JP2013059749A - Magnetic body separation apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic body separation apparatus which can separate a magnetic body, such as oxygen, from a fluid, such as ozone-containing gas, with high efficiency and high tolerance with regard to ozone or the like, and can be operated for extended period.SOLUTION: There is provided the magnetic body separation apparatus 1, wherein a fluid containing a magnetic body is circulated in a flow passage 41 made of air-permeable material having a magnetic field gradient to separate the magnetic body outside the flow passage 41 so as to concentrate molecules having smaller magnetic susceptibility compared with the magnetic body, and a plurality of projection parts 45 projected from an inner wall surface of the flow passage 41 to a cross-sectional direction to reduce a passage cross-sectional area are provided in predetermined spaces along with the flow passage 41.

Description

  Embodiments described herein relate generally to a magnetic separator.

  Ozone produced from oxygen has been known for a long time as an oxidant with extremely high reaction activity. Utilizing its oxidizing power, it can be applied to industrial fields such as washing, water purification, sterilization, deodorization, and bleaching. Applications are already widespread.

  Ozone water has self-degradability, and unlike conventional cleaning agents, it does not remain on the surface of the object to be treated, and excess ozone that has not been used is naturally decomposed. Can be stabilized as. For this reason, it is expected to be used in many fields as an active species that has an extremely low environmental impact and is friendly to the environment.

  The application field of ozone varies depending on the ozone concentration contained in ozone water, etc., and typical applications include, for example, sterilization, bleaching, deodorization at an ozone concentration of 0.5 to 10 mg / l, and organic matter at an ozone concentration of 5 to 20 mg / l. Removal, metal removal, chemical oxide film formation, resist stripping, etc. at ozone concentrations above 60 mg / l.

The ozone concentration of ozone water can be controlled over a wide range by setting conditions. Among them, ozone water with an ozone concentration of about 20 ppm shows the effect of removing fine particles, organic substances and metals, and is the most popular among functional water. Is.
In addition, high-concentration ozone water of 100 ppm or more can be used for resist stripping in process steps, and has attracted attention as an environmentally friendly technology instead of the conventional solvent method.

In the production of industrial ozone, a technique using an ozonizer utilizing a discharge phenomenon is frequently used, and generally air or oxygen gas is used as a raw material gas.
In such a method, a mixed gas of nitrogen, oxygen and ozone, or a mixed gas of oxygen and ozone is obtained, but from the viewpoint of equilibrium, the ozone concentration in these mixed gases is limited.

When the above method is used, the ozone concentration of the mixed gas obtained using air as a raw material gas is usually about 2-3% of the theoretical value, and the ozone concentration of the mixed gas obtained using oxygen gas as a raw material gas Is about 5% of the theoretical value.
However, it is expected to use the action of ozone more effectively by using a higher concentration of ozone-containing gas.

  For example, there is a possibility that a high-quality oxide film can be formed at a temperature lower by about 500 ° C. than before by using a gas mixture having a high ozone concentration for the oxide film formation process of a silicon semiconductor. Moreover, by applying to the passivation treatment of the metal surface, there is a possibility that a material having higher resistance to the corrosive gas than the case of electrolytic polishing may be obtained. Furthermore, by using a mixed gas having a high ozone concentration, it is possible to contribute to miniaturization of the entire apparatus system, and a great effect can be expected for an existing industrial field using ozone.

  However, at present, a simple method for generating a high-concentration ozone-containing gas has not been obtained, and treatment using an oxygen / ozone mixed gas having an ozone concentration of about 10% at most is the mainstream. For this reason, there is a need for a technique that can easily obtain a mixed gas having a high ozone concentration.

As a technique for increasing the ozone concentration in the mixed gas, a technique for increasing the proportion of oxygen in the mixed gas such as air is disclosed. In this method, an even number of magnets are arranged so that the poles are directed in the radial direction, and a magnetic field gradient is formed in the circumferential direction from the center to allow the mixed gas to pass therethrough and collect oxygen in the outer peripheral portion. is there.
However, in this method, oxygen molecules attracted by the magnetic field gradient move by dragging some of the other gas molecules, so that the oxygen molecules in the mixed gas cannot always be efficiently concentrated and expected. Separation and concentration effect cannot be obtained.

  In addition, a method for increasing the ozone concentration by separating oxygen from an oxygen / ozone mixed gas using an oxygen separation membrane has been proposed.

