JP2014179230A - Electrode for ion source and manufacturing method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a long-life electrode for an ion source having superior cooling efficiency and anti corrosion characteristics.SOLUTION: An electrode for an ion source comprises: a metal electrode plate 1 which has a plurality of beam extracting holes 2 and whose linear expansion coefficient is small; a metal header 15, having linear expansion coefficient larger than that of the electrode plate, whose thermal conductivity is good; and a plurality of cooling pipes 11 made of the same kind of metal used for the header. Cooling pipes are penetrated through the electrode plates and arranged side by side in a direction orthogonal to this penetration direction. Joint portions 1a and 15c are respectively formed so that the electrode plate and the header are fitted using projections and recesses. The joint portions 1a and 15c have a plurality of first projections 4 and recessed grooves 5, second projections 18 and recessed grooves 19, respectively. The electrode plate and the header are joined by fitting the joint portions 1a and 15c using projections and recesses.

Description

  Embodiments described herein relate generally to an ion source electrode and a method for manufacturing the same.

  An ion source that generates a high-speed ion beam from plasma is used for a neutral particle injection device or ion mixing device of a fusion device.

  For example, an ion source of a neutral particle injection device used in a nuclear fusion device generates a plasma by introducing a gas such as hydrogen into a plasma generation unit and performing arc discharge through a filament. The ions ionized by the gas in the plasma are extracted from the plasma and accelerated by an electric field formed by applying a high voltage to an electrode array composed of a plurality of electrodes. In this way, a high-speed ion beam having high energy is generated. The ion beam is bent by the magnetic field of the coil of the fusion device as it is. For this reason, by passing the ion beam through a neutralization cell filled with gas, it is converted into a neutral particle beam while maintaining the kinetic energy by collision reaction between the ions and the gas and is incident on the core plasma.

  The electrode array for accelerating ions in the above ion source is composed of three or five stages of electrodes. Each electrode has a number of ion beam extraction holes for extracting an ion beam from the plasma.

  The first stage electrode closest to the plasma generation unit is in direct contact with the high temperature ion beam. Therefore, each electrode including the first-stage electrode has a cooling channel that lowers the heat load of the electrode itself and improves durability. Usually, this cooling channel is provided between a plurality of formed ion beam extraction holes in order to effectively perform cooling. Pure water as a refrigerant is passed through each cooling channel.

  By the way, in the ion source electrode having the above-described configuration, molybdenum is generally used as a material for the electrode plate. This is because molybdenum is a material suitable for maintaining the accuracy of the position of the beam extraction hole due to the heat load because it withstands a high heat load and the linear expansion is small, and further because it is easily available. .

  When the material of the molybdenum plate is a sintered body, there is a problem that it is corroded by cooling water such as pure water. According to the experience of the inventors of the present application, it has been found that the usable life of an electrode made of this type of molybdenum plate is as short as 1 to 2 years.

  Under these circumstances, development of an ion source electrode having excellent corrosion resistance and a long lifetime has been demanded.

  In order to give corrosion resistance to the electrode plate made of molybdenum sintered body, the inner peripheral surface of the cooling channel of the electrode plate is coated with nickel or ceramic on the ion source electrode or inside the cooling channel of the electrode plate made of molybdenum sintered body. There is an ion source electrode in which a cooling pipe made of copper or the like is arranged.

Japanese Patent Laid-Open No. 3-129638 JP-A-5-29093 JP-A-6-314600 Japanese Patent No. 2523742

  In order to cool the ion source electrode with pure water or the like, it is necessary to continuously arrange headers at both ends of a water channel of an electrode plate formed of a molybdenum plate or the like.

  In this configuration, in the case of an ion source electrode in which the water channel is formed by a cooling pipe, the header and the end of the cooling pipe inserted into the header are joined, and the end face of the molybdenum electrode plate having the beam extraction hole is joined. The header is joined. Thereby, it is possible to circulate a coolant such as pure water without touching the electrode plate and cool the electrode plate.

  In the ion source electrode having such a configuration, when the cooling tube is formed of copper or the like, the header is preferably formed of the same type of metal as the cooling tube, that is, copper or the like. According to this configuration, the joining between the cooling pipe and the header is good. Accordingly, heat can be removed from the electrode plate effectively by heat radiation from the electrode plate to the header via the cooling pipe. For this reason, it is possible to improve the performance of cooling the electrode in combination with the cooling effect by passing water through the cooling pipe.

  However, the linear expansion coefficient of the metal forming the electrode plate is small as described above, whereas the linear expansion coefficient of the cooling pipe formed of a metal material such as copper having good thermal conductivity is large. The inventors of the present application have found that the electrode for an ion source having a structure in which different kinds of metals having different linear expansion coefficients are joined has the following problems based on the difference in linear expansion.

  That is, when an electrode for an ion source is manufactured by joining an electrode plate, a header, and a cooling pipe by heating in the hot state, the expansion of the header is greater than the expansion of the electrode plate formed of molybdenum or the like during heating. Conversely, when the temperature drops to room temperature after stopping heating, the header contraction is greater than the electrode plate contraction. For this reason, at the interface where the electrode plate and the header are joined, a shearing force is applied to the cooling pipe extending over the electrode plate and the header along a direction orthogonal to the axial direction of the pipe.

  Such shearing force also acts when the electrode is used (when energized) and after the electrode is stopped (after energization is stopped). That is, the shearing force repeatedly acts on the cooling pipe as the produced ion source electrode is used and stopped.

  Due to the circumstances described above, there is a possibility that the cooling pipe may crack due to the shearing force and cause water leakage. The refrigerant leaking from the cooling pipe may corrode the molybdenum sintered body electrode plate. Due to such concerns, it has been difficult to provide a long-life ion source electrode.

  The problem to be solved by the present invention is to provide an ion source electrode having high cooling efficiency, excellent corrosion resistance, and a long lifetime, and a method for producing the same.

  In order to solve the above-mentioned problems, an ion source electrode according to an embodiment has a plurality of beam extraction holes and a metal electrode plate having a small linear expansion coefficient, and has a larger linear expansion coefficient than this electrode plate and thermal conductivity. Has a good metal header and a plurality of cooling pipes made of the same metal as the header. The electrode plates are sandwiched by headers from the direction perpendicular to the thickness direction, and these headers are joined to the electrode plates. Each cooling pipe is penetrated through the electrode plate and arranged side by side in a direction orthogonal to the penetration direction. The end of each cooling pipe is inserted into the header and joined. A joining part is formed in the electrode plate, and this joining part has a plurality of first protrusions arranged at intervals in the direction in which the cooling pipes are arranged and a groove adjacent to the protrusions. A joint part is formed in the header, and the joint part has a second convex part that is fitted in the concave groove and is sandwiched by the first convex part in the direction in which the cooling pipes are arranged. It is characterized in that the electrode plate and the header are joined by fitting these joint portions into an uneven shape.

It is sectional drawing which shows the outline | summary of the neutral particle injection apparatus which has an electrode for ion sources. It is a side view which shows the electrode for ion sources which concerns on 1st Embodiment seeing from the extraction side of an ion beam. It is a perspective view which decomposes | disassembles and shows the electrode for ion sources of FIG. It is sectional drawing of the electrode for ion sources shown along the F4-F4 line | wire in FIG. It is sectional drawing of the electrode for ion sources shown along the F5-F5 line | wire in FIG. It is a schematic sectional drawing shown with the electrode for ion sources in the state which decomposed | disassembled the joining container used in manufacture of the electrode for ion sources of FIG. FIG. 3 is a schematic cross-sectional view showing a state where an ion source electrode is housed in a bonding container used in manufacturing the ion source electrode of FIG. 2. It is the schematic which shows the structure of the hot isostatic pressurization apparatus which enforces the manufacturing method of the electrode for ion sources of FIG. It is a side view which shows the electrode for ion sources which concerns on 2nd Embodiment from the extraction side of an ion beam. It is a perspective view which shows the electrode for ion sources of FIG. It is sectional drawing of the electrode for ion sources shown along the F11-F11 line | wire in FIG. It is sectional drawing of the electrode for ion sources shown along F12-F12 line | wire in FIG. It is a perspective view which shows the frame used in manufacture of the electrode for ion sources of FIG. It is a perspective view which decomposes | disassembles and shows the joining container made in manufacture of the electrode for ion sources of FIG. FIG. 10 is a perspective view showing a bonding container assembled in the process of manufacturing the ion source electrode of FIG. 9. It is sectional drawing of the joining container shown along F16-F16 line | wire in FIG. FIG. 10 is an exploded perspective view for explaining a final manufacturing process of the ion source electrode of FIG. 9. It is a top view which shows the electrode plate material which the electrode for ion sources of FIG. 9 has. It is a side view which expands and shows a part of edge part of the electrode plate material of FIG. It is a side view which shows the ion source electrode which concerns on 3rd Embodiment seeing from the extraction | drawer side of an ion beam.

