JP2014185047A - Method for manufacturing colored ceramic member and colored ceramic member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a colored ceramic member capable of partially coloring a ceramic member and virtually unaccompanied by dimensional variations of the ceramic member due to coloration.SOLUTION: The provided method for manufacturing a colored ceramic member is a method for manufacturing a colored ceramic member obtained by at least partially coloring the surface of a ceramic member 11 and includes: a step of contacting a metallic film 14 with at least a portion of the surface of the ceramic member 11 including alumina as a main component; and a step of coloring the ceramic member 11 by heating, in a state where the ceramic member 11 and the metallic film 14 are being mutually contacted, the ceramic member 11 and the metallic film 14 so as to diffuse components of the metallic film 14 into the ceramic member 11.

Description

  The present invention relates to a ceramic member having at least part of its surface colored and a method for producing the same.

  Ceramics such as alumina are widely used as a substrate for mounting various electronic components and a package constituting an electronic device. Normally, alumina ceramics are white unless special treatment is performed, and they are often used as they are as ceramic members such as substrates and packages. For example, identification marks such as package front / back identification marks and alignment marks are attached to ceramic members. Therefore, there is a demand for a technique for coloring a part of a ceramic member into a color different from the color of the base material. For example, Patent Documents 1 to 3 have been proposed as methods for coloring ceramic members.

JP-A-9-165255 JP 61-40881 JP2011-49150

  Patent Document 1 discloses a method of coloring an entire ceramic by mixing a small amount of an oxide such as Cr when sintering alumina powder. However, this method has a problem that the ceramic member cannot be partially colored because the entire ceramic member is colored. Patent Document 2 discloses a method in which Co powder is placed in the vicinity of an alumina block in a vacuum furnace, heated together in a vacuum, and Co is diffused into alumina to cause coloring. Also in this method, since the entire ceramic member is exposed to the atmosphere in which Co diffuses, it is difficult to partially color the ceramic member. Patent Document 3 discloses a method of applying a color pigment to a part of a ceramic member and coloring it. In this method, since the coloring material itself has a thickness, there is a problem that the coloring material itself cannot be applied to a member with severe dimensional accuracy, and further, coloring is performed on a ceramic member having fine irregularities and holes. In this case, there is a problem that the unevenness and the hole are filled with the color pigment.

  Therefore, the present invention is a method for producing a colored ceramic member in which at least a part of the surface of the ceramic member is colored, the step of bringing a metal film into contact with at least a part of the surface of the ceramic member whose main component is alumina, A step of coloring the ceramic member by diffusing components of the metal film in the ceramic member by heating the ceramic member and the metal film in a state where the ceramic member and the metal film are in contact with each other. The manufacturing method is as follows.

  The metal film is a method for manufacturing a colored ceramic member formed of at least one element of chromium (Cr), nickel (Ni), cobalt (Co), and iron (Fe).

  A method for producing a colored ceramic member in which the heating temperature of the ceramic member and the metal film is 1200 ° C. or higher.

  The metal film is a method for producing a colored ceramic member formed on the surface of the ceramic member.

  The metal film is a method for producing a colored ceramic member formed on the surface of a member different from the ceramic member.

  Further, the present invention provides a colored ceramic member in which at least a part of the surface of the ceramic member is colored, wherein a metal film is brought into contact with at least a part of the surface of the ceramic member whose main component is alumina, By heating the ceramic member and the metal film in a state where the metal film is in contact with each other, a component of the metal film is diffused in the ceramic member to color the ceramic member.

  The metal film is a colored ceramic member formed of at least one element of chromium (Cr), nickel (Ni), cobalt (Co), and iron (Fe).

  The heating temperature of the ceramic member and the metal film is a colored ceramic member having a temperature of 1200 ° C. or higher.

  According to the present invention, the ceramic member can be partially colored. In addition, since there is almost no dimensional change of the ceramic member due to coloring, it is possible to color a part of the ceramic member that requires dimensional accuracy, and even when coloring a ceramic member having fine irregularities and holes, It is possible to color without affecting.

The figure for demonstrating the coloring ceramic member of this invention. The figure for demonstrating the manufacturing method of the colored ceramic member of this invention.

  FIG. 1 is a view for explaining a colored ceramic member of the present invention, and FIG. 2 is a view for explaining a method for producing the colored ceramic member of the present invention. In this embodiment, a method for producing a colored ceramic member and a colored ceramic member according to the present invention will be described using a circuit board as an example. The circuit board 10 is a flat board and is a white ceramic member 11 mainly composed of alumina. On the surface of the ceramic member, there are a circuit pattern 12 for mounting a semiconductor element or the like for electrical connection, and an alignment mark 13 used for positioning when mounting the semiconductor element or the like or when forming the circuit pattern 12. Is formed. The alignment mark 13 is formed by coloring the surface of the ceramic member 11.

  In order to manufacture such a circuit board 10, first, a ceramic member 11 is prepared. Next, a metal thin film 13 having a shape corresponding to the alignment mark 13 is formed on the ceramic member 11. The metal thin film 13 is formed by first forming a metal thin film 14 made of Cr on the surface of the ceramic member 11 by a method such as vacuum vapor deposition, sputtering, or CVD (FIG. 2A). Next, a resist film 15 is formed on the metal thin film 14, and the resist film 15 is exposed and exposed to light, so that the resist film 15 having a shape corresponding to the alignment mark 13 remains on the metal thin film 14 (FIG. 2B). Next, the metal thin film 14 is etched using the resist film 15 as a mask, so that the metal thin film 14 has a shape corresponding to the alignment mark (FIG. 2C). Thereafter, the resist film 15 on the metal thin film 14 is peeled off (FIG. 2D).

