JP2014137411A - Method for manufacturing optical module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical module and the like which can align an optical block even on a substrate in which a plurality of circuits for modules are mounted.SOLUTION: When light is emitted from an optical element array 9 arranged in the lower part of an optical lens array 11, firstly, the light is incident on the optical lens array 11 through a lens 23a provided on an optical element facing surface 25. Here, because a mirror surface 31 and a contact surface 37 are adhered to each other with approximately the same refractive index, the light is hardly reflected on a boundary. Accordingly, the light incident on the optical lens array 11 is hardly reflected on the mirror surface 31 (boundary), advances upward, and is emitted to the outside through a lens 39 formed on an alignment detecting surface 35. The intensity of the light detected by a detector 43 is measured and the optical lens array 11 is arranged in a position where the light becomes the highest light intensity, and thereby the optical element array 9 and the optical lens array 11 can be aligned.

Description

  The present invention relates to an optical module manufacturing method that is easy to align.

  An optical module for optical interconnection is used by mounting a surface receiving light emitting element and an electronic component such as a driver IC or a receiver IC on a circuit board. Such a substrate is excellent in mass productivity because a general surface mounting technique can be used in electronic component mounting.

  On the other hand, an optical module used by being mounted on a board is desired to have an optical signal transmission direction parallel to the circuit board for convenience. For this reason, in order to optically couple the surface light emitting / receiving element and the optical fiber, for example, as shown in Patent Document 1, an optical block having both a lens function and a mirror function for converting an optical path by 90 ° is used. Patent Document 2 discloses a method of realizing 90 ° optical path conversion by cutting the end face of an optical waveguide (optical fiber) at 45 °.

JP 2010-12211 A JP 2010-540991 A

In recent years, in order to further increase the mass productivity, it is desired that a plurality of module circuits are provided on a single substrate and the components are mounted by an automatic machine and then divided into individual optical modules.
In the optical modules of Patent Document 1 and Patent Document 2, when the optical block is mounted on the substrate, it is necessary to perform active alignment after mounting the optical fiber in such a direction that light is transmitted in parallel with the mounting surface of the mounting board. There is. However, when trying to actively align each optical block in a state where a plurality of circuit boards are two-dimensionally arranged, the optical fiber used for alignment interferes with other mounted components. To do. Therefore, when a plurality of circuit boards are arranged, the substrate and the optical block cannot be aligned unless they are divided into individual optical modules, resulting in a problem that mass productivity deteriorates. there were.

  The present invention has been made in view of such problems, and provides an optical module manufacturing method capable of aligning an optical block even on a substrate on which a plurality of module circuits are provided. The purpose is to do.

  In order to achieve the above-described object, a first invention is a method for manufacturing an optical module, comprising a substrate on which an electronic component and an optical element are mounted, an optical element facing surface facing the optical element, and the optical element facing. An optical lens array comprising a vertical plane orthogonal to the plane and a mirror surface formed at an angle of 45 ° with respect to the optical element facing surface, and alignment of the optical element and the optical lens array is confirmed. An optical lens block comprising a centering detection surface and a contact surface formed at an angle of 45 ° with respect to the centering detection surface and in contact with the mirror surface of the optical lens array. In close contact with the mirror surface to integrate the optical lens array and the optical lens block, and with the alignment detection surface and the optical element facing surface facing each other, the optical element facing surface to the optical element Arranged to face each other, the optical element and the With the alignment detection surface arranged in a straight line, the position of the optical element and the optical lens array is detected from the alignment detection surface, and after aligning the optical element and the optical lens array, An optical module manufacturing method comprising removing the optical lens block.

  In a state where the optical element facing surface is disposed facing the optical element, light is irradiated from the optical element and incident on a lens provided on the optical element facing surface, and the optical lens array and the optical lens block And the position of the optical lens array is finely adjusted while detecting the intensity of light with a detector provided above the alignment detection surface. Thus, the optical element and the optical lens array may be aligned.

  The optical element is provided with a first marker part, the optical lens array is provided with a second marker part at a position corresponding to the first marker part, and the optical element facing surface is opposed to the optical element. The positions of the first marker unit and the second marker unit are detected by the imaging device from above the alignment detection surface, and the first marker unit and the second marker unit are overlapped with each other. You may align the said optical element and the said optical lens array so that it may match.

  The optical lens array and the optical lens block may be provided with a fitting structure for positioning each other, and the fitting surface may be fitted to bring the contact surface into close contact with the mirror surface.

