JP2014186174A5 - - Google Patents

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Publication number
JP2014186174A5
JP2014186174A5 JP2013061195A JP2013061195A JP2014186174A5 JP 2014186174 A5 JP2014186174 A5 JP 2014186174A5 JP 2013061195 A JP2013061195 A JP 2013061195A JP 2013061195 A JP2013061195 A JP 2013061195A JP 2014186174 A5 JP2014186174 A5 JP 2014186174A5
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JP
Japan
Prior art keywords
transparent member
metal film
space
optical device
spots
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013061195A
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English (en)
Japanese (ja)
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JP6140493B2 (ja
JP2014186174A (ja
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Publication date
Application filed filed Critical
Priority to JP2013061195A priority Critical patent/JP6140493B2/ja
Priority claimed from JP2013061195A external-priority patent/JP6140493B2/ja
Priority to CN201410109777.1A priority patent/CN104060221B/zh
Priority to US14/223,651 priority patent/US9579858B2/en
Publication of JP2014186174A publication Critical patent/JP2014186174A/ja
Publication of JP2014186174A5 publication Critical patent/JP2014186174A5/ja
Application granted granted Critical
Publication of JP6140493B2 publication Critical patent/JP6140493B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013061195A 2013-03-23 2013-03-23 光学デバイスの製造方法 Expired - Fee Related JP6140493B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013061195A JP6140493B2 (ja) 2013-03-23 2013-03-23 光学デバイスの製造方法
CN201410109777.1A CN104060221B (zh) 2013-03-23 2014-03-21 光学器件制造方法
US14/223,651 US9579858B2 (en) 2013-03-23 2014-03-24 Method of manufacturing optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013061195A JP6140493B2 (ja) 2013-03-23 2013-03-23 光学デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2014186174A JP2014186174A (ja) 2014-10-02
JP2014186174A5 true JP2014186174A5 (enExample) 2015-12-24
JP6140493B2 JP6140493B2 (ja) 2017-05-31

Family

ID=51833817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013061195A Expired - Fee Related JP6140493B2 (ja) 2013-03-23 2013-03-23 光学デバイスの製造方法

Country Status (1)

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JP (1) JP6140493B2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5370246B2 (ja) * 2009-05-27 2013-12-18 セイコーエプソン株式会社 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法
JP5381884B2 (ja) * 2010-04-16 2014-01-08 セイコーエプソン株式会社 波長可変干渉フィルターの製造方法
JP2012150263A (ja) * 2011-01-19 2012-08-09 Seiko Epson Corp 光フィルター、光モジュール、および分析装置

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