JP2014148096A - Liquid jet head, method of manufacturing the same, and liquid jet apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid jet head that prevents clogging of a liquid channel and like, caused by hardening of an adhesive protruding into the channel, and a liquid jet apparatus.SOLUTION: In a liquid jet head, a channel formation substrate made of single crystal silicon having a crystal face orientation [110] surface is bonded to a nozzle plate with an adhesive. A communication part is formed in the channel formation substrate. A notch is formed at an end, on the side of a surface adhering to the nozzle plate, of the communication part. At least one surface of the notch has a crystal face orientation [111] surface.

Description

  The present invention relates to a liquid ejecting head, a method of manufacturing the liquid ejecting head, and a liquid ejecting apparatus including the liquid ejecting head.

  2. Description of the Related Art Conventionally, for example, a liquid jet head typified by an ink jet recording head has a series of liquid flow paths from a liquid introduction port to a nozzle through a reservoir (common liquid chamber) and a pressure chamber. Pressure fluctuation is generated in the liquid in the pressure chamber, and droplets are ejected from the nozzle. This liquid jet head is manufactured by bonding a plurality of components. For example, a flow path unit having a pressure chamber and a nozzle is constituted by a plurality of plate-like members, and these plate-like members are bonded in a laminated state in the production process of the flow path unit. Further, in the flow path unit mounting step, the flow path unit and the case are bonded. In the case and the channel unit, the liquid channel is formed.

  When a plurality of component parts are bonded with an adhesive, the adhesive may be cured in a state where a part of the adhesive protrudes into the liquid flow path. If the adhesive is peeled off, the liquid flow is deteriorated or the nozzle is clogged. For example, when the adhesive that has hardened in the liquid flow path is partially peeled off, the peeled portion becomes a hook-like shape. Specifically, one end is adhered to the liquid flow path, and the free end is a liquid flow. The tip of the tip may be exposed to the outside from the nozzle. For this reason, in the process of forming the liquid ejecting head, a technique for preventing a defect in the liquid flow path by cleaning the adhesive exposed in the liquid flow path using a solvent or the like (for example, a patent) Reference 1).

JP 2004-114556 A

  However, as described in Patent Document 1, there is a case where the adhesive protruding into the liquid channel cannot be completely removed even if it is washed with a solvent or the like. In addition, performing cleaning using a solvent or the like means that the number of steps required for the assembly process of the liquid ejecting head is increased, and thus there may be a problem in terms of cost.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A liquid ejecting head according to this application example includes a nozzle plate on which a nozzle from which liquid is ejected is formed, a surface that is bonded to the nozzle plate, and a communication portion that communicates with the nozzle. A flow path forming substrate, wherein the flow path forming substrate is made of single crystal silicon having a crystal plane orientation [110] plane, and is bonded to the nozzle plate of the communication portion. A notch is formed at the end on the surface side, and at least one of the notches has a crystal plane orientation [111] plane.

  According to this application example, the communication portion formed on the flow path forming substrate has a notch on the bonding surface side with the nozzle plate, and the recess is formed by bonding the flow path forming substrate and the nozzle plate. It is formed. Therefore, since the excess adhesive can be hardened in a state where it is stored in the concave portion, it is possible to prevent the liquid flow or the nozzle from being blocked by the adhesive that has protruded and hardened. Further, in a notch formed by anisotropic etching of single crystal silicon having a crystal plane orientation [110] plane, at least one of the plurality of planes forming the cutout has a crystal plane orientation [111]. By having the surface, it is possible to always create a cutout with a stable shape when mass-produced. Furthermore, since the notch can be formed by the same method as the step of forming the communication portion, the manufacturing cost can be suppressed.

  Application Example 2 In the liquid jet head according to the application example described above, in the bonding surface direction between the flow path forming substrate and the nozzle plate, the width of the notch is less than or equal to half the width of the communication portion. Features.

  According to the application example, it is possible to prevent bubbles contained in the liquid from staying in the recess, and thus it is possible to provide a liquid ejecting head capable of maintaining stable print quality.

