauss / cm is given, the unit volume of oxygen gas is 90 dyne. That is, it receives a magnetic force of 9 μN. On the other hand, only a magnetic force of 18 × 10 ⁻³ μN acts on ozone in the same magnetic field. The molar susceptibility χ _m (10 ⁻⁶ cm ³ / mol) of a typical gas is shown below.

Oxygen: 3449
Ozone: 7
Nitrogen: -12
Water: -13
CO _2: -21

  For example, even when ozone is produced by the ozonizer 120 using an oxygen raw material in order to obtain high-concentration ozone, ozone is present only in the order of% in the product gas component. Since most of the components are paramagnetic oxygen, they are easily subjected to a force from a magnetic field gradient. Accordingly, a strong magnetic field gradient is generated in the flow path of the mixed gas of ozone and oxygen generated by the ozonizer 120, and oxygen molecules are attracted toward the strong magnetic field gradient, so that the main components include an oxygen stream and ozone. Can produce with airflow.

  When there is a magnetic field gradient in the mixed gas of ozone and oxygen, oxygen molecules try to move. Therefore, when the air flow of the moving oxygen molecules is captured by the oxygen recovery mechanism 141 and separated from the mixed gas, ozone is contained in the mixed gas. The ozone concentration of the remaining gas mixture increases. In addition, the oxygen gas can be effectively used by adding an air stream whose main component is oxygen to the gas supply line of the ozonizer 120 by the oxygen recovery mechanism 141. Further, the mixed gas whose ozone concentration has increased is recovered by the ozone recovery mechanism 151.

  When the surrounding atmosphere is air, the direction of the air flow controlled by the magnitude relationship between the oxygen concentration in air of 21% and the oxygen concentration in the mixed gas is different. For this reason, before the gas stream of the mixed gas of ozone and oxygen is supplied between the magnets, the component concentration of ozone or oxygen, the gas flow rate, and the gas temperature in the mixed gas are monitored, and the oxygen gas flow drawn by the values is monitored. It is preferable to provide a mechanism for adjusting the collection position. Since the oxygen concentration in the gas containing ozone gas and oxygen generated by the ozonizer 120 is approximately 90% or more, as shown in FIG. 1, the air flow is drawn near the ends of the magnetic poles 102 and 104 having a large magnetic field gradient. As a result, a deflected air flow 140 is formed.

  FIG. 2 shows an example of the magnetic field distribution in the magnetic airflow control device 100. FIG. 2A shows an example of the entire magnetic field distribution, and FIG. 2B shows an enlarged magnetic field distribution at the end portion of the magnetic pole. As shown in FIG. 2, a magnetic field gradient is formed at the end of the magnetic pole, and a magnetic force acts on oxygen in this portion. FIG. 3 shows the positional relationship between the tubular body 105 and the magnetic poles 102 and 104.

  In the above embodiment, the case where only one tubular body 105 is disposed between the magnetic poles 102 and 104 has been described, but a plurality of tubular bodies 105 may be disposed. Further, as shown in FIG. 4, a tubular body 105 a having a branch pipe 106 that branches into a plurality of parts from the middle and opens at a plurality of portions at the ends of the magnetic poles 102 and 104 may be used. With such a configuration, a larger amount of mixed gas can be flowed, and oxygen can be separated efficiently.

  In addition, as shown in FIG. 5, the magnetic airflow control device 100 (only the tubular body 105 is shown in FIG. 5) may be arranged in multiple stages so as to increase the ozone concentration step by step. In this case, the tubular body 105 may be composed of a cylindrical permanent magnet having a high magnetic flux density using neodymium or samarium cobalt.

Moreover, it is preferable that the Reynolds number (Re) in the tubular body 105 used as a gas flow path shall be 2500 or less. Moreover, even if it is a laminar flow, a certain distance is required for the flow to be stable. For this reason, the length L of the tubular body 105 per one has a relationship between the converted diameter D and the Reynolds number Re,
L ≧ D × Re / 100
It is preferable to satisfy the relationship. As a result, the separation operation can be performed in a state where the flow is grown, so that separation and recovery with high purity can be performed.

