JP2014053532A - Liquid-cooled jacket - Google Patents
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- JP2014053532A JP2014053532A JP2012198284A JP2012198284A JP2014053532A JP 2014053532 A JP2014053532 A JP 2014053532A JP 2012198284 A JP2012198284 A JP 2012198284A JP 2012198284 A JP2012198284 A JP 2012198284A JP 2014053532 A JP2014053532 A JP 2014053532A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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Abstract
Description
本発明は発光ダイオード（LED）素子、レーザダイオード（LD）素子、マイクロプロセッサ等の発熱素子用の液冷ジャケットに関する。 The present invention relates to a liquid cooling jacket for a heating element such as a light emitting diode (LED) element, a laser diode (LD) element, or a microprocessor.
近年、LED素子、LD素子、マイクロプロセッサ等の発熱素子の高性能化に伴い、発熱素子の発熱量は増大してきている。一方、発熱素子の小型化、薄型化の要求が高まり、発熱素子の発熱密度は非常に高くなり熱的に厳しい状況を強いられている。 In recent years, the amount of heat generated by a heating element has increased with the improvement in performance of heating elements such as LED elements, LD elements, and microprocessors. On the other hand, there is an increasing demand for miniaturization and thinning of the heat generating elements, and the heat generation density of the heat generating elements becomes very high, which forces a severe thermal condition.
特に、LED素子、LD素子は自身が発する熱により寿命及び性能が低下するという性質がある。そのため、発熱素子の温度上昇が問題となり、発熱素子の冷却効率を高める冷却手法が求められている。その１つの手法としてアウタフィンを備えたヒートシンクの改良がある（参照：特許文献１）。この改良ヒートシンクは、発熱源からの熱を受けるベース基板と、ベース基板の発熱源とは反対側のベース基板に立設した柱状のミリメートルオーダの複数のアウタフィンとを有する。この場合、ミリメートルオーダのブロアからの気流との熱交換面積を大きくするために、つまり、流路長を長くするために、アウタフィンは発熱源の真裏を中心に放射螺旋状に配置されている。また、アウタフィンの密度分布は、熱交換に最も寄与する中心部で高くかつ流体抵抗を低減する必要がある周辺部で低くなるように、傾斜している。 In particular, LED elements and LD elements have the property that their lifetime and performance are reduced by the heat generated by themselves. For this reason, the temperature rise of the heat generating element becomes a problem, and a cooling method for increasing the cooling efficiency of the heat generating element is required. As one of the methods, there is an improvement of a heat sink provided with an outer fin (see: Patent Document 1). The improved heat sink includes a base substrate that receives heat from a heat source, and a plurality of columnar millimeter-order outer fins erected on the base substrate opposite to the base substrate. In this case, in order to increase the heat exchange area with the air flow from the millimeter order blower, that is, in order to increase the flow path length, the outer fins are arranged in a radial spiral centered on the back of the heat generation source. In addition, the density distribution of the outer fins is inclined so as to be high in the central portion that contributes most to heat exchange and low in the peripheral portion where fluid resistance needs to be reduced.
しかしながら、上述のヒートシンクにおいては、ミリメートルオーダのアウタフィンを用いて冷媒液の流体抵抗の制御をしているので、ヒートシンクの薄型化が困難である。また、ブロアから出る冷媒液の流速が小さい場合、冷媒液を遠方に均一に流すことができないので、ヒートシンクの大面積化が困難である。 However, in the above heat sink, the fluid resistance of the refrigerant liquid is controlled using a millimeter-order outer fin, so that it is difficult to make the heat sink thinner. In addition, when the flow rate of the refrigerant liquid coming out of the blower is small, the refrigerant liquid cannot flow uniformly in the distance, so it is difficult to increase the area of the heat sink.
上述のアウタフィンを備えたヒートシンクと異なり、最近、インナフィンを内部に備えて冷媒液を内部に循環させることにより発熱素子の熱を周囲へ放熱させ、これにより、発熱素子を適切な温度に維持するヒートシンク（本願明細書、特許請求の範囲では、液冷ジャケットと言う）がある。 Unlike the heat sink having the outer fin described above, recently, a heat sink that has an inner fin inside and circulates a coolant liquid inside to dissipate heat from the heat generating element to the surroundings, thereby maintaining the heat generating element at an appropriate temperature. (Referred to as a liquid cooling jacket in the present specification and claims).