  Specifically, ozone-containing gas (ozone, oxygen, nitrogen) is brought into contact with one side of the oxygen separation membrane, the other side is made lower in pressure, and a magnetic field gradient is formed in the flow path. Therefore, the ozone concentration is increased by selectively permeating oxygen rather than ozone / nitrogen. However, even with this method, oxygen molecules in the mixed gas cannot always be efficiently concentrated, and a sufficient separation effect cannot be obtained.

  As the material for the oxygen separation membrane, a material having a solubility coefficient and a diffusion coefficient as large as possible with respect to oxygen and as small as possible with respect to nitrogen is used. For example, a polydimethylsiloxane-polycarbonate block copolymer is used. , Poly (4-methylpentene-1), polyphenylene oxide (PPO), poly [1- (trimethylsilyl) -1-propyne] (PMSP), and the like.

  However, in general, organic substances on the surface of the separation membrane are easily deteriorated by exposure to ozone, and thus long-term operation is difficult.

Further, conventionally, a method called adsorption separation method has been used, in which nitrogen or oxygen in the air is adsorbed on zeolite and oxygen and nitrogen are separated to obtain ozone. For example, while using magnetic force together, zeolite A method has been proposed in which the ozone concentration is relatively increased by removing oxygen from the mixed gas and adsorbing nitrogen.
Specifically, oxygen molecules that move due to the magnetic field gradient are selectively captured by zeolite, thereby reducing the proportion of oxygen gas that returns to the source gas and increasing the ozone concentration in the residual gas.

Conventionally, it is known that naturally produced zeolite (zeolite) has a unique adsorption property.
However, natural zeolite has problems such as being difficult to obtain a large amount of materials having uniform quality and mixing with a gel-like clay material, and is difficult to use industrially. For this reason, synthetic zeolite is used which compensates for the disadvantages of these natural zeolites and exhibits a molecular sieving effect. Among them, synthetic zeolite developed in the 1950s is widely used.

Synthetic zeolite has a tetrahedral structure, and Si and Al cations surrounded by four oxygen anions are covalently bonded via oxygen anions, resulting in a honeycomb-like structure in which cavities are connected by uniform pores. It has a structure.
The space for molecular adsorption is formed by desorption of crystal water (H ₂ O) taken into these cavities during heat treatment, and the H cations in the crystal structure are replaced with other ions such as potassium and calcium. By doing so, the size of the pores connecting the cavities is adjusted.

The molecular motion of the adsorbed molecules in the cavity is regulated by the pore diameter, and the trapping force in the cavity is obtained by the action of the dipole moment of the adsorbed molecule and the polarity of the metal cation in the crystal structure.
For this reason, the adsorptivity of the molecule to the synthetic zeolite depends on the magnitude of the dipole moment as well as the molecular diameter, thereby obtaining a strong adsorption characteristic with excellent selectivity.

Thus, by using synthetic zeolite, excellent separation performance as described above can be obtained. However, pursuing selectivity for ozone, oxygen and nitrogen increases the cost, and the zeolite after use is finally used. There is an environmental problem because it is necessary to dispose of it.
In addition, zeolite does not function when the adsorption capacity reaches the limit.For example, molecular sieves, which are a kind of zeolite, can be used for operation for about 25 to 250 hours, but have low resistance, so long-term operation is not possible. It is difficult to apply for industrial use.

  Furthermore, although a method for capturing oxygen molecules using cilia is also described, such cilia are prone to deterioration. For example, when cilia is made of an organic substance, the deterioration due to exposure to ozone proceeds. It is remarkable and it is difficult to withstand long-term use.

On the other hand, in this way, in the method of adsorbing or capturing oxygen molecules to improve the ozone concentration in the residual gas, after using for a predetermined period, the adsorbed molecules such as oxygen are released and regenerated and used again Some are possible.
However, in this case, for example, a mechanism such as circulating excess product gas and releasing adsorbed molecules in a state in which the magnetic field gradient is extinguished is required, and the entire apparatus may be increased in size and complexity.

JP-A-5-309224 JP 2003-206107 A

  As described above, conventional magnetic substance separation devices cannot obtain sufficient magnetic substance separation efficiency, are inferior in resistance to ozone and the like, and cannot always withstand long-term operation.

  The problem to be solved by the present invention is a magnetic material that can separate a magnetic material such as oxygen from a fluid such as an ozone-containing gas with high efficiency, has high resistance to ozone, and can be operated for a long time. It is to provide a separation device.