  (1) An ion source electrode according to an embodiment is an ion source electrode that generates an ion beam by accelerating ions in plasma, and is formed of a metal plate that is heat resistant and has a small linear expansion coefficient. An electrode plate having a plurality of beam extraction holes penetrating in the thickness direction and a metal having a larger linear expansion coefficient and better thermal conductivity than the electrode plate, and the electrode plate is orthogonal to the thickness direction of the electrode plate A header that is joined to the electrode plate across from the direction, and is made of the same type of metal as the header, and has a tube end portion that is inserted into and joined to the header and penetrates the electrode plate. A plurality of cooling pipes arranged side by side in a direction perpendicular to each other, wherein the electrode plate and the header are joined in a form in which at least a part of these joining portions are fitted to be uneven, A fitting is formed on the electrode plate A plurality of concave grooves adjacent to a plurality of first convex portions arranged at intervals in the arrangement direction of the cooling pipes, and the first convex parts formed in the header and fitted into the concave grooves in the arrangement direction of the cooling pipes It is made with the 2nd convex part pinched | interposed by.

  According to the embodiment, the electrode plate that becomes high temperature as the ion beam is generated can be cooled by the refrigerant that is passed through the cooling pipe that passes through the electrode plate. In addition, the heat of the electrode plate is released to the header joined to the electrode plate. In addition, in this heat radiation, the electrode plate and the header are concavo-convexly fitted, so that a larger heat transfer area can be secured. Therefore, the heat removal effect of the electrode plate is improved and the thermal load on the electrode plate is reduced, so that the durability of the electrode plate can be increased.

  Further, in the joint portion where the electrode plate and the header are unevenly fitted, the plurality of first convex portions of the electrode plate having a smaller linear expansion coefficient than the header, the second convex portion of the header having a larger linear expansion coefficient than the electrode plate Is sandwiched in the direction in which the plurality of cooling pipes are arranged. Thereby, it is suppressed that the header expands in the arrangement direction of the cooling pipe as the electrode becomes high temperature, and as a result, due to the difference in the coefficient of linear expansion between the electrode plate and the header, The shearing force acting on the cooling pipe can be reduced. Accordingly, it is possible to prevent corrosion of the electrode plate caused by the leaking refrigerant as the leakage of the refrigerant due to damage to the cooling pipe caused by the shearing force is suppressed.

  (2) In the ion source electrode of (1), the header has a plurality of the second protrusions, and a plurality of grooves that are adjacent to the second protrusions and into which the first protrusions are fitted. Then, the fitting between the second convex portion and the concave groove of the electrode plate and the fitting of the first convex portion and the concave groove of the header are along the alignment direction of the cooling pipes. It is preferable that it extends over substantially the entire joining portion.

  According to the embodiment of (2), a larger heat transfer area from the electrode plate to the header can be secured, and expansion of the header in the direction in which the cooling pipes are arranged can be suppressed at more locations.

  (3) In the ion source electrode according to (1) or (2), the first convex portion and the concave groove of the electrode plate adjacent to the first convex portion, and the second convex portion fitted in the concave groove, However, each is preferably dovetail and shaped.

  According to the embodiment (3), the header is prevented from expanding in the axial direction of the cooling pipe as the electrode becomes hot. As a result, as the electrode temperature decreases from the high temperature state and the header thermally contracts in the axial direction of the cooling pipe, the force for buckling the pipe end of the cooling pipe at its root is reduced. Therefore, since leakage of the refrigerant due to damage to the cooling pipe caused by buckling is suppressed, it is possible to prevent corrosion of the electrode plate caused by the leaking refrigerant.

  (4) In the ion source electrode according to any one of (1) to (3), the electrode plate is formed of two electrode plate members having a plurality of grooves fitted into the cooling pipe, It is preferable that the surfaces of the electrode plate members on which the grooves are formed are bonded to each other so that the cooling pipe is sandwiched between the two electrode plate members.

  According to the embodiment of (4), it is not necessary to process the through hole for passing the cooling pipe into the electrode plate and to insert the cooling pipe into the through hole, thereby reducing the cost. Is possible. At the same time, since the concave surface forming the groove is joined to the entire circumferential direction of the intermediate portion of the cooling pipe, it is possible to enhance the effect of cooling the electrode plate with the cooling pipe.

  (5) In the ion source electrode according to any one of (1) to (4), the header is attached to the first header member into which the tube end portion is inserted, and the first header member. A second header member, and a stopper for closing the end of each tube end portion is attached, and a hole communicating with each tube end portion is formed in the first header member, and the second header member is formed. Further, it is preferable that a header groove extending in the direction in which the cooling pipes are arranged to communicate with the holes, and a smaller number of inlets / outlets than the cooling pipes are formed in communication with the header grooves.

  According to the embodiment of (5), since the number of inlets / outlets provided in the header for passing the refrigerant is smaller than the number of cooling pipes, the number of pipes connected to the inlet / outlet can be reduced.

  (6) A method of manufacturing an ion source electrode according to an embodiment is a method of manufacturing an ion source electrode that generates ions by accelerating ions in plasma, and includes a plurality of second electrodes formed at both ends. An electrode plate made of a sintered molybdenum body having one convex portion and a plurality of ion extraction holes penetrating in the thickness direction, a tube end portion projecting from each of the both ends, penetrating the electrode plate, and the thickness direction An electrode main body having a plurality of cooling pipes made of copper or copper alloy arranged side by side in an orthogonal direction is prepared, and the first convex portion is fitted into a concave groove formed between the first convex portions. Preparing a header made of copper or copper alloy each having a plurality of pipe through holes into which the second protrusions and the pipe end parts sandwiched in the direction in which the cooling pipes are arranged, and in the pipe through holes, The tube ends are inserted respectively, and the concave groove and the second convex The headers are arranged with the electrode plates interposed therebetween, and the electrode assembly formed by combining the electrode main body portion and the header is temporarily assembled, and the tube end portion and the tube The step of sealing and welding the joint with the through-hole in an atmosphere of vacuum or inert gas, and the electrode assembly subjected to seal welding are housed in the joint container body, and the joint container body is covered with a container lid. In addition, a process of assembling the junction container by sealing and welding the junction container body and the container lid, storing the junction container in a hot isostatic press, and shutting off the electrode assembly from outside air, Operating the hot isostatic pressing device to process the electrode assembly by a hot isostatic pressing method, thereby joining the joints of the electrode plate, the cooling pipe, and the header; From serial heat during isostatic pressing apparatus comprising the steps of retrieving the junction container, dismantle the joint container, characterized in that it comprises a step of taking out the electrode assembly which is integrated by the bonding.

  According to the embodiment of (6), the electrode plate made of molybdenum and the cooling pipe made of copper or copper alloy are joined by the hot isostatic pressing method, and the electrode plate and the cooling pipe and copper or copper are joined. Since the alloy header is joined, the components can be aligned with each other and firmly joined. The ion source electrode manufactured in this way is improved in the heat dissipation performance from the electrode plate exposed to high heat load to the cooling pipe and the header, and in addition, the joint portion where the electrode plate and the header are unevenly fitted. Thus, a larger heat transfer area from the electrode plate to the header can be secured. Therefore, the heat removal effect of the electrode plate can be enhanced.

  At the same time, the manufactured ion source electrode is the first convex portion of the electrode plate having a smaller linear expansion coefficient than the header, and the second convex portion of the header having a larger linear expansion coefficient than the electrode plate is formed by the plurality of cooling tubes Since the electrodes are sandwiched in the arrangement direction, it is suppressed that the header expands in the arrangement direction of the cooling pipes as the electrodes become high temperature. As a result, the shearing force acting on the cooling pipe at the joint portion due to the difference in the linear expansion coefficient between the electrode plate and the header is reduced.

  As described above, the electrode manufactured according to the embodiment (6) has high cooling efficiency of the electrode plate, high durability, and leakage of refrigerant due to damage to the cooling pipe caused by shearing force. Corrosion of the electrode plate can be prevented.

  (7) In the ion source electrode manufacturing method according to (6), in the step of preparing the electrode main body, a plurality of grooves fitted to an intermediate portion other than the tube end of the cooling pipe are provided on one side. In addition, two electrode plate materials having an uneven edge portion forming the first convex portion and the concave groove are prepared, the grooves of the two electrode plate materials are faced, and the intermediate between the grooves facing each other is prepared. It is preferable that the electrode body is formed by assembling the electrode plate with the cooling pipe sandwiched between the two electrode plate members so that the portions are arranged.

  According to the embodiment of (7), it is not necessary to process the through hole for passing the cooling pipe into the electrode plate and to insert the cooling pipe into the through hole, thereby reducing the cost. Is possible. At the same time, since the concave surface forming the groove is joined to the entire circumferential direction of the cooling pipe, it is possible to enhance the effect of cooling the electrode plate with the cooling pipe.