  [Application Example 3] In the manufacturing method of the liquid jet head according to this application example, the flow path forming substrate made of single crystal silicon having a [110] crystal plane orientation is anisotropically etched to form the flow path forming substrate. A liquid flow path forming step for forming a communication portion, and a notch having a crystal plane orientation [111] plane on at least one surface is formed in a part of the communication portion by anisotropic etching of the flow path forming substrate. A notch forming step, and an adhering step of adhering the nozzle plate on which the nozzle is formed and the flow path forming substrate on which the notch is formed with an adhesive.

  According to this application example, the communication portion formed in the flow path forming substrate has a notch, and the concave portion is formed by bonding the flow path forming substrate and the nozzle plate. Therefore, since the excess adhesive can be hardened in a state where it is stored in the concave portion, it is possible to prevent the liquid flow or the nozzle from being blocked by the adhesive that has protruded and hardened. Further, in a notch formed by anisotropic etching of single crystal silicon having a crystal plane orientation [110] plane, at least one of the plurality of planes forming the cutout has a crystal plane orientation [111]. By having the surface, it is possible to always create a cutout with a stable shape when mass-produced. Furthermore, since the notch can be formed by the same method as the step of forming the communication portion, the manufacturing cost can be suppressed.

  Application Example 4 A liquid ejecting apparatus according to this application example includes the above-described liquid ejecting head.

  According to this application example, it is possible to provide a highly reliable liquid ejecting apparatus.

The perspective view which shows the structure of a liquid ejecting apparatus. FIG. 3 is a cross-sectional view illustrating a configuration of a liquid ejecting head. FIG. 3 is a structural diagram showing a configuration of a flow path unit. FIG. 5 is a process diagram illustrating a method for manufacturing a liquid jet head. FIG. 5 is a process diagram illustrating a method for manufacturing a liquid jet head.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, the scale of each member or the like is shown differently from the actual scale so as to make each member or the like recognizable. Further, in the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to these embodiments.

  FIG. 1 is a perspective view illustrating a configuration of the liquid ejecting apparatus.

  As shown in FIG. 1, in the liquid ejecting apparatus 100, the liquid ejecting head 1 is mounted on the carriage 50. The carriage 50 on which the liquid jet head 1 is mounted is provided on a carriage shaft 50a attached to the apparatus main body 70 so as to be movable in the axial direction.

  In addition, the apparatus main body 70 is provided with a storage unit 30 including a tank in which ink is stored, and the ink from the storage unit 30 is supplied to the liquid ejecting head 1 mounted on the carriage 50 via the supply pipe 40. Supplied.

  Then, the driving force of the driving motor 80 is transmitted to the carriage 50 via a plurality of gears (not shown) and a timing belt 80a, whereby the carriage 50 on which the liquid ejecting head 1 is mounted is moved along the carriage shaft 50a. . On the other hand, the apparatus main body 70 is provided with a platen 90 along the carriage shaft 50a, and a recording sheet S, which is a recording medium fed by a paper feed roller (not shown), is wound around the platen 90 and conveyed. It has come to be.

  In such a liquid ejecting apparatus 100, the carriage 50 is moved along the carriage shaft 50 a, and ink is ejected by the liquid ejecting head 1 and printed on the recording sheet S.

  Next, the liquid ejecting head 1 will be described with reference to FIGS. 2 and 3. Here, FIG. 2 is a cross-sectional view showing the configuration of the liquid jet head 1, FIG. 3 shows the configuration of the flow path unit, FIG. 3 (a) is a cross-sectional view of the flow path unit, and FIG. FIG. 3 is a plan view of a flow path unit.

  As shown in FIG. 2, the liquid ejecting head 1 includes a vibrator unit 5 having a piezoelectric vibrator 4, a case 6 that can house the vibrator unit 5, and a flow path unit 2 that is joined to the front end surface of the case 6. And.