  The optical lens array and the optical lens block have substantially the same refractive index, and a matching film having substantially the same refractive index as the refractive index is provided between the mirror surface and the contact surface. Good.

  The optical lens block is provided with a suction hole penetrating the contact surface and the alignment detection surface, and the optical lens block and the optical lens block are in contact with each other in the state where the alignment detection surface is in contact with the optical lens block. The contact surface and the mirror surface may be brought into close contact with each other by sucking air from the suction hole.

  Magnets may be provided at corresponding positions on the contact surface and the mirror surface, and the contact surface and the mirror surface may be brought into close contact with each other by magnetic force.

  According to the first invention, by combining the optical lens array and the optical lens block, alignment is performed in a direction (above the substrate) perpendicular to the optical transmission direction of the optical module (direction parallel to the substrate). Can do. Therefore, even on a substrate on which a plurality of electronic components and the like are mounted, there is no interference with adjacent electronic components and the like during alignment. For this reason, it is possible to perform alignment before the individual substrates are divided after being manufactured.

  In addition, since the mirror surface of the optical lens array is in close contact with the optical lens block, light emitted from the optical element can be emitted above the optical lens block without being reflected by the mirror surface. Therefore, alignment of the optical element and the optical lens array can be performed by detecting this light and adjusting the position of the optical lens array so that the light intensity becomes maximum. In addition, alignment can be performed by observing the markers provided on the optical element and the optical lens array from above the optical lens block and adjusting the position of the optical lens array so that the respective markers overlap. it can.

  Further, by providing the optical lens array and the optical lens block with a fitting structure for positioning each other, the optical lens array and the optical lens block can be easily positioned.

  In addition, the optical lens array and the optical lens block have substantially the same refractive index, and a matching film having substantially the same refractive index is provided between the mirror surface and the contact surface, so that the optical lens array and the optical lens block are disposed below the optical lens array. It is possible to efficiently detect light, a marker, and the like emitted from the optical element above the optical lens block.

  Further, by sucking air from the suction hole in a state where the optical lens block and the optical lens array are in contact with each other, the mirror surface and the contact surface can be more reliably brought into close contact with each other. Similarly, even if a magnet is used, the optical lens block and the optical lens array can be reliably adhered.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the optical module which can perform alignment of an optical block can be provided even if it is on the board | substrate which provided the surface for multiple modules.

FIG. 3 is an exploded perspective view showing the optical module 1. FIG. 3 is an assembled perspective view showing the optical module 1. FIG. 3 is an enlarged cross-sectional view of the optical lens array 11. FIG. 6 is a perspective view showing a state where the optical lens array 11 is mounted on the substrate 5. (A) is a figure which shows the state before fitting the optical lens array 11 and the optical lens block 17, (b) is a figure which shows the state after fitting. (A) is a top view of the optical lens block 17, (b) is the LL sectional view taken on the line of (a). (A) is a figure which shows the state before fitting the optical lens array 11 and the optical lens block 17, (b) is a figure which shows the state after fitting. The perspective view which shows the state before fitting the optical lens array 11a and the optical lens block 17a. The side view which shows the state before fitting the optical lens array 11a and the optical lens block 17a. (A) is sectional drawing which shows the state which optical lens array 11b and the optical lens block 17b were fitted, (b) is a figure which shows position alignment of the markers 49a and 49b.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing the optical module 1, and FIG. 2 is an assembled perspective view. In the following drawings, illustration of connectors and cables having optical transmission paths such as optical fibers connected to the optical module 1 is omitted.

  The optical module 1 mainly includes a cover 3, a substrate 5, an electronic component 7, an optical element array 9, an optical lens array 11, and the like. A circuit is formed in advance on the substrate 5, and the electronic component 7, the optical element array 9, and the like are mounted on the substrate 5. For example, a semiconductor laser such as a vertical cavity surface emitting laser (VCSEL), a photodiode array, or the like is applied to the optical element array 9. The optical element array 9 serves as a light emitting part or a light receiving part.

  The electronic component 7 is an IC chip such as a driver IC or a receiver IC. On the substrate 5, photoelectric conversion is performed. Note that other electronic components such as capacitors (not shown) are also disposed on the substrate 5 as appropriate.

  The cover 3 is made of resin, for example. The cover 3 is bonded to the substrate 5. An optical lens array 11 is disposed at a portion of the cover 3 located on the optical element array 9. The optical lens array 11 is a member made of, for example, glass in which a plurality of lenses are provided.

