JP2014142339A5 - - Google Patents

Claims (1)

An illuminating device for irradiating the imaging object with light;
An imaging device that receives reflected light from the imaging target based on the irradiation of the light; and
An imaging element that is present in the imaging device and receives the reflected light; and
In the inspection apparatus for acquiring either or both of the two-dimensional image and the three-dimensional image of the imaging target,
A polarizer is installed between the illumination device and the imaging target,
Installing an analyzer between the imaging object and the imaging device;
The transmission axis direction of the polarizer and the transmission axis direction of the analyzer are in a vertical relationship,
Suppressing the occurrence of difficult-to-identify regions in one or both of the two-dimensional image and the three-dimensional image,
The difficult-to-identify areas include any of the following (a), (b), (c), (d), (e), (f), (g) (a) a transparent substance contained in solder or Difficult identification area due to translucent material (b) Difficult identification area (c) Metal surface for mounting parts that may occur at the location where the surface shape of the solder resist provided on the substrate changes Difficult-to-identify areas that may occur between the solder surface (d) Difficult-to-identify areas that may occur in places where the shape of the surface of the coating layer provided on the substrate changes (e) The surface of the tablet Difficult-to-identify region (f) that may occur at the location where the shape of the metal changes (f) Due to scratches on the difficult-to-identify region (g) metal mask that may occur between the surface of the solder and the solder surface An inspection device characterized by a difficult-to-identify area.