  The vibrator unit 5 is a component obtained by unitizing a plurality of piezoelectric vibrators 4, a fixing plate 7 for fixing the plurality of piezoelectric vibrators 4, a flexible cable 8 electrically connected to the plurality of piezoelectric vibrators 4, and the like. It is. The piezoelectric vibrator 4 is a kind of pressure generating element and also a kind of electromechanical conversion element. The piezoelectric vibrator 4 of the present embodiment is formed in a comb-like shape cut into an extremely narrow width of about 30 to 100 m. Each piezoelectric vibrator 4 is attached in the form of a cantilever with a free end protruding outside the edge of the fixed plate 7. The piezoelectric vibrator 4 is a laminated piezoelectric vibrator configured by alternately laminating piezoelectric bodies and internal electrodes, and can expand and contract in a direction orthogonal to the electric field direction, in other words, the longitudinal direction of the vibrator. This is a type of piezoelectric vibrator that can vibrate in the direction. Accordingly, the free end of the piezoelectric vibrator 4 contracts in the longitudinal direction of the vibrator by charging, and the free end extends in the longitudinal direction of the vibrator by discharging. As described above, the fixing plate 7 is a component to which each piezoelectric vibrator is joined. In the present embodiment, the fixing plate 7 is a metal plate having good heat dissipation, specifically, a thickness of about 0.7 to 1.0 mm. Stainless steel plate is used. The flexible cable 8 is a flexible wiring member that supplies a drive signal to each piezoelectric vibrator 4 and is electrically connected to each piezoelectric vibrator 4 at the vibrator base end.

  The case 6 is a block-shaped member made of synthetic resin in which the housing empty portion 9 and the ink supply path 10 are formed. In this embodiment, the epoxy resin is produced by injection molding. The storage space 9 is a space for storing the transducer unit 5. The vibrator unit 5 is fixed in the housing space 9 by bonding the fixing plate 7 to the wall surface of the housing space 9. In this storage state, the tip surface of the piezoelectric vibrator 4 faces the opening on the tip side of the storage space 9 and is joined to the island portion 11 of the flow path unit 2. The ink supply path 10 is an ink flow path that communicates from the mounting surface side of the case 6 to the reservoir 12 and constitutes a part of the common liquid flow path. The ink supply path 10 is provided so as to penetrate the height direction of the case 6, and is connected to a storage unit 30 (not shown) on the attachment surface side of the case 6.

  The flow path unit 2 is a component provided with a series of liquid flow paths (a kind of individual liquid flow paths) from the reservoir 12 through the pressure chambers 14 to the corresponding nozzles 15. The flow path unit 2 includes a nozzle plate 16, a flow path forming substrate (pressure chamber forming substrate) 17, and an elastic plate 18. The nozzle plate 16 is bonded to one surface of the flow path forming substrate 17, and the elastic plate It is produced by adhering 18 to the other surface of the flow path forming substrate 17.

  The nozzle plate 16 is a plate-like member in which a plurality of nozzles 15 are formed in a row at a pitch corresponding to the dot formation density. In this embodiment, 96 nozzles are formed on a stainless steel plate of about 100 μm at a pitch of 180 dpi. The nozzle diameter is about 40 μm, and a plurality of nozzles 15 arranged in a row form a nozzle row. The number of nozzle rows is set according to the type of ink that can be ejected. For example, in a liquid ejecting head capable of color recording, 4 to 8 nozzle rows are provided side by side.

  The flow path forming substrate 17 includes a plurality of communication portions 3 formed corresponding to the nozzles 15 formed on the nozzle plate 16, a plurality of pressure chambers 14 formed corresponding to the plurality of communication portions 3, This is a plate-like member in which empty portions or the like serving as reservoirs 12 communicating with the plurality of pressure chambers 14 are formed. As shown in FIG. 3B, the pressure chamber 14 is formed in an elongated and flat shape, and communicates with the nozzle 15 at a portion of the pressure chamber 14 located on the side far from the reservoir 12.

  The ink supply port 19 is a groove-like portion formed between one end in the longitudinal direction of the pressure chamber 14 and the reservoir 12, and the flow path width is provided sufficiently narrower than the pressure chamber 14. . The ink supply port 19 and the pressure chamber 14 constitute a series of individual ink flow paths.

  As shown in FIG. 3A, the elastic plate (sealing plate) 18 has a double structure in which an elastic film 21 is laminated on a support plate 20. In the present embodiment, a stainless steel plate having a thickness of about 30 μm is used as the support plate 20, and a resin film (for example, polyphenylene sulfide) having a thickness of about several μm is used as the elastic film 21. The elastic plate 18 includes a diaphragm portion that seals one opening surface of the pressure chamber 14 and a compliance portion that seals one opening surface of the reservoir 12. And the diaphragm part is produced by carrying out the etching process of the support plate 20 of the part corresponding to the pressure chamber 14, and the island part 11 is provided in the ring. In addition, the compliance portion is manufactured by removing the support plate 20 partially by etching and making the portion facing the reservoir 12 only the elastic film 21.