  (8) In the method for manufacturing an ion source electrode according to (7), the tube through hole and the second frame are formed in the same manner as the first frame portion in which the tube through hole and the second convex portion are formed. A square frame made of copper or a copper alloy having a second frame portion on which the second convex portion is formed is prepared, and the tube end of the cooling pipe is inserted into the tube through hole of the first and second frame portions. After the cooling pipe is disposed over the first frame portion and the second frame portion, the two electrode plate materials are accommodated in the frame body, and the copper covering the electrode plate materials is then inserted. Alternatively, a first lid made of copper alloy is housed, and a second lid made of copper or copper alloy covering the first lid with the frame body is housed, and the electrode assembly is temporarily assembled and formed by this temporary assembly. The processed bonding container is processed by the hot isostatic pressing method, the processed bonding container is machined, It is preferred that the excess portions other than the portion corresponding to the electrode assembly is removed leaving a portion corresponding to the electrode assembly.

  According to the embodiment of (8), each cooling pipe can be properly positioned by disposing a plurality of cooling pipes across the first frame part and the second frame part of the frame body. Under this positioning, the two electrode plate members are accommodated in the frame, so that the grooves formed in these electrode plate members are fitted so as to enclose the intermediate portion of the cooling pipe. Thereby, an electrode plate and a cooling pipe are combined appropriately, without requiring the troublesome thing which passes a cooling pipe to an electrode board one by one. On this, by joining the first lid and the second lid in the frame body, a junction container having a structure corresponding to an electrode assembly suitable for processing by the hot isostatic pressing method is temporarily assembled. . Further, after that, unnecessary portions of the bonding container processed by the hot isostatic pressing method are removed to obtain an ion source electrode. Therefore, according to the embodiment of (8), it is possible to improve the manufacturability of the ion source electrode.

  Hereinafter, various preferred embodiments will be described with reference to the accompanying drawings.

  First, an outline of the configuration of the relevant part of the fusion device in which the ion source electrode of the embodiment is used will be described.

  As shown in FIG. 1, an ion source 32 of a neutral particle injection device 31 used in a nuclear fusion device has a filament 34 in a plasma generation unit 35 into which a first gas 33 such as hydrogen is introduced and has a filament 34. Plasma is generated by performing an arc discharge through. Further, the ion source 32 applies a high voltage to each electrode 36 of the electrode array 38 from the power source 37 to form an electric field. By this electric field, ions ionized by the first gas 33 in the plasma are extracted from the plasma and accelerated, and a high-speed ion beam 40 having high energy is generated.

  The ion beam 40 is bent as it is by the magnetic field of the coil of the fusion device. For this reason, the ion source 32 allows the ion beam 40 to pass through the neutralization cell 39 filled with the second gas 41. Thereby, the ion beam 40 is converted into the neutral particle beam 42 while preserving the kinetic energy by the collision reaction between the ions and the second gas 41. The neutral particle beam 42 is incident on the core plasma 43.

  The electrode array 38 for accelerating ions in the ion source described above is constituted by three or five (not shown) electrodes 36 that are spaced apart in parallel. An ion beam is extracted from the plasma through a plurality of beam extraction holes formed in the electrode 36. The first-stage electrode 36 closest to the ion source 32 is in direct contact with the hot ion beam 40. Each electrode 36 is provided with a cooling means for reducing the heat load of the electrode itself and improving the durability. As will be described in detail in the following embodiments, this cooling means has a cooling tube arranged so as not to interfere with the beam extraction hole in order to effectively cool the entire electrode.

(First embodiment)
The first embodiment will be described with reference to FIGS.

  As shown in FIGS. 2 and 3, the ion source electrode (hereinafter simply referred to as an electrode) 36 of the first embodiment includes an electrode plate 1, a plurality of cooling pipes 11, two headers 15, and the like. Is provided. The electrode body 1 is constituted by the electrode plate 1 and each cooling pipe 11. Further, the electrode body A and each header 15 constitute an electrode 36.

The electrode plate 1 is made of metal having heat resistance that can withstand a high heat load and a small linear expansion coefficient. As this kind of metal, a sintered body of molybdenum can be suitably used. The melting point of molybdenum constituting the electrode plate 1 is, for example, 2630 ° C., and the linear expansion coefficient of the molybdenum is 5.43 × 10 ⁻⁶ · ° C. ⁻¹ at 25 ° C. As the metal material forming the electrode plate 1, for example, a tantalum sintered body or the like can be used instead of molybdenum.

  The electrode plate 1 is a flat plate and has a thickness of about 3 mm to 6 mm, for example, 5 mm. The shape of the electrode plate 1 is, for example, a square shape, but is not limited to this, and may be a circular shape. The electrode plate 1 has a pair of joining parts 1a. When the shape of the electrode plate 1 is rectangular as shown in FIGS. 2 and 3, the joining portion 1 a is held by one end portion and the other end portion in the longitudinal direction.

  The electrode plate 1 has a plurality of beam extraction holes 2 for extracting an ion beam from plasma. These beam extraction holes 2 are arranged in a form regularly aligned, for example, vertically and horizontally over the entire area of the electrode plate 1. Each beam extraction hole 2 is, for example, a round hole, and both ends thereof are opened on both side surfaces in the thickness direction of the electrode plate 1.

  The electrode plate 1 has the same number of through holes 3 as the cooling pipes 11 (see FIGS. 4 and 5). Each through hole 3 is, for example, a round hole, and the diameter thereof is substantially the same as the outer diameter of the cooling pipe 11, and is, for example, 2 mm to 3 mm. These through-holes 3 are provided so as not to cross the beam extraction holes 2, and both ends thereof are opened to the joint portions 1 a of the electrode plate 1 to which the header 15 is connected.

  For this reason, for example, when the electrode plate 1 is viewed in a plan view as shown in FIG. 2, the hole array including the plurality of beam extraction holes 2 arranged in the longitudinal direction of the electrode plate 1 and the through holes 3 The rows and the through holes 3 are alternately provided in a direction orthogonal to the extending direction.

  The electrode plate 1 has a plurality of first convex portions 4 at the joint portion 1a. The 1st convex part 4 formed in one of a pair of joining site | parts 1a and the 1st convex part 4 formed in the other of a pair of joining site | parts 1a are protruded in the direction away from each other. . Both side surfaces of the first protrusions 4 are parallel.

  The first protrusions 4 are provided at intervals in the direction in which the cooling pipes 11 are arranged, in other words, in the direction in which the through holes 3 are parallel to each other. The end of the through hole 3 is opened at the tip surface of each first convex portion 4.

  A plurality of concave grooves 5 adjacent to the first convex portion 4 are formed in the joint portion 1a. The width of each concave groove 5 is defined by the first convex part 4 so as to be constant without change. In the first embodiment, the concave groove 5 and the first convex portion 4 are formed in a direction perpendicular to the direction in which the hole row and the through-hole 3 extend, that is, a rectangular electrode, over substantially the entire bonding portion 1a. The plates 1 are alternately provided in the short direction. Therefore, in the first embodiment, the bonding portion 1a has a comb shape.

  The cooling pipe 11 is made of a metal having a larger coefficient of linear expansion than the electrode plate 1 and good thermal conductivity. As this kind of metal, copper (pure copper) or a copper alloy can be preferably used. The pure copper is preferably oxygen-free copper having a purity of 99.99% or more. Copper alloys include Cu-Ag alloys, Cu-Cr-Zn alloys, Cu-Ni alloys, Cu-Ag-Ni alloys, Cu-Ni-Al alloys, Cu-Ni-Zn alloys, etc. Can be used. These copper or copper alloys are excellent in high temperature corrosion resistance and have high reliability in high temperature and high pressure load environments.

  Each cooling pipe 11 is a seamless pipe made of oxygen-free copper, for example. These cooling pipes 11 are round pipes corresponding to the shape of the through holes 3. The total length of each cooling pipe 11 is longer than the length over the joining portion 1 a of the electrode plate 1. The outer diameter of each cooling pipe 11 is 3 mm, for example, and the thickness is 0.5 mm.

  Each cooling pipe 11 penetrates the through hole 3 and is integrated with the electrode plate 1 by diffusion bonding. The cooling pipes 11 penetrating the electrode plate 1 in this way are arranged side by side in a direction orthogonal to the direction of penetration (the axial direction of the cooling pipe 11). Both ends of each cooling pipe 11 protrude from the electrode plate 1. Here, the protruding end is referred to as a tube end 11a.

  Each header 15 is made of the same kind of metal as the cooling pipe 11, that is, copper (pure copper) or copper alloy. The header 15 is formed of an integrally structured block having, for example, a base portion 15a and a pipe connecting portion 15b that is continuous with the base portion 15a. The base portion 15a and the pipe connecting portion 15b are integrally formed, but separate members may be integrated by brazing or the like.

  The thickness of the header 15 is equal to the thickness of the electrode plate 1. The width of the header 15 is equal to the width of the electrode plate 1 (the dimension between both ends in the direction in which the cooling pipes 11 are arranged). The approximate size of the header 15 is as follows. It is 350 mm long and 50 mm wide. The base part 15a has a thickness of 5 mm. The height of the pipe connecting portion 15b is 15 mm.