  FIG. 3 is a cross-sectional view of the optical lens array 11. The optical lens array 11 includes an optical element facing surface 25 that faces the optical element array 9, a mirror surface 31 that reflects light by 90 °, and an optical transmission path facing surface 27 that faces an optical transmission path 29 that transmits light. Is done. The optical transmission line facing surface 27 is a vertical surface substantially orthogonal to the optical element facing surface 25. The mirror surface 31 is formed at an angle of approximately 45 ° with respect to the optical element facing surface 25 and the optical transmission path facing surface 27. That is, the cross-sectional shape of the optical lens array 11 is a substantially right-angled isosceles triangle.

  The light (arrow D in the figure) emitted from the optical element array 9 enters the optical lens array 11 through a lens 23 a provided on the optical element facing surface 25. The light incident on the optical lens array 11 is converted into a 90 ° optical path on the inner surface of the mirror surface 31 of the optical lens array 11, and is emitted to the optical transmission path 29 via the lens 23 b provided on the optical transmission path facing surface 27. (Arrow E in the figure). When light enters from the optical transmission path 29, the opposite optical path is obtained.

  The mirror surface 31 is provided with a fitting portion 33a. The fitting portion 33a is provided at a position different from the optical path described above. In addition, the shape and arrangement | positioning of the fitting part 33a are not restricted to the example shown in figure.

  Next, the process of arranging the optical lens array 11 in the optical module 1 will be described. FIG. 4 is a perspective view showing a state where the optical lens array 11 is mounted on the substrate 5.

  First, a plurality of electronic components 7 and an optical element array 9 are mounted on the substrate assembly 13. The substrate assembly 13 is a member in which a plurality of substrates 5 are integrally provided. A test table 19 is installed below the substrate assembly 13. An electrode 21 is provided on the test table 19 at a position corresponding to the substrate 5. The electrode 21 is a spring probe and is pressed against a circuit on the lower surface of the substrate 5. Electric power is supplied from the electrode 21 to the electronic component 7 of each substrate.

  The optical lens array 11 is first held by the pickup tool 15 with the substrate assembly 13 placed on the test table 19 (arrow A in the figure). An optical lens block 17 is provided at the tip of the pickup tool 15. Details of the optical lens block 17 will be described later.

After holding the optical lens array 11 by the pickup tool 15, the optical lens array 11 is moved to a predetermined position above the substrate assembly 13 (arrow B in the figure) and arranged at a predetermined position on the substrate assembly 13 (arrow C in the figure). . At this time, alignment between the optical lens array 11 and the optical element array 9 is performed, and the optical lens array 11 is installed at an appropriate position.
More specifically, for example, a UV adhesive is applied to a predetermined position of the substrate assembly 13 in advance, and after the alignment between the optical lens array 11 and the optical element array 9 is performed, the pickup tool 15 is optimal. While maintaining the position, the adhesive is cured by UV irradiation. Thereafter, the optical lens array 11 is separated from the pickup tool 15.
For bonding the substrate assembly 13 and the optical lens array 11, not only the UV adhesive but also a thermosetting adhesive or solder can be used. In this case, similarly, with the pickup tool 15 holding the optimum position, the thermosetting adhesive or solder is cured and fixed by local heating or the like.
After all the optical lens arrays 11 are installed, the substrate assembly 13 is divided into the substrates 5. It should be noted that the present invention can naturally be used when the optical lens array 11 is installed on the substrate 5 after being individually divided.

  Next, the function of the optical lens block 17 will be described. FIG. 5A is a cross-sectional view showing a state before the optical lens array 11 and the optical lens block 17 are fitted together. The optical lens block 17 has a contact surface 37 that contacts the mirror surface 31 of the optical lens array 11, and an alignment detection surface 35 that is formed at an angle of approximately 45 ° with respect to the contact surface 37. That is, when the contact surface 37 of the optical lens block 17 is brought into contact with the mirror surface 31 of the optical lens array 11, the alignment detection surface 35 of the optical lens block 17 is substantially parallel to the optical element facing surface 25 of the optical lens array 11. opposite.

  The contact surface 37 is provided with a fitting portion 33b. The fitting portion 33 b can be fitted with the fitting portion 33 a of the optical lens array 11. Therefore, by fitting the fitting portions 33a and 33b, the optical lens block 17 and the optical lens array 11 can be positioned and the contact surface 37 and the mirror surface 31 can be brought into close contact (in the direction of arrow F in the figure). ).

