JP2014146395A - Irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an irradiation device capable of simply aligning a center of ring of a lamp with a center of a reflection board.SOLUTION: The irradiation device includes: a reflection board 12 having a flat surface part 40 and a side surface part 41; a flash lamp 11 annularly bending a light-emitting tube 20 having a circular cross section; a plurality of mounting boards 42 provided on the flat surface part 40 and mounted with the light-emitting tube 20 of the flash lamp 11; and a pressing mechanism 43 for pressing the light-emitting tube 20 of the flash lamp 11 mounted on the mounting board 42 toward the flat surface part 40. A mounting surface 42A of the mounting board 42 includes: a regulation part 90 for regulating a normal position P1 of the light-emitting tube 20 of the flash lamp 11; and an inclined surface 91 provided at both sides which sandwich this regulation part 90. The inclined surface 91, when applied with pressurization F1 by the pressing mechanism 43 in a state that the light-emitting tube 20 of the flash lamp 11 is deviated from the regulation part 90, applies to the light-emitting tube 20 a lateral pressure F2 which urges the movement of the light-emitting tube 20 toward the regulation part 90.

Description

  The present invention relates to an irradiation apparatus provided with an annular arc tube.

  2. Description of the Related Art Conventionally, there has been known an irradiation apparatus that can irradiate ultraviolet rays instantaneously with very high illuminance in order to cure an ultraviolet curable resin. Such an irradiation apparatus includes a lamp having an annular arc tube that emits light including ultraviolet rays, and a reflector that reflects light from the lamp toward an irradiation object. (For example, refer to Patent Document 1). The irradiation apparatus is used, for example, in a dicing process of cutting a disc wafer piece in manufacturing an optical disc such as a DVD or a CD, or cutting a semiconductor wafer on which an IC chip is formed into a predetermined size.

JP 2009-230828 A

By the way, it is necessary to maintain a high degree of uniformity on the ultraviolet irradiation surface so that curing unevenness does not occur in the ultraviolet curable resin. Therefore, in the irradiation apparatus, it is necessary to align the reflector and the lamp with high accuracy so that high uniformity can be maintained on the irradiation surface. However, the lamp may have a deviation in the bending radius of the annular arc tube due to manufacturing errors. When there is a deviation in the bending radius of the arc tube, the center of the lamp and the center of the reflector are not aligned, which makes it difficult to maintain high uniformity on the irradiated surface.
An object of the present invention is to solve the above-described problems of the prior art and to provide an irradiation apparatus that can easily align the center of the lamp ring with the center of the reflector.

  In order to achieve the above-mentioned object, the present invention provides a reflector having a circular plane part in plan view, a side part provided along an edge of the plane part, and an arc tube having a circular cross section. And a plurality of mounting tables provided on the flat surface, on which the arc tube of the lamp is mounted, and the arc tubes of the lamp mounted on the mounting table are pressurized to the flat surface side. A mounting surface of the mounting table, including a defining portion that defines a normal position of the arc tube of the lamp, and inclined surfaces provided on both sides sandwiching the defining portion, The inclined surface is configured to apply a lateral pressure for urging the arc tube to move to the defining portion when a pressure is applied by the pressing mechanism in a state where the arc tube of the lamp is displaced from the defining portion. To do.

  Further, in the irradiation apparatus according to the present invention, the flat table includes at least three mounting tables in the circumferential direction of the lamp, and the mounting table is generated by pressurizing the arc tube with the pressing mechanism. The combined force of the side pressures from each of the lamps is balanced at the center of the ring of the lamp.

  According to the present invention, in the irradiation apparatus, the lamp is a flash lamp that emits pulsed light and vibrates during self-emission.

  Further, the present invention provides the irradiation apparatus, wherein the pressing mechanism pressurizes the arc tube with a linear spring, and the linear spring supports the weight of the lamp, and the pressure between the inclined surface of the mounting table described above is applied. A side pressure is generated.

  According to the present invention, the mounting surface of the mounting table on which the arc tube of the lamp is mounted includes a defining portion that defines a normal position of the arc tube of the lamp, and inclined surfaces that are provided on both sides of the defining portion. And the inclined surface gives a lateral pressure for urging the arc tube to move to the defining portion when a pressure is applied by the pressing mechanism with the arc tube of the lamp displaced from the defining portion. Even if the tube is placed at a position shifted from the defining portion of the mounting table, the pressure applied by the pressing mechanism is applied with a lateral pressure that urges the arc tube to move to the defining portion. The center of the lamp can be easily aligned with the center of the reflector.

It is an upper perspective view which shows the structure of the irradiation apparatus which concerns on embodiment of this invention. It is a cross-sectional perspective view which shows the internal structure of an irradiation apparatus. It is an exploded view of an irradiation apparatus. It is a usage pattern figure of an irradiation apparatus. It is an exploded view of a light source unit. FIG. 4 is a perspective view showing the entire configuration of the flash lamp by reversing the upper and lower sides from the actual mounted state for convenience. FIG. 7 is a schematic external side view showing a state in which the flash lamp shown in FIG. 6 is turned upside down (actually mounted) and viewed from the side. It is typical sectional drawing which expands and shows the cathode vicinity of the side view of FIG. It is a figure which expands and shows the attachment aspect to the reflecting plate of a flash lamp. It is a figure which shows roughly the electrical structure of an irradiation apparatus. It is a circuit diagram of a lighting circuit. It is a figure which shows the test result of starting performance. It is a circuit diagram which shows the comparison structure of the test of a starting performance. It is a figure which shows the illumination intensity distribution of an irradiation surface. It is a schematic diagram which shows the storage structure of a flash lamp. It is a figure which shows the shape of a mounting surface, (A) is a figure which shows a V-shaped mounting surface, (B) is a figure where a circular arc type shows a mounting surface. It is a figure which shows the side pressure which acts on a flash lamp when the bending radius of a flash lamp is smaller than a regulation value, (A) is a fragmentary sectional view, (B) is a top view. It is a figure which shows the side pressure which acts on a flash lamp when the bending radius of a flash lamp is larger than a regulation value, (A) is a fragmentary sectional view, (B) is a top view. It is a top view which shows the side pressure which acts on a flash lamp when the bending radius of a flash lamp is larger in part than a regulation value, and is small in part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Hereinafter, as an aspect of the irradiation apparatus according to the present invention, an irradiation apparatus used in a dicing process of cutting a semiconductor wafer on which an IC chip is formed into a predetermined size will be described.