  The base portion 15 a has the same number of tube through holes 16 as the cooling tubes 11. The diameters and arrangement intervals of these tube through holes 16 are the same as the diameters and arrangement intervals of the through holes 3 of the electrode plate 1.

  The tip of the base part 15a forms a joint part 15c. A plurality of second convex portions 18 are provided at intervals in the joining direction of the pipe through holes 16 parallel to each other at the joint portion 15c. The end of the tube through-hole 16 is opened at the tip surface of each second convex portion 18. It is also possible to provide the tube through-hole 16 with its end open to each concave groove 19 described below.

  A plurality of concave grooves 19 adjacent to the second convex portion 18 are formed in the joint portion 15c. In the first embodiment, the concave grooves 19 and the second convex portions 18 are provided alternately in the width direction of the header 15 over substantially the entire joining portion 15c. Therefore, in the first embodiment, the joint portion 15c has a comb shape. The width of each concave groove 19 is defined by the second convex portion 18 so as to be constant without change.

  The pipe connection portion 15 b has, for example, the same number of entrances 17 as the pipe through holes 16. These inlets / outlets 17 communicate with the pipe through holes 16 in a form that is continuous with the pipe through holes 16 at a right angle. Each entrance / exit 17 is opened to the front end surface of the pipe connecting portion 15b, and a pipe (not shown) is inserted and connected to the entrance / exit 17, for example.

  The joining part 15c of each header 15 and the joining part 1a of the electrode plate 1 are concavo-convexly fitted. That is, the first convex part 4 of the joint part 1a and the concave groove 19 of the joint part 15c are fitted, and the concave groove 5 of the joint part 1a and the second convex part 18 of the joint part 15c are fitted. ing. Thereby, each 2nd convex part 18 is pinched by the alignment direction of the cooling pipe 11 by the 1st convex part 4 adjacent to this (refer FIG. 12). Further, the pipe end 11 a of the cooling pipe 11 is inserted into the pipe through hole 16 of the header 15.

  Therefore, the two headers 15 are arranged with the electrode plate 1 sandwiched from the direction orthogonal to the thickness direction of the electrode plate 1. With this arrangement, the base portion 15a of the header 15 and the electrode plate 1 are continuous with each other. The header 15 and the electrode plate 1, and the header 15 and the tube end portion 11a of each cooling tube 11 are integrated by diffusion bonding.

  The two headers 15 are members for evenly distributing, for example, pure water as a refrigerant to a large number of cooling pipes 11. Therefore, the electrode 36 can be water-cooled as pure water is supplied to the inlet / outlet 17 from the header 15 on one side from a cooling medium supply source (not shown). That is, the supplied pure water flows into each cooling pipe 11 through the inlet / outlet 17 of the header 15 on the one side, and the pure water flowing through the cooling pipe 11 passes through the inlet / outlet 17 of the header 15 on the other side. And flows out of the electrode 36.

  Next, a method for manufacturing the ion source electrode 36 of the first embodiment will be described.

  First, an electrode plate 1, a plurality of cooling pipes 11, and a pair of headers 15 are prepared. In this case, the prepared header 15 is a structure in which the pipe through hole 16 is formed but the entrance 17 is not formed. Furthermore, the prepared joining surface of each component is finished to a predetermined surface roughness. This finishing can be performed by sandpaper polishing, buffing, or a polishing method in which a chemical solution and hard fine particles are combined. For example, when finishing the bonding scheduled surface by buffing, the surface roughness is finished to 5S or less.

  The electrode body A is prepared by combining the electrode plate 1 thus prepared and the plurality of cooling pipes 11. The electrode body A is formed by passing the cooling pipe 11 through each through hole 3 of the electrode plate 1. In this case, each cooling pipe 11 is penetrated by the electrode plate 1 so that the pipe end portion 11a protrudes from the joining portion 1a of the electrode plate 1, respectively.

  Next, the electrode assembly B is formed. Here, the electrode assembly B refers to an electrode in a state before being joined by a hot isostatic pressing method described later. This electrode assembly B is formed by fitting the joint part 1 a of the electrode plate 1 and the joint part 15 c of the header 15 into an uneven shape and inserting each pipe end part 11 a into the pipe hole 16 of the header 15. Thereby, the second convex portion 18 of the joint portion 15c is fitted into the concave groove 5 adjacent to the first convex portion 4 of the joint portion 1a, and the two headers 15 sandwiching the electrode plate 1 in the longitudinal direction thereof. Is placed. Thus, an electrode assembly B in which the electrode main body A and the header 15 are combined is formed.

  After that, seal welding is performed in a vacuum or an inert gas atmosphere between a portion to be sealed in the electrode assembly B, for example, between the tube passage hole 16 and the tube end portion 11a inserted therein. By this welding, an electrode assembly B configured so that a high-temperature and high-pressure gas used for diffusion bonding described later does not enter each joint between the cooling pipe 11, the electrode plate 1, and the header 15 is used. Can be obtained. In FIG. 4, reference numeral 20 denotes a mark where seal welding has been performed, that is, a seal welded portion.

  Electron beam welding can be employed for this seal welding. When electron beam welding is performed under vacuum, the electrode assembly B is housed in a vacuum container (not shown), and the welding target portion is sealed and welded in a state where the inside of the container is evacuated. In order to completely deaerate the vacuum vessel in which the electrode assembly B was accommodated, the vacuum evacuation was performed for 30 minutes or more, and then seal welding was performed on the welding target portion using an electron beam. In this case, since the thickness of the cooling pipe 11 is thin, the control of the beam current of the electron beam welding and the like was performed accurately, and sound seal welding was performed.

  For the electrode assembly B taken out by disassembling the vacuum vessel after seal welding, the soundness of the seal weld 20 is checked by welding bead appearance inspection, fluorescent flaw detection test, or helium leak test as necessary. It was done by doing.

  Next, as shown in FIG. 6, the electrode assembly B having the seal weld 20 is housed in the container body 12. In this case, both ends of each cooling pipe 11 are opened on the side wall of the container body 12. Then, after covering the container body 12 with the container lid 13, the container body 12 and the container lid 13 are sealed and welded, and the container body 12 and both ends of each cooling pipe 11 are sealed and welded. Assemble container 14 (see FIG. 7). In FIG. 7, reference numeral 14 a indicates a seal weld between the container body 12 and the container lid 13.

  Electron beam welding was adopted for seal welding of the bonding container 14. The electron beam welding was performed after evacuation was performed for 30 minutes or more in order to completely deaerate the air in the bonding container 14. Further, the airtightness of the bonding container 14 was evaluated by carrying out a weld bead appearance inspection, a fluorescent flaw detection test, or a helium leak test as necessary, as described above.

  Next, in order to integrate the joined portion of the electrode assembly B by diffusion bonding by the hot isostatic pressing method, first, the joining container 14 in which the electrode assembly B having the seal welded portion 20 is stored is shown in FIG. The hot isostatic pressurizing device 21 shown in FIG. The pressurized container 22 has a container body and a lid covering the container body.

  Thereafter, the hot isostatic pressurizing device 21 is operated to process the bonding container 14 by the hot isostatic pressurizing method. The processing procedure in this case is as follows.

First, the first valve V1 was opened, the vacuum pump 24 was started, and the inside of the pressurized container 22 was evacuated. When the degree of vacuum in the pressurized container 22 reaches about 10 ⁻² Pascal, the vacuum pump 24 is stopped and the first valve V1 is closed to complete deaeration.

  Next, the second valve V <b> 2 was opened and the high-pressure pump 25 was started, and high-pressure argon gas was injected into the pressurized container 22 and filled. In this case, first, the pressure was increased to about 10 megapascals as a set value of the initial pressure. Next, the heater 26 in the pressurization vessel 22 was energized and the temperature was raised. As the temperature rises, the gas pressure in the pressurized container 22 increases. The high pressure pump 25 was repeatedly driven and stopped.

  Thereby, at a temperature of 900 ° C. to 1000 ° C., for example, 900 ° C., which is a joining condition for hot isostatic pressing, the gas pressure is increased to a pressure within a range of 100 megapascal to 150 megapascal, for example, 147 megapascal, This state was maintained for 2 to 7 hours, for example 2 hours. Note that the arrow 27 in FIG. 8 indicates the direction of gas pressure. The entire bonding container 14 can be pressurized with an isotropic pressure by this gas pressure.

  Thereafter, the heater 26 is turned off, the high-pressure pump 25 is stopped, the second valve V2 is closed, and another valve (not shown) is opened, so that the high-pressure gas in the pressurized container 22 is released. The product was discharged and cooled to room temperature and normal pressure. At this time, the released gas was recovered.

  In this way, the joint container 14 in which the electrode assembly B is accommodated is subjected to hot isostatic pressing, so that the contact portion between the electrode plate 1 and the cooling tube 11, the contact portion between the cooling tube 11 and the header 15, and the electrode plate 1. The contact portions (concave / convex fitting portions) at the joining portion 1a of the header 15 and the joining portion 15c of the header 15 were integrated by solid phase joining (a method of joining without melting).

