JP2014159984A - Device for inspecting magnetic contamination and method for inspecting magnetic contamination - Google Patents

Abstract

PROBLEM TO BE SOLVED: To implement highly sensitive inspection of magnetic contamination without need of a configuration including a magnetic shield.SOLUTION: A device for inspecting magnetic contamination comprises: a magnetic sensor 20 which is magnetic field detection means having a directivity in a magnetic field detection direction; perpendicular magnetic field applying means 10 which applies a magnetic field to the magnetic field detection means from a direction perpendicular to the magnetic field detection direction of the magnetic field detection means; and determination means 30 for determining presence of magnetic contamination 50 in a detection object on the basis of a signal detected by the magnetic field detection means when the detection object is input in a magnetic field detection range of the magnetic field detection means.

Description

  The present invention relates to a magnetic foreign matter inspection apparatus and a magnetic foreign matter inspection method for inspecting magnetic foreign matters contained in powders, granules, liquids and the like.

  Conventionally, when magnetic foreign matter inspection is performed using a magnetic sensor, a magnetic field is applied to a powder material containing magnetic foreign matter using a horizontal magnet, and the magnetized powder is placed downstream of the horizontal magnet. There is known a device provided with a stirrer for stirring the material and further provided with a SQUID magnetic detection device for detecting a magnetic foreign substance downstream of the stirrer (see Patent Document 1).

  In addition, a thin film magnetic sensor formed of a metal magnetic material is provided in parallel with the traveling direction of the sheet magnetic medium on the upper surface of a support base formed of a soft magnetic material serving as a magnetic shield material. It is also known that a permanent magnet for applying bias magnetization is attached to the medium intrusion side so that the magnetic pole direction is orthogonal to the traveling direction of the magnetic medium (see Patent Document 2).

  Furthermore, when a magnetoresistive element is attached to the N pole surface of the magnet, and the ferromagnetic fine particles move to a position facing the magnet surface, the magnet, the magnetoresistive element, and the ferromagnetic fine particles are aligned in a straight line. There is also known a technique in which a ferromagnetic fine particle that is a foreign substance is detected by utilizing the fact that the resistance of the magnetoresistive element is maximized (Patent Document 3).

JP 2010-237081 A JP 2001-4728 A JP 2005-327860 A

  In the configurations of Patent Documents 1 and 2, there is a problem that it is necessary to arrange a magnetic shield plate in the vicinity of the sensor or to completely cover the sensor and perform magnetic shielding.

  The sensor used in Patent Document 3 has a configuration in which a magnet is combined with a Hall element and a magnetoresistive element. This Hall element has a wide detection range and characteristics are not lost by the magnetic field of the magnet, but there is a problem that the sensitivity is low.

  The present invention has been made in view of the current state of magnetic foreign matter inspection as described above, and an object of the present invention is to eliminate the need for a magnetic shield configuration and to perform a highly sensitive magnetic foreign matter inspection. An inspection device and a magnetic foreign matter inspection method are provided.

  A magnetic foreign matter inspection apparatus according to the present invention includes a magnetic field detection unit having directivity in a magnetic field detection direction, and a vertical magnetic field that applies a magnetic field from a direction perpendicular to the magnetic field detection direction of the magnetic field detection unit toward the magnetic field detection unit. An application unit; and a determination unit that puts an inspection object into a magnetic field detection range of the magnetic field detection unit and determines presence of a magnetic foreign substance in the inspection object based on a signal detected by the magnetic field detection unit. It is characterized by that.

  In the magnetic foreign matter inspection apparatus according to the present invention, the magnetic field detection means is a thin film magnetic sensor.

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that a thin film magnetic impedance sensor is used as a thin film magnetic sensor.

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that the element pattern of the thin film magnetic sensor has a meander shape.

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that a differential operation is performed using two magnetic field detection means.

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that two magnetic field detection means are arranged in parallel and provided at different positions in the magnetic field detection direction.

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that two magnetic field detection means having the same element pattern are arranged in parallel, provided at the same position in the magnetic field detection direction, and the positions of the respective electrodes differ in the magnetic field detection direction. And

  In the magnetic foreign matter inspection apparatus according to the present invention, the vertical magnetic field applying means has a configuration in which magnets are arranged with the N and S poles facing each other.

