JP2014174715A - Structure health monitoring system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structure health monitoring system.SOLUTION: The structure health monitoring system which is installed onto a structure P comprises: a sensor unit 51 that measures to obtain a data representing a physical value; a communication section 52 that transmits the data measured by the sensor unit 51 via radio; and a power generating element 1 that generates the power using a flow of a fluid in the ambient area. The structure health monitoring system further comprises: a power supply section 53 that supplies the power generated by the power generating element 1 to the sensor unit 51 and the communication section 52; a data analysis section 71 that calculates a piece of structure information representing a state of the structure P by analyzing the data measured by the sensor unit 51; and a storage 63 that stores the structure information calculated by the data analysis section 71. The structure information calculated by the data analysis section 71 can be provided to the outside via a network.

Description

  The present invention relates to a structural health monitoring system using energy harvesting.

In recent years, power generation elements that convert energy in the surrounding environment into electrical energy have attracted attention in fields such as energy harvesting. Such a power generation element generates electrical energy by kinetic energy, for example, due to vibrations in the surrounding environment (Patent Document 1).
On the other hand, a structural health monitoring system that detects an abnormality of a structure such as a bridge has been proposed (Patent Document 2).

JP 2010-136598 A JP 2001-4497 A

However, since the power generation element described in Patent Document 1 uses vibrations in the surrounding environment, the amount of power generation is reduced when it is installed in a place where many vibrations cannot be expected. Moreover, since the system described in Patent Document 2 requires energization of the sensor unit, the installation location of the sensor unit may be limited.
In view of the above problems, an object of the present invention is to provide a structural health monitoring system that can use highly efficient power generation by the surrounding environment.

  In order to achieve the above object, a first aspect of the present invention includes a sensor unit that is installed in a structure and measures data indicating a physical quantity, a communication unit that wirelessly transmits data measured by the sensor unit, A power supply element that generates power by the flow of fluid, and a power supply unit that supplies power to the sensor unit and the communication unit by power generation of the power generation element, and by analyzing data measured by the sensor unit, The analysis unit includes a data analysis unit that calculates structure information indicating a state of a structure, and a storage unit that stores the structure information calculated by the data analysis unit. The structure information calculated by can be provided via a network.

  In the structural health monitoring system according to the first aspect of the present invention, the power generating element can vibrate due to the flow of the fluid and can output electric power corresponding to the vibration.

  In the structural health monitoring system according to the first aspect of the present invention, a plurality of monitoring devices including the sensor unit, the communication unit, and the power supply unit may be installed in the structure.

  In the structural health monitoring system according to the first aspect of the present invention, the monitoring device can be installed in a tunnel.

  Moreover, in the structural health monitoring system according to the first aspect of the present invention, the structure information calculated by the data analysis unit is monitored, and a monitoring unit that determines whether there is an abnormality is determined by the monitoring unit. About the said structure, the alerting | reporting process part which alert | reports that the abnormality has arisen to the administrator of the said structure can further be provided.

  Further, in the structural health monitoring system according to the first aspect of the present invention, the power generating element is supported at one end side by a frame-shaped support portion and an inner peripheral surface of the support portion, and is automatically generated by a flow of surrounding fluid. A cantilever portion that vibrates and a piezoelectric conversion portion provided in the cantilever portion, wherein the cantilever portion is formed such that the other end side is deviated from one end side of the cantilever portion in the thickness direction of the support portion; The piezoelectric power generation element can be made.

  Further, in the structural health monitoring system according to the first aspect of the present invention, the power generating element includes a magnet block having a magnet, a coil block disposed opposite to the magnet block and having a coil, and the magnet block. A movable portion that holds one of the coil blocks, and a plurality of elastic members that support the movable portion so that the movable portion can vibrate in a specified direction orthogonal to the opposing direction of the magnet block and the coil block. It can be set as an electromagnetic induction type electric power generation element provided with a body part and a support part which supports the movable part via a plurality of elastic body parts.

  Further, in the structural health monitoring system according to the first aspect of the present invention, the elastic body portion is smaller in rigidity in the prescribed direction than in a direction orthogonal to the prescribed direction, and the movable portion in the prescribed direction. A plurality of them can be provided side by side on each of both sides.

  ADVANTAGE OF THE INVENTION According to this invention, the structural health monitoring system which can utilize highly efficient electric power generation by the surrounding environment can be provided.

It is a typical block diagram explaining the basic composition of the structural health monitoring system concerning an embodiment of the invention. It is a typical figure explaining the example of application of the structural health monitoring system concerning an embodiment of the invention. It is a block diagram explaining the analysis server with which the structural health monitoring system concerning an embodiment of the invention is provided. It is an example which illustrated the display data used for the structural health monitoring system concerning an embodiment of the invention. It is an example which illustrated the structure information used for the structural health monitoring system which concerns on embodiment of this invention. It is a flowchart explaining an example of operation | movement of the structural health monitoring system which concerns on embodiment of this invention. It is a block diagram explaining the power supply part 53 with which the structural health monitoring system which concerns on embodiment of this invention is provided. (A) is a typical top view explaining the piezoelectric power generation element with which the structural health monitoring system which concerns on embodiment of this invention is provided. (B) is sectional drawing seen from the XX direction of (a). (C) is sectional drawing seen from the YY direction of (a). (D) is an expanded sectional view of a region where a piezoelectric conversion part is formed in the cantilever part of the piezoelectric power generation element shown in (a). (A) is sectional drawing corresponding to FIG.8 (b) and demonstrating the modification of a piezoelectric power generation element. (B) is sectional drawing corresponding to FIG.8 (c) and explaining the modification of a piezoelectric power generation element. (A) is sectional drawing corresponding to FIG.8 (b) and explaining the structure of an introducing | transducing part and a discharge part as a modification of a piezoelectric power generation element. (B) is sectional drawing corresponding to FIG.8 (c) and explaining the structure of an introducing | transducing part and a discharge part as a modification of a piezoelectric power generation element. (A) is typical sectional drawing explaining the electromagnetic induction type electric power generation element with which the structural health monitoring system which concerns on embodiment of this invention is provided. (B) is a top view of (a). It is a typical perspective view explaining the electromagnetic induction type electric power generation element with which the structural health monitoring system which concerns on embodiment of this invention is provided. It is a typical top view explaining the modification of the electromagnetic induction type electric power generation element with which the structural health monitoring system which concerns on embodiment of this invention is provided.

  Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals, and redundant description is omitted. Further, the following embodiments exemplify members and methods for embodying the technical idea of the present invention, and the technical idea of the present invention is the material, shape, structure, The layout is not specified as follows. The technical idea of the present invention can be variously modified within the technical scope described in the claims.