  The magnetic body separation device according to the embodiment causes a fluid containing a magnetic body to flow through a flow path made of a breathable material having a magnetic field gradient, and separates the magnetic body from the flow path to have a magnetic susceptibility smaller than the magnetic body. In the magnetic substance separating apparatus for concentrating molecules, a plurality of projecting portions that project from the inner wall surface of the channel in the cross-sectional direction to reduce the channel cross-sectional area are provided at predetermined intervals along the channel.

  According to the magnetic substance separation apparatus according to the present invention, a magnetic substance such as oxygen can be separated from a fluid such as an ozone-containing gas with high efficiency.

It is a figure which shows schematic structure of the magnetic body separator which concerns on 1st Embodiment. It is a longitudinal cross-sectional view which expands and shows the gas flow path pipe 42 periphery of the magnetic body separator which concerns on embodiment. (A) to (e) is an enlarged longitudinal sectional view showing the periphery of a gas flow path pipe 42 of a magnetic body separating apparatus according to another embodiment. It is a figure which shows schematic structure of the magnetic body separator which concerns on 2nd Embodiment.

FIG. 1 is a diagram illustrating a schematic configuration of a magnetic substance separation device according to the first embodiment.
In the embodiment described below, an oxygen gas as a magnetic material is separated from a fluid composed of a mixed gas of oxygen / ozone.

The susceptibility x of oxygen gas is 1.5 × 10 ⁻⁷ cgs units in the standard state, which is higher than that of other gases, whereas the susceptibility of ozone gas under the same conditions is oxygen It is about 1/1000 of the gas. In this embodiment, the oxygen gas in the mixed gas is separated by attracting and separating the oxygen gas in a predetermined direction due to the difference in magnetic force that each receives when a predetermined magnetic field gradient is applied to the mixed gas of oxygen and ozone. The concentration is reduced to obtain a mixed gas having a high ozone concentration. In addition, the magnetic body as a separation target of the magnetic body separation apparatus of the present invention is not necessarily limited to oxygen, and various magnetic bodies to be described later may be used as long as they have a magnetic susceptibility higher than other gas molecules contained in the fluid. Can be separated.

As shown in FIG. 1, the magnetic separation apparatus 1 according to the first embodiment applies a high voltage to an oxygen cylinder 2 that stores and supplies oxygen gas and a mixed gas containing oxygen gas supplied from the oxygen cylinder 2. Ozonizer 3 that generates ozone upon application, and separation from the mixed gas of ozone gas and oxygen gas generated by ozonizer 3 by concentrating and separating oxygen gas by a magnetic field gradient to obtain oxygen-depleted gas with reduced oxygen concentration The parts 4 are sequentially arranged along the flow path.
The ozonizer 3 is used to ozonize oxygen molecules through an oxygen gas or air during a silent discharge generated between parallel electrodes. Between the oxygen cylinder 2 and the ozonizer 3, and between the ozonizer 3 and the separation unit 4, piping is provided. 5 and 6 are connected. A gas discharge pipe 7 is connected to the subsequent stage of the separation unit 4.

The separation unit 4 includes a gas flow channel pipe 42 having a gas flow channel 41 therein, and extends above and below the gas flow channel pipe 42 in a direction parallel to the longitudinal direction of the gas flow channel pipe 42. The magnets 43 and 44 are disposed so as to exist.
The magnets 43 and 44 have a plate shape extending in the horizontal direction parallel to the gas flow channel pipe 42, and the NS pole thereof is arranged in a state facing the direction of the gas flow channel 41.

  In addition, the direction of the magnetic poles (N pole, S pole) of the magnets 43 and 44 is not particularly limited, and the magnets 43 and 44 may be arranged so that the same poles face each other, or arranged so that multiple poles face each other. Also good.

The magnets 43 and 44 may be any magnet that can obtain a magnetic flux density on the order of T (tesla), and any of an electromagnet, a superconducting electromagnet, and a permanent magnet can be used.
In the magnetic separation apparatus of the present embodiment, since a regeneration process of the adsorbent or the like is not required, a permanent magnet can be used. For example, a neodymium magnet (neodymium / iron / boron magnet), a samarium magnet (samarium / cobalt) Magnets), alnico magnets (aluminum / nickel / cobalt magnets), ferrite magnets (iron oxide magnets) and the like are suitable.