  In the magnetic foreign matter inspection apparatus according to the present invention, the vertical magnetic field applying means has a configuration in which the magnets are arranged so that the N to S poles of one magnet are perpendicular to the magnetic field detection direction. And

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that a soft magnetic material is disposed between the magnetic detection means and the vertical magnetic field application means.

  The magnetic foreign matter inspection apparatus according to the present invention is characterized in that a soft magnetic material is disposed between the magnetic detection means and the vertical magnetic field application means.

(add to)
In the magnetic foreign matter inspection apparatus according to the present invention, the inspection object is one of powder, granules, and liquid, and the shape thereof is a plate shape or a thin layer shape.

  The magnetic foreign matter inspection method according to the present invention applies a magnetic field from a direction perpendicular to the magnetic field detection direction of the magnetic field detection unit to the magnetic field detection unit using a magnetic field detection unit having directivity in the magnetic field detection direction. The inspection object is put into a magnetic field detection range of the magnetic field detection means, and the presence of a magnetic foreign object in the inspection object is determined based on a signal detected by the magnetic field detection means.

  The magnetic foreign matter inspection method according to the present invention is characterized in that a thin film magnetic sensor is used as the magnetic field detection means.

  The magnetic foreign matter inspection method according to the present invention is characterized by using a thin film magnetic impedance sensor as the thin film magnetic sensor.

  The magnetic foreign matter inspection method according to the present invention is characterized in that the element pattern of the thin film magnetic sensor has a meander shape.

  The magnetic foreign matter inspection method according to the present invention is characterized in that a differential operation is performed using two magnetic field detecting means.

  The magnetic foreign matter inspection method according to the present invention is characterized in that two magnetic field detection means are arranged in parallel and provided at different positions in the magnetic field detection direction.

  In the magnetic foreign matter inspection method according to the present invention, two magnetic field detection means having the same element pattern are arranged in parallel, provided at the same position in the magnetic field detection direction, and the position of each electrode is varied in the magnetic field detection direction for inspection. It is characterized by that.

  The magnetic foreign matter inspection method according to the present invention is characterized in that a magnet is arranged with the north and south poles facing each other and a vertical magnetic field is applied.

20
The magnetic foreign matter inspection method according to the present invention is characterized in that the magnet is arranged so that the N to S poles of one magnet are in a position perpendicular to the magnetic field detection direction, and vertical magnetic field application is performed.

  The magnetic foreign matter inspection method according to the present invention is characterized in that a soft magnetic material is disposed between a magnetic detection means and a magnet that applies a vertical magnetic field.

  The magnetic foreign matter inspection method according to the present invention is characterized in that determination is performed using a log amplifier.

(add to)
In the magnetic foreign matter inspection method according to the present invention, the inspection object is one of powder, granules, and liquid, and the shape thereof is a plate shape or a thin layer shape.

  In the present invention, a magnetic field detection means having directivity in the magnetic field detection direction is used to apply a magnetic field from the direction perpendicular to the magnetic field detection direction of the magnetic field detection means toward the magnetic field detection means, and the magnetic field detection means Since the presence of magnetic foreign matter in the inspection object is determined based on the signal detected by the magnetic field detection means after the inspection object is put into the magnetic field detection range, the magnetic field applied to the inspection object is the magnetic field of the magnetic field detection means. The detection direction is perpendicular to the detection direction, and the magnetic field detection means is insensitive to the magnetic field in the vertical direction, so that it is possible to detect the magnetic field of the magnetized magnetic foreign matter without being affected by the magnetic field that strongly applies the magnetic foreign matter Therefore, highly accurate detection can be performed without using a shield plate.

  In the present invention, when magnetic foreign matter inspection is performed by differential operation, two magnetic field detecting means are arranged in parallel and provided at different positions in the magnetic field detection direction, so that high-precision magnetic foreign matter inspection can be performed. . In the present invention, when magnetic foreign matter inspection is performed by differential operation, two magnetic field detecting means having the same element pattern are arranged in parallel and provided at the same position in the magnetic field detection direction, and the position of each electrode is detected by the magnetic field. Since the direction is different, the magnetic foreign matter inspection can be performed with high accuracy.

