JP2014081299A5 - - Google Patents
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- JP2014081299A5 JP2014081299A5 JP2012229852A JP2012229852A JP2014081299A5 JP 2014081299 A5 JP2014081299 A5 JP 2014081299A5 JP 2012229852 A JP2012229852 A JP 2012229852A JP 2012229852 A JP2012229852 A JP 2012229852A JP 2014081299 A5 JP2014081299 A5 JP 2014081299A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012229852A JP6054134B2 (ja) | 2012-10-17 | 2012-10-17 | 超精密形状測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012229852A JP6054134B2 (ja) | 2012-10-17 | 2012-10-17 | 超精密形状測定装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014081299A JP2014081299A (ja) | 2014-05-08 |
| JP2014081299A5 true JP2014081299A5 (ja) | 2015-11-19 |
| JP6054134B2 JP6054134B2 (ja) | 2016-12-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012229852A Active JP6054134B2 (ja) | 2012-10-17 | 2012-10-17 | 超精密形状測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6054134B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106323193B (zh) * | 2015-06-30 | 2020-04-17 | 江苏菲戈勒斯新材料科技有限公司 | 蓝宝石晶锭外形测定装置 |
| CN105241392B (zh) * | 2015-09-24 | 2017-08-08 | 杭州汉振科技有限公司 | 一种复杂柱状工件的全表面三维测量设备及其测量方法 |
| CN112917191B (zh) * | 2021-03-03 | 2022-05-17 | 北京工业大学 | 一种用于辅助定位摆角铣头b轴回转中心的装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63187103A (ja) * | 1987-01-30 | 1988-08-02 | Hitachi Ltd | 三次元形状の非接触計測方法 |
| JP5217756B2 (ja) * | 2008-08-06 | 2013-06-19 | 勝義 遠藤 | 法線ベクトル追跡型超精密形状測定装置における駆動軸制御方法 |
| JP2011215016A (ja) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | 非球面形状測定装置 |
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2012
- 2012-10-17 JP JP2012229852A patent/JP6054134B2/ja active Active