1 is an upper perspective view showing the configuration of the irradiation apparatus 1 according to the present embodiment, FIG. 2 is a cross-sectional perspective view showing the internal configuration of the irradiation apparatus 1, FIG. 3 is an exploded view of the irradiation apparatus 1, and FIG. FIG.
As shown in these drawings, the irradiating apparatus 1 includes an irradiator body 2, a light source unit 3 that radiates ultraviolet light that is built in the irradiator body 2, and an auxiliary reflection unit 4 that reflects the emitted light of the light source unit 3. And.
The auxiliary reflection unit 4 has a substantially conical shape with a diameter gradually increasing from the base end 4A on the illuminator body 2 side toward the tip 4B, and a predetermined degree of uniformity required in the dicing process is at the tip opening 4C and in the vicinity thereof. The emitted light of the light source unit 3 is reflected so as to be obtained.

In the dicing process, as shown in FIG. 4, a semiconductor wafer 70 to be cut is placed on the surface of a back sheet 71 that is an adhesive sheet, and the irradiation device 1 irradiates ultraviolet light from the back surface of the back sheet 71. An ultraviolet curable resin layer is provided on the surface of the back sheet 71, and the ultraviolet curable resin layer shrinks due to curing and adheres to the back surface of the semiconductor wafer 70 when irradiated with ultraviolet light from the back surface. The sheet 71 is held. Further, after the dicing process, in order to facilitate the peeling of the back sheet 71 from the semiconductor wafer 70, the adhesive force is reduced by reirradiating the ultraviolet light from the back surface of the semiconductor wafer 70 by the irradiation device 1.
As described above, the irradiation apparatus 1 is configured so that a predetermined degree of uniformity required for the dicing process can be obtained at the tip opening 4C of the auxiliary reflection unit 4, and therefore, the back sheet 71 is close to the tip opening 4C. Be placed. More precisely, in the present embodiment, a quartz glass plate (not shown) that is transparent to ultraviolet light having a thickness of about 1 cm is superimposed on the tip opening 4C of the auxiliary reflection unit 4 as a mounting stage for the semiconductor wafer 70. The back sheet 71 is placed on the quartz glass plate, and ultraviolet light is irradiated through the quartz glass plate.

Next, each part of the irradiation apparatus 1 will be described in detail.
The irradiator body 2 is configured in a substantially box shape having an upper box 5 with an open bottom and a lower box 6 that functions as a back cover that engages and closes the bottom opening of the upper box 5, and the light source unit 3, A lighting circuit 47 (FIG. 10) for lighting the light source unit 3 is accommodated. That is, the top surface 8 of the upper box 5 is provided with an irradiation opening 9 covered with quartz glass 10 that is transparent to ultraviolet light, and the light source unit 3 is mounted facing the irradiation opening 9. The lighting circuit 47 is housed in the remaining space of the irradiator body 2. As shown in FIG. 2, each of the upper box 5 and the lower box 6 is provided with an air supply / exhaust duct 7. Cooling air is sent from one of the air supply / exhaust ducts 7, and the built-in light source unit 3, The lighting circuit is cooled and exhausted from the other air supply / exhaust duct 7.

FIG. 5 is an exploded view of the light source unit 3, and FIG. 6 is a perspective view showing the entire configuration of the flash lamp 11 for convenience, in which the actual mounting state is reversed upside down. 7 is a schematic external side view showing a state in which the flash lamp 11 shown in FIG. 6 is turned upside down (to be actually mounted) and viewed from the side, and FIG. 8 is a side view of FIG. It is a typical sectional view expanding and showing the cathode neighborhood of a figure.
The light source unit 3 includes a flash lamp (lamp) 11 that emits pulsed light and a reflector 12.
The flash lamp 11 includes an arc tube 20 having a substantially double annular shape in which xenon gas (rare gas) of several tens of kPa is sealed. More specifically, the arc tube 20 includes an open annular inner tube portion 21 constituting an inner ring of a double annular shape, and an open annular outer tube portion 22 constituting an outer ring, respectively. A connecting portion 23 that connects the open ends of the two, and end portions 26 and 27 that stand integrally vertically downward at the other ends, and these are bent ozoneless quartz tubes having a circular cross section. Is formed. As shown in FIG. 8, the arc tube 20 of the present embodiment has an inner diameter I of 8 mm and an outer diameter Io of 10 mm (that is, a thickness of 1 mm).

  Although the inner tube portion 21 and the outer tube portion 22 of the arc tube 20 have some dimensional distortion, the center of the cross section of the tube is located on the same plane S (see FIGS. 7 and 8), and the double tube is almost accurate. An annular ring is formed. An anode 13 and an electrode core rod 28 for supporting the same are provided on the end 26 side of the arc tube 20, and a cathode 14 and an electrode core rod 29 for supporting the same are provided on the end 27 side. Yes.

  Further, the outer ends of the end portions 26 and 27 of the arc tube 20 are provided with electrode core rods 28 and 29 and a sealing portion (not shown) for sealing the outer ends of the arc tubes of the end portions 26 and 27. Bases 30 and 31 are arranged on the outer periphery of the sealing portion so as to surround it. The outer ends of the electrode cores 28 and 29 are electrically connected to terminals 32 and 33, respectively, as shown in FIG. In FIG. 6, illustration of the structure ahead of the outer end portions of the bases 30 and 31 is omitted.