The block diagram which shows embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The top view which shows an example of the magnetic sensor used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The top view which shows an example of the magnetic sensor which has a meander-shaped element pattern used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The top view explaining the detection area test of the magnetic sensor used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The figure which shows the result of the detection area test of the magnetic sensor used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The perspective view which shows the 1st example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The perspective view which shows the 2nd example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The perspective view which shows the 3rd example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The perspective view which shows the 4th example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. It is a figure which shows the 5th example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention, (a) is a perspective view, (b) is a front view. The figure which shows the magnetic field vector of the microparticle detection area | region by the 5th example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The figure which shows the perpendicular magnetic field distribution of the sensor surface by the 5th example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The side view which shows the 6th example of the perpendicular magnetic field application means used for embodiment of the magnetic foreign material inspection apparatus which concerns on this invention. The block diagram which shows embodiment of the magnetic foreign material inspection apparatus using the two magnetic sensors which concern on this invention. The top view explaining the malfunction of the magnetic foreign material inspection apparatus using two magnetic sensors. The top view which shows arrangement | positioning of the two magnetic sensors in embodiment of the magnetic foreign material inspection apparatus using the two magnetic sensors concerning this invention. The top view which shows arrangement | positioning of two magnetic sensors which have a meander-shaped element pattern in embodiment of the magnetic foreign material inspection apparatus using the two magnetic sensors which concern on this invention. The top view which shows electrode arrangement | positioning of two magnetic sensors in embodiment of the magnetic foreign material inspection apparatus using the two magnetic sensors which concern on this invention. The top view which shows electrode arrangement | positioning of two magnetic sensors which have a meander-shaped element pattern in embodiment of the magnetic foreign material inspection apparatus using the two magnetic sensors which concern on this invention. The block diagram which shows 1st embodiment comprised using the log amplifier in the magnetic foreign material inspection apparatus which concerns on this invention. The block diagram which shows 2nd embodiment comprised using the log amplifier in the magnetic foreign material inspection apparatus which concerns on this invention.

  Embodiments of a magnetic foreign matter inspection apparatus and a magnetic foreign matter inspection method according to the present invention will be described below with reference to the accompanying drawings. In each figure, the same components are denoted by the same reference numerals, and redundant description is omitted. FIG. 1 is a configuration diagram showing an embodiment of a magnetic foreign matter inspection apparatus according to the present invention. This magnetic foreign matter inspection apparatus is provided with a vertical magnetic field applying means 10 for generating a magnetic field from the base portion 11 side provided on the floor surface toward the ceiling portion 13.

  In the magnetic field direction of the vertical magnetic field applying means 10, a magnetic sensor 20 as a magnetic detecting means is provided. The magnetic sensor 20 has directivity in the magnetic field detection direction, and the magnetic field detection direction is indicated by an arrow K in FIG. The vertical magnetic field applying means 10 applies a magnetic field from a direction perpendicular to the magnetic field detection direction of the magnetic sensor 20 as the magnetic field detection means toward the magnetic sensor 20 as the magnetic field detection means.

  An inspection object is put into the magnetic field detection range of the magnetic sensor 20 above the magnetic sensor 20. The inspection object may be any of powder, granules, and liquid, and the shape thereof may be a plate shape or a thin layer shape. The magnetic object 50 may be mixed into the inspection object. Examples of the magnetic foreign material 50 include a fine magnetic metal.

  The magnetic foreign matter inspection apparatus includes a determination unit 30. This determination means 30 is for determining the presence of the magnetic foreign object 50 in the inspection object based on a signal detected by the magnetic sensor 20 by putting the inspection object in the magnetic field detection range of the magnetic sensor 20.

  As the magnetic sensor 20 in the above, a thin film magnetic sensor can be used. This thin film magnetic sensor is insensitive to the magnetic field in the normal direction on the thin film surface, and has a characteristic that the sensor sensitivity is not lost even when a strong vertical magnetic field is applied. As the thin film magnetic sensor, a known thin film magnetic impedance sensor, thin film magnetoresistive sensor, or GIGS (registered trademark) sensor can be used. In any sensor, since the sensor sensitivity is not lost by a strong vertical magnetic field, a structure using a thin magnetic material is desirable. However, since the sensor sensitivity and the film thickness are in a trade-off relationship, a film having a film thickness as required can be used.