(Structural health monitoring system)
As shown in FIG. 1, the structural health monitoring system according to the embodiment of the present invention includes a plurality of monitoring devices 5a, 5b, 5c, 5d, and 5e installed in a structure P, relay devices 65a and 65b, And a cloud part 6. The structure P is, for example, a building such as a building, a bridge, a tunnel, a railway, a road, a retaining wall, a bank, a dam, or the like.

  The monitoring devices 5 a to 5 e (hereinafter collectively referred to as “monitoring device 5”) include a sensor unit 51 that measures data indicating various physical quantities, a communication unit 52, and a power supply unit 53. The sensor unit 51 measures data indicating a physical quantity. For example, as shown in FIG. 2, a plurality of monitoring devices 5 are installed on the walls of the tunnels P <b> 1 and P <b> 2. In addition, the monitoring device 5 can be installed on a pillar or wall surface of a building, a damper of a building or a bridge, or the like.

  The sensor unit 51 measures data at the installed location. The sensor unit 51 outputs the measured data to the communication unit 52. The sensor unit 51 includes, for example, an acceleration sensor, a displacement sensor, a tilt sensor, a pressure sensor, a strain sensor, a flow sensor, a conductivity sensor, a temperature sensor, a humidity sensor, and the like.

  The communication unit 52 receives the data output from the sensor unit 51 and wirelessly transmits the data to relay devices 65a and 65b (hereinafter collectively referred to as “relay device 65”) existing in a communicable range. The communication unit 52 adds additional information such as an identifier for identifying the sensor unit 51 that measured the data and an acquisition time of the data measured by the sensor unit 51, and transmits the data measured by the sensor unit 51 to the relay device 65. To do. As the wireless communication standard of the communication unit 52, for example, EnOcean (registered trademark) can be adopted.

  The power supply unit 53 includes the power generation element 1 that generates power by the flow of the surrounding fluid, and supplies power to the sensor unit 51 and the communication unit 52 by the power generation of the power generation element 1. The fluid used by the power generation element 1 for power generation is, for example, a gas such as air or a liquid. The power generation element 1 may generate power by vibration or the like at a location where the monitoring device 5 is installed.

  The relay device 65 receives the data and additional information transmitted by the communication unit 52 of the monitoring device 5 and transmits them to the cloud unit 6 via the network. The relay device 65 can receive data and additional information transmitted from the plurality of monitoring devices 5. The relay device 65 includes a storage unit (not shown) that stores data and additional information transmitted from the plurality of monitoring devices 5.

  The cloud unit 6 includes a collection server 61 that collects data and additional information transmitted by the relay device 65, an analysis server 62 that analyzes data and additional information collected by the collection server 61, and information analyzed by the analysis server 62. And an accumulation server 63 for accumulation. The collection server 61 has a storage unit that stores collected data and additional information. The cloud unit 6 is a server group using cloud computing that can provide software and hardware resources via a network.

  As illustrated in FIG. 3, the analysis server 62 includes a processing unit 70 that performs a calculation necessary for processing performed by the analysis server 62 and a communication unit 75 that communicates with the outside. The processing unit 70 includes a data analysis unit 71, a monitoring unit 72, a notification processing unit 73, and a response processing unit 74.

  The data analysis unit 71 acquires data and additional information collected by the collection server 61 via the communication unit 75. The data analysis unit 71 calculates structure information indicating the state of the structure P by analyzing the data and additional information collected by the collection server 61. The data analysis unit 71 associates the identifier of the sensor unit 51 with the position where the monitoring device 5 is installed in the structure P, and displays structure information indicating the state of the structure P for each position where the monitoring device 5 is installed. calculate.

  The structure information calculated by the data analysis unit 71 includes data collected by the collection server 61 and additional information. The structure information is, for example, the presence or absence of cracks, peeling, peeling, water leakage, etc. in the structure P, the load applied to the structure P, the frequency, inclination, deformation, displacement, physical properties, etc. of the structure P. The structure information includes physical quantities such as the flow rate of wind and water, temperature, and humidity.

  The monitoring unit 72 monitors the structure information calculated by the data analysis unit 71 and determines whether there is an abnormality. The monitoring unit 72 evaluates the safety, durability, and usability of the structure by collating the structure information calculated by the data analysis unit 71 with a predetermined condition. When the structure information calculated by the data analysis unit 71 matches a predetermined condition, the monitoring unit 72 determines that the position of the structure P indicated by the structure information determined to match the predetermined condition is abnormal. judge.

  For example, the notification processing unit 73 transmits a notification signal about the position of the structure P determined to be abnormal by the monitoring unit 72 to the terminal device 66a of the administrator of the structure P via the communication unit 75. Inform the administrator that an abnormality has occurred. The analysis server 62 transmits the structure information calculated by the data analysis unit 71, the notification by the notification processing unit 73, and the like via the network to the terminal devices 66a and 66b (hereinafter collectively referred to as “terminal device 66”). Can be provided.

  The response processing unit 74 transmits the structure information calculated by the data analysis unit 71 to the terminal device 66 through the communication unit 75 in response to a request from the terminal device 66. The response processing unit 74 creates display data displayed on the terminal device 66 as structure information to be transmitted to the terminal device 66. For example, as shown in FIG. 4, the display data is structure information for each position where the monitoring device 5 is installed for the structure P.

  The accumulation server (accumulation unit) 63 accumulates the structure information calculated by the data analysis unit 71. In addition, as shown in FIG. 5, the storage server 63 includes data and additional information collected by the collection server 61, an identifier (sensor ID) of the sensor unit 51, a structure P in which the sensor unit 51 is installed, and a structure. The position of the sensor unit 51 in the object P is accumulated in association with the position.

-Operation example-
Hereinafter, an example of the operation of the structural health monitoring system according to the embodiment of the present invention will be described using the flowchart shown in FIG.

  First, in step S <b> 1, the collection server 61 receives the data transmitted from the monitoring device 5 via the relay device 65 and transmits it to the analysis server 62. The data analysis unit 71 of the analysis server 62 acquires data and additional information collected by the collection server 61 via the communication unit 75.

  In step S <b> 2, the data analysis unit 71 calculates structure information indicating the state of the structure P by analyzing the data and additional information collected by the collection server 61.

  In step S <b> 3, the monitoring unit 72 monitors the structure information calculated by the data analysis unit 71 and determines whether there is an abnormality. If the monitoring unit 72 determines that the structure information is abnormal, the process proceeds to step S4, and if not determined to be abnormal, the process proceeds to step S5.

  In step S4, the notification processing unit 73 notifies the terminal device 66 of the position of the structure P determined to be abnormal via the network. In response to the notification from the notification processing unit 73, the terminal device 66 outputs the position of the structure P determined to be abnormal and the content of the structure information using images, sounds, characters, light, and the like.