  The reflecting plate 12 is made of, for example, a metal material that reflects ultraviolet light emitted from the flash lamp 11 and has conductivity, and has a substantially dish shape for housing the flash lamp 11 as shown in FIG. That is, the reflecting plate 12 has a flat plane portion 40 provided in the bottom in a plan view and a side surface portion 41 provided along the edge of the flat portion 40 and surrounding the flash lamp 11. Both the portion 40 and the side surface portion 41 reflect the ultraviolet light of the flash lamp 11 toward the irradiation opening 9. At this time, since the light emitted from the flash lamp 11 toward the flat surface portion 40 opposite to the irradiation opening 9 is reflected by the flat surface portion 40, the emitted light of the flash lamp 11 is efficiently used as irradiation light. The

  A large number of ventilation holes 45 penetrating the front and back surfaces are provided in the plane of the flat portion 40, and the cooling air sent from the air supply / exhaust duct 7 through the ventilation holes 45 enters the reflector 12. The incoming flash lamp 11 is cooled. These vent holes 45 are provided corresponding to the portion immediately below the arc tube 20 of the flash lamp 11 and are efficiently cooled by directly blowing cooling air onto the arc tube 20.

  The storage structure of the flash lamp 11 in the reflection plate 12 will be described. A plurality of mounting tables 42 on which the inner tube portion 21 of the arc tube 20 of the flash lamp 11 is mounted in the plane of the flat portion 40 of the reflection plate 12. And a plurality of restraining mechanisms 43 that pressurize the inner tube portion 21 of the arc tube 20 mounted on the mounting table 42 toward the flat surface portion 40 side. As shown in FIG. 8, the mounting table 42 has the arc tube 20 of the flash lamp 11 mounted thereon, and as shown in FIG. 8, the arc tube 20 is parallel to the flat surface portion 40 and separated by a predetermined distance T described later. Arranged. The restraining mechanism 43 is a mechanism in which a spring bar 44 is disposed transversely above the arc tube 20 placed on the mounting table 42 and pressurizes the arc tube 20 with the spring bar 44. The tube 20 is positioned at a predetermined position in the flat surface portion 40, and lifting is prevented. The storage structure of the flash lamp 11 in the reflection plate 12 will be described in detail later.

Here, the diameter of the flat portion 40 of the reflecting plate 12 is slightly larger than the diameter of the outer tube portion 22 of the arc tube 20 of the flash lamp 11 (that is, the maximum diameter of the flash lamp 11 having a substantially double ring shape). To the same extent). When the flash lamp 11 emits light, the entire flat portion 40 emits light due to light emission from the arc tube 20 and reflection on the flat portion 40, so that, for example, a plane configured by arranging light emitting elements such as LEDs at equal intervals. Functions like a light source.
The light emitted from the plane of the flat surface portion 40 is suppressed as the emitted light of the light source unit 3 through the irradiation opening 9 of the irradiator body 2 while suppressing the spread of the flat surface portion 40 in the radial direction by the side surface portion 41. The light enters the reflection unit 4. Then, ultraviolet light is irradiated so that a high degree of uniformity can be obtained in the vicinity of the tip opening 4 </ b> C by the reflection by the auxiliary reflection unit 4. A specific configuration of the auxiliary reflection unit 4 will be described later.

However, in the flash lamp 11, as the lighting time elapses, a blackening phenomenon occurs in the vicinity of the electrode, which causes a reduction in uniformity. Therefore, in the present embodiment, a decrease in the uniformity due to the blackening phenomenon is prevented as follows.
First, the configuration of the flash lamp 11 will be further described in detail.
The anode 13 of the flash lamp 11 is composed of, for example, a pure tungsten rod-shaped member having an outer diameter of φ7.5 mm. The cathode 14 combines a base 50 made of a pure tungsten rod-like member having the same diameter as the anode 13 and a tip 51 made of a columnar sintered body, and has the same length as the anode 13 as a whole. Configured. Of these, the tip 51 may have a length of, for example, about 1/5 of the total length of the cathode 14, and its outer diameter may be the same as or slightly smaller than the base 50. The sintered body of the tip portion 51 is provided for improving the startability of the lamp, and is composed of a mixture containing pure tungsten as a main component and a small amount of the metal composite oxide BaO.Al2O3.

  When electric power is supplied from the lighting circuit 47 between the anode 13 and the cathode 14, the entire discharge path between the anode 13 and the cathode 14 emits light and a light emitting region 52 is formed. Here, the semiconductor wafer 70 which is an object to be irradiated is arranged substantially in parallel with the plane S formed by the double ring of the arc tube 20. Therefore, the light emitted from the discharge regions of the end portions 26 and 27 including the vicinity of the anode 13 and the cathode 14 in the light emitting region 52 is such that the end portions 26 and 27 are both vertically downward with respect to the plane S (for convenience in FIG. 6). Because it is bent vertically upward), it does not reach the surface of the irradiated object directly and does not contribute effectively. Therefore, an area obtained by removing the discharge areas of the end portions 26 and 27 from the light emitting area 52 is referred to as an effective light emitting section 53.

  The effective light emitting portion 53 refers to a continuous portion composed of the inner tube portion 21, the outer tube portion 22, and the connecting portion 23 that form a double ring of the arc tube 20, and direct light is irradiated directly thereon. The Of the inner walls of the arc tube 20 constituting the effective light emitting portion 53, an inner wall closer to the end portions 26 and 27 bent vertically downward, that is, a plane S1 including the inner wall on the lower surface side of the arc tube 20 in the sectional view of FIG. Assuming that the protruding lengths of the end portions 26 and 27 from the plane S1 are both 60 mm, for example. The tip surfaces of the anode 13 and the cathode 14 (tip portion 51) are both slightly retracted with respect to the plane S1 (see FIG. 7). In this embodiment, the distance from the plane S1 is 5.0 mm. .

In the present embodiment, a getter 54 holding a composite metal made of ZrAl (zirconium aluminum) is installed on the outer surface of the core rod 29 on the cathode 14 side for adsorbing impure gas inside the arc tube 20. Yes.
The inner diameter I (FIG. 8) of the arc tube 20 at the end portions 26 and 27 is 8 mm on both the anode 13 side and the cathode 14 side, and the electrode center axis is substantially coincident with the center axis of the end portions 26 and 27 of the arc tube 20. Since the maximum diameter D (FIG. 8) of the electrode tip surfaces of the anode 13 and the cathode 14 is 7.5 mm, the outer surface of the rod-shaped body (base 50 in the case of a cathode) constituting the electrode emits light. The distance (gap) from the inner surface of the tube 20 is (8.0−7.5) /2=0.25 mm.