  As shown in FIG. 2, the plan view of the thin film magneto-impedance sensor is such that electrode pads 22 and 22 are formed at both ends of a linearly patterned sensor element 21. The easy axis of magnetic anisotropy induced in the magnetic material is the width direction of the film surface indicated by the arrow a or the direction indicated by the arrow b inclined in the length direction with respect to the width direction. Thin film magneto-impedance sensors are known which have a single layer structure of magnetic material or a laminated structure of magnetic material and non-magnetic material.

  The plan view of the thin film magnetoresistive sensor used as the magnetic sensor 20 is the same as the plan view of the thin film magnetoimpedance sensor shown in FIG. The cross-sectional configuration is a soft magnetic-ferromagnetic laminate structure in which a soft magnetic layer is laminated on a pinned layer.

  The plan view of the GIGS (registered trademark) sensor used as the magnetic sensor 20 is basically the same as the plan view of the thin-film magneto-impedance sensor shown in FIG. 2, but the granular sensor in the width direction at the center in the longitudinal direction. Is sandwiched. The cross-sectional configuration is a structure in which a granular sensor is arranged in the center in the longitudinal direction, and soft magnetic bodies (thin film magnetic yokes) are provided on both ends with the granular sensor interposed therebetween.

  The dimension of the sensor element 21 in the width direction is preferably in the range of about the same as the size of the magnetic foreign substance 50 in the inspection object to several times, but should be an appropriate value depending on the required accuracy. Can do. Further, as for the dimension in the length direction, if the sensor element 21 is long, the magnetic field generated by the magnetic foreign substance 50 acts on the local part of the sensor element 21 and the characteristic is distorted. For this reason, it is desirable that it is 1 mm or less, and if it is 1 mm or less, the magnetic field acts on the entire sensor element 21 and the setting of the operating point becomes easy. In the experiment, 1 mm to 3 mm was used, but an appropriate value can be set according to the required accuracy.

  In the above embodiment, the sensor elements 21 linearly patterned are used as an example. However, as shown in FIG. 3, the sensor elements 24, 24, 24, 24, 24, 24 are spaced at intervals of 1 mm or less. The electrodes 25 may be combined to form a meander shape.

  When a magnetic foreign substance enters the meander-shaped magnetic sensor as shown by the arrow in FIG. 3, each of the sensor elements 24, 24, 24, 24, 24, 24 has a detection area indicated by a broken circle. Thus, a wide detection area without a detection blank area can be secured by one magnetic sensor.

  In order to verify the above effect on the meander-shaped magnetic sensor, a 270 G vertical magnetic field was applied to a region having a rectangular planar shape (5 mm × 3 mm) as shown in FIG. In this region, a rod-shaped magnetic sensor 20 having a length of 3 mm is arranged as shown in the figure. At a height of 0.5 mm above the magnetic sensor 20, a magnetic fine particle (spherical high-speed steel) B having a diameter of 200 micrometers is scanned by a trajectory T. As shown in Fig. 2, the element impedance was measured by two-dimensional scanning.

  The results are shown in FIG. As shown in FIG. 5, it was confirmed that fine particles can be detected appropriately within a radius of 0.5 mm with the end of the rod-shaped magnetic sensor 20 as the center. Therefore, as shown in FIG. 3, the sensor elements 24, 24, 24, 24, 24, 24 are combined with the electrode 25 at intervals of 1 mm or less to form a meander shape, thereby providing a wide detection area without a detection blank area. Can be secured.

  The strength of the magnetic field applied by the vertical magnetic field applying means 10 is ideally set to a value that can magnetically saturate the magnetic fine particles (magnetic foreign matter). The sensor sensitivity can be maximized by this ideal magnetic field strength. The vertical magnetic field applying means 10 can be configured such that magnets are arranged with the N and S poles facing each other. As shown in FIG. 6, for example, a first magnet (permanent magnet) 31 having an N pole on the floor side is arranged. A second magnet (permanent magnet) 32 with the S pole down is arranged in the vertically upward direction of the first magnet 31. As shown in FIG. 6, when a magnetic path is formed between two magnets 31 and 32 using a magnetic yoke 60, it is effective for holding and fixing the magnets 31 and 32 as the vertical magnetic field strength increases. is there. The structure using the magnetic yoke 60 can be used in the devices shown in FIGS. 7 to 9 described later, and the same effect can be expected.