  In step S <b> 5, the response processing unit 74 creates display data indicating the structure information in response to the request from the terminal device 66. In step S6, the response processing unit 74 transmits the created display data to the terminal device 66 via the network.

(Power supply unit)
The power supply unit 53 provided in the monitoring device 5 includes, for example, a rectifying unit 91 that rectifies and outputs an AC voltage output from the power generation element 1 and a power monitor that monitors the output voltage of the rectifying unit 91, as shown in FIG. And a unit 92.

  The rectifier 91 is configured using, for example, a rectifier circuit such as a full-wave rectifier circuit or a double-wave voltage doubler rectifier circuit, a capacitor, a switching element that turns on and off the output of the rectifier 91, and the like. The rectifying unit 91 outputs the rectified voltage to the sensor unit 51 and the communication unit 52.

  The power monitoring unit 92 monitors the output voltage of the rectifying unit 91 and controls the rectifying unit 91 so that the switching element is turned on and off based on a comparison result between the output voltage and a preset specified value. For example, the power monitoring unit 92 turns on the output of the rectifying unit 91 when the output voltage of the rectifying unit 91 reaches a specified value necessary for driving the sensor unit 51 or the communication unit 52, and rectifies when the output voltage decreases below a specified amount. The output of the unit 91 is turned off. The sensor unit 51 and the communication unit 52 are intermittently driven when electric power is intermittently supplied from the rectifying unit 91.

(Power generation element)
Hereinafter, as an example of the power generation element 1 included in the structural health monitoring system according to the embodiment of the present invention, the piezoelectric power generation elements 1A and 1B and the electromagnetic induction power generation elements 1C and 1D will be described with reference to FIGS. explain.

-Piezoelectric generator-
As shown in FIGS. 8A to 8C, the piezoelectric power generating element 1 </ b> A supports one end side on a rectangular frame-shaped support portion 11 and an inner peripheral surface of one of the four sides of the support portion 11. The cantilever part 12 of the rectangular flat plate shape and the piezoelectric conversion part 14 provided in the cantilever part 12 are provided. The piezoelectric power generating element 1A has a generally rectangular plate shape.

  The support part 11 is connected to the base end part 122 which is one end side of the cantilever part 12 on the inner peripheral surface, thereby supporting the cantilever part 12 so as to vibrate. The cantilever portion 12 has a distal end portion 121 which is the other end side shifted from the proximal end portion 122 of the cantilever portion 12 in the thickness direction of the support portion 11 (the vertical direction in FIGS. 8B and 8C). It is formed. The cantilever part 12 is self-excited by the flow of the surrounding fluid. The fluid is, for example, a gas such as air or a liquid.

  The support portion 11 and the cantilever portion 12 are integrally formed by forming a flow path 15 that is a U-shaped slit in plan view that penetrates from the upper surface side to the lower surface side of the support portion 11 and the cantilever portion 12. . The flow path 15 is formed, for example, by performing dry etching such as inductively coupled plasma type reactive ion etching (ICP-RIE) using a mask patterned by a photolithography technique. The cantilever part 12 vibrates by itself as the fluid flows in the flow path 15 from the one surface side to the other surface side along the thickness direction of the support part 11.

The support unit 11 and the cantilever unit 12 can be integrally formed with a minute and high accuracy by a micro electro mechanical system (MEMS) technique using the same substrate 10A which is an SOI (Silicon On Insulator) substrate, for example. . The substrate 10A includes a silicon (Si) substrate 101, a buried insulating film 102 made of a silicon oxide film (SiO ₂ ) formed on the silicon substrate 101, and silicon (Si) formed on the buried insulating film 102. Layer 103. The surface of the substrate 10A is, for example, a (100) plane or a (110) plane.

  The support portion 11 is formed using the silicon substrate 101, the buried insulating film 102, and the silicon layer 103 in the substrate 10A. The cantilever portion 12 is formed using the buried insulating film 102 and the silicon layer 103 in the substrate 10A, so that the cantilever portion 12 is thinner than the support portion 11 and has flexibility. The cantilever portion 12 is thinner than the support portion 11 by forming a gap portion 16 on the lower surface of the substrate 10A by dry etching such as ICP-RIE using a mask patterned by a photolithography technique. Formed.

  In the support part 11 and the cantilever part 12, a first insulating film 181 made of a silicon oxide film is formed on the upper surface of the substrate 10A. In the support portion 11, a second insulating film 182 made of a silicon oxide film is formed on the lower surface of the substrate 10A. The first insulating film 181 and the second insulating film 182 are formed by, for example, a thermal oxidation method, a chemical vapor deposition (CVD) method, or the like.

  The substrate 10A is not limited to an SOI substrate, and may be a single crystal or polycrystalline silicon substrate, a metal oxide substrate such as magnesium oxide (MgO), a metal substrate, a glass substrate, a polymer substrate, or the like. When an insulating substrate such as an MgO substrate, a glass substrate, or a polymer substrate is used as the substrate 10A, the first insulating film 181 and the second insulating film 182 may not be provided. Further, the planar pattern of the outer and inner circumferences of the support part 11 and the planar pattern of the cantilever part 12 are not limited to a rectangular shape, and may be, for example, a polygonal circular shape or an elliptical shape.

  As shown in FIG. 8D, the piezoelectric conversion unit 14 includes a first electrode layer (lower electrode layer) 141 formed on the cantilever unit 12 and a piezoelectric layer 142 formed on the first electrode layer 141. And a second electrode layer (upper electrode layer) 143 formed on the piezoelectric layer 142. The piezoelectric conversion portion 14 is formed on one surface (upper surface) in the thickness direction of the cantilever portion 12. The piezoelectric conversion unit 14 outputs an alternating voltage by the self-excited vibration of the cantilever unit 12.

  The cantilever portion 12 is shifted upward from the base end portion 122 in the thickness direction of the support portion 11 (thickness direction of the cantilever portion 12) by the internal stress of the piezoelectric layer 142. Thus, the piezoelectric power generating element 1A can generate power using a fluid without increasing the number of components.

Further, the cantilever portion 12 may be configured such that the distal end portion 121 is shifted upward from the base end portion 122 in the thickness direction of the support portion 11 by a stress control film on one surface side in the thickness direction. The stress control film is formed of, for example, SiO ₂ , Si ₃ N ₄ or the like. When the cantilever part 12 is displaced by the stress control film, the piezoelectric power generating element 1A has a high degree of freedom in manufacturing process conditions.

  The first electrode layer 141 has a thickness of about 500 nm, for example. The first electrode layer 141 is made of, for example, platinum (Pt). In addition, the material of the first electrode layer 141 may be gold (Au), aluminum (Al), iridium (Ir), silver (Ag), copper (Cu), or the like. The second electrode layer 143 is made of, for example, Au. In addition, the material of the second electrode layer 143 may be molybdenum (Mo), Al, Pt, Ir, Ag, Cu, or the like.