FIG. 2 is an enlarged longitudinal sectional view showing the periphery of the gas flow path pipe 42 of the separation unit 4.
The gas channel tube 42 is formed of a non-magnetic air-permeable porous body, and a partition wall 45 that protrudes from the inner wall surface of the gas channel tube 42 in the cross-sectional direction to reduce the channel cross-sectional area is provided in the gas channel 41. Accordingly, they are provided at predetermined intervals.

The partition wall 45 is composed of a side plate 451 protruding from the inner wall surface on the upper side of the gas flow channel pipe 42 and a side plate 452 protruding from the inner wall surface on the lower side in the drawing. It is provided as follows.
The side plates 451 and 452 are formed as a barrier on an arc that stands upright in the cross-sectional direction from the inner wall surface, and as shown in FIG. 2, the side end portion of the side plate 451 faces the outlet side of the fluid as a gas channel tube. 42 is formed as an inclined surface close to the upper inner wall surface, and a side end portion of the side plate 452 is formed as an inclined surface close to the lower inner wall surface of the gas flow channel pipe 42 toward the fluid outlet side. Is preferred.

  The side plates 451 and 452 constituting the partition wall 45 can be used without any particular limitation as long as they have resistance to ozone gas and oxygen gas.

  The gas flow path 41 is formed by a region Q formed in a space where the side plate 451 and the side plate 452 face each other, and a region P as an expansion chamber adjacent to the region Q.

  In the present specification, the channel cross-sectional area refers to the area of a cross section perpendicular to the fluid traveling direction.

  As the non-magnetic breathable porous material, those mainly composed of non-magnetic inorganic fibers or non-magnetic metal fibers can be preferably used.

  As a porous body mainly composed of non-magnetic metal fibers, for example, a metal fiber nonwoven fabric obtained by processing a metal material such as stainless steel or titanium into a fiber shape to form a metal fiber, and compressing and fixing the metal fiber to form a nonwoven fabric A metal fiber nonwoven fabric sintered body obtained by sintering the metal fiber nonwoven fabric and rolling it as necessary, or a metal fiber woven fabric using metal fibers as a woven fabric can be suitably used.

  As a porous body mainly composed of non-magnetic inorganic fibers, ceramics such as silica and alumina, carbon, glass and other inorganic materials are processed into fibers to form inorganic fibers, and the inorganic fibers are compressed and fixed to a nonwoven fabric. Inorganic fiber nonwoven fabrics, or inorganic fiber woven fabrics using the inorganic fibers as woven fabrics.

  The non-magnetic porous material may be a mixture of a plurality of types of metal fibers or a mixture of a plurality of types of inorganic fibers as a main component, and a mixture of metal fibers and inorganic fibers as a main component. It may be what you did.

  As described above, when a part or the whole of the gas passage tube 42 is formed of the porous body made of the above-described metal fiber or inorganic fiber, the pore diameter is approximately 10 to 90 nm and does not necessarily have molecular selectivity. However, compared to the case where the gas flow passage tube 42 is formed of a membrane such as a molecular sieve such as zeolite or an organic substance, resistance to gases such as ozone is enhanced, and even when used for a long-term operation. In addition, the separation portion 4 in which the progress of the deterioration of the gas flow channel pipe 42 is suppressed can be obtained.

  In FIG. 2, the partition wall 45 as the protruding portion is constituted by the side plates 451 and 452 protruding in the cross-sectional direction from the upper inner wall surface in the drawing and the lower inner wall surface in the drawing as described above. It may be formed by an annular plate provided in contact with the inner wall surface of the gas flow path pipe 42.

  As shown in FIG. 2, the partition wall 45 may be formed by side plates 451 and 452 having a certain height. For example, either or both of the height h1 of the side plate 451 and the height h2 of the side plate 452 are used. Are sequentially reduced along the fluid traveling direction to sequentially increase the flow path cross-sectional area of the region Q formed by the partition wall 45, or either the height h1 of the side plate 451 or the height h2 of the side plate 452 Alternatively, both may be sequentially increased along the fluid traveling direction, and the flow path cross-sectional area of the region Q formed by the side wall 45 may be sequentially decreased.

  In FIG. 2, the partition walls 45 are provided at regular intervals along the gas flow path 41. However, the partition walls 45 are not necessarily provided at regular intervals. For example, the partition walls 45 are arranged along the fluid traveling direction. The interval between the 45 may be provided so as to decrease or increase sequentially, and the interval between the partition walls 45 may be provided at an indefinite interval.

