JP2014123411A - Magnetic disk inspection device and magnetic head inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide magnetic disk and magnetic head inspection devices that prevent increase in test time and decrease in precision in positioning a magnetic head during test and that can cool a heat generating part.SOLUTION: A magnetic disk inspection device includes one or more cooling mechanisms 12-1 to 13-5 for cooling a heat generating part, a cooling mechanism control unit 14 for controlling operation of the cooling mechanisms individually, and a device control unit 11 for controlling operation of each part of the device. The device control unit individually determines operation states of the cooling mechanisms according to an operation condition of each part of the device and individually controls operation of the cooling mechanisms through the cooling mechanism control unit.

Description

  The present invention relates to a magnetic disk inspection apparatus that inspects a magnetic disk and a magnetic head inspection apparatus that inspects a magnetic head.

  A read / write tester (hereinafter referred to as RW tester) used for performance evaluation during magnetic disk drive development and component inspection during mass production actually tests magnetic recording characteristics using a magnetic disk and a magnetic head. It is used as a magnetic disk inspection device or a magnetic head inspection device. In the former case, the test is performed by replacing the magnetic disk with respect to a certain magnetic head, and in the latter case, the test is performed by replacing the magnetic head with respect to a certain magnetic disk.

  As the recording frequency and track density of the magnetic disk device increase, the RW tester is also required to improve the performance of the magnetic head positioning accuracy and the frequency band of the RW circuit. On the other hand, the improvement in the recording frequency causes overheating of a read / write amplifier (hereinafter referred to as RW amplifier) that amplifies the read / write signal of the magnetic head and suspension deformation due to heat generation of the lead wire on the suspension, which adversely affects the test result. It has come to exert. For example, overheating of the RW amplifier causes a forced suspend state of the RW amplifier, the test is interrupted, and in the worst case, the RW amplifier may be damaged. In addition, sudden and large displacement of the magnetic head due to suspension deformation is likely to reduce the positioning accuracy of the magnetic head and affect the reliability of the test results.

  Also, in bit patterned media and the like that have been developed as a new technology for increasing recording density, servo information for magnetic head positioning is formed on the magnetic disk in advance. On the other hand, eccentricity in which the center of servo information is shifted is unavoidable. Many actuators for driving the magnetic head of the RW tester use a piezo element for positioning with high accuracy. If the piezo element is continuously driven with a large amplitude in order to constantly correct the eccentric component, the piezo element's heat generation may increase, causing piezo characteristic fluctuations, and in the worst case, depolarization of the piezo element may occur. There is.

  In addition, energy-assisted recording, another new technology for increasing recording density, allows energy to be transferred from a magnetic head to a magnetic disk by a laser or microwave during writing in order to enable stable magnetic recording while suppressing write current. It comes to send. Therefore, during energy assist, heat generation in the magnetic disk and the magnetic head increases, so that an adverse effect on the test result due to a decrease in the positioning accuracy of the magnetic head is predicted.

  In order to deal with such a problem of heat generation, conventionally, a fan is provided on the upper part of the apparatus to constantly cool the entire mechanism. Further, for example, as disclosed in Patent Document 1, cooling air is introduced from the outside, and the temperature rise due to disk rotation is suppressed by flowing it through the porous material, thereby suppressing the in-plane vibration of the disk. A method for achieving this has also been proposed.

JP 2003-132655 A

  The conventional method that always cools the entire mechanism by installing a fan at the top of the device is a test to improve the positioning accuracy of the magnetic head by increasing the recording density because the wind of the cooling fan causes the positioning disturbance of the magnetic head. The operation of the cooling fan inside is difficult. Further, as a method of reducing the influence of heat generation during the test, it is possible to provide a constant cooling period during the test, but this is not desirable because the test time increases significantly. In Patent Document 1, cooling of other parts such as a suspension and an RW amplifier is not considered, and there is a possibility that the positioning accuracy of the magnetic head deteriorates due to the flow of air applied to the disk turning to the magnetic head side. is there.

  The present invention provides a magnetic disk inspection apparatus and a magnetic head inspection apparatus capable of cooling a heat generating portion while suppressing an increase in test time and a decrease in positioning accuracy of a magnetic head during a test.