The piezoelectric layer 142 has a thickness of about 3000 nm, for example. The piezoelectric layer 142 is made of, for example, lead zirconate titanate (PZT: Pb (Zr, Ti) O ₃ ), PZT-PMN (Pb (Mn, Nb) O ₃ ), PZT to which other impurities are added, or the like. It consists of piezoelectric ceramics that exhibit high piezoelectric properties. The piezoelectric layer 142 may be a niobate-based piezoelectric ceramic such as lithium niobate (LiNbO ₃ ), potassium niobate (KN: KNbO ₃ ), or sodium niobate (NN: NaNbO ₃ ). Other examples of niobic acid-based piezoelectric ceramics include potassium sodium niobate (KNN: K _0.5 Na _0.5 NbO ₃ ). For example, other impurities such as lithium (Li), niobium (Nb), tantalum (Ta), antimony (Sb), and Cu may be added to KNN. In addition, lanthanum nickelate (LaNiO ₃ ), aluminum nitride (AlN), zinc oxide (ZnO), or the like can be used as a piezoelectric material that is a material of the piezoelectric layer 142. Further, quartz, lithium tantalate (LiTaO ₃ ), bismuth germanium oxide (Bi ₁₂ GeO ₂₀ ), langasite (La ₃ Ga ₅ SiO ₁₄ ), and the like can be given.

  In the piezoelectric conversion unit 14, stress is generated in the piezoelectric layer 142 according to the vibration of the cantilever unit 12, and an AC voltage is generated between the second electrode layer 143 and the first electrode layer 141 due to the piezoelectric effect of the piezoelectric layer 142. Will occur. The resonance frequency of the piezoelectric power generating element 1A is determined by the structural parameters, materials, etc. of the movable part composed of the cantilever part 12 and the piezoelectric conversion part 14. Since the voltage generated in the piezoelectric conversion unit 14 takes a peaky value with respect to the frequency, the piezoelectric power generating element 1A is designed by considering the structural parameters, materials, etc. of the cantilever unit 12 and the piezoelectric conversion unit 14. , Power generation efficiency can be improved.

  The piezoelectric conversion portion 14 has a rectangular shape in plan view, and is arranged so that one side close to the base end portion 122 of the cantilever portion 12 overlaps with the base end portion 122 in plan view. As described above, the piezoelectric conversion unit 14 is disposed in the vicinity of the base end portion 122, so that the area of the region where the stress increases when the cantilever portion 12 vibrates can be increased, and the power generation efficiency can be improved. .

  The piezoelectric power generating element 1A includes a first pad 172a electrically connected to the first electrode layer 141 via the first wiring part 171a on the upper surface of the support part 11, and a second wiring part connected to the second electrode layer 143. And a second pad 172b electrically connected via 171b.

  The first wiring part 171a, the second wiring part 171b, the first pad 172a and the second pad 172b are made of, for example, Au. The material of the first wiring part 171a, the second wiring part 171b, the first pad 172a, and the second pad 172b may be Mo, Al, Pt, Ir, or the like. The first wiring portion 171a, the second wiring portion 171b, the first pad 172a, and the second pad 172b are not limited to a single layer structure, and may have a multilayer structure.

The piezoelectric power generating element 1A includes an insulating layer (not shown) that prevents a short circuit between the second wiring portion 171b and the first electrode layer 141. The insulating layer between the second wiring part 171b and the first electrode layer 141 is made of, for example, SiO ₂ , silicon nitride film (Si ₃ N ₄ ), or the like.

The piezoelectric power generating element 1A may have a structure in which a buffer layer is provided between the substrate 10A and the first electrode layer 141. The material of the buffer layer can be appropriately selected according to the material of the piezoelectric layer 142. For example, when the material of the piezoelectric layer 142 is PZT, examples of the buffer layer material include strontium ruthenate (SrRuO ₃ ), lead lanthanum titanate ((Pb, La) TiO ₃ ), and lead titanate (PbTiO ₃ ). Can be mentioned. Other examples of the material of the buffer layer when the material of the piezoelectric layer 142 is PZT include MgO and lanthanum nickelate (LaNiO ₃ ). Further, the buffer layer may have a multilayer structure including, for example, a Pt layer and a SrRuO ₃ layer. The piezoelectric power generating element 1A can improve the crystallinity of the piezoelectric layer 142 by providing a buffer layer.

  The piezoelectric power generating element 1 </ b> A is arranged so that the upper surface side is the upstream side and the lower surface side is the downstream side so that the fluid flow direction and the thickness direction of the support portion 11 are aligned. In the piezoelectric power generating element 1 </ b> A, when the fluid flows through the flow path 15 along the thickness direction of the support portion 11, the flow velocity of the fluid increases, the pressure in the gap portion 16 below the cantilever portion 12 decreases, and the cantilever portion 12. The front end portion 121 is displaced downward to the support portion 11. When the cantilever part 12 and the support part 11 are flush with each other, the pressure difference between the both sides of the cantilever part 12 disappears, and the tip 121 of the cantilever part 12 is restored to the original by the elastic force of the cantilever part 12 or the piezoelectric conversion part 14. Return to position. In the piezoelectric power generating element 1A, the cantilever part 12 repeats these operations and self-excites and vibrates, whereby the piezoelectric conversion part 14 generates power and outputs an alternating voltage from the first pad 172a and the second pad 172b.

  The piezoelectric power generating element 1A may be configured such that the side surfaces of the support portion 11 and the cantilever portion 12 are inclined. As shown in FIG. 9, the piezoelectric power generating element 1 </ b> B, which is a modification of the piezoelectric power generating element 1 </ b> A, has a side surface on the inner side of the support portion 11 and a side surface of the cantilever portion 12, Tilt to face. The other configurations of the piezoelectric power generating element 1B that are not described are substantially the same as the configuration of the piezoelectric power generating element 1A, and thus redundant description is omitted.

  The flow path 15 and the gap 16 of the piezoelectric power generating element 1B have the smallest opening area in the plane formed by the lower surface of the cantilever part 12, and the opening area becomes larger as approaching both sides in the thickness direction of the support part 11. Formed. The inner side surface of the support portion 11 and the side surface of the cantilever portion 12 are inclined, for example, by performing anisotropic etching with an alkaline solution when the flow path 15 and the gap portion 16 are formed.

  By forming the flow path 15 and the gap 16 so that the opening area becomes larger as approaching both surfaces in the thickness direction of the support section 11, the piezoelectric power generating element 1 </ b> B has an amount of fluid flowing through the flow path 15. Can be increased. Therefore, the piezoelectric power generating element 1B can improve the power generation efficiency by increasing the amplitude of the cantilever portion 12 by increasing the pressure difference between both sides in the thickness direction of the cantilever portion 12.

