JP2014193450A5 - - Google Patents

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Publication number
JP2014193450A5
JP2014193450A5 JP2013071383A JP2013071383A JP2014193450A5 JP 2014193450 A5 JP2014193450 A5 JP 2014193450A5 JP 2013071383 A JP2013071383 A JP 2013071383A JP 2013071383 A JP2013071383 A JP 2013071383A JP 2014193450 A5 JP2014193450 A5 JP 2014193450A5
Authority
JP
Japan
Prior art keywords
lamp
gas
light irradiation
irradiation apparatus
irradiated surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013071383A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014193450A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013071383A priority Critical patent/JP2014193450A/ja
Priority claimed from JP2013071383A external-priority patent/JP2014193450A/ja
Publication of JP2014193450A publication Critical patent/JP2014193450A/ja
Publication of JP2014193450A5 publication Critical patent/JP2014193450A5/ja
Pending legal-status Critical Current

Links

JP2013071383A 2013-03-29 2013-03-29 光照射装置 Pending JP2014193450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013071383A JP2014193450A (ja) 2013-03-29 2013-03-29 光照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013071383A JP2014193450A (ja) 2013-03-29 2013-03-29 光照射装置

Publications (2)

Publication Number Publication Date
JP2014193450A JP2014193450A (ja) 2014-10-09
JP2014193450A5 true JP2014193450A5 (cg-RX-API-DMAC10.html) 2015-09-24

Family

ID=51839135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013071383A Pending JP2014193450A (ja) 2013-03-29 2013-03-29 光照射装置

Country Status (1)

Country Link
JP (1) JP2014193450A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6711023B2 (ja) * 2016-03-03 2020-06-17 ウシオ電機株式会社 紫外線照射装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5976814A (ja) * 1982-10-22 1984-05-02 Mitsubishi Heavy Ind Ltd 冷却または加熱装置
JP2001300451A (ja) * 2000-04-25 2001-10-30 Hoya Schott Kk 紫外光照射装置
TWI466735B (zh) * 2008-09-18 2015-01-01 傑士湯淺國際股份有限公司 紫外線照射裝置

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