JP2014186887A - Window member for optical equipment - Google Patents

Window member for optical equipment Download PDF

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JP2014186887A
JP2014186887A JP2013061469A JP2013061469A JP2014186887A JP 2014186887 A JP2014186887 A JP 2014186887A JP 2013061469 A JP2013061469 A JP 2013061469A JP 2013061469 A JP2013061469 A JP 2013061469A JP 2014186887 A JP2014186887 A JP 2014186887A
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window member
metal film
flange member
window
flange
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JP6258592B2 (en
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Kenji Oba
健司 大場
Katsuya Nakayoshi
勝哉 中芳
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a window member for optical equipment which improves permeability even for ultraviolet light of a short wavelength and does not impair air tightness.SOLUTION: A window member 100 for optical equipment comprises: a window member 10 including a plate-like window member body 11 formed from a crystal and a metal film 12 for flange member joint provided in a ring shape in an edge portion of one principal surface of the window member body 11; a flange member 20 formed larger than an outline of the window member 10 and including a ring-shaped flange member body 21 and a metal film 22 for window member joint provided in the flange member body 21. The window member 10 and the flange member 20 are joined by the metal film 12 for flange member joint and the metal film 22 for window member joint.

Description

本発明は、紫外光を被処理物に照射させる紫外光照射装置に用いられる光学機器用窓部材に関するものである。   The present invention relates to an optical instrument window member used in an ultraviolet light irradiation apparatus that irradiates an object with ultraviolet light.

近年、ガラス基板や半導体ウエハの洗浄工程では、例えば、紫外光がガラス基板や半導体ウエハの表面に照射されて表面に付着している有機物を酸化させて除去するドライ洗浄方法が行われている。   In recent years, in a glass substrate or semiconductor wafer cleaning process, for example, a dry cleaning method is performed in which ultraviolet light is irradiated onto the surface of a glass substrate or semiconductor wafer to oxidize and remove organic substances attached to the surface.

このような紫外光を照射して洗浄する方法は、真空紫外光照射装置が用いられている。この真空紫外光照射装置は、紫外光の一種である真空紫外光が光学機器用窓部材を透過し被処理物の表面に照射する構造となっている。また、真空紫外光は、エキシマ放電ランプを用いて得られている。
エキシマ放電ランプは、エキシマ放電ランプの容器と、エキシマ放電ランプの容器内に封入されたエキシマ放電ランプ用ガスと、エキシマ放電ランプの容器に設けられた真空紫外光を透過させる光学機器用窓部材とを有している（例えば、特許文献１参照）。 A vacuum ultraviolet light irradiation apparatus is used as a method of cleaning by irradiating such ultraviolet light. This vacuum ultraviolet light irradiation apparatus has a structure in which vacuum ultraviolet light, which is a kind of ultraviolet light, passes through an optical device window member and irradiates the surface of an object to be processed. Vacuum ultraviolet light is obtained using an excimer discharge lamp.
The excimer discharge lamp includes an excimer discharge lamp container, an excimer discharge lamp gas sealed in the excimer discharge lamp container, and a window member for optical equipment that transmits vacuum ultraviolet light provided in the excimer discharge lamp container. (For example, refer to Patent Document 1).

また、エキシマ放電ランプは、エキシマ放電ランプの容器内に封入されたエキシマ放電ランプ用ガスの種類によって、放射される真空紫外光の波長が異なるようになっている。また、エキシマ放電ランプの容器に設けられた光学機器用窓部材は、例えば合成石英ガラス、水晶、ＭｇＦ２（フッ化マグネシウム）、ＣａＦ２（フッ化カルシウム）などよりなり、エキシマ放電ランプから放出された真空紫外光を透過させるように形成されている（例えば、特許文献２参照）。また、上述のエキシマ放電ランプの容器に設けられた光学機器用窓部材のなかでも水晶は、真空紫外域から赤外域までの広帯域波長における透過性に優れている。   Further, the excimer discharge lamp is configured such that the wavelength of the radiated vacuum ultraviolet light differs depending on the type of excimer discharge lamp gas sealed in the excimer discharge lamp vessel. Moreover, the window member for optical equipment provided in the container of the excimer discharge lamp is made of, for example, synthetic quartz glass, crystal, MgF2 (magnesium fluoride), CaF2 (calcium fluoride), etc., and the vacuum discharged from the excimer discharge lamp. It is formed so as to transmit ultraviolet light (for example, see Patent Document 2). Of the window members for optical equipment provided in the container of the above-described excimer discharge lamp, quartz is excellent in transmittance in a broadband wavelength from the vacuum ultraviolet region to the infrared region.

