JP2014138295A - Resonator, filter and filter bank - Google Patents

Resonator, filter and filter bank Download PDF

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Publication number
JP2014138295A
JP2014138295A JP2013006230A JP2013006230A JP2014138295A JP 2014138295 A JP2014138295 A JP 2014138295A JP 2013006230 A JP2013006230 A JP 2013006230A JP 2013006230 A JP2013006230 A JP 2013006230A JP 2014138295 A JP2014138295 A JP 2014138295A
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metal plate
ground conductor
conductor
signal conductor
metal
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JP6079251B2 (en
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Akemichi Hirota
明道 廣田
Satoru Owada
哲 大和田
Masahiko Komaki
昌彦 小牧
Ayaji Sato
綾司 佐藤
Kiyokazu Saito
清和 斎藤
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a resonator which can reduce characteristic variation due to etching error and restrain breakage and temporal change in characteristics of a signal conductor even when subjected to mechanical vibration.SOLUTION: A resonator includes: a metal housing; a flat plate-like first metal plate having a first ground conductor which is fixed to the metal housing, and a first signal conductor which extends from the first ground conductor and whose length is equal to odd number times of 1/4 wavelength of a predetermined operation frequency; and a flat plate-like second metal plate having a second ground conductor which is joined to the first ground conductor, and a second signal conductor which is joined to the first signal conductor so that the marginal part thereof to be jointed to the first signal conductor is arranged on the side more inward than the marginal part of the first signal conductor when viewed from the vertical direction of the joint surface.

Description

この発明は、マイクロ波帯で使用される共振器及び共振器を用いたフィルタ、フィルタバンクに関するものである。   The present invention relates to a resonator used in a microwave band, a filter using the resonator, and a filter bank.

従来の共振器を用いた分布定数帯域通過フィルタは、入出力端子間に一方の先端が地導体に接続され、一方の先端は開放された、通過帯域で長さが約1/4波長の奇数倍となる信号導体(先端開放スタブ)を、所望の電気特性が得られるように複数配置することで、実現される。(例えば、非特許文献1参照)。   A conventional distributed constant bandpass filter using a conventional resonator has one end connected to the ground conductor between the input and output terminals, and the other end opened, and is an odd number of about 1/4 wavelength in the passband. This is realized by arranging a plurality of doubled signal conductors (open end stubs) so as to obtain desired electrical characteristics. (For example, refer nonpatent literature 1).

G. Matthaei 他、"Microwave Filters, Impedance-Matching Networks, and Coupling Structures", p.614. (Artech House, 1980年出版)G. Matthaei et al., "Microwave Filters, Impedance-Matching Networks, and Coupling Structures", p.614. (Artech House, 1980)

しかしながら、従来技術には次のような課題がある。
低損失化のために、誘電体基板を用いず中空トリプレート線路、中空コプレナー線路、または中空マイクロストリップ線路等を用いて従来の帯域通過フィルタを実現した場合、長さが約1/4波長の奇数倍となる先端が開放された信号導体の先端付近は、機械的に支持されない。このため、薄い金属板を用いて帯域通過フィルタを実現した場合、外部から振動が加わると、信号導体が機械的に共振し、長い時間が経過すると信号導体と地導体を接続する部分(信号導体の根元部分)が金属疲労により破断するという問題がある。
However, the prior art has the following problems.
When a conventional bandpass filter is realized using a hollow triplate line, a hollow coplanar line, or a hollow microstrip line without using a dielectric substrate to reduce loss, the length is about 1/4 wavelength. The vicinity of the front end of the signal conductor having an open end that is an odd multiple is not mechanically supported. For this reason, when a band-pass filter is realized using a thin metal plate, when a vibration is applied from the outside, the signal conductor mechanically resonates. There is a problem that the base part of the rupture occurs due to metal fatigue.

また、薄い金属板を用いて帯域通過フィルタを実現した場合に外部から振動が加わると、信号導体が機械的に振動するため、フィルタを構成する共振器の共振周波数が時間的に変化することから、フィルタの特性が時間的に変化するという問題がある。   In addition, when a band-pass filter is realized using a thin metal plate, if a vibration is applied from the outside, the signal conductor mechanically vibrates, so that the resonance frequency of the resonator constituting the filter changes with time. There is a problem that the characteristics of the filter change with time.

一方、外部から振動が加わっても信号導体の破断や時間的な特性変化を起き難くする方法として、信号導体を形成する金属板の厚みを厚くする方法がある。しかし、金属板の両側からエッチング液をかけることでエッチングする両面エッチング加工により金属板を加工した場合、一般にエッチング誤差は金属板の厚みのおよそ±10%となり、金属板の片側からエッチング液をかける片面エッチング加工を用いた場合、金属板の厚みのおよそ±100%にもなる。つまり、エッチングにより金属板を加工した場合、金属板の厚みが厚くなるとエッチング誤差が大きくなることから、信号導体等の寸法ばらつきが大きくなる。このため、フィルタ特性がばらつくという問題がある。   On the other hand, there is a method of increasing the thickness of the metal plate forming the signal conductor as a method for making it difficult for the signal conductor to break or change in time characteristics even when vibration is applied from the outside. However, when a metal plate is processed by double-sided etching that etches by applying an etchant from both sides of the metal plate, the etching error is generally about ± 10% of the thickness of the metal plate, and the etchant is applied from one side of the metal plate. When single-sided etching is used, the thickness is approximately ± 100% of the thickness of the metal plate. That is, when the metal plate is processed by etching, the etching error increases as the thickness of the metal plate increases, so that the dimensional variation of the signal conductor and the like increases. For this reason, there is a problem that the filter characteristics vary.

すなわち、エッチング誤差を小さくなるように、薄い金属板を用いて帯域通過フィルタを実現した場合には、外部から振動が加わると信号導体の破断や時間的な特性変化が起こる。一方、外部から振動が加わっても信号導体の破断や時間的な特性変化が起きないようにするために、厚い金属板を用いて帯域通過フィルタを実現した場合には、エッチング誤差が大きくなり、フィルタ特性がばらつくという問題がある。   That is, when a band-pass filter is realized by using a thin metal plate so as to reduce an etching error, the signal conductor is broken or temporal characteristics are changed when vibration is applied from the outside. On the other hand, when a bandpass filter is realized using a thick metal plate in order to prevent breakage of the signal conductor and temporal characteristic change even when vibration is applied from the outside, the etching error becomes large, There is a problem that the filter characteristics vary.

