JP2014105827A - Angle adjustment member, displacement and angle adjustment member, rotation drive mechanism, fluid ejection device, and pattern forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To miniaturize an angle adjustment member for transmitting rotation of one shaft to the other shaft while absorbing a deflection angle existing between the two shafts; and to provide a displacement and angle adjustment member, a rotation drive mechanism, a fluid ejection device, and a pattern forming device using the angle adjustment member.SOLUTION: An angle adjustment part 41 and a second angle adjustment part 42 are connected with each other, and the first angle adjustment part 41 has a plurality of first constricted parts which are formed by a plurality of first recessions provided on a first main surface along a first longitudinal direction from one end to the other end and a plurality of second recessions provided on a second main surface on the side opposite from the first main surface along the first longitudinal direction, and the second angle adjustment part 42 has a plurality of second constricted parts which are formed by a plurality of third recessions provided on a third main surface having a crossing relation with the first main surface and the second main surface along a second longitudinal direction from one end to the other end and a plurality of fourth recessions provided on a fourth main surface on the side opposite from the third main surface along the second longitudinal direction.

Description

  The present invention relates to an angle adjusting member that transmits the rotation of the first axis to the second axis while connecting the first axis and the second axis so that the angular relationship between the first axis and the second axis can be adjusted. A displacement and angle adjusting member for transmitting the rotation of the drive shaft to the driven shaft while mutually connecting the drive shaft and the driven shaft so that the driven shaft can be displaced, and rotation using the angle adjusting member and the displacement and angle adjusting member. The present invention relates to a drive mechanism, a fluid ejection device, and a pattern forming device.

  A pattern forming apparatus that forms a fine pattern on a substrate with a paste-like coating liquid is equipped with a fluid ejection device that ejects the coating liquid. In this fluid ejection device, the coating liquid stored in the tank is pumped to the nozzle. The nozzle is provided with a valve. That is, in response to the rotation of the rotating shaft of the motor, the shaft rotates in the valve to open and close the nozzle outlet, and the discharge of the coating liquid from the nozzle is controlled by opening and closing the valve. Here, the shaft of the valve may be deviated from the rotation shaft of the motor. However, it is basically impossible to visually observe the inside of the nozzle after the assembly of the fluid ejection device, and fine adjustment is also impossible. Therefore, a member that automatically adjusts the angular relationship between the rotation shaft of the motor and the shaft of the valve is required. Thus, for example, a universal joint may be used as the angle adjustment member.

  However, in the pattern forming apparatus, the nozzle is downsized in order to form a fine pattern, and the diameter of the valve shaft needs to be reduced. Therefore, it has been difficult to apply a universal joint provided conventionally as an angle adjusting member as it is. Therefore, the inventor of the present application studied using an angle adjusting member having a structure in which a plurality of slits are provided on the side surface of the shaft member as described in Patent Document 1, for example. That is, in the angle adjusting member, the first slit is formed in the first perpendicular direction of the axis of the shaft member from the side surface of the shaft member, and the second slit is formed from the opposite direction of the first slit. These two types of slits are alternately formed while being separated by the same interval. By forming the slits in series along the axis of the shaft member in this way, even if the shaft of the valve is deviated with respect to the rotation axis of the motor, The rotation of the rotating shaft is transmitted to the valve shaft.

US Patent Application Publication No. 2006/0101879 (FIG. 1)

  In the angle adjusting member manufactured using the technique described in Patent Document 1, it is necessary to increase the number of notches in order to absorb a relatively large declination, and although there is no change in the shaft diameter, the angle in the axial direction is not changed. It is inevitable that the adjustment member is enlarged. Moreover, when the angle adjusting member thus enlarged is used in the fluid ejection device, the nozzle becomes long and the nozzle volume becomes relatively large. For this reason, the amount of bubbles contained in the fluid remaining inside the nozzle inevitably increases, which may lead to a decrease in coating performance.

  Moreover, the angle adjusting member manufactured using the technique described in Patent Document 1 can absorb the deflection angle, but cannot absorb the displacement of the valve shaft with respect to the rotation shaft of the motor.

  The present invention has been made in view of the above-described problems. The angle adjusting member for transmitting the rotation of one shaft to the other shaft while absorbing the declination existing between the two shafts is reduced. Providing a displacement and angle adjusting member for transmitting the rotation of the drive shaft to the driven shaft while absorbing the displacement of the driven shaft with respect to the drive shaft, and a rotary drive mechanism and fluid using the angle adjusting member and the displacement and angle adjusting member described above An object is to provide a discharge device and a pattern forming device.

  The angle adjusting member according to the present invention is configured to rotate the first shaft to the second shaft while mutually connecting the first shaft and the second shaft so that the angular relationship between the first shaft and the second shaft can be adjusted. An angle adjusting member for transmission, comprising: a first angle adjusting unit having one end connected to the first shaft; and a second angle adjusting unit having one end connected to the second shaft; The other end of the first angle adjusting unit and the other end of the second angle adjusting unit are connected to each other, and the first angle adjusting unit extends along the first longitudinal direction from one end to the other end. A plurality of first recesses are provided on the first main surface, and a plurality of second recesses are provided on the second main surface opposite to the first main surface along the first longitudinal direction. And the second angle adjusting portion is compounded along a second longitudinal direction from one end portion to the other end portion. Are provided on the third main surface intersecting with the first main surface and the second main surface, and a plurality of fourth concave portions are provided on the fourth main surface opposite to the third main surface. It has a plurality of second constrictions formed along the second longitudinal direction.

  The displacement and angle adjusting member according to the present invention is a displacement and angle for transmitting the rotation of the drive shaft to the driven shaft while interconnecting the drive shaft and the driven shaft so that the driven shaft can be displaced relative to the drive shaft. An adjustment member having the same configuration as the angle adjustment member, and a first angle adjustment member having one end of the first angle adjustment portion coupled to the drive shaft, and the same configuration as the angle adjustment member. A second angle adjusting member having one end portion of the first angle adjusting portion coupled to the driven shaft, one end portion of the second angle adjusting portion of the first angle adjusting member, and the second angle. And a connecting member that connects one end of the second angle adjusting portion of the adjusting member.

  A first aspect of the rotational drive mechanism according to the present invention has the same configuration as the rotational drive unit having a drive shaft, the rotational load unit having a driven shaft, and the angle adjustment member, and one of the first angle adjustment units. An end portion is connected to the drive shaft, and an end portion of the second angle adjusting portion is provided with an angle adjusting member connected to the driven shaft.

  A second aspect of the rotational drive mechanism according to the present invention has the same configuration as the rotational drive unit having a drive shaft, the rotational load unit having a driven shaft, and the displacement and angle adjustment member, and the first angle adjustment member. Displacement and angle adjustment in which one end of the first angle adjustment unit is coupled to the drive shaft and one end of the second angle adjustment unit of the second angle adjustment member is coupled to the driven shaft. And a member.

  A first aspect of the fluid ejection device according to the present invention includes a fluid supply unit that supplies a fluid, a nozzle that discharges the fluid supplied from the fluid supply unit from an ejection port, and an ejection port of the nozzle from the fluid supply unit A rotary load portion provided on the fluid flow path, and a discharge control portion that controls the discharge of the fluid from the discharge port by controlling the rotary load portion, and the rotary load portion has an oval cross section. A female screw type stator having a female screw formed in a spiral shape in the fluid flow direction, and a male screw having a circular cross section and being eccentrically rotatable while being in contact with the female screw of the female screw type stator A length of the female threaded stator in the flow direction is not less than ¼ period and less than one period of the female thread pitch of the female threaded stator. An orifice formed between the female screw and the male screw according to a relative rotation angle of the male screw type rotor to adjust the flow rate of the fluid in the flow direction, and the discharge control unit Has the same configuration as the rotation and drive unit having a drive shaft and the displacement and angle adjustment member according to claim 7, wherein one end of the first angle adjustment unit of the first angle adjustment member is the drive shaft. And a displacement and angle adjusting member connected to the male screw rotor at one end of the second angle adjusting portion of the second angle adjusting member.

  A second aspect of the fluid discharge device according to the present invention includes a nozzle that guides the fluid being pumped to the discharge port along the fluid flow path and discharges the fluid from the discharge port, a rotational load portion, and the driven shaft. A rotation load unit that adjusts a flow rate of the fluid that rotates and adjusts a flow rate of the fluid, and a discharge control unit that controls the discharge of the fluid from the discharge port by rotating the driven shaft. An opening communicating with the fluid flow path is provided, and the driven shaft has an axial shape extending in a crossing direction intersecting the fluid flow path and enables fluid flow in a direction different from the crossing direction. A passage portion that is inserted into the fluid flow path through the opening and is rotatably attached to the nozzle while dividing the fluid flow path into an upstream flow path and a downstream flow path; The control unit includes a rotation drive unit having a drive shaft and It has the same configuration as the angle adjustment member according to any one of claims 1 to 6, and one end of the first angle adjustment unit is connected to the drive shaft, and the second angle adjustment unit One end portion includes an angle adjusting member connected to the driven shaft.

  According to a third aspect of the fluid discharge device of the present invention, the fluid flow path is configured by rotating a driven shaft and a nozzle that guides the fluid being pumped to the discharge port along the fluid flow path and discharges the fluid from the discharge port. A rotary load unit that adjusts the flow rate of the fluid flowing through the nozzle, and a discharge control unit that controls the discharge of the fluid from the discharge port by rotating the driven shaft, and the nozzle communicates with the fluid flow path The driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path and has a passage portion that allows fluid to flow in a direction different from the intersecting direction; It is inserted into the fluid flow path through an opening and is rotatably attached to the nozzle while dividing the fluid flow path into an upstream flow path and a downstream flow path. A rotation drive unit having And one end portion of the first angle adjustment portion of the first angle adjustment member is coupled to the drive shaft, and the second angle adjustment of the second angle adjustment member has the same configuration as the angle adjustment member. And a displacement and angle adjusting member connected to the driven shaft.

  According to a first aspect of the pattern forming apparatus of the present invention, a substrate holding unit that holds a substrate, a nozzle having a plurality of discharge ports that discharge a fluid containing a material for forming a pattern, and the fluid to the nozzle A fluid supply unit to be supplied; a rotary load unit provided on a flow path from the fluid supply unit to the control target discharge port with at least one of the plurality of discharge ports as a control target discharge port; and the substrate holding unit A scanning moving unit that scans and moves the nozzle relative to the held substrate, and a discharge control unit that controls the rotation load unit to control the discharge of fluid from the control target discharge port, The rotary load portion has an oval cross section and a female screw type stator having a female screw formed in a spiral shape in the fluid flow direction, and the female screw type stator having a circular cross section. A male screw type rotor having a male screw that is eccentrically rotatable while being in contact with the female screw, and the length of the female screw type stator in the flow direction is equal to or more than ¼ period of the female screw pitch of the female screw type stator; Less than one cycle, and an orifice formed between the female screw and the male screw changes according to the relative rotation angle of the male screw type rotor with respect to the female screw type stator, and the flow rate of the fluid in the flow direction The discharge control unit has the same configuration as the rotation drive unit having a drive shaft and the displacement and angle adjustment member according to claim 7, and the first angle adjustment member has the first configuration. A displacement and angle adjusting member having one end of the angle adjusting unit coupled to the drive shaft and one end of the second angle adjusting unit of the second angle adjusting member coupled to the male screw rotor; Has .

  According to a second aspect of the pattern forming apparatus of the present invention, a substrate holding unit that holds a substrate, a fluid supply unit that pressurizes and supplies a fluid containing a material for forming a pattern, and a pressure supply from the fluid supply unit. A plurality of nozzles that discharge the fluid coming from the discharge ports, a scanning movement unit that scans and moves the plurality of nozzles relative to the substrate held by the substrate holding unit, and at least of the plurality of nozzles One of the nozzles to be controlled is a rotary load unit that adjusts the flow rate of the fluid flowing through the nozzle to be controlled by rotating the driven shaft, and the discharge of the fluid from the discharge port is controlled by rotating the driven shaft. The nozzle to be controlled has an opening communicating with the fluid flow path, and the driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path. It has a passage section that enables fluid to flow in a direction different from the crossing direction, and is inserted into the fluid flow path through the opening to divide the fluid flow path into an upstream flow path and a downstream flow path. However, the discharge control unit is rotatably attached to the nozzle to be controlled, and the discharge control unit has the same configuration as the rotation drive unit having a drive shaft and the angle adjustment member according to any one of claims 1 to 6. And an angle adjusting member having one end of the first angle adjusting unit coupled to the drive shaft and one end of the second angle adjusting unit coupled to the driven shaft.