  The magnetic disk inspection apparatus or the magnetic head inspection apparatus according to the present invention includes one or more cooling mechanisms for cooling the heat generation part, a cooling mechanism control unit capable of individually controlling the operation of the cooling mechanism, and the operation of each part of the apparatus. An apparatus control unit for controlling. The device control unit individually determines the operation state of the cooling mechanism according to the operation state of each unit of the device, and individually controls the operation of the cooling mechanism via the cooling mechanism control unit.

  That is, the magnetic disk inspection apparatus of the present invention includes a spindle for detachably mounting a magnetic disk to be inspected, a rotary drive mechanism for rotating the spindle, a magnetic head for recording and reproducing signals on the magnetic disk, An actuator capable of moving the magnetic head at least in the radial direction of the magnetic disk; a servo demodulator for detecting a relative position of the magnetic head with respect to the magnetic disk from a reproduction signal of a servo pattern of the magnetic disk reproduced by the magnetic head; and a servo demodulator Servo drive unit that generates a servo drive signal that controls the positioning of the actuator based on the position signal from the actuator, one or more cooling mechanisms that cool the heat generating parts, and cooling that can individually control the operation of the one or more cooling mechanisms A mechanism control unit, and a device control unit that controls the operation of each unit of the device. , The operating state of the cooling mechanism individually determined in accordance with the operating conditions of the various units, individually controls the operation of the cooling mechanism through a cooling mechanism controller.

  The magnetic head inspection apparatus according to the present invention includes a spindle on which a magnetic disk is mounted, a rotational drive mechanism that rotates the spindle, and a suspension that removably supports a magnetic head that records and reproduces signals on the magnetic disk. Servo demodulation that detects the relative position of the magnetic head with respect to the magnetic disk from the actuator that can move the magnetic head supported by the suspension at least in the radial direction of the magnetic disk and the reproduction signal of the servo pattern of the magnetic disk reproduced by the magnetic head A servo drive unit for generating a servo drive signal for positioning control of the actuator by a position signal from the servo demodulator, one or more cooling mechanisms for cooling the heat generating part, and operations of the one or more cooling mechanisms. Control of the cooling mechanism control unit that can be controlled individually and the operation of each part of the device And a that device controller, device control unit, the operating state of the cooling mechanism individually determined in accordance with the operating conditions of the various units, individually controls the operation of the cooling mechanism through a cooling mechanism controller.

  The heat generating portion cooled by the cooling mechanism includes at least one of a magnetic disk, a magnetic head, a support member (suspension) of the magnetic head, an amplifier that amplifies the signal of the magnetic head, and an actuator.

  According to the present invention, since the cooling operation can be individually controlled for each heat generating part according to the state of the inspection apparatus, effective cooling can be performed while suppressing the influence on the positioning accuracy of the magnetic head.

  Problems, configurations, and effects other than those described above will be clarified by the following description of embodiments.

It is a schematic block diagram which shows the Example of the RW tester by this invention. It is a side view of an example of the cooling mechanism corresponding to a suspension. It is a top view of an example of the cooling mechanism corresponding to a suspension. It is a side view of another example of the cooling mechanism corresponding to a suspension. It is a figure which shows the example of the table which prescribed | regulated the relationship between the positioning accuracy of a magnetic head, and the operation availability of a cooling mechanism. It is a figure which shows an example of the relationship between the operating condition of energy assistance, and the cooling timing of a magnetic disk. It is a figure which shows an example of the relationship between the condition of a write or erase operation | movement, and the cooling timing of a suspension. It is a figure which shows an example of the time change of a servo signal. It is a figure which shows an example of the time change of the servo signal at the time of eccentricity correction | amendment.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic configuration diagram showing an embodiment of an RW tester according to the present invention. In the magnetic disk inspection apparatus, the magnetic disk to be inspected can be attached to and detached from the spindle, whereas in the magnetic head inspection apparatus, the magnetic head to be inspected can be attached to and detached from the magnetic head suspension. However, there is no particular difference between them. Hereinafter, both the magnetic disk inspection device and the magnetic head inspection device are collectively referred to as an RW tester.

  In FIG. 1, the mechanism system of the RW tester includes a magnetic disk 1, a spindle (rotation drive mechanism) 2, a magnetic head 3, a suspension 4, a fine movement actuator 6, a coarse movement stage 7, a surface plate 8, and cooling mechanisms 13-1 to 13. −5, provided with a cooling mechanism control unit 14. The circuit system of the RW tester includes an RW amplifier 5, a servo demodulator 9, a servo driver 10, a controller 11, and an evaluation unit 12.

