JP2014070725A - Film transport device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film transport device capable of transporting a film smoothly, restricting abrasion of each of the members of a roller bearing, improving its durability and getting its long life.SOLUTION: The film transporting devices 10 comprises a guide member 20 constituted by a pair of guide rails 21, 21 arranged along both sides of a transporting path for a film F, a chain 30 held by the pair of guide rails 21, 21 and moved along the guide member 20, and holder plates 50 fixed to the chain 30 so as to hold both end portions of the film F. The chain 30 abuts against the guide member 20 through roller bearings 60A, 60B. Each of the roller bearings 60A, 60B has an inner race 61, an outer race 63, a plurality of rolling elements 65 and a ball bearing cage 67. At least a part of the surface of the ball bearing cage 67 is formed with a coating of lubricant agent and its radial inner clearance is set to 45 to 100 μm.

Description

  The present invention relates to a film transport apparatus that transports a film by a chain that moves along a guide member via a rolling bearing while holding both ends of the belt-shaped film.

  2. Description of the Related Art Conventionally, as a film transport apparatus, an apparatus that transports while holding both ends of a film on a moving chain is known. For example, a polyimide film used for a base film of a flexible circuit board is a self-supporting film obtained by casting a solvent solution of a polyimide precursor on a support (hereinafter simply referred to as “polyimide self-supporting film”). However, since this self-supporting film shrinks when heated, heat treatment is performed while holding both ends of the film with a film conveying device called a tenter device. Yes.

  As described above, as a tenter device that transports while holding both ends of a film in a high temperature environment, the following Patent Document 1 discloses a pair of tenter rails disposed on both sides of a web transport path, and a pair of tenter rails. A tenter device having a pair of tenter chains moving along the web and a web fixing member provided on each tenter chain is described. In the tenter chain, an upper roller and a lower roller are rotatably provided, and these are disposed between the inner support wall and the outer support wall of each tenter rail.

  The tenter chain is pulled by the web contraction and tilted obliquely, and the upper roller and the lower roller rotate while contacting the inner support wall and the outer support wall, and move along the tenter rail. However, since the upper roller and the lower roller are in contact with the support walls of the tenter rail, the rollers and the support walls are worn at the contacted portions, and dust such as metal powder is likely to be generated. There is a possibility that it may adhere to the surface and cause a problem in terms of quality.

  In such a case, it is conceivable to employ a rolling bearing that can be used in a high temperature environment to reduce the frictional resistance between the chain and the rail. For example, in Patent Document 2 below, in a rolling bearing attached to a tenter clip and used in a high temperature environment as a guide roller that rolls on a guide rail, an inner ring, an outer ring, a rolling surface on the outer periphery of the inner ring, and an outer ring A plurality of rolling elements disposed between the rolling surfaces on the inner periphery of the inner ring and a cage that holds each rolling element in a pocket so as to be able to roll freely. A solid lubricated rolling bearing is described that incorporates a set of hemispherical lubricating members.

JP 2001-146344 A JP 2012-67860 A

  By the way, there are radial internal clearances and axial internal clearances as internal clearances of rolling bearings. Generally, rolling bearings are often used for inner ring rotation, and the smaller these internal clearances, the smaller the backlash. Many applications with a small clearance are preferred.

  However, in a film conveying device such as a tenter device, the rolling bearing is often used for rotating the outer ring, and moves while receiving a large tension in a high temperature environment, so the internal clearance, particularly the radial internal clearance is small. Then, the inner ring, the outer ring, and the rolling element are thermally expanded, and the rolling element comes into contact with the inner ring and the outer ring with a large load, and there is a problem that each member is easily worn.

  And when each member of a rolling bearing wears out, dust, such as metal powder, is generated, this adheres to a film and the quality of a film falls, or the diameter of a rolling element and the roundness of an inner and outer ring Deterioration may be caused and inconveniences such as a decrease in durability, life, and rotation performance of the rolling bearing may occur.

  The solid-lubricated rolling bearing described in Patent Document 2 is assumed to be used in a high temperature environment, but does not consider the radial internal clearance as described above and cannot solve the above problem. There wasn't.

