JP2014208302A - Biological test apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic sensor capable of superior transmission and reception of ultrasonic waves.SOLUTION: The ultrasonic sensor includes: a sensor array substrate 2 which has an opening 211; a support film 3 which is provided on the sensor array substrate 2 and closes the opening 211; a piezoelectric body disposed on the support film 3, in an inner region of the opening 211 in a plane view from the thickness direction of the support film 3; a first resin portion 52 which forms a first space S1 closed off from the outside space between the first resin portion 52 and the support film 3, in at least a region in which the opening 211 is formed in the plane view, the first resin portion having a contacting portion 522 which faces the opening 211 and is configured to contact with fingers; a second resin portion 53 which forms a second space S2 which is closed off from the outside space and communicates with the first space S1; and an ultrasonic-wave transmitting medium 6 which fills the first and second spaces S1 and S2. A flexible portion 532, having lower rigidity than the support film 3 in the film thickness direction, is provided in at least a portion of the second resin portion 53.

Description

  The present invention relates to an ultrasonic sensor, and more particularly to an ultrasonic sensor that receives and transmits ultrasonic waves to a living body.

2. Description of the Related Art Conventionally, an ultrasonic sensor that detects the position or state of an inspection target using an ultrasonic transducer that receives and transmits ultrasonic waves is known (see, for example, Patent Document 1).
Patent Document 1 discloses a liquid detection unit (ultrasonic sensor) including an ultrasonic output unit including an ultrasonic transducer and an acoustic impedance matching layer provided on the ultrasonic output unit. In this liquid detection unit, an ultrasonic wave receiving / transmitting surface is formed on a part of one surface side of the ultrasonic wave output unit. The acoustic impedance matching layer is formed on one side of the ultrasonic output unit, and has an output surface for outputting ultrasonic waves on the side opposite to the surface in contact with the ultrasonic output unit. On this output surface, a fluidity binder holding recess is formed. When the output surface of the liquid detection unit is brought into contact with the container, the fluidity binder holding recess is filled with the fluidity binder, and the output surface is placed in the container. Make contact.
Also, a cylindrical concave portion forming member is provided on one surface side of the ultrasonic output portion, and an acoustic impedance layer is filled inside the concave portion forming member to form a fluidity binder holding concave portion, and the output surface is A structure is disclosed in which a fluidity binder holding recess is filled with a fluidity binder when contacting the container.

JP 2009-25179 A

By the way, when detecting the state of a living body using an ultrasonic transducer, it is conceivable that the output surface of the liquid unit described in Patent Document 1 is brought into contact with the living body to transmit and receive ultrasonic waves. In order to satisfactorily detect the state of the living body, it is preferable that the output surface is in close contact with the living body.
However, in Patent Document 1 described above, a fluid binder holding recess is formed on the output surface, and the fluid binder holding recess is filled with a fluid binder and brought into contact with a living body. In this case, when the fluid binder flows out of the fluid binder holding recess, the living body cannot be brought into close contact with the output surface, or bubbles are generated between the living body and the output surface, and the ultrasonic waves are reflected by the bubbles. There is a problem that correct detection processing cannot be performed. Therefore, it is conceivable that the output surface is flattened without providing the recess, and the living body is pressed against the output surface to be brought into close contact therewith. However, in this case, although the living body and the output surface are in close contact with each other, the output surface is bent inward, and the ultrasonic wave transmitting / receiving surface of the ultrasonic transducer provided adjacent to the acoustic impedance layer is also deformed.
In addition, a cylindrical concave portion forming member is formed on one surface side where the ultrasonic wave receiving / transmitting surface of the ultrasonic output portion is provided, and an output surface is formed at an end portion of the concave portion forming member so that the inside of the concave portion forming member is formed. A configuration is also possible in which a liquid acoustic impedance layer is provided inside the sealed recess-forming member. However, even in this case, when the living body is brought into close contact with the output surface, the internal pressure of the acoustic impedance layer of the liquid increases due to the deflection of the output surface, and the ultrasonic wave receiving / transmitting surface is also deformed by this internal pressure.
As described above, when the ultrasonic transducer is deformed, there is a problem in that the amount of vibration displacement of the ultrasonic wave receiving / transmitting surface becomes small, and ultrasonic waves cannot be received / transmitted satisfactorily.

  An object of the present invention is to provide an ultrasonic sensor that can receive and transmit ultrasonic waves satisfactorily.

  The ultrasonic sensor of the present invention includes a support having an opening, a support film that is provided on the support and closes the opening, and the opening in plan view as viewed from the thickness direction of the support film. A piezoelectric body formed by sequentially laminating a lower electrode, a piezoelectric film, and an upper electrode on the support film, and in the area where at least the opening is formed in the plan view, the support A first resin material that forms a first space sealed from an external space between the film and a contact portion that is opposed to the opening and is capable of contacting an inspection object; and the first space. A second resin material that forms a second space sealed from an external space, and an ultrasonic transmission medium that fills the first space and the second space, At least in part, the rigidity of the support film in the film thickness direction Wherein the flexible portion of the small rigidity are provided than.

In the present invention, a first space is formed between the first resin material and the region that closes at least the opening of the support film, and this first space is filled with an ultrasonic transmission medium. As this ultrasonic transmission medium, for example, water or physiological saline for efficiently transmitting ultrasonic waves can be used, and the ultrasonic waves can be transmitted well without being attenuated. In addition, a contact portion is provided in a region facing the opening of the first resin material, and an ultrasonic wave generated by the vibration of the support film is transmitted to the inspection object by bringing the inspection object into close contact with the contact portion. The ultrasonic wave reflected from the inspection object can be transmitted to the support film.
Here, as described above, when the inspection target is brought into contact with the contact portion of the first resin material, the contact portion is bent, and the internal pressure in the first space is increased. However, in the present invention, the second resin material provides a second space that communicates with the first space, and the second resin material is provided with a flexible portion that is less rigid than the support film. For this reason, even when the internal pressure in the first space increases, the flexible portion bulges toward the external space, and the ultrasonic transmission medium in the first space flows into the second space.
Therefore, even when the inspection object is brought into close contact with the contact portion and the internal pressure in the first space is increased, the deformation of the support film can be suppressed. Therefore, when a voltage is applied to the piezoelectric body to vibrate the support film, or when ultrasonic waves are received and vibrated by the support film, the vibration of the support film is not attenuated, and the ultrasonic waves can be received and transmitted satisfactorily.