  The configuration of the piezoelectric power generating elements 1A and 1B is not limited to the above-described example. For example, a plurality of piezoelectric conversion units 14 may be arranged on the surface of the cantilever unit 12 and connected in series. One end and the other end of the series circuit of the plurality of piezoelectric conversion units 14 are electrically connected to the first pad 172b and the second pad 172a, respectively. In this case, for example, if the piezoelectric conversion unit 14 is arranged in the width direction on the surface of the cantilever part 12 by reducing the size in the direction along the width direction of the cantilever part 12 (vertical direction in FIG. 8A). Good.

  The piezoelectric power generating elements 1A and 1B may be configured such that the cantilever portion 12 is formed using a piezoelectric body and generates power in response to vibration. In this case, the cantilever part 12 is a bulk flat plate in which the first electrode layer 141, the piezoelectric layer 142, and the second electrode layer 143 are laminated. The cantilever part 12 formed using the piezoelectric body may be installed on the upper surface of the support part 11 having a rectangular frame shape, for example, via an installation table having an upper surface inclined with respect to the lower surface.

  As shown in FIGS. 10A and 10B, the power supply unit 53 includes an introduction unit 58 that introduces a fluid that flows into the flow path 15 of the piezoelectric power generation element 1A, and a gap 16 of the piezoelectric power generation element 1A. You may make it provide the discharge part 59 which discharges the flowing fluid. The introduction part 58 and the discharge part 59 are configured to accommodate the piezoelectric power generation element 1 </ b> A, and are formed on both sides in the thickness direction of the support part 11. The introduction part 58 is installed in contact with the upper surface of the support part 11, and the discharge part 59 is formed in contact with the lower surface of the support part 11. The introduction part 58 has an introduction port that penetrates from the upstream side to the downstream side of the fluid, and the discharge part 59 has a discharge port that penetrates the fluid from the upstream side to the downstream side. The introduction port of the introduction unit 58 and the discharge port of the discharge unit 59 are formed such that the opening area increases as the distance from the piezoelectric power generation element 1A increases.

  The introduction part 58 and the discharge part 59 function as a flow rate increasing part that can increase the amount of fluid flowing through the flow path 15 of the piezoelectric power generating element 1A. Therefore, the piezoelectric power generating element 1A can improve the power generation efficiency by increasing the pressure difference between the two surfaces in the thickness direction of the cantilever portion 12 and increasing the amplitude of the cantilever portion 12. Further, the introduction part 58 and the discharge part 59 can protect the piezoelectric power generating element 1A and can easily handle the piezoelectric power generating element 1A.

-Electromagnetic induction type power generation element-
As shown in FIGS. 11A, 11 </ b> B, and 12, the electromagnetic induction power generating element 1 </ b> C has a magnet block 2 having a plurality of magnets 24 and a plurality of coils 41, and faces the magnet block 2. The coil block 4 is arranged. The electromagnetic induction power generating element 1 </ b> C generates power by electromagnetic induction generated by the magnet block 2 and the coil block 4 being relatively displaced in a specified direction orthogonal to the opposing direction of the magnet block 2 and the coil block 4. The opposing direction of the magnet block 2 and the coil block 4 is the up-down direction in FIG. 11A, and the prescribed direction is the left-right direction in FIG.

  The electromagnetic induction power generating element 1 </ b> C includes a movable portion 25 that holds the magnet block 2, a plurality of elastic body portions 22 that support the movable portion 25 so that the movable portion 25 can vibrate in a specified direction, and an elastic body portion 22. The support part 21 which supports the movable part 25 via is provided. The electromagnetic induction power generating element 1C has a generally rectangular plate shape. When the movable part 25 vibrates in the specified direction, the magnet block 2 and the coil block 4 are relatively displaced. The electromagnetic induction power generating element 1 </ b> C generates power according to the vibration of the movable part 25 due to, for example, a fluid flow.

  The elastic body part 22 is a spring provided side by side on both ends of the movable part 25 in the specified direction. For example, the elastic body portions 22 are alternately bent so as to meander in a specified direction in a plan view. The elastic body part 22 is reduced in the occurrence of cracks in the elastic body part 22 because the bending pattern is round. Each of the elastic body portions 22 has a rigidity in the specified direction that is smaller than the mobility in the direction orthogonal to the specified direction.

  The elastic body portion 22 is made of, for example, stainless steel such as Si or SUS304, steel, Cu alloy such as Cu, brass or beryllium copper (BeCu), titanium (Ti) alloy, Al alloy, or the like. The electromagnetic induction power generating element 1C can reduce the loss of kinetic energy due to vibration attenuation in the elastic body portion 22 when the elastic body portion 22 is formed of Si, compared with the case where the elastic body portion 22 is formed of metal, and the power generation efficiency Can be improved.

  For example, the elastic body portion 22 is formed to have a width of about 10 to 300 nm and a period (pitch) of about 40 to 1200 nm. By reducing the width and pitch of the elastic body portion 22, the dead space around the elastic body portion 22 can be reduced, and the elastic body portion 22 increases the amount of energy stored as strain energy. As a result, the electromagnetic induction power generating element 1C can be reduced in size.

  The electromagnetic induction power generating element 1 </ b> C can reduce the vibration in the direction orthogonal to the prescribed direction by making the vibration direction of the movable portion 25 unidirectional in the prescribed direction by the elastic body portion 22. Therefore, the electromagnetic induction power generating element 1C can reduce generation of unnecessary vibration components and improve power generation efficiency. Further, the electromagnetic induction power generating element 1 </ b> C can reduce stress generated in each elastic body portion 22 and can improve durability. In the example shown in FIGS. 11 and 12, a configuration has been described in which ten elastic body portions 22 are provided on each of both end sides of the movable portion 25, and a total of ten elastic body portions 22 are provided. It is not limited to individual.

  The support portion 21 has a generally rectangular frame shape, and the movable portion 25 and the elastic body portion 22 are disposed in a region surrounded by the inner side surface. The support portion 21 connects one end side of each elastic body portion 22 on both end sides in the prescribed direction of the movable portion 25 among the inner side surfaces. The other end side of the elastic body portion 22 is connected to both end sides in the prescribed direction of the movable portion 25, respectively.

  The movable portion 25 is generally a frame shape having a plan view, an octagonal outer periphery, and a rectangular inner periphery. The magnet block 2 is held by a holding portion 23 that is a gap surrounded by the inner side surface of the movable portion 25. The movable part 25 is arranged so as to be separated from the support part 21 in a steady state where it does not vibrate. The outer peripheral shape of the movable portion 25 is not limited to an octagon, and may be a rectangle, a circle, a polygon, or the like.