  The magnetic disk 1 is held by a spindle 2, and the spindle 2 is rotated at a constant rotational speed when data is read / written. A magnetic head 3 that reads / writes data from / to the magnetic disk 1 is held by a fine actuator 6 via a suspension 4. The coarse movement stage 7 moves the magnetic head 3 to an arbitrary radial position on the magnetic disk 1 or moves the fine movement actuator 6 to roughly position the magnetic head 3 in order to retract from the magnetic disk 1. . The fine actuator 6 is driven in accordance with the servo signal output from the servo drive unit 10 to position the magnetic head 3 on an arbitrary track on the magnetic disk 1. The spindle 2, the fine movement actuator 6 and the coarse movement stage 7 are fixed on the surface plate 8 so as not to be affected by external vibration.

  The servo demodulator 9 demodulates the servo information read by the magnetic head 3 and converts it into POS representing the position of the magnetic head 3 with respect to the magnetic disk 1. The servo drive unit 10 is a fine actuator that reduces the difference from the target position output from the control unit 11 and the POS demodulated by the servo demodulation unit 9 and positions the magnetic head 3 on the target track. Servo signals for driving 6 are calculated and output.

  The control unit 11 controls operations of the spindle 2, the coarse movement stage 7, the servo drive unit 10, and the cooling mechanism control unit 14. The evaluation unit 12 confirms with the signal from the control unit 11 that the position of the magnetic head 3 is being controlled by the servo signal, and then uses the magnetic head 3 to generate a test pattern (specific pattern) on the magnetic disk 1. The magnetic recording characteristics are tested from the read signal.

  The cooling mechanisms 13-1 to 13-5 are configured to eject compressed air from a nozzle attached to the tip of the tube. The magnetic head 3, the suspension 4, the magnetic disk 1, the fine actuator 6, and the RW amplifier, which are heat generating portions. Cool 5 individually. The cooling mechanism control unit 14 individually controls the cooling operation by individually switching the supply state of the compressed air from the air supply source to the cooling mechanisms 13-1 to 13-5 according to a command from the control unit 11. It is like that.

  Based on the above-described configuration, the operation of the cooling mechanisms 13-1 to 13-5 is determined from the degree of influence on the positioning accuracy of the magnetic head 3 required at each time point and the positioning accuracy of each heat generating portion to be cooled. By individually determining whether or not it is possible, it is possible to cool the heat generation part while suppressing the influence on the test result.

  Furthermore, based on the operation status of the RW tester so far and the servo signal output from the servo drive unit 10, the heat generation status of each heat generation site is predicted to determine a cooling portion, and the corresponding cooling mechanism 13-1 is determined. By operating ~ 13-5, effective cooling becomes possible.

  2 and 3 show a side view and a top view of an example of the cooling mechanism 13-2 corresponding to the suspension 4. FIG. Since the cooling mechanism 13-2 is fixed to the coarse movement stage 7 by the support arm 15, the relative position between the cooling mechanism 13-2 and the suspension 4 can be kept substantially constant and cooling can be performed stably. It is desirable that the cooling mechanisms 13-1 to 13-5 be fixed at positions where the relative positions to the respective heat generating portions are maintained when the coarse movement stage 7 and the like are moved. In addition, the cooling operation is quickly controlled by switching the compressed air sent from the air supply source to the cooling mechanism 13-2 at high speed by the electromagnetic valve 16. In the present embodiment, the cooling mechanism control unit 14 includes a plurality of electromagnetic valves 16 corresponding to the cooling functions 13-1 to 13-5.

  As shown in FIGS. 2 and 3, the cooling mechanism 13-2 is attached so that air flows from the side surface of the suspension 4 in a direction away from the magnetic head 3. This is to prevent a strong force from being applied to the upper surface of the suspension 4 and to prevent air from directly hitting the magnetic head 3. The force applied to the magnetic head 3 and the suspension 4 and the air flow not only cause positioning disturbance, but also cause fluctuations in the flying height of the magnetic head 3, and in the worst case, a crash occurs in which the magnetic head 3 and the magnetic disk 1 collide. Occur. In order to avoid this, the configuration as described above is used. In the cooling mechanisms 13-2 to 13-5 other than the cooling mechanism 13-1 of the magnetic head 3, air is basically allowed to flow away from the magnetic head 3. It is desirable to do so.