特開２０１２−２３０９２４号公報（段落００６４〜００６７、図２）JP 2012-230924 A (paragraphs 0064 to 0067, FIG. 2) 特開２０１１−１１３９５２号公報JP 2011-113952 A

しかしながら、光学機器用窓部材に用いられる水晶は、異方性を有する単結晶であるため熱膨張係数が結晶方位で異なることや、５７３℃に結晶転移点があるなどの特徴があった。そのため、水晶は、例えば、フリットガラスやロウ材などの高い温度を必要とする接合には不向きであった。したがって、水晶は、光学機器用窓部材において、高真空を維持するための真空封止やランプなどの温度がかかる環境で使われるガス封入封止など高耐久高信頼性の気密封止が必要な例えば、ランプの窓材や真空装置のビューイングポートなどに敬遠されがちな材料であった。
そこで、本発明は、前記問題を解決し水晶への熱の影響を与えにくくする光学機器用窓部材を提供することを課題とする。 However, the crystal used for the window member for optical instruments is a single crystal having anisotropy, and thus has a feature such that the thermal expansion coefficient differs depending on the crystal orientation and there is a crystal transition point at 573 ° C. For this reason, quartz is not suitable for bonding that requires a high temperature such as frit glass or brazing material. Therefore, quartz requires a highly durable and highly reliable airtight seal such as a vacuum seal for maintaining a high vacuum and a gas sealed seal used in a temperature-prone environment such as a lamp in a window member for optical equipment. For example, it is a material that is often shunned by lamp window materials and viewing ports of vacuum equipment.
Therefore, an object of the present invention is to provide a window member for an optical device that solves the above-described problems and makes it difficult for the quartz to be affected by heat.

本発明によれば、光学機器用窓部材は、水晶からなる板状の窓部材本体と、窓部材本体の一方の主面の縁部分にリング形状に設けられたフランジ部材接合用金属膜とを有した窓部材と、窓部材の外形より大きく形成された、リング形状のフランジ部材本体と、フランジ部材本体に設けられた窓部材接合用金属膜とを有したフランジ部材と、窓部材とフランジ部材とが接合されて構成されることを特徴とする。   According to the present invention, an optical instrument window member includes a plate-like window member main body made of crystal, and a flange member bonding metal film provided in a ring shape on an edge portion of one main surface of the window member main body. A flange member having a window member, a ring-shaped flange member main body formed larger than the outer shape of the window member, and a window member joining metal film provided on the flange member main body, and the window member and the flange member. And are configured to be joined together.

また、本発明の光学機器用窓部材は、フランジ部材の外形形状が所定の厚みを有した円筒形状に形成されていることを特徴とする。   In the optical device window member of the present invention, the outer shape of the flange member is formed in a cylindrical shape having a predetermined thickness.

本発明による光学機器用窓部材は、板状の水晶にフランジ部材がフランジ部材接合用金属膜および窓部材接合用金属膜を介して接合されている。そのため、フランジ部を被接合物に高い温度を必要とする接合方法で接合させた場合、水晶には直接高い温度はかからないこととなる。よって、熱膨張係数の違う水晶とフランジ部材は、安定した接合を維持することができる。   In the window member for an optical device according to the present invention, a flange member is joined to a plate-like crystal through a flange member joining metal film and a window member joining metal film. Therefore, when the flange portion is bonded to the object to be bonded by a bonding method that requires a high temperature, the crystal does not have a high temperature directly. Therefore, the crystal and the flange member having different thermal expansion coefficients can maintain stable bonding.

本発明の実施形態における光学機器用窓部材を示す斜視図である。It is a perspective view which shows the window member for optical devices in embodiment of this invention. 図１に示された光学機器用窓部材のＡ−Ａにおける縦断面図である。It is a longitudinal cross-sectional view in AA of the window member for optical apparatuses shown by FIG. 本発明の実施形態における光学機器用窓部材の変形例を示す斜視図である。It is a perspective view which shows the modification of the window member for optical devices in embodiment of this invention.