  Various methods can be used as a method of forming the metal thin film 13 having a shape corresponding to the alignment mark 13 on the ceramic member 11. In addition to the above method, a resist film or the like is formed by photolithography before forming the metal thin film. Using a method of forming a metal thin film after patterning on a ceramic member and then lifting off unnecessary portions, a method of forming a metal mask in close contact with the member to be colored at the time of film formation, etc. May be.

  Next, the alignment mark 13 is colored on the surface of the ceramic member 11. The alignment mark 13 is colored by placing the ceramic member 11 on which the metal thin film 14 having a shape corresponding to the alignment mark 13 is formed in a heating furnace and heating the ceramic member 11 at a temperature of 1200 ° C. or higher in an air atmosphere. (FIG. 2 (e)). By heating at a high temperature, the metal thin film 14 diffuses on the surface of the ceramic member 11, and only the surface of the ceramic member 11 in contact with the metal thin film 14 can be partially colored. When the metal thin film 14 is Cr, the white ceramic member 11 made of alumina can be colored in magenta. According to this method, the surface of the ceramic member itself can be colored, and is not removed by washing or the like, and therefore is suitable for use as a method for forming an alignment mark.

  In this embodiment, an example is shown in which Cr is used as the metal thin film, but a metal thin film such as Ni, Co, or Fe can also be used. Furthermore, the shade of the color to be colored can be adjusted by changing the thickness of the metal thin film.

  In addition, although the metal thin film has electroconductivity, the surface of the ceramic member colored by heat processing has insulation, and does not impair the insulation of a ceramic member. Furthermore, if the thickness of the metal thin film is of the order of submicron, it is possible to color the ceramic member and there is almost no dimensional change of the ceramic member. The dimensional accuracy is not affected. Therefore, even on the surface of a ceramic member having fine unevenness and holes, it is possible to color the uneven surface and the inner surface of the hole without crushing the unevenness and holes as in the case of coloring with a paint or the like. . For coloring the inner surface of a fine hole, it is effective to use a metal thin film forming method using a dry process film forming method in order to cover the inner surface of the hole with a metal thin film without filling the hole.

  Finally, the circuit pattern 12 is formed on the surface of the ceramic member 11 with the alignment mark 13 formed up to the previous step as a reference. The circuit pattern 12 can be formed by various methods conventionally used such as a plating method.

  As mentioned above, although the manufacturing method of the colored ceramic member and colored ceramic member of this invention were demonstrated by forming an alignment mark in a circuit board in the present Example, this invention is not limited to this Example, and is various. Application is possible. For example, according to the method for producing a ceramic member of the present invention, a metal thin film having a desired pattern shape is formed on another substrate different from the ceramic member to be colored, and the other substrate is brought into contact with the ceramic member to be colored. It is also possible to color the ceramic member by heating in a heated state. Further, if the metal thin film for coloring is formed on the entire surface of the ceramic member without patterning, the entire surface of the ceramic member can be colored. Further, the present invention is not limited to a planar ceramic member such as the circuit board of the present embodiment, and can be easily applied to coloring a three-dimensional structure such as coloring a conical apex. Obviously.

DESCRIPTION OF SYMBOLS 10 Circuit board 11 Ceramic member 12 Circuit pattern 13 Alignment mark 14 Metal thin film 15 Resist film

Claims (8)

  A method of manufacturing a colored ceramic member in which at least a part of the surface of the ceramic member is colored, the step of bringing a metal film into contact with at least a part of the surface of the ceramic member, the main component of which is alumina, A step of coloring the ceramic member by diffusing components of the metal film in the ceramic member by heating the ceramic member and the metal film in contact with the metal film. Manufacturing method.   2. The colored ceramic member according to claim 1, wherein the metal film is formed of at least one element selected from chromium (Cr), nickel (Ni), cobalt (Co), and iron (Fe). Production method.   The method for producing a colored ceramic member according to claim 1 or 2, wherein a heating temperature of the ceramic member and the metal film is 1200 ° C or higher.   The method for manufacturing a colored ceramic member according to claim 1, wherein the metal film is formed on a surface of the ceramic member.   The method for manufacturing a colored ceramic member according to claim 1, wherein the metal film is formed on a surface of a member different from the ceramic member.   A colored ceramic member in which at least a part of the surface of the ceramic member is colored, the metal film is brought into contact with at least a part of the surface of the ceramic member whose main component is alumina, and the ceramic member and the metal film are in contact with each other A colored ceramic member, wherein the ceramic member and the metal film are heated in a state to diffuse components of the metal film into the ceramic member to color the ceramic member.   The colored ceramic member according to claim 6, wherein the metal film is formed of at least one element of chromium (Cr), nickel (Ni), cobalt (Co), and iron (Fe).   The colored ceramic member according to claim 6 or 7, wherein a heating temperature of the ceramic member and the metal film is 1200 ° C or higher.

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