  Accordingly, an object of the present invention is to enable the film to be smoothly conveyed by the rolling bearing and to suppress the wear of the inner and outer rings of the rolling bearing and the rolling element, thereby improving the durability and extending the life. Another object is to provide a film transport device.

  In order to achieve the above object, a film transport apparatus of the present invention is for transporting a belt-shaped film along a transport path having a heat treatment region at least in part, and the transport path of the film A guide member composed of a pair of guide rails, a chain sandwiched between the pair of guide rails and moving along the guide member, and both ends of the film attached to the chain. A holding plate for holding, the chain is in contact with the guide member via a rolling bearing, and the rolling bearing is provided between an inner ring, an outer ring disposed on the outer periphery thereof, and the inner ring and the outer ring. A plurality of rolling elements disposed so as to be freely rollable, and a cage for rotatably holding the rolling elements, wherein at least a part of the surface of the cage is made of a lubricant. Film is formed, the radial internal clearance, characterized in that it is a 45～100Myuemu.

  According to the present invention, the film can be conveyed by the chain that moves along the guide member via the rolling bearing while holding the both ends of the film with the holding plate. At this time, since the radial internal clearance of the rolling bearing is 45 to 100 μm, even if the inner ring, the outer ring, and the rolling element are thermally expanded when passing through the heat treatment region, the rolling element is a rolling surface of the inner ring and the outer ring. It is possible to prevent contact with a large load and suppress wear thereof, so that the generation of dust such as metal powder can be suppressed and the quality of the film can be improved, and the durability of the rolling bearing can be improved. This can increase the service life and can maintain the rotation performance.

  In the film transport apparatus of the present invention, the radial internal clearance is preferably 45 to 65 μm.

  In the film transport device of the present invention, the film is a polyimide self-supporting film, and the film transport device is a tenter device configured to hold and heat both ends of the film. preferable.

  According to this aspect, when heat-treating the polyimide self-supporting film at a temperature of 150 to 500 ° C., even if the inner ring, the outer ring, and the rolling element are thermally expanded, the rolling element is the inner ring or the outer ring. Contact with the rolling surface with a large load can be prevented, the rotational performance of the rolling bearing can be maintained, and the chain can be moved smoothly.

  In the film transport device of the present invention, the rolling bearing is rotatably mounted on the chain via a support shaft that is orthogonal to the traveling direction, and abuts against the upper end surface of the guide rail to It is preferable to include an upward rolling bearing to support.

  According to this aspect, the upward rolling bearing can reduce the frictional force between the chain and the guide member, and the generation of dust such as metal powder due to wear can be further reduced.

  In the film transport device of the present invention, the chain is inserted into the bush by a pair of outer plates, a pair of inner plates, a bush disposed through the ends of the inner plate, and the bush. The rolling plate is mounted on the outer periphery of the bush and is arranged between the pair of guide rails to guide the movement of the chain. It is preferable to include a downward rolling bearing.

  According to this aspect, when the chain is pulled by the contraction force of the film, the downward rolling bearing comes into contact with the inner surface of the guide rail located on the film transport path side, so that the shaft center of the chain pin is relative to the guide rail. And the frictional force between the chain and the guide member can be more effectively reduced.

  According to the present invention, since the radial internal clearance of the rolling bearing is 45 to 100 μm, even if the inner ring, the outer ring, and the rolling element are thermally expanded when passing through the heat treatment region, the inner ring, the outer ring, and the rolling element Abrasion can be suppressed, the generation of dust can be suppressed and the quality of the film can be improved, the durability of the rolling bearing can be improved and the life can be extended, and the rotation performance can also be maintained. .

1 is a plan view showing an embodiment of a film transport apparatus according to the present invention. It is a principal part enlarged plan view of the conveyance apparatus of the film. It is a principal part expanded sectional view of the conveyance apparatus of the film. It is the perspective view in the state where the rolling bearing integrated in the conveyance apparatus of the film is shown, and one part was fractured | ruptured. It is a top view of the rolling bearing. It is a principal part expanded sectional view of the rolling bearing.