In the magnetic airflow control device 100 having the configuration shown in FIG. 1, oxygen gas from the oxygen cylinder 121 is sent to a barrier discharge type ozonizer 120 to generate ozone (O ₃ ) from a part of oxygen (O ₂ ). . The ozone concentration in the mixed gas of oxygen and ozone is on the order of several percent, and oxygen has a concentration of 90% or more. This mixed gas flows into the tubular body 105 disposed in the magnetic airflow control device 100. Near the outlet opening of the tubular body 105, for example, a magnetic field gradient of about 30 T / m is formed.

  When the mixed gas reaches the ends of the magnetic poles 102 and 104, a magnetic field gradient can be applied. Since the volume ratio of oxygen in the mixed gas is as large as 90% or more, when the magnetic force is applied, the magnetic force Fm of the above formula (1) or formula (2) works, and as shown in FIG. The main component air flow changes to the direction of the flow so far along the tube axis direction of the tubular body 105 to become a deflected air flow 140. On the other hand, in the straight airflow 150 along the tube axis direction of the tubular body 105, a part of oxygen is separated, so that the ozone concentration is relatively increased.

  The gas concentration (for example, oxygen concentration) of the predetermined gas in the mixed gas at the outlet portion of the ozonizer 120 is measured by the gas concentration meter 130a. Further, the gas concentration (for example, oxygen concentration) of the predetermined gas in the deflected airflow 140 and the straight airflow 150 at the outlet portion of the tubular body 105 is also measured by the gas concentration meter 130b. Then, the measurement data of the gas concentration in the gas concentration meter 130a and the gas concentration meter 130b is input to the control computer 131.

  Further, the control computer 131 is input with data indicating the current state of the flow rate controller 122, the power sources 107 and 108, and the interval adjusting mechanism 109. Based on the measurement data by the gas concentration meters 130a and 130b, Control the direction of airflow. For example, when the concentration of oxygen gas in the straight airflow 150 measured by the gas concentration meter 130b increases to a predetermined value or more, that is, the relative concentration of ozone gas in the straight airflow 150 decreases and falls within a certain allowable range. If the control computer 131 is out of the range, the control computer 131 makes a comprehensive judgment, and at least the gas flow rate in the flow rate controller 122, the power supplied from the power sources 107 and 108 to the magnets 101 and 103, and the distance between the magnets 101 and 103 are at least. Adjust one to control the direction of airflow. In this case, for example, one or more controls of reducing the gas flow rate, increasing the power supplied to the magnets 101 and 103, and narrowing the distance between the magnets 101 and 103 are performed.

  When the mixed gas from the ozonizer 120 is discharged from the opening of the tubular body 105 into the air atmosphere, as described above, the oxygen concentration C1 in the mixed gas and the oxygen concentration C2 (= 21%) in the surrounding atmosphere are large and small. The direction of the generated airflow differs depending on the relationship.

  When the magnets 101 and 103 are energized and a magnetic field is applied, the oxygen gas in the mixed gas and the oxygen gas in the surrounding atmosphere are attracted to the ends of the magnetic poles 102 and 104. For this reason, the direction of the airflow differs depending on the magnitude relationship between the oxygen gas concentration C1 in the mixed gas and the oxygen concentration C2 (21%) in the air. When C1 <C2, the airflow is directed in the direction of the tube axis of the tubular body 105. When C1> C2, airflow is generated in a direction perpendicular to the tube axis direction of the tubular body 105.

  For this reason, the oxygen recovery mechanism 141 and the ozone recovery mechanism 151 are generally arranged in that direction, and fine adjustment is performed by adjusting at least one of the flow rate, the power supplied from the power sources 107 and 108, and the interval between the magnet 101 and the magnet 103. Do this by adjusting the direction of the airflow. Note that such adjustment of the direction of airflow is also performed by, for example, the difference in magnetic susceptibility of the gas to be separated.

  As described above, since the magnetic susceptibility of ozone and nitrogen is lower than that of oxygen, a mixed gas of nitrogen and oxygen can be used for the separation evaluation of oxygen and ozone. Therefore, a confirmation test was performed using a simulated mixed gas in which nitrogen was regarded as ozone.

  Here, as magnets 101 and 103 for creating a magnetic field gradient, a SEE-3 type electromagnet manufactured by Tokin Corporation was used. A tube made of resin is passed as a tubular body 105 between the magnetic poles 102 and 104 under the conditions of a spacing of 10 mm between the magnetic poles 102 and 104 and a magnetic flux density of 1.5 T at a uniform portion. A simulated mixed gas (80% oxygen, 20% nitrogen) was flowed under the conditions of a flow rate of 1 L / min and a Reynolds number of 100. The magnetic flux density gradient at the end was about 30 T / m.