  In the ultrasonic sensor according to the present invention, the support film covers one surface side of the support, and the first resin material opens to the support film, and the opening end is connected to the support film. The second resin material has an opening with respect to the support film, and the opening end of the second resin material is connected to the support film to form the second space. It is preferable that the first resin material and the second resin material are integrally formed.

  In this invention, since the 1st resin material and the 2nd resin material are integrally formed, the resin material of the same material can be used and manufacturing cost can be reduced. In addition, the first space and the second space can be easily formed only by the process of closing the opening ends of the first recess of the first resin material and the second recess of the second resin material with the support film, and the manufacturing process is facilitated. it can.

  In the ultrasonic sensor of the present invention, the opening of the support is formed so as to penetrate in the thickness direction of the support, the support film covers one side of the support, and the first resin material is The first opening is formed with respect to the support film, and the opening end is connected to the other surface side opposite to the one surface side of the support, thereby forming the first recess, and the second It is preferable that the resin material has a second recess that forms the second space by opening the support film and connecting the opening end to the other surface of the support.

By the way, when the opening end of each recessed part is connected to the support film which covers the one surface side of the support body, the test object is strongly adhered to the contact portion of the first resin material facing the opening portion of the support body. Then, there is a possibility that the abutting portion contacts the support film and contacts the piezoelectric body provided on the support film. As a result, the support film and the piezoelectric body may be damaged.
In this invention, the opening end of the 1st recessed part of a 1st resin material and the 2nd recessed part of a 2nd resin material is connected to the other surface side of the support body of the side which the support film does not cover. For this reason, in addition to the inside of the first recess, the first space is formed including the inner region of the opening. Then, when the inspection target is in close contact with the contact portion of the first resin material and the contact portion is pressed and greatly bent toward the support film side, the contact portion comes into contact with the support. . That is, the contact portion does not contact the support film or the piezoelectric body, and the support film or the piezoelectric body can be prevented from being damaged.

  In the ultrasonic sensor according to the present invention, when the displacement of the flexible portion is detected by the displacement detecting means for detecting the displacement of the flexible portion, the voltage application processing to the piezoelectric body or the piezoelectric is detected. It is preferable to include an ultrasonic transmission unit that performs any one of the detection processes of the signal output from the body.

  In the present invention, the displacement detecting means for detecting the displacement of the flexible portion is provided. For this reason, when the displacement detection means detects the displacement of the flexible portion of the second resin material, it can be detected that the inspection object has come into contact with the contact portion. Therefore, after detecting the contact of the object to be inspected by the displacement detecting unit, the ultrasonic wave is surely made to reach the object to be inspected by performing the voltage application process of transmitting the ultrasonic wave by the ultrasonic transmitting unit. Can do.

  In the ultrasonic sensor according to the present invention, the displacement detection unit detects a displacement amount of the flexible portion, and the ultrasonic sensor determines whether the displacement amount of the flexible portion is within a predetermined threshold range. A determination unit that determines whether the displacement of the flexible portion is within a predetermined threshold range by the determination unit, or the voltage application process or the detection process. It is preferable to implement either one of these.

By the way, when the test object strongly contacts the contact portion of the first resin material, the support film provided with the piezoelectric body may be greatly bent. Even if an ultrasonic wave is transmitted to the inspection object in such a state, the ultrasonic wave reflected by the inspection object is not transmitted well to the support film, and there is a possibility that an accurate detection process cannot be performed.
In the present invention, the displacement detection means detects the displacement amount of the flexible portion, and the determination portion determines whether or not the displacement amount is within a predetermined threshold range. Then, the ultrasonic wave transmitting means performs either a voltage application process or a detection process for transmitting an ultrasonic wave when the determination unit determines that the displacement amount is within a predetermined threshold range. That is, when the displacement amount is outside the predetermined threshold range, the ultrasonic wave transmitting means does not perform the voltage application process and the detection process, and only applies the voltage application when the displacement amount is within the predetermined threshold range. Processing can be performed, and accurate detection processing can be performed.

1 is an external view showing an external appearance of a biopsy device according to a first embodiment of the present invention. The figure which shows the state with which the said biopsy apparatus which concerns on the said 1st Embodiment is mounted | worn with the human body. Sectional drawing which shows typically the said biopsy apparatus which concerns on the said 1st Embodiment. FIG. 3 is a cross-sectional view showing the ultrasonic transducer according to the first embodiment. The schematic diagram which shows the arrangement | positioning layout of the ultrasonic transducer | vibrator which concerns on the said 1st Embodiment. Sectional drawing which shows typically the effect | action of the said biopsy apparatus which concerns on the said 1st Embodiment. Sectional drawing which shows typically the effect | action of the biopsy apparatus which concerns on 2nd Embodiment of this invention. Sectional drawing which shows typically the effect | action of the modification of the said biopsy apparatus which concerns on the said 2nd Embodiment. The block diagram of the biopsy apparatus which concerns on 3rd Embodiment of this invention. Sectional drawing which shows typically the effect | action of the biopsy apparatus which concerns on 4th Embodiment of this invention. The block diagram of the biopsy apparatus which concerns on the said 4th Embodiment. The flowchart of the biopsy apparatus which concerns on the said 4th Embodiment.

[First Embodiment]
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, a first embodiment according to the invention will be described with reference to the drawings.
FIG. 1 is an external view showing an external appearance of a biopsy device 1 that is an ultrasonic sensor according to the first embodiment, and FIG. 2 is a view showing a state in which the biopsy device 1 is attached to a finger. FIG. 3 is a cross-sectional view schematically showing the ultrasonic wave receiving / transmitting unit 10 incorporated in the biological examination apparatus 1. In FIG. 3, the band 200 is not shown for the sake of illustration.

[Configuration of biopsy device]
As shown in FIGS. 1 and 2, the biopsy device 1 of the present embodiment is a device that is worn on a human finger using a band 200. The biopsy apparatus 1 includes an apparatus main body 100 and a band 200 for attaching the apparatus main body 100 to a finger. The apparatus main body 100 includes an ultrasonic wave transmitting / receiving unit 10 and an ultrasonic wave transmitting / receiving unit 10. And a front panel 20 provided with a display panel for displaying an input button for operating the biopsy apparatus 1 and a test result. Yes.
The biopsy apparatus 1 transmits ultrasonic waves to the fingers and receives ultrasonic waves reflected by biological components such as blood vessels in the fingers, for example, to detect blood flow conditions such as pulse and blood pressure. Examination and other biological conditions are examined.
In the present embodiment, the biopsy device 1 is described as an example of a device that is worn on a human finger, but is not limited thereto, and is worn on other parts such as a wrist, ankle, and toe. For example, there is no attachment device such as the band 200, and the inspector presses the ultrasonic wave transmitting / receiving unit 10 against the living body, for example, a device for inspecting the built-in state of the living body or the fetal state with ultrasonic waves. May be. Furthermore, the present invention is not limited to a target for living bodies, and may be provided in any apparatus that inspects the inside or surface portion of an inspection target using ultrasonic waves.