Under such a configuration, when a DC voltage is applied between the terminals 32 and 33 of the flash lamp 11, the flash lamp 11 causes flash discharge, and ultraviolet light including ultraviolet light generated by the emission of xenon enclosed in the arc tube 20, Visible light and near infrared light are emitted.
In this flash discharge, as described above, the light emitted from the effective light emitting portion 53 in the light emitting region 52 contributes to the irradiation of the irradiation target, and the remaining portions, that is, the light emission of the end portions 26 and 27 of the arc tube 20. Contributes little to the irradiation of the irradiated object. By disposing the anode 13 and the cathode 14 at the end portions 26 and 27, even if the spatter phenomenon of the anode 13 and the cathode 14 occurs and blackening occurs on the nearby tube surface, the influence on the uniformity is affected. Can be suppressed.

However, in the light source unit 3 of the present embodiment, the flash lamp 11 is surrounded by the reflecting plate 12 and the uniformity is increased including not only the direct light of the flash lamp 11 but also the reflected light of the reflecting plate 12. If the light reaching the plate 12 is affected by the blackening phenomenon, the degree of uniformity is lowered even if the direct light is not affected.
Therefore, in the present embodiment, as shown in FIG. 5, a through hole 55 is provided in a position corresponding to the end portions 26 and 27 of the flash lamp 11 in the flat surface portion 40 of the reflecting plate 12. With this configuration, when the flash lamp 11 is mounted on the mounting table 42 of the reflector 12, the end portions 26 and 27 are passed from the through hole 55 to the back surface side of the flat portion 40 and reflected as shown in FIG. 9. Located outside the plate 12.
Therefore, even if the blackening phenomenon occurs at the end portions 26 and 27 where the anode 13 and the cathode 14 are arranged, the degree of uniformity does not decrease due to the blackening phenomenon, and the illumination intensity on the irradiation surface due to the blackening phenomenon Since the decrease is suppressed, the illuminance maintenance rate at the end of the lifetime is improved.

Here, in the flash lamp 11, the end portions 26 and 27 of the arc tube 20 are bent substantially vertically to be positioned outside the effective light emitting portion 53 of the light emitting region 52, and further, these end portions 26 and 27 are disposed on the reflecting plate 12. However, in this configuration, since the end portions 26 and 27 of the arc tube 20 are extended to the outside of the reflector 12, the anode 13 disposed at these end portions 26 and 27 is used. , And the cathode 14 are separated from each other, and the starting performance is deteriorated.
Therefore, in the present embodiment, the decrease in the starting performance is compensated as follows.

FIG. 10 is a diagram schematically showing the electrical configuration of the irradiation apparatus 1.
As shown in FIG. 10, the irradiation apparatus 1 includes a DC power supply 34 that converts an AC commercial power supply 33 into DC, a booster inverter 35 that boosts the output voltage of the DC power supply 34 to a predetermined voltage, A rectifier circuit 36 that rectifies the output, a lighting circuit 47 that is lit by the output voltage of the rectifier circuit 36, and a control circuit 37 that controls these components are provided.

FIG. 11 is a circuit diagram of the lighting circuit 47. In the drawing, the shape of the arc tube 20 of the flash lamp 11 is shown as a straight tube for convenience.
The lighting circuit 47 is charged to a high potential by the output voltage of the rectifier circuit 36 and applied to the flash lamp 11, and a coil 39 (not shown in FIG. 10) interposed between the charging capacitor 38 and the flash lamp 11. ) And a starting circuit 49.
The starting circuit 49 is a circuit that starts the flash lamp 11 by applying a high voltage pulse Ph (about minus 10 to 15 kV) to the flash lamp 11, and includes a pulse transformer 49A. At the time of start-up, a high voltage pulse Ph is applied from the pulse transformer 49A, whereby the charging voltage Vc is applied to the flash lamp 11 through the charging capacitor 38, whereby a discharge path is formed between the anode 13 and the cathode 14, The entire discharge path emits light.

Further, the reflecting plate 12 and an external starting auxiliary electrode provided on the outer surface of the arc tube of the cathode portion of the flash lamp 11 are connected in parallel, and at the starting time, the reflecting plate 12 of the light source unit 3 from the pulse transformer 49A, and The high voltage pulse Ph is also applied to the external starting auxiliary electrode. The external starting auxiliary electrode is configured by providing a strip-shaped metal plate 82 called a trigger band on the outer surface of the arc tube of the cathode portion, and as described above, the high voltage pulse Ph having the same potential as the reflector 12 is applied. Start assistance with.
As described above, the reflecting plate 12 is formed of a conductive material, and the arc tube 20 of the flash lamp 11 is disposed in parallel to the flat portion 40 of the reflecting plate 12. When the high voltage pulse Ph is applied to the part 40, the planar part 40 functions as a proximity conductor to assist the starting, and the starting performance is improved.

FIG. 12 is a diagram showing a test result of the starting performance.
In this test, the distance T2 between the reflector 12 and the arc tube 20 of the flash lamp 11 and the charging voltage Vc are varied, and the rate of normal start with respect to the input of the 100-shot start pulse is measured. Further, in order to test the starting performance based on the proximity conductor effect by the reflecting plate 12, a high voltage pulse Ph having the same potential as the reflecting plate 12 is applied to the external starting auxiliary electrode made of the band-shaped metal plate 82 in the flash lamp 11. The test was performed with the aid of starting. Further, in the irradiation apparatus 100 of the comparative example of this test, as shown in FIG. 13, the outer surface of the arc tube 20 is surrounded by the periphery of the anode 13 and the cathode 14 of the end portions 26 and 27 on both sides. Band-shaped metal plates 81 and 82 called trigger bands are provided. In addition, a metal wire 83 is wound around the outer surface of the arc tube 20, and both ends of the metal wire 83 are connected to the band-shaped metal plates 81 and 82, respectively. The pair of strip metal plates 81 and 82 and the metal wire 83 (trigger wire) constitute an external starting auxiliary electrode, and a high voltage pulse Ph is applied to the external auxiliary electrode to apply the flash lamp 11. The structure which starts is used. In FIG. 13, the same members as those in FIG. 11 are denoted by the same reference numerals, and the description thereof is omitted.