  When the oxygen concentration in the direction of the straight airflow 150 shown in FIG. 1 was continuously measured by the gas concentration meter 130b, it was confirmed that the oxygen concentration decreased by about 20% after about 1 minute after the magnetic field application. The measurement result of the temporal change in the oxygen concentration with the initial concentration normalized to 100% is shown in the graph of FIG. 6 with the vertical axis representing the normalized oxygen concentration and the horizontal axis representing time (minutes). Such a decrease in oxygen concentration indicates that the nitrogen concentration is relatively high. That is, when ozone is used, the same phenomenon occurs, indicating that the oxygen concentration in the mixed gas of ozone and oxygen decreases and the ozone concentration relatively increases.

  Next, in order to visualize the state of the airflow, the result of observing the state of the airflow by adding water mist (0.2 g / min) to the gas flow will be described. FIG. 7 schematically shows the generation state of airflow when nitrogen gas flows out from the tubular body 105, and FIG. 8 shows nitrogen gas (20% by volume) and oxygen gas (80% from the tubular body 105. The result of having observed the generation | occurrence | production state of the airflow when the mixed gas of volume%) was made to flow out by the flow volume of 1 L / min is shown typically. The observed mist flow (airflow) is schematically shown by dotted lines in FIGS.

  7A shows a state in which the magnets 101 and 103 are not energized and a magnetic field is not applied, and FIG. 7B shows a state in which the magnets 101 and 103 are energized and a magnetic field is applied. As shown in FIG. 7 (a), when no magnetic field was applied, the nitrogen gas released from the opening of the tubular body 105 into the air atmosphere slightly progressed straight and then diffused around.

  On the other hand, when a magnetic field is applied, the nitrogen gas released into the atmosphere from the opening of the tubular body 105 is tightened in the tube axis direction and travels straight ahead at a long distance vigorously compared to when no magnetic field is applied. . The gas flow in this case is schematically shown by arrows in FIG. As shown in FIG. 9, when a magnetic field is applied, oxygen in the atmosphere is attracted to the magnetic field and flows into the vicinity of the opening of the tubular body 105 (indicated by a dotted arrow in FIG. 9), and the flow of nitrogen gas is changed. In order to concentrate in a narrow area along the tube axis direction, an air flow (indicated by a solid line arrow in FIG. 9) that moves straight forward is formed.

  Further, as shown in FIG. 8, when a mixed gas of nitrogen gas (20%) and oxygen gas (80%) is flowed out from the tubular body 105, as shown in FIGS. When no magnetic field is applied to 101 and 103, the same applies to the case of nitrogen gas shown in FIG. On the other hand, as shown in FIGS. 8C and 8D, when the magnets 101 and 103 are energized and a magnetic field is applied, gas flows along the magnetic poles 102 and 104 of the magnets 101 and 103 are generated. This is because the oxygen gas in the mixed gas is attracted to the end portions (portions having a magnetic field gradient) of the magnetic poles 102 and 104 to form an air flow. The gas flow in this case is schematically shown by arrows in FIG.

  In the above-described embodiment, an example in which a part of oxygen is separated from a mixed gas of oxygen and ozone and the relative ozone concentration in the mixed gas is increased has been described. But the same effect can be obtained. In this case, optimum separation and recovery can be realized by adjusting the flow velocity of the gas flowing in the flow path and the strength of the magnetic field gradient according to the magnetic susceptibility of the separation target. Furthermore, since the strength of the magnetic field gradient is controlled by either or both of the electric power supplied to the electromagnet or the superconducting magnet, the interval between the magnets, it is efficient.

  There are a plurality of magnetic field gradient generation methods. Since the required magnetic flux density in this embodiment is about 0.1 T or more, any of an electromagnet, a superconducting electromagnet, and a permanent magnet can be used. In particular, since no adsorbent is used, maintenance work associated with replacement is unnecessary, and there is no problem even if a permanent magnet is used.

  As described above, according to the magnetic airflow control device of the embodiment, the concentration of ozone generated by the ozonizer can be efficiently increased without using an adsorbent or the like. This makes it possible to use a gas containing ozone with a high concentration for more applications.