  The ultrasonic wave transmitting / receiving unit 10 is provided on one surface side that comes into contact with the finger when the biopsy device 1 is attached to the finger, and as shown in FIG. 1, a contact unit 522 as a contact unit described later. And a flexible portion 532. Then, by pressing the apparatus main body 100 against the finger with the band 200, the contact portion 522 and the finger can be easily brought into close contact with each other without, for example, an operation of pressing the ultrasonic wave transmitting / receiving unit 10 by the examiner. It becomes possible to transmit ultrasonic waves between the living body and the ultrasonic wave transmitting / receiving unit 10.

A control part is electrically connected to each structure of the ultrasonic transmission / reception part 10 and the front panel 20, and controls these operation | movement. Specifically, the control unit performs control to switch the operation in the ultrasonic wave transmission / reception unit 10 to either the ultrasonic wave transmission mode or the ultrasonic wave reception mode, and transmits ultrasonic waves in the ultrasonic wave transmission mode. Control to receive ultrasonic waves in the ultrasonic wave reception mode. Further, in the ultrasonic reception mode, a blood flow state such as a pulse or blood pressure is measured based on a detection signal output from the ultrasonic transmission / reception unit 10.
The control unit also performs, for example, start and end of inspection, display control of inspection results on the display panel, and the like based on operation signals input from input buttons provided on the front panel 20.

[Configuration of ultrasonic transmitter / receiver]
As shown in FIG. 3, the ultrasound transmitting / receiving unit 10 of the biological examination apparatus 1 is disposed on the sensor array substrate 2 as a support, the support film 3 stacked on the sensor array substrate 2, and the support film 3. A plurality of ultrasonic transducers 4 that receive and transmit ultrasonic waves, a resin material 5 that covers the support film 3 and forms a space S between the support film 3, and an ultrasonic transmission medium 6 that fills the space S And is composed roughly. The configuration of the ultrasonic transducer 4 will be described later.

  The sensor array substrate 2 includes a first support portion 21 that is an area where a plurality of ultrasonic transducers 4 are disposed, and a second support portion 22 adjacent to the outer peripheral portion of the first support portion 21. It is formed of a semiconductor forming material such as crystalline silicon (Si). Further, the sensor array substrate 2 corresponds to a formation position of an ultrasonic transducer 4 to be described later, and is a plan view of the sensor array substrate 2 viewed from a direction orthogonal to the substrate surface of the sensor array substrate 2 (sensor plane). An opening 211 that is substantially circular as viewed) is formed. The radius 211 of the opening 211 is, for example, 50 μm.

A support film 3 is formed on the sensor array substrate 2 with a uniform thickness. Thereby, the opening 211 is closed by the support film 3. The thickness h ₁ of the support film 3 is, for example, 2 μm. In the following description, a region of the support film 3 that closes the opening 211 is referred to as a diaphragm 30.
Specifically, the support film 3 has a two-layer structure including a SiO ₂ layer formed on the sensor array substrate 2 and a ZrO ₂ layer formed on the SiO ₂ layer. Such a support film 3 is formed by, for example, forming a SiO ₂ layer by thermally oxidizing the sensor array substrate 2 formed of Si, forming a Zr layer, and thermally oxidizing the Zr layer to form a ZrO ₂ layer. And formed.
The support film 3 has a two-layer structure including an SiO ₂ layer and a ZrO ₂ layer. However, in the following calculation in this embodiment, the Young's modulus E of the support film 3 is two of the support film 3. The layers are combined to about 70 GPa. As described above, since the radius a of the opening 211 is 50 μm, the radius a of the diaphragm 30 is also 50 μm, and the area is 7.85 × 10 ⁻³ (mm ² ). In this case, the bending rigidity D of the diaphragm 30 is 5.13 × 10 ⁻⁸ (Pa · m ³ ) when calculated from the following equation (1) with a Poisson's ratio ν of 0.3.
In this embodiment, an example is shown in which the opening 211 is formed in a circular shape with good stress balance when the diaphragm 30 is bent. However, the opening 211 may have a rectangular or elliptical shape, for example.

Ｄ：曲げ剛性（Ｐａ・ｍ³）、Ｅ：ヤング率（Ｐａ）、ｈ：厚さ寸法（ｍ）、ν：ポアソン比

D: Flexural rigidity (Pa · m ³ ), E: Young's modulus (Pa), h: Thickness dimension (m), ν: Poisson's ratio

Then, based on the bending rigidity D, the maximum deflection amount ω _max of the diaphragm 30 that closes the opening 211 is 1.9 × 10 ⁻¹² × q (m) when calculated from the following equation (2).

ω_max：最大撓み量（ｍ）、ｑ：単位面積当たりの荷重（Ｐａ）、ａ：開口部、可撓部の半径（ｍ）

ω _max : maximum amount of deflection (m), q: load per unit area (Pa), a: radius of opening and flexible part (m)

The resin material 5 is in close contact with the outer peripheral edge of the support film 3 on the sensor array substrate 2, is formed so as to surround the sensor array substrate 2, and forms a space S that is sealed from the external space with the sensor array substrate 2. To do. The space S is filled with the ultrasonic transmission medium 6. The resin material 5 is made of, for example, silicone rubber.
More specifically, the resin material 5 divides the space S into the first space S1 and the second space S2, and the partition portion 51 in which the communication holes 511 that communicate the spaces S1 and S2 are formed, and the partition portion. 51 and the support film 3, together with the first resin part 52 that forms the first space S1 on the first support part 21 and the second space S2 on the second support part 22 together with the partition part 51 and the support film 3. Second resin part 53 to be provided.

  The first resin part 52 faces the first resin wall part 521 standing on the outer peripheral edge of the first support part 21 of the sensor array substrate 2 and the first support part 21, and is on one surface side of the apparatus main body 100. And a contact portion 522 facing it. Here, the contact portion 522 is formed from the end portion of the first resin wall portion 521 on the side away from the support film 3 to the end portion of the partition portion 51 on the side away from the support film 3. That is, these 1st resin wall part 521, the contact part 522, and the division part 51 comprise the 1st resin material of this invention, and are formed with the 1st resin wall part 521, the contact part 522, and the division part 51. This portion is the first recess of the present invention. Further, the first resin wall portion 521, the contact portion 522, and the partition portion 51 form a first space S <b> 1 sealed from the external space between the support film 3 formed on the sensor array substrate 2. Yes.