  In the liquid jet head 1 configured as described above, the island portion 11 is pressed toward the nozzle plate 16 side by extending the piezoelectric vibrator 4 in the longitudinal direction of the vibrator. By this pressing, the elastic film 21 constituting the diaphragm portion is deformed and the pressure chamber 14 is contracted. Further, when the piezoelectric vibrator 4 is contracted in the vibrator longitudinal direction, the pressure chamber 14 is expanded by the elasticity of the elastic film 21. Since the internal ink pressure fluctuates due to expansion and contraction of the pressure chamber 14, an ink droplet can be ejected from the nozzle 15 by controlling the expansion and contraction of the pressure chamber 14.

  A notch 23 is formed in the flow path forming substrate 17. The notch 23 is formed in the communication portion 3 formed in the flow path forming substrate 17 and is formed by etching the flow path forming substrate 17. The notch 23 forms the recess 22 by bonding the flow path forming substrate 17 and the nozzle plate 16. Here, the flow path forming substrate 17 is made of single crystal silicon having a crystal plane orientation [110] plane, and the communicating portion 3 and the notch 23 are manufactured by etching. The notch 23 has a plurality of surfaces, and at least one surface has a crystal plane orientation [111] plane.

  Further, in the direction of the bonding surface between the flow path forming substrate 17 and the nozzle plate 16, the width of the recess 22 is set to be equal to or less than half of the width of the communication portion 3 in a sectional view. In the present embodiment, in the longitudinal direction of the pressure chamber 14, the length of the communication portion 3 is formed with about 140 μm, and the notch 23 is formed with about half of that, about 70 μm. Note that the length of the width of the notch 23 is not limited to this, and the same effect can be obtained as long as the length is not more than half of the width of the communication portion 3 in a sectional view.

  Next, a method for manufacturing the liquid jet head 1 having the above configuration will be described. 4 and 5 are process diagrams showing a method of manufacturing the liquid jet head. In manufacturing the liquid jet head 1, necessary components such as the case 6, the vibrator unit 5, and the flow path unit 2 are prepared in advance.

  In producing the vibrator unit 5, first, a fixing plate 7 cut out to a predetermined size is prepared, and an adhesive is applied to the surface of the fixing plate 7. That is, an adhesive is applied by printing or the like to an adhesion area where the vibrator group is adhered. As this adhesive, for example, a thermosetting epoxy adhesive is preferably used. When the adhesive is applied to the surface of the fixed plate, one half of the piezoelectric plate is placed on the adhesive application surface. Here, the piezoelectric plate is a base material of the piezoelectric vibrator 4 and is a plate-like member formed by laminating an electrode layer and a piezoelectric body in layers. When the piezoelectric plate is placed, the adhesive interposed between the fixed plate 7 and the piezoelectric plate is cured, and the piezoelectric plate is bonded to the fixed plate 7. If the piezoelectric plate is bonded to the fixed plate 7, the piezoelectric plate is cut into comb teeth to produce a plurality of piezoelectric vibrators 4. For this cutting, for example, a dicing saw or a wire saw is used, and cutting is performed from the front end side portion (that is, free end portion) of the piezoelectric plate protruding outward from the front end surface of the fixed plate 7 toward the fixed plate 7 side. That is done. When the piezoelectric vibrator 4 is manufactured by cutting the piezoelectric plate, the flexible cable 8 is joined, and the vibrator unit 5 is completed.

  Next, the liquid flow path forming step will be described. First, as shown in FIG. 4A, a flow path forming substrate wafer 171 made of single crystal silicon having a plane orientation [110] is thermally oxidized in a diffusion furnace at about 1100 ° C., and a silicon dioxide film 172 is formed on the surface. Form.

  Next, a mask (not shown) is formed on the silicon dioxide film 172 and patterned into a predetermined shape to form an opening 173 as shown in FIG. 4B. Then, the flow path forming substrate wafer 171 is anisotropically etched (wet etching), thereby forming the communication portion 3 in a region corresponding to the opening 173 as shown in FIG.