この発明は、上記のような課題を解決するためになされたものであり、エッチング誤差による特性ばらつきを低減しつつ、機械的な振動が加わっても信号導体の破断や時間的な特性変化が起き難い共振器、及び帯域通過フィルタ、フィルタバンクを得ることを目的としている。   The present invention has been made in order to solve the above-described problems. While reducing characteristic variations due to etching errors, signal conductors are broken or temporal characteristics are changed even when mechanical vibration is applied. The object is to obtain a difficult resonator, a band-pass filter, and a filter bank.

この発明に係る共振器は、
金属筐体と、
平板状であり、前記金属筐体に固定される第1の地導体、前記第1の地導体から延伸し長さが所定の動作周波数における1/4波長の奇数倍である第1の信号導体、を有する第1の金属板と、
平板状であり、前記第1の地導体に接合される第2の地導体、前記第1の信号導体に接合される部分の縁部が接合面の垂直方向から見て前記第1の信号導体の縁部よりも内側となるように前記第1の信号導体に接合される第2の信号導体、を有する第2の金属板と、
を備えたことを特徴とするものである。
The resonator according to the present invention is:
A metal housing;
A first ground conductor fixed to the metal casing, and a first signal conductor extending from the first ground conductor and having a length that is an odd multiple of a quarter wavelength at a predetermined operating frequency. A first metal plate having
The first signal conductor is flat and has a second ground conductor joined to the first ground conductor and an edge of a portion joined to the first signal conductor as viewed from a direction perpendicular to the joint surface. A second metal plate having a second signal conductor joined to the first signal conductor so as to be inside the edge of
It is characterized by comprising.

この発明に係る共振器の効果は、薄い金属板を複数枚重ねることで、外部から機械的な振動が加わっても機械的な強度が増加するため、信号導体が破断しづらいこと、時間的な特性変化が起き難いこと、である。   The effect of the resonator according to the present invention is that by overlapping a plurality of thin metal plates, the mechanical strength increases even when mechanical vibration is applied from the outside. It is difficult for characteristic changes to occur.

また、薄い金属板をエッチング加工するため、エッチング誤差を小さくできることから、エッチング誤差による特性変動を小さくできるという効果もある。   In addition, since the thin metal plate is etched, the etching error can be reduced, so that the characteristic fluctuation due to the etching error can be reduced.

また、第1の金属板と第2の金属板を重ねて接続する場合、一般にはエッチング誤差や、第1の金属板と第2の金属板間の位置ずれ等の製造誤差により、第1の金属板と第2の金属板は位置がずれて接合される可能性がある。このとき、第1の信号導体から第2の信号導体がはみ出た場合、電気的には共振器の幅や長さが変化したことと等価となるため、共振周波数が変動するという問題がある。しかし、上記のような製造誤差が生じても、第2の信号導体の縁が第1の信号導体の縁よりはみ出さず、且つ第2の信号導体側の第2の地導体の縁が第1の地導体の縁からはみ出さないように寸法を決定することで、第2の信号導体の縁が第1の信号導体及び第1の地導体の縁からはみ出さないようにすることができる。第1の信号導体の方が、第2の信号導体よりも線路幅が広く長いため、第1の信号導体、及び第1の地導体の形状により共振器の特性がほぼ決定されることから、上記のようなエッチング誤差や金属板の位置ずれ等の製造誤差が生じても、共振器の特性変化を小さくできるという効果がある。   In addition, when the first metal plate and the second metal plate are overlapped and connected, generally, the first metal plate and the second metal plate are connected due to a manufacturing error such as an etching error or a positional deviation between the first metal plate and the second metal plate. There is a possibility that the metal plate and the second metal plate are joined with their positions shifted. At this time, when the second signal conductor protrudes from the first signal conductor, it is electrically equivalent to a change in the width and length of the resonator, and there is a problem that the resonance frequency varies. However, even if a manufacturing error as described above occurs, the edge of the second signal conductor does not protrude from the edge of the first signal conductor, and the edge of the second ground conductor on the second signal conductor side By determining the dimensions so as not to protrude from the edge of the first ground conductor, the edge of the second signal conductor can be prevented from protruding from the edges of the first signal conductor and the first ground conductor. . Since the first signal conductor has a wider line width than the second signal conductor, the characteristics of the resonator are substantially determined by the shape of the first signal conductor and the first ground conductor. Even if manufacturing errors such as the above-described etching errors and metal plate misalignment occur, there is an effect that the characteristic change of the resonator can be reduced.

また、第1の金属板の厚みを薄くし、第2の金属板の厚みを厚くすることで、共振周波数を決定する第1の金属板のエッチング誤差を更に小さくしつつ、第2の金属板により機械的強度を保つことができる。つまり、第1の金属板の厚みを薄くし、第2の金属板の厚みを厚くすることで、共振周波数の調整が不要であり、外部から機械的な振動が加わっても信号導体が破断しづらく、時間的な特性変化も起き難い共振器を実現できるという効果もある。   Further, by reducing the thickness of the first metal plate and increasing the thickness of the second metal plate, the etching error of the first metal plate that determines the resonance frequency is further reduced, and the second metal plate. Thus, the mechanical strength can be maintained. In other words, by reducing the thickness of the first metal plate and increasing the thickness of the second metal plate, it is not necessary to adjust the resonance frequency, and the signal conductor breaks even when mechanical vibration is applied from the outside. There is also an effect that it is possible to realize a resonator that is difficult to change with time.