  The second resin portion 53 includes a second resin wall portion 531 erected along the outer peripheral edge of the second support portion 22 provided in the out-of-plane direction of the first support portion 21 on the support film 3, and a second And a flexible portion 532 facing the support portion 21 and facing one side of the apparatus main body 100. Here, the flexible portion 532 is formed from the end portion of the second resin wall portion 531 on the side away from the support film 3 to the end portion of the partition portion 51 on the side away from the support film 3. That is, these 2nd resin wall part 531, the flexible part 532, and the partition part 51 comprise the 2nd resin material of this invention, and the 2nd resin wall part 531, the flexible part 532, and the partition part 51 are the same. The part to be formed is the second recess of the present invention. In addition, the second resin wall portion 531, the flexible portion 532, and the partition portion 51 form a second space S2 sealed from the external space between the support film 3 formed on the sensor array substrate 2. ing.

  As described above, the partition portion 51 is a portion that partitions the space S into the first space S1 and the second space S2, and on the support film 3, the first support portion 21 and the second support in the sensor plan view. It is formed along the boundary with the portion 22. Further, the communication hole 511 formed in the partition 51 is formed between the support film 3 and the partition 51 as shown in FIG. 3, but may be formed through the partition 51. Good. Further, the number of the communication holes 511 formed may be a configuration in which a plurality of communication holes 511 communicating with the first space S1 and the second space S2 are formed. A configuration in which one communication hole 511 having a longitudinal shape is formed along a direction orthogonal to the paper surface in FIG.

In the resin material 5 as described above, the wall thickness dimension T of the first resin wall part 521 and the second resin wall part 531 is, for example, 1 mm, and the thickness dimension h _{2 of} the contact part 522 and the flexible part 532 is the same. And 1 mm. Moreover, the height dimension H (the height dimension H from the support film 3 of the 1st resin wall part 521, the 2nd resin wall part 531 and the partition part 51) which the resin material 5 covers the support film 3 is 2 mm. . Further, in the sensor plan view, the size of the contact portion 522 is 3 mm × 3 mm, and the size of the flexible portion 532 is 3 mm × 2 mm. That is, the area of the flexible part 532 is 6 (mm ² ). As described above, silicone rubber is used as the resin material 5, and the Young's modulus E of the silicone rubber at room temperature is about 4.0 × 10 ⁶ under the temperature condition from room temperature to human body temperature. (Pa). In this case, the bending rigidity D of the flexible portion 532 is 4.44 × 10 ⁻⁴ (Pa · m ³ ) when calculated using the above-described equation (1) with the Poisson's ratio ν being 0.5.
In this embodiment, the shape of the flexible portion 532 is a rectangular shape in the sensor plan view, but the area of the flexible portion 532 is easy to compare the flexible portion 532 with the circular diaphragm 30 in the sensor plan view. Is 6 (mm ² ), here, assuming that the flexible portion 532 is circular, the radius a is 1.5 × 10 ⁻³ (m).
Then, based on the bending rigidity D, the maximum deflection amount ω _max of the flexible portion 532 is 1.78 × 10 ⁻¹⁰ × q (m) when calculated using the above equation (1).
In the present embodiment, the silicone rubber is used for the resin material 5, but the present invention is not limited to this, and any material having the same physical properties may be used.

In the present embodiment, the volume of the first space S1 is formed to be larger than the volume of the second space S2. The volume of each space S1, S2 is not limited to this, and the volume of the second space S2 may be formed larger than the volume of the first space S1, or both may be substantially the same volume.
In the present embodiment, the second space S2 is formed only at one place. However, for example, the second space S2 may be formed at two places with the first space S1 interposed therebetween. It is good also as a structure formed over a perimeter periphery.

  The ultrasonic transmission medium 6 is for efficiently transmitting ultrasonic waves. In this embodiment, since it is an apparatus for inspecting the inside of a human body with ultrasonic waves, a liquid having an acoustic impedance substantially equal to the acoustic impedance of the human body, such as water or physiological saline, is used. Further, as the ultrasonic transmission medium 6, a highly viscous carboxymethyl cellulose aqueous solution, castor oil, liquid paraffin, or the like may be used.

FIG. 4 is a cross-sectional view showing the ultrasonic transducer 4. FIG. 5 is a schematic diagram showing an arrangement layout of the ultrasonic transducer 4.
The ultrasonic transducer 4 is, for example, an element that transmits an ultrasonic wave based on a signal from the control unit or receives an ultrasonic wave and outputs it to the calculation control unit. As shown in FIG. 3, a plurality of the ultrasonic transducers 4 are provided on the first support portion 21 of the sensor array substrate 2. For example, in the sensor plan view, as shown in FIGS. Ten pieces are arranged in the horizontal direction.
Such an ultrasonic transducer 4 includes the first support portion 21 of the sensor array substrate 2, the support film 3, and the piezoelectric body 41.
As described above, the first support portion 21 is a portion where the ultrasonic transducers 4 of the sensor array substrate 2 are arranged, and the opening portions 211 are formed at the positions where the ultrasonic transducers 4 are formed.
As described above, the support film 3 is formed on the sensor array substrate 2 and forms the diaphragm 30 that closes the opening 211.

  The piezoelectric body 41 is a film-like member formed on the diaphragm 30 at the center position of the diaphragm 30. The piezoelectric body 41 is formed in a circular shape in plan view with a diameter L of, for example, 80 μm, and is smaller than the diameter (100 μm) of the opening 211. In addition, each piezoelectric body 41 is disposed so that the pitch P of each piezoelectric body 41 is 200 μm. The piezoelectric body 41 includes a piezoelectric film 411 and electrodes (a lower electrode 412 and an upper electrode 413) that apply a voltage to the piezoelectric film 411.

The piezoelectric film 411 is formed, for example, using PZT (lead zirconate titanate) as a film. In this embodiment, PZT is used as the piezoelectric film 411. However, any material may be used as long as the material can be contracted in the plane direction by applying a voltage. For example, lead titanate ( PbTiO ₃ ), lead zirconate (PbZrO ₃ ), lead lanthanum titanate ((Pb, La) TiO ₃ ), or the like may be used.
The lower electrode 412 and the upper electrode 413 are electrodes formed with the piezoelectric film 411 interposed therebetween. The upper electrode 413 and the lower electrode 412 are each drawn out by a drawing portion (not shown) formed on the opening 211 side, and are connected to the control unit of the biological examination apparatus 1.