  A lead wire for electrically connecting the magnetic head 3 and the RW amplifier 5 is fixed on the suspension 4. Heat generated by a high frequency signal flowing through the lead wire is transmitted to the suspension 4 and deformed. Is generated. In general, the lead wire is fixed so as to pass through one of the end portions of the suspension because of productivity and the like. Therefore, the cooling mechanism 13-2 is arranged on the side through which the lead wire passes, so that effective cooling can be achieved. It becomes possible.

  Regarding the cooling mechanism 13-1, it is necessary to apply a flow of air directly in order to cool the magnetic head 3, and thus it is not possible to arrange the magnetic head 3 to avoid the above-described magnetic head 3. Therefore, when cooling the magnetic head 3, the magnetic head 3 is moved to a location away from the test area of the magnetic disk 1, or the magnetic head 3 is mechanically lifted and separated from the magnetic disk 1 and fixed. By setting the state, it is possible to reduce the risk of a crash or the like.

  Further, in the fine actuator 6, since the piezo element incorporated therein generates heat during continuous large amplitude driving at the time of eccentricity correction, it is desirable that the cooling air directly hit the piezo element portion.

  FIG. 4 is a side view showing another example of the cooling mechanism 13-2 corresponding to the suspension 4. As shown in FIG. Except that a vortex tube 17 is disposed between the electromagnetic valve 16 and the cooling mechanism 13-2, the configuration is the same as in FIG. The vortex tube 17 is supplied with compressed air, thereby discharging cool air from one side and warm air from the opposite side. Therefore, the cooling performance can be improved by supplying the cool air discharged from the vortex tube 17 to the cooling mechanism 13-2 and cooling with the cool air. The warm air discharged from the vortex tube 17 is discharged outside so as not to be affected by heat.

  FIG. 5 shows an example of a table defining the relationship between the positioning accuracy of the magnetic head 3 and whether or not the cooling mechanisms 13-1 to 13-5 are operable. For example, here, the high accuracy of the head positioning state is the state where the test is actually being executed, such as reading and writing of the test pattern, and the medium accuracy is the positioning state other than during the test execution, such as when erasing the test area, and the low accuracy Is a seek state in which the magnetic head 3 is being moved to another position. Further, the hold is a state where the position of the fine movement actuator 6 is fixed and the fine movement stage 7 is moving. The heat generation area that is far from the magnetic head and has less influence by the cooling operation is set to have a wider cooling range.For example, if the positioning is highly accurate during test execution, cooling is performed at all areas. In addition, the magnetic head 3 can be cooled only during unloading.

  With regard to the actual cooling operation, it is possible to perform cooling over the entire period that can be cooled in FIG. 5, but cooling is performed only for a necessary period according to the heat generation state of each heat generating part. Is desirable from the viewpoint of reducing the positioning disturbance of the magnetic head 3. Therefore, the heat generation status of each heat generation part is predicted from the operation history of the RW tester, and the actual cooling operation is determined by the combination of the heat generation status and the coolable period in FIG.

  FIG. 6 shows an example of the relationship between the energy assist operation status and the cooling timing of the magnetic disk 1. In this case, the heat generation state of the magnetic disk 1 is predicted by simulating the heat storage during the energy assist period and the heat dissipation during the other periods. In FIG. 6, the upper solid line is the predicted heat generation value of the magnetic disk 1, and when this value exceeds a predetermined slice value, the cooling mechanism 13-3 of the magnetic disk 1 is operated for a predetermined time. However, during the energy assist operation, the head positioning state becomes medium accuracy or higher, so actual cooling is performed between each energy assist operation and during the movement of the magnetic head 3 after the end of the energy assist operation. The cooling time is assumed to be, for example, for a predetermined time or until the predicted value of the heat generation state of the magnetic disk 1 in the cooled state falls below a predetermined value. The dotted line at the top in FIG. 6 indicates the predicted heat generation status of the magnetic disk 1 when the cooling mechanism is operated. For the piezo elements in the magnetic head 3, the RW amplifier 5, and the fine movement actuator 6, the cooling period can be determined in the same manner.

  FIG. 7 shows an example of the relationship between the status of the write or erase operation and the cooling timing of the suspension 4. Since the suspension 4 has a quick response to overheating and cooling, the above-described heat generation state is not simulated, and after the light or erase operation is continuously performed for a predetermined time or longer, the cooling mechanism 13 of the suspension 4 for a predetermined time. -2 is operated. Also in this case, during the write or erase operation, the head positioning state becomes medium accuracy or higher. Therefore, the actual cooling is performed during the movement of the magnetic head 3 between each write or erase operation and after the write or erase operation is completed. To do. The cooling time is set to be proportional to, for example, a fixed time or the immediately preceding light or erase time.