第１の従来の液冷ジャケットは側枠部間に多数の傾斜骨または波骨からなるミリメートルオーダのインナフィンを有し、発熱素子の発熱量及び配置に応じて傾斜骨または波骨のピッチ、幅、熱伝導率、段数等を変更している（参照：特許文献２）。 The first conventional liquid cooling jacket has a millimeter-order inner fin made of a large number of inclined bones or wave bones between the side frames, and the pitch and width of the inclined bones or wave bones according to the heat generation amount and arrangement of the heating elements. The thermal conductivity, the number of steps, and the like are changed (see Patent Document 2).
第２の従来の液冷ジャケットにおいては、ミリメートルオーダのインナフィンを流入口もしくは流出口を中心とする同心円上に配置すると共に、インナフィンの密度を流入口もしくは流出口からの距離の対数関数で与えられる流速に比例するようにする。これにより、流入口の近傍に多数のインナフィンを設けて冷媒液の流速を抑えている（参照：特許文献３）。 In the second conventional liquid cooling jacket, inner fins on the order of millimeters are arranged concentrically around the inlet or outlet, and the density of the inner fin is given by a logarithmic function of the distance from the inlet or outlet. Proportional to the flow rate. Thereby, many inner fins are provided in the vicinity of the inflow port to suppress the flow rate of the refrigerant liquid (see Patent Document 3).
しかしながら、上述の第１の従来の液冷ジャケットにおいては、ミリメートルオーダのインナフィンを用いて冷媒液の流体抵抗を制御しているので、液冷ジャケットの薄型化が困難であるという課題がある。また、インナフィンの製造を金型等を用いて行うので、発熱素子の発熱量及び配置に応じてインナフィンの変更を行うことが困難であるという課題もある。 However, in the first conventional liquid cooling jacket described above, since the fluid resistance of the refrigerant liquid is controlled using millimeter-order inner fins, there is a problem that it is difficult to reduce the thickness of the liquid cooling jacket. In addition, since the inner fin is manufactured using a mold or the like, there is also a problem that it is difficult to change the inner fin according to the heat generation amount and arrangement of the heat generating elements.
また、上述の第２の従来の液冷ジャケットにおいても、ミリメートルオーダのインナフィンを用いて冷媒液の流体抵抗を制御しているので、液冷ジャケットの薄型化が困難であるという課題がある。また、液冷ジャケット内部の冷媒液の流速を一定にし液冷ジャケット全体を均一に冷却できるが、発熱素子の発熱量及び配置に応じたインナフィンの配置が困難であるという課題もある。 The second conventional liquid cooling jacket also has a problem that it is difficult to reduce the thickness of the liquid cooling jacket because the fluid resistance of the refrigerant liquid is controlled using millimeter-order inner fins. Further, although the flow rate of the refrigerant liquid inside the liquid cooling jacket can be made constant and the entire liquid cooling jacket can be cooled uniformly, there is also a problem that it is difficult to arrange the inner fins according to the amount of heat generation and the arrangement of the heating elements.
上述の課題を解決するために本発明に係る液冷ジャケットは、冷媒液が流入する流入口と冷媒液が流出する流出口との間に中空部を形成する液冷ジャケットにおいて、中空部を規定しかつ発熱源を搭載すべき搭載面を規定するシートを具備し、シートに内面の冷媒液に対する親和力の異なる複数の突起領域を設けることにより冷媒液の流速を制御するものである。 In order to solve the above-described problems, a liquid cooling jacket according to the present invention defines a hollow portion in a liquid cooling jacket in which a hollow portion is formed between an inlet through which refrigerant liquid flows in and an outlet through which refrigerant liquid flows out. And the sheet | seat which prescribe | regulates the mounting surface which should mount a heat generation source is provided, and the flow rate of a refrigerant | coolant liquid is controlled by providing the several protrusion area | region where the affinity with respect to the refrigerant | coolant liquid of an inner surface differs in a sheet | seat.