In the ultrasonic transducer 4, when a predetermined drive voltage is applied between the electrodes 412 and 413 of the piezoelectric body 41 from the control unit, the piezoelectric film 411 expands or contracts in the surface direction. Accordingly, the diaphragm 30 vibrates in the film thickness direction, and ultrasonic waves having a frequency corresponding to a predetermined drive voltage period are transmitted from the diaphragm 30 toward the contact portion 522. That is, the ultrasonic transducer 4 functions as a transmitter that transmits ultrasonic waves toward fingers.
The ultrasonic transducer 4 also functions as a receiving unit that receives ultrasonic waves reflected by a blood vessel or the like inside the finger. In this case, the diaphragm 30 is vibrated by the reflected ultrasonic waves, and an electrical signal corresponding to the amplitude and frequency is output from the piezoelectric body 41 to the control unit via the lower electrode 412 and the upper electrode 413.
Here, the control unit switches the mode of the ultrasonic transducer 4 to either the ultrasonic transmission mode or the ultrasonic reception mode, so that the ultrasonic transducer 4 functions as either the reception unit or the transmission unit. .
In the present embodiment, each ultrasonic transducer 4 is used as both an ultrasonic transmission unit and a reception unit and is switched to one of the functions by the control unit. A configuration in which a plurality of dedicated transmission transducers and reception transducers dedicated to ultrasonic reception are arranged may be employed. In this case, the transmitting transducers and the receiving transducers may be arranged on one array substrate by, for example, alternately arranging the transmitting transducer substrate and the receiving transducer. The receiving array substrate configured by a plurality of receiving transducers may be arranged at different positions.

[Operation of biopsy device]
FIG. 6 is a cross-sectional view schematically showing the operation of the biological examination apparatus 1.
In order to inspect the blood vessel state using the above-described biopsy device 1, first, the biopsy device 1 is mounted on a human finger using a band 200 (see FIG. 1). At this time, by appropriately adjusting the tightening force of the band 200, the biopsy device 1 is mounted and fixed so that the fingers are in close contact with the contact portion 522 of the biopsy device 1. At this time, the amount of bending of the diaphragm 30 changes due to the tightening force of the band 200. Normally, if the maximum amount of bending ω _max of the diaphragm 30 is about 1.9 × 10 ⁻¹² × q (m), It will be in the state contact | adhered to the contact part 522. FIG.

By attaching the biopsy device 1 in this way, the contact portion 522 is bent toward the support film 3 side. Thereby, while the volume of 1st space S1 becomes small, the internal pressure of 1st space S1 rises.
Here, as described above, the bending rigidity D of the diaphragm 30 is sufficiently larger than the bending rigidity D of the flexible portion 532. For this reason, the ultrasonic transmission medium 6 in the first space S1 flows to the second space S2 through the communication hole 511 due to the increase in the internal pressure of the first space S1, and the flexible portion 532 having a small bending rigidity D is directed to the external space. Bulge out. Further, as described above, the maximum deflection amount ω _max of the diaphragm 30 is about 1.9 × 10 ⁻¹² × q (m), and the maximum deflection amount ω _max of the flexible portion 532 is 1.78 × 10 ^−10. Since it is about xq (m), only the flexible portion 532 bulges and the diaphragm 30 is not bent.

For example, when a user operates an input button provided on the front panel 20 (see FIG. 2) and an operation signal for starting measurement is input to the control unit, the control unit A predetermined drive voltage is applied between the electrodes 412 and 413. Thereby, each ultrasonic transducer 4 transmits an ultrasonic wave from the diaphragm 30 toward the finger. Then, the ultrasonic wave is transmitted to the inside of the finger that is in close contact with the contact portion 522 via the ultrasonic transmission medium 6 and the contact portion 522 whose acoustic impedance is substantially equal to that of the human body. Further, immediately after the transmission of the ultrasonic wave, the control unit stops the voltage application to the electrodes 412 and 413 of the ultrasonic transducer 4. That is, the control unit switches the ultrasonic transducer 4 from the ultrasonic transmission mode to the ultrasonic reception mode.
On the other hand, when the ultrasonic wave transmitted from the ultrasonic transducer 4 is reflected by, for example, a blood vessel in the finger, it propagates again through the ultrasonic transmission medium 6 from the contact portion 522 and is received by the diaphragm 30. Thereby, the diaphragm 30 vibrates according to the intensity of the received ultrasonic wave, and a detection signal (current) is output from the piezoelectric body 41 on the diaphragm 30 to the control unit. And a control part measures blood-flow conditions, such as a pulse and a blood pressure, based on this input detection signal, and implements control which displays a measurement result on the display panel provided in the front panel 20, for example.

[Effects of First Embodiment]
According to the biopsy apparatus 1 of the first embodiment described above, the following effects are obtained.
In the present embodiment, a first space S1 is formed between a region that closes the opening 211 of the support film 3 and the first resin portion 52, and the ultrasonic transmission medium 6 is filled in the first space S1. ing. Since the ultrasonic transmission medium 6 uses a liquid having an acoustic impedance substantially equal to the acoustic impedance of the human body, the ultrasonic wave can be transmitted well without being attenuated. In addition, a contact portion 522 is provided in a region facing the opening 211 of the first resin portion 52, and the finger is brought into close contact with the contact portion 522, thereby transmitting ultrasonic waves generated by the vibration of the diaphragm 30 to the inside of the finger. The ultrasonic wave reflected by the blood vessel of the finger can be transmitted to the diaphragm 30.
Here, as described above, when the finger is brought into contact with the contact portion 522 of the first resin portion 52, the contact portion 522 is bent, and the internal pressure in the first space S1 is increased. However, in this embodiment, the second resin portion 53 provides a second space S2 that communicates with the first space S1, and the second resin portion 53 has a bending stiffness D that is smaller than the bending stiffness D of the diaphragm 30. A flexible portion 532 having the above is provided. For this reason, even when the internal pressure in the first space S1 increases, the flexible portion 532 bulges toward the external space, and the ultrasonic transmission medium 6 in the first space S1 flows into the second space S2.
Accordingly, even when the finger is brought into close contact with the contact portion 522 and the internal pressure in the first space S1 is increased, the deformation of the diaphragm 30 can be suppressed. Therefore, when the diaphragm 30 is vibrated by applying a voltage to the piezoelectric body 41, or when the ultrasonic wave is received and vibrated by the diaphragm 30, the vibration of the diaphragm 30 is not attenuated and the ultrasonic wave can be received and transmitted satisfactorily. .