  The movable portion 25 is provided with two projecting portions 26 projecting outward on both ends in a direction orthogonal to the prescribed direction in plan view. The protrusions 26 are each formed in a rectangular shape in plan view. Moreover, the support part 21 has the notch part 201 formed so that the protrusion part 26 could be displaced to a defined direction at the both ends of the direction orthogonal to a defined direction in planar view among the inner side surfaces, respectively.

  The support portion 21 includes a tapered stopper portion 202 that limits the amount of displacement of the movable portion 25 in the specified direction to a predetermined range. The stopper portion 202 is a surface that is inclined with respect to the specified direction in a plan view among the inner side surfaces of the support portion 21. The movable portion 25 has a tapered inclined surface 27 that limits the amount of displacement of the movable portion 25 in the specified direction to a predetermined range by contacting the stopper portion 202 during displacement. The inclined surface 27 is a surface that is inclined with respect to the specified direction in a plan view and is substantially parallel to the stopper portion 202 among the outer side surfaces of the movable portion 25.

  The electromagnetic induction power generating element 1 </ b> C can limit the displacement of the movable portion 25 in a direction different from the prescribed direction to a predetermined range by the stopper portion 202 and the inclined surface 27. Therefore, the electromagnetic induction power generating element 1 </ b> C can reduce variations in output power and can reduce the application of a force in a direction different from the specified direction to the elastic body portion 22, thereby improving reliability.

  In the magnet block 2, a plurality of magnets 24 each having a rectangular flat plate shape whose longitudinal direction is a direction orthogonal to the prescribed direction are arranged in the prescribed direction so that the width direction and the prescribed direction coincide with each other. Consists of. The magnet block 2 has a rectangular flat plate shape, and is fixed to the holding portion 23 by a joint portion (not shown). For example, an elastic material or the like that can be press-fitted into the gap between the magnet block 2 and the holding portion 23 can be adopted as the joining portion, in addition to an adhesive, a screw, and the like.

  The magnet 24 is made of a permanent magnet such as neodymium (NdFeB), samarium cobalt (SmCo), alnico (Al—Ni—Co), or ferrite. The magnet 24 is formed by, for example, shaping a magnetic material by cutting, polishing, etc., and then magnetizing it by a pulse magnetization method or the like. The magnet 24 is magnetized so that one surface side in the thickness direction is an N pole and the other surface side is an S pole.

  The magnet block 2 is configured by arranging a plurality of magnets 24 so that N poles and S poles are alternately arranged in a prescribed direction on both sides in the thickness direction of the magnet block 2. That is, in the magnet block 2, the magnetization directions of the two magnets 24 adjacent in the specified direction are opposite to each other. The magnet block 2 is not limited to a configuration in which the plurality of magnets 24 are arranged in a one-dimensional array, and may have a configuration in which the magnet block 2 is arranged in a two-dimensional array, for example.

  The support portion 21, the elastic body portion 22, and the movable portion 25 can be integrally formed with a small amount and high accuracy by the MEMS technology using the same substrate 20, for example. The support portion 21, the elastic body portion 22, and the movable portion 25 are formed by performing dry etching such as ICP-RIE using a mask patterned by a photolithography technique, for example. The thicknesses of the elastic body portion 22 and the movable portion 25 are the same as the thickness of the support portion 21. However, the thickness is not limited to this configuration. It may be changed.

  The substrate 20 is made of, for example, an insulating substrate such as a Si substrate that has low attenuation with respect to magnetic field lines, high resistivity, and electrical insulation. In addition, the substrate 20 may be an SOI substrate or the like. In addition, the support portion 21, the elastic body portion 22, and the movable portion 25 may be appropriately provided with an insulating film according to the material and resistivity of the substrate 20.

  The electromagnetic induction power generating element 1 </ b> C includes a first cap 31 disposed on one surface side in the thickness direction of the support portion 21 and a second cap 32 disposed on the other surface side in the thickness direction of the support portion 21. . The first cap 31 and the second cap 32 each hold the coil block 4. In addition, the electromagnetic induction power generating element 1 </ b> C includes a frame-shaped first spacer 35 disposed between the first cap 31 and the support portion 21, and a frame disposed between the second cap 32 and the support portion 21. And a second spacer 36 having a shape.

  The outer peripheral shape of the first cap 31 and the second cap 32 in plan view matches the outer peripheral shape of the support portion 21. In the first cap 31 and the second cap 32, rectangular through holes 311 and 321 are respectively formed in the projection regions of the cutout portions 201 of the support portion 21.

  The 1st cap 31 and the 2nd cap 32 are formed from resin, ceramics, Si, etc., such as engineering plastics (for example, polycarbonate), for example. When the first cap 31 and the second cap 32 are made of Si, the first cap 31 and the second cap 32 are bonded to the first spacer 35 and the second spacer 36, respectively, by a surface activation bonding method, a eutectic bonding method, a resin bonding method, or the like. The first cap 31 and the second cap 32 may be directly fixed to the support portion 21 without the first spacer 35 and the second spacer 36 depending on the structure of the movable portion 25 and the elastic body portion 22, respectively. Good.

  The plane pattern of the first spacer 35 and the second spacer 36 matches the plane pattern of the support portion 21. The first spacer 35 and the second spacer 36 are made of, for example, a resin such as engineering plastic (for example, polycarbonate), ceramics, Si, or the like. When the first spacer 35 and the second spacer 36 are made of Si, the first spacer 35 and the second spacer 36 are bonded to both sides in the thickness direction of the support portion 21 by a surface activation bonding method, a eutectic bonding method, a resin bonding method, or the like.

  The electromagnetic induction type power generating element 1 </ b> C includes a frame-shaped first spacer 35 and a second spacer 36 disposed between the first cap 31 and the support portion 21, so that the coil block 4 and the magnet block 2 are disposed. Can be easily determined. Therefore, the electromagnetic induction power generation element 1 </ b> C can reduce the contact between the coil block 4 and the magnet block 2 while narrowing the gap between the coil block 4 and the magnet block 2. The electromagnetic induction type power generating element 1C can improve the utilization efficiency of magnetic flux by narrowing the gap between the coil block 4 and the magnet block 2, and can improve the power generation efficiency.

  In the example shown in FIGS. 11 and 12, the first cap 31, the first spacer 35, the support portion 21, the second spacer 36, and the second cap 32 have through-holes 21 a through which fixing screws can be inserted at the four corners. , 35a, 11a, 46a and 31a are formed.

  The first cap 31, the first spacer 35, the support portion 21, the second spacer 36, and the second cap 32 may be fixed to each other by a plurality of screws, may be fixed to each other by an adhesive, or It may be fixed to each other by screws and adhesives. Further, the first cap 31, the first spacer 35, the support portion 21, the second spacer 36, and the second cap 32 may be fixed to each other by fitting a structure that can be fitted to each other. .