As shown in this figure, by making the reflector 12 function as a proximity conductor, for example, when the charging voltage Vc is 2.4 kV, it can be seen that starting performance equivalent to that of the comparative example can be obtained.
However, it can be seen that as the distance T2 between the flat surface portion 40 of the reflecting plate 12 and the arc tube 20 of the flash lamp 11 is increased, the proximity conductor effect of the flat surface portion 40 is weakened and the starting performance is degraded. Therefore, it is desirable that the distance T2 is 10 mm or less at the maximum as the distance from which the proximity conductor effect can be obtained from the flat portion 40.

It can be seen from this start performance test that sufficient start performance can be obtained even when compared with the start assist system using the trigger wire. Therefore, in the application of the irradiation device 1, since the sufficient starting performance can be maintained by the proximity conductor method using the reflector 12, it is not necessary to use the starting assistance by the trigger line included in at least the external starting auxiliary electrode.
Further, when sufficient starting performance is obtained only by the proximity conductor effect of the reflecting plate 12 without starting assistance by the external starting auxiliary electrode made of the band-shaped metal plate 82, the external starting auxiliary electrode is omitted. You can also.

  Moreover, even if a blackening phenomenon occurs in the area of the effective light emitting portion 53 because the flat portion 40 of the reflecting plate 12 functions as a proximity conductor, blackening occurs in the flat portion 40 of the outer surface of the arc tube 20. Occurrence of the light on the side of the irradiation opening 9 is suppressed because it is generated at the opposite location, and the influence on direct light is suppressed.

Furthermore, by using the reflecting plate 12 as a proximity conductor, it is possible to reduce an early decrease in illuminance toward the irradiation surface due to yellowing of the arc tube 20.
More specifically, in general, in a flash lamp that allows a high current to flow instantaneously, as described in, for example, Japanese Patent Application Laid-Open No. 2001-185088, the arc tube yellows according to the number of flashes of the flash lamp. It is also known experimentally that this yellowing phenomenon occurs along the trigger line. For example, when a trigger wire made of a metal wire is spirally rotated on the outer surface of the arc tube, the number of flashes is increased and the quartz is spirally changed to yellow along the trigger wire. The part where such a change occurs causes a decrease in the transmittance of ultraviolet rays, resulting in a decrease in illuminance.

Although the detailed cause of this yellowing phenomenon has not been clarified, considering that this phenomenon occurs along the trigger line, the arc that is the base material of the arc tube is changing due to arc discharge at the time of light emission. is expected. An outline of arc discharge during light emission is as follows. When starting the lamp, a high voltage pulse (minus 10 kV to minus 20 kV) is applied between the trigger wire and the electrode, dielectric breakdown occurs through the arc tube, and it is enclosed inside the arc tube The generated xenon gas is ionized, and arc discharge is generated from the cathode tip due to the energy discharged from the capacitor, and the arc is transferred to and from the anode. Accordingly, the inventors have observed this situation using a high-speed camera, and as a result, have confirmed that arc discharge has occurred along the trigger line rotated around the arc tube. In other words, it is thought that quartz reacts with the rapid temperature rise during arc discharge, causing yellowing.
Thus, when the trigger wire is spirally arranged in the arc tube, yellowing of quartz occurs on the irradiation surface side. For this reason, there is a possibility that the illuminance maintenance rate is lowered early.

  On the other hand, in the irradiation apparatus 1 of this embodiment, since the high voltage pulse Ph is applied instead of the trigger wire using the reflector 12 as a proximity conductor, arc discharge occurs along the reflector 12. . For this reason, since yellowing occurs on the irradiated surface side and does not occur on the irradiated surface side, it is possible to prevent an early decrease in illuminance.

Next, the auxiliary reflection unit 4 will be described in detail.
As described above, the auxiliary reflection unit 4 has a substantially truncated cone shape in which the base end 4 </ b> A is connected to the irradiation opening 9 of the irradiator body 2, and transmits the ultraviolet light emitted from the light source unit 3 through the irradiation opening 9 on the inner periphery. The unit reflects the surface, realizes a predetermined degree of uniformity required in the dicing process or the like in the tip opening 4C, and allows the irradiation surface to be set in the vicinity including the tip opening 4C.
Thus, since the irradiation surface can be arranged in the vicinity including the tip opening 4C of the auxiliary reflection unit 4, the emitted light of the light source unit 3 can be irradiated with high illuminance compared to the case where the irradiation surface is far from the tip opening 4C. Can be irradiated.

However, the closer the irradiation surface is to the tip opening 4C, the more direct light from the light source unit 3 reaches the irradiation surface without spreading, and therefore, uneven illumination according to the light emission shape of the light source unit 3 tends to occur on the irradiation surface. It is difficult to obtain a high degree of uniformity.
Therefore, in the present embodiment, high uniformity is realized by suppressing illuminance unevenness at the tip opening 4C as follows.

That is, as shown in FIG. 1, the auxiliary reflecting unit 4 includes a first reflecting mirror 60 having a polygonal frustum-shaped reflecting surface 65, and a cylindrical reflecting surface connected to the tip 60A of the first reflecting mirror 60. The light reflected from the light source unit 3 is incident on the base end 4 </ b> A of the first reflecting mirror 60.
In this way, by entering the annular light emission from the base end 4A, even when the distance from the base end 4A to the tip opening 4C is relatively short, the direct light of the light source unit 3 is substantially circular on the irradiation surface. And a relatively uniform illuminance distribution is formed. At this time, by using the light source unit 3 as a surface light source, the illuminance distribution by direct light on the irradiation surface can be made more uniform.