  In particular, according to this isotropic pressure pressurization process, high-temperature and high-pressure gas enters the cooling pipe 11 and the cooling pipe 11 is expanded. On the other hand, the electrode plate 1 and the header 15 are compressed by pressure acting from the periphery. Thereby, the electrode plate 1 and the cooling pipe 11 and the cooling pipe 11 and the header 15 are diffusion-bonded at their contact surfaces. Accordingly, the electrode 36 is manufactured as an integrated structure by joining a plurality of components constituting the electrode 36 firmly and soundly.

  After the hot isotropic pressure treatment, the pressure and temperature in the pressurized container 22 are close to atmospheric pressure and room temperature, respectively, and then the lid of the pressurized container 22 is opened and the joining container 14 is taken out. Further, the bonding container 14 was disassembled and the electrode 36 was taken out.

  In this state, the seal welded portion 20 of the extracted electrode 36 was removed by cutting, grinding, or the like, and machining necessary for obtaining a predetermined shape was performed.

  Next, copper plugs 28 shown in FIG. 4 are welded to both ends of each cooling pipe 11 to close the openings at both ends of each cooling pipe 11. Further, a drill blade is inserted into the pipe connection portion 15 b of the header 15 to process the inlet / outlet port 17, and the inlet / outlet port 17 communicates with the pipe end portion 11 a of the cooling pipe 11.

  As described above, the ion source electrode 36 corresponding to a high heat load could be obtained.

  In this electrode 36, the header 15 is made of copper or a copper alloy having excellent thermal conductivity. As a result, heat exchange with the coolant such as pure water flowing through the cooling pipe 11 made of copper or copper alloy joined to the header 15 becomes quick.

  In addition, the joining portion 15c of the header 15 and the joining portion 1a of the electrode plate 1 are joined in a form in which the concave and convex portions are fitted. Thereby, the heat transfer area from the electrode plate 1 to the header 15 increases. In particular, in the first embodiment, the bonding portion 1a and the bonding portion 15c are both comb-shaped extending over substantially the entire width of the electrode 36, and are bonded in a form in which they are concavo-convexly fitted.

  For this reason, a larger heat transfer area can be secured. Therefore, heat removal from the electrode plate 1 to the header 15 is improved.

  As described above, according to the electrode 36 of the first embodiment, the cooling efficiency of the electrode plate 1 can be improved, and the durability of the electrode 36 can be improved accordingly.

  Furthermore, the electrode plate 1 of the electrode 36, the cooling pipe 11, and the header 15 are expanded and contracted due to the difference in coefficient of linear expansion as described above during manufacture and use and when stopped. Specifically, the cooling pipe 11 and the header 15 made of a cylinder or a copper alloy expand and contract more than the electrode plate 1 made of molybdenum.

  However, the second convex portion 18 formed in the joint portion 15 c of the header 15 is inserted into the groove 5 between the plurality of first convex portions 4 formed in the joint portion 1 a of the electrode plate 1, and the electrode It is sandwiched between the first protrusions 4 in the width direction of the plate 1 (specifically, the direction in which the cooling pipes 11 are arranged). For this reason, the shearing force in the direction orthogonal to the axial direction of the cooling pipe 11 (this is the same as the width direction) accompanying the expansion / contraction at the root of the pipe end portion 11a of each cooling pipe 11 is: It is suppressed from being given. In connection with this, since the possibility that each cooling pipe 11 is damaged and water leaks is eliminated, it is possible to prevent the electrode plate 1 from corroding due to water leakage.

  Therefore, according to 1st Embodiment, durability is improved and it has high reliability.

(Second Embodiment)
The second embodiment shown in FIGS. 9 to 19 is different from the first embodiment in the configuration described below, and the other configurations are the same as those in the first embodiment. For this reason, about the structure which show | plays the same or same function as 1st Embodiment, the code | symbol same as 1st Embodiment is attached | subjected and the description is abbreviate | omitted. In the following description, FIG.

  In the second embodiment, the electrode plate has a configuration in which two electrode plate materials are joined, the header is configured by two members, a configuration further including a bush and a reinforcing plate, and a manufacturing method. The use of a square frame material is different from the first embodiment.

  The two electrode plate members 51 constituting the electrode plate 1 have the same shape as shown in FIG. 14, and also have a plurality of grooves 52 and an edge portion 53 having an uneven shape as shown in FIG. The thicknesses of the two electrode plate members 51 are preferably the same, but may be different.

  The plurality of grooves 52 are formed in parallel to one side of the electrode plate material 51, and both ends of the grooves 52 are open to the edge portions 53 as shown in FIG. The groove cross-sectional shape in the direction orthogonal to the direction in which each groove 52 extends is, for example, a semicircular shape. In a state where the two electrode plate members 51 are joined, the facing groove 52 forms a through hole 3 (see FIG. 12) having a circular cross section. In the second embodiment, the end of the through-hole 3 is opened not in the second convex portion 18 of the joining portion 1a but in the concave groove 19 adjacent thereto.

  The groove cross-sectional shape of each groove 52 may be a semi-elliptical shape or a quadrangular shape. In particular, when the groove cross-sectional shape is a square shape, the cross-sectional area of the cooling pipe 11 formed following the shape of the groove 52 increases, so that the heat exchange area between the electrode plate 1 and each cooling pipe 11 increases and cooling is performed. It is preferable at the point which can improve an effect.

  The edge part 53 is a part which forms the joining part 1a (refer FIG.9, FIG.11, FIG.13 and FIG. 16) in the state in which the two electrode plate materials 51 were joined.

  The bush 55 is formed of the same metal material as that of the cooling pipe 11, that is, copper or a copper alloy. The bush 55 is fitted and attached to the outer periphery of both ends of the cooling pipe 11 as shown in FIG.

  As shown in FIG. 17, the header 15 of the second embodiment is formed of a first header member 57 and a second header member 58 joined thereto.

  The first header member 57 is a member corresponding to the base portion of the header described in the first embodiment. As shown in FIGS. 9 and 11, the first header member 57 has an uneven fitting portion (joint portion) between the joint portion 1 a of this member and the joint portion 15 c of the electrode plate 1 from one side of the electrode plate 1. The cover portion 15d is covered. Further, the first header member 57 has the same number of holes 15e as the cooling pipes 11 as shown in FIG. These holes 15e communicate with the respective cooling pipes 11 respectively.

  The second header member 58 is a member corresponding to the pipe connection portion of the header described in the first embodiment, and is formed of the same metal material as the first header member 57, that is, copper or a copper alloy. The second header member 58 extends in the direction in which the cooling pipes 11 are arranged, and is brazed to the first header member 57 using a metal brazing material (not shown) to include the first header member 57 including the cover portion 15d. It is applied over one surface and the end surface. The end surface of the first header member 57 is continuous to the one surface at a right angle, and the plug 28 (see FIG. 11) is exposed.

  As shown in FIGS. 9 and 11, the second header member 58 has a header groove 58 a and a plurality of entrances 17. The header groove 58a extends in the direction in which the cooling pipes 11 are arranged. The header groove 58a communicates with each hole 15e. The number of doorways 17 is less than the number of holes 15e. These entrances 17 communicate with the header groove 58a.

  Therefore, each cooling pipe 11 and each inlet / outlet port 17 communicate with each other via the hole 15e and the header groove 58a. For this reason, it is possible to circulate a coolant such as pure water through each inlet / outlet 17 to each cooling pipe 11. 9 and 11 and the like, reference numeral 59 denotes a mounting screw hole formed in the vicinity of each doorway 17.

  The reinforcing plate 61 shown in FIGS. 9, 10, 12, and 17 is made of the same type of metal as the electrode plate 1, that is, molybdenum. As shown in FIGS. 7 and 8, the reinforcing plate 61 is disposed between the longitudinal ends of the two second header members 58 disposed so as to face each other, and is not shown on one side of the electrode plate 1. It is brazed using a material. Both ends of the reinforcing plate 61 in the longitudinal direction are abutted against stepped portions 1b (see FIG. 11) formed on the electrode plate 1.

  Since the electrode 36 includes the reinforcing plate 61, the electrode plate 1 can be prevented from being deformed in the thickness direction, and the pair of headers 15 can be prevented from expanding in a direction approaching each other.

  Next, a method for manufacturing the ion source electrode 36 of the second embodiment will be described with reference to FIGS.

  First, together with the frame body 71 shown in FIG. 13, the pair of first lids 81 and the pair of second lids 83 shown in FIG. 14, two electrode plate members 51, a plurality of cooling pipes 11, and a plurality of bushes 55 Prepare. Among these, components other than each cooling pipe 11 are components which form the joining container C for hot isostatic pressing (refer FIG. 12).

  As shown in FIG. 13, the frame body 71 is a member that bears a container frame portion (can) of a joining container C, which will be described later, and is formed in a square shape from copper or a copper alloy. That is, the frame body 71 includes a first frame portion 72 and a second frame portion 73 which are parallel to each other, and a third frame portion 74 and a fourth frame which are integrally connected to the frame portions 72 and 73 and are parallel to each other. Part 75.