この発明の実施の形態1による共振器を示す構成図1 is a configuration diagram showing a resonator according to a first embodiment of the invention. この発明の実施の形態1による共振器の一部を示す上面図Top view showing a part of the resonator according to the first embodiment of the present invention. この発明の実施の形態1による共振器を示す断面図Sectional drawing which shows the resonator by Embodiment 1 of this invention この発明の実施の形態1による共振器の一部を示す上面図Top view showing a part of the resonator according to the first embodiment of the present invention. この発明の実施の形態1による共振器を示す断面図Sectional drawing which shows the resonator by Embodiment 1 of this invention この発明の実施の形態1による共振器の一部を示す上面図Top view showing a part of the resonator according to the first embodiment of the present invention. この発明の実施の形態1による共振器を示す構成図1 is a configuration diagram showing a resonator according to a first embodiment of the invention. この発明の実施の形態1による共振器の一部を示す上面図Top view showing a part of the resonator according to the first embodiment of the present invention. この発明の実施の形態1による共振器を示す断面図Sectional drawing which shows the resonator by Embodiment 1 of this invention この発明の実施の形態1による共振器の一部を示す上面図Top view showing a part of the resonator according to the first embodiment of the present invention. この発明の実施の形態1による共振器を示す断面図Sectional drawing which shows the resonator by Embodiment 1 of this invention この発明の実施の形態1による共振器を示す断面図Sectional drawing which shows the resonator by Embodiment 1 of this invention この発明の実施の形態2によるフィルタの一部を示す上面図Top view showing a part of a filter according to Embodiment 2 of the present invention. この発明の実施の形態2によるフィルタを示す断面図Sectional drawing which shows the filter by Embodiment 2 of this invention この発明の実施の形態2によるフィルタの一部を示す上面図Top view showing a part of a filter according to Embodiment 2 of the present invention. この発明の実施の形態2によるフィルタを示す断面図Sectional drawing which shows the filter by Embodiment 2 of this invention この発明の実施の形態3によるフィルタバンクを示す構成図Configuration diagram showing a filter bank according to a third embodiment of the present invention この発明の実施の形態3によるフィルタバンクの一部を示す上面図Top view showing a part of a filter bank according to Embodiment 3 of the present invention この発明の実施の形態3によるフィルタバンクを示す断面図Sectional drawing which shows the filter bank by Embodiment 3 of this invention この発明の実施の形態3によるフィルタバンクを示す断面図Sectional drawing which shows the filter bank by Embodiment 3 of this invention

以下、この発明の中空線路を用いた共振器、及びフィルタの好適な実施の形態につき図面を用いて説明するが、各図において同一、または相当する部分については、同一符号を付して説明する。   Hereinafter, preferred embodiments of a resonator and a filter using a hollow line according to the present invention will be described with reference to the drawings. In the drawings, the same or corresponding parts will be described with the same reference numerals. .

実施の形態1.
図1は、この発明の実施の形態1に係る共振器の俯瞰図である。図1において、1は第1の金属板、2は第2の金属板、3は金属筐体、4は第1の金属板1、第2の金属板2及び金属筐体3を固定するネジである。また、図2は第1の金属板1、及び第2の金属板2の上面図である。また、図2におけるA−A‘における断面図を図3に示す。
Embodiment 1 FIG.
1 is an overhead view of a resonator according to Embodiment 1 of the present invention. In FIG. 1, 1 is a first metal plate, 2 is a second metal plate, 3 is a metal housing, 4 is a screw for fixing the first metal plate 1, the second metal plate 2 and the metal housing 3. It is. FIG. 2 is a top view of the first metal plate 1 and the second metal plate 2. FIG. 3 is a cross-sectional view taken along the line AA ′ in FIG.

第1の金属板1は平板状であり、図2において、第1の信号導体10と、第1の地導体11と、第3の地導体13、第4の地導体14とを備え、第1の信号導体10は第1の地導体11から延伸し、第1の信号導体10の一方の端部が第1の地導体11に接続される。第1の地導体11は、第3の地導体13と第4の地導体14を介して接続される。第4の地導体14は第1の信号導体10と隣接して配置されている。   The first metal plate 1 has a flat plate shape, and includes a first signal conductor 10, a first ground conductor 11, a third ground conductor 13, and a fourth ground conductor 14 in FIG. One signal conductor 10 extends from the first ground conductor 11, and one end of the first signal conductor 10 is connected to the first ground conductor 11. The first ground conductor 11 is connected via a third ground conductor 13 and a fourth ground conductor 14. The fourth ground conductor 14 is disposed adjacent to the first signal conductor 10.

第2の金属板2は平板状であり、図2において、第2の信号導体20と、第2の地導体22と、第5の地導体25と、第6の地導体26とを備え、第2の信号導体20の一方の端部は第2の地導体21に接続され、第2の地導体22は、第5の地導体25と第6の地導体26を介して接続される。   The second metal plate 2 has a flat plate shape. In FIG. 2, the second metal plate 2 includes a second signal conductor 20, a second ground conductor 22, a fifth ground conductor 25, and a sixth ground conductor 26. One end of the second signal conductor 20 is connected to the second ground conductor 21, and the second ground conductor 22 is connected via the fifth ground conductor 25 and the sixth ground conductor 26.

実施の形態1に係る共振器は、第1の金属板1と第2の金属板2と金属筐体3からなり、第1の金属板1と第2の金属板2は拡散接合により、電気的および機械的に接合されている。
これに伴い、第1の信号導体10と第2の信号導体20、第1の地導体11と第2の地導体22、第1の地導体11と第2の地導体22、第3の地導体13と第5の地導体25、第4の地導体14と第6の地導体26、がそれぞれ接合されている。
The resonator according to the first embodiment includes a first metal plate 1, a second metal plate 2, and a metal housing 3. The first metal plate 1 and the second metal plate 2 are electrically connected by diffusion bonding. Mechanically and mechanically joined.
Accordingly, the first signal conductor 10 and the second signal conductor 20, the first ground conductor 11 and the second ground conductor 22, the first ground conductor 11 and the second ground conductor 22, and the third ground conductor. The conductor 13 and the fifth ground conductor 25, and the fourth ground conductor 14 and the sixth ground conductor 26 are joined to each other.

また、第1の金属板1と第2の金属板2との位置ずれ、第1の金属板1のエッチング誤差、及び第2の金属板2のエッチング誤差が生じても、第2の信号導体20の縁部が第1の信号導体10の縁部からはみ出さないようにしている。すなわち、第1の信号導体10と第2の信号導体20が接合される接合面に対して垂直な方向(上面図である図2の紙面に垂直な上面方向)から見たときに、第2の金属板2の第2の信号導体20の縁部が第1の金属板1の第1の信号導体10の縁部よりも内側になるように、第2の信号導体20の寸法を決定している。   Further, even if a positional deviation between the first metal plate 1 and the second metal plate 2, an etching error of the first metal plate 1, and an etching error of the second metal plate 2 occur, the second signal conductor The 20 edges do not protrude from the edge of the first signal conductor 10. That is, when viewed from a direction perpendicular to the joining surface where the first signal conductor 10 and the second signal conductor 20 are joined (upper surface direction perpendicular to the paper surface of FIG. 2 which is a top view), the second The dimension of the second signal conductor 20 is determined so that the edge of the second signal conductor 20 of the metal plate 2 is inside the edge of the first signal conductor 10 of the first metal plate 1. ing.