Next, the operation of the magnetic material separating apparatus 1 will be described.
First, in FIG. 1, oxygen gas supplied from the oxygen cylinder 2 to the pipe 5 is introduced into the ozonizer 3, and oxygen molecules are ozonized by silent discharge generated between the parallel electrodes. The oxygen / ozone mixed gas obtained by the ozonizer 3 is supplied to the gas flow path 41 of the separation unit 4 through the pipe 6.

The ozone concentration in the oxygen / ozone mixed gas discharged from the ozonizer 3 is not particularly limited, but is usually about 400 g / Nm ^{3 at} maximum.

In the gas flow path 41, the strongest magnetic field is generated near the magnetic pole by the magnets 43 and 44 installed above and below the gas flow path pipe 42, and the magnetic field becomes weaker as the distance increases.
That is, the magnetic field is the weakest in the vicinity of the center point of the gas flow path 41, and the magnetic field is the strongest in the vicinity of the inner wall surface of the gas flow path tube 42, from the center point of the gas flow path 41 toward the inner wall surface of the gas flow path tube 42. A magnetic field gradient is formed so that the magnetic field is strengthened.

  Oxygen gas in the oxygen / ozone mixed gas supplied to the gas flow path 41 is attracted to the inner wall surface side of the gas flow path pipe 42 by the magnetic field gradient thus formed.

That is, the magnetic force F acting on the unit volume of the magnetic force x gas is obtained by F = xHdH / dx.
For example, when a magnetic field strength H of 6 × 10 ⁴ gauss is generated using a 6T superconducting electromagnet and a magnetic field gradient dH / dx of 1 × 10 ⁴ gauss / cm is given, the volume magnetic susceptibility 1.5 × 10 ⁻ The oxygen gas per unit volume having ⁷ will receive a magnetic force of 90 dyne, ie 9 μN. On the other hand, since ozone has only a volume magnetic susceptibility about 1/1000 of oxygen, only 9 × 10 ⁻³ μN of magnetic force acts on ozone present in the same magnetic field. Therefore, by generating a strong magnetic field gradient in the gas flow path 41 of the oxygen / ozone mixed gas, oxygen molecules are attracted to the stronger magnetic field.

  The magnetic field gradient formed in the gas flow path 41 is not particularly limited, but is usually about 30 T / m.

As shown in FIG. 2, the oxygen / ozone mixed gas supplied to the gas channel 41 first moves in the region P ₀ adjacent to the region Q 1 toward the partition wall 45. In this process, oxygen gas in the oxygen / ozone mixed gas is collected at a high rate in the vicinity of the inner wall surface of the gas channel tube 42 due to the magnetic field gradient formed in the gas channel 41, and is concentrated in the vicinity of the inner wall surface. Gas is formed.

Mixed gas passing through the region _{P 0} is formed by the side plates 451 and 452, the flow path cross-sectional area than the area _{P 0} flows into the small area _{Q 1.} Mixed gas flowing into the region Q ₁ is, after the flow rate has once rapidly increased in its inlet, with the increase in flow path cross-sectional area, while gradually decelerated, it moves toward the region P _1.

Mixed gas passing through the region Q ₁ is flows at high speed large area P ₁ of the flow channel cross-sectional area, it is attracted to the inner wall surface entirely by the negative pressure generated between the gas flow pipe 42 in the wall The In the region P ₁ as the expansion chamber, increasing the accompanying decrease the flow rate of the mixed gas rapidly the flow path cross-sectional area, the area P ₁ mixed gas stagnates. During this time, due to the magnetic field gradient formed in the gas flow channel 41, the oxygen gas in the mixed gas further moves to the inner wall surface side of the gas flow channel tube 42, and the oxygen-enriched gas near the inner wall surface of the gas flow channel tube 42 The oxygen concentration is increased.

  The oxygen-enriched gas collected in the vicinity of the inner wall surface of the gas flow channel pipe 42 is discharged to the outside of the gas flow channel 41 through the porous body constituting the gas flow channel pipe 42.

In the present embodiment, the case where the separation unit 4 including the gas flow path 41 having the configuration shown in FIG. 2 is used has been described as an example. However, the magnetic body separation device 1 is not necessarily limited to such a configuration. For example, as shown in FIG. 3A, a configuration including a direct-type gas channel 41 in which a partition wall 45 is formed only by a side plate 542 protruding from the lower side surface of the inner wall surface of the gas channel tube 42 in the figure. It is good.
Furthermore, in the gas flow path 41 of the form shown in FIG. 3A, a clearance groove may be provided on the inner wall surface of the gas flow path pipe 42 above each side plate 452.