  The magnetic sensor 20 is disposed between the first magnet 31 and the second magnet 32, and a magnetic field having a required strength by the first magnet 31 and the second magnet 32 is applied to the entire magnetic sensor 20. Like that. The size of the magnetic sensor can be rectangular (5 mm × 3 mm). In addition, the inspection object is conveyed at a height of 0.5 mm above the magnetic sensor 20. It is assumed that the magnetic foreign matter 50 may be mixed into this inspection object. Magnetic foreign matter inspection can be performed by applying a predetermined high-frequency current to the magnetic sensor 20 via an electrode and applying a bias magnetic field in order to secure a sensor operating point. According to this structure, since a permanent magnet is used, it can be set as an apparatus of energy-saving consumption compared with an electromagnet.

  The configuration of the vertical magnetic field applying means 10 may be as shown in FIG. That is, the second magnet (permanent magnet) 32 is not arranged in the configuration shown in FIG. Other configurations are the same as those shown in FIG. Also with this configuration, magnetic foreign matter inspection can be performed, and since permanent magnets are used, an apparatus that consumes less energy than electromagnets can be obtained.

  In the configuration of FIG. 7, the configuration shown in FIG. 8 may be adopted in which a soft magnetic body 35 is disposed between the magnetic sensor 20 that is a magnetic detection unit and the magnet 31 that is a vertical magnetic field application unit. In addition, in the configuration of FIG. 6, the configuration shown in FIG. 9 may be adopted in which soft magnetic bodies 35 and 36 are disposed between the magnetic sensor 20 that is a magnetic detection unit and the magnets 31 and 32 that are a vertical magnetic field application unit. By using a soft magnetic material in this way, the vertical magnetic field can be made uniform.

  When a vertical magnetic field is generated in a wide area using a plurality of magnets, the vertical magnetic field can be made uniform by using a soft magnetic material 37 as shown in FIG. In the example of FIG. 10, seven neodymium magnets (dimensions: W4 × D4 × T2) 34 are arranged side by side at an interval of 2 mm as shown in FIG. As shown in FIG. 10B, adjacent to the neodymium magnet 34, a soft magnetic body 37 that is a permalloy plate (thickness 1 mm) having a length of 42 mm in the longitudinal direction and a width corresponding to the width of the magnetic sensor 20. Is provided.

  FIG. 11 shows the state of the magnetic field vector in the fine particle detection region in the case of the arrangement shown in FIG. As apparent from FIG. 11, the vertical magnetic field is aligned in a substantially uniform direction in the fine particle detection region, and the effect of making the vertical magnetic field uniform appears.

  Also, FIG. 12 shows the vertical magnetic field distribution on the sensor surface in the case of the arrangement shown in FIG. As apparent from FIG. 12, the vertical magnetic field is uniformized on the sensor surface of the magnetic sensor 20.

  Further, in the case of generating a vertical magnetic field by the magnet shown in FIG. 6, two magnet arrangements are used, and in the case of generating a vertical magnetic field by the magnet and the soft magnetic material shown in FIGS. The direction in which the magnetic field is applied from the vertical direction toward the magnetic sensor 20 that is the magnetic field detection means can be controlled by the arrangement of the magnetic body.

  FIG. 13 shows a case where the two magnets 31 and 32 are arranged so as to be shifted from the direction corresponding to the vertical direction. In this case, since the magnetic field is applied obliquely from the perpendicular direction with respect to the magnetic field detection direction of the magnetic sensor 20 as the magnetic field detection means, it is possible to apply a bias magnetic field to the magnetic sensor 20. The direction of the bias magnetic field can be controlled by shifting the positions of the two magnets and the soft magnetic material without being limited to this example. Can be shared for application.