  Hereinafter, with reference to FIGS. 1-6, one Embodiment of the conveying apparatus of the film which concerns on this invention is described.

  As shown in FIG. 1, a film transport device 10 (hereinafter referred to as “transport device 10”) in this embodiment includes both sides of a transport path of a film F that is pulled out from a roller (not shown) and transported in a belt shape. And a guide member 20 disposed along the guide member 20 and endless chains 30 and 30 that move along the guide member 20. A driving sprocket 25 that is rotatable by driving means (not shown) meshes with one end of each chain 30, and a driven sprocket 27 meshes with the other end, and the driving sprocket is driven by driving means (not shown). When 25 rotates, each chain 30 moves in the direction shown by the arrow in FIG.

  In the transport device 10 of this embodiment, a pair of guide members 20 and 20 are disposed in parallel on both sides of the film F, and a total of four guide members 20 are provided. Each guide member 20 includes a pair of guide rails 21 and 21 that extend in a rail shape and are arranged in parallel with each other at a predetermined interval. A chain 30 is sandwiched between the guide rails 21 and 21, and the movement thereof is guided. It has come to be.

  2 and 3, the endless chain 30 has a structure in which a pair of outer plates 31 and 32 parallel to each other and a pair of inner plates 33 and 34 parallel to each other are alternately connected. ing. At both ends of the inner plates 33 and 34, the upper and lower ends of the bush 35 that rotatably covers the roller 40 are respectively press-fitted, and the inner plates 33 and 34 are integrated with each other. Further, the end portions of the outer plates 31 and 32 are arranged outside the end portions of the inner plates 33 and 34, and these end portions are connected to each other via the pins 36 inserted into the outer plates 31 and 32 and the bush 35. They are connected so as to be rotatable with respect to each other. One end of the pin 36 engages with the outer plate 32, and the other end is fastened and fixed by a nut 38 via a washer 37, and both plates are held out.

  On the outer periphery of the bush 35 and above the roller 40, a downward rolling bearing 60A having an outer diameter larger than that of the roller 40 is rotated so as to be sandwiched between the guide rails 21 and 21 of the guide member 20. Arranged to be possible.

  As shown in FIGS. 2 and 3, a support shaft 41 that is orthogonal to the longitudinal direction of the upper outer plate 31 and the traveling direction of the chain 30 (see arrow A in FIGS. 1 and 2) is fixed to the middle portion of the upper outer plate 31. Has been. And the upper rolling bearings 60B and 60B are rotatably attached to both ends of the support shaft 41, respectively. These upward rolling bearings 60 </ b> B and 60 </ b> B are disposed in contact with the guide rails 21 and 21 of each guide member 20, and the chain 30 is supported so as to be movable along the longitudinal direction of the guide member 20. .

  A holding plate 50 that holds one end portion of the long side of the film F is attached to the outer plate 31 via an arm 55 that extends toward the film F conveyance path. The holding plate 50 has a long plate shape, and a plurality of piercing pins 51 project from the upper surface, and pierce the film F to hold the film F.

  As shown in FIGS. 2 and 3, the arm 55 of this embodiment is bent outward with respect to a bent portion 56 formed to be bent in a substantially U shape and one side portion 56 a of the bent portion 56. The distal end portion 57 is fixed to the holding plate 50, and the base end portions 58 and 58 are bent outward with respect to the other side portion 56b of the bent portion 56 and fixed to the outer plate 31. The arm 55 is attached to the outer plate 31 of the chain 30 via the base end portions 58 and 58.

  Next, the downward rolling bearing 60 </ b> A and the upward rolling bearing 60 </ b> B incorporated in the transport device 10 will be described with reference to FIGS. 4 to 6.

  Each of the rolling bearings 60A and 60B includes a cylindrical inner ring 61, an outer ring 63 that is also cylindrical and is arranged concentrically at a predetermined interval on the outer periphery of the inner ring 61, and between the inner ring 61 and the outer ring 63. A plurality of spherically-shaped rolling elements 65, a retainer 67 that rotatably holds these rolling elements 65, and an annular ring and are mounted in the gap between the inner ring 61 and the outer ring 63. The pair of shields 70 and 70 (see FIG. 6). 4 and 5, the shield 70 is not shown for convenience.