  According to a third aspect of the pattern forming apparatus of the present invention, a substrate holding unit that holds a substrate, a fluid supply unit that pressurizes and supplies a fluid containing a material for forming a pattern, and a pressure supply from the fluid supply unit. A plurality of nozzles that discharge the fluid coming from the discharge ports, a scanning movement unit that scans and moves the plurality of nozzles relative to the substrate held by the substrate holding unit, and at least of the plurality of nozzles One of the nozzles to be controlled is a rotary load unit that adjusts the flow rate of the fluid flowing through the nozzle to be controlled by rotating the driven shaft, and the discharge of the fluid from the discharge port is controlled by rotating the driven shaft. The nozzle to be controlled has an opening communicating with the fluid flow path, and the driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path. It has a passage section that enables fluid to flow in a direction different from the crossing direction, and is inserted into the fluid flow path through the opening to divide the fluid flow path into an upstream flow path and a downstream flow path. While being rotatably attached to the nozzle to be controlled, the discharge control unit has the same configuration as the rotation drive unit having a drive shaft and the displacement and angle adjustment member according to claim 7, wherein the first A displacement in which one end portion of the first angle adjusting portion of the angle adjusting member is connected to the drive shaft and one end portion of the second angle adjusting portion of the second angle adjusting member is connected to the driven shaft. And an angle adjusting member.

  In the invention configured as described above, the first angle adjusting unit having a plurality of first constricted portions and the second angle adjusting unit having a plurality of second constricted portions intersecting with the first constricted portions are connected. An angle adjusting member is formed. Therefore, when the second axis is deviated with respect to the first axis, at least one of the first constricted portion and the second constricted portion is bent flexibly according to the declination and absorbs the declination. The rotation of the shaft is transmitted to the second shaft. A plurality of angle adjusting members having such characteristics are connected in series to form a displacement and angle adjusting member. For this reason, the displacement of the driven shaft relative to the drive shaft is absorbed, and the rotation of the drive shaft is transmitted to the driven shaft in the displaced state.

  Further, in the rotation drive mechanism, the fluid ejection device, and the pattern forming device, the angle adjusting member or the displacement and angle adjusting member having the above characteristics functions as a shaft joint, and transmits the rotation of the drive shaft to the driven shaft. For this reason, even if a declination or a displacement occurs, it is possible to reliably transmit the rotation of the drive shaft of the rotation drive unit to the driven shaft of the rotation load unit and operate the rotation load unit as desired. .

It is a figure which shows the rotational drive mechanism equipped with one Embodiment of the angle adjustment member concerning this invention. It is a figure which shows the rotational drive mechanism equipped with one Embodiment of the displacement and angle adjustment member concerning this invention. It is a figure which shows the external appearance of one Embodiment of the fluid discharge apparatus using the displacement and angle adjustment member concerning this invention. It is sectional drawing of the fluid discharge apparatus shown in FIG. It is a perspective view which shows the structure of the valve | bulb used with the fluid discharge apparatus shown in FIG. It is a figure which shows the shape of the stator and rotor in a cross section orthogonal to a discharge direction. It is an expansion perspective view which shows the displacement and angle adjustment member with which a discharge control part is equipped. It is a figure which shows typically the operation | movement of a displacement and an angle adjustment member. It is a figure which shows the external appearance of one Embodiment of the fluid discharge apparatus using the angle adjustment member concerning this invention. It is sectional drawing of the fluid discharge apparatus shown in FIG. It is sectional drawing of the fluid discharge apparatus shown in FIG. It is sectional drawing which shows other embodiment of the fluid discharge apparatus using the angle adjustment member concerning this invention. It is a figure which shows typically the discharge control operation | movement in the fluid discharge apparatus shown in FIG. It is a figure which shows one Embodiment of the pattern formation apparatus concerning this invention. It is a figure which shows the example of the photovoltaic cell formed using the pattern formation apparatus of FIG. It is a figure which shows typically the mode of finger electrode formation by the apparatus of FIG. It is a flowchart which shows the pattern formation process by this embodiment.

A. FIG. 1 is a view showing a rotation drive mechanism equipped with an embodiment of an angle adjustment member according to the present invention, and FIG. 1 (a) is a side view showing the entire configuration of the rotation drive mechanism. FIG. 4B is a perspective view showing the configuration of the angle adjusting member. As shown in FIG. 1A, the rotation drive mechanism 1A rotates the drive shaft 21 of the rotation drive unit 2 such as an electric motor or a pneumatic motor, and the rotation load unit 3 is driven by the rotation of the drive shaft 21. The shaft 31 is rotated to perform a predetermined operation (for example, a valve opening / closing operation or a flow rate adjusting operation). As described above, the driven shaft 31 may be deviated with respect to the drive shaft 21. In order to transmit the rotation of the drive shaft 21 to the driven shaft while absorbing the declination, in the present embodiment, the following is performed. The configured angle adjusting member 4 is used as a shaft coupling means.

  For example, as shown in FIG. 1B, the angle adjusting member 4 has an axial shape extending in the axial direction DA, and an angle adjusting unit 41 is provided on the rotation drive unit 2 side (the left hand side in the figure). In addition, an angle adjustment unit 42 is provided on the rotational load unit 3 side (right hand side in the figure). Then, the (−DA) side end of the angle adjustment unit 41 is coupled to the drive shaft 21, the (+ DA) side end of the angle adjustment unit 42 is coupled to the driven shaft 31, and the angle adjustment unit 41 ( The end on the (+ DA) side and the end on the (−DA) side of the angle adjusting unit 42 are directly connected to each other.

  The angle adjustment unit 41 continuously scrapes the side surface of the cylindrical angle adjustment member 4 from the first orthogonal direction DB orthogonal to the axial direction DA at a constant pitch PT in the axial direction DA, thereby providing a plurality of notch portions (first 1 concave portion) A corrugated main surface 41a in which NT1 is continuously provided in the axial direction DA is formed. Further, also on the side opposite to the main surface 41a, the side surfaces of the angle adjusting member 4 are continuously scraped from the first orthogonal direction DB at a constant pitch PT, so that a plurality of notch portions (second concave portions) NT2 are axially DA. A corrugated main surface 41b is formed. In this way, a corrugated portion having a thickness of about 100 [μm] is formed in the central portion of the angle adjusting member 4, and the portion is given flexibility. The number and shape of the notch portions NT1 provided on the main surface 41a are the same as the notch portions NT2 provided on the main surface 41b, and the notch portions NT1 and the notch portions NT2 are arranged so as to form a plurality of pairs. A plurality of constricted portions 41c are formed in the corrugated plate-shaped portion, and exhibit a leaf spring effect. In addition, although the shape of notch part NT1, NT2 is arbitrary, in this embodiment, the front end cross section of notch part NT1, NT2 is finished in circular arc shape as shown to Fig.1 (a). This also applies to the notch portion of the angle adjusting unit 42 described below.

  The angle adjustment unit 42 has the same configuration as the angle adjustment unit 41 except that the angle adjustment unit 42 is orthogonal to the angle adjustment unit 41 when viewed from the axial direction DA. That is, the angle adjustment unit 42 has the same structure as that obtained by rotating the angle adjustment unit 41 by 90 ° about the axis. More specifically, the angle adjusting unit 42 continuously scrapes the side surface of the angle adjusting member 4 at a constant pitch PT in the axial direction DA from the second orthogonal direction DC orthogonal to the axial direction DA and the first orthogonal direction DB. A corrugated main surface 42a in which a plurality of notches (third recesses) NT3 are arranged in the axial direction DA is formed. Further, also on the opposite side of the main surface 42a, the side surfaces of the angle adjusting member 4 are continuously scraped at a constant pitch PT from the second orthogonal direction DC, so that a plurality of notch portions (fourth concave portions) are formed in the axial direction DA. An arranged corrugated main surface 42b is formed. Therefore, in the angle adjusting member 4, the main surfaces 42a and 42b are orthogonal to the main surfaces 41a and 41b when viewed from the axial direction DA. In the present embodiment, the number and shape of the notch portions NT3 provided on the main surface 42a are the same as the notch portions provided on the main surface 414, and the notch portions (third recesses) NT3 and the notches are formed in multiple pairs. A portion (fourth concave portion) is arranged, and thereby a plurality of constricted portions 42c are configured.

  As described above, in the present embodiment, the angle adjusting portions 41 and 42 having an orthogonal relationship are formed in series with the axial direction DA, bent in an arbitrary direction orthogonal to the axial direction DA, and driven with the drive shaft 21. The angular relationship with the shaft 31 is adjustable. For this reason, even when the driven shaft 31 is deviated with respect to the drive shaft 21, the bending stress corresponding thereto acts on the angle adjusting member 4, and the width of both or one of the constricted portions 41c and 42c is reduced. Change to absorb the declination. For example, as shown in FIG. 1A, when the deflection angle α exists in the DA-DB plane, the angle adjusting unit 41 is bent mainly and the width of the constricted portion 41c changes. Specifically, the width of each notch portion NT1 is narrowed, while the width of each notch portion NT2 is widened to absorb the deflection angle α.

  In addition, since both the angle adjusting portions 41 and 42 are provided with a plurality of constricted portions to absorb the declination, the following operational effects can be obtained. In order to absorb the declination in each of the angle adjusting portions 41 and 42, for example, the corrugated plate portion is configured to be finished in a flat plate shape, in other words, it is configured by a single constricted portion to function as a leaf spring. However, in this case, bending stress tends to concentrate on the central portion, resulting in a decrease in strength. On the other hand, in this embodiment, since a plurality of constricted portions are provided, bending stress is distributed to the plurality of constricted portions, and as a result, the angle adjusting member 4 has an excellent proof stress.

  Moreover, since the constricted portion is formed by continuing the notch portion in the axial direction DA, compared to the structure described in Patent Document 1, that is, a structure in which a plurality of slits are arranged in the axial direction DA at intervals of about the slit width. The length of the angle adjusting member 4 in the axial direction DA can be greatly shortened. As a result, the rotational drive mechanism 1A can be configured compactly.

  As described above, in the present embodiment, the drive shaft 21 corresponds to an example of the “first axis” of the present invention, and the driven shaft 31 corresponds to an example of the “second axis” of the present invention. The angle adjusting unit 41 corresponds to an example of the “first angle adjusting unit” of the present invention, and the (−DA) side end of the angle adjusting unit 41 is “one end of the first angle adjusting unit” of the present invention. And the (+ DA) side end corresponds to an example of “the other end of the first angle adjustment unit” of the present invention. The main surfaces 41a and 41b of the angle adjustment unit 41 correspond to examples of the “first main surface” and the “second main surface” of the present invention, respectively. The angle adjusting unit 42 corresponds to an example of the “second angle adjusting unit” of the present invention, and the (+ DA) side end of the angle adjusting unit 42 is the “one end of the second angle adjusting unit” of the present invention. While corresponding to an example, the (−DA) side end corresponds to an example of “the other end of the second angle adjusting unit” of the present invention. The main surfaces 42a and 42b of the angle adjusting unit 42 correspond to examples of the “third main surface” and the “fourth main surface” of the present invention, respectively. Further, the axial direction DA corresponds to an example of “first longitudinal direction” and “second longitudinal direction” of the present invention. Further, the constricted portions 41c and 42c correspond to examples of the “first constricted portion” and the “second constricted portion” of the present invention, respectively.

  In the above embodiment, the angle adjusting member 4 is rotated by 90 ° around the axis, that is, the main surfaces 41a and 41b of the angle adjusting unit 41 and the main surfaces 42a and 42b of the angle adjusting unit 42. Although it is composed of two angle adjusting portions 41 and 42 arranged orthogonal to each other, the relative rotation angle of the angle adjusting portions 41 and 42 is not limited to the above 90 °, and is slightly deviated from 90 °. May be used. Also, the number of angle adjusting parts is not limited to “2”. For example, three angle adjusting parts are arranged in series in the axial direction DA while being arranged in a state of being rotated about 60 ° around the axis. You may use what was provided.

  In the above embodiment, the angle adjusting member 4 is manufactured by cutting a cylindrical metal rod. However, the shape of the metal rod is not limited to this, and for example, a prismatic one is used. Also good. Moreover, the material and manufacturing method of the angle adjustment member 4 are not limited to the said embodiment.