  By the way, it is also possible to predict the heat generation status of each heat generation part from the servo signal output from the servo drive unit 10, and in that case, it becomes possible to predict the heat generation more accurately.

  FIG. 8 shows an example of a time change of the servo signal. In FIG. 8, the solid line represents the time change of the servo signal when the cooling operation is not performed, and a rapid change surrounded by a circle is superimposed on the change of the gentle increase tendency. The sudden increase in the servo signal is due to the deformation of the suspension 4 caused by the write or erase operation. When such a change appears in the servo signal, the cooling mechanism 13-2 of the suspension 4 is operated. . However, during the write or erase operation, the head positioning state becomes medium accuracy or higher, so actual cooling is performed between each write or erase operation and during the movement of the magnetic head 3 after the write or erase operation is completed. . FIG. 8 shows an example in which the suspension is intermittently cooled between the write or erase operation.

  Further, since the gradual change is predicted to be mainly caused by heat generated by the RW amplifier 5, the cooling mechanism 13-5 of the RW amplifier 5 is operated so that the servo signal does not change beyond a certain slice value. Also in this case, the actual cooling operation is performed at a time other than the time when the head positioning state is high accuracy. An example of a change in the servo signal when the cooling mechanism is operated is indicated by a dotted line in FIG. Note that the RW amplifier 5 may be capable of temperature detection with a built-in temperature sensor. In such a case, the operation of the cooling mechanism 13-5 can be determined based on the detected temperature.

  FIG. 9 shows an example of the time change of the servo signal during the eccentricity correction. Since the servo signal component corresponding to the eccentricity correction is mainly a rotation primary component, only the component is extracted and the heat generation state of the piezo element in the fine actuator 6 is predicted. In FIG. 9, the solid line is a servo signal for eccentricity correction immediately after the start of eccentricity correction, and the dotted line is an eccentricity correction servo signal after a lapse of a certain time from the start of eccentricity correction. The amplitude and phase of the servo signal for the eccentricity correction change corresponding to the piezo characteristic variation due to the heat generation of the large amplitude continuous drive of the piezo element. When the amount of change in amplitude or phase exceeds a predetermined value, it is judged that the amount of heat generated by the piezo element is large, and cooling is executed, so that the heat generation state of the piezo element is predicted and the fine movement actuator The operation of the six cooling mechanisms 13-4 can be determined.

  Heat generation of the magnetic disk 1 and the magnetic head 3 occurs during energy-assisted recording. Although the influence on the servo signal in this case is predicted to be abrupt changes like the suspension 4, it may not appear as clearly as the suspension 4. In that case, the operation of the cooling mechanism 13-3 of the magnetic disk 1 and the cooling mechanism 13-1 of the magnetic head 3 is determined by predicting the heat generation state from the history of energy assist recording as described above. Further, when a temperature sensor is built in the magnetic head 3, the output signal can be used.

  In the above embodiment, the cooling mechanism control unit 14 is configured by a plurality of solenoid valves 16 or a combination of the solenoid valves 16 and the vortex tube 17, which is further combined with a flow control valve or the like for cooling. It is also possible to control the amount. Further, by generating a negative pressure in combination with a vacuum generator or the like and performing cooling by suction, it is possible to reduce the force applied to the portion to be cooled and the influence of dust generation.

  In addition, this invention is not limited to an above-described Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

DESCRIPTION OF SYMBOLS 1 Magnetic disk 2 Spindle 3 Magnetic head 4 Suspension 5 RW amplifier 6 Fine movement actuator 7 Coarse movement stage 8 Surface plate 9 Servo demodulation part 10 Servo drive part 11 Control part 12 Evaluation part 13-1 to 13-5 Cooling mechanism 14 Cooling mechanism control Part 15 Support arm 16 Solenoid valve 17 Vortex tube

Claims (14)