以下、本発明のいくつかの例示的な実施形態について、図面を参照して説明する。なお、同一要素には同一の符号を付し重複する説明を省略する。また、構成を明確にするために誇張して図示している。なお、本実施形態における主面とは、立体的に形成される例えば水晶板において、最も広い面およびそれと平行する平面のことである。   Hereinafter, some exemplary embodiments of the present invention will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same element and the overlapping description is abbreviate | omitted. In addition, the illustration is exaggerated for the sake of clarity. In addition, the main surface in this embodiment is the widest surface and the plane parallel to it in the three-dimensionally formed crystal plate, for example.

図１および図２に示されているように、本発明の実施形態における光学機器用窓部材１００は、窓部材１０とフランジ部材２０とから構成されている。また、窓部材１０は、窓部材本体１１とフランジ部材接合用金属膜１２とで形成されている。また、フランジ部材接合用金属膜１２は、窓部材本体１１の一方の主面に設けられており、リング形状に形成されている。また、フランジ部材２０は、フランジ部材本体２１と窓部材接合用金属膜２２とで形成されている。また、フランジ部材本体２１の全周には、窓部材接合用金属膜２２が設けられている。また、光学機器用窓部材１００は、窓部材本体１１の一方の主面に設けられたフランジ部材接合用金属膜１２側とフランジ部材本体２１の主面とがフランジ部材接合用金属膜１２および窓部材接合用金属膜２２を介して原子拡散接合されている。   As shown in FIG. 1 and FIG. 2, the optical device window member 100 in the embodiment of the present invention includes a window member 10 and a flange member 20. The window member 10 is formed of a window member main body 11 and a flange member bonding metal film 12. The flange member bonding metal film 12 is provided on one main surface of the window member body 11 and is formed in a ring shape. The flange member 20 is formed of a flange member main body 21 and a window member joining metal film 22. A window member joining metal film 22 is provided on the entire circumference of the flange member main body 21. In the window member 100 for an optical device, the flange member bonding metal film 12 side provided on one main surface of the window member main body 11 and the main surface of the flange member main body 21 are connected to the flange member bonding metal film 12 and the window. Atomic diffusion bonding is performed through the member bonding metal film 22.

窓部材本体１１は、例えば、人工水晶または無色透明な天然水晶からなる透明な円形状の平板で形成されている。また、窓部材本体１１の一方の主面には、窓部材本体１１の外周から窓部材本体１１の一方の主面の中心側に向かいリング形状にフランジ部材接合用金属膜１２が設けられている。なお、窓部材本体１１の形成方法は、四角形状に切断された平板の例えば、人工水晶または無色透明な天然水晶を、例えば、人工水晶または無色透明な天然水晶の主面に垂直に通る軸を基準として回転させ、回転している例えば、人工水晶または無色透明な天然水晶の角部を砥石によって研磨することにより円形状を有した窓部材本体１１が形成される。   The window member main body 11 is formed of, for example, a transparent circular flat plate made of artificial quartz or colorless and transparent natural quartz. Further, on one main surface of the window member main body 11, a flange member bonding metal film 12 is provided in a ring shape from the outer periphery of the window member main body 11 toward the center of one main surface of the window member main body 11. . Note that the method of forming the window member main body 11 is a flat plate cut into a square shape, for example, an artificial crystal or a colorless transparent natural crystal, for example, an axis passing perpendicularly to the main surface of the artificial crystal or the colorless transparent natural crystal. The window member main body 11 having a circular shape is formed by polishing the corners of, for example, artificial quartz or colorless and transparent natural quartz that is rotated as a reference, with a grindstone.

フランジ部材接合用金属膜１２は、Ｃｒ（クロム）、Ｎi（ニッケル）、Ｔａ（タンタル）、Ｔｉ（チタン）等の下地金属膜の上に設けられ、Ａｕ（金）、Ｐｔ（白金）、Ｃｕ（銅）等のいずれかの金属材料より形成されている。なお、フランジ部材接合用金属膜１２の形成方法は、例えば、スパッタリング法や真空蒸着法などにより形成される。   The flange member bonding metal film 12 is provided on a base metal film such as Cr (chromium), Ni (nickel), Ta (tantalum), Ti (titanium), etc., and Au (gold), Pt (platinum), Cu It is made of any metal material such as (copper). In addition, the formation method of the metal film 12 for flange member joining is formed by sputtering method, a vacuum evaporation method, etc., for example.

