JP2014144510A - Sealed cover device of machine tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To heighten insulation effectiveness of a sealed cover device of a machine tool.SOLUTION: Double panel structure prefabricated materials b1, b2, b3, b4, c1, c2, c3, c4 having a cavity part v in the middle by combining a front panel member p1 and a rear panel member p2 are used as prefabricated materials constituting a sealed cover device 10.

Description

  The present invention is a sealed system in which a safety door is arranged in the center to make a worker installed on the base of a machine tool such as a grinding device, a cutting device, a lathe, a machining center, etc. safe from a tool (tool). The present invention relates to a cover device.

  When machining a workpiece on the work table with a machine tool, the worker's clothes and hands are not caught in the table or the machine tool so that the worker does not touch the working machine tool and touches the work table. Thus, a safety door that prevents contact between the operator and the machine tool is provided on the front surface of the frame of the machine tool. Conventionally, a sheet metal cover used for assembling a hermetic cover device of a machine tool is a welded integrated structure, and it takes a lot of time for sheet metal processing such as bending and welding of the sheet metal, and the weight of the sheet metal cover is heavy. Was hard.

  Therefore, a sealed cover assembly publication using a panel member and a support frame has been put to practical use. For example, Japanese Patent Application Laid-Open No. 2000-190160 (Patent Document 1) discloses a hermetic cover device for a machine tool that surrounds a machine tool with a front cover portion, left and right side cover portions, and an upper cover portion. A cover device for a machine tool characterized in that a soundproof member is interposed between the closing member and the opening in a cover device that is provided so that the opening can be opened and closed with a closing member. Is disclosed.

  Japanese Patent Laying-Open No. 2006-62030 (Patent Document 2) is a safety door of a machine tool in which a work table and a machine tool are mounted on a frame. And a transparent resin window plate is provided on the wall panel portion on the front side of the machine tool facing the machine tool so that the operator faces the machine tool. The safety door of the machine tool is provided. Is disclosed.

  Further, Japanese Patent Laid-Open No. 2006-68861 (Patent Document 3) discloses a safety door 10 so as to surround the bed 2 after assembling and manufacturing the machine tool 1 in which the work table 4 and the grinding wheel 3 are mounted on the bed 2. A hermetic cover device is disclosed in which the prefabric material of the constituent members is assembled and the sliding door type safety door 10 is installed later (see FIG. 3). In the safety door, a window plate 110 made of an L-shaped transparent resin plate is drawn into the left wall panel body 10b on the wall panel plate portion on the front side of the machine tool 1 facing the grinding wheel 3 so that the operator can pull out the safety door. Is provided.

Japanese Patent Laid-Open No. 2006-256612 (Patent Document 4) is a safety door of a machine tool in which a work table and a machine tool are mounted on a bed, and the safety door is formed by a wall panel plate. The wall panel plate portion on the front side of the machine tool facing the machine tool and the ceiling portion of the wall panel plate made of a transparent resin plate having an L-shaped cross section are provided so as to be openable and closable. And disclosing a machine tool safety door characterized in that the machine tool is enclosed in a sealed cover device including the safety door,
A) A vertical frame with a U-shaped cross section is set up on a plane U-shaped bottom frame with at least four traveling vehicles screwed to the bottom of the bottom frame and a vertical lifting jack. A left frame is formed by connecting a vertical frame on a horizontal frame having a U-shaped cross section, a window rail is attached to the horizontal frame, and a wall panel is attached to the right frame, B ) Elevate a vertical frame with a U-shaped cross-section on a flat U-shaped bottom frame with at least four traveling vehicles and vertical elevating jacks attached to the bottom of the bottom frame. A right wall panel body that is connected to form a right frame body, and a wall panel board is attached to the right frame body. C) A transparent resin plate having an L-shaped cross section that can cover the front and upper parts of the machine tool And a window plate comprising D) Prefabricated to at least three reinforcing connecting members including at least two auxiliary rail members installed between the wall panel body and the right wall panel body, and these prefabricated materials are disposed near the bed of the machine tool. Provided is a method of installing a safety door on a machine tool, characterized by being assembled into a safety door through the following steps.
(1) The window plate C is drawn into the left wall panel body A in advance.
(2) The left wall panel body or right wall panel body, which has been adjusted in advance so that the lower position of the lifting jack is higher than the lower position of the traveling vehicle, travels in the vicinity of the bed side wall of the machine tool. Stop the traveling vehicle at the position.
(3) The right wall panel body or the left wall panel body, which has been adjusted in advance so that the lower position of the lifting jack is higher than the lower position of the traveling vehicle, travels in the vicinity of the bed side wall of the machine tool. Stop the traveling vehicle at the position.
(4) The left wall panel body and the right wall panel body are lifted by raising the left wall panel body and the right wall panel body with the lifting jack and floating the lower part of the traveling vehicle from the floor surface, and landing the bottom of the lifting jack. Position the body.
(5) The left wall panel body and the right wall panel body are connected by two auxiliary rail members and a reinforcing connection member.
(6) Assemble the safety door that surrounds the bed of the machine tool by lowering the left wall panel body and the right wall panel body with the lifting jack and attaching the lower part of the traveling vehicle to the floor surface.
(7) Pull out the window plate C from the left wall panel and place it in front of the work tool.