The said 1st reflective mirror 60 raises the illumination intensity in the said irradiation surface by reflecting the light which spreads in the circumferential direction on an inner surface, and raises the illumination intensity in the said irradiation surface, The trapezoidal plate-shaped reflection plate 62 is followed along a circumference. Thus, a reflective surface 65 having a polygonal truncated pyramid shape is formed.
At this time, for example, when the inner surface of the first reflecting mirror 60 is a truncated cone (that is, a curved surface), the emitted light from the light source unit 3 can be irradiated to the irradiation surface with reduced loss, but the annular light emission is generated. Irradiance unevenness is difficult to be obtained because it is projected onto the irradiation surface, and a complicated device is required to make a truncated cone-shaped reflecting mirror from a single plate material.
In contrast, in the first reflecting mirror 60 of the present embodiment, the reflecting plate 62 is connected, so that the reflecting surface 65 on the inner peripheral surface is configured by connecting the planes by the plurality of reflecting plates 62. For this reason, the light emission images of the light source unit 3 projected from the respective planes are overlapped on the irradiation surface, and unevenness in the illuminance of the light source image on the irradiation surface is canceled out, and high uniformity is obtained.

However, at the front end 60A of the first reflecting mirror 60, the illuminance is more likely to be reduced at the edge than at the center. The illuminance cannot be made uniform over the entire surface.
Therefore, in the present embodiment, the second reflecting mirror 61 is provided at the tip 60 </ b> A of the first reflecting mirror 60. Unlike the reflecting surface 65 of the first reflecting mirror 60 that expands toward the tip 60A, the reflecting surface 66 of the second reflecting mirror 61 has a cylindrical shape with a constant diameter. That is, by connecting the second reflecting mirror 61 to the tip 60A of the first reflecting mirror 60, the tip 60A of the first reflecting mirror 60 rises substantially vertically by the second reflecting mirror 61, and the second reflecting mirror 61 The reflection at 61 compensates for a drop in illuminance at the edge of the irradiated surface.

  FIG. 14 is a diagram showing the illuminance distribution on the irradiated surface. In this figure, line A shows the case where the auxiliary reflecting unit 4 of this embodiment is used, line B is a comparative example, and the reflecting surface 65 of the first reflecting mirror 60 has a truncated cone shape (curved surface). In addition, a case where the second reflecting mirror 61 is not provided is shown. Line C is a comparative example, and shows a case where the second reflecting mirror 61 is not provided in the auxiliary reflecting unit 4 of the present embodiment.

As indicated by the line B, when the reflecting surface 65 of the first reflecting mirror 60 is in the shape of a truncated cone (curved surface) and the second reflecting mirror 61 is not present, an annular light emission shape is strongly reflected on the irradiation surface. As a result, a significant drop in illuminance is observed at the center of the irradiated surface and at the edge of the irradiated surface, resulting in uneven illuminance on the irradiated surface.
On the other hand, as shown by line C, it can be seen that uneven illumination on the irradiated surface is eliminated by making the reflecting surface 65 of the first reflecting mirror 60 into a polygonal frustum shape. However, when the auxiliary reflecting unit 4 is configured only by the first reflecting mirror 60, a drop in illuminance is observed at the edge of the irradiated surface (indicated by X in the figure).
On the other hand, as shown by the line A, by providing the second reflecting mirror 61 at the tip 60A of the first reflecting mirror 60, the drop in illuminance at the edge of the irradiation surface is compensated, and from the center to the edge. It can be seen that a uniform illuminance distribution is obtained over the entire irradiated surface and a high degree of uniformity is obtained.

Next, the storage structure of the flash lamp 11 in the reflecting plate 12 will be described in detail.
As described above, in the flash lamp 11, the arc tube 20 is mounted on the plurality of mounting tables 42 provided on the flat portion 40 of the reflector 12, and the arc tube 20 is applied to the flat portion 40 side by the restraining mechanism 43. It is pressed. In order to hold the flash lamp 11 stably, it is desirable that three mounting tables 42 are provided in the circumferential direction of the arc tube 20. These three mounting tables 42 do not necessarily have to be provided at regular intervals.

As shown in FIG. 5, the restraining mechanism 43 includes a support shaft 48 provided on the flat surface of the reflecting plate 12, a spring rod 44 extending from the support shaft 48 and attached rotatably around the support shaft 48. A holding portion 46 is configured to be detachably held in a state where the tip of the spring bar 44 is bridged between the support shaft 48. As shown in FIG. 15, the holding portion 46 is formed with a cutout portion 46 </ b> A formed by cutting out from one side. The notch 46A is formed in a substantially L shape with the end facing upward, and an engaging portion 46B into which the spring bar 44 is engaged is formed at the end. The spring bar 44 is held by the holding part 46 by engaging the tip part with the engaging part 46B via the notch part 46A.
When the inner tube portion 21 of the arc tube 20 is mounted on the mounting surface 42A of the mounting table 42, the spring bar 44 is rotated around the support shaft 48, and the tip is engaged with the engaging portion 46B of the holding portion 46. The pressure F1 of the spring rod 44 is applied to the inner tube portion 21 of the arc tube 20, and the arc tube 20 is held down against the mounting surface 42A.

  The mounting table 42 is formed such that the width W of the mounting surface 42A is wider than the tube diameter D1 of the inner tube portion 21, as shown in FIG. The mounting surface 42 </ b> A has a defining portion 90 that defines a normal position P <b> 1 that is a normal mounting position of the arc tube 20 of the flash lamp 11. The mounting surface 42A includes inclined surfaces 91 provided on both sides of the defining portion 90. The defining portion 90 is provided at the lowest portion of the recess formed by the inclined surface 91 on the mounting surface 42A. That is, the mounting surface 42A is inclined so as to gradually increase from the normal position P1 toward both sides in the width W direction. The defining portion 90 is provided in the vicinity of the center of the mounting table 42 in the width W direction, and is configured such that when the flash lamp 11 is manufactured with a reference dimension, the flash lamp 11 is mounted at the normal position P1. ing.