  FIG. 5B is a cross-sectional view showing a state in which the contact surface 37 and the mirror surface 31 are brought into contact with each other and the optical lens block 17 and the optical lens array 11 are integrated. Here, the optical lens block 17 and the optical lens array 11 are made of a material having substantially the same refractive index. For example, both are made of the same glass material. A matching film 41 is provided on a part of the surface of the contact surface 37 as necessary. Therefore, when the contact surface 37 and the mirror surface 31 are brought into contact with each other, it is possible to suppress the formation of an air layer or the like in the gap between them. The matching film 41 has substantially the same refractive index as that of the optical lens block 17 and the optical lens array 11. By doing so, a change in the refractive index at the boundary between the optical lens array 11 and the optical lens block 17 can be minimized.

  In this state, when light (laser) is irradiated from an optical element array 9 (not shown) disposed below the optical lens array 11, the light first passes through a lens 23 a provided on the optical element facing surface 25. The light enters the optical lens array 11. Here, since the mirror surface 31 and the contact surface 37 are in close contact with each other with substantially the same refractive index, light hardly reflects at the boundary. Therefore, the light incident on the optical lens array 11 travels straight upward and enters the optical lens block 17.

  Further, the light incident on the optical lens block 17 is emitted to the outside through the lens 39 formed on the alignment detection surface 35 (arrow G in the figure). The emitted light is detected by a detector 43 that is provided above the optical lens block 17 and disposed opposite the alignment detection surface 35. The detector 43 can measure the incident intensity of light. Accordingly, the position of the optical lens array 11 is finely adjusted in the state where light is irradiated from the optical element array 9, and the optical lens array 11 is arranged at a position where the intensity of the light detected by the detector 43 is the highest. The optical element array 9 and the optical lens array 11 can be aligned. Fine adjustment of the positions of the optical lens array 11 and the optical lens block 17 with respect to the optical element array 9 can be performed by the pickup tool 15 (FIG. 4).

  When alignment of the optical lens array 11 is completed, the optical lens array 11 is fixed to the cover 3 or the substrate 5, and the optical lens array 11 is separated from the optical lens block 17 (pickup tool 15). Remove.

  In order to closely integrate the optical lens block 17 and the optical lens array 11, for example, there is a method of sucking the optical lens array 11 with respect to the optical lens block 17. 6A is a plan view of the optical lens block 17, and FIG. 6B is a cross-sectional view taken along line LL in FIG. 6A. The alignment detection surface 35 of the optical lens block 17 is provided with a hole 45 that penetrates to the contact surface 37. The hole 45 is formed in a portion other than the optical path of the optical lens block 17. The position and orientation of the hole 45 are not limited to the illustrated example.

  With the contact surface 37 of the optical lens block 17 in contact with the mirror surface 31 of the optical lens array 11, air is sucked from the hole 45 of the alignment detection surface 35 (arrow H in the figure), thereby the optical lens array 11. Can be adsorbed to the optical lens block 17. Note that the air lens array 11 can be separated from the optical lens block 17 by the weight of the optical lens array 11 by stopping the suction of air after the above-described alignment operation is completed.

  Note that the method of holding the optical lens array 11 by the optical lens block 17 is not limited to this method. FIG. 7 is a diagram illustrating another method. For example, a magnet 46 a is disposed in a portion other than the optical path of the optical lens array 11 and in the vicinity of the mirror surface 31. Similarly, a magnet 46 b is disposed in a portion other than the optical path of the optical lens block 17 and in the vicinity of the contact surface 37. Magnets 46a and 46b are arranged so as not to protrude from mirror surface 31 and contact surface 37, respectively.

In this state, the optical lens array 11 can be attracted to the optical lens block 17 by bringing the optical lens block 17 closer to the optical lens array 11 (arrow I in the figure).
In this case, in order to separate the optical lens array 11 from the pickup tool 15 while maintaining the optimum position of the optical lens array 11, the attractive force between the optical lens array 11 and the pickup tool 15 by the magnets 46a and 46b is: The adhesive strength between the substrate assembly 13 and the optical lens array 11 needs to be sufficiently small. Therefore, in order to separate the optical lens array 11 from the pickup tool 15, a mechanism for weakening the magnetic force of the magnets 46a and 46b may be provided. As a mechanism for weakening the magnetic force, for example, the magnet 46b on the pickup tool 15 side is an electromagnet, the current flowing through the coil is turned off, the magnetic force is weakened, or the magnet can be moved inside the pickup tool 15, At this time, there is a mechanism for weakening the attractive force by moving away from the magnet 46a of the optical lens array 11.
As described above, the form is not particularly limited as long as the optical lens array 11 can be adsorbed or adhered to the optical lens block 17.