  As mentioned above, although some embodiment of this invention was described, these embodiment is shown as an example and is not intending limiting the range of invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 100 ... Magnetic airflow control apparatus, 101, 103 ... Magnet, 102, 104 ... Magnetic pole, 105 ... Tubular body, 107, 108 ... Power supply, 109 ... Spacing adjustment mechanism, 120 ... Ozonizer, 121 ... Oxygen cylinder, 122 ... Flow rate controller, 130a, 130b ... Gas concentration meter, 131 ... Control computer, 140 ... Deflection airflow, 141 ... Oxygen recovery mechanism, 150 ... Straight airflow, 151 ... Ozone recovery mechanism .

Claims (14)

A magnetic air flow control device for controlling a gas flow of a mixed gas in which gases having different molar magnetic susceptibility are mixed to separate a specific gas,
A magnet disposed so that the magnetic poles face each other;
A tubular body that allows gas to flow therethrough, passes between the magnetic poles, and opens at the end of the magnetic pole where a magnetic field gradient is formed;
An airflow forming mechanism for feeding the mixed gas into the tubular body,
A magnetic airflow control device for separating the specific gas by forming an airflow deflected in a direction different from a direction straight from the opening by the action of the magnetic field gradient in the opening portion of the tubular body . The magnetic airflow control device according to claim 1,
A magnetic airflow control device comprising a recovery mechanism that introduces and recovers an airflow that travels in a direction different from a direction that travels straight from the opening by the action of the magnetic field gradient. The magnetic airflow control device according to claim 1 or 2,
The magnetic airflow control device, wherein the magnet is an electromagnet, a superconducting magnet, a permanent magnet, or a combination of these. It is a magnetic airflow control apparatus of any one of Claims 1-3,
A magnetic airflow control device comprising: a flow rate control mechanism for adjusting a flow rate of the mixed gas fed into the tubular body; and a magnetic field gradient adjustment mechanism for adjusting the state of the magnetic field gradient. The magnetic airflow control device according to claim 4,
The magnetic airflow control device adjusts the magnetic field gradient by changing an interval between the magnetic poles. The magnetic airflow control device according to claim 4 or 5,
The magnet is an electromagnet, and the magnetic field gradient adjusting mechanism adjusts the magnetic field gradient by changing the electric power supplied to the electromagnet. The magnetic airflow control device according to any one of claims 1 to 6,
A magnetic airflow control device comprising a detector for detecting a concentration of a gas contained in the mixed gas. It is a magnetic airflow control apparatus of any one of Claims 1-7,
The magnetic airflow control device according to claim 1, wherein the tubular body is branched on the opening side so as to pass through the magnetic poles and open to a plurality of positions at the end of the magnetic pole where a magnetic field gradient is formed. It is a magnetic airflow control apparatus of any one of Claims 1-8,
The magnetic airflow control device, wherein the magnet and the tubular body are arranged in multiple stages. The magnetic airflow control device according to any one of claims 1 to 9,
A magnetic airflow control device, wherein the Reynolds number (Re) in the tubular body is controlled to be 2500 or less. It is a magnetic airflow control apparatus of any one of Claims 1-10,
A magnetic airflow control device comprising one or a plurality of cylindrical permanent magnets, the inside of which is a flow path for circulating the gas. It is a magnetic airflow control apparatus of any one of Claims 1-11,
A magnetic airflow control device, wherein the mixed gas contains ozone and oxygen, and a part of oxygen is separated from the gas to increase a relative concentration of ozone. A magnetic airflow control device according to claim 12,
Arrangement of the oxygen recovery mechanism separated by the concentration of oxygen in the mixed gas containing ozone and oxygen and the concentration of oxygen in the surrounding atmosphere when the gas is ejected from the opening of the tubular body A magnetic airflow control device characterized by changing a position. A magnetic air flow control method for separating a specific gas by controlling a gas flow of a mixed gas in which gases having different molar magnetic susceptibility are mixed,
A magnet disposed so that the magnetic poles face each other;
A tubular body that allows gas to flow therethrough, passes between the magnetic poles, and opens at the end of the magnetic pole where a magnetic field gradient is formed;
Using an airflow forming mechanism for feeding the mixed gas into the tubular body,
A magnetic airflow control method for separating the specific gas by forming an airflow deflected in a direction different from a direction straight from the opening by the action of the magnetic field gradient in the opening portion of the tubular body .

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