  As shown in FIG. 16A, the mounting surface 42A may be formed in a V-shaped cross section and gradually increase from the normal position P1 toward both sides in the width W direction. Further, as shown in FIG. 16B, the mounting surface 42A may be formed in a circular arc shape in cross section and gradually increase from the normal position P1 toward both sides in the width W direction. The regular position P1 is the same as that when the inner tube portion 21 of the arc tube 20 is placed on the placement surface 42A and the inner tube portion 21 is pressed against the placement surface 42A by the spring bar 44. The position P2 where the spring bar 44 contacts, the tube center C1 of the inner tube portion 21, and the normal position P1 are configured to be aligned on a straight line in the vertical direction.

FIG. 17 shows the inner tube portion 21 and the mounting table 42 when the bending radius of the inner tube portion 21 is smaller than the reference dimension within the minimum allowable dimension due to manufacturing errors or temperature changes of the arc tube 20. FIG. In FIG. 17, for the sake of convenience of explanation, the arc tube 20 only illustrates the inner tube portion 21.
FIG. 17A is a cross-sectional view of the mounting table 42 and the inner tube portion 21 as viewed from the direction of arrow A in FIG. When the bending radius of the inner tube portion 21 is made smaller than the reference dimension, or when the bending radius is reduced due to the temperature change of the arc tube 20, the inner tube portion 21 is formed as shown in FIG. In contact with the inclined surface 91 at the P _t1 position inside the normal position P1 of the mounting table 42. A pressure F <b> 1 of the spring bar 44 is applied to the inner tube portion 21 in a substantially vertical direction on the flat surface portion 40 side. Since the mounting surface 42A is inclined toward the both sides from the normal position P1, the inner pipe portion 21 mounted at the _Pt1 position inside the normal position P1 and shifted from the defining portion 90 is applied to the inner pipe portion 21. A side pressure F2 is generated between the inclined surface 91 and the component force of the pressure F1. Due to this side pressure F2, the flash lamp 11 is given a force for urging the arc tube 20 to move toward the defining portion 90.

The side pressure F <b> 2 is generated between each mounting table 42 and the inner tube portion 21 as shown in FIG. These lateral pressures F2 are balanced at the center C2 of the ring of the arc tube 20, and the resultant force at the center C2 is configured to be 0 (zero).
According to these configurations, the holding surface 42 </ b> A of the mounting table 42 is inclined to both sides with the defining portion 90 interposed therebetween, so that the inclined surface 91 is provided, and the pressing mechanism 43 is in a state where the arc tube of the lamp is displaced from the defining portion 90. When a pressurized pressure is applied, a lateral pressure is applied between the inclined surface 91 and the arc tube 20 to promote the movement of the arc tube 20 to the defining portion 90. Accordingly, even when the arc tube 20 is manufactured with a bending radius smaller than the reference dimension due to a manufacturing error or when the arc radius is reduced due to a temperature change of the arc tube 20, the arc tube 20 is given to the arc tube 20. The flash lamp 11 can be held so that the center C2 of the ring of the arc tube 20 is held at a predetermined position by the side pressure that promotes the movement to the defining portion 90.

  In addition, the arc tube 20 moves due to vibration during transportation or transportation, and the center position of the ring of the arc tube 20 is decentered from a predetermined position, that is, the center of the reflector 12 as shown in FIG. However, the arc tube 20 has a centering force to return the center position to the predetermined position by the combined force of the side pressure F2, and moves so that the center C2 matches the predetermined position. Further, the arc tube 20 has a ring center C2 even when there is a manufacturing error in the arc tube 20 due to vibration during light emission or when the arc tube 20 is displaced during transportation. Is aligned at a predetermined position, and the arc tube 20 can be held at the predetermined position. That is, by positioning the normal position P1 of the mounting table 42 with respect to the center of the reflector 12 in advance, there is a manufacturing error in the arc tube 20 or a positional deviation due to vibration during transportation. In addition, the center of the arc tube 20 and the center of the reflecting plate 12 can be easily matched and can be held in a matched state.

FIG. 18 shows the inner tube portion 21 when the arc tube 20 has a bending radius of the inner tube portion 21 larger than the reference dimension within the maximum allowable dimension due to manufacturing errors or temperature changes, and the mounting table 42. FIG. In FIG. 18, for the sake of convenience of explanation, the arc tube 20 only illustrates the inner tube portion 21.
18A is a cross-sectional view of the mounting table 42 and the inner tube portion 21 as viewed from the direction of arrow A in FIG. When the bending radius of the inner tube portion 21 is made larger than the reference dimension, or when the bending radius is expanded due to the temperature change of the arc tube 20, as shown in FIG. In contact with the inclined surface 91 at the P _t2 position outside the normal position P1 of the mounting table 42. A pressure F <b> 1 of the spring bar 44 is applied to the inner tube portion 21 in a substantially vertical direction on the flat surface portion 40 side. Since the mounting surface 42A is inclined toward the both sides from the normal position P1, the inner pipe portion 21 mounted at the _Pt2 position outside the normal position P1 and shifted from the defining portion 90 is provided A side pressure F2 is generated between the inclined surface 91 and the component force of the pressure F1. Due to this side pressure F2, the flash lamp 11 is given a force for urging the arc tube 20 to move toward the defining portion 90.

The side pressure F <b> 2 is generated between each mounting table 42 and the inner tube portion 21 as shown in FIG. These lateral pressures F2 are balanced at the center C2 of the ring of the arc tube 20, and the resultant force at the center C2 is configured to be 0 (zero).
According to these configurations, the holding surface 42 </ b> A of the mounting table 42 is inclined to both sides with the defining portion 90 interposed therebetween, so that the inclined surface 91 is provided, and the pressing mechanism 43 is in a state where the arc tube of the lamp is displaced from the defining portion 90. When a pressurized pressure is applied, a lateral pressure is applied between the inclined surface 91 and the arc tube 20 to promote the movement of the arc tube 20 to the defining portion 90. Thereby, even when the arc tube 20 is manufactured with a bending radius larger than the reference dimension due to a manufacturing error or when the bend radius is expanded due to a temperature change of the arc tube 20, the arc tube 20 is given to the arc tube 20. The flash lamp 11 can be held so that the center C2 of the ring of the arc tube 20 is held at a predetermined position by the side pressure that promotes the movement to the defining portion 90.