  As shown in FIG. 16, the first frame portion 72 has a first thick portion 76, a second thick portion 77, and a third thick portion 78. The first thick part 76 is the maximum thickness, the third thick part 78 is the minimum thickness, and the second thick part 78 is an intermediate thickness, that is, thinner than the first thick part 76 and the first thick part 76. It is thicker than 3 thick part 78.

  Further, as shown in FIG. 16, the first frame portion 72 has the same number of tube through holes 16 extending from the first thick portion 76 to the third thick portion 78 as the cooling pipes 11. One end has a fitting hole 79 opened individually. Each fitting hole 79 is formed to open on the outer surface of the first frame portion 72.

  A joining site 15 c is formed at the tip of the third thick portion 78. Accordingly, the second projecting portion 18 and the recessed groove 19 are formed in the joint portion 15c over substantially the entire longitudinal direction (note that these configurations are not shown in detail in the second embodiment, but as described in the first embodiment). The structure is formed alternately. The other end of the tube through hole 16 is opened in each concave groove 19.

  The second frame portion 73 has the same configuration as the first frame portion 72 and is disposed symmetrically with the first frame portion 72. For this reason, about the same component as the 1st frame part 72 in the 2nd frame part 73, the same code | symbol is attached | subjected and the description is abbreviate | omitted. At the same time, the joint portions 15c of the first frame portion 72 and the second frame portion 73 that are arranged symmetrically protrude and face each other in a direction approaching each other.

  The 3rd frame part 73 and the 4th frame part 74 are the structures which are not provided with a 3rd thick part in the 1st frame part 72 with a pipe through-hole. For this reason, in the 3rd frame part 73 and the 4th frame part 74, about the same structure part as the 1st frame part 72, the same code | symbol is attached | subjected and the description is abbreviate | omitted. The third frame portion 73 and the fourth frame portion 74 are disposed on the object in a form in which the second thick portion 77 protrudes and faces in a direction in which the second thick portion 77 approaches each other.

  After the frame body 71 and the like are prepared, the bushes 55 are closely fitted and attached to the outer periphery of one end of each cooling pipe 11. The bush 55 is made of copper or a copper alloy, and a state where it is attached to the cooling pipe 11 is shown in FIG.

  After this, the other end of each cooling pipe 11 to which the bush 55 is not attached is the head, and each cooling pipe 11 has one of the first frame portion 72 or the second frame portion 73. It is made to pass through the pipe hole 16. At the same time, the other end portions of the respective cooling pipes 11 are respectively inserted from the inside of the frame body 71 into the pipe through holes 16 of the other frame section.

  Next, the remaining bushes 55 are closely fitted and attached to the outer periphery of the other end portion of each cooling pipe 11 protruding from the other frame portion. Thus, the bushes 55 attached to both ends of each cooling pipe 11 are all fitted into the fitting holes 79 as shown in FIG.

  With the above procedure, each cooling pipe 11 is attached across the first frame portion 72 and the second frame portion 73 of the frame body 71. The 1st frame part 72 and the 2nd frame part 73 are parts processed into the 1st header member. Therefore, the electrode assembly B is substantially assembled by the above procedure. In this electrode assembly B, the cooling pipes 11 are held in a state where they are arranged at appropriate intervals in a direction perpendicular to the longitudinal direction thereof. At the same time, as representatively shown in FIG. 16, both ends of each cooling pipe 11 protrude from the outer surfaces of the first frame part 72 and the second frame part 72, and both ends of each cooling pipe 11 are open. It is kept in the state that was done.

  Next, the planned joining surface of the electrode assembly B is finished to a predetermined surface roughness. This finishing can be performed by sandpaper polishing, buffing, or a polishing method in which a chemical solution and hard fine particles are combined. For example, when finishing the bonding scheduled surface by buffing, the surface roughness is finished to 5S or less.

  Thereafter, the electrode body B is prepared by combining the electrode assembly B with the two electrode plate members 51.

  That is, the two prepared electrode plate members 51 are covered from both sides of the cooling pipe 11 group. In this case, each cooling pipe 11 is sandwiched between the two electrode plate materials 51 so that the grooves 52 of the electrode plate material 51 face each other and the cooling pipes 11 are arranged between the facing grooves 52. As a result, the surfaces of the two electrode plate members 51 having the grooves 52 are in contact with each other, and the through holes 3 are formed by the opposed grooves 52, and the cooling pipes 11 are in contact with and accommodated in the through holes 3, respectively. A state is reached (see FIG. 16).

  At the same time, the joining portion 1 a formed by the edge portion 53 of the two electrode plate members 51 is unevenly fitted to the joining portion 15 c of the first frame portion 72 and the second frame portion 73. Specifically, the second convex portion 18 of the joint portion 15c is inserted into the concave groove 5 adjacent to the first convex portion 4 of the joint portion 1a, and the first convex portion 4 is inserted into the concave groove 19 of the joint portion 15c. Further, the first convex portion 4 is concavo-convexly fitted so as to sandwich the second convex portion 18 in the direction in which the cooling pipes 11 are arranged. In addition, in 2nd Embodiment, although the structure of the 1st convex part 4, the ditch | groove 5, the 2nd convex part 18, and the ditch | groove 19 is not shown in detail, these are as having demonstrated in 1st Embodiment. It is a configuration.

  Thus, the two electrode plate members 51 are combined with the frame body 71, thereby comprising the first frame portion 72 and the second frame portion 73 of the frame body 71, the plurality of cooling pipes 11, and the two electrode plate members 51. The electrode body 1 is assembled by the electrode plate 1.

  Next, a bonding container (also referred to as canning or HIP bonding container) C used in the hot isostatic pressing method is assembled.

  This assembly is performed by combining the frame body 71 with two first lids 81 and two second lids 83. The first lid 81 and the second lid 83 are both made of the same kind of metal as the frame 71, that is, made of copper or a copper alloy.

  The first lid 81, which is a canning lid, includes a third thick portion 77 included in the first frame portion 72 and the second frame portion 73, and a second thickness included in the third frame portion 74 and the fourth frame portion 75. It is a square plate having the same size as the region surrounded by the portion 76, and is fitted into the region. Thereby, as shown in FIG. 16, the 1st cover 81 is arrange | positioned so that the electrode plate material 51 and the 3rd thick part 78 following this may be covered. The plate thickness of the first lid 81 is substantially the same as the height of the step formed by the second thick portion 77 and the third thick portion 78. Therefore, in the arrangement state, the first lid 81 and the second thick portion 77 are continuously flush with each other.

  The second lid 83, which is a lid for canning, is a square plate having substantially the same size as the area surrounded by the first thick portions 76 that the first frame portion 72 to the fourth frame portion 75 have and are continuous with each other. Yes, and fitted into the area. Accordingly, as shown in FIG. 16, the second lid 83 is disposed so as to cover the second thick portion 77 that the first lid 81 and the first frame portion 72 to the fourth frame portion 75 have and are continuous with each other. . The plate thickness of the second lid 83 is substantially the same as the height of the step formed by the first thick portion 76 and the second thick portion 77. Therefore, in the arrangement state, the second lid 83 and the first thick portion 76 are continuous with each other.

  Thereafter, the joint exposed on the surface of the assembled joining container C is sealed and welded in a vacuum or an inert gas atmosphere. This welding is performed on the first frame portion 72 (and the second frame portion 73), the bush 55, and the joint portion as the header 15 as representatively shown in FIG. 16, and the first thickness of the frame body 71. It is applied to the joint between the portion 76 and the second lid 83. The joint container C is configured such that the high-temperature and high-pressure gas used for diffusion joining described later does not enter each joint part in the joint container C by seal welding these joint parts. Can be obtained. In addition, the code | symbol 20 in FIG. 16 shows the trace by which seal welding was given, ie, a seal weld part.

Electron beam welding can be employed for this seal welding. When performing electron beam welding under vacuum, the joining container C is housed in a vacuum container with a lid (not shown), and the joint is sealed and welded in a state where the inside of the vacuum container is deaerated. In order to completely deaerate the vacuum container in which the junction container C is stored, after evacuating for 30 minutes or more, seal welding is performed on the welding target portion. As shown in FIG. 14 and 15, reference numeral 83 a indicates a port formed at the center of the second lid 83. In the assembled junction container C, both end portions of each cooling pipe 11 are covered with the bush 55 and protrude from the first frame portion 72 or the second frame portion 73, respectively.

  In addition, the soundness of the seal welded portion 20 of the joining container C taken out by disassembling the vacuum vessel with the lid is confirmed by performing a weld bead appearance inspection, a fluorescent flaw detection test, or a helium leak test as necessary. ,Check.

  Next, in order to integrate the joining portion of the joining container C including the parts that can become the electrode assembly B by the hot isostatic pressing method, the hot isostatic pressing shown in FIG. 8 is first performed. The junction container C is accommodated in the pressurization container 22 of the pressure device 21, and the junction container C is shut off from the outside air. The pressurized container 22 has a container body and a lid covering the container body.