また、実施の形態1では、この共振器の周辺に入出力手段である2つの入出力線路30が配置され、第1の地導体11と第3の地導体13は金属筐体3に電気的に接続され機械的に固定される。   In the first embodiment, two input / output lines 30 as input / output means are arranged around the resonator, and the first ground conductor 11 and the third ground conductor 13 are electrically connected to the metal housing 3. Connected and mechanically fixed.

第1の信号導体10の長さは共振周波数の約1/4波長である。実施の形態1にかかる共振器では、第1の信号導体10の先端は開放され、もう一方の先端は第1の地導体11に接続されている。このため、第1の信号導体10の長さが約1/4波長の奇数倍となる周波数で、電気的に共振する。したがって、この周波数を所定の動作周波数として共振器として動作する。   The length of the first signal conductor 10 is about ¼ wavelength of the resonance frequency. In the resonator according to the first embodiment, the tip of the first signal conductor 10 is opened, and the other tip is connected to the first ground conductor 11. For this reason, it electrically resonates at a frequency at which the length of the first signal conductor 10 is an odd multiple of about ¼ wavelength. Therefore, it operates as a resonator with this frequency as a predetermined operating frequency.

したがって、一方の入出力線路30から入力された信号は、第1の信号導体10が電気的に共振する周波数付近の成分のみが共振器に結合し、更に第1の信号導体10が電気的に共振する周波数付近の成分のみが、もう一方の入出力線路30に結合して出力される。つまり、実施の形態1の共振器による回路は1段の帯域通過フィルタとして動作する。   Therefore, in the signal input from one input / output line 30, only the component near the frequency at which the first signal conductor 10 electrically resonates is coupled to the resonator, and the first signal conductor 10 is electrically connected. Only the component near the resonating frequency is coupled to the other input / output line 30 and output. That is, the circuit including the resonator according to the first embodiment operates as a single-stage bandpass filter.

実施の形態1に係る共振器に外部から機械的な振動が加わった場合、第1の信号導体10と第2の信号導体20は拡散接合により接続されており、機械的強度が向上するため、薄い金属板1枚を用いて共振器の信号導体を実現した場合よりも機械的な共振が起き難く、破断しにくい。   When mechanical vibration is applied to the resonator according to the first embodiment from the outside, the first signal conductor 10 and the second signal conductor 20 are connected by diffusion bonding, and the mechanical strength is improved. Mechanical resonance is less likely to occur and breakage is less likely than when a signal conductor of a resonator is realized using one thin metal plate.

また、エッチング加工では、金属板の厚みにおよそ比例してエッチング誤差の範囲が決定される。したがって、実施の形態1に係る共振器では薄い金属板である第1の金属板1をエッチング加工することから、エッチングによる寸法誤差を小さくできるため、エッチング誤差による周波数変動が小さく、共振周波数の調整が不要となる。   In the etching process, an etching error range is determined approximately in proportion to the thickness of the metal plate. Therefore, since the first metal plate 1 which is a thin metal plate is etched in the resonator according to the first embodiment, the dimensional error due to the etching can be reduced, and therefore the frequency fluctuation due to the etching error is small, and the resonance frequency is adjusted. Is no longer necessary.

また、実施の形態1に係る共振器では、第1の金属板1と第2の金属板2との位置ずれ、第1の金属板1のエッチング寸法誤差、及び第2の金属板2のエッチング寸法誤差が生じても、第2の信号導体20の縁部が第1の信号導体10の縁部からはみ出さないように、第2の金属板2の縁が第1の金属板1の縁よりも内側になるように寸法が決定されているため、例えば、図4、図5に示すように、第2の金属板2が第1の金属板1に対して位置がずれて拡散接合されても、第2の金属板2が第1の金属板1からはみ出すことがない。第1の金属板1と第2の金属板2の位置がずれても、第2の信号導体20よりも第1の信号導体10の方が、線路幅が広く線路長は長いため、共振器の特性は第1の金属板1における第1の信号導体10の寸法でほぼ決定される。したがって、第1の金属板1と第2の金属板2の位置がずれて接合されても共振周波数は変化しないため、実施の形態1に係る共振器は製造誤差による周波数変動が小さい。   In the resonator according to the first embodiment, the positional deviation between the first metal plate 1 and the second metal plate 2, the etching dimensional error of the first metal plate 1, and the etching of the second metal plate 2 are performed. Even if a dimensional error occurs, the edge of the second metal plate 2 does not protrude from the edge of the first signal conductor 10 so that the edge of the second signal conductor 20 does not protrude from the edge of the first metal plate 1. For example, as shown in FIGS. 4 and 5, the second metal plate 2 is diffusion-bonded with the position shifted from the first metal plate 1, as shown in FIGS. 4 and 5. However, the second metal plate 2 does not protrude from the first metal plate 1. Even if the positions of the first metal plate 1 and the second metal plate 2 are shifted, the first signal conductor 10 has a wider line width and a longer line length than the second signal conductor 20. These characteristics are substantially determined by the dimensions of the first signal conductor 10 in the first metal plate 1. Therefore, even if the positions of the first metal plate 1 and the second metal plate 2 are shifted and joined, the resonance frequency does not change. Therefore, the resonator according to the first embodiment has a small frequency fluctuation due to a manufacturing error.