本発明によれば、冷媒液の流速をシートの冷媒液に対する親和力の異なる複数の突起領域で制御しているので、ミリメートルオーダのインナフィンは不要となり、液冷ジャケットを薄型化できる。また、親和力の異なる突起領域は金型等を用いずに形成できるので、液冷ジャケットを発熱素子の発熱量及び配置に応じて容易に変更できる。 According to the present invention, since the flow velocity of the refrigerant liquid is controlled by the plurality of protrusion regions having different affinity for the refrigerant liquid of the sheet, the inner fin of the millimeter order is not necessary, and the liquid cooling jacket can be thinned. Further, since the projecting regions having different affinity can be formed without using a mold or the like, the liquid cooling jacket can be easily changed according to the heat generation amount and arrangement of the heating elements.
図１は本発明に係る液冷ジャケットの第１の実施の形態を含む液冷システムを示す一部透視の斜視図である。 FIG. 1 is a partially transparent perspective view showing a liquid cooling system including a first embodiment of a liquid cooling jacket according to the present invention.
図１に示すように、液冷ジャケット１は、冷媒液ＬＣが流入する流入口１１と冷媒液ＬＣが流出する流出口１２との間に壁等によって規定された高さ約1mmの中空部１３を有する。この場合、中空部１３の底面１３ａ、つまり、発光素子たとえば発光ダイオード（LED）素子２１及び厚さ約1〜5mmのベース基板２２よりなる発熱源２を搭載すべき搭載面は厚さ約10〜500μmのシート１４によって規定される。 As shown in FIG. 1, the liquid cooling jacket 1 includes a hollow portion 13 having a height of about 1 mm defined by a wall or the like between an inlet 11 into which the refrigerant liquid LC flows in and an outlet 12 from which the refrigerant liquid LC flows out. Have In this case, the bottom surface 13a of the hollow portion 13, that is, the mounting surface on which the heat generating source 2 including the light emitting element, for example, the light emitting diode (LED) element 21 and the base substrate 22 having a thickness of about 1 to 5 mm is to be mounted. Defined by a 500 μm sheet 14.
流入口１１は中空部１３の第１の角部に位置し、他方、流出口１２は中空部１３の第２の角部に位置する。第１、第２の角部は中空部１３の対角方向に位置している。 The inlet 11 is located at the first corner of the hollow portion 13, while the outlet 12 is located at the second corner of the hollow portion 13. The first and second corner portions are located in the diagonal direction of the hollow portion 13.
シート１４の内面には、３つの微小突起領域つまり低密度微小突起領域１４１及び高密度微小突起領域１４２、１４３が流入口１１から流出口１２に向って設けられている。 On the inner surface of the sheet 14, three microprojection regions, that is, a low-density microprojection region 141 and high-density microprojection regions 142 and 143 are provided from the inlet 11 toward the outlet 12.
低密度微小突起領域１４１は流入口１１と流出口１２との間のシート１４の内面の中央部の対角方向に拡がりを有し、高密度微小突起領域１４２、１４３は低密度微小突起領域１４１を挟むように設けられている。このとき、低密度微小突起領域１４１と高密度微小突起領域１４２、１４３との間は、突起の存在しない領域であるが、低密度微小突起領域１４１と高密度微小突起領域１４２、１４３とは接触させてもよい。どちらを選択するかは製造プロセスによる。微小突起領域１４１、１４２、１４３については後述する。 The low-density microprojection region 141 has a diagonally extended central portion of the inner surface of the sheet 14 between the inlet 11 and the outlet 12, and the high-density microprojection regions 142 and 143 are the low-density microprojection region 141. It is provided so that it may be inserted. At this time, the area between the low density microprojection area 141 and the high density microprojection areas 142 and 143 is an area where no projection exists, but the low density microprojection area 141 and the high density microprojection areas 142 and 143 are in contact with each other. You may let them. Which to choose depends on the manufacturing process. The microprojection regions 141, 142, and 143 will be described later.