  Next, the notch forming process will be described. A mask (not shown) is formed on the silicon dioxide film 172, and an opening 174 is formed by patterning into a predetermined shape as shown in FIG. Then, as shown in FIG. 5E, the flow path forming substrate wafer 171 is anisotropically etched (wet etching), so that a plurality of regions are formed in the region corresponding to the opening 174 of the flow path forming substrate wafer 171. And a notch 23 having at least one crystal plane orientation [111] plane is formed.

  Then, as shown in FIG. 5F, the silicon dioxide film 172 is removed, and the flow path forming substrate 17 having the communication part 3 and the notch 23 is completed.

  Next, the bonding process will be described. As shown in FIG. 5G, the nozzle plate 16 is adhered to the flow path forming substrate 17 in which the notch 23 is formed with an adhesive, and a recess 22 is formed in a region corresponding to the notch 23. In this bonding step, various adhesives are used for bonding, and a fluid adhesive having thermosetting properties, for example, a two-component epoxy adhesive is preferably used. Here, when the flow path forming substrate 17 and the nozzle plate 16 are bonded, an adhesive is applied to the upper surface of the flow path forming substrate 17, and then the nozzle plate 16 is placed on the bonding surface from above. . This is for preventing the trouble that the excessive adhesive hangs down and the nozzle 15 is blocked, and for the excessive adhesive to be accumulated in the recess. And the elastic board 18 is adhere | attached on the other surface of the flow-path formation board | substrate 17, and the flow-path unit 2 is produced.

  Once the case 6, the vibrator unit 5, the flow path unit 2 and the like are manufactured, the respective components are assembled. First, the flow path unit 2 is bonded to the front end surface of the case 6. For example, after applying an adhesive to the front end surface of the case 6, the flow path unit 2 is positioned on the front end surface of the case, and the position is fixed with a pin or the like. In this case as well, various adhesives can be selected, but in the present embodiment, for example, an epoxy-based adhesive is suitably used as in the plate bonding step.

  If the position of the flow path unit 2 is fixed, the vibrator unit 5 is inserted into the housing empty part 9 from the mounting surface side of the case 6. In inserting the vibrator unit 5, first, an adhesive is transferred to the front end surface of each piezoelectric vibrator 4, and the vibrator unit 5 is inserted into the housing empty portion 9 with the front end face as the head. And if the front end surface of each piezoelectric vibrator 4 contact | abuts the corresponding island part 11, an adhesive agent will be inject | poured between the fixed plate 7 back surface and the case 6 inner wall surface. As this adhesive, a fluid adhesive having a relatively low viscosity, for example, a thermosetting epoxy adhesive is preferably used. The injected adhesive penetrates into the gap between the fixing plate 7 and the inner wall surface of the case 6 by capillary force to fill the adhesive region.

  When this adhesion area is filled with the adhesive, the case 6 is heated. By this heating, the flow path unit 2 is bonded to the front end surface of the case 6, and the fixing plate 7 of the vibrator unit 5 is bonded to the inner wall surface of the case 6. When the flow path unit 2 and the vibrator unit 5 are bonded to the case 6 in this way, necessary parts such as a printed board are attached, and the assembly of the liquid ejecting head 1 is completed.

  As mentioned above, according to the said embodiment, it has the effect shown below.

  (1) The recess 22 is formed by bonding the flow path forming substrate 17 having the notch 23 formed in the communication portion 3 and the nozzle plate 16. Therefore, the excess adhesive can be cured in a state where it is stored in the recess 22, and therefore, it is possible to prevent the liquid flow from being hindered by the protruding and cured adhesive and the nozzle 15 from being blocked. The notch 23 is formed by anisotropic etching of single crystal silicon having a crystal plane orientation [110] plane, and at least one of the plurality of surfaces forming the notch 23 is a crystal plane. By having the azimuth [111] plane, it is possible to always create a notch with a stable shape when mass-produced. Furthermore, since the notch 23 can be formed by the same method as the process of forming the communication part 3, manufacturing cost can be suppressed.