  Further, a rolling surface 61 a having a concave groove shape is formed on the outer peripheral surface of the inner ring 61, and a rolling surface 63 a having a concave groove shape is also formed on the inner peripheral surface of the outer ring 63. These rolling surfaces 61a and 63a hold the rolling element 65 so that it can roll freely. Furthermore, the holder 67 in this embodiment has a pocket 69 for holding one rolling element 65 by connecting annular frames 68, 68 provided with a plurality of arcuate frame portions 68a in the circumferential direction by pins, caulking or the like. Has a structure formed at equal intervals along the circumferential direction. The retainer 67 of this embodiment includes nine pockets 69. In addition, as a holder | retainer, for example, you may make it form a pocket widely in the circumferential direction, and may accommodate and hold | maintain the some rolling element 65, The structure is not specifically limited.

  And in this conveying apparatus 10, the radial internal clearance of the downward rolling bearing 60A and the upward rolling bearing 60B incorporated in the conveying apparatus 10 is configured to be 45 to 100 μm. The radial internal clearance is preferably 45 to 85 μm, more preferably 45 to 65 μm, still more preferably 45 to 60 μm, and particularly preferably 48 to 57 μm.

  Here, as shown in FIG. 6, the radial internal clearance is such that the outer diameter of the rolling element 65 is D, the inner diameter of the inner rolling surface 63 a of the outer ring 63 is F, and the outer rolling surface 61 a of the inner ring 61 is outer. When the outer diameter is E, it is defined by F− (E + 2 × D).

  When the radial internal clearance is less than 45 μm, the inner ring, the outer ring, and the rolling element are thermally expanded when passing through the heat treatment region, and the rolling element 65 is rolled on the rolling surface 61 a of the inner ring 61 and the rolling surface of the outer ring 63. It becomes easy to contact 63a with a big load, and each member becomes easy to wear. On the other hand, when the radial internal clearance exceeds 100 μm, rattling is likely to occur, which may cause damage to the rolling bearing in use and cause noise and vibration.

  The inner ring 61, the outer ring 63, the rolling element 65, and the cage 67 are, for example, metal such as bearing steel (SUJ), stainless steel (SUS), titanium alloy, copper alloy, aluminum alloy, ceramic, and polyimide resin. It can be formed from a resin such as a polyether ether ketone resin.

  Moreover, it is preferable that a lubricant film is formed on at least a part of the surface of the cage in order to improve the slipperiness. As the lubricant, it is preferable to form a film by using a single or a combination of two or more known solid lubricants such as natural or artificial graphite materials, boron nitride, molybdenum disulfide, and tungsten disulfide.

  In addition, it is preferable that the film thickness of these films is 5-50 micrometers, and it is more preferable that it is 20-30 micrometers.

  Next, the usage method and effect of the film transport apparatus 10 having the above structure will be described.

  As the film F, for example, a thin film made of a synthetic resin, a sheet made of a fiber such as paper or cloth, or a film containing a metal foil made of metal can be used. Among these, a polyimide film that can be used as an electric insulating film, a heat insulating film, a base film of a flexible circuit board, etc. is preferable, and a polyimide precursor obtained from a tetracarboxylic dianhydride component and a diamine component. A polyimide self-supporting film obtained by casting or coating a solvent solution on a support is preferred. A specific method for obtaining a self-supporting film of polyimide is as follows.

  Examples of the tetracarboxylic dianhydride component constituting the polyimide precursor include 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, pyromellitic dianhydride, 2,3 ′, 3,4 ′ -Biphenyltetracarboxylic dianhydride, 3,3 ', 4,4'-benzophenone tetracarboxylic dianhydride, 2,2', 3,3'-benzophenone tetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) propane dianhydride, 2,2-bis (2,3-dicarboxyphenyl) propane dianhydride, bis (3,4-dicarboxyphenyl) ether dianhydride, Bis (2,3-dicarboxyphenyl) ether dianhydride, 2,3,6,7-naphthalene tetracarboxylic dianhydride, 1,4,5,8-naphthalene tetracarboxylic dianhydride, , 2,5 6-naphthalenetetracarboxylic dianhydride, 2,2-bis (3,4-dicarboxyphenyl) -1,1,1,3,3,3-hexafluoropropane dianhydride, 2,2-bis ( 2,3-dicarboxyphenyl) -1,1,1,3,3,3-hexafluoropropane dianhydride and the like.