Japanese Patent Laid-Open No. 2008-149401 (Patent Document 5) discloses a portal type formed by spanning an upper beam between upper end portions of a pair of left and right support frames that are fixedly installed on a bed of a machine tool. The shutter frame is provided with a door that can be opened and closed, and the front shutter that covers the front side of the table of the machine tool, and the left and right side surfaces of the table that are supported by both sides of the shutter frame and at least one of the beds are covered. A cover structure including a left side panel and a right side panel,
Each of the left and right side panels includes an upper side panel and a lower side panel, the lower side panel is supported by at least one of the shutter frame and the bed, and the upper side panel is an upper part of the lower side panel. In addition, each support frame of the shutter frame is connected to the lower support frame by a hinge of the upper support frame, and each upper support frame is accompanied by the upper beam. A cover structure for a machine tool is disclosed, wherein the cover structure is provided so as to be tiltable with respect to the lower support frame in a vertical plane along the front-rear direction of the table.

  On the other hand, as a super-precision machine tool, in a chemical mechanical polishing apparatus for a semiconductor substrate assembled in a room formed by a sealed wall and a ceiling installed in a clean room room, the substrate In order to minimize the temperature change of the substrate temperature drop due to the generation of frictional heat with the pad and the supply of the abrasive liquid, a constant temperature / humidity adjusting device is connected in the room, and the surface roughness (Ra) However, it has been practiced to manufacture a polished semiconductor substrate having several nanometers to several tens nanometers.

  Further, as an ultra-precise metal machine tool, Japanese Patent Laid-Open No. 2012-179686 (Patent Document 6) fixes a workpiece with a coolant liquid from a pair of workpiece surface coolant liquid supply pipes attached before and after a machine frame of a surface grinding apparatus. Always supply to the surface of the magnetic chuck and form a coolant film over the entire surface of the magnetic chuck to keep the temperature of the entire workpiece constant. A method for producing a ground workpiece having a surface roughness (Ra) of several tens of nanometers while supplying is presented.

In addition, at the JIMTOFF2012 international exhibition held in November 2012, a magnetic (electromagnetic) chuck is equipped with a magnetic chuck cooling water / magnetic chuck temperature adjustment device, with a hermetic cover that minimizes the temperature change range during workpiece grinding. A covered ultra-precision grinder was on display. There has also been proposed a mother machine in which a work holder is provided with a holder cooling water / holder heating mechanism, and a constant temperature / humidity adjusting device is communicated in a sealed cover room surrounding the mother machine. Also, the installation of a numerically controlled temperature controller for the coolant supplied to the coolant supply nozzle has been proposed.

JP 2000-190160 A JP 2006-068861 A JP 2006-068861 A JP 2006-256612 A JP 2008-149401 A JP 2012-179686 A

  The ultra-precision machine tool surrounded by the hermetic cover described in the above-mentioned patent document can produce a workpiece having a surface roughness of several tens of nanometers to several hundred nanometers, but several nanometers to several tens of nanometers like a CMP apparatus. It has been difficult to produce a surface-polishing workpiece such as the above.

  The inventors have obtained a hint that a CMP apparatus surrounded by a sealed cover chamber in a constant temperature and humidity environment provides a polished substrate having a roughness of about 2 nm, and a pre-structure member of the sealed cover apparatus. When the fabric material is used as a double panel structure prefabric material having a hollow portion in the middle by combining the front panel member and the rear panel member, the temperature inside the sealed cover device of the machine tool is affected by the temperature outside the sealed cover device. Focusing on the small degree, the heat insulation effect of the hermetic cover device by using this double panel structure prefabric material as the front wall of hermetic cover device, rear wall of hermetic cover device, left side wall, right side wall and ceiling material I came up with the idea of improving

  An object of this invention is to provide the sealing cover apparatus of the machine tool which has the action point which a tool and a workpiece | work contact in the center part of a base.