[Second Embodiment]
Next, a biopsy device 1A according to a second embodiment will be described with reference to the drawings.
FIG. 7 is a cross-sectional view schematically showing the operation of the biological examination apparatus 1A according to the second embodiment. In the description of the drawings, the same components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted. The same applies to the following embodiments.
The biological examination apparatus 1A according to the second embodiment is such that a space S is formed between the sensor array substrate 2 and the resin material 5, and the support film 3 is disposed on the surface of the sensor array substrate 2 on the external space side. This is different from the first embodiment. That is, the arrangement position of the ultrasonic transducer 4 of the first embodiment is changed.

In the biopsy device 1A, the support film 3 is disposed on the surface of the sensor array substrate 2 on the external space side, and the piezoelectric body 41 is on the support film 3 opposite to the side facing the contact part 522 of the first resin part 52. The structure arrange | positioned on the surface of this is provided. That is, the piezoelectric body 41 is disposed outside the first space S1. In these configurations, the inside of the opening 211 of the first support portion 21 is also the first space S1, and the ultrasonic transmission medium 6 is also filled in the opening 211.
In the ultrasonic transducer 4 in the first embodiment, ultrasonic waves are transmitted from the surface of the piezoelectric film 411 opposite to the side facing the support film 3, but the ultrasonic transducer in the present embodiment is used. 4, ultrasonic waves are transmitted from the surface of the piezoelectric film 411 facing the support film 3.

According to the living body inspection apparatus 1A of the second embodiment described above, the same effects as those of the first embodiment can be obtained even in the configuration in which ultrasonic waves are transmitted from the surface of the piezoelectric film 411 facing the support film 3. .
Further, the finger closely contacts the contact portion 522, so that the contact portion 522 contacts the first support portion 21 of the sensor array substrate 2 even when the contact portion 522 is pressed and greatly bent toward the support film 3 side. Therefore, the piezoelectric body 41 and the support film 3 can be prevented from being damaged without contacting the piezoelectric body 41 and the support film 3.

[Modification of Second Embodiment]
FIG. 8 is a cross-sectional view schematically showing the operation of the biological examination apparatus 1B according to the modification of the second embodiment.
In the present modification, the first support portion 21 is formed with a through hole 212 that penetrates in a direction orthogonal to the film thickness direction of the support film 3.

  Here, when the finger strongly presses the contact portion 522, the contact portion 522 may come into contact with the first support portion 21 as shown in FIG. 8. In this case, in the configuration of the second embodiment, the first space S1 is partitioned by the first resin portion 52, and the ultrasonic transmission medium 6 on the second space S2 side of the first space S1 is the second space. Although it is easy to flow to S2, the ultrasonic transmission medium 6 on the opposite side of the first space S1 to the second space S2 side may not easily flow to the second space S2 by the first support portion 21. Furthermore, when the contact part 522 contacts the 1st support part 21, the contact part 522 may block | close the opening part 211, and there exists a possibility that the diaphragm 30 may bend by the raise of the internal pressure of 1st space S1.

According to the configuration of this modification, even when the contact portion 522 contacts the first support portion 21, the through hole 212 is formed in the first support portion 21, so the second space S 2 side of the first space S 1. The ultrasonic transmission medium 6 on the opposite side can flow toward the second space S <b> 2 through the through hole 212. Therefore, the same effects as those of the above embodiments can be obtained.
Moreover, when the contact part 522 contacts the 1st support part 21, it can also prevent that the diaphragm 30 bends by the raise of the internal pressure of 1st space S1 because the contact part 522 obstruct | occludes the opening part 211. FIG.

[Third Embodiment]
Next, a biopsy device 1C according to a third embodiment will be described with reference to the drawings. Hereinafter, description will be made with reference to FIGS.
FIG. 9 is a block diagram of a biopsy device 1C according to the third embodiment.
The biopsy apparatus 1C according to the third embodiment controls the biopsy apparatus 1C by detecting a displacement sensor 7 serving as a displacement detection unit that detects the displacement of the second resin material 52 and a detection signal from the displacement sensor 7. It differs from each said embodiment by the point by which the control part 8 to perform is provided.

The displacement sensor 7 detects the displacement of the flexible portion 532 of the second resin portion 53. The displacement sensor 7 outputs a detection signal to the control unit 8 when detecting the displacement of the flexible portion 532.
Here, as the displacement sensor 7, a contact type sensor is used, and a differential transformer type can be exemplified. In this case, the displacement is detected by a voltage difference generated between the two coils by electromagnetic induction. In addition, it is not limited to a contact type sensor, You may use a non-contact type sensor, for example, the electrostatic capacitance type which detects a displacement by the change of an electrostatic capacitance, and the reflection time of an ultrasonic wave using an ultrasonic sensor. It is also possible to detect the displacement by detecting the displacement by using a strain detecting element disposed on the flexible portion 532.

The control unit 8 outputs a voltage signal to the electrodes 412 and 413 of the ultrasonic transducer 4 (voltage application processing), and based on the voltage signal output from the piezoelectric body 41, the blood flow state such as a pulse or blood pressure is determined. A drive voltage output unit 81 is provided as an ultrasonic wave transmitting means for performing a measurement process (detection process).
When the detection signal from the displacement sensor 7 is input, the drive voltage output unit 81 outputs a voltage signal to the electrodes 412 and 413 of the ultrasonic transducer 4. On the other hand, when the detection signal is not input from the displacement sensor 7, the drive voltage output unit 81 detects that the finger has moved away from the contact unit 522 and stops outputting the voltage signal to the electrodes 412 and 413. To implement.
The drive voltage output unit 81 detects a voltage signal output from the piezoelectric body 41 that has received the ultrasonic wave, and performs a process of measuring a blood flow state such as a pulse or blood pressure based on the voltage signal. .