The gas flow path 41 is preferable because the cross-sectional area of the flow path is changed stepwise so that the oxygen gas in the oxygen / ozone mixed gas can be more efficiently concentrated.
As such a configuration, for example, as shown in FIGS. 3B and 3C, the side plate 451 protrudes from the upper inner wall surface in the gas flow path pipe 42 and the lower inner wall surface protrudes. The side plate 452 may be a staggered gas flow path 41 provided alternately so that the side end portions do not face each other.

  3 (b) and FIG. 3 (c), the gas channel 41 includes a region Q1 formed by the side plate 451 side end on the upper surface side and the inner wall surface of the gas channel tube 42, and the side plate 452 side end on the lower surface side. Region Q2 formed by the gas flow channel pipe 42 and the inner wall surface of the gas flow channel pipe 42, and the region Q1, the region P, and the region having different flow channel cross-sectional areas. The channel cross-sectional area is formed to change stepwise by sequentially moving Q2.

  Further, as shown in FIG. 3 (d), the gas flow path 41 is formed in a stepped shape, and the side plate protruding from the lower inner wall surface of the gas flow path pipe 42 in the stepped portion thereof. A staircase type gas flow channel 41 in which a partition wall 45 is formed by 452 may be used.

The gas flow path 41 in FIG. 3D is configured by a region Q formed by the side plate 452 side end portion on the lower surface side and the inner wall surface of the gas flow channel pipe 42 and a region P adjacent to the region Q. .
The gas flow path 41 shown in FIG. 3D is formed to have different heights L1 and L2 in the area P, and the flow path cross-sectional area is moved by sequentially moving the area P and the area Q. Is formed so as to change in a step shape.

  Thus, by setting it as the structure which changed the flow-path cross-sectional area of the gas flow path 41 in step shape, in the area | region P after the area | region Q passage, the degree of the flow velocity fall of mixed gas can be obtained more largely, It is possible to efficiently concentrate oxygen from the mixed gas.

  Further, as shown in FIG. 3 (e), the gas flow path 41 is a honeycomb formed by a linearly formed upper flow path 46 and a honeycomb material 47 disposed on the bottom surface of the upper flow path 46. A gas flow path 41 of a mold may be used. The gas flow path 41 in FIG. 3 (e) includes a region P formed by the hole 472 and the upper flow path 46 separated by the partition walls 471 of the honeycomb material 47, the partition 471 side end of the honeycomb material 47, and the gas. It is comprised with the area | region Q formed in the space where the flow-path pipe 42 inner wall surface opposes.

As described above, the oxygen enriched gas is mixed gas separated in the gas flow path 41 outside through the porous body of the gas flow pipe 42 shown in FIG. 2, the partition wall 45 side while staying within the region P ₁ Move towards
Mixed gas passing through the region _{P 1} is the region _{Q 2} flows into the further region _P 2 a similar process to that described _{above, P 3,} ··· P _n, region _{Q 3, Q 4,} ··· _Q Repeated _n , the oxygen-depleted gas remaining in the gas flow path 41 is discharged out of the system and collected by the gas discharge pipe 7 in a state where the ozone concentration is increased.

  As described above, by providing the gas flow path 41 of the separation unit 4 with the region Q having a reduced flow path cross-sectional area, the oxygen gas from the mixed gas staying in the region P adjacent to the region Q can be obtained. Can be efficiently concentrated, and excellent separation efficiency can be obtained.

Further, as described above, the oxygen-enriched gas collected on the inner wall surface of the gas flow channel pipe 42 is sequentially released to the outside of the gas flow channel 41 in each of the regions P _{1 to} P _n , whereby oxygen in the oxygen-enriched gas. A decrease in oxygen separation rate accompanying an increase in concentration can be suppressed.

  In the present embodiment, the entire gas passage tube 42 is made of a porous body. However, at least a part of the gas passage tube 42 constituting the region P as an expansion chamber in the gas passage 41 is formed. What is necessary is just to be comprised with the porous body, for example, what comprised only the part which comprises the area | region P downstream of the fluid advancing direction among the gas flow path pipes 42 with the porous body may be sufficient.

  Furthermore, the separation part 4 may be formed by forming the gas channel pipe 42 and the partition wall 46 entirely with a porous body. For example, the gas flow having the shape shown in FIG. The gas channel pipe 42 and the partition wall 45 may be formed by punching and forming so that the channel 41 is formed.