  Thereafter, the hot isostatic pressing device 21 is operated to process the bonding container C by the hot isostatic pressing method. The processing procedure in this case is as follows.

First, the first valve V1 was opened, the vacuum pump 24 was started, and the inside of the pressurized container 22 was evacuated. When the degree of vacuum in the pressurized container 22 reaches about 10 ⁻² Pascal, the vacuum pump 24 is stopped and the first valve V1 is closed to complete deaeration.

  Next, the second valve V <b> 2 was opened and the high-pressure pump 25 was started, and high-pressure argon gas was injected into the pressurized container 22 and filled. In this case, first, the pressure was increased to about 10 megapascals as a set value of the initial pressure. Next, the heater 26 in the pressurization vessel 22 was energized and the temperature was raised. As the temperature rose, the gas pressure in the pressurized container 22 increased, and the high-pressure pump 25 was repeatedly driven and stopped.

  Thereby, at a temperature of 900 ° C. to 1000 ° C., for example, 900 ° C., which is a joining condition for hot isostatic pressing, the gas pressure is increased to a pressure within a range of 100 megapascal to 150 megapascal, for example, 147 megapascal, This state was maintained for 2 to 7 hours, for example 2 hours. Note that the arrow 27 in FIG. 8 indicates the direction of gas pressure. The entire bonding container C can be pressurized with isotropic pressure by this gas pressure.

  Thereafter, the heater 26 is turned off, the high-pressure pump 25 is stopped, the second valve V2 is closed, and another valve (not shown) is opened, so that the high-pressure gas in the pressurized container 22 is released. It was discharged, cooled to room temperature and normal pressure, and depressurized. At this time, the released gas was recovered.

  In this way, the junction container C having the electrode assembly B is subjected to hot isostatic pressing, so that the contact portion between the electrode plate 1 and the cooling pipe 11, the contact portion of the header 15 cooling pipe 11, and the electrode plate 1 and the header 15 The contact portions (concave / convex fitting portions) were integrated by solid phase bonding (method of bonding without melting).

  In particular, according to this isotropic pressure pressurizing process, high-temperature and high-pressure gas enters the cooling pipes 11, so that the cooling pipes 11 are expanded. On the other hand, each member (the frame body 71, the 1st cover 81, and the 2nd cover 83) which comprises the joining container C is compressed with the pressure which acts from the circumference | surroundings. Thereby, the electrode plate 1, the cooling pipe 11, and the first frame part 72 and the second frame part 73 that become the header 15 and the cooling pipe 11 are diffusion-bonded at their contact surfaces. Therefore, a structure in which a plurality of parts constituting the electrode 36 are firmly and soundly joined and integrated is manufactured.

  After the hot isostatic pressing, the pressure and temperature in the pressurized container 22 were close to atmospheric pressure and room temperature, respectively, and then the lid of the pressurized container 22 was opened and the joining container C was taken out.

  Next, unnecessary parts of the taken-out joining container C are removed by machining such as cutting and grinding, and necessary machining such as a predetermined shape is performed.

  In this case, processing is performed so that the plate surface of the electrode plate 1 is exposed and the header 15 having the cover portion 15d is formed. At the same time, processing is performed so that a stepped portion 1 b is formed between the cover portion 15 d and the exposed plate surface of the electrode plate 1. Further, in order to obtain a predetermined shape, the first frame portion 72 and the second frame portion 73 are cut by the second thick portion 77, whereby a part of each bush 55 and the seal welded portion 20 is removed. . At the same time, the third frame portion 74 and the fourth frame portion 75 are removed together with the remaining seal welded portion 20 and processed so that the side end face of the electrode plate 1 is exposed.

  Thus, the ends of the cooling pipes 11 are exposed to the pair of processed headers 15 respectively. Next, copper plugs 28 are packed at both ends of each cooling pipe 11 and welded to close the opening at both ends of each cooling pipe 11. Further, a drill blade is inserted into the header 15 to process the holes 15e communicated with the pipe ends 11a of the cooling pipe 11, respectively. FIG. 17 shows the electrode assembly B processed in this way.

  Thereafter, a pair of second header members 58 and one reinforcing plate 61 shown in FIG. 17 are prepared, and these are brazed to a predetermined position of the electrode assembly B using a brazing material (not shown).

  In this case, one of the second header members 58 is brazed so as to overlap a first header member 57 formed by machining the first frame portion 72, and the other is similarly machined with the second frame portion 73. The first header member 57 formed by processing is overlapped and brazed. As a result, the header groove 58a already processed in the second header member 58 and each hole 15e of the first header member 57 are continuous, and the hole 15e and the doorway 17 already processed in the second header member 58 communicate with each other. Then, the header 15 is assembled. In addition, you may process the entrance / exit 17 after the assembly of such a header 15. FIG.

  Further, the reinforcing plate 61 is brazed in a state in which both ends of the reinforcing plate 61 are in contact with the stepped portion 1b and positioned with respect to the electrode plate 1 and the pair of second header members 58 are positioned.

  As described above, the ion source electrode 36 corresponding to a high heat load could be obtained. This electrode 36 is shown in FIG.

  In this electrode 36, the header 15 is made of copper or a copper alloy having excellent thermal conductivity. As a result, heat exchange with the coolant such as pure water flowing through the cooling pipe 11 made of copper or copper alloy joined to the header 15 becomes quick.

  In addition, the joining portion 15c of the header 15 and the joining portion 1a of the electrode plate 1 are joined in a form in which the concave and convex portions are fitted. Thereby, the heat transfer area from the electrode plate 1 to the header 15 increases. In particular, in the first embodiment, the bonding portion 1a and the bonding portion 15c are both comb-shaped extending over substantially the entire width of the electrode 36, and are bonded in a form in which they are concavo-convexly fitted.

  For this reason, a larger heat transfer area can be secured. Therefore, heat removal from the electrode plate 1 to the header 15 is improved.

  As described above, according to the electrode 36 of the second embodiment, the cooling efficiency of the electrode plate 1 can be improved, and the durability of the electrode 36 can be improved accordingly.

  Furthermore, the electrode plate 1 of the electrode 36, the cooling pipe 11, and the header 15 are expanded and contracted due to the difference in coefficient of linear expansion as described above during manufacture and use and when stopped. Specifically, the cooling pipe 11 and the header 15 made of a cylinder or a copper alloy expand and contract more than the electrode plate 1 made of molybdenum.

  However, the second convex portion 18 formed in the joint portion 15c of the header 15 is fitted in the concave groove 5 between the plurality of first convex portions 4 formed in the joint portion 1a of the electrode plate 1, It is sandwiched between the first protrusions 4 in the width direction of the electrode plate 1 (specifically, the direction in which the cooling pipes 11 are arranged). For this reason, the shearing force in the direction orthogonal to the axial direction of the cooling pipe 11 (this is the same as the width direction) accompanying the expansion / contraction at the root of the pipe end portion 11a of each cooling pipe 11 is: It is suppressed from being given. In connection with this, since the possibility that each cooling pipe 11 is damaged and water leaks is eliminated, it is possible to prevent the electrode plate 1 from corroding due to water leakage.

  Therefore, according to 2nd Embodiment, durability is improved and it has high reliability.

  Furthermore, according to the second embodiment, as described above, the plurality of cooling pipes 11 are disposed over the first frame part 72 and the second frame part 73 of the frame body 71, so that each cooling pipe 11 is appropriately set. Can be positioned. Under such positioning, the two electrode plate members 51 are accommodated in the frame 71, so that the grooves 52 formed in the electrode plate members 51 are fitted so as to surround the intermediate portion of the cooling pipe 11. . Thus, the electrode plate 1 and the cooling pipe 11 can be appropriately combined without requiring the troublesome work of passing the cooling pipes 11 one by one through the electrode plate 1. On this, the container 71 having the structure corresponding to the electrode assembly B suitable for processing by the hot isostatic pressing method by accommodating the first lid 81 and the second lid 83 in the frame 71. Is temporarily assembled. Furthermore, the ion source electrode 36 can be manufactured by removing unnecessary portions of the bonding container C processed by the hot isostatic pressing method. Therefore, the manufacturability of the electrode 36 can be improved.

  In the second embodiment, the joining parts 1a and 15c have a configuration in which only both end portions in the longitudinal direction are concavo-convexly fitted, or conversely, only the central part is uneven in the longitudinal direction of the joining parts 1a and 15c. It is also possible to adopt a configuration in which the fitting is performed, or a configuration in which concave and convex fitting is performed at intervals in the longitudinal direction of the joining portions 1a and 15c.

(Third embodiment)
The third embodiment shown in FIG. 20 is different from the first embodiment in the configuration described below, and the other configurations are the same as those in the first embodiment. For this reason, about the structure which show | plays the same or same function as 1st Embodiment, the code | symbol same as 1st Embodiment is attached | subjected and the description is abbreviate | omitted.

  The third embodiment is different from the first embodiment in the shape of the joint portion 1a of the electrode plate 1 and the joint portion 15c of the header 15 fitted to the concave and convex portions.