B. Rotation Drive Mechanism Equipped with Displacement and Angle Adjustment Member FIG. 2 is a view showing a rotation drive mechanism equipped with an embodiment of the displacement and angle adjustment member according to the present invention. Similar to the rotary drive mechanism 1A, the rotary drive mechanism 1B transmits the rotation of the drive shaft 21 of the rotary drive unit 2 such as an electric motor or a pneumatic motor to the driven shaft 31 of the rotary load unit 3 to perform a predetermined operation. Is what you do. In the rotational drive mechanism 1B, the displacement and angle adjusting member 5 configured as follows is used as a shaft coupling means for connecting the drive shaft 21 and the driven shaft 31. Hereinafter, the configuration of the displacement and angle adjusting member 5 will be described with reference to FIG.

The displacement and angle adjusting member 5 includes two angle adjusting members 4A and 4B having the same configuration as the angle adjusting member 4 shown in FIG. More specifically, as shown in FIG. 2, the angle adjustment member 4A has an axial shape extending in the axial direction DA, and an angle adjustment unit 41 is provided on the rotation drive unit 2 side (left hand side in the figure). An angle adjusting unit 42 is provided on the rotational load unit 3 side (right hand side in the figure). On the other hand, the angle adjustment member 4 </ b> B has a configuration symmetrical to the angle adjustment member 4 </ b> A with respect to the connecting member 51. That is, the angle adjusting member 4B also has an axial shape extending in the axial direction DA, and the angle adjusting unit 42 is provided on the rotation drive unit 2 side (left hand side in the figure) and the rotation load unit 3 side (same figure). Angle adjusting portion 41 is provided on the right hand side). And the edge part of angle adjustment member 4A, 4B is connected as shown in the figure. That means
(−DA) side end portion of the angle adjustment portion 41 of the angle adjustment member 4A is coupled to the drive shaft 21,
The (+ DA) side end portion of the angle adjusting portion 42 of the angle adjusting member 4A is connected to the (−DA) side end portion of the connecting member 51,
The (−DA) side end of the angle adjustment part 42 of the angle adjustment member 4B is connected to the (+ DA) side end of the connection member 51,
The (+ DA) side end of the angle adjusting part 41 of the angle adjusting member 4B is connected to the driven shaft 31.

  As described above, according to the displacement and angle adjustment member 5 according to the present embodiment, the driven shaft 31 with respect to the drive shaft 21 is obtained by a combination of the angle adjustment function by the angle adjustment member 4A and the angle adjustment function by the angle adjustment member 4B. The displacement of the driven shaft 31 relative to the drive shaft 21 can be absorbed in addition to the declination. For example, as shown in FIG. 2, when the axis AX3 of the driven shaft 31 is displaced in the direction DC by the displacement amount β with respect to the axis AX2 of the drive shaft 21, the width of the constricted portion 41c of each angle adjusting unit 41 Changes. Specifically, in the angle adjustment part 41 of the angle adjustment member 4A, the width of each notch part NT1 is widened, while the width of each notch part NT2 is narrowed. Moreover, in the angle adjustment part 41 of the angle adjustment member 4B, while the width of each notch part NT1 becomes narrow, the width of each notch part NT2 becomes wide. As a result, the rotation of the drive shaft 21 can be transmitted to the driven shaft 31 while absorbing the displacement. As will be described later, when the displacement and angle adjustment member 5 is used as a main component of the fluid ejection device, the rotation of the drive shaft 21 is transmitted to the driven shaft 31 while absorbing the displacement and the deflection angle. Control fluid ejection. This point will be described in detail later.

  Moreover, since each angle adjustment member 4A, 4B has the same structure as the angle adjustment member 4 shown in FIG. 1, the displacement and the angle adjustment member 5 are the same operation effects as the angle adjustment member 4, ie, in the axial direction DA. It is short and has excellent strength.

  As described above, in the present embodiment, the angle adjustment members 4A and 4B correspond to examples of the “first angle adjustment member” and the “second angle adjustment member” of the present invention, respectively. In this embodiment, the angle adjusting members 4A and 4B are connected by the connecting member 51 to form the displacement and angle adjusting member 5. However, the angle adjusting member 4A, the connecting member 51, and the angle adjusting member 4B are integrated. You may form in.

C. Fluid ejection device using displacement and angle adjustment member C-1. Outline Configuration FIG. 3 is a view showing an appearance of an embodiment of a fluid ejection device using a displacement and angle adjusting member according to the present invention. 4 is a cross-sectional view of the fluid ejection device shown in FIG. The fluid ejection device 100A includes a nozzle block 200 in which a front block unit 210 and a rear block unit 220 are integrated. The front block unit 210 functions as a nozzle, and a storage space 211 for storing fluid pumped from a fluid supply unit (not shown) is formed therein, and four discharge ports are formed at the front end. 212 are provided in a row. Each discharge port 212 is exposed on the outer surface of the front block part 210. Further, a valve 300 is provided for each discharge port 212 at a position immediately before the discharge port 212. In addition, a discharge control unit 400 that controls the discharge of fluid is provided for each discharge port 212. The four discharge control units 400 operate independently and control the discharge of the fluid in the storage space 211 from the discharge ports 212 by opening and closing the valve 300. In the present embodiment, the arrangement direction of the discharge ports 212 is referred to as “arrangement direction P”, and the discharge direction of the fluid from each discharge port 212 is referred to as “discharge direction Q”. A crossing direction intersecting at right angles is referred to as a “crossing direction R”. Further, in the present embodiment, in order to reduce the pitch of the discharge ports 212 (specifically, 2 [mm] pitch), the miniaturized and highly accurate valve 300 using a uniaxial eccentric screw pump (Mono pump) is used. Yes. Hereinafter, after describing the basic principle of the valve 300, the configuration and operation of the valve 300, the configuration and operation of the discharge control unit 400 will be described.

C-2. Basic Principle of Valve The present inventor has conventionally studied various studies and improvements on a single-shaft eccentric screw pump (Mono pump). During the research, the single-shaft eccentric screw pump functions as a valve by satisfying certain conditions. I got the knowledge. As described in, for example, US Pat. No. 5,120,204, a uniaxial eccentric screw pump is formed by inserting a male screw type rotor extending in a fluid delivery direction into a female screw type stator extending in the same direction. The fluid is sent out by rotating eccentrically relative to the female thread type stator, and is widely used than before. The female screw type stator is made of an elastic member such as fluoro rubber, and has a female screw having an oval shape in any cross section orthogonal to the delivery direction. On the other hand, the male screw type rotor is made of a metal material such as stainless steel, and each cross section orthogonal to the delivery direction has a circular shape. Then, the male screw type rotor rotates with a predetermined eccentric amount with respect to the female screw type stator, thereby functioning as a pump.

  Here, in order to function as a pump, the axial direction (feeding direction) of the pump (hereinafter referred to as “main body length”) needs to be equal to or longer than one cycle of the female screw pitch of the stator. This is because a sealed space called a cavity cannot be formed between the stator and the rotor unless this condition is satisfied. On the other hand, when the main body length is shorter than one cycle of the female screw pitch of the stator, it corresponds to the relative rotation angle θ of the rotor with respect to the stator (0 ° ≦ θ ≦ 360 ° or −180 ° ≦ θ ≦ 180 °). The orifice formed between the female screw and the male screw changes.

  More specifically, when the main body length VL is less than one cycle of the female screw pitch of the stator and is ½ cycle or more, the main body length VL is fully opened at a specific relative rotation angle θ1. Further, the valve is fully closed at another relative rotation angle θ2. Therefore, by switching the relative rotation angle between the angle θ <b> 1 and the angle θ <b> 2, it is possible to control the fluid flow and shut-off. That is, it functions as an open / close valve. When the main body length VL is longer than ½ period of the female screw pitch, the range of the rotation angle that is fully closed is widened, and the orifice in the fully open state has a main body length VL of ½ of the female screw pitch. It becomes smaller than the orifice in the fully open state at the period.

  Further, while the relative rotation angle shifts from the angle θ1 to the angle θ2, and conversely shifts from the angle θ2 to the angle θ1, the orifice formed between the female screw and the male screw gradually increases according to the relative rotation angle. Change. Therefore, the flow rate can be adjusted by utilizing this phenomenon. With respect to these points, the operation of the valve whose main body length VL is ½ the internal thread pitch of the stator will be described in detail later with reference to FIG.

  Further, when the main body length VL is less than a half cycle of the female thread pitch of the stator, the fully closed state cannot be obtained and the valve does not function as an on-off valve. However, since the orifice changes according to the relative rotation angle, the flow rate can be adjusted. However, if the main body length VL is shorter than a quarter cycle of the female screw pitch of the stator, the amount of change in the orifice according to the relative rotation angle becomes very small, and it is practically difficult to adjust the flow rate.

  The valve 300 is based on the above knowledge, and the valve 300 is configured as follows and can adjust the flow rate. Hereinafter, the configuration and operation of the valve 300 will be described with reference to FIGS. 5 and 6.

C-3. Configuration and Operation of Valve FIG. 5 is a perspective view showing the configuration of the valve used in the fluid ejection device shown in FIG. All of the four valves 300 provided in the fluid ejection device 100A have the same configuration. The valve 300 includes an internal thread type stator 310 having a cross section orthogonal to the fluid discharge direction (+ Q) having an elliptical shape and a female screw formed in a spiral shape in the discharge direction (+ Q), and a discharge direction ( And a male screw type rotor 320 having a male screw 321 that is eccentrically rotatable while being in contact with the female screw 311 of the female screw type stator 310. In this embodiment, the length of the stator 310 in the axial direction (discharge direction Q), that is, the main body length VL is ½ period of the female screw pitch of the stator 310. Hereinafter, the internal thread type stator 310 and the external thread type rotor 320 are simply referred to as “stator 310” and “rotor 320”, respectively.

  A discharge controller 400, which will be described in detail later, is attached to the rear end portion of the rotor 320. The rotor 320 is eccentrically rotated by the discharge controller 400 to control the flow rate.

FIG. 6 is a diagram showing the shapes of the stator and the rotor in a cross section orthogonal to the discharge direction. In this embodiment, as shown in FIG. 5A, the length of the stator 310 in the axial direction (discharge direction Q), that is, the main body length VL is ½ period of the female screw pitch of the stator 310. And as shown in seven cross sections orthogonal to the discharge direction (+ Q), that is, FIG.
(1) Section: Section at the valve end on the discharge port 212 side (lower side in the figure),
(2) Section ... (1) Section at a position separated from the section by 1/12 period of the female thread pitch,
(3) Section ... (1) Section at a position separated from the section by 2/12 period of female thread pitch,
(4) Section ... (1) Section at a position separated from the section by 3/12 period of female screw thread pitch,
(5) Cross section (1) Cross section at a position separated from the cross section by 4/12 period of female screw thread pitch,
(6) Section: (1) Section at a position separated from the section by 5/12 period of the female thread pitch,
(7) Cross section (1) A cross section at a position separated from the cross section by a 6/12 cycle of the internal thread pitch, that is, at the valve end on the discharge control section 400 side (upper side in the figure),
The cross-sectional shapes of the stator 310 and the rotor 320 in FIG. 5 are shown when the rotor 320 is rotated by 0 °, 90 °, 180 °, and 270 ° about the central axis of eccentric rotation (the central axis of the discharge port 212). FIG. 6 shows the result. The hatched area in the figure indicates that the cavity is open.

  First, when the rotation angle θ of the rotor 320 is 0 °, as shown in the uppermost row of FIG. 6, when attention is paid to the upper cavity UCV and the lower cavity DCV, the upper cavity UCV is closed at the cross section (1), Since the side cavity DCV is closed at the section (7), the valve 300 is in a closed state. Further, when the rotation angle θ of the rotor 320 is 90 °, as shown in the second row from the top in FIG. 6, the upper cavity UCV is open in any cross section, so that the valve 300 is in an open state. Similarly, it can be seen that when the rotation angle θ of the rotor 320 is 180 ° and 270 °, the rotor 320 is in the closed state and the open state, respectively. That is, the valve 300 configured as described above is a valve that repeatedly opens and closes every 90 ° rotation of the rotor 320. Incidentally, the fully closed state is when the rotation angle θ of the rotor 320 is 0 ° and 180 °. Further, full opening is only when the rotation angle θ of the rotor 320 is 90 ° and 270 °, and in other cases, it is partially open. Accordingly, a rotation control unit 410 of the discharge control unit 400 is operated for a predetermined time by a control unit that controls the entire apparatus (not shown) to control the rotation angle θ of the rotor 320 to 0 °, 90 °, 180 °, and 270 °. By doing so, the opening and closing of the valve 300 can be controlled. Further, when the transition is made from the fully open state to the fully closed state, or when the transition is made from the fully closed state to the fully open state, for example, when the rotation angle θ is shifted from 0 ° to 90, the orifice continuously changes and flows through the valve 300. Thus, the flow rate of the fluid supplied to the discharge port 212 can be adjusted.