The invention according to claim 1 is a hermetic cover device for a machine tool installed at a central portion of a base at which an action point at which a tool and a workpiece come into contact, wherein the hermetic cover device surrounds the action point. (A1), a central cover material (A2) and a rear side wall material (a3), and a front cover fabric portion (A), which is attached to the left side of the closed cover central fabric portion (A). A sealing cover left side fabric part (B) composed of a left side prefabric material (b1), a left side ceiling prefabric material (b2), a rear left side wall material (b3) and a left side wall prefabric material (b4); Front right prefabric material (c1), right ceiling prefabric material (c2) and rear right wall material (c) attached to the right side of the cover center fabric portion (A) ) And the left side wall prefabric material (c4), the prefabric material forming the right side fabric portion (C) of the sealing cover is fixed to a frame body such as a support frame, a fixed frame, a beam, or a rail, a sill, A hermetic cover device assembled and manufactured to surround a machine tool by movably fixing on a sliding member such as a beam,
At least the prefabric material (b1, b2, b3, b4) constituting the sealing cover left side fabric part (B) and the prefabric material (c1, c2, c3) constituting the sealing cover right side fabric part (C) , C4) is a double panel structure prefabric material having a hollow portion (v) in the middle by combining the front panel member (p1) and the rear panel member (p2), and sealing the machine tool A cover device 10 is provided.

  The invention according to claim 2 provides the hermetic cover device 10 according to claim 1, wherein the cavity (v) of the double panel structure prefabricated material is filled with a heat insulating material. is there.

  By adopting a double panel structure prefabric material having a hollow portion in the middle by combining the front panel member (p1) and the rear panel member (p2) as the prefabric material, the heat insulation effect of the hermetic cover device is improved, The degree of being affected by changes in the outside air temperature outside the hermetic cover device during machining with a tool is reduced. Therefore, it is possible to obtain a processed workpiece with higher precision by machining.

  As a countermeasure against changes in the outside air temperature when the front opening / closing door (a1) and the central ceiling member (a2) of the hermetic cover device are not of a double panel structure, the cooling liquid is poured down over the entire magnetic chuck as described in Patent Document 6. By adding a magnetic chuck temperature adjuster and a numerical control temperature control device for the coolant to the machine tool, the effect of changes in the outside air temperature is made smaller.

FIG. 1 is a development view of a double-panel structure prefabric material for a hermetic cover device. 2A and 2B are perspective views of the hermetic cover device, in which FIG. 2A shows a diagram viewed from the upper right side and FIG. 2B shows a diagram viewed from the lower left side. FIG. 3 is a perspective view of a hermetic cover device having a sliding door type opening / closing door and a ceiling viewing window in the center. (Known)

  The expanded eight-panel prefabricated material (b1, b2, b3, b4, c1, c2, c3, c4) shown in FIG. 1 includes a front panel member (p1) and a rear panel member (p2). It is a double-panel structure prefabric material having a cavity (v) in the middle in combination. The cavity (v) of these double panel structure prefabric materials may be filled with heat-insulating foam particles such as foamed polystyrene beads, foamed low density polyethylene beads, foamed polypropylene beads, and foamed polyurethane. Further, a heat insulating foamed sheet such as a foamed polyurethane block cut sheet, a mold foamed polystyrene block cut sheet, a mold foamed polyethylene block cut sheet, a mold foamed polypropylene block cut sheet, or an extruded foamed polyethylene sheet may be inserted.

  FIG. 2 is a perspective view of the hermetic cover device (10) before the central ceiling member (a2) and the rear wall member (a3) are attached, with the front left prefabric material (b1) and the left ceiling prefabric material (b2). And a left side fabric part (B) of the hermetic cover composed of the left side wall material (b3) and the left side wall prefabric material (b4), and the front part attached to the right side of the central fabric part (A) of the hermetic cover The pre-form which forms the right side fabric part (C) of the sealing cover composed of the right side pre-fabric material (c1), the right side ceiling pre-fabric material (c2), the rear right side wall material (c3) and the left side wall pre-fabric material (c4). The fabric material is fixed to the support frame and the fixed frame with bolts and rivets, and the front open / close door (a1) is movably fixed on the rail to surround the machine tool. It is a perspective view of the sealing cover device in the middle of the assembly (10) such that.