  Examples of the diamine component include paraphenylene diamine, metaphenylene diamine, 2,4-diaminotoluene, 2,6-diaminotoluene, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenyl ether, 3,4'- Diaminodiphenyl ether, 3,3′-dimethyl-4,4′-diaminobiphenyl, 2,2′-dimethyl-4,4′-diaminobiphenyl, 2,2′-bis (trifluoromethyl) -4,4′- Diaminobiphenyl, 4,4′-diaminobenzophenone, 3,3′-diaminobenzophenone, 4,4′-bis (4-aminophenyl) sulfide, 4,4′-diaminodiphenylsulfone, 4,4′-diaminobenzanilide 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (4-amino) Enoxy) benzene, 1,3-bis (3-aminophenoxy) benzene, 4,4′-bis (4-aminophenoxy) biphenyl, 4,4′-bis (3-aminophenoxy) biphenyl, 2,2-bis (4-aminophenoxyphenyl) propane, bis [4- (4-aminophenoxy) phenyl] sulfone, bis [4- (3-aminophenoxy) phenyl] sulfone, 2,2-bis [4- (4-aminophenoxy) ) Phenyl] hexafluoropropane and the like.

  The synthesis of the solvent solution of the polyimide precursor is first achieved by random polymerization or block polymerization of approximately equimolar tetracarboxylic dianhydride component and diamine component in an organic solvent. May also be mixed with the reaction conditions was keep two or more polyimide precursors in which either of these two components is excessive, the respective polyimide precursor solution together. The polyimide precursor solution thus obtained can be used for the production of the next self-supporting film as it is, or if necessary, by removing the organic solvent or newly adding an organic solvent.

  Examples of the organic solvent for random polymerization or block polymerization and the newly added organic solvent include N-methyl-2-pyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide, N, N-diethylacetamide and the like. It is done. These organic solvents may be used alone or in combination of two or more.

  If necessary, an imidization catalyst, an organic phosphorus-containing compound, inorganic fine particles, and the like may be added to the polyimide precursor solution.

  A method for producing a self-supporting film by partially imidizing the polyimide precursor obtained above will be described. Partial imidization may be performed by any of imidation by heat (thermal imidization), chemical imidization (chemical imidization), or a method in which thermal imidization and chemical imidization are used in combination.

  First, the manufacturing method of the self-supporting film by thermal imidation is demonstrated. The self-supporting film of the polyimide precursor solution is prepared by applying an organic solvent solution of the polyimide precursor as described above or a polyimide precursor solution obtained by adding an imidization catalyst, an organic phosphorus-containing compound, inorganic fine particles, and the like on the support. Manufactured by casting and partially imidizing by heating to the extent that it becomes self-supporting. Here, the degree of self-supporting refers to a state where it can be peeled from the support.

  The polyimide precursor solution preferably contains about 10 to 30% by mass of the polyimide precursor. Moreover, as a polyimide precursor solution, what the density | concentration of the polyimide after imidation is about 8-25 mass% is preferable. The heating temperature and the heating time can be appropriately determined. For example, the heating may be performed at a temperature of 100 to 180 ° C. for about 3 to 60 minutes.

  As the support, it is preferable to use a smooth base material such as a stainless steel substrate, a stainless steel belt, or a glass plate. The self-supporting film preferably has a loss on heating in the range of 20 to 50% by mass, further a loss on heating in the range of 20 to 50% by mass and an imidization ratio in the range of 8 to 55%, More preferably, it is in the range of 10 to 50% because the mechanical properties of the self-supporting film are sufficient and it is preferable from the viewpoint of stretching.

  The film F used in the present invention is preferably a polyimide self-supporting film or a polyimide film in which imidization has proceeded by heat-treating a polyimide self-supporting film.