フランジ部材本体２１は、例えば平板状の石英ガラス、セラミック材料からなり、リング形状を有している。また、フランジ部材本体２１の外周は、窓部材本体１１の外周よりも大きく形成されている。また、フランジ部材本体２１の内径は、窓部材本体１１に設けられたフランジ部材接合用金属膜１２の外周よりも小さく、窓部材本体１１に設けられたフランジ部材接合用金属膜１２の内径よりも大きく形成されている。また、フランジ部材本体２１の全面は、窓部材接合用金属膜２２で覆われている。なお、フランジ部材本体２１の形成方法は、例えば石英ガラスの場合は、平板状の石英ガラスをホールソーを用いてリング状に切断して形成する。また、例えばセラミック材料の場合は、セラミックグリーンシートをリング状に成形し、これを焼成することによって形成される。   The flange member main body 21 is made of, for example, a flat-plate quartz glass or a ceramic material, and has a ring shape. Further, the outer periphery of the flange member main body 21 is formed larger than the outer periphery of the window member main body 11. The inner diameter of the flange member main body 21 is smaller than the outer periphery of the flange member bonding metal film 12 provided on the window member main body 11, and is smaller than the inner diameter of the flange member bonding metal film 12 provided on the window member main body 11. Largely formed. The entire surface of the flange member main body 21 is covered with a window member bonding metal film 22. For example, in the case of quartz glass, the flange member main body 21 is formed by cutting flat quartz glass into a ring shape using a hole saw. For example, in the case of a ceramic material, it is formed by forming a ceramic green sheet into a ring shape and firing it.

窓部材接合用金属膜２２は、フランジ部材接合用金属膜１２と同様にＣｒ（クロム）、Ｎi（ニッケル）、Ｔａ（タンタル）、Ｔｉ（チタン）等の下地金属膜の上に設けられ、Ａｕ（金）、Ｐｔ（白金）、Ｃｕ（銅）等のいずれかの金属材料より形成されている。また、窓部材接合用金属膜２２は、フランジ部材本体２１の全面を覆っている。なお、窓部材接合用金属膜２２の形成方法は、例えば、スパッタリング方法や真空蒸着方法などにより形成される。なおその際、フォトリソグラフィ方法やメタルマスクなどを使って所定のパターンを形成する方法であってもかまわない。   Similar to the flange member bonding metal film 12, the window member bonding metal film 22 is provided on a base metal film such as Cr (chromium), Ni (nickel), Ta (tantalum), Ti (titanium), etc. It is made of any metal material such as (gold), Pt (platinum), Cu (copper). Further, the window member bonding metal film 22 covers the entire surface of the flange member main body 21. In addition, the formation method of the metal film 22 for window member joining is formed by sputtering method, a vacuum evaporation method, etc., for example. At this time, a predetermined pattern may be formed using a photolithography method, a metal mask, or the like.

このように、本発明の実施形態における光学機器用窓部材１００は、窓部材本体１１にフランジ部材本体２１がフランジ部材接合用金属膜１２および窓部材接合用金属膜２２を介して接合されている。そのため、フランジ部材本体２１を被接合物に高い温度を必要とする接合方法で接合させた場合、窓部材本体１１には高い温度はかからないこととなる。よって、窓部材本体１１の異方性による熱膨張が軽微となり、窓部材本体１１とフランジ部材本体２１は安定した接合を維持することができる。したがって、本発明は、気密性が良く信頼性の向上した製品を提供することができる。   As described above, in the window member 100 for an optical device according to the embodiment of the present invention, the flange member body 21 is joined to the window member body 11 via the flange member joining metal film 12 and the window member joining metal film 22. . Therefore, when the flange member main body 21 is bonded to the workpiece by a bonding method that requires a high temperature, the window member main body 11 does not have a high temperature. Therefore, the thermal expansion due to the anisotropy of the window member main body 11 becomes slight, and the window member main body 11 and the flange member main body 21 can maintain stable bonding. Therefore, the present invention can provide a product with good airtightness and improved reliability.