  That is, the first convex part 4 and the concave groove 5 formed at the joint part, and the second convex part 18 and the concave groove 19 formed at the joint part 15c all have a dovetail shape.

  Here, the dovetail shape is not limited to the so-called dovetail shape. In the case of the first convex portion 4 and the second convex portion 18, the width of the tip is gradually larger than the width of the root. Alternatively, it indicates a shape that gradually widens, and in the case of the concave grooves 5 and 19, it indicates a shape in which the width at the back is gradually or stepwise wider than the width of the opening end. For this reason, it includes a dovetail shape having a hypotenuse only on one side in the width direction, and also includes a dovetail shape having a configuration having no hypotenuse.

  The ion source electrode 36 of the third embodiment is the same as that of the first embodiment except for the configuration described above, including the configuration not shown in FIG. 20, and the manufacturing method of this electrode 36 is also the same as that of the first embodiment. The same. Therefore, also in the third embodiment, it is possible to provide an electrode 36 with improved durability and high reliability, and a method for manufacturing the electrode 36.

  In addition, the first convex portion 4 and the concave groove 19 in which the first convex portion 4 is fitted and the second convex portion 18 and the concave groove 5 in which the first convex portion 18 is fitted have the following advantages due to the doughtail shape.

  First, since the header 15 is suppressed from expanding in the axial direction of each cooling pipe 11 as the electrode 36 becomes high temperature, the extension of the pipe end portion 11a of each cooling pipe 11 is suppressed. As a result, as the temperature of the electrode 36 drops to room temperature, the amount of contraction of the tube end portion 11a of each cooling tube 11 decreases, so that the tube end portion 11a may be deformed and crushed due to the contraction. It is suppressed.

  In this way, the occurrence of buckling in each tube end portion 11a due to the difference in linear expansion coefficient between the electrode plate 1 and the header 15 and each cooling tube 11 is suppressed, so that the cooling tube caused by buckling is caused. 11 can prevent corrosion of the electrode plate 1 due to refrigerant leakage.

  Secondly, the contact area between the joining portion 1a of the electrode plate 1 and the joining portion 15c of the header 15 is further increased, and the heat transfer from the electrode plate 1 to the header 15 is enhanced. As a result, the heat removal performance of the electrode plate 1 can be enhanced, and the life extension of the electrode 36 can be promoted.

  In addition, the dovetail shape demonstrated above is applicable also to the 1st convex part 4, the ditch | groove 5, the 2nd convex part 18, and the ditch | groove 19 in the said 2nd Embodiment.

  According to at least one embodiment described above, the cooling efficiency is high, the corrosion resistance is excellent, and the life can be extended.

  Although several embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope of the invention, and also included in the invention described in the claims and the equivalent scope thereof.

  DESCRIPTION OF SYMBOLS 1 ... Electrode plate, 1a ... Joining part, 2 ... Beam extraction hole, 4 ... 1st convex part of joining part 1a, 5 ... Concave groove of joining part 1a, A ... Electrode main-body part, 11 ... Cooling pipe, 11a ... Pipe End part, 15 ... Header, 15c ... Joint part, 15e ... Hole, 18 ... Second convex part of joint part 15c, 19 ... Concave groove of joint part 15c, B ... Electrode assembly, 21 ... Hot isostatic pressing Device: 22 ... Pressurized container, 28 ... Plug, 36 ... Electrode, 51 ... Electrode plate material, 52 ... Groove of electrode plate material, 53 ... Edge of electrode plate material, 57 ... First header member, 58 ... Second header member, 58a ... header groove, 71 ... frame, 72 ... first frame, 73 ... second frame, 74 ... third frame, 75 ... fourth frame, 81 ... first lid, 83 ... second lid, C ... Junction container

Claims (8)

An ion source electrode for accelerating ions in plasma to generate an ion beam,
An electrode plate that is formed of a metal plate that is heat resistant and has a small linear expansion coefficient, and has a plurality of beam extraction holes that penetrate in the thickness direction;
A metal having a larger coefficient of linear expansion and better thermal conductivity than the electrode plate, and a header joined to the electrode plate sandwiching the electrode plate from a direction perpendicular to the thickness direction of the electrode plate;
A plurality of cooling members made of the same type of metal as the header, having a tube end portion inserted into the header and joined therethrough, penetrated through the electrode plate, and arranged side by side in a direction perpendicular to the direction of penetration. Tube,
Comprising
The electrode plate and the header are joined in a form in which at least a part of these joining portions is unevenly fitted,
The concave-convex fitting is formed in the electrode plate and is adjacent to a plurality of first convex portions arranged at intervals in the cooling pipe arrangement direction, and is formed in the header and is fitted into the concave groove. An ion source electrode comprising: a second convex portion sandwiched between the first convex portions in the direction in which the cooling tubes are arranged.   The header has a plurality of the second protrusions, has a plurality of grooves adjacent to the second protrusions and into which the first protrusions are inserted, and the second protrusion and the electrode plate have the The fitting with the concave groove and the fitting between the first convex portion and the concave groove of the header extend over substantially the whole of the joining portion along the arrangement direction of the cooling pipes. Item 12. The ion source electrode according to Item 1.   2. The first convex portion and the concave groove of the electrode plate adjacent to the first convex portion and the second convex portion fitted in the concave groove are each formed in a dovetail shape. 2. The ion source electrode according to 2.   The electrode plate is formed by two electrode plate members having a plurality of grooves fitted to the cooling pipe, and the surfaces of the electrode plate materials on which the grooves are formed are joined to each other to form two electrode plate materials The ion source electrode according to any one of claims 1 to 3, wherein the cooling pipe is sandwiched between. The header has a first header member into which the pipe end portion is inserted, and a second header member attached to the first header member,
Attaching a plug for closing the tip of each tube end, respectively, and forming a hole communicating with each tube end in the first header member,
A header groove that extends in the direction in which the cooling pipes are arranged and communicates with the holes, and a smaller number of inlets / outlets than the cooling pipes that are communicated with the header grooves are formed in the second header member. Item 5. The ion source electrode according to any one of Items 1 to 4. A method of manufacturing an ion source electrode for accelerating ions in plasma to generate an ion beam,
An electrode plate made of a sintered molybdenum body having a plurality of first protrusions formed at both ends and a plurality of ion extraction holes penetrating in the thickness direction, and a tube end portion protruding from each of the ends. The electrode body having a plurality of copper or copper alloy cooling pipes arranged side by side in the direction perpendicular to the thickness direction through the plate and a recess formed between the first protrusions A copper or copper alloy header having a second convex portion inserted into the groove and sandwiched between the first convex portions in the direction in which the cooling pipes are arranged and a plurality of pipe through holes into which the pipe end portions are inserted is prepared. Process,
By inserting the tube end portions into the tube passage holes and fitting the concave grooves and the second convex portions, respectively, the headers are arranged with the electrode plates interposed therebetween, and the electrode main body portion and Temporarily assembling an electrode assembly in combination with the header;
Sealing the joint between the pipe end and the pipe through-hole in a vacuum or inert gas atmosphere; and
Storing the electrode assembly subjected to seal welding in a joining container body, and covering the joining container body with a container lid, and then assembling the joining container by sealing welding the joining container body and the container lid;
Storing the joining container in a hot isostatic pressing device, and shutting off the electrode assembly from outside air;
Operating the hot isostatic pressing device to process the electrode assembly by a hot isostatic pressing method, thereby joining the joints of the electrode plate, the cooling pipe, and the header;
Removing the joining container from the hot isostatic pressure press;
Disassembling the joining container and taking out the electrode assembly integrated by the joining;
A method for producing an ion source electrode, comprising: In the step of preparing the electrode main body,
Two electrode plate materials having a plurality of grooves fitted on one side other than the tube end of the cooling pipe on one side and having an uneven edge forming the first protrusion and the groove are prepared. And
Assembling the electrode plate by sandwiching the cooling pipe between the two electrode plate materials so that the grooves of the two electrode plate materials face each other and the intermediate portion is disposed between the grooves facing each other, the electrode The method of manufacturing an ion source electrode according to claim 6, wherein a main body portion is formed. Copper having the first frame part in which the pipe through hole and the second convex part are formed, and the second frame part in which the pipe through hole and the second convex part are formed in the same manner as the first frame part, or Prepare a square frame made of copper alloy,
After inserting pipe end portions of the cooling pipes into the pipe through holes of the first and second frame parts and disposing the cooling pipes over the first frame part and the second frame part,
In the frame body, after storing the two electrode plate materials, a copper or copper alloy first cover that covers these electrode plate materials is stored, and the first cover is covered with the frame body. Storing the second lid made of the product, temporarily assembling the electrode assembly, and processing the joining container formed by the temporary assembly by the hot isostatic pressing method,
8. The ion according to claim 7, wherein the processed bonding container is machined to remove an extra portion other than a portion corresponding to the electrode assembly and leave a portion corresponding to the electrode assembly. A method for producing a source electrode.

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