  As described above, in the fluid ejection device 100A, the valve 300 described in the above section “C-2. Basic Principle of Valve” is used. Therefore, by adjusting the rotation angle of the rotor 320 with respect to the stator 310, The discharge and stop of fluid from the discharge port 212 can be switched, and the discharge flow rate can also be adjusted. In this embodiment, the rotor 320 is only rotated eccentrically in the stator 310, and there is no deformation of the components, and highly accurate fluid discharge can be performed stably.

  Further, the following operation and effect can be obtained as compared with a conventional device in which a shaft is rotated by a motor to open and close a discharge port. That is, in the conventional apparatus, a relatively large motor is required to generate the axial force, but in the present embodiment, this is not necessary. Therefore, the rotational drive source of the rotor 320 (the discharge control unit 400 described below) The size of the rotation drive unit 410) can be reduced. This greatly contributes to downsizing of the fluid ejection device 100A.

  In this embodiment, the rotor 320 having the helical male screw 321 is rotated to shift from the fully open state to the fully closed state, or from the fully closed state to the fully open state. A corresponding pump effect is obtained. For example, in FIG. 5B, when the rotor 320 of the valve 300 is eccentrically rotated clockwise in FIG. 5B, the pump effect acts in the direction (−Q) opposite to the discharge direction (+ Q). Therefore, in the fluid ejection device 100A in which the ejection port 212 is disposed below the valve 300, when the rotor 320 is eccentrically rotated clockwise in FIG. The fluid on the discharge port 212 side is pulled back to the valve 300 side by the pump effect. A so-called suck back effect is obtained. Further, when the rotor 320 is eccentrically rotated counterclockwise in the same figure and switched to the fully opened state, fluid is pushed out to the discharge port 212 side by the pump effect while shifting to the fully opened state. A so-called pumping effect is obtained, and the response speed of the valve 300 can be increased. Therefore, when the fluid is discharged from the discharge port 212, the rotor 320 is eccentrically rotated counterclockwise in the drawing to generate a pumping effect, while when the fluid discharge is stopped, the rotor 320 is rotated in the reverse direction. It is preferable to prevent the fluid from dripping from the discharge port 212 by generating a suck back effect by rotating the shaft eccentrically.

C-4. Configuration and Operation of Discharge Control Unit FIG. 7 is an enlarged perspective view showing a displacement and angle adjusting member provided in the discharge control unit. FIG. 8 is a diagram schematically showing the operation of the displacement and angle adjusting member, and shows the state in which the front block portion 210 is removed in order to facilitate understanding of the configuration. Hereinafter, the configuration and operation of the discharge controller 400 will be described with reference to FIGS. 4, 7, and 8.

  The four discharge control units 400 are basically the same. The discharge control unit 400 includes a rotation drive unit 410, a rigid coupling 420, a rotation shaft 430, a displacement and angle adjustment member 440, and a transmission photoelectric sensor (not shown). The rotation drive unit 410 functions as a drive source for the rotor 320 of the valve 300, and is disposed inside the rear block unit 220 from the (−Q) side opening of the through hole 221 provided in the rear block unit 220. Although not shown, the rotation drive unit 410 includes a micro electric motor (for example, a micro motor SLB series manufactured by Namiki Precision Jewelry Co., Ltd.), a speed reducer, a shaft body, and an encoder. The rotating shaft of the micro electric motor is connected to the shaft body via a speed reducer. When the micro electric motor is operated, the rotation of the rotating shaft of the micro electric motor is reduced to, for example, 1/30 by the speed reducer and then transmitted to the shaft body. The shaft body corresponds to the rotation shaft of the rotation drive unit 410, and is connected to the (−Q) side end of the rotation shaft 430 by a rigid coupling 420. In this embodiment, as shown in FIG. 4A, two types of lengths of the rotating shaft 430 are prepared, and the arrangement position of the rigid coupling 420 is set in two stages in the discharge direction Q. In addition, the code | symbol 222 in the figure is a through-hole for operation | work for performing the attachment or detachment operation | work of the rigid coupling 420. FIG.

The (+ Q) side end of the rotating shaft 430 is connected to the displacement and angle adjusting member 440. The displacement and angle adjustment member 440 basically has the same configuration as the displacement and angle adjustment member 5 shown in FIG. That is, as shown in FIG. 7, the displacement and angle adjustment member 440 includes two angle adjustment members 4A and 4B having the same configuration as the angle adjustment member 4 shown in FIG. . The angle adjustment member 4A has an axial shape extending in the axial direction (discharge direction Q). The angle adjustment member 41 is provided on the rotating shaft 430 side (upper side in FIG. 7) and the valve 300 side (shown in FIG. 7). An angle adjusting unit 42 is provided on the lower side. On the other hand, the angle adjustment member 4 </ b> B has a configuration symmetrical to the angle adjustment member 4 </ b> A with respect to the connecting member 441. That is, the angle adjusting member 4B also has an axial shape extending in the axial direction (discharge direction Q), and the angle adjusting unit 42 is provided on the rotating shaft 430 side (upper side in FIG. 7), and the valve 300 side (same as above). An angle adjustment unit 41 is provided on the lower side of the drawing. And the edge part of angle adjustment member 4A, 4B is connected as shown in the figure. That means
The (−Q) side end of the angle adjustment portion 41 of the angle adjustment member 4A is connected to the rotation shaft 430,
The (+ Q) side end of the angle adjustment part 42 of the angle adjustment member 4A is coupled to the (−Q) side end of the coupling member 441,
The (−Q) side end portion of the angle adjusting portion 42 of the angle adjusting member 4B is connected to the (+ Q) side end portion of the connecting member 441, and
The (+ Q) side end of the angle adjustment portion 41 of the angle adjustment member 4B is welded to the rotor 320 of the valve 300.

  Further, an O-ring (O-ring) 442 made of a material such as fluororubber is attached to the connecting member 441. If it is difficult to reduce the size of the O-ring 442, a cylindrical rubber may be used instead of the O-ring 442.

  The O-rings 442 attached to the respective connecting members 441 are fixed together by attaching the O-ring fixing plate 443 to the rear block portion 220 with a fastener such as a screw. Further, by fixing the O-ring 442 and the O-ring fixing plate 443, fluid in the storage space 211 is prevented from leaking to the rear block portion 220. Further, the displacement and angle adjustment member 440 is supported so as to be slightly swingable around the mounting position of the O-ring 442, and the angle adjustment portions 41 and 42 are bent to absorb the displacement. In particular, in order to reduce the pitch of the discharge ports 212, it is necessary to use the above-described micro electric motor as a rotation drive source. However, as shown in FIG. 8, the rotation shaft 410a of the rotation drive unit 410 is inclined in the radial direction. However, by combining with the displacement and angle adjusting member 440 configured as described above, the displacement and the micro electric motor can be suitably used by absorbing the displacement. Next, the reason will be described with reference to FIG.

In the displacement and angle adjustment member 440, the center point of the angle adjustment portions 41 and 42 is basically the center of angle adjustment. For example, in the case shown in FIG. 8, the angle adjustment portions 42 and 42 are mainly bent to adjust the angle. Is done. In this case, the center point of the angle adjustment parts 42 and 42 is the center of angle adjustment, and the distance from the O-ring 442 to the center point P1 of the angle adjustment part 42 of the angle adjustment member 4A is “L1”, and the angle from the O-ring 442 The distance from the angle adjustment unit 42 of the adjustment member 4B to the center point P2 is “L2”, the displacement amount from the axis AX of the rotation drive unit 410 at the center point P1 is “e1”, and the rotation drive unit 410 at the center point P2 If the displacement amount from the axis AX is “e2”,
e1 / L1 = e2 / L2
The relationship indicated by is established. Accordingly, for example, when the distance L1 = 2 [mm] and the distance L2 = 4 [mm] and the displacement amount e2 = 120 [μm], the displacement amount e1 is 60 [μm] from the lever ratio (= 2). It is necessary to absorb it by the displacement and angle adjustment member 440. For this purpose, as described above, by using the micro electric motor as the rotation drive source, the radial clearance of the rotation shaft 410a of the rotation drive unit 410, that is, the displacement amount e1 = 60 [μm] is an extension of the rotation shaft 410a. When the distance is doubled on the line and the distance L3 = 6 [mm], the displacement e1 = 60 [μm] can be absorbed by using 120 μm (one side 60 μm).

  It should be noted that flexibility in an arbitrary direction is given to the displacement and angle adjusting member 440 by combining the angle adjusting portions 41 and 42 orthogonal to each other. In FIG. 8, the angle adjusters 42 and 42 are mainly bent to perform displacement and angle adjustment, and the lever ratio is set to 2. On the other hand, when the angle adjustment units 41 and 41 are bent mainly to perform displacement and angle adjustment, the lever ratio becomes smaller than 2. Therefore, it is desirable to set the amount of eccentricity in the valve 300 in consideration of these points.

  Further, in this embodiment, as shown in FIG. 7, a horizontal hole 431 through which light passes is formed in the rotation shaft 430 in the vicinity of the rotation driving unit 410, and each time the horizontal hole 431 is detected by the transmission photoelectric sensor. It is configured to output a pulse signal, and the approximate angle of the rotating shaft 430 can be detected. Further, each time the rotation shaft of the micro electric motor rotates once, a pulse signal is output once from the encoder. By using these signals to accurately determine the origin and controlling the eccentric rotational position of the rotor 320 of the valve 300, the discharge amount can be controlled as described above.

  As described above, in this embodiment, the displacement and angle adjustment member 440 transmits the rotation of the rotation shaft 410a of the rotation drive unit 410 to the rotor 320 of the valve 300 to control the discharge amount. Therefore, the discharge amount can be controlled with high accuracy using an ultra-small device such as a micro electric motor as a drive source for the eccentric rotation of the rotor 320, and the fluid discharge device 100A can be reduced in size and performance. .

  In the embodiment (fluid ejection device 100A) configured as described above, the rotation shaft 410a of the rotation drive unit 410 corresponds to an example of the “drive shaft” of the present invention. Further, the valve 300 corresponds to an example of the “rotary load portion” of the present invention, and the rotor 320 of the valve 300 corresponds to an example of the “driven shaft” of the present invention. The rotation drive unit 410, the displacement and angle adjustment member 440, and the valve 300 constitute the “rotation drive mechanism” of the present invention.

  In the above embodiment (fluid ejection device 100A), the rotation drive unit 410 is connected to the displacement and angle adjustment member 440 via the rigid coupling 420 and the rotation shaft 430. You may comprise so that it may be connected. This point is the same in the fluid ejection device using the angle adjusting member as described below.

D. FIG. 9 is a diagram showing an appearance of an embodiment of a fluid ejection device using the angle adjustment member according to the present invention, and FIG. 9 (a) is a perspective view thereof. (B) is a side view. The fluid ejection device 100B includes a multiple nozzle block 610 that integrally holds four nozzles 500. That is, in this multiple nozzle block 610, four nozzles 500 are arranged in a row, and the discharge ports 510 of each nozzle 500 are exposed in a row in the arrangement direction on the outer surface of the multiple nozzle block 610. Further, a flow rate adjusting unit 700 and a discharge control unit 400 are provided for each nozzle 500. The four discharge control units 400 operate independently and individually rotate the rotation shafts 710 of the flow rate adjustment unit 700, thereby discharging each of the fluids pumped from the fluid supply unit (not shown). The discharge from the outlet 510 can be controlled. In the present embodiment, the arrangement direction of the nozzles 500 is referred to as “arrangement direction P”, the discharge direction of the fluid from each discharge port 510 is referred to as “discharge direction Q”, and is perpendicular to the arrangement direction P and the discharge direction Q. The crossing direction that intersects with is referred to as “crossing direction R”. These direction definitions are the same in the embodiment (fluid ejection device 100C) described later.