  Moreover, the conveyance apparatus 10 in this embodiment uses the above-mentioned polyimide self-supporting film as the film F, and when this is heat-treated in the curing process (heat curing process), the both ends are held and heated. It is used as a so-called tenter device for suppressing the shrinkage associated with. However, the film transport apparatus is not limited to the tenter apparatus.

  Then, both end portions on the long side of the film F are arranged between holding plates 50 and 50 attached to the respective chains 30 via arms 55, and the piercing pins 51 are pierced into the film F, whereby the film Both end portions of F are held by holding plates 50 and 50.

  When the drive sprocket 25 is rotated by a drive means (not shown) in this state, each chain 30 is guided by a guide member 20 including a pair of guide rails 21 and 21, and moves upward on the guide rails 21 and 21. While being supported by the bearings 60B and 60B, it rotates in the direction of the arrow in FIG. 1, and as the chain 30 rotates, the holding plates 50 and 50 move while holding both ends of the film F via the arm 55. The film F travels in the direction indicated by the arrow A in FIGS.

  In the transport device 10 of this embodiment, the upper rolling bearings 60B and 60B are structured to abut on the guide rails 21 and 21 of the guide member 20, so that the chain 30 can be moved smoothly. it can.

  When the polyimide self-supporting film is heat-treated in a predetermined high temperature environment during the conveyance of the film F, the inner ring 61, the outer ring 63, the rolling element 65, and the like constituting the rolling bearings 60A and 60B are thermally expanded. Will do. In the present invention, the heat treatment region means a region to be heat treated, for example, under a temperature condition of 100 to 600 ° C., more preferably 150 to 500 ° C.

  At this time, since the radial internal clearance of each of the rolling bearings 60A and 60B is 45 to 100 μm in the transport device 10, the inner ring 61 can be used even when heated to 150 to 500 ° C. through the heat treatment region. Even when the outer ring 63 and the rolling element 65 are thermally expanded, the rolling element 65 is prevented from coming into contact with the inner ring 61 and the outer ring 63 with a large load, and the wear of the inner ring 61, the outer ring 63 and the rolling element 65 is suppressed. Can do. As a result, the generation of dust such as metal powder can be suppressed, the dust can be prevented from adhering to the film F, the quality of the film F can be improved, and the durability of the rolling bearings 60A and 60B can be improved. The service life can be extended, and the rotational performance of the rolling bearings 60A and 60B can be maintained. The chain 30 can be moved smoothly over a long period of time.

  Further, when the film F is heat-treated and contracts during the conveyance, tension is applied to the chain 30 via the holding plate 50 and the arm 55 in a direction perpendicular to the traveling direction of the film F (see arrow B in FIG. 3). To do. Then, the outer peripheral surface of the downward rolling bearing 60 </ b> A comes into contact with the inner surface of the guide rail 21 on the film F conveyance path side, so that the shaft center C (see FIG. 3) of the pin 36 of the chain 30 is moved with respect to the guide rail 21. In addition to making it difficult to tilt, the frictional force between the chain 30 and the guide rail 21 can be effectively reduced.

  The film conveyance devices using the rolling bearings of Examples 1 and 2 and Comparative Examples 1 and 2 below were tested for rotational performance and the like.

Example 1
A rolling bearing (manufactured by Nankai Seiko Co., Ltd.) having the same shape as that shown in FIG. 4 and a bearing basic number of 6002 and a radial internal clearance of 48 μm was used. The rolling elements are made of stainless steel, and the cage is coated with a solid lubricant mainly composed of molybdenum disulfide.

(Example 2)
A rolling bearing having the same structure as that of Example 1 was used except that the radial internal clearance was 57 μm.

(Comparative Example 1)
A rolling bearing having the same structure as in Example 1 was used except that the radial internal clearance was 25 μm.

(Comparative Example 2)
The same rolling bearing as in Example 1 was used except that the radial internal clearance was 44 μm.