また、実施の形態1に係る共振器では、第1の金属板1の上面に第2の金属板2を配置し、第1の金属板1の下面に金属筐体3を配置している。信号導体に流れる電流のリターン電流は主に金属筐体3に流れることから、実施の形態1に係る共振器の電気特性は、第2の信号導体20の寸法ではなく、金属筐体3に近い第1の信号導体10の寸法でほぼ決定される。したがって、実施の形態1の構造とすることで、第2の金属板2のエッチング寸法誤差の影響が低減される。   In the resonator according to the first embodiment, the second metal plate 2 is disposed on the upper surface of the first metal plate 1, and the metal housing 3 is disposed on the lower surface of the first metal plate 1. Since the return current of the current flowing through the signal conductor mainly flows through the metal housing 3, the electrical characteristics of the resonator according to the first embodiment are not the dimensions of the second signal conductor 20 but are close to the metal housing 3. It is substantially determined by the size of the first signal conductor 10. Therefore, by adopting the structure of the first embodiment, the influence of the etching dimensional error of the second metal plate 2 is reduced.

以上のことから、実施の形態1に係る共振器は、エッチング誤差や金属板の位置ずれによる周波数変動を小さくしつつ、機械的な振動が加わっても信号導体の破断や時間的な特性変化が小さい。   From the above, the resonator according to the first embodiment reduces the frequency fluctuation due to the etching error and the displacement of the metal plate, and does not break the signal conductor or change the temporal characteristics even when mechanical vibration is applied. small.

なお、実施の形態1では、第1の信号導体10、及び第2の信号導体20は直線であったが、これに限るものではなく、図6のように、少なくとも第1の信号導体10を曲げても良い。図6のように第1の信号導体10および第2の信号導体20を曲げることで、共振周波数はそのままに、第2の地導体22と第5の地導体25の距離を短くでき、共振器の小型化が可能となる。   In the first embodiment, the first signal conductor 10 and the second signal conductor 20 are straight lines. However, the present invention is not limited to this, and at least the first signal conductor 10 is provided as shown in FIG. It may be bent. By bending the first signal conductor 10 and the second signal conductor 20 as shown in FIG. 6, the distance between the second ground conductor 22 and the fifth ground conductor 25 can be shortened without changing the resonance frequency. Can be reduced in size.

なお、実施の形態1では、金属筐体3を1つ用いたが、これに限るものではなく、図7のように、第1の金属板1、第2の金属板2を覆うように、上下両側に金属筐体3を2つ用いても良い。図7のように金属板1、2を覆うように金属筐体3を2つ用いることで、共振器周辺への電磁界の漏れを小さくでき、周辺回路との干渉量を小さくすることができる。   In the first embodiment, the single metal housing 3 is used. However, the present invention is not limited to this, and the first metal plate 1 and the second metal plate 2 are covered as shown in FIG. Two metal casings 3 may be used on both upper and lower sides. By using two metal housings 3 so as to cover the metal plates 1 and 2 as shown in FIG. 7, leakage of the electromagnetic field to the periphery of the resonator can be reduced, and the amount of interference with the peripheral circuit can be reduced. .

なお、実施の形態1では、第2の金属板2を1枚用いたが、これに限るものではなく、図8から図11に示すように、第2の金属板2を複数枚用いても良い。図9は図8におけるB−B‘断面を表す。図11は図10におけるF−F‘断面を表す。図8から図11のように第2の金属板2を複数枚用いることで、機械的強度がより向上し、エッチング誤差や金属板1、2の位置ずれによる周波数変動を小さくしつつ、機械的な振動が加わっても、信号導体の破断や時間的な特性変化が、第2の金属板2を1つ用いた場合よりも、より小さくすることができる。   In Embodiment 1, one second metal plate 2 is used. However, the present invention is not limited to this, and a plurality of second metal plates 2 may be used as shown in FIGS. good. FIG. 9 shows a B-B ′ cross section in FIG. 8. FIG. 11 shows an F-F ′ cross section in FIG. 10. By using a plurality of second metal plates 2 as shown in FIGS. 8 to 11, the mechanical strength is further improved, and the frequency fluctuation due to the etching error and the displacement of the metal plates 1 and 2 is reduced, while the mechanical strength is reduced. Even if a large amount of vibration is applied, the breakage of the signal conductor and the temporal characteristic change can be made smaller than in the case where one second metal plate 2 is used.

なお、実施の形態1では、第1の金属板1と第2の金属板2は拡散接合により接続されているが、これに限るものではなく、はんだや導電性接着剤などにより、機械的に固定され、また電気的に接続されていれば、異なる方法で接合されても良い。   In the first embodiment, the first metal plate 1 and the second metal plate 2 are connected by diffusion bonding. However, the first metal plate 1 and the second metal plate 2 are not limited to this, and mechanically using solder, conductive adhesive, or the like. As long as they are fixed and electrically connected, they may be joined by different methods.

なお、第1の金属板1と第2の金属板2をエッチング加工により製作する場合、金属板1、2の両側からエッチング液をかけることでエッチングする両面エッチング加工を用いた場合のエッチング寸法誤差は金属板1、2の厚みのおよそ±10%となり、金属板の片側からエッチング液をかける片面エッチング加工を用いた場合のエッチング誤差は、金属板1、2の厚みのおよそ±100%となる。また、エッチング誤差が生じると第1の信号導体10の長さが変化し、変化した長さの割合程度に、共振周波数も変化する。以上のことから、エッチング誤差による信号導体の寸法誤差が、許容される周波数変動の範囲以内になるように、第1の金属板1の厚みを決定することで、共振周波数の調整が不要な共振器を実現することができる。   In addition, when manufacturing the 1st metal plate 1 and the 2nd metal plate 2 by an etching process, the etching dimension error at the time of using the double-sided etching process which etches by applying an etching liquid from the both sides of the metal plates 1 and 2 is used. Is approximately ± 10% of the thickness of the metal plates 1 and 2, and the etching error when using a single-sided etching process in which an etching solution is applied from one side of the metal plates is approximately ± 100% of the thickness of the metal plates 1 and 2. . Further, when an etching error occurs, the length of the first signal conductor 10 changes, and the resonance frequency also changes to a ratio of the changed length. From the above, by determining the thickness of the first metal plate 1 so that the dimensional error of the signal conductor due to the etching error is within the allowable frequency fluctuation range, the resonance that does not require adjustment of the resonance frequency. Can be realized.