  FIG. 4 is a diagram illustrating a schematic configuration of a magnetic substance separation device according to the second embodiment. The same or similar components as those shown in FIG. 1 will be described using the same reference numerals.

  The magnetic separation apparatus 10 according to the second embodiment is provided with a separation mechanism 11 that discharges the oxygen-enriched gas discharged from the gas flow pipe 41 to the outside of the separation unit 4 according to the first embodiment. It has been. The separation mechanism 11 is connected to the other end of the pipe 12 having one end disposed in the region between the gas flow path pipe 41 and the magnet 44. A recovery tank 13 for recovering the oxygen-enriched gas is provided.

  In the subsequent stage of the separation unit 4, a temperature monitor 14 for measuring the temperature of the oxygen-depleted gas flowing out to the gas exhaust pipe 7 and an ozone concentration measuring device 15 for measuring the ozone concentration in the oxygen-depleted gas are provided in the gas exhaust pipe 7. A temperature that is sequentially connected along the flow path, and that adjusts the temperature of the mixed gas supplied to the separation unit 4 between the ozonizer 3 and the separation unit 4 based on the measurement value measured by the temperature monitor 14. An adjustment mechanism 16 is provided.

  A reflux pipe 18 equipped with a fan 17 is provided between the rear stage of the ozone concentration measuring device 15 and the oxygen cylinder 2 and the ozonizer 3, and the mixed gas flowing out to the gas discharge pipe 7 is sent to the front stage of the ozonizer 3. It is configured to be able to reflux.

Next, the operation of the magnetic body separating apparatus 10 shown in FIG. 4 will be described.
In addition, description is simplified about the same or similar process as the operation | movement using the high concentration ozone manufacturing apparatus 1 shown in FIG.

  First, in FIG. 4, the oxygen gas supplied from the oxygen cylinder 2 to the pipe 5 is introduced into the ozonizer 3 to be ozonized, and the obtained mixed gas of ozone gas and oxygen gas is supplied to the pipe 6. The mixed gas supplied to the pipe 6 is temperature-adjusted by the temperature adjusting mechanism 16 and the magnetic susceptibility is adjusted, and then supplied to the gas flow path 41 of the separation unit 4.

  The oxygen / ozone mixed gas introduced into the gas flow path 41 is supplied to the inner wall surface of the gas flow path pipe 42 by the same mechanism as described in the separation unit 4 of the magnetic substance separation device 1 according to the first embodiment. The oxygen-enriched gas collected in the vicinity is sequentially discharged out of the gas flow path 41 through the porous body of the gas flow path pipe 42.

The oxygen-enriched gas discharged from the gas flow path 41 is separated from the separation unit 4 by the separation mechanism 11 provided in the separation unit 4 and collected in the collection tank 13.
By doing in this way, the oxygen concentration gas discharged | emitted from the gas flow path 41 can be isolate | separated to the exterior of the separation part 4 efficiently, and the oxygen concentration in the separation part 4 can be kept at a low state. For this reason, the moving speed of the oxygen-enriched gas to the outside of the gas channel 41 is increased, and an oxygen-depleted gas with an increased ozone concentration can be obtained efficiently.

  On the other hand, the oxygen-depleted gas introduced from the gas flow path 41 into the gas discharge pipe 7 is subjected to temperature measurement by the temperature monitor 14 and ozone concentration measurement by the ozone concentration measurement device 15. Then, based on the measurement result of the ozone concentration measuring device 15, part of the oxygen-depleted gas is returned to the front stage of the ozonizer 3 through the return pipe 18 by the operation of the fan 17.

The oxygen-depleted gas recirculated to the front stage of the ozonizer 3 is supplied to the ozonizer 3 through the pipe 5, and is again subjected to ozonization by silent discharge.
The oxygen / ozone mixed gas supplied from the ozonizer 3 to the pipe 6 is temperature-adjusted by the temperature adjusting mechanism 16 based on the measurement result obtained by the temperature monitor 14 and supplied to the separation unit 4 after adjusting the magnetic susceptibility. Is done.

  The temperature of the mixed gas supplied to the separation unit 4 is not particularly limited, but is preferably adjusted to about room temperature from the viewpoint of obtaining an appropriate magnetic susceptibility.

  The mixed gas supplied to the separation unit 4 in this way is the same as in the above-described embodiment, because the oxygen-enriched gas collected in the vicinity of the inner wall surface of the gas channel pipe 42 due to the magnetic field gradient in the gas channel 41 is gas While being discharged through the porous body of the flow channel 42, oxygen-depleted gas remaining in the gas flow channel 41 is supplied to the gas discharge tube 7.