  (2) In the longitudinal direction of the pressure chamber 14, the length of the notch 23 is about half of the length of the communication portion 3. For example, if the notch 23 is too large, bubbles may remain, and the retained bubbles may absorb pressure fluctuations in the pressure chamber 14, or the bubbles may grow and hinder liquid flow. is there. However, by adopting such a configuration, it is possible to prevent excessive adhesive from protruding into the flow path and to prevent air bubbles from staying, so that the liquid jet head 1 with high reliability is provided. be able to.

Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be added to the above-described embodiment. A modification will be described below.
(Modification 1) In the present embodiment, the form in which the notch 23 is formed in the flow path forming substrate 17 has been exemplified. However, the present invention is not limited to this. That's fine.

  (Modification 2) In the liquid ejecting apparatus 100 described above, the liquid ejecting head 1 is mounted on the carriage 50 and moves in the main scanning direction. However, the present invention is not particularly limited thereto. It may be a line type recording apparatus that is fixed to the apparatus main body 70 and performs printing only by moving the recording sheet S in the sub-scanning direction.

  (Modification 3) Further, in the above-described embodiment, the so-called flexural vibration type piezoelectric vibrator 4 is exemplified as the pressure generating unit. However, the present invention is not limited to this, and for example, the so-called longitudinal vibration type piezoelectric vibrator 4 is employed. It is also possible. Even if it does in this way, the effect similar to the said embodiment can be acquired.

  The present invention is intended for a wide range of liquid ejecting heads and liquid ejecting apparatuses in general, and can also be applied to liquid ejecting heads and liquid ejecting apparatuses that eject liquid other than ink. Other liquid ejecting heads include, for example, various recording heads used in image recording apparatuses such as printers, color material ejecting heads used in the manufacture of color filters such as liquid crystal displays, organic EL displays, and FEDs (field emission displays). Examples thereof include an electrode material ejecting head used for electrode formation, a bioorganic matter ejecting head used for biochip production, and the like, and can also be applied to a liquid ejecting apparatus including such a liquid ejecting head.

  Needless to say, the present invention is not limited to the above embodiments. That is, the mutually replaceable members and configurations disclosed in the above embodiments are appropriately changed and applied in a combination thereof. Although not disclosed in the above embodiments, this is a known technique and the above implementation. The members and configurations disclosed in the examples can be replaced with the members and configurations interchangeable with each other as appropriate, and the combination thereof is changed and applied. It is one of the present invention that a person skilled in the art can appropriately substitute the members and configurations that can be assumed as substitutes for the members and configurations disclosed in the above-described embodiments based on the above, and change the combination to apply. It is disclosed as an example.

  DESCRIPTION OF SYMBOLS 1 ... Liquid ejecting head, 2 ... Channel unit, 3 ... Communication part, 4 ... Piezoelectric vibrator, 11 ... Island part, 14 ... Pressure chamber, 15 ... Nozzle, 16 ... Nozzle plate, 17 ... Channel formation substrate, 18 ... elastic plate, 22 ... recess, 23 ... notch.

Claims (4)

A nozzle plate on which nozzles for ejecting liquid are formed;
One surface is bonded to the nozzle plate, and a flow path forming substrate in which a communication portion communicating with the nozzle is formed,
A liquid jet head comprising:
The flow path forming substrate is made of single crystal silicon having a crystal plane orientation [110] plane,
A notch is formed at the end of the communicating surface with the nozzle plate of the communication part,
The liquid ejecting head according to claim 1, wherein at least one of the cutouts has a crystal plane orientation [111] plane.   2. The liquid ejecting head according to claim 1, wherein a width of the notch in the direction of an adhesive surface between the flow path forming substrate and the nozzle plate is not more than half of a width of the communication portion. A liquid flow path forming step of forming a communication portion in the flow path forming substrate by anisotropically etching the flow path forming substrate made of single crystal silicon having a [110] crystal plane orientation;
A notch forming step of forming a notch having a crystal plane orientation [111] plane on at least one surface in a part of the communicating portion by anisotropically etching the flow path forming substrate;
A method of manufacturing a liquid jet head, comprising: a bonding step of bonding a nozzle plate in which nozzles are formed and the flow path forming substrate in which the notches are formed with an adhesive.   A liquid ejecting apparatus comprising the liquid ejecting head according to claim 1.

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