液冷ジャケット１の流出口１２と流入口１１との間には、冷却ファン３Ｂを伴う放熱部としてのラジエータ３Ａ、冷媒液ＬＣを貯留するリザーブタンク４及び冷媒液ＬＣを循環させるマイクロポンプ５が配管６によってループ接続されている。 Between the outlet 12 and the inlet 11 of the liquid cooling jacket 1, there are a radiator 3A as a heat radiating unit with a cooling fan 3B, a reserve tank 4 for storing the refrigerant liquid LC, and a micropump 5 for circulating the refrigerant liquid LC. A loop connection is made by the pipe 6.
図２は図１のシート１４の拡大断面図であって、（Ａ）はＡ−Ａ線拡大断面図、（Ｂ）はＢ−Ｂ線拡大断面図である。 2 is an enlarged cross-sectional view of the sheet 14 of FIG. 1, wherein (A) is an AA line enlarged cross-sectional view, and (B) is a BB line enlarged cross-sectional view.
図２に示すように、低密度微小突起領域１４１及び高密度微小突起領域１４２、１４３には、複数の微小突起（凹凸）構造１４１ａ、１４２ａ、１４３ａが設けられている。低密度微小突起構造１４１ａのピッチＰ１は比較的大きく、たとえば、約5〜10μmであり、従って、低密度微小突起構造１４１ａの密度は比較的小さくなっている。この結果、低密度微小突起構造１４１ａの冷媒液ＬＣに対する濡れ性つまり親水力（一般的には、親和力）は比較的小さい。他方、高密度微小突起構造１４２ａ、１４３ａのピッチＰ２、Ｐ３は比較的小さく、たとえば、約0.5〜1μmであり、従って、高密度微小突起構造１４２ａ、１４３ａの密度は比較的大きくなっている。この結果、高密度微小突起構造１４２ａ、１４３ａの冷媒液ＬＣに対する親和力は比較的大きい。この場合、高密度微小突起構造１４２ａのピッチＰ２と高密度微小突起構造１４３ａのピッチＰ３とは同一である。従って、流入口１１から供給された冷媒液ＬＣは低密度微小突起領域１４１の比較的小さい親和力に従って流出口１２へ比較的ゆっくり流れる。他方、流入口１１から供給された冷媒液ＬＣは高密度微小突起領域１４２、１４３の比較的大きい親和力に従って流出口１２へ比較的早く流れる。この場合、微小突起領域が形成されていないシート１４の周囲部では、冷媒液ＬＣは、本来、流れにくいが、高密度微小突起領域１４２、１４３から流れ込む冷媒液ＬＣによって冷媒液ＬＣが押し出される。従って、この冷媒液ＬＣが周辺部から流出口１２へ流れる。また、高密度微小突起領域１４２、１４３上の冷媒液ＬＣの流路長は低密度微小突起領域１４１上の冷媒液ＬＣの流路長より短い。この結果、シート１４上の流速は全体として均一となる。尚、上述の親和力を十分発揮させるために、かつ、微小突起構造１４１ａ、１４２ａ、１４３ａの破損を防止するために、流入口１１から供給される冷媒液ＬＣの流速を低く、たとえば、50mL/min以下とする。 As shown in FIG. 2, the low-density microprojection region 141 and the high-density microprojection regions 142, 143 are provided with a plurality of microprojection (unevenness) structures 141a, 142a, 143a. The pitch P1 of the low density microprojection structure 141a is relatively large, for example, about 5 to 10 μm. Therefore, the density of the low density microprojection structure 141a is relatively small. As a result, the wettability with respect to the refrigerant liquid LC of the low density microprojection structure 141a, that is, the hydrophilic force (generally, affinity) is relatively small. On the other hand, the pitches P2 and P3 of the high-density microprojection structures 142a and 143a are relatively small, for example, about 0.5 to 1 μm. Therefore, the density of the high-density microprojection structures 142a and 143a is relatively large. As a result, the affinity of the high-density microprojection structures 142a and 143a for the refrigerant liquid LC is relatively large. In this case, the pitch P2 of the high-density microprojection structure 142a and the pitch P3 of the high-density microprojection structure 143a are the same. Therefore, the refrigerant liquid LC supplied from the inflow port 11 flows relatively slowly to the outflow port 12 in accordance with the relatively small affinity of the low density microprojection region 141. On the other hand, the refrigerant liquid LC supplied from the inflow port 11 flows relatively quickly to the outflow port 12 in accordance with the relatively large affinity of the high-density microprojection regions 142 and 143. In this case, the refrigerant liquid LC is inherently difficult to flow around the sheet 14 where the microprojection areas are not formed, but the refrigerant liquid LC is pushed out by the refrigerant liquid LC flowing from the high-density microprojection areas 142 and 143. Therefore, the refrigerant liquid LC flows from the peripheral portion to the outlet 12. Further, the flow path length of the refrigerant liquid LC on the high-density microprojection areas 142 and 143 is shorter than the flow path length of the refrigerant liquid LC on the low-density microprojection area 141. As a result, the flow velocity on the sheet 14 becomes uniform as a whole. In addition, in order to fully exhibit the above-mentioned affinity, and in order to prevent breakage of the microprojection structures 141a, 142a, 143a, the flow rate of the refrigerant liquid LC supplied from the inlet 11 is lowered, for example, 50 mL / min. The following.