(Test method)
The rolling bearings of Examples 1 and 2 and Comparative Examples 1 and 2 were incorporated into the film transport device shown in FIG. 3, and the chain was allowed to travel a predetermined distance. A polyimide self-supporting film was used as the film. 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride was used as the tetracarboxylic dianhydride component constituting the polyimide, and paraphenylenediamine was used as the diamine component. After 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and paraphenylenediamine are reacted in N, N-dimethylacetamide to obtain a polyimide precursor solution, the polyimide precursor solution is placed on the support. A polyimide self-supporting film was produced by casting and partially imidizing by heating to the extent that it was self-supporting.

  Further, for each rolling bearing after running on the chain, the rotational performance, the roundness of the inner ring rolling surface, the roundness of the outer ring rolling surface, and the roughness of the inner ring rolling surface were evaluated, and the state of the rolling element was visually evaluated. The results are summarized in Table 1. In the column of rotational performance in Table 1, x means poor rotational performance, ○ means better rotational performance, and ◎ means better rotational performance than ○. Moreover, the tolerance of the roundness of the inner ring rolling surface and the outer ring rolling surface is 3 μm.

  As shown in Table 1 above, the rolling bearing of Comparative Example 1 has a problem in rotational performance after running the chain despite the short chain running distance, and the roundness of the transfer surface of the inner ring is also poor. Large wear marks were found on the entire surface of the rolling element, and wear marks and surface roughness were found on the rolling surface of the inner ring. Moreover, also in the rolling bearing of the comparative example 2, the fall of the rotational performance after chain driving | running | working and the surface roughness of the transfer surface of an inner ring | wheel were confirmed. On the other hand, in the case of the rolling bearings of Example 1 and Example 2, the rotational performance after running the chain is good, the roundness of the inner ring rolling surface is also good, and the rolling surface of the inner ring is good. It was confirmed that the condition was good and the durability was improved.

DESCRIPTION OF SYMBOLS 10 Film conveying apparatus 20 Guide member 21 Guide rail 25 Drive sprocket 27 Driven sprocket 30 Chain 31, 32 Outer plate 33, 34 Inner plate 35 Bush 36 Pin 37 Washer 38 Nut 40 Roller 41 Support shaft 50 Holding plate 51 Pin 55 Arm 56 Bent part 56a One side part 56b Other side part 57 Tip part 58 Base end part 60A, 60B Rolling bearing 61 Inner ring 61a Rolling surface 63 Outer ring 63a Rolling surface 65 Rolling body 67 Cage 68 Annular frame 68a Arc-shaped frame part 69 Pocket 70 Shield F film

Claims (5)

A film transport device for transporting a belt-shaped film along a transport path having a heat treatment region at least in part,
A guide member comprising a pair of guide rails disposed along both sides of the film conveyance path, a chain that is sandwiched between the pair of guide rails and moves along the guide member, and the chain attached to the chain, A holding plate for holding both ends of the film,
The chain is in contact with the guide member via a rolling bearing, and the rolling bearing is rotatably disposed between an inner ring, an outer ring disposed on an outer periphery thereof, and the inner ring and the outer ring. A plurality of rolling elements, and a cage for rotatably holding the rolling elements, and a lubricant film is formed on at least a part of the surface of the cage, and a radial internal clearance is further formed. Is a film transporting device, characterized in that it is 45-100 μm.   2. The film conveying apparatus according to claim 1, wherein the radial internal clearance is 45 to 65 [mu] m.   3. The film transport apparatus according to claim 1, wherein the film is a polyimide self-supporting film, and the film transport apparatus is a tenter apparatus that holds and heats both ends of the film.   The rolling bearing includes an upward rolling bearing that is rotatably attached to the chain via a support shaft that is orthogonal to a traveling direction thereof, and that contacts the upper end surface of the guide rail to support the chain. The film conveying apparatus of any one of -3. The chain includes a pair of outer plates, a pair of inner plates, a bush disposed through end portions of the inner plate, and an end of the outer plate and the inner plate inserted into the bush. And a pin for connecting the parts,
The said rolling bearing is mounted | worn on the outer periphery of the said bush, is arrange | positioned between the said pair of guide rails, and includes the downward rolling bearing which guides the movement of the said chain, The film of any one of Claims 1-4 Conveying device.