  As described above, according to the present embodiment, when the optical element array 9 and the optical lens array 11 are aligned, it can be accessed from above the mirror surface 31 of the optical lens array 11. For this reason, even if other electronic components are arranged around the optical element array 9 to be aligned, active alignment can be performed without interfering with them. For this reason, the optical lens array 11 can be centered and arranged without dividing the substrate assembly 13 into a plurality of substrates 5 with respect to the substrate assembly 13 in which a plurality of substrates are assembled. Therefore, manufacturability is excellent.

  Further, since the optical lens array 11 and the optical lens block 17 have substantially the same refractive index, reflection of light on the mirror surface 31 is suppressed, and light is reliably transmitted from the optical lens array 11 to the optical lens block 17 side. It can be made incident. At this time, by using the matching film 41, the air layer at the boundary between the mirror surface 31 and the contact surface 37 can be eliminated, and light can be incident on the optical lens block 17 side more reliably.

  Further, since the optical lens array 11 and the optical lens block 17 are fitted by the mutual fitting structure, the positioning of the optical lens array 11 and the optical lens block 17 is easy.

  In the optical module 1 manufactured in this way, the optical lens array 11 converts the optical path by 90 °, whereby an optical transmission path 29 (in a direction substantially perpendicular to the light incident / exit direction of the optical element array 9). For example, an optical path is formed for an optical fiber). On the other hand, when the optical lens block 17 is brought into close contact with the mirror surface 31 of the optical lens array 11, this optical path can be changed and an optical path can be formed in the light incident / exit direction of the optical element array 9. Thus, the two optical systems can be used properly.

  Next, a second embodiment will be described. FIG. 8 is a perspective view showing a state before the optical lens array 11a and the optical lens block 17a are fitted together, and FIG. 9 is a side view. In the following embodiments, the same effects as those of the optical lens array 11 and the optical lens block 17 are given the same reference numerals as those in FIGS.

  The optical lens array 11 a is substantially the same as the optical lens array 11, but is different in that the optical lens array 11 a has flat portions substantially parallel to the optical element facing surface 25 on both sides of the mirror surface 31. Similarly, the optical lens block 17 a is substantially the same as the optical lens block 17, but is different in that the optical lens block 17 a has flat portions substantially parallel to the alignment detection surface 35 on both sides of the contact surface 37.

  Fitting portions 33a and 33b that can be fitted to each other are provided on the planar portion of the optical lens array 11a and the planar portion of the optical lens block 17a. By making the mirror surface 31 and the contact surface 37 face each other and making contact with each other (arrow J in the figure), the fitting portions 33a and 33b are fitted, and the mirror surface 31 and the contact surface 37 can be brought into close contact with each other. As described above, by sucking air from the hole 45, the optical lens array 11a can be sucked to the optical lens block 17a.

  In this state, it is possible to perform active alignment between the optical lens array 11a and the optical element array 9 by irradiating light from the optical element array 9 and detecting the light above the optical lens block 17a.

  As described above, also in the second embodiment, the same effect as that in the first embodiment can be obtained. Moreover, since the fitting parts 33a and 33b are formed in a plane part, fitting is easy.

  Next, a third embodiment will be described. FIG. 10A is a cross-sectional view showing a state in which the optical lens array 11b and the optical lens block 17b are fitted. In the vicinity of the surface of the optical element array 9, a marker 49a which is a first marker is provided. Further, a marker 49b as a second marker is provided in the vicinity of the optical element facing surface 25 of the optical lens array 11b. The markers 49a and 49b are not particularly limited as long as the markers 49a and 49b are visually recognizable, such as unevenness, coloring, or a surface roughening processing unit.

  The markers 49a and 49b are arranged at positions corresponding to each other. The markers 49a and 49b are arranged at a plurality of positions with respect to the optical element array 9 and the optical lens array 11b.

  An imaging device 47 is disposed above the optical lens block 17b. For example, the imaging device 47 is movable on the optical lens block 17b. In order to move the imaging device 47 above the optical lens block 17b, the hole 45 penetrates from the back side of the optical lens block 17b to the contact surface 37, and air is sucked from the back side of the optical lens block 17b. .

  FIG. 10B is a diagram illustrating a state in which the positions of the markers 49a and 49b are aligned. The imaging device 47 can detect the positions of the markers 49a and 49b through the optical lens block 17b and the optical lens array 11b. For example, it can be detected that the markers 49a and 49b are arranged at positions shifted by a distance K as shown in the left diagram of FIG.