Thus, based on the measurement result of the ozone concentration measuring device 15, the obtained oxygen-depleted gas is recirculated to the previous stage of the ozonizer 3, whereby the ozone concentration of the raw material gas can be controlled, and the desired ozone concentration can be set. The oxygen depleted gas can be obtained.
Further, the oxygen concentration of the oxygen-enriched gas can be controlled by adjusting the temperature of the mixed gas supplied to the separation unit 4 by the temperature adjusting mechanism 16 and appropriately adjusting the susceptibility of oxygen in the mixed gas. For this reason, based on the measurement result of the ozone concentration measuring device 15 and the measurement result of the temperature adjustment mechanism 16, the obtained oxygen-depleted gas is recirculated to the preceding stage of the ozonizer and supplied to the separation unit 4 to obtain the obtained oxygen The ozone concentration of the depleted gas can be controlled with higher accuracy.

  In the magnetic substance separation apparatus according to the above-described embodiment, the case where the fluid to be processed is an oxygen / ozone mixed gas and the magnetic substance to be separated is oxygen is shown as an example. Can be appropriately applied as long as it is a mixture of materials having different magnetic susceptibility.

It is desirable from an industrial point of view that the magnetic material as the separation target is a paramagnetic material. Paramagnetic substances include oxygen, nitrogen compounds, sodium, aluminum, and platinum.
The magnetic material is not limited to the paramagnetic material described above. For example, any magnetic material that does not have an orientation quantum number and has a so-called unpaired electron can be separated.

As mentioned above, although embodiment of this invention was described referring a specific example, said Example is mentioned as an example of this invention and does not limit this invention.
Further, in the description of each of the above embodiments, in the magnetic substance separating apparatus, description of parts and the like that are not directly required for the description of the present invention is omitted, but each element required for these is appropriately selected and used. be able to.

  In addition, all the magnetic substance separation devices that include the elements of the present invention and can be appropriately modified by those skilled in the art without departing from the spirit of the present invention are included in the scope of the present invention. The scope of the present invention is defined by the appended claims and equivalents thereof.

DESCRIPTION OF SYMBOLS 1,10 ... Magnetic substance separation apparatus, 2 ... Oxygen cylinder, 3 ... Ozonizer, 4 ... Separation part, 41 ... Gas flow path, 42 ... Gas flow path pipe, 43, 44 ... Magnet, 45 ... Septum, 451, 452 ... Side plates 5, 6, 12 ... piping, 7 ... gas discharge pipe, 11 ... separation mechanism, 13 ... collection tank, 14 ... temperature monitor, 15 ... ozone concentration measuring device, 16 ... temperature adjustment mechanism, 17 ... fan, 18 ... Reflux piping, P, Q ... area

Claims (7)

A magnetic material separation device that circulates a fluid containing a magnetic material through a flow path made of a breathable material having a magnetic field gradient, separates the magnetic material outside the flow channel, and concentrates molecules having a magnetic susceptibility smaller than the magnetic material. There,
A magnetic material separating apparatus comprising: a plurality of protrusions protruding from an inner wall surface of the flow path in a cross-sectional direction to reduce a flow path cross-sectional area at predetermined intervals along the flow path.   The flow path is composed of a breathable porous body in which inorganic fibers or metal fibers are compressed and fixed, and gas molecules near the inner wall surface of the flow path are moved out of the flow path through the porous body. The magnetic substance separation device according to claim 1, wherein the magnetic substance separation device is discharged.   The magnetic body separating apparatus according to claim 1, wherein the protrusion is a barrier on an arc that stands upright in a cross-sectional direction.   The magnetic body separation device according to any one of claims 1 to 3, wherein a cross-sectional area of the flow path of the fluid changes stepwise. The magnetic material separation device has temperature measuring means for measuring the temperature of the fluid after separating the magnetic material, and concentration measuring means for measuring the concentration of gas molecules contained in the fluid,
2. A feedback control mechanism for returning a part or all of the fluid after separating the magnetic material to the previous stage of the flow path having the magnetic field gradient according to the measurement results of the temperature measuring means and the concentration measuring means. 5. The magnetic material separating apparatus according to any one of 4 above.   The magnetic material separating apparatus according to claim 1, wherein the separation target from the fluid is a paramagnetic material.   The magnetic substance separation device according to claim 1, wherein the separation target from the fluid is a substance having unpaired electrons.

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