3 is a hermetic cover device having a sliding door type opening / closing door and a ceiling viewing window at the center, like the sealing cover device (10) shown in FIG. 3, wherein the opening / closing door and the ceiling viewing window are formed of a single-layer panel. If the machine tool is used, as shown in Patent Document 6, the cooling liquid is poured down over the entire magnetic chuck, and a magnetic chuck temperature controller and a numerical control temperature adjusting device for the cooling liquid are attached to the machine tool to reduce the outside air temperature. Try to make the impact of change smaller.

  If it is a hermetic cover device (10) in which it is not necessary to provide a transparent window necessary for observing the working point of the machine tool on the central ceiling prefabric material (a2) and the rear side wall prefabric material (a3), these prefabric materials From the viewpoint of improving the heat insulation effect, it is possible to adopt a double panel structure prefabric material having a hollow portion (v) in the middle by combining the front panel member (p1) and the rear panel member (p2) as (a2, a3). preferable.

In the assembly of the hermetic cover device described in Patent Document 3, the back side of the prefabric material is fixed to the fixed frame, the beam, and the standing frame with bolts and rivets, so the assembly space of the hermetic cover device is narrow and the assembly work is troublesome. However, in the present invention, the prefabric material (b1, b2, b3, b4, c1, c2, c3, c4) is attached to the fixed frame, the beam, and the standing frame from the surface side of the prefabric material with bolts and rivets (n). Since it can also fix, the assembly space of a sealing cover apparatus can be taken widely, and an assembly operation becomes easy.

  If you do not want to see bolts or rivets on the exterior of the hermetic cover device (10), attach a printed wrap film to the surface of the pre-fabric material except the open / close door (a1) and the transparent window of the hermetic cover device. The fixing surface is concealed to improve the appearance of the hermetic cover device (10). Examples of the printed wrap film include those printed with black betag ravia on the surface of synthetic paper “YUPO” (trade name) for poster paper manufactured by YUPO Corporation, or those obtained by screen printing photographic images.

  By making the prefabric material constituting the hermetic cover device (10) a double-panel structure having a hollow portion and improving the heat insulating property of the hermetic cover device (10), the change in the outside air temperature outside the hermetic cover device is affected by the action of the machine tool. Since the influence on the point temperature can be reduced, a workpiece having a surface roughness (Ra) of several nanometers to several tens of nanometers can be obtained.

10 Sealing Cover Device A Sealing Cover Center Fabric Part a1 Front Opening Door a2 Center Ceiling Material a3 Rear Side Wall Material B Sealing Cover Left Side Fabric Part b1 Front Left Prefabric Material b2 Left Ceiling Prefabric Material b3 Rear Left Wall Material b4 Left Side Wall Prefabricated material C Sealed cover right side fabric part c1 Front right side prefabric material c2 Right side ceiling prefabric material c3 Rear right side wall material c4 Left side wall prefabric material p1 Front panel member p2 Rear panel member v Cavity n Bolt

Claims (2)

A sealing cover device of a machine tool installed at a central portion of a base at which an operating point at which a tool and a workpiece come into contact is provided. The sealing cover device surrounds the operating point, and includes a front opening / closing door (a1) and a central ceiling member. (A2) and a rear cover side wall material (a3), a closed cover center fabric portion (A), and a front left prefabric material (b1) attached to the left side of the closed cover center fabric portion (A). A left-side ceiling prefabric material (b2), a rear left-side wall material (b3), and a left-side wall prefabric material (b4). ) Attached to the right side of the front right prefabric material (c1), right ceiling prefabric material (c2), rear right wall material (c3) and left side wall pre. The prefabric material that forms the right side fabric portion (C) of the sealing cover made of the brick material (c4) is fixed to a frame body such as a support frame, a fixed frame, or a beam, or a sliding member such as a rail, a sill, or a beam It is a hermetic cover device that is assembled and manufactured so as to be movably fixed and surround the machine tool,
At least the prefabric material (b1, b2, b3, b4) constituting the sealing cover left side fabric part (B) and the prefabric material (c1, c2, c3) constituting the sealing cover right side fabric part (C) , C4) is a double panel structure prefabric material having a hollow portion (v) in the middle by combining the front panel member (p1) and the rear panel member (p2), and sealing the machine tool Cover device (10).   The hermetic cover device (10) according to claim 1, wherein the cavity (v) of the double-panel structure prefabric material is filled with a heat insulating material.

Images