A spindle for detachably mounting a magnetic disk to be inspected;
A rotational drive mechanism for rotating the spindle;
A magnetic head for recording and reproducing signals to and from the magnetic disk;
An actuator capable of moving the magnetic head at least in a radial direction of the magnetic disk;
A servo demodulator for detecting a relative position of the magnetic head with respect to the magnetic disk from a reproduction signal of a servo pattern of the magnetic disk reproduced by the magnetic head;
A servo drive unit that generates a servo drive signal for positioning control of the actuator according to a position signal from the servo demodulation unit;
One or more cooling mechanisms for cooling the heat generating portion;
A cooling mechanism control unit capable of individually controlling the operation of the one or more cooling mechanisms;
A device control unit for controlling the operation of each part of the device,
The apparatus control unit individually determines an operation state of the cooling mechanism according to an operation state of each unit of the apparatus, and individually controls the operation of the cooling mechanism via the cooling mechanism control unit. Magnetic disk inspection device. The magnetic disk inspection apparatus according to claim 1,
The magnetic disk inspection apparatus, wherein the cooling mechanism performs a limited range of cooling using compressed air. In the magnetic disk inspection apparatus according to claim 1 or 2,
The heat generating portion cooled by the cooling mechanism includes at least one of the magnetic disk, the magnetic head, a support member of the magnetic head, an amplifier that amplifies the signal of the magnetic head, and the actuator. Magnetic disk inspection device. The magnetic disk inspection apparatus according to any one of claims 1 to 3,
The apparatus control unit individually determines whether or not the cooling mechanism can be operated according to a positioning state of the magnetic head and a positioning request accuracy. The magnetic disk inspection apparatus according to any one of claims 1 to 3,
The apparatus control unit individually determines an operation state of the cooling mechanism according to a predicted heat generation state of the heat generation part. The magnetic disk inspection apparatus according to any one of claims 1 to 3,
The device control unit individually determines whether or not the cooling mechanism can be operated according to the positioning state of the magnetic head and the required positioning accuracy, and further determines the operating state of the cooling mechanism individually according to the heat generation state of the heat generating portion. A magnetic disk inspection apparatus characterized by: In the magnetic disk inspection apparatus according to claim 5 or 6,
The apparatus control unit predicts a heat generation state of the heat generation part from a time change of the servo drive signal and individually determines an operation state of the cooling mechanism. A spindle equipped with a magnetic disk;
A rotational drive mechanism for rotating the spindle;
A suspension for detachably supporting a magnetic head for recording and reproducing signals with respect to the magnetic disk;
An actuator capable of moving a magnetic head supported by the suspension in at least a radial direction of the magnetic disk;
A servo demodulator for detecting a relative position of the magnetic head with respect to the magnetic disk from a reproduction signal of a servo pattern of the magnetic disk reproduced by the magnetic head;
A servo drive unit that generates a servo drive signal for positioning control of the actuator according to a position signal from the servo demodulation unit;
One or more cooling mechanisms for cooling the heat generating portion;
A cooling mechanism control unit capable of individually controlling the operation of the one or more cooling mechanisms;
A device control unit for controlling the operation of each part of the device,
The apparatus control unit individually determines an operation state of the cooling mechanism according to an operation state of each unit of the apparatus, and individually controls the operation of the cooling mechanism via the cooling mechanism control unit. Magnetic head inspection device. The magnetic head inspection apparatus according to claim 8,
The magnetic head inspection apparatus, wherein the cooling mechanism performs cooling in a limited range using compressed air. The magnetic head inspection apparatus according to claim 8 or 9,
The magnetic head inspection characterized in that the heat generating portion cooled by the cooling mechanism includes at least one of the magnetic disk, the magnetic head, the suspension, an amplifier that amplifies the signal of the magnetic head, and the actuator. apparatus. In the magnetic head inspection apparatus according to any one of claims 8 to 10,
The apparatus control unit individually determines whether or not the cooling mechanism can be operated according to a positioning state of the magnetic head and a positioning request accuracy. In the magnetic head inspection apparatus according to any one of claims 8 to 10,
The apparatus control unit individually determines an operation state of the cooling mechanism according to a predicted heat generation state of the heat generation part. In the magnetic head inspection apparatus according to any one of claims 8 to 10,
The device control unit individually determines whether or not the cooling mechanism can be operated according to the positioning state of the magnetic head and the required positioning accuracy, and further determines the operating state of the cooling mechanism individually according to the heat generation state of the heat generating portion. A magnetic head inspection apparatus. The magnetic head inspection apparatus according to claim 12 or 13,
The apparatus control unit predicts a heat generation state of the heat generation portion from a time change of the servo drive signal and individually determines an operation state of the cooling mechanism.

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