  10 is a cross-sectional view taken along line AA of the fluid ejection device shown in FIG. 9 and parallel to the paper surface of FIG. 9B. FIG. 11 is a cross-sectional view of the fluid ejection device shown in FIG. is there. The fluid ejection device 100B includes a multiple nozzle block 610 that integrally holds four nozzles 500, four ejection control units 400, a support block 620 that supports the rotation drive unit 410 of the ejection control unit 400, An upper holder 630 that holds and holds the components of the flow rate adjustment unit 700 attached to the multiple nozzle block 610 from the upper side (+ R direction side), and the component parts of the discharge control unit 400 on the lower side (−R direction). And a lower holder 640 for holding from the side.

  In the multiple nozzle block 610, as shown in FIG. 11, a rectangular parallelepiped space extending in the arrangement direction P is provided at the (−Q) side end, and the introduction hole 621 provided at the lower end of the support block 620. It functions as a fluid reservoir 520 that temporarily stores fluid pumped from a fluid supply unit (not shown). Four nozzles 500 having the same shape from the fluid reservoir 520 are arranged in a line in the arrangement direction P at an equal pitch (in this embodiment, 2 [mm] intervals). Each nozzle 500 extends in the discharge direction, that is, the (+ Q) direction, and the tip thereof is connected to the (+ Q) side end surface of the multiple nozzle block 610 to form a discharge port 510. Therefore, a cylindrical space having a substantially elliptical cross section from the fluid reservoir 520 toward the discharge port 510 inside the nozzle 500 functions as the fluid flow path 530, and the fluid stored in the fluid reservoir 520 is discharged from the discharge port 510. To guide. As described above, in this embodiment, the fluid reservoir 520 distributes and guides the fluid being pumped to the four nozzles 500, and functions as a “guide unit”.

  In each nozzle 500, as shown in FIG. 10, one opening 540 is formed on the upper side (+ R direction side) and the lower side (−R direction side) at an intermediate position of the fluid flow path 530. In the present embodiment, in order to prevent the discharge control units 400 adjacent to each other from interfering with each other, the position where the opening 540 is provided is divided into two stages. That is, as shown in FIG. 11, for the nozzle 500 having the nozzle number “1” and the nozzle number “3” located on the most (+ P) side, the opening 540 is provided at a position close to the fluid reservoir 520, while the most ( The nozzle number “4” and the nozzle number “2” located on the −P) side are provided near the discharge port 510. Thus, the openings 540 formed in each of the two nozzles 500 adjacent to each other are formed at different positions in the ejection direction Q perpendicular to the arrangement direction P. Further, a through-hole 611 is provided in the multiple nozzle block 610 from the upper opening 540 of the nozzle 500 upward (+ R direction) and from the lower opening 540 downward (−R direction). These through holes 611 are for installing various components (rotary shaft 710, seal members 720, 730 and ball bearings 740, 750) of the flow rate adjusting unit 700 described below, and the inner diameter thereof is wider than the opening 540. Is set. Each opening 540 has the same dimension as the diameter (shaft diameter) of the rotation shaft 430 of the discharge control unit 400 and is set wider than the width of the fluid flow path 530 in the arrangement direction P.

  In this embodiment, a stainless steel rod having a shaft shape with a diameter of 1 [mm] is used as the rotating shaft 710. The rotating shaft 710 has a rear end portion, that is, a (+ R) side end portion connected to the discharge control unit 400 and a front end portion, that is, a (−R) side end portion inserted into the through-hole 611, and further through both openings 540. And penetrated through the nozzle 500.

  A portion (hereinafter referred to as “flow rate adjusting portion 711”) located between both openings 540 in the tip portion of the rotating shaft 710 is inserted into the fluid flow path 530 of the nozzle 500. 11, since the diameter of the flow rate adjusting portion 711 is wider than the width in the arrangement direction P of the fluid flow passages 530, the fluid flow passage 530 is connected to the upstream flow passage 530U and the downstream flow by the flow adjusting portion 711. Divided into path 530D. However, the flow rate adjusting portion 711 is provided with a through hole 712 in a direction orthogonal to the intersecting direction R, and the fluid can be guided in the (+ Q) direction by the through hole 712. In this way, the through hole 712 functions as a “passage part” of the present invention, and the upstream flow path 530U and the downstream flow path 530D communicate with each other through the through hole 712 depending on the rotational position of the through hole 712, thereby enabling fluid discharge. It has become. For example, as shown in FIG. 11, when the drilling direction of the through hole 712 is orthogonal to the discharge direction Q (nozzle number “1” in the figure), the fluid flow path 530 is completely blocked by the side surface of the rotating shaft 710. Therefore, the communication ratio between the upstream flow path 530U and the downstream flow path 530D is 0%. As a result, the fluid ejection from the nozzle number “1” is stopped. On the other hand, the rate of communication gradually increases as the drilling direction of the through-hole 712 approaches the discharge direction Q in parallel. Finally, when the rotational position of the through hole 712 is positioned so that the drilling direction of the through hole 712 is parallel to the discharge direction Q (nozzle number “4” in the figure), the upstream flow path 530U and the downstream The ratio of communication with the side channel 530D is 100 [%], and the fluid is discharged from the nozzle number “4” with the maximum discharge amount.

  As described above, in the present embodiment, it is possible to control the discharge and stop of discharge of the fluid from the discharge port 510 by rotating the rotating shaft 710, and further adjust the discharge amount in multiple stages by controlling the rotation position. It is possible. In order to stably rotate the rotating shaft 710 while preventing fluid leakage from the rotating portion, the present embodiment is configured as follows.

  In the through-hole 611, a pair of seal members 720 and 730 are provided so as to sandwich the nozzle 500 from the vertical direction (R direction). That is, on the upper side of the nozzle 500, that is, in the (+ R) direction side, the annular seal member 720 is disposed in the vicinity of the position where the rotation shaft 710 and the upper opening 540 intersect. Further, on the lower side of the nozzle 500, that is, in the (−R) direction side, an annular seal member 730 is disposed in the vicinity of the position where the rotation shaft 710 and the lower opening 540 intersect. Further, in the through hole 611, a rolling bearing, for example, a ball bearing 740, which rotatably supports the rotary shaft 710 is provided above the seal member 720, that is, in the (+ R) direction side. Further, the same applies to the seal member 730 side, that is, a ball bearing 750 that rotatably supports the rotary shaft 710 is provided below the seal member 730, that is, in the (−R) direction side. With these two ball bearings 740 and 750, the rotation shaft 710 is rotatable in the through hole 611.

  As described above, the seal members and the ball bearings are arranged above and below the nozzle 500. In this embodiment, the seal members 720 and 730 are ball balls so that the seal members 720 and 730 are not in direct contact with the rotating shaft 710. The seal members 720 and 730 are provided with relief portions so as to be in contact with the outer rings of the bearings 740 and 750 and to have a gap with the inner ring. Instead of the seal members 720 and 730, O-rings made of fluororubber or the like may be used depending on conditions such as chemical resistance and sealability.

  The lower seal member 730 and the ball bearing 750 configured as described above are pressed and held by a lower holder 640 made of stainless steel via a PTFE spacer 490. Here, the spacer 490 is pressure-bonded to the outer ring of the ball bearing 750 to seal the leakage of the fluid and prevent the leaked fluid from dropping from the fluid ejection device 100B. The lower holder 640 also functions as a contact surface of the shaft end of the rotating shaft 710 and regulates the movement of the rotating shaft 710 in the axial direction.

  Further, the upper seal member 720 and the ball bearing 740 are pressed and held by the upper holder 630. As shown in FIG. 10, the upper holder 630 has a lid member 631 and a cylindrical member 632 extending downward from the lower surface of the lid member 631, and is made of, for example, a stainless material. The lid member 631 is formed with a through hole through which the rotary shaft 710 is inserted. The cylindrical member 632 is finished so as to be freely inserted into the through-hole 611. When the cylindrical member 632 is inserted into the through-hole 611, only the outer ring of the ball bearing 740 is pressed downward by the lower end surface of the cylindrical member 632, and the ball bearing 740 and the seal are sealed. The member 720 is held.

  In the present embodiment, a discharge controller 400 is provided corresponding to each rotating shaft 710. The discharge controller 400 includes a rotation drive unit 410, a rigid coupling 420, a rotation shaft 430, and an angle adjustment member 450. The rotation drive unit 410 is supported by an upper end portion having an inverted L-shaped cross section of the support block 620 as shown in FIGS. Each rotation drive unit 410 includes a micro electric motor (for example, a micro motor SLB series manufactured by Namiki Seimitsu Jewel Co.) 411, a speed reducer 412, and an encoder 413. The rotating shaft of the micro electric motor 411 is connected to the rotating shaft 410a (the driving shaft of the rotation driving unit 410) via the speed reducer 412. When the micro electric motor 411 is operated, the rotation of the rotating shaft of the micro electric motor 411 is reduced to, for example, 1/30 by the speed reducer 412, and then transmitted to the rotating shaft 410a. Then, the rotation of the rotating shaft 410a is transmitted to the rotating shaft 710 through the coupling 420, the rotating shaft 430, and the angle adjusting member 450, and the flow rate is adjusted. In this embodiment, the angle adjusting member 450 having the same configuration as that of the angle adjusting member 4 shown in FIG. That is, although the detailed configuration is not shown in the related drawings (FIGS. 9 to 11), the angle adjusting member 450 has the same configuration as the angle adjusting member 4 shown in FIG. That is, the angle adjusting member 450 has an axial shape extending in the axial direction (R direction), the angle adjusting unit 41 (see FIG. 1) is provided on the rotating shaft 430 side (+ R side), and the flow rate adjusting unit 700. An angle adjuster 42 (see FIG. 1) is provided on the side (−R side). The (+ R) side end of the angle adjustment unit 41 is connected to the rotation shaft 430, and the (−R) side end of the angle adjustment unit 42 is connected to the rotation shaft 710 of the flow rate adjustment unit 700. For this reason, even when there is a declination or an assembly error between the rotation shaft 410a of the rotation drive unit 410 and the rotation shaft 710 of the flow rate adjustment unit 700, the angle adjustment member 450 is Absorbing the declination, the rotation of the rotating shaft 410a is transmitted to the rotating shaft 710 of the flow rate adjusting unit 700 to adjust the flow rate.

  FIG. 12 is a cross-sectional view showing another embodiment of the fluid ejection device using the angle adjusting member according to the present invention. FIG. 13 is a diagram schematically showing a discharge control operation in the fluid discharge apparatus shown in FIG. The fluid discharge device shown in FIG. 12 is greatly different from the device shown in FIG. 10 in the configuration of the “passage section” of the present invention, and the other configurations are the same. Therefore, in the following, it demonstrates centering around difference, attaches | subjects the same code | symbol about the same structure, and abbreviate | omits description.

In this embodiment, as shown in an enlarged schematic view in FIG. 12, instead of providing a through hole in the rotating shaft 710, a side surface of the rotating shaft 710 is cut out to form a notch portion 713, which is referred to as “ It functions as a passage section. More specifically, as shown in FIG. 12, the notch portion 713 is equal to or lower than the height H1 of the fluid flow path 530 in the direction (axial direction R) in which the rotation shaft 710 intersects the fluid flow path 530. It has a height H2. Further, in the width direction P orthogonal to the axial direction R and the flow path direction Q, the following dimensional relationship is obtained. That is, as shown in FIG. 13A, the distance between the “upstream intersection CPu” and the “downstream intersection CPd” in FIG. 13 is “W1”. In addition, the outer diameter of the rotating shaft 710 in the width direction P is “W2”. And the width Wn of the notch 713 is
W1 <Wn <W2
Then, it can be turned ON / OFF every 90 ° rotation. For this reason, the communication state of the upstream flow path 530U and the downstream flow path 530D can be controlled in multiple stages by rotating the rotating shaft 710.

  FIG. 13A shows a state in which the rotary shaft 710 is positioned in a state where the notch portion 713 faces the downstream channel 530D. Here, a portion where the notch portion 713 is not provided, that is, the non-notch portion 714 faces the upstream channel 530U and closes the fluid channel 530. For this reason, the upstream flow path 530U and the downstream flow path 530D are blocked, and the fluid discharge from the discharge port 510 is turned off. When rotating counterclockwise in this figure, the fluid flow path 530 is blocked up to a certain angle, but if it exceeds that, the communication between the upstream flow path 530U and the downstream flow path 530D starts. Then, the fluid flows through the fluid flow path 530 and is discharged from the discharge port 510 (see FIG. 12) (ON state). When the rotating shaft 710 is further rotated, the communication rate gradually increases, and when the rotation angle reaches 90 °, the communication rate becomes maximum as shown in FIG.