First, when a finger is brought into contact with the contact portion 522, the contact portion 522 is bent inward, and the ultrasonic transmission medium 6 in the first space S1 flows into the second space S2 through the communication hole 511.
And the flexible part 532 which comprises 2nd space S2 bulges, the displacement sensor 7 detects this displacement, and outputs a detection signal to the drive voltage output part 81 of the control part 8. FIG.
When the detection signal is input from the displacement sensor 7, the drive voltage output unit 81 detects that the finger has touched the contact unit 522, switches the ultrasonic transducer 4 to the ultrasonic transmission mode, and also detects the ultrasonic transducer. A voltage signal is output to the four electrodes 412 and 413. Accordingly, as described above, the electrodes 412 and 413 apply a predetermined voltage to the piezoelectric film 411 based on the input voltage signal, and ultrasonic waves are transmitted from the diaphragm 30 to the contact portion 522. Then, the drive voltage output unit 81 switches the ultrasonic transducer 4 to the ultrasonic reception mode.
On the other hand, when the diaphragm 30 receives the ultrasonic wave reflected from the finger touching the contact unit 522, the diaphragm 30 outputs a voltage signal to the drive voltage output unit 81 of the control unit 8, and the drive voltage output unit 81 is based on this voltage signal. The blood flow state such as pulse and blood pressure is measured.

According to the biological examination apparatus 1 </ b> C of the third embodiment described above, the following effects are produced in addition to the effects of the first embodiment.
According to the present embodiment, the control unit 8 can detect that a finger has touched the contact unit 522, and the drive voltage output unit 81 of the control unit 8 outputs a voltage signal to the electrodes 412 and 413. For this reason, only when the finger is in contact with the contact portion 522, the ultrasonic wave can be reliably transmitted, and the ultrasonic wave can surely reach the finger.

[Fourth Embodiment]
Next, a biopsy device 1D according to a fourth embodiment will be described with reference to FIGS.
In the biopsy apparatus 1D according to the fourth embodiment, a distance detection sensor 9 as a displacement detection unit that detects the amount of displacement of the flexible portion 532 of the second resin portion 53 and a detection signal from the distance detection sensor 9 are detected. Thus, the present embodiment is different from each of the embodiments described above in that a control unit 8A that controls the biopsy device 1D is provided.
In particular, in the third embodiment, when the displacement sensor 7 detects that the flexible portion 532 of the second resin portion 53 has been displaced, the control portion 8 switches the ultrasonic transducer 4 to the ultrasonic transmission mode. However, in the present embodiment, the amount of deflection (displacement) of the flexible portion 532 of the second resin portion 53 is measured by the distance detection sensor 9, so that the control unit 8 </ b> A can control the ultrasonic transformer according to the amount of deflection. The difference is that the transducer 4 is switched to the ultrasonic transmission mode.

The distance detection sensor 9 detects the amount of bending of the flexible portion 532 of the second resin portion 53. When the distance detection sensor 9 detects the amount of deflection of the flexible portion 532, the distance detection sensor 9 outputs a detection signal to the control portion 8A.
Here, as the distance detection sensor 9, a sensor that detects the amount of bending of the flexible portion 532 based on the reflection time of the ultrasonic wave using an ultrasonic sensor can be exemplified. As shown in FIG. 10, as shown in FIG. Provided on the support 22. Further, the distance detection sensor 9 may be an electrostatic capacitance type sensor that detects an amount of deflection by a change in electrostatic capacitance in addition to an ultrasonic sensor.
The distance detection sensor 9 may have a configuration in which the plurality of ultrasonic transducers 4 arranged on the first support portion 21 are also provided on the second support portion 22. In this case, the opening 211 formed in the first support portion 21 is formed in the second support portion 22, and the region of the support film 3 where the opening 211 is closed is defined as the diaphragm 30, so that A sound wave transducer 4 may be disposed. According to such a configuration, the first support portion 21 and the second support portion 22 can have the same configuration, and it is only necessary to provide the ultrasonic transducer 4 on the diaphragm 30. Therefore, the ultrasonic transducer 4 is supported by the first support. In the step of providing the part 21, the distance detection sensor 9 can be provided on the second support part 22 at the same time, and the manufacturing process can be simplified.

The control unit 8A includes a drive voltage output unit 81A, a determination unit 82, and a storage unit 83.
The storage unit 83 includes a recording medium such as a memory or a hard disk, and stores the displacement amount threshold value data 831 (predetermined threshold value) and the program necessary for the processing of the determination unit 82 so as to be appropriately readable. This displacement amount threshold value data 831 indicates that the flexible portion 532 of the second resin portion 53 bends within a range that does not affect the support film 3 when a finger touches the contact portion 522 of the first resin portion 52. This is data of the amount (displacement amount).

The drive voltage output unit 81A outputs a voltage signal to the distance detection sensor 9 when the input button of the front panel 20 (see FIG. 2) is operated. The drive voltage output unit 81 </ b> A performs a process (voltage application process) of outputting a voltage signal to the electrodes 412 and 413 of the ultrasonic transducer 4 based on the determination signal of the determination unit 82.
Furthermore, the drive voltage output unit 81A detects a voltage signal output from the piezoelectric body 41 that has received the ultrasonic wave, and measures a blood flow state such as a pulse or blood pressure based on the voltage signal (detection process). ).

  When the detection signal is input from the distance detection sensor 9, the determination unit 82 reads the displacement amount threshold value data 831 from the storage unit 83 and compares the displacement amount threshold value data 831 with the deflection amount of the flexible portion 532. If the determination unit 82 determines that the amount of deflection of the flexible unit 532 is within the range of the displacement amount threshold data 831, the determination unit 82 outputs a determination signal to the drive voltage output unit 81 </ b> A. On the other hand, if the determination unit 82 determines that the amount of flexure of the flexible portion 532 is outside the range of the displacement amount threshold data 831, the determination unit 82 issues a warning that the finger is to be mounted again on the display panel of the front panel 20 (see FIG. 2). indicate.

Next, the operation of the biological examination apparatus 1D according to the fourth embodiment will be described with reference to the flowchart shown in FIG.
First, when the input button on the front panel 20 (see FIG. 2) is operated, the drive voltage output unit 81A activates the distance detection sensor 9 (step S1).
Next, when the detection signal is input from the distance detection sensor 9, the determination unit 82 compares the displacement amount threshold value data 831 with the deflection amount of the flexible portion 532 (step S <b> 2).
As a result of the comparison, when it is determined that the deflection amount of the flexible portion 532 is within the range of the displacement amount threshold value data 831, the drive voltage output portion 81 </ b> A switches the ultrasonic transducer 4 to the ultrasonic transmission mode and A voltage signal is output to the electrodes 412 and 413 of the acoustic transducer 4 (step S3).
Then, the drive voltage output unit 81A switches the ultrasonic transducer 4 to the ultrasonic reception mode, and performs a process of measuring a blood flow state such as a pulse or blood pressure based on a voltage signal input from the piezoelectric body 41. (Step S4).
On the other hand, as a result of the comparison, if it is determined that the deflection amount of the flexible portion 532 is out of the range of the displacement amount threshold data 831, the determination portion 82 displays a warning that the finger is to be mounted again on the display panel ( Step S5).