  The electromagnetic induction power generating element 1 </ b> C can displace the movable portion 25 in a specified direction by passing an appropriate jig through the through holes 311 and 321 and applying an external force to the protruding portion 26. If the jig is pulled out after the protrusion 26 is displaced, the movable part 25 can vibrate in the specified direction. In this case, the electromagnetic induction power generating element 1 </ b> C generates an alternating voltage corresponding to the damped vibration of the cantilever portion 12.

  In the coil block 4, adjacent coils 41 are joined together by a conductive joining material and are electrically connected. The conductive bonding material is made of, for example, solder or silver paste. The adjacent coils 41 are connected in series so as to be in the reverse winding direction. In addition, the first cap 31 and the second cap 32 are electrodes (not shown) that are electrically connected to the end portions of the coils 41 at both ends of the coil block 4 that are not connected to the adjacent coils 41. ) Is provided. Between the electrodes connected to the coil 41, when the movable part 25 vibrates, an induced current flows through the coil 41, so that electric power is output.

  The coils 41 of the coil block 4 are each provided with a core material 42 that becomes the core of the coil 41. The coil 41 may be an air-core coil that does not include the core material 42. Alternatively, the coil 41 may be positioned on each rib with a plurality of ribs provided on the first cap 31 and the second cap 32 as cores.

  Further, the coil 41 may be a planar coil formed on each of the first cap 31 and the second cap 32, for example. The planar coil can be formed from, for example, Cu, Au, Ag, or the like. The planar coil may be formed of permalloy, cobalt-based amorphous alloy, ferrite, or the like. The planar coil can be formed by thin film formation techniques such as vapor deposition and sputtering, photolithography techniques, etching techniques, and the like.

  In the electromagnetic induction power generating element 1 </ b> C, when the coil block 4 is held by the first cap 31 and the second cap 32, the coil block 4 is held only by one of the first cap 31 and the second cap 32. Compared with, power generation efficiency can be improved. In addition, the electromagnetic induction power generating element 1 </ b> C connects a series circuit of the coils 41 of the coil block 4 held by the first cap 31 and a series circuit of the coils 41 of the coil block 4 held by the second cap 32 in series. By doing so, the output power can be increased.

  In the electromagnetic induction power generating element 1 </ b> C, when the movable portion 25 vibrates in a specified direction, the coil block 4 is displaced relative to the magnet block 2 to generate an alternating induced electromotive force. The open circuit voltage of the electromagnetic induction power generating element 1 </ b> C is an alternating voltage corresponding to the vibration of the cantilever portion 12.

  The electromagnetic induction power generation element 1C is designed so that the resonance frequency of the electromagnetic induction power generation element 1C matches the natural frequency of the structure, thereby utilizing vibrations of the structure in addition to vibrations caused by the flow of the fluid. Can be generated. Other vibrations that can be used by the electromagnetic induction power generating element 1C may be vibrations that occur in an operating device, vibrations that occur when a vehicle travels, vibrations that occur when a person walks, and the like.

  In the electromagnetic induction power generating element 1 </ b> C, the movable portion 25 holds the magnet block 2, and the first cap 31 and the second cap 32 hold the coil block 4. That is, the electromagnetic induction power generating element 1 </ b> C may be configured such that the movable portion 25 holds the coil block 4 and at least one of the first cap 31 and the second cap 32 holds the magnet block 2. The elastic body portion 22 may be formed of rubber or resin.

  The electromagnetic induction power generating element 1 </ b> C may include a mechanism that limits the displacement direction of the movable portion 25 to a specified direction. As shown in FIG. 13, an electromagnetic induction power generation element 1D, which is a modification of the electromagnetic induction power generation element 1C, includes an input mechanism 8 for displacing the movable portion 25 along a specified direction. Other configurations that are not described in the electromagnetic induction power generating element 1D are substantially the same as the configurations of the electromagnetic induction power generating element 1C, and thus redundant description is omitted.

  The electromagnetic induction power generating element 1D includes a first magnetic material portion 29 connected to the movable portion 25, and a second magnetic material portion 85 connected to the input mechanism 8, and the first magnetic material portion 29 and the second magnetic material portion 85 are connected to the input mechanism 8. The movable portion 25 can be displaced by the magnetic force generated between the material portion 85 and the material portion 85.

  The first magnetic material part 29 is composed of a first magnetic body. The first magnetic body is, for example, an iron-cobalt alloy, electromagnetic soft iron, electromagnetic stainless steel, permalloy, or the like. The first magnetic material part 29 may be configured by a first magnet. The first magnet is, for example, neodymium (NdFeB), samarium cobalt (SmCo), alnico (Al—Ni—Co), ferrite, or the like.

  The second magnetic material portion 85 is composed of a second magnet. The second magnet is, for example, NdFeB, SmCo, Al—Ni—Co, ferrite, or the like. The 2nd magnetic material part 85 may be comprised from the 2nd magnetic body. Examples of the second magnetic body include iron-cobalt alloy, electromagnetic soft iron, electromagnetic stainless steel, and permalloy.

  The direction of the magnetic force generated between the first magnetic material part 29 and the second magnetic material part 85 is the direction of attraction, but is not limited thereto, and may be a repulsive direction. For example, when the first magnetic material part 29 is composed of a first magnet and the second magnetic material part 85 is composed of a second magnet, if the first magnet and the second magnet are arranged so that the same poles face each other, The direction of the magnetic force generated between the first magnetic material portion 29 and the second magnetic material portion 85 is a repulsive direction.

  The movable part 25 of the electromagnetic induction power generating element 1 </ b> D includes a protruding part 28 that protrudes from the outer side surface of the movable part 25 along the specified direction. A first magnetic material portion 29 is connected to the tip surface of the protruding portion 28 by an adhesive or the like. The projecting portion 28 has a rectangular shape with the predetermined direction as a longitudinal direction in plan view. The first magnetic material portion 29 has a rectangular shape in plan view.

  In the electromagnetic induction power generating element 1D, the support portion 21 has a C-shape in which the region of the protruding portion 28 is opened in plan view. The movable part 25 is arranged inside the support part 21 away from the inner side surface of the support part 21. The elastic body portion 22 is disposed on both sides of the movable portion 25 in the specified direction.

  The movable part 25, the projecting part 28, the support part 21 and each elastic body part 22 of the electromagnetic induction power generating element 1D can be integrally formed with a minute and high accuracy by using the same substrate 20, for example, by MEMS technology. It is.

  The electromagnetic induction power generating element 1D is mounted on the mounting board 80. As the mounting board 80, for example, a circuit board such as a printed wiring board can be adopted. The input mechanism 8 is fixed to the mounting board 80. Thereby, the mounting substrate 80 defines the relative positional relationship between the electromagnetic induction power generating element 1 </ b> D and the input mechanism 8.