  Further, when the rotation shaft 710 is further rotated counterclockwise on the paper surface of the figure, the communication ratio gradually decreases, the upstream flow path 530U and the downstream flow path 530D are again shut off, and the fluid from the discharge port 510 Discharge is turned off. For example, when the rotary shaft 710 is rotated by 180 ° from the state of FIG. 13A, the notch 713 is directed toward the upstream flow path 530U, and the non-notched portion 714 is directed toward the downstream flow path 530D. The path 530 is blocked (for example, FIG. 5C). For this reason, the upstream flow path 530U and the downstream flow path 530D are blocked, and the fluid discharge from the discharge port 510 is turned off. When further rotated counterclockwise in this figure from the state, the fluid flow path 530 is blocked up to a certain angle. However, when the rotation is exceeded, the upstream flow path 530U and the downstream flow path 530D communicate with each other. The fluid flows through the fluid flow path 530 and is discharged again from the discharge port 510 (ON state). When the rotating shaft 710 is further rotated, the communication rate gradually increases. When the rotating shaft 710 is rotated by 270 ° from the state shown in FIG. 13A, the communication rate is again increased as shown in FIG. Maximum. Thus, by rotating the rotating shaft 710 by 90 °, the OFF state and the ON state can be switched alternately. Of course, similarly to the apparatus shown in FIG. 9, it is possible to adjust the discharge amount in multiple stages by controlling the rotational position.

  As described above, also in the present embodiment, since the discharge of the fluid from the discharge port 510 is controlled by the rotation of the rotating shaft 710, the same effects as the embodiment shown in FIG. 9 can be obtained. Further, since the discharge control is performed by the rotation shaft 710 having the notch 713 formed therein, advantageous effects can be obtained as compared with the case of controlling using the rotation shaft 710 having the through hole 432 (see FIG. 11). . That is, in the closed state of FIGS. 13A and 13C, the arc length of the non-notch portion 714 can be designed longer in the present embodiment than in the embodiment shown in FIG. Therefore, fluid leakage can be prevented more suitably.

  The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the rotation shaft 710 is inserted into the fluid flow channel 530 while intersecting the fluid flow channel 530 at a right angle, but the intersecting angle of the rotation shaft 710 with respect to the fluid flow channel 530 is 90 °. It is not limited to. For example, the rotation shaft 710 may be inserted so as to be inclined with respect to the fluid flow path 530.

  Moreover, in the said embodiment, although the through-hole 432 is provided in the direction orthogonal to the said cross direction R with respect to the rotating shaft 710 extended in the cross direction R as a "passage part" of this invention, The drilling direction of 432 is not limited to this, and it may be inclined with respect to the crossing direction R. The forming direction of the notch portion 713 functioning as the “passage portion” of the present invention is arbitrary.

  Moreover, in the said embodiment, although this invention is applied with respect to the fluid discharge apparatuses 100B and 100C which provided the four nozzles 500, the number of nozzles is not limited to this. Moreover, although the several nozzle 500 is provided in the multiple nozzle block 610 and integrated, this invention is applicable also to the fluid discharge apparatus which provided the several nozzle each independently.

  Moreover, in the said embodiment, although the flow volume adjustment part 700 and the discharge control part 400 are provided with respect to all the nozzles 500 with which the fluid discharge apparatus 100B, 100C is equipped, flow volume is only with respect to at least 1 or more of them. You may comprise so that an adjustment part and a discharge control part may be provided.

  Further, the fluid ejection devices 100B and 100C have a bias generated between the rotation shaft 410a of the rotation drive unit 410 and the rotation shaft 710 of the flow rate adjustment unit 700 arranged in the R direction as shown in FIGS. An angle adjusting member 450 is employed for the purpose of absorbing the corners. Here, when the displacement and angle adjustment member 5 shown in FIG. 2 is used instead of the angle adjustment member 450 in the discharge control unit 400, the rotation shaft 710 is moved in the P direction or Q with respect to the rotation shaft 410a of the rotation drive unit 410. The flow rate adjusting unit 700 can be provided in a state displaced in the direction. As a result, the degree of freedom in designing the fluid ejection devices 100B and 100C can be increased. Further, even when the displacement is caused by an assembly error or the like, it is possible to adjust the flow rate with high accuracy by absorbing the displacement.

E. Pattern Forming Apparatus By the way, the above-described fluid ejection apparatus can be applied to a pattern forming apparatus, and excellent effects can be exhibited by the application. Hereinafter, an embodiment in which the fluid ejection device 100A is applied to a pattern forming device will be described as an example.

  A pattern forming device is a device that applies a coating liquid containing a material for forming a pattern on a substrate and cures it. For example, a wiring pattern is formed on a substrate having a photoelectric conversion surface to manufacture a photoelectric conversion device. It is applicable to the technology to do. In this technique, a nozzle having a large number of ejection ports is scanned and moved with respect to the substrate, and a coating liquid containing a pattern forming material is ejected from each ejection port, whereby a large number of line-shaped patterns that are parallel to each other and have the same length are formed. It is formed on the substrate.

  By the way, the shape of the substrate on which a pattern is to be formed by this type of pattern forming apparatus varies. For example, as a single crystal silicon substrate used as a substrate of a solar battery cell, there is an octagonal shape obtained by cutting off four corners of a square. This is for effectively utilizing the area of the circular single crystal silicon wafer. Therefore, the length of the pattern to be formed is not necessarily constant.

  Accordingly, in the pattern forming apparatus according to the present invention, the valve is provided on the flow path from the fluid supply unit to each discharge port, and the valve is controlled to open and close for each discharge port to control the discharge and discharge stop of the coating liquid. A pattern can be efficiently formed by coating even on a substrate having a non-rectangular shape (hereinafter referred to as “an irregular substrate”). Hereinafter, an embodiment of a pattern forming apparatus according to the present invention will be described in detail with reference to FIGS.

  FIG. 14 is a view showing an embodiment of a pattern forming apparatus according to the present invention. This pattern forming apparatus PF forms a conductive electrode wiring pattern on a substrate W such as a single crystal silicon wafer having a photoelectric conversion layer formed on the surface thereof, for example, and manufactures a photoelectric conversion device used as a solar cell, for example. It is a device to do. This apparatus PF can be suitably used for, for example, a purpose of forming a collecting electrode pattern on a light incident surface of a photoelectric conversion device.

  In this pattern forming apparatus PF, a stage moving mechanism 1200 is provided on a base 1110, and a stage 1300 that holds a substrate W can be moved in the XY plane shown in FIG. 14 by the stage moving mechanism 1200. A frame 1121 is fixed to the base 1110 so as to straddle the stage 1300, and an application head unit 1500 is attached to the frame 1121.

  The stage moving mechanism 1200 includes an X-direction moving mechanism 1210 that moves the stage 1300 in the X direction, a Y-direction moving mechanism 1220 that moves the stage 1300 in the Y direction, and a θ rotation mechanism 1230 that rotates about an axis that faces the Z direction. The X-direction moving mechanism 1210 has a structure in which a ball screw 1212 is connected to a motor 1211 and a nut 213 fixed to the Y-direction moving mechanism 1220 is attached to the ball screw 1212. When the guide rail 1214 is fixed above the ball screw 1212 and the motor 1211 rotates, the Y-direction moving mechanism 1220 moves smoothly along the guide rail 1214 in the X direction together with the nut 213.

  The Y-direction moving mechanism 1220 also has a motor 1221, a ball screw mechanism, and a guide rail 1224. When the motor 1221 rotates, the θ-rotation mechanism 1230 moves in the Y direction along the guide rail 1224 by the ball screw mechanism. The θ rotation mechanism 1230 causes the motor 231 to rotate the stage 1300 around an axis that faces the Z direction. With the above configuration, the relative moving direction and orientation of the coating head unit 1500 with respect to the substrate W can be changed. Each motor of the stage moving mechanism 1200 is controlled by a control unit 1600 that controls the operation of each unit of the apparatus.

  Further, a stage elevating mechanism 1240 is provided between the θ rotation mechanism 1230 and the stage 1300. The stage elevating mechanism 1240 elevates the stage 1300 in accordance with a control command from the control unit 1600, and positions the substrate W at a specified height (Z direction position). As the stage elevating mechanism 1240, for example, a mechanism using an actuator such as a solenoid or a piezoelectric element, a mechanism using a gear, a mechanism using a wedge meshing, or the like can be used.

  The base 1510 of the coating head unit 1500 is provided with a fluid supply unit 1520 that stores a liquid (paste-like) coating solution therein and discharges the coating solution toward the substrate W in accordance with a control command from the control unit 1600. It has been. The fluid supply unit 1520 includes a syringe pump 1521 that is hollow inside and stores the coating liquid, and a plunger 1524 that is inserted into the internal space of the pump 1521. The plunger 1524 is driven up and down by an actuator such as a motor, a solenoid, or the like that is driven and controlled by the control unit 1600 or compressed air, and pressurizes the coating liquid stored in the internal space of the syringe pump 1521.

  A discharge nozzle 1550 having a function of discharging the coating liquid toward the substrate W is attached to the lower part of the fluid supply unit 1520. Although the detailed structure of the discharge nozzle 1550 will be described later, a plurality of discharge ports 1551 are formed in a line in the Y direction at the tip, and a coating liquid flow path that connects the fluid supply unit 1520 and each discharge port is provided. Is provided. Moreover, the valve | bulb shown in FIG. 5 is provided on each coating liquid flow path. For this reason, when the syringe pump 1521 is actuated by the actuation of the plunger 1524, the coating liquid is pumped toward the nozzle 1550, and each valve is opened and closed so that the ejection of the coating liquid is individually turned on / off for each ejection port 1551. Be controlled.

  A light irradiation unit 1530 that irradiates UV light (ultraviolet rays) toward the substrate W is attached to the base 1510 of the coating head unit 1500. The light irradiation unit 1530 is connected to a light source unit 1532 that generates ultraviolet rays via an optical fiber 1531. Although not shown, the light source unit 1532 has an openable / closable shutter at the light emitting portion, and the on / off of the emitted light and the amount of light can be controlled by the opening / closing and opening degree. The light source unit 1532 is controlled by the control unit 1600.

  FIG. 15 is a diagram showing an example of a solar battery cell formed using the pattern forming apparatus of FIG. The solar battery cell S is provided on the surface of the single crystal silicon substrate W (surface on which the photoelectric conversion surface and the antireflection film are provided) and a large number of finger wiring patterns F having a small width and provided so as to cross these. A wide bus wiring pattern B is provided. The finger wiring pattern F and the bus wiring pattern B are electrically connected at the intersection.

  Regarding the dimensions of each part, for example, the width and height of the finger wiring pattern F can be about 50 μm, the width of the bus wiring pattern B can be 1.8 mm to 2.0 mm, and the height can be 50 μm to 70 μm. It is not limited to numerical values.

  The silicon substrate W has an octagon that is line-symmetric with respect to the central axis C and is formed by cutting out four corners of a substantially square shape. This is because the wafer cut out from the single crystal silicon rod manufactured in a substantially cylindrical shape has a disk shape, and the shape is generated due to the necessity of making the substrate W by effectively using the surface area.

  For this reason, many finger electrodes F formed on the substrate W have a certain length in the rectangular region RR that can be regarded as a substantially rectangular shape at the center of the substrate W. Each one has a different length. Specifically, the plurality of electrodes Fr formed in the rectangular region RR all have the same length slightly shorter than the length of the substrate W, whereas the electrode Fe formed in the end region ER is The length changes as the end surface of the substrate W recedes, and the length is closer to the end of the substrate. In the example of FIG. 15, 20 electrode patterns Fr having the same length are formed in the rectangular region RR at the center of the substrate, and three electrode patterns Fe having different lengths are formed in the end regions ER at both ends of the substrate. This is merely an example, and the number of patterns is not limited to these.

  In the conventional technology in which a pattern is formed by integrally moving a large number of nozzles whose discharge on / off is collectively controlled relative to a substrate, it has not been possible to deal with such a substrate. In addition, a specific technique for individually controlling on / off of each nozzle has not been put into practical use. On the other hand, the pattern forming apparatus PF according to the present embodiment efficiently forms a pattern even on a deformed substrate as shown in FIG. 15 by performing application using a discharge nozzle having a structure described in detail below. Is possible.