また、エッチング誤差による信号導体10の寸法誤差が、許容される周波数変動の範囲以内になるように第1の金属板1の厚みを決定した場合、第1の金属板1の厚みが薄くなり、第2の金属板2の厚みを第1の金属板1の厚みと同程度とすると、機械的強度が十分でないため、機械的な振動が加わった場合、機械的な共振等を生じ、第1の信号導体10の破断が起きたり、電気特性の時間的な変化が大きくなる場合がある。   In addition, when the thickness of the first metal plate 1 is determined so that the dimensional error of the signal conductor 10 due to the etching error is within the allowable frequency fluctuation range, the thickness of the first metal plate 1 is reduced, If the thickness of the second metal plate 2 is approximately the same as the thickness of the first metal plate 1, the mechanical strength is not sufficient. Therefore, when mechanical vibration is applied, mechanical resonance or the like occurs, and the first In some cases, the signal conductor 10 may break or the electrical characteristics may change over time.

この場合、図2のA−A‘断面を表す図12に示すように、第2の金属板2の厚みを第1の金属板1よりも厚くしても良い。電気特性はほぼ第1の金属板1の特に第1の信号導体10の寸法で決定されるため、第2の金属板2の厚みを第1の金属板1よりも厚くし、第1の信号導体10よりも第2の信号導体20を厚くすることで、共振周波数の調整を不要としつつ、必要な機械的強度も確保された共振器を実現することができる。   In this case, the thickness of the second metal plate 2 may be made thicker than that of the first metal plate 1 as shown in FIG. Since the electrical characteristics are substantially determined by the dimensions of the first metal plate 1, particularly the first signal conductor 10, the thickness of the second metal plate 2 is made thicker than that of the first metal plate 1, and the first signal By making the second signal conductor 20 thicker than the conductor 10, it is possible to realize a resonator in which necessary mechanical strength is ensured while adjusting the resonance frequency is unnecessary.

また、第2の信号導体20を複数枚用いて必要な機械的強度を確保する構成と比べ、部品点数を削減できることから、同等性能のフィルタを低コストで製造することが可能となる。   In addition, since the number of parts can be reduced compared to a configuration in which a plurality of second signal conductors 20 are used to ensure the required mechanical strength, it is possible to manufacture a filter with equivalent performance at a low cost.

実施の形態2.
図13は、この発明の実施の形態2に係るフィルタの金属板1、2の上面図である。また、図13におけるC−C‘における断面図を図14に示す。
Embodiment 2. FIG.
FIG. 13 is a top view of the metal plates 1 and 2 of the filter according to Embodiment 2 of the present invention. FIG. 14 is a cross-sectional view taken along the line CC ′ in FIG.

図13において、このフィルタの第1の金属板1は、第1の信号導体10と、第1の地導体11と、第3の地導体13、第4の地導体14とを備え、第1の信号導体10は、第1の地導体11から延伸し、第1の地導体11に接続される。第1の地導体11は、第3の地導体13と第4の地導体14を介して接続される。   In FIG. 13, the first metal plate 1 of this filter includes a first signal conductor 10, a first ground conductor 11, a third ground conductor 13, and a fourth ground conductor 14. The signal conductor 10 extends from the first ground conductor 11 and is connected to the first ground conductor 11. The first ground conductor 11 is connected via a third ground conductor 13 and a fourth ground conductor 14.

図13において、このフィルタの第2の金属板2は、第2の信号導体20と、第2の地導体22と、第5の地導体25と、第6の地導体26とを備え、第2の信号導体20は、第2の地導体22に接続され、第2の地導体22は、第5の地導体25と第6の地導体26を介して接続される。   In FIG. 13, the second metal plate 2 of this filter includes a second signal conductor 20, a second ground conductor 22, a fifth ground conductor 25, and a sixth ground conductor 26. The second signal conductor 20 is connected to the second ground conductor 22, and the second ground conductor 22 is connected via the fifth ground conductor 25 and the sixth ground conductor 26.

実施の形態2に係るフィルタは、第1の金属板1と第2の金属板2と金属筐体3(図1と同様であるが、図13には図示せず)からなり、第1の金属板1と第2の金属板2は拡散接合により、電気的および機械的に接合されている。また、第2の金属板2の第2の信号導体20の端部は第1の金属板1の第1の信号導体10の端部よりも内側となるように寸法が決定されている。   The filter according to the second embodiment includes a first metal plate 1, a second metal plate 2, and a metal housing 3 (similar to FIG. 1, but not shown in FIG. 13). The metal plate 1 and the second metal plate 2 are joined electrically and mechanically by diffusion bonding. The dimension of the second signal conductor 20 of the second metal plate 2 is determined so as to be inside the end of the first signal conductor 10 of the first metal plate 1.

また、実施の形態2では、第1の信号導体10と第2の信号導体20からなる共振器の周辺に入出力手段である2つの入出力線路30が配置され、第1の地導体11と第3の地導体13は金属筐体3に接続される。   Further, in the second embodiment, two input / output lines 30 serving as input / output means are arranged around the resonator composed of the first signal conductor 10 and the second signal conductor 20, and the first ground conductor 11 The third ground conductor 13 is connected to the metal housing 3.

実施の形態2では、第1の信号導体10と第2の信号導体20が、それぞれ2つずつ設置されている。それぞれの第1の信号導体10の長さは共振周波数の約1/4波長である。第1の信号導体10の先端は開放され、もう一方の先端は第1の地導体11に接続される。長さが約1/4波長であることから、共振する周波数で第1の信号導体10が励振されると、この周波数を所定の動作周波数として、それぞれが共振器として動作する。   In the second embodiment, two each of the first signal conductor 10 and the second signal conductor 20 are provided. The length of each first signal conductor 10 is about ¼ wavelength of the resonance frequency. The tip of the first signal conductor 10 is opened, and the other tip is connected to the first ground conductor 11. Since the length is about ¼ wavelength, when the first signal conductor 10 is excited at a resonating frequency, this frequency is set as a predetermined operating frequency, and each operates as a resonator.

図13において、一方の入出力線路30から入力された信号は、片方の第1の信号導体10が電気的に共振する周波数付近の成分のみ共振器に結合し、そして、共振する周波数付近の成分のみ隣の共振器に結合し、最後に他方の第1の信号導体10が電気的に共振する周波数付近の成分のみもう一方の入出力線路30に結合して出力される。つまり、実施の形態2のフィルタである回路は2段の帯域通過フィルタとして動作する。   In FIG. 13, the signal input from one input / output line 30 is coupled to the resonator only in the vicinity of the frequency at which one of the first signal conductors 10 electrically resonates, and the component in the vicinity of the resonating frequency. Only the component near the frequency at which the other first signal conductor 10 electrically resonates is coupled to the other input / output line 30 and output. That is, the circuit that is the filter of the second embodiment operates as a two-stage bandpass filter.