  As shown in FIG. 14, the apparatus of the present invention can be configured using two magnetic sensors 20-1 and 20-2 as magnetic field detection means. Signals obtained by the magnetic sensors 20-1 and 20-2 are guided to a differential amplifier 38 composed of, for example, an operational amplifier and differentially amplified. Specifically, the high-frequency oscillation circuit 39 is driven by applying a high frequency to the magnetic sensors 20-1 and 20-2, and the non-inversion of the differential amplifier 38 from the magnetic sensor 20-1 grounded to the ground through the resistor R1. A signal is given to the terminal, and a signal is given from the magnetic sensor 20-2 grounded to the ground through the resistor R2 to the inverting terminal of the differential amplifier 38 to perform differential amplification. The determination means 30 is configured to include the differential amplifier 38, for example, determines the presence of the magnetic foreign object by comparing with an appropriate threshold value, and displays a numerical value such as the intensity of the detected magnetic field based on the detected signal. Can be configured. Thus, since differential amplification is performed using the two magnetic sensors 20-1 and 20-2, even if noise occurs in the case of magnetic foreign matter inspection, it can be almost eliminated, and highly accurate magnetic foreign matter inspection can be performed. It becomes possible.

  When the magnetic sensors 20-1 and 20-2 are arranged in parallel with end portions in the longitudinal direction, appropriate inspection may not be performed. That is, as shown in FIG. 15, when the inspection is performed with the fine particle m positioned between the magnetic sensor 20-1 and the magnetic sensor 20-2, the in-phase detection signal is differentially amplified to zero output. , Magnetic foreign matter inspection is not possible.

  In order to solve the above problem, the magnetic sensors 20-1 and 20-2 as two magnetic field detecting means can be arranged in parallel and provided at different positions in the magnetic field detection direction. As shown in FIG. 16, the magnetic sensors 20-1 and 20-2 having rod-shaped sensor patterns are arranged in parallel with the magnetic field detection direction (horizontal direction in the figure) as the longitudinal direction, and in the magnetic field detection direction (lateral direction in the figure). They are shifted by a dimension d.

  As shown in FIG. 17, meander-shaped magnetic sensors 20A-1 and 20A-2 are arranged in parallel so that a sensor pattern having a linear portion longer than the electrodes is in the magnetic field detection direction (lateral direction in the figure). In the magnetic field detection direction (horizontal direction in the figure), they are shifted by a dimension d. In either case, the electrodes are provided at the ends of all patterns.

  With the above configuration, even when there is a fine particle between the magnetic sensors 20-1 (20A-1) and 20-2 (20A-2), the magnetic sensor 20-1 (20A-1) and the magnetic sensor 20-2. In (20A-2), since the position in the magnetic field detection direction (the horizontal direction in the figure) is different, the sensitivity to the fine particles is different. Therefore, the detection signal from the magnetic sensor 20-1 (20A-1) and the detection signal from the magnetic sensor 20-2 (20A-2) are different, and the output signal does not become zero depending on the differential amplification. Foreign matter inspection can be performed.

  In the above description, the positions of the magnetic sensor 20-1 (20A-1) and the magnetic sensor 20-2 (20A-2) are shifted, but the present invention is not limited to this. For example, as shown in FIGS. 18 and 19, the element pattern of the magnetic sensor 20-1 (20A-1) and the element pattern of the magnetic sensor 20-2 (20A-2) are the same, and the magnetic field detection direction (see FIG. Are provided at the same position in the horizontal direction), and the positions of the respective electrodes are made different in the magnetic field detection direction.

  If the element pattern shown in FIG. 18 is a rod-shaped element, the position of the electrode pads 22 and 22 of the magnetic sensor 20-2 is determined from the position of the electrode pads 22 and 22 of the magnetic sensor 20-1. Shifted by a dimension d. If the element pattern shown in FIG. 19 has a meander shape, from the position of the electrodes 25 and 25 of the magnetic sensor 20A-1 to the position of (20A-1) and the electrodes 25 and 25 of the magnetic sensor 20-2. Provided by shifting by dimension d.

  Even in the above case, the positions of the magnetic sensor 20-1 (20A-1) and the magnetic sensor 20-2 (20A-2) are substantially deviated and detected by the magnetic sensor 20-1 (20A-1). The signal and the detection signal from the magnetic sensor 20-2 (20A-2) are different, and the output signal does not become zero by differential amplification, and appropriate magnetic foreign matter inspection can be performed.