  FIG. 16 is a diagram schematically showing how the finger electrodes are formed by the apparatus of FIG. As shown in FIG. 16A, in this apparatus PF, the stage 1300 on which the substrate W is placed is moved in the X direction, whereby the discharge nozzle 1550 is relatively moved with respect to the surface of the substrate W (−X). Scan and move in the direction. As shown in FIG. 16B, a discharge port 1551 that opens in communication with a valve 300 provided on a coating liquid flow path formed inside the nozzle is provided on the lower surface of the discharge nozzle 1550. Since the configuration of each valve 300 and the discharge control unit 400 that controls the discharge by rotating each valve 300 eccentrically are as described above, detailed description thereof is omitted here.

  A plurality of discharge ports 1551 are provided on the lower surface of the discharge nozzle 1550, and the plurality of discharge ports 1551 are arranged at equal intervals in one row along the Y direction. The dimension of the discharge nozzle 1550 in the Y direction is about the same as or larger than the dimension of the substrate W in the same direction. Therefore, the finger electrode patterns Fr and Fe can be formed on the entire surface of the substrate W only by scanning and moving the discharge nozzle 1550 once with respect to the substrate W.

  As the coating solution, a conductive paste, that is, conductive and photocurable, for example, a paste-like mixture containing conductive particles, an organic vehicle (a mixture of solvent, resin, thickener, etc.) and a photopolymerization initiator. A liquid can be used. The conductive particles are, for example, silver powder as a material of the electrode, and the organic vehicle contains ethyl cellulose as a resin material and an organic solvent. Further, the viscosity of the coating solution is preferably, for example, 50 Pa · s (pascal second) or less before performing the curing process by light irradiation, and is preferably 350 Pa · s or more after performing the curing process.

  The coating liquid immediately after being discharged onto the surface of the substrate W from the discharge port 1551 is irradiated with the emitted light L from the light irradiation unit 1530 disposed behind the discharge port 1551 in the scanning movement direction (−X direction) of the nozzle. Is done. As a result, the coating solution is cured while maintaining the cross-sectional shape immediately after discharge, and the electrode patterns Fr and Fe are formed. Patterns having various cross-sectional shapes can be formed by appropriately setting the shape of the discharge port 1551, the viscosity of the coating liquid, and the light irradiation conditions, and in particular, a pattern having a high ratio to the pattern width, that is, a high aspect ratio. Can be formed.

  FIG. 17 is a flowchart showing the pattern forming process according to the present embodiment. This process is executed using the discharge nozzle 1550 having 26 discharge ports 1551 corresponding to the number of patterns to be formed. A valve 300 is provided for each of these discharge ports 1551. In addition, the valve 300 is controlled to open and close by the rotation control unit 410 corresponding to each discharge port 1551 being driven and controlled by the control unit 1600. For this reason, it is possible to individually control the discharge of the coating liquid from each discharge port 1551 by opening and closing each valve 300 in a state where the coating liquid is pumped from the fluid supply unit 1520 toward the nozzle 1550. In addition, the codes P1 to P3 and P24 to P26 shown in FIG. 16 are codes for specifying the discharge ports for applying the end region ER. That is, out of the 26 outlets, the outlets located on the outermost side are indicated by symbols P1, P26, the outlets located one inside are indicated by symbols P2, P25, and the outlets located further inside are indicated by symbols P3, P24. It represents as. The remaining 20 ejection ports excluding these are used to form the pattern Fr of the rectangular region RR. As will be described later, these discharge ports P1 to P3 and P24 to P26 are discharge ports that are uniquely controlled at different timings from other discharge ports by valve opening / closing control, and are examples of the “control target discharge ports” of the present invention. It corresponds to.

  In this process, the substrate W is first carried into the pattern forming apparatus PF, and is placed on the stage 1300 with the surface on which the pattern is to be formed facing upward (step S101). Further, the rotation drive unit 410 is operated to position the rotors 320 of all the valves 300 at a rotation angle of 0 ° and close all the discharge ports 1551 (step S102).

  In this state, the stage 1300 is moved in the X direction by the stage moving mechanism 1200 (step S103), and then the application by the syringe pump 1521 is performed at the timing when the discharge nozzle 1550 moves immediately above the X direction end of the substrate W. Pressurization to the liquid is started (step S104). At the same time, in the valve 300 corresponding to the discharge ports 1551 other than the discharge ports P1 to P3 and P24 to P26, the rotor 320 is eccentrically rotated to a rotation angle of 90 ° by the rotation drive unit 410 and opened. Thereby, the discharge of the coating liquid is started from only the 20 discharge ports 1551 located in the central portion. Thereby, formation of the pattern Fr of the rectangular region RR is started.

  Thereafter, the discharge outlets to be controlled are sequentially opened according to the following procedure (step S105). That is, after a predetermined time has elapsed since the pressurization of the syringe pump 1521 was started, the blockage of the discharge ports P3 and P24 closest to the center among the discharge ports to be controlled is first released, and the coating liquid flow path is opened. Next, the discharge ports P2 and P25 adjacent to the outside are opened, and finally the outermost discharge ports P1 and P26 are opened. Thus, patterns Fe having different start positions are formed in the end region ER of the substrate W in accordance with the opening timing of the discharge ports.

  By continuing the scanning movement of the discharge nozzle 1550 with respect to the substrate W as it is, 26 electrode patterns parallel to each other are formed on the substrate W. After this state is continued until the substrate W reaches a predetermined position (step S106), the discharge ports P1 to P3 and P24 to P26 are sequentially closed in the reverse order of the opening order (step S107). That is, the outermost discharge ports P1 and P26 are closed, and thereafter, the discharge ports P2 and P25 adjacent thereto are closed. Further, the innermost discharge ports P3 and P24 are closed. As the discharge port is closed, the pattern formation by the coating liquid from the discharge port is sequentially completed with a little time difference. Therefore, the end positions of these patterns are also different. When the pattern formation in the end region ER on the end side is completed and the discharge nozzle 1550 reaches the end of the rectangular region RR, the discharge ports 1551 other than the discharge ports P1 to P3 and P24 to P26 are closed. Let

  Then, pressurization from the syringe pump 1521 is stopped (step S108). Thereafter, the movement of the stage 1300 is stopped (step S109), the substrate W on which the finger electrode pattern F (Fr, Fe) is formed is unloaded (step S110), and the process is completed.

  According to the pattern forming process as described above, in the rectangular region RR at the center of the substrate W, the patterns Fr parallel to each other and having the same length are formed. On the other hand, in the end regions ER at both ends of the substrate, the closer to the outside of the substrate W, the later the pattern formation starts and the earlier the formation ends. Since the substrate W and the discharge nozzle 1550 are relatively moved at a constant speed, the difference in formation timing is reflected in the start and end positions of the pattern on the substrate W, and finally, as shown in FIGS. 15 and 16. Such a finger electrode pattern F is formed. During this time, the scanning movement of the discharge nozzle 1550 relative to the substrate W is only once.

  Further, a valve 300 is provided at a position closest to the nozzle 1550 corresponding to each discharge port 1551, and the opening / closing of the discharge port 1551 is individually controlled by the eccentric rotation of the rotor 320. For this reason, the start end position and the end position of the pattern can be made different from those of other patterns in a part of a large number of line patterns formed at one time by the scanning movement of the discharge nozzle 1550. As a result, even with a deformed substrate as shown in FIGS. 15 and 16, a pattern can be efficiently formed on the entire surface.

  In each valve 300, the rotation of the rotation shaft 410a of the rotation drive unit 410 is transmitted to the rotor 320 by the displacement and angle adjustment member 440, and the valve 300 is opened and closed by rotating the rotor 320 eccentrically. Can be miniaturized. Therefore, as described above, the valves 300 can be arranged in a row even in a so-called multi-nozzle in which a plurality of discharge ports 1551 are provided at relatively narrow intervals.

  Thus, in the present embodiment, the stage 1300 functions as an example of the “substrate holding unit” of the present invention, and the stage moving mechanism 1200 functions as an example of the “scanning moving unit” of the present invention.

  In the above embodiment, not only the valves 300 are provided corresponding to the control target discharge ports P1 to P3 and P24 to P26, but the valves 300 are also provided to other discharge ports, that is, the non-control target discharge ports. However, it is not essential to provide a valve for the non-control target discharge port. For example, on / off of discharge from the non-control target discharge port may be controlled by on / off of the syringe pump 1521.

  Moreover, in the said embodiment, although one part of the outer side among the discharge ports arranged in a line is made into the control object discharge port, it is not limited to this. In other words, the arrangement of the discharge ports may be different from that described above, and which discharge port is the control target discharge port is arbitrary, and the present invention can be applied to any of these. is there. Further, all the discharge ports may be the control target discharge ports. Moreover, in the said embodiment, although the arrangement | sequence of the control object discharge port in the discharge nozzle 1550 has symmetry with respect to a center, this is not an essential requirement.

F. Others The present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, the angle adjusting member according to the present invention is applied to the rotation drive mechanism 1A, the fluid ejection devices 100B and 100C, and the pattern forming device PF, but the application target of the angle adjusting member according to the present invention is limited to this. It is not a thing. For example, the present invention is applied to all joint structures that transmit the rotation of the first shaft to the second shaft while mutually connecting the first shaft and the second shaft so that the angular relationship between the first shaft and the second shaft can be adjusted. be able to.

  Further, the displacement and angle adjustment member according to the present invention is applied to the rotation drive mechanism 1B, the fluid ejection device 100A, and the pattern forming device PF, but the application target of the displacement and angle adjustment member according to the present invention is limited to this. Is not to be done. For example, the present invention can be applied to all joint structures that transmit rotation of a drive shaft while connecting the drive shaft and the driven shaft to each other so that the driven shaft can be displaced with respect to the drive shaft.

  Further, in the above embodiment, the rotational force generated by the rotational drive unit having a motor or the like is transmitted by the angle adjustment member and the displacement and angle adjustment member according to the present invention, but the generation source of the rotational force is limited to this. For example, the angle adjusting member and the displacement and angle adjusting member according to the present invention may also be used when transmitting a rotational force generated by a manual operation by an operator or a user.

  The present invention relates to an angle adjusting member that transmits the rotation of the first axis to the second axis while connecting the first axis and the second axis so that the angular relationship between the first axis and the second axis can be adjusted. On the other hand, it is possible to apply the rotation of the drive shaft to all the displacement and angle adjusting members that transmit the driven shaft while interconnecting the drive shaft and the driven shaft so that the driven shaft can be displaced. Further, the present invention can also be suitably applied to a rotational drive mechanism, a fluid ejection device, and a pattern forming device.

DESCRIPTION OF SYMBOLS 1A, 1B ... Rotation drive mechanism 2 ... Rotation drive part 3 ... Rotation load part 4, 4A, 4B, 450 ... Angle adjustment member 5, 440 ... Displacement and angle adjustment member 21 ... Drive shaft 31 ... Driven shaft 41, 42 ... Angle Adjustment part 41a ... (first) main surface 41b ... (second) main surface 42a ... (third) main surface 42b ... (fourth) main surface 51 ... connecting member 100A, 100B, 100C ... fluid ejection device 1551 ... discharge Outlet 210 ... Front block (nozzle)
221 ... Discharge port 300 ... Valve (rotary load)
320 ... Rotor (driven shaft)
DESCRIPTION OF SYMBOLS 400 ... Discharge control part 410 ... Rotation drive part 410a ... Rotating shaft 441 ... (Rotation drive part) 441 ... Connecting member 500 ... Nozzle 510 ... Discharge port 530 ... Fluid flow path 530D ... Downstream flow path 530U ... Upstream flow path 700 ... Flow rate adjusting unit 710 ... Rotating shaft 712 ... Through hole (passage part)
713 ... Notch part (passage part)
NT1 ... Notch (first recess)
NT2 ... Notch (second recess)
NT3 ... Notch (third recess)
P1 to P3, P24 to P26 ... Control target discharge port PF ... Pattern forming device W ... Substrate

Claims (26)