なお、実施の形態2では、第1の信号導体10、第2の信号導体20、第1の地導体11、第2の地導体22により構成される共振器を2つ用いた場合について説明したが、これに限るものではなく、第1の信号導体10、第2の信号導体20、第1の地導体11、第2の地導体22により構成される共振器を3つ以上用いても良い。共振器を3つ以上用いることで、共振器を2つ用いる場合よりも、急峻な通過特性(周波数特性)などが実現できる。   In the second embodiment, the case where two resonators constituted by the first signal conductor 10, the second signal conductor 20, the first ground conductor 11, and the second ground conductor 22 are used has been described. However, the present invention is not limited to this, and three or more resonators constituted by the first signal conductor 10, the second signal conductor 20, the first ground conductor 11, and the second ground conductor 22 may be used. . By using three or more resonators, a sharper pass characteristic (frequency characteristic) or the like can be realized than when two resonators are used.

なお、実施の形態2では、第1の信号導体10は直線であったが、これに限るものではなく、図15のように曲げても良い。第1の信号導体10を曲げることで、第1の地導体11と第3の地導体13の距離を近づけることができ、通過帯域を変更することなく、フィルタの幅を狭くすることができる。   In the second embodiment, the first signal conductor 10 is a straight line, but is not limited thereto, and may be bent as shown in FIG. By bending the first signal conductor 10, the distance between the first ground conductor 11 and the third ground conductor 13 can be reduced, and the width of the filter can be narrowed without changing the passband.

なお、実施の形態2では、金属筐体3を1つ用いたが、これに限るものではなく、図13のC−C‘断面が、図16に示すように、金属板1、2を覆うように金属筐体3を2つ用いても良い。図16のように金属板1、2を覆うように金属筐体3を2つ用いることで、フィルタ周辺への電磁界の漏れを小さくでき、周辺回路との干渉量を小さくすることができる。   In the second embodiment, one metal casing 3 is used. However, the present invention is not limited to this, and the CC ′ cross section of FIG. 13 covers the metal plates 1 and 2 as shown in FIG. As described above, two metal casings 3 may be used. By using two metal housings 3 so as to cover the metal plates 1 and 2 as shown in FIG. 16, the leakage of the electromagnetic field to the periphery of the filter can be reduced, and the amount of interference with the peripheral circuit can be reduced.

実施の形態3.
図17は、この発明の実施の形態3に係るフィルタバンクの回路図である。
Embodiment 3 FIG.
FIG. 17 is a circuit diagram of a filter bank according to Embodiment 3 of the present invention.

図17における31は通過帯域が異なるフィルタ、32はスイッチ、33はフィルタバンクの入出力端である。図18は、実施の形態3に係るフィルタバンクに用いるフィルタ31の上面図である。図18におけるD−D’の断面図を図19に示す。   In FIG. 17, 31 is a filter having a different pass band, 32 is a switch, and 33 is an input / output terminal of the filter bank. FIG. 18 is a top view of the filter 31 used in the filter bank according to the third embodiment. A cross-sectional view taken along the line D-D 'in FIG. 18 is shown in FIG.

図18において、実施の形態2のフィルタにおける第1の信号導体10の長さや、信号導体間隔等を変えて通過帯域を変えた複数個のフィルタ31を、隣接するフィルタの第1の地導体11と第3の地導体13、及び隣接するフィルタの第2の地導体22と第5の地導体25が接続されるように配置した構成である。   In FIG. 18, a plurality of filters 31 whose passbands are changed by changing the length of the first signal conductor 10 and the signal conductor interval in the filter of the second embodiment are replaced with the first ground conductors 11 of the adjacent filters. And the third ground conductor 13 and the second ground conductor 22 and the fifth ground conductor 25 of the adjacent filter are connected to each other.

実施の形態3の各フィルタ31は、実施の形態2と同様に特定の帯域のみ通過する、帯域通過フィルタとして動作する。一方の入出力端33から入力された信号は、スイッチ32を介して、あるひとつのフィルタ31に入力される。そして、入力されたフィルタの通過帯域の信号のみがもう一方のスイッチ32を介して入出力端33から出力される。以上のことから、実施の形態3における回路は、スイッチ32を切り替えることで、周波数帯が異なる複数の信号の中から、ある特定の周波数帯の信号のみを選択できるフィルタバンクとして動作する。   Each filter 31 of the third embodiment operates as a band pass filter that passes only a specific band as in the second embodiment. A signal input from one input / output terminal 33 is input to a certain filter 31 via the switch 32. Then, only the input signal in the pass band of the filter is output from the input / output terminal 33 via the other switch 32. From the above, the circuit in the third embodiment operates as a filter bank that can select only signals in a specific frequency band from among a plurality of signals having different frequency bands by switching the switch 32.

図18のように複数のフィルタ31を一体化して構成することで、各フィルタ31のそれぞれの地導体が切れ目無く接続されることから、2枚の金属板1、2をエッチング加工し拡散接合した金属板1、2、金属筐体3、及びネジ4を用いて一度に複数のフィルタ31を製造でき、製造が容易で低コストなフィルタバンクを実現することができる。   Since the plurality of filters 31 are integrated and configured as shown in FIG. 18, the ground conductors of the filters 31 are connected without breaks, so that the two metal plates 1 and 2 are etched and diffusion bonded. A plurality of filters 31 can be manufactured at once using the metal plates 1 and 2, the metal housing 3, and the screws 4, and a filter bank that is easy to manufacture and low in cost can be realized.