また、本発明の実施形態における光学機器用窓部材１００の形成方法は、例えば、人工水晶または無色透明な天然水晶からなる所定の大きさに形成された円形状の窓部材本体１１の一方の主面に、窓部材本体１１の縁部分から窓部材本体１１の一方の主面の内側に向かいリング状にフランジ部材接合用金属膜１２を形成する。次に、窓部材本体１１の外形より大きく形成されたリング形状のフランジ部材本体２１を覆うように窓部材接合用金属膜２２を形成する。次に、窓部材本体１１の一方の主面に設けられたフランジ部材接合用金属膜１２とフランジ部材本体２１を覆うように設けられた窓部材接合用金属膜２２のうち一方の主面に設けられた窓部材接合用金属膜２２とを接合させる。なお、この接合は以下のようにしてなされる。まず始めにプラズマ洗浄により、窓部材１０とフランジ部材２０との表面洗浄を行い、次に、フランジ部材接合用金属膜１２と窓部材接合用金属膜２２との位置を合わせて重ね合わせを行い、次に、大気中や真空中もしくは不活性ガス雰囲気中で、フランジ部材接合用金属膜１２と窓部材接合用金属膜２２との面同士が完全に密着するように加圧を加えて原子拡散接合が完了する。このことにより、本発明の実施形態における光学機器用窓部材１００が形成される。また、窓部材本体１１の一方の主面にリング形状のフランジ部材接合用金属膜１２を形成する方法は、フランジ部材接合用金属膜１２が設けられる窓部材本体１１の一方の主面にリング形状のフランジ部材接合用金属膜１２の内径となる部分にレジスト膜を設け、フランジ部材接合用金属膜１２を形成した後レジスト膜を取り除いてもよい。   In addition, the method for forming the optical device window member 100 according to the embodiment of the present invention is, for example, one of the main parts of the circular window member main body 11 formed in a predetermined size made of artificial quartz or colorless and transparent natural quartz. A flange member bonding metal film 12 is formed in a ring shape on the surface from the edge portion of the window member body 11 to the inside of one main surface of the window member body 11. Next, the window member bonding metal film 22 is formed so as to cover the ring-shaped flange member main body 21 formed larger than the outer shape of the window member main body 11. Next, the flange member bonding metal film 12 provided on one main surface of the window member body 11 and the window member bonding metal film 22 provided so as to cover the flange member main body 21 are provided on one main surface. The obtained metal film 22 for window member joining is joined. This joining is performed as follows. First, the surface cleaning of the window member 10 and the flange member 20 is performed by plasma cleaning, and then the flange member bonding metal film 12 and the window member bonding metal film 22 are aligned and overlapped, Next, in the air, in a vacuum or in an inert gas atmosphere, pressure is applied so that the surfaces of the flange member bonding metal film 12 and the window member bonding metal film 22 are completely adhered to each other, and atomic diffusion bonding is performed. Is completed. Thereby, the window member 100 for optical devices in the embodiment of the present invention is formed. Moreover, the method of forming the ring-shaped flange member bonding metal film 12 on one main surface of the window member main body 11 is a ring-shaped on one main surface of the window member main body 11 provided with the flange member bonding metal film 12. A resist film may be provided on the inner diameter of the flange member bonding metal film 12 and the resist film may be removed after forming the flange member bonding metal film 12.

なお、本発明はこれに限定されず、適宜変更可能である。
本発明の実施形態における光学機器用窓部材１００は、エキシマ放電ランプなどに用いることができる。 In addition, this invention is not limited to this, It can change suitably.
The window member 100 for optical equipment in the embodiment of the present invention can be used for an excimer discharge lamp or the like.

また、例えば、図３に示されているように、本発明の実施形態の変形例として、フランジ部材２０の外形形状が所定の厚みを有した円筒形状に形成されていてもよい。このような構成にしても同様の効果が得られる。   Further, for example, as shown in FIG. 3, as a modification of the embodiment of the present invention, the outer shape of the flange member 20 may be formed in a cylindrical shape having a predetermined thickness. Even if it is such a structure, the same effect is acquired.

また、例えば、本発明の実施形態の変形例として、窓部材１０の形状とフランジ部材２０の形状とが四角形状に形成されていてもよい。このような構成にしても同様の効果が得られる。   For example, as a modification of the embodiment of the present invention, the shape of the window member 10 and the shape of the flange member 20 may be formed in a quadrangular shape. Even if it is such a structure, the same effect is acquired.

また、例えば、本発明の実施形態の変形例として、フランジ部材本体２１に設けられる窓部材接合用金属膜２２は、窓部材本体１１が接合されるフランジ部材本体２１の主面と窓部材本体１１が接合されるフランジ部材本体２１の主面と相対するフランジ部材本体２１の主面とに形成されていてもよい。このような構成にしても同様の効果が得られる。   For example, as a modification of the embodiment of the present invention, the window member joining metal film 22 provided on the flange member body 21 includes the main surface of the flange member body 21 to which the window member body 11 is joined and the window member body 11. May be formed on the main surface of the flange member main body 21 and the main surface of the flange member main body 21 opposite to each other. Even if it is such a structure, the same effect is acquired.