An angle adjusting member that transmits the rotation of the first axis to the second axis while interconnecting the first axis and the second axis so that the angular relationship between the first axis and the second axis can be adjusted.
A first angle adjuster having one end connected to the first shaft;
A second angle adjusting unit having one end connected to the second shaft;
The other end of the first angle adjustment unit and the other end of the second angle adjustment unit are connected to each other,
The first angle adjustment unit includes a plurality of first recesses provided in the first main surface along a first longitudinal direction from one end to the other end, and a second main opposite to the first main surface. A plurality of second constrictions formed on the surface by forming a plurality of second recesses along the first longitudinal direction;
The second angle adjustment unit includes a third main surface in which a plurality of third recesses intersect with the first main surface and the second main surface along a second longitudinal direction from one end to the other end. And an angle adjusting member having a plurality of second constrictions formed on the fourth main surface opposite to the third main surface and formed with a plurality of fourth recesses along the second longitudinal direction. The angle adjusting member according to claim 1,
An angle adjusting member in which the other end of the first angle adjusting unit and the other end of the second angle adjusting unit are directly connected. The angle adjusting member according to claim 1 or 2,
An angle adjusting member in which the first main surface and the second main surface, and the third main surface and the fourth main surface are orthogonal to each other. The angle adjusting member according to any one of claims 1 to 3,
The plurality of first recesses and the plurality of second recesses extend in a direction perpendicular to the first longitudinal direction,
The plurality of third recesses and the plurality of fourth recesses are angle adjusting members extending in a direction orthogonal to the second longitudinal direction. The angle adjusting member according to any one of claims 1 to 4,
The plurality of first recesses and the plurality of second recesses are provided symmetrically to each other,
The plurality of third recesses and the plurality of fourth recesses are angle adjusting members provided symmetrically to each other. An angle adjusting member according to any one of claims 1 to 5,
The other end of the first angle adjustment unit and the other end of the second angle adjustment unit are connected by at least one third angle adjustment unit,
The third angle adjusting unit includes a fifth main surface in which a plurality of fifth recesses intersect the first main surface or the fourth main surface along a third longitudinal direction from one end to the other end. And an angle adjusting member having a plurality of third constrictions formed on the sixth main surface opposite to the fifth main surface and having a plurality of sixth recesses provided along the third longitudinal direction. A displacement and angle adjusting member for transmitting rotation of the drive shaft to the driven shaft while interconnecting the drive shaft and the driven shaft so that the driven shaft can be displaced relative to the drive shaft;
A first angle adjusting member having the same configuration as the angle adjusting member according to any one of claims 1 to 6, wherein one end of the first angle adjusting unit is connected to the drive shaft,
A second angle adjusting member having the same configuration as the angle adjusting member according to any one of claims 1 to 6, wherein one end of the first angle adjusting unit is connected to the driven shaft,
A displacement and angle adjusting member comprising: a connecting member that connects one end of the second angle adjusting unit of the first angle adjusting member and one end of the second angle adjusting unit of the second angle adjusting member. A rotational drive unit having a drive shaft;
A rotational load section having a driven shaft;
It has the same configuration as the angle adjustment member according to any one of claims 1 to 6, and one end of the first angle adjustment unit is connected to the drive shaft, and the second angle adjustment unit An angle adjustment member having one end connected to the driven shaft. A rotational drive unit having a drive shaft;
A rotational load section having a driven shaft;
The displacement and angle adjustment member according to claim 7 has the same configuration, and one end portion of the first angle adjustment portion of the first angle adjustment member is coupled to the drive shaft, and the second angle adjustment member. A rotation drive mechanism comprising: a displacement and angle adjustment member, wherein one end of the second angle adjustment part of the member is coupled to the driven shaft. The rotational drive mechanism according to claim 9, wherein
The rotational load portion is
A female screw type stator having a female screw formed in a spiral shape in the flow direction of the fluid and having an oval cross section;
A male screw type rotor having a male screw that is eccentrically rotatable while being in contact with the female screw of the female screw type stator and having a circular cross section;
The length of the female threaded stator in the flow direction is not less than ¼ period and less than one period of the female thread pitch of the female threaded stator,
A valve that adjusts the flow rate of the fluid in the flow direction by changing an orifice formed between the female screw and the male screw according to a relative rotation angle of the male screw type rotor with respect to the female screw type stator. Rotation drive mechanism. The rotational drive mechanism according to claim 10,
The valve is
The length of the female threaded stator in the flow direction is ½ period or more and less than one period of the female thread pitch of the female threaded stator,
A rotation drive mechanism that switches between fluid flow and shut-off by rotating the drive shaft of the rotation drive unit to the male screw type rotor via the displacement and angle adjusting member and rotating the male screw type rotor eccentrically. The rotary drive mechanism according to claim 8 or 9, wherein
The driven shaft has a passage portion that allows fluid to flow in a fluid flow path through which the fluid flows, and rotates in a state of being inserted into the fluid flow path to adjust the flow rate of the fluid. A fluid supply for supplying fluid;
A nozzle for discharging the fluid supplied from the fluid supply unit from an outlet;
A rotational load section provided on a fluid flow path from the fluid supply section to the nozzle outlet;
A discharge control unit that controls the rotation load unit to control the discharge of fluid from the discharge port;
The rotational load section is
A female screw type stator having a female screw formed in a spiral shape in the flow direction of the fluid and having an oval cross section;
A male screw type rotor having a male screw that is eccentrically rotatable while being in contact with the female screw of the female screw type stator and having a circular cross section;
The length of the female threaded stator in the flow direction is not less than ¼ period and less than one period of the female thread pitch of the female threaded stator,
A valve that adjusts the flow rate of the fluid in the flow direction by changing an orifice formed between the female screw and the male screw according to a relative rotation angle of the male screw type rotor with respect to the female screw type stator; ,
The discharge controller is
A rotational drive unit having a drive shaft;
The displacement and angle adjustment member according to claim 7 has the same configuration, and one end portion of the first angle adjustment portion of the first angle adjustment member is coupled to the drive shaft, and the second angle adjustment member. A fluid ejection device comprising: a displacement and angle adjustment member, wherein one end of the second angle adjustment part of the member is connected to the male screw type rotor. The fluid ejection device according to claim 13,
A fluid ejection device in which the nozzle and the valve are arranged close to each other. A nozzle that guides the fluid being pumped to the discharge port along the fluid flow path and discharges the fluid from the discharge port;
A rotary load unit that adjusts the flow rate of the fluid flowing through the fluid flow path by rotating the driven shaft; and
A discharge control unit that controls the discharge of the fluid from the discharge port by rotating the driven shaft;
The nozzle has an opening communicating with the fluid flow path;
The driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path, and has a passage portion that enables fluid to flow in a direction different from the intersecting direction, It is inserted into a fluid flow path and is rotatably attached to the nozzle while dividing the fluid flow path into an upstream flow path and a downstream flow path,
The discharge control unit has the same configuration as the rotation drive unit having a drive shaft and the angle adjustment member according to any one of claims 1 to 6, wherein one end of the first angle adjustment unit is A fluid ejection device comprising: an angle adjusting member coupled to the drive shaft and having one end of the second angle adjusting unit coupled to the driven shaft. A nozzle that guides the fluid being pumped to the discharge port along the fluid flow path and discharges the fluid from the discharge port;
A rotational load section for rotating the driven shaft to adjust the flow rate of the fluid flowing through the fluid flow path;
A discharge control unit that controls the discharge of the fluid from the discharge port by rotating the driven shaft;
The nozzle has an opening communicating with the fluid flow path;
The driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path, and has a passage portion that enables fluid to flow in a direction different from the intersecting direction, It is inserted into a fluid flow path and is rotatably attached to the nozzle while dividing the fluid flow path into an upstream flow path and a downstream flow path,
The discharge controller is
A rotational drive unit having a drive shaft;
The displacement and angle adjustment member according to claim 7 has the same configuration, and one end portion of the first angle adjustment portion of the first angle adjustment member is coupled to the drive shaft, and the second angle adjustment member. A fluid ejection device comprising: a displacement and angle adjustment member having one end of the second angle adjustment part of the member coupled to the driven shaft. The fluid ejection device according to claim 15 or 16,
The fluid ejection device, wherein the passage portion is a notch portion formed by notching a side surface of the rotating shaft. The fluid ejection device according to claim 15 or 16,
The fluid discharge device, wherein the passage portion is a through hole formed through the rotation shaft in a direction different from the intersecting direction. The fluid ejection device according to any one of claims 13 and 18,
The fluid ejecting apparatus, wherein the fluid is a paste-like coating liquid. A substrate holder for holding the substrate;
A nozzle having a plurality of discharge ports for discharging a fluid containing a material for forming a pattern;
A fluid supply for supplying the fluid to the nozzle;
A rotational load unit provided on a flow path from the fluid supply unit to the control target discharge port with at least one of the plurality of discharge ports as a control target discharge port;
A scanning movement unit that scans and moves the nozzle relative to the substrate held by the substrate holding unit;
A discharge control unit that controls the rotation load unit to control the discharge of fluid from the control target discharge port;
The rotational load section is
A female screw type stator having a female screw formed in a spiral shape in the flow direction of the fluid and having an oval cross section;
A male screw type rotor having a male screw that is eccentrically rotatable while being in contact with the female screw of the female screw type stator and having a circular cross section;
The length of the female threaded stator in the flow direction is not less than ¼ period and less than one period of the female thread pitch of the female threaded stator,
A valve that adjusts the flow rate of the fluid in the flow direction by changing an orifice formed between the female screw and the male screw according to a relative rotation angle of the male screw type rotor with respect to the female screw type stator; ,
The discharge controller is
A rotational drive unit having a drive shaft;
The displacement and angle adjustment member according to claim 7 has the same configuration, and one end portion of the first angle adjustment portion of the first angle adjustment member is coupled to the drive shaft, and the second angle adjustment member. A pattern forming apparatus comprising: a displacement and angle adjusting member connected at one end of the second angle adjusting part of the member to the male screw type rotor. The pattern forming apparatus according to claim 20, wherein
A pattern forming apparatus in which the nozzle and the valve are arranged close to each other. A substrate holder for holding the substrate;
A fluid supply section that pressurizes and supplies a fluid containing a material for forming a pattern;
A plurality of nozzles for discharging the fluid pressure-fed from the fluid supply unit from the discharge port;
A scanning moving unit that scans and moves the plurality of nozzles relative to the substrate held by the substrate holding unit;
A rotation load unit that adjusts the flow rate of the fluid flowing through the control target nozzle by rotating at least one of the plurality of nozzles as a control target nozzle;
A discharge control unit that controls the discharge of the fluid from the discharge port by rotating the driven shaft;
The nozzle to be controlled has an opening communicating with the fluid flow path;
The driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path, and has a passage portion that enables fluid to flow in a direction different from the intersecting direction, It is inserted into the fluid flow path and is rotatably attached to the control target nozzle while dividing the fluid flow path into an upstream flow path and a downstream flow path,
The discharge controller is
A rotational drive unit having a drive shaft;
It has the same configuration as the angle adjustment member according to any one of claims 1 to 6, and one end of the first angle adjustment unit is connected to the drive shaft, and the second angle adjustment unit An angle adjusting member having one end connected to the driven shaft. A substrate holder for holding the substrate;
A fluid supply section that pressurizes and supplies a fluid containing a material for forming a pattern;
A plurality of nozzles for discharging the fluid pressure-fed from the fluid supply unit from the discharge port;
A scanning moving unit that scans and moves the plurality of nozzles relative to the substrate held by the substrate holding unit;
A rotation load unit that adjusts the flow rate of the fluid flowing through the control target nozzle by rotating at least one of the plurality of nozzles as a control target nozzle;
A discharge control unit that controls the discharge of the fluid from the discharge port by rotating the driven shaft;
The nozzle to be controlled has an opening communicating with the fluid flow path;
The driven shaft has an axial shape extending in an intersecting direction intersecting the fluid flow path, and has a passage portion that enables fluid to flow in a direction different from the intersecting direction, It is inserted into the fluid flow path and is rotatably attached to the control target nozzle while dividing the fluid flow path into an upstream flow path and a downstream flow path,
The discharge controller is
A rotational drive unit having a drive shaft;
The displacement and angle adjustment member according to claim 7 has the same configuration, and one end portion of the first angle adjustment portion of the first angle adjustment member is coupled to the drive shaft, and the second angle adjustment member. A pattern forming apparatus comprising: a displacement and angle adjusting member connected at one end of the second angle adjusting portion of the member to the driven shaft. The pattern forming apparatus according to claim 22 or 23, wherein:
The pattern forming apparatus, wherein the passage portion is a notch portion formed by cutting out a side surface of the rotating shaft. The pattern forming apparatus according to claim 22 or 23, wherein:
The pattern forming apparatus, wherein the passage portion is a through hole formed through the rotating shaft in a direction different from the intersecting direction. The pattern forming apparatus according to any one of claims 20 to 25, wherein:
The pattern forming apparatus, wherein the fluid is a paste-like coating liquid.

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