According to the biological examination apparatus 1D of the fourth embodiment described above, the following effects are obtained in addition to the effects of the first embodiment.
According to the present embodiment, the distance measurement sensor 9 detects the amount of bending of the flexible portion 532, and the determination unit 82 compares the amount of bending with the displacement amount threshold value data 831 to determine the amount of bending of the flexible portion 532. If it is determined that the amount is outside the range of the displacement amount threshold data 831, a warning is given that the finger is too pressed against the flexible portion 532. In this case, the drive voltage output unit 81A does not perform voltage application processing for transmitting ultrasonic waves. Therefore, when the deflection amount of the flexible portion 532 is outside the range of the displacement amount threshold value data 831, the drive voltage output unit 81 </ b> A does not perform the voltage application process and the detection process, and the deflection amount is the displacement amount threshold value data 831. Only when it is within the range, the voltage application process can be performed, and an accurate detection process can be performed.

[Modification of Embodiment]
It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In each said embodiment, although the space S was divided into 1st space S1 and 2nd space S2 by the division part 51, the structure which does not provide the division part 51 may be sufficient. Even in this case, when the finger comes into contact with the contact portion 522 and the contact portion 522 is bent inward, the ultrasonic transmission medium 6 can flow in the space S, and the flexible portion 532 is expanded.
In the above exemplary embodiments, the first resin portion 52 and the second resin portion 53 and the same material, was constructed in the same thickness h _2, T, different materials, or may be a different thickness. Further, only the flexible portion 532 may be made of different materials and different thickness dimensions. Further, the flexible portion 532 may be formed in a circular shape in the sensor plan view.

In each of the above embodiments, the flexible portion 532 is formed so as to face the second support portion 22, but may be formed on the side of the second resin portion 53.
In each of the above embodiments, the size of the contact portion 522 of the first resin portion 52 is 3 mm × 3 mm in the sensor plan view, but is not limited to this, and the shape of the inspection object that contacts the contact portion 522 is not limited thereto. It may be formed according to the size.
In each of the above embodiments, the communication hole 511 that communicates the first space S1 and the second space S2 is provided. However, the first space S1 and the second space S2 may be communicated by a tubular member such as a tube. The second space S <b> 2 is configured only by the second resin portion 53 formed in a bag shape, and the second resin portion 53 may not be fixed to the support film 3 or the sensor array substrate 2.

In each of the embodiments described above, the second space S2 is formed on the second support portion 22, but is not limited thereto. For example, the second space S <b> 2 is provided on the side surface portion of the apparatus main body 100, and the flexible portion 532 is provided on the apparatus main body 100. A configuration in which the flexible portion 532 is exposed to a side surface or a part of the front panel 20 of the apparatus main body 100 may be employed. In this case, it is possible to determine whether a finger or the like is in close contact with the contact portion 522 by visually confirming the amount of displacement of the flexible portion 532, for example.
In each of the embodiments described above, the support film 3 is disposed on the sensor array substrate 2, but may be disposed only at a location where the opening 211 of the first support portion 21 is closed.
In each of the above embodiments, the opening 211 is formed so as to penetrate the sensor array substrate 2, but the present invention is not limited to this, and may be formed as a recess. In this case, the support film 3 is formed so as to close the opening of the recess. Further, the support film 3 may be formed on the bottom surface of the recess.

  DESCRIPTION OF SYMBOLS 1,1A, 1B, 1C ... Ultrasonic sensor, 2 ... Sensor array board | substrate (support body), 3 ... Support film, 5 ... Resin material, 6 ... Ultrasonic transmission medium, 7 ... Displacement sensor (displacement detection means), 9 ... distance detection sensor (displacement detection means), 41 ... piezoelectric body, 52 ... first resin part (first resin material), 53 ... second resin part (second resin material), 81, 81A ... drive voltage output part ( Ultrasonic transmission means), 82 ... determination part, 211 ... opening part, 412 ... lower electrode, 413 ... upper electrode, 522 ... contact part (contact part), 532 ... flexible part, S1 ... first space, S2 ... Second space.

Claims (5)

A support having an opening;
A support film provided on the support and closing the opening;
A piezoelectric body that is located in an inner region of the opening in a plan view as viewed from the thickness direction of the support film, and is formed by laminating a lower electrode, a piezoelectric film, and an upper electrode in this order on the support film;
A contact portion that is located in a region including the support film in the plan view and that can contact an object to be inspected is formed, and a first space sealed from an external space is formed between the contact portion and the support film. A first resin material;
A second resin material that communicates with the first space and forms a second space sealed from an external space;
An ultrasonic transmission medium filled in the first space and the second space,
At least a part of the second resin material is a flexible portion having rigidity smaller than the rigidity in the film thickness direction of the support film. The ultrasonic sensor according to claim 1,
The support film covers one side of the support,
The first resin material has a first recess that forms the first space by opening the support film and connecting the opening end to the support film.
The second resin material has a second recess that opens to the support film and forms the second space by connecting the opening end to the support film.
The ultrasonic sensor, wherein the first resin material and the second resin material are integrally formed members. The ultrasonic sensor according to claim 1,
The opening of the support is formed to penetrate in the thickness direction of the support,
The support film covers one side of the support,
The first resin material opens to the support film, and the opening end is connected to the other surface side opposite to the one surface side of the support to form the first recess. Have
The second resin material is open to the support film, and has a second recess that forms the second space by connecting the opening end to the other surface side of the support. Ultrasonic sensor to do. The ultrasonic sensor according to any one of claims 1 to 3,
Displacement detecting means for detecting the displacement of the flexible part;
A controller that performs either a voltage application process to the piezoelectric body or a detection process of a signal output from the piezoelectric body when the displacement of the flexible section is detected by the displacement detection unit. Ultrasonic sensor characterized by. The ultrasonic sensor according to claim 4,
The displacement detection means detects a displacement amount of the flexible portion,
The controller is
A determination unit for determining whether or not a displacement amount of the flexible portion is within a predetermined range;
When the determination unit determines that the amount of displacement of the flexible portion is within a predetermined range, either one of the voltage application process or the detection process is performed.

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