  The magnetic foreign matter inspection apparatus according to the present invention can be configured as shown in FIG. That is, the magnetic sensor 20 is arranged in a vertical magnetic field created by the Holm Hertz coil 41 composed of two coils, and a uniform vertical magnetic field is applied to the magnetic sensor 20. A high frequency is applied from the high frequency generation circuit 42 to the magnetic sensor 20 via the circulator 43 to drive the magnetic sensor 20, and a necessary bias magnetic field is applied.

  A high-frequency detection signal is received from the magnetic sensor 20 by the log amplifier 44 through the circulator 43, logarithmically amplified, and sent to the non-inverting input terminal of the differential amplifier 45. A predetermined potential is applied to the inverting input terminal of the differential amplifier 45 from the voltage unit 46, and the differential amplifier 45 performs differential amplification to obtain an output Vout. The log amplifier 44, the differential amplifier 45, and the voltage unit 46 are included in the determination unit 30, and the determination unit 30 determines the presence of a magnetic foreign substance in the inspection target based on the detected signal (Vout).

  Conventionally, since the magnetic sensor 20 (particularly, a thin film magnetic impedance sensor) is driven at a high frequency (80 MHz to 700 MHz), a high level of technology is required for designing a drive circuit. In addition, it is generally considered that the circuit board becomes large and it is difficult to reduce the size of the apparatus. However, according to the above-described embodiment, since the output of the magnetic sensor 20 is processed by the log amplifier 44, the circuit configuration is easy, and the circuit and the device can be reduced in size and cost. There are advantages.

  Although the embodiment shown in FIG. 20 is single-ended, a log amplifier 44 may be used as a differential input format as shown in FIG. The magnetic sensor 20-1 has the same configuration as the apparatus shown in FIG. 14, is driven by applying a high frequency from the high-frequency oscillation circuit 39 to the magnetic sensors 20-1, 20-2, and is grounded via the resistor R1. A detection signal is applied to the non-inverting terminal of the log amplifier 44, and a detection signal is applied to the inverting terminal of the differential amplifier 38 from the magnetic sensor 20-2 grounded to the ground via the resistor R2, thereby performing differential amplification. With this configuration, similarly to the configuration of FIG. 20, the detection signal is processed by the log amplifier 44. Therefore, the circuit configuration is easy, and the circuit and device can be reduced in size and cost. In addition, since differential amplification is performed, even when noise is generated in the magnetic foreign matter inspection, it can be almost eliminated, and a magnetic foreign matter inspection with high accuracy becomes possible.

10 vertical magnetic field applying means 20, 20-1, 20-2, 20A-1, 20A-2 magnetic sensor 21, 24 sensor element 22 electrode pad 25 electrode 30 determining means 31, 32 magnet 34 neodymium magnet 35, 36, 37 soft Magnetic bodies 38, 45 Differential amplifier 39 High-frequency oscillation circuit 41 Form hertz coil 42 High-frequency generation circuit 43 Circulator 44 Log amplifier 46 Voltage unit 50 Magnetic foreign matter 60 Magnetic yoke

In the magnetic foreign matter inspection apparatus according to the present invention , the inspection object is one of powder, granules, and liquid, and the shape thereof is a plate shape or a thin layer shape.

In the magnetic foreign matter inspection apparatus according to the present invention , the inspection object is one of powder, granules, and liquid, and the shape thereof is a plate shape or a thin layer shape.

The magnetic foreign matter inspection method according to the present invention is characterized in that the magnet is arranged so that the N to S poles of one magnet are in a position perpendicular to the magnetic field detection direction, and vertical magnetic field application is performed.

If the element pattern shown in FIG. 18 is a rod-shaped element, the electrode pads 22, 22 are moved from the positions of the electrode pads 22, 22 of the magnetic sensor 20-1 to the positions of the electrode pads 22, 22 of the magnetic sensor 20-2 . 22 is provided shifted by dimension d. The element pattern shown is the apparatus having the meander shape in FIG. 19, from the position of the magnetic sensor 20A-1 of the electrodes 25, 25, to the position of the magnetic sensor 20A-2 of the electrodes 25, 25, the electrodes 25, 25 Provided by shifting by dimension d.