  In this case, the position of the optical lens array 11b and the like is finely adjusted so that the marker 49b overlaps the position of the marker 49a. When there are a plurality of markers 49a, the imaging device 47 is moved, and the position of the optical lens array 11b and the like is finely adjusted so that the corresponding marker 49b overlaps the other marker 49a.

  The state where the marker 49b overlaps all the markers 49a at a plurality of locations is the position where the optical element array 9 and the optical lens array 11b are aligned. That is, in the state where the optical element array 9 and the optical lens array 11b are aligned in advance, the positions of the markers 49a and 49b are determined so that the marker 49a and the marker 49b overlap each other. Therefore, the optical element array 9 and the optical lens array 11b can be aligned by overlapping the markers 49a and 49b.

  The light emitting part of the optical element array 9 can be used as the marker 49a, and the lens 23a can be used as the marker 49b.

  As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims, and these are naturally within the technical scope of the present invention. It is understood that it belongs.

1 ... Optical module 3 ... Cover 5 ... Substrate 7 ... Electronic component 9 ... Optical element array 11, 11a, 11b ... Optical lens array 13 ... Substrate assembly 15 ... ... Pickup tool 17 ... Optical lens block 19 ... Test stand 21 ... Electrodes 23a, 23b ... Lens 25 ... Optical element facing surface 27 ... Optical transmission path facing surface 29 ... Light Transmission path 31... Mirror surfaces 33 a and 33 b... Fitting portion 35... Alignment detection surface 37. ...... Hole 46a, 46b ......... Magnet 47 ......... Imaging device 49a, 49b ......... Marker

Claims (7)

An optical module manufacturing method comprising:
On a substrate on which electronic components and optical elements are mounted;
An optical lens array comprising: an optical element facing surface facing the optical element; a vertical surface orthogonal to the optical element facing surface; and a mirror surface formed at an angle of 45 ° with respect to the optical element facing surface; ,
An alignment detection surface for confirming alignment between the optical element and the optical lens array, and a contact surface formed at an angle of 45 ° with respect to the alignment detection surface and in contact with the mirror surface of the optical lens array An optical lens block comprising:
Use
The optical lens array is integrated with the optical lens block by bringing the contact surface into close contact with the mirror surface, and the optical element facing surface is placed in a state where the alignment detection surface and the optical element facing surface face each other. Place it facing the optical element,
With the optical element and the alignment detection surface arranged in a straight line, the position of the optical element and the optical lens array is detected from the alignment detection surface,
A method for manufacturing an optical module, comprising: aligning the optical element and the optical lens array; and removing the optical lens block. In a state where the optical element facing surface is disposed facing the optical element,
Irradiating light from the optical element to be incident on a lens provided on the optical element facing surface, emitting light transmitted through the optical lens array and the optical lens block from the lens of the alignment detection surface, and The optical element and the optical lens array are aligned by adjusting the position of the optical lens array while detecting the light intensity with a detector provided above the alignment detection surface. The method of manufacturing an optical module according to claim 1. The optical element is provided with a first marker part, and the optical lens array is provided with a second marker part at a position corresponding to the first marker part,
In a state where the optical element facing surface is disposed facing the optical element,
The position of the first marker part and the second marker part is detected by the imaging device from above the alignment detection surface, and the first marker part and the second marker part are overlaid, 2. The method of manufacturing an optical module according to claim 1, wherein the optical element and the optical lens array are aligned.   The optical lens array and the optical lens block are provided with a fitting structure for positioning each other, and the fitting structure is fitted to bring the contact surface into close contact with the mirror surface. The method for manufacturing an optical module according to any one of claims 1 to 3.   5. The magnet according to claim 1, wherein a magnet is provided at a position corresponding to each of the contact surface and the mirror surface, and the contact surface and the mirror surface are brought into close contact with each other by magnetic force. Manufacturing method of optical module.   The optical lens array and the optical lens block have substantially the same refractive index, and a matching film having substantially the same refractive index as the refractive index is provided between the mirror surface and the contact surface. 6. The method of manufacturing an optical module according to claim 1, wherein   The optical lens block is provided with a suction hole penetrating the contact surface and the alignment detection surface, and the optical lens block and the optical lens block are in contact with each other in the state where the alignment detection surface is in contact with the optical lens block. The method of manufacturing an optical module according to claim 1, wherein the contact surface and the mirror surface are brought into close contact with each other by sucking air from the suction hole.

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