  As described above, according to the embodiment to which the present invention is applied, the reflecting plate 12 including the flat surface portion 40 having a circular shape in plan view and the side surface portion 41 provided along the edge portion of the flat surface portion 40, and the cross section A flash lamp 11 in which a circular arc tube 20 is bent into an annular shape, a plurality of mounting tables 42 provided on the flat surface portion 40 on which the arc tubes 20 of the flash lamp 11 are mounted, and mounted on the mounting table 42. A pressing mechanism 43 that pressurizes the arc tube 20 of the flash lamp 11 toward the flat surface portion 40, and the mounting surface 42 </ b> A of the mounting table 42 defines a normal position P <b> 1 of the arc tube 20 of the flash lamp 11. 90 and inclined surfaces 91 provided on both sides of the defining portion 90, and the inclined surfaces 91 are given by the pressing mechanism 73 in a state where the arc tube 20 of the flash lamp 11 is displaced from the defining portion 90. Pressure F1 is applied When it is, giving a lateral pressure F2 urging the movement of the arc tube 20 to the defining portion 90. Thereby, even when the arc tube 20 has a bending radius shift due to a manufacturing error, the center of the ring of the arc tube 20 and the center of the reflector 12 can be easily aligned.

  Further, according to the embodiment to which the present invention is applied, at least three mounting tables 42 are provided in the circumferential direction of the arc tube 20 of the flash lamp 11 on the flat surface portion 40, and the pressing mechanism 43 is connected to the arc tube 20. The resultant force of the side pressure F2 from each of the mounting tables 42 generated by the pressurization is balanced at the center of the ring of the arc tube 20 of the flash lamp 11. According to this configuration, since at least three mounting tables 42 are provided in the circumferential direction of the arc tube 20, the arc tube 20 can be stably held by the mounting table 42. Further, since the resultant force of the side pressure F2 generated between each mounting table 42 and the arc tube 20 is balanced at the center of the ring of the arc tube 20, there is a deviation from the reference dimension of the bending radius due to manufacturing error in the arc tube 20. Even in a certain place, since the arc tube 20 is aligned by the side pressure F2, the center of the ring of the arc tube 20 and the center of the reflector 12 can be easily aligned.

  Further, according to the embodiment to which the present invention is applied, the flash lamp 11 is a flash lamp that emits pulsed light and vibrates at the time of self-emission, and therefore is mounted by vibration at the time of self-emission and pressurization of the pressing mechanism 43. It moves by the side pressure F2 from the mounting table 42. Therefore, even if the arc tube 20 is moved by vibration during transportation or transportation and the arc tube 20 is eccentric, the lateral pressure generated between the arc tube 20 and the mounting table 42 due to vibration during light emission. The center C2 of the annular ring of the arc tube 20 is aligned at a predetermined position by F2. Therefore, the center of the ring of the arc tube 20 and the center of the reflector 12 can be easily matched.

  In addition, according to the embodiment to which the present invention is applied, the pressing mechanism 43 applies pressure to the arc tube 20 by the linear spring bar 44, and the spring bar 44 supports the weight of the flash lamp 11 and pressurizes the mounting table 42. A side pressure is generated between the inclined surface 91 and the inclined surface 91. According to this configuration, since the self-weight of the arc tube 20 can be supported by the spring bar 44, the storage structure of the flash lamp 11 can be suitably used for the irradiation device having the irradiation opening directed downward. The center of the ring of the tube 20 and the center of the reflector 12 can be easily aligned.

  The above-described embodiment is merely an example of one aspect of the present invention, and can be arbitrarily modified and applied without departing from the spirit of the present invention.

  Further, in the embodiment described above, the flash lamp 11 in which the arc tube shape of the effective light emitting portion 53 is a shape based on a double ring is described, but the flash lamp 11 of the present invention is not limited to this. The arc tube shape of the effective light emitting portion 53 may be a multiple ring in which many rings are combined, or may be a spiral shape or a spiral shape. In short, the effective light emitting portion 53 may be formed in a spiral shape (spiral shape), an annular shape, or a combination thereof so as to correspond to the circular tip opening 4C of the auxiliary reflection unit 4. However, it is a condition that the effective light emitting portion 53 is substantially on the same plane and is continuously formed from a tubular material.

DESCRIPTION OF SYMBOLS 1,100 Irradiation device 9 Irradiation opening C2 Center of annulus F1 Pressurization F2 Side pressure P1 Normal position 11 Flash lamp (lamp)
DESCRIPTION OF SYMBOLS 12 Reflector 20 Light emission tube 21 Inner tube part 22 Outer tube part 40 Plane part 41 Side surface part 42 Mounting base 42A Mounting surface 43 Holding mechanism 44 Spring bar (linear spring)
90 Regulatory part 91 Inclined surface

Claims (4)

A reflector having a circular plane part in a plan view and a side part provided along an edge of the plane part;
A lamp in which an arc tube having a circular cross section is bent into an annular shape;
A plurality of mounting tables provided on the flat surface, on which the arc tube of the lamp is mounted;
A pressing mechanism that pressurizes the arc tube of the lamp mounted on the mounting table to the plane portion side, and
The mounting surface of the mounting table has a defining part for defining a normal position of the arc tube of the lamp, and inclined surfaces provided on both sides sandwiching the defining part,
The inclined surface applies a lateral pressure that promotes movement of the arc tube to the defining portion when a pressure is applied by the pressing mechanism in a state where the arc tube of the lamp is displaced from the defining portion. Irradiation device. The irradiation device according to claim 1,
The flat portion is provided with at least three mounting tables in the circumferential direction of the lamp, and the resultant force of the side pressure from each of the mounting tables generated by the pressure applied to the arc tube by the pressing mechanism is the lamp. It is characterized by balancing at the center of the ring. The irradiation device according to claim 2,
The lamp is a flash lamp that emits pulsed light and vibrates during self-emission. It is an illuminating device in any one of Claims 1 thru | or 3, Comprising:
The pressing mechanism pressurizes the arc tube with a linear spring, and the linear spring supports the weight of the lamp and generates a side pressure with the inclined surface of the mounting table by the pressurization.

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