  The input mechanism 8 includes a columnar rotation shaft 81 fixed to the mounting substrate 80, a rotation portion 82 that is rotatably held by the rotation shaft 81, and an operation portion 83 that protrudes from the rotation portion 82. , And a protruding portion 84 protruding from the rotating portion 82 to the opposite side of the operating portion 83. The operation unit 83 is formed in a size that can be operated by a user with a finger or the like, for example. The operation part 83, the rotation part 82, and the protrusion part 84 can be formed with resin, for example. The protruding portion 84 has a second magnetic material portion 85 having a rectangular shape in plan view connected to the distal end surface by an adhesive or the like.

  In the input mechanism 8, the operation unit 83, the projecting unit 84, and the second magnetic material unit 85 are arranged in a straight line, and a straight line connecting the operation unit 83, the projecting unit 84, and the second magnetic material unit 85 is in the specified direction And are arranged so as to be substantially orthogonal. The input mechanism 8 includes a return spring (not shown) that applies a force to the rotation unit 82 in a direction in which the rotation unit 82 returns to the initial position when the rotation unit 82 rotates from the initial position.

  The electromagnetic induction power generating element 1D includes an elastic body portion so that the inclined surface 27 of the movable portion 25 contacts the stopper portion 202 when the operation portion 83 is rotated by a first predetermined angle (for example, 5 °) from the initial position. 22 spring forces are designed. In the electromagnetic induction power generating element 1D, when the operation unit 83 is rotated from the initial position by a second predetermined angle (for example, 10 °), the spring force of the elastic body unit 22 is applied to the first magnetic material unit 29 and the second magnetic material unit 29D. The spring force of the elastic body portion 22 is designed so as to be larger than the magnetic force between the material portion 85 and the material portion 85.

  The electromagnetic induction power generating element 1D can be operated by displacing the movable portion 25 by appropriately applying an external force to the input mechanism 8. In addition, the electromagnetic induction power generating element 1D can reduce the action of a force in a direction different from the prescribed direction on the movable portion 25, and can improve power generation efficiency and reliability.

  According to the structural health monitoring system according to the embodiment of the present invention, since the power generation element 1 generates power by the flow of the surrounding fluid, the power generation efficiency can be improved as compared with the case of generating power by the surrounding vibration. Moreover, according to the structural health monitoring system which concerns on embodiment of this invention, since the sensor part 51 and the communication part 52 are supplied with a power supply from the electric power generation element 1, the freedom degree with respect to the installation location of the monitoring apparatus 5 can be improved. .

  Moreover, according to the structural health monitoring system which concerns on embodiment of this invention, since the monitoring apparatus 5 has a high freedom degree with respect to an installation location, construction is easy. Furthermore, if the monitoring device 5 is installed at the position of the structure P where wind or vortex is excited, the power generation efficiency of the power generation element 1 can be further improved. Further, by designing the power generation element 1 so that the resonance frequency of the power generation element 1 matches the natural frequency at the position of the structure P where the power generation element 1 is installed, the power generation efficiency of the power generation element 1 is further increased. It can be improved.

(Other embodiments)
As mentioned above, although this invention was described by embodiment, it should not be understood that the description and drawing which form a part of this indication limit this invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

For example, in the description of the embodiment already described, the sensor unit 51, the communication unit 52, and the power supply unit 53 do not need to be integrally configured as the monitoring device 5, but are separately installed in the structure P and connected to each other. You may be made to do.
Moreover, in the description of the embodiment already described, the structural health monitoring system may detect the state of the ground, rock, river, etc. as the structure P.

  In addition to the above, the present invention includes various embodiments and the like not described herein, such as configurations to which the above-described embodiments and modifications are applied. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

DESCRIPTION OF SYMBOLS 1 Power generation element 1A, 1B Piezoelectric power generation element 1C, 1D Electromagnetic induction type power generation element 2 Magnet block 4 Coil block 5a, 5b, 5c, 5d, 5e Monitoring device 11 Support part 12 Cantilever part 14 Piezoelectric conversion part 21 Support part 24 Magnet 25 Movable part 41 Coil 51 Sensor part 52 Communication part 53 Power supply part 63 Storage server (accumulation part)
71 Data Analysis Unit 72 Monitoring Unit 73 Notification Processing Unit

Claims (8)

A sensor unit that is installed in a structure and measures data indicating physical quantities;
A communication unit that wirelessly transmits data measured by the sensor unit;
A power supply unit that generates power by the flow of surrounding fluid, and supplies power to the sensor unit and the communication unit by power generation of the power generation element;
A data analysis unit that calculates structure information indicating a state of the structure by analyzing data measured by the sensor unit;
A storage unit for storing the structure information calculated by the data analysis unit;
A structural health monitoring system characterized in that the structure information calculated by the data analysis unit can be provided via a network.   The structural health monitoring system according to claim 1, wherein the power generating element vibrates due to the flow of the fluid and outputs electric power corresponding to the vibration.   The structural health monitoring system according to claim 1 or 2, wherein a plurality of monitoring devices including the sensor unit, the communication unit, and the power supply unit are installed in the structure.   The structural health monitoring system according to claim 3, wherein the monitoring device is installed in a tunnel. A monitoring unit that monitors the structure information calculated by the data analysis unit and determines whether there is an abnormality;
The information processing unit according to claim 1, further comprising: a notification processing unit configured to notify a manager of the structure that an abnormality has occurred with respect to the structure determined to be abnormal by the monitoring unit. The structural health monitoring system according to any one of the preceding claims. The power generating element is:
A frame-shaped support,
A cantilever part that is supported at one end on the inner peripheral surface of the support part and vibrates by the flow of surrounding fluid;
A piezoelectric transducer provided in the cantilever part,
6. The piezoelectric power generating element according to claim 1, wherein the cantilever part is a piezoelectric power generating element formed such that the other end side is displaced from one end side of the cantilever part in the thickness direction of the support part. The structural health monitoring system according to item 1. The power generating element is:
A magnet block having magnets;
A coil block disposed opposite to the magnet block and having a coil;
A movable part that holds either the magnet block or the coil block;
A plurality of elastic body portions that support the movable portion so that the movable portion can vibrate in a specified direction orthogonal to the opposing direction of the magnet block and the coil block;
The structural health monitoring system according to any one of claims 1 to 5, wherein the structural health monitoring system is an electromagnetic induction power generating element including a support portion that supports the movable portion via the plurality of elastic body portions.   The elastic body portion is smaller in rigidity in the prescribed direction than that in a direction orthogonal to the prescribed direction, and a plurality of the elastic body portions are provided side by side on both sides of the movable portion in the prescribed direction. The structural health monitoring system according to claim 7.

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