また、例えば、本発明の実施形態の変形例として、フランジ部材本体２１に設けられる窓部材接合用金属膜２２は、窓部材本体１１が接合されるフランジ部材本体２１の主面だけに形成されていてもよい。このような構成にしても同様の効果が得られる。   Further, for example, as a modification of the embodiment of the present invention, the window member joining metal film 22 provided on the flange member body 21 is formed only on the main surface of the flange member body 21 to which the window member body 11 is joined. May be. Even if it is such a structure, the same effect is acquired.

１０ 窓部材
１１ 窓部材本体
１２ フランジ部材接合用金属膜
２０ フランジ部材
２１ フランジ部材本体
２２ 窓部材接合用金属膜
１００ 光学機器用窓部材 DESCRIPTION OF SYMBOLS 10 Window member 11 Window member main body 12 Metal film for joining flange member 20 Flange member 21 Flange member main body 22 Metal film for joining window member 100 Window member for optical device

Claims (2)

水晶からなる板状の窓部材本体と、
前記窓部材本体の一方の主面の縁部分にリング形状に設けられたフランジ部材接合用金属膜とを有した窓部材と、
前記窓部材の外形より大きく形成された、リング形状のフランジ部材本体と、
前記フランジ部材本体に設けられた窓部材接合用金属膜とを有したフランジ部材と、
前記窓部材と前記フランジ部材とが接合されて構成されることを特徴とする光学機器用窓部材。 A plate-like window member body made of crystal;
A window member having a flange member bonding metal film provided in a ring shape on an edge portion of one main surface of the window member body;
A ring-shaped flange member body formed larger than the outer shape of the window member;
A flange member having a window member bonding metal film provided on the flange member body;
A window member for optical equipment, wherein the window member and the flange member are joined to each other. 前記フランジ部材の外形形状が所定の厚みを有した円筒形状に形成されていることを特徴とする請求項1に記載の光学機器用窓部材。   2. The window member for an optical device according to claim 1, wherein an outer shape of the flange member is formed in a cylindrical shape having a predetermined thickness.
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Publication number Priority date Publication date Assignee Title
WO2018135026A1 (en) 2017-01-23 2018-07-26 株式会社村田製作所 Window member for light source
JP2019182717A (en) * 2018-04-13 2019-10-24 株式会社ディスコ Joining method of optical component

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JPH09214020A (en) * 1996-01-30 1997-08-15 Nec Corp Gas laser tube
JP2008184691A (en) * 2008-03-26 2008-08-14 Kyocera Corp Sight glass of vacuum vessel and vacuum vessel
JP2010003437A (en) * 2008-06-18 2010-01-07 Ushio Inc Excimer lamp
JP2010009952A (en) * 2008-06-27 2010-01-14 Kyocera Corp Light-transmitting window assembly and lamp
JP2010097699A (en) * 2008-10-14 2010-04-30 Ushio Inc Short-arc lamp
JP2011187867A (en) * 2010-03-11 2011-09-22 Tohoku Univ Bonding method and crystal element

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Publication number Priority date Publication date Assignee Title
JPH09214020A (en) * 1996-01-30 1997-08-15 Nec Corp Gas laser tube
JP2008184691A (en) * 2008-03-26 2008-08-14 Kyocera Corp Sight glass of vacuum vessel and vacuum vessel
JP2010003437A (en) * 2008-06-18 2010-01-07 Ushio Inc Excimer lamp
JP2010009952A (en) * 2008-06-27 2010-01-14 Kyocera Corp Light-transmitting window assembly and lamp
JP2010097699A (en) * 2008-10-14 2010-04-30 Ushio Inc Short-arc lamp
JP2011187867A (en) * 2010-03-11 2011-09-22 Tohoku Univ Bonding method and crystal element

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018135026A1 (en) 2017-01-23 2018-07-26 株式会社村田製作所 Window member for light source
EP3527879A4 (en) * 2017-01-23 2020-05-06 Murata Manufacturing Co., Ltd. Window member for light source
JP2019182717A (en) * 2018-04-13 2019-10-24 株式会社ディスコ Joining method of optical component
JP7002398B2 (en) 2018-04-13 2022-01-20 株式会社ディスコ How to join optical components

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