なお、実施の形態3のフィルタ31は、金属筐体3を1つ用いたが、これに限るものではなく、図18におけるD−D’断面が図20となるように、金属板1、2を覆うように金属筐体3を2つ用いても良い。図20のように金属板1、2を覆うように金属筐体3を2つ用いることで、隣接するフィルタ31、及びフィルタバンク周辺への電磁界の漏れを小さくでき、フィルタ31間、及びフィルタバンクと周辺回路との干渉量を小さくすることができる。   In addition, although the filter 31 of Embodiment 3 used one metal housing | casing 3, it is not restricted to this, Metal plate 1, 2 so that DD 'cross section in FIG. 18 may become FIG. Two metal casings 3 may be used so as to cover. By using two metal casings 3 so as to cover the metal plates 1 and 2 as shown in FIG. 20, leakage of electromagnetic fields to adjacent filter 31 and the periphery of the filter bank can be reduced. The amount of interference between the bank and the peripheral circuit can be reduced.

なお、実施の形態3でのフィルタバンクは通過帯域が異なる3つのフィルタ31を用いたが、これに限らず、通過帯域が異なるフィルタ31を2つ、または4つ以上用いても良い。用途によってはフィルタ31の通過帯域は同じものがあっても良い。フィルタ31を2つとすることで、フィルタバンクの小型化が実現できる。また、フィルタを4以上とすることで、より多くの周波数帯が異なる信号を分離することなどができる。   In addition, although the filter bank in Embodiment 3 used three filters 31 with different pass bands, the present invention is not limited to this, and two or four or more filters 31 with different pass bands may be used. Depending on the application, the filter 31 may have the same pass band. By using two filters 31, the filter bank can be downsized. Further, by using four or more filters, it is possible to separate signals having more different frequency bands.

1 第1の金属板、2 第2の金属板、3 金属筐体、4 ネジ、10 第1の信号導体、11 第1の地導体、13 第3の地導体、14 第4の地導体、20 第2の信号導体、22 第2の地導体、25 第5の地導体、26 第6の地導体、30 入出力線路、31 フィルタ、32 スイッチ、33 入出力端 DESCRIPTION OF SYMBOLS 1 1st metal plate, 2nd 2nd metal plate, 3 metal housing | casing, 4 screws, 10 1st signal conductor, 11 1st ground conductor, 13 3rd ground conductor, 14 4th ground conductor, 20 second signal conductor, 22 second ground conductor, 25 fifth ground conductor, 26 sixth ground conductor, 30 input / output line, 31 filter, 32 switch, 33 input / output terminal

Claims (7)

金属筐体と、
平板状であり、前記金属筐体に固定される第1の地導体、前記第1の地導体から延伸し長さが所定の動作周波数における1/4波長の奇数倍である第1の信号導体、を有する第1の金属板と、
平板状であり、前記第1の地導体に接合される第2の地導体、前記第1の信号導体に接合される部分の縁部が接合面の垂直方向から見て前記第1の信号導体の縁部よりも内側となるように前記第1の信号導体に接合される第2の信号導体、を有する第2の金属板と、
を備えたことを特徴とする共振器。
A metal housing;
A first ground conductor fixed to the metal casing, and a first signal conductor extending from the first ground conductor and having a length that is an odd multiple of a quarter wavelength at a predetermined operating frequency. A first metal plate having
The first signal conductor is flat and has a second ground conductor joined to the first ground conductor and an edge of a portion joined to the first signal conductor as viewed from a direction perpendicular to the joint surface. A second metal plate having a second signal conductor joined to the first signal conductor so as to be inside the edge of
A resonator comprising:
前記第1の金属板は、前記金属筐体に固定される第3の地導体、前記第1の地導体と前記第3の地導体とを接続し前記第1の信号導体に隣接して配置される第4の地導体、をさらに有し、
前記第2の金属板は、前記第3の地導体に接合される第5の地導体、前記第4の地導体に接合される第6の地導体、をさらに有することを特徴とする請求項1に記載の共振器。
The first metal plate is disposed adjacent to the first signal conductor by connecting the third ground conductor fixed to the metal casing, the first ground conductor and the third ground conductor. A fourth ground conductor,
The second metal plate further includes a fifth ground conductor joined to the third ground conductor and a sixth ground conductor joined to the fourth ground conductor. The resonator according to 1.
前記第2の金属板が接合された2つ以上の金属板からなることを特徴とする請求項1または請求項2に記載の共振器。   The resonator according to claim 1, wherein the second metal plate is composed of two or more metal plates joined to each other. 前記第2の金属板が前記第1の金属板の両面に接合されていることを特徴とする請求項1から請求項3のいずれかに記載の共振器。   The resonator according to any one of claims 1 to 3, wherein the second metal plate is bonded to both surfaces of the first metal plate. 前記第2の金属板が前記第1の金属板よりも厚いことを特徴とする請求項1から請求項4のいずれかに記載の共振器。   The resonator according to claim 1, wherein the second metal plate is thicker than the first metal plate. 請求項1から請求項5のいずれかに記載の共振器を1つ以上有し、前記1つ以上の共振器のいずれかに電気的に結合する入出力手段を備えたことを特徴とするフィルタ。   6. A filter comprising one or more resonators according to claim 1, and comprising input / output means electrically coupled to any one of the one or more resonators. . 請求項6に記載のフィルタを複数有し、それぞれの前記フィルタにおける前記第1の金属板を、同一平面内で接続して一体としたことを特徴とするフィルタバンク。   A filter bank comprising a plurality of the filters according to claim 6, wherein the first metal plates in each of the filters are connected and integrated in the same plane.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787601A (en) * 1980-11-20 1982-06-01 Toshiba Corp Band-pass filter
JPH01126601U (en) * 1988-02-12 1989-08-30
JP2000124561A (en) * 1998-10-21 2000-04-28 Canon Inc Printed wiring board
JP2000516055A (en) * 1996-06-19 2000-11-28 テレフォンアクチボラゲット エルエム エリクソン Integrated filter
JP2011199546A (en) * 2010-03-19 2011-10-06 Hitachi Cable Ltd Transmission line, coaxial cable, and microstrip line

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787601A (en) * 1980-11-20 1982-06-01 Toshiba Corp Band-pass filter
JPH01126601U (en) * 1988-02-12 1989-08-30
JP2000516055A (en) * 1996-06-19 2000-11-28 テレフォンアクチボラゲット エルエム エリクソン Integrated filter
JP2000124561A (en) * 1998-10-21 2000-04-28 Canon Inc Printed wiring board
JP2011199546A (en) * 2010-03-19 2011-10-06 Hitachi Cable Ltd Transmission line, coaxial cable, and microstrip line

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