Claims (24)

Magnetic field detection means having directivity in the magnetic field detection direction;
A vertical magnetic field applying means for applying a magnetic field from a direction perpendicular to the magnetic field detecting direction of the magnetic field detecting means to the magnetic field detecting means;
And a determination means for determining the presence of a magnetic foreign substance in the inspection object based on a signal detected by the magnetic field detection means after placing the inspection object in a magnetic field detection range of the magnetic field detection means. Magnetic foreign matter inspection device.   2. The magnetic foreign matter inspection apparatus according to claim 1, wherein the magnetic field detection means is a thin film magnetic sensor.   The magnetic foreign matter inspection apparatus according to claim 2, wherein a thin film magnetic impedance sensor is used as the thin film magnetic sensor.   The magnetic foreign matter inspection apparatus according to claim 2 or 3, wherein the element pattern of the thin film magnetic sensor has a meander shape.   5. The magnetic foreign matter inspection apparatus according to claim 1, wherein two magnetic field detection units are used to perform a differential operation. 6.   6. The magnetic foreign matter inspection apparatus according to claim 5, wherein the two magnetic field detection means are arranged in parallel and are provided at different positions in the magnetic field detection direction.   6. The magnetic foreign object according to claim 5, wherein two magnetic field detecting means having the same element pattern are arranged in parallel, are provided at the same position in the magnetic field detection direction, and the positions of the respective electrodes are different in the magnetic field detection direction. Inspection device.   The magnetic foreign matter inspection apparatus according to claim 1, wherein the vertical magnetic field applying unit has a configuration in which a magnet is arranged with the N pole and the S pole facing each other.   The vertical magnetic field applying means has a configuration in which the magnets are arranged so that the N to S poles of one magnet are perpendicular to the magnetic field detection direction. The magnetic foreign substance inspection apparatus according to item 1.   10. A magnetic foreign matter inspection apparatus according to claim 1, wherein a soft magnetic material is disposed between the magnetic detection means and the vertical magnetic field application means.   The magnetic foreign matter inspection apparatus according to claim 1, wherein the determination unit includes a log amplifier.   The magnetic foreign matter inspection apparatus according to any one of claims 1 to 11, wherein the object to be inspected is any one of powder, granules, and liquid, and the shape thereof is a plate shape or a thin layer shape. Using magnetic field detection means having directivity in the magnetic field detection direction,
Applying a magnetic field from a direction perpendicular to the magnetic field detection direction of the magnetic field detection means toward the magnetic field detection means,
A magnetic foreign matter inspection method, comprising: placing an inspection object in a magnetic field detection range of the magnetic field detection means; and determining presence of a magnetic foreign object in the inspection object based on a signal detected by the magnetic field detection means.   14. The magnetic foreign matter inspection method according to claim 13, wherein a thin film magnetic sensor is used as the magnetic field detection means.   15. The magnetic foreign matter inspection method according to claim 14, wherein a thin film magnetic impedance sensor is used as the thin film magnetic sensor.   The magnetic foreign matter inspection method according to claim 14 or 15, wherein the element pattern of the thin film magnetic sensor has a meander shape.   The magnetic foreign matter inspection method according to claim 13, wherein two magnetic field detection means are used for differential operation.   18. The magnetic foreign matter inspection method according to claim 17, wherein two magnetic field detection means are arranged in parallel and provided at different positions in the magnetic field detection direction for inspection.   The two magnetic field detection means having the same element pattern are arranged in parallel, provided at the same position in the magnetic field detection direction, and the inspection is performed by changing the position of each electrode in the magnetic field detection direction. Magnetic foreign matter inspection method.   The magnetic foreign matter inspection method according to any one of claims 13 to 19, wherein a magnet is arranged with the north and south poles facing each other and a vertical magnetic field is applied.   20. The vertical magnetic field application according to claim 13, wherein the magnet is arranged so that the N pole to the S pole are perpendicular to the magnetic field detection direction in one magnet. Magnetic foreign matter inspection method.   The magnetic foreign matter inspection method according to claim 20 or 21, wherein a soft magnetic material is disposed between the magnetic detection means and the magnet for applying a vertical magnetic field.   23. The magnetic foreign matter inspection method according to claim 13, wherein the determination is performed using a log amplifier. (add to)
The magnetic foreign matter inspection method according to any one of claims 13 to 23, wherein the inspection object is any one of powder, granules, and liquid, and the shape thereof is a plate shape or a thin layer shape.

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