上述の微小突起構造１４１ａ、１４２ａ、１４３ａは、シート１４、つまり、炭素系シートたとえばグラファイトシート以外に、金属を混ぜた稠密グラファイトシート、その他ダイヤモンド基板、ガラス状炭素系基板上にも加工できる。 The microprojection structures 141a, 142a, 143a described above can be processed on a sheet 14, that is, a carbon-based sheet such as a graphite sheet, a dense graphite sheet mixed with a metal, other diamond substrates, and a glassy carbon-based substrate.
図１の冷媒液ＬＣとしては、通常、水あるいは不凍液を用い、微小突起構造１４１ａ、１４２ａ、１４３ａに用いられるシート１４が水によって腐食（汚染）されない性質を有するので、腐食防止加工は不要である。 As the refrigerant liquid LC in FIG. 1, water or antifreeze liquid is usually used, and the sheet 14 used for the microprojection structures 141a, 142a, 143a has a property not to be corroded (contaminated) by water. .
また、微小突起構造１４１ａ、１４２ａ、１４３ａの炭素は水に対する濡れ性である親和力が大きい。つまり、微小突起構造１４１ａ、１４２ａ、１４３ａは、ナノメートルオーダからサブミクロメートルオーダのサイズと、サブミクロメートルオーダの高さとを有する凹凸構造であり、一方、水分子は0.38nm程度であるので、水分子は微小突起構造１４１ａ、１４２ａ、１４３ａの中へくまなく入っていき、この結果、微小突起構造１４１ａ、１４２ａ、１４３ａの比表面積分で熱交換が行われる。従って、投影面積より大幅に大きな面積での熱交換効率を達成できる。 Moreover, the carbon of the microprojection structures 141a, 142a, and 143a has a high affinity for wettability with water. That is, the microprojection structure 141a, 142a, 143a is a concavo-convex structure having a size from nanometer order to submicrometer order and a height of submicrometer order, while water molecules are about 0.38 nm. Water molecules enter all over the microprojection structures 141a, 142a, 143a, and as a result, heat exchange is performed by the specific surface integration of the microprojection structures 141a, 142a, 143a. Therefore, heat exchange efficiency can be achieved in an area that is significantly larger than the projected area.
尚、上述のナノメートルオーダとは約10〜500nmの範囲を示し、サブミクロメートルオーダとは約0.5〜10μmの範囲を示し、ミクロメートルオーダとは約10〜500μmの範囲を示す。 The nanometer order is in the range of about 10 to 500 nm, the submicrometer order is in the range of about 0.5 to 10 μm, and the micrometer order is in the range of about 10 to 500 μm.
次に、図２の微小突起構造１４１ａ、１４２ａ、１４３ａの加工を図３のフローチャートを参照して説明する。 Next, processing of the microprojection structures 141a, 142a, 143a of FIG. 2 will be described with reference to the flowchart of FIG.
始めに、ステップ３０１にて、シート１４（たとえばグラファイトシート）の内面上に低密度微小突起領域１４１の範囲に対応する開口パターンを有するマスク（たとえば金属製マスク）を設置する。 First, in step 301, a mask (for example, a metal mask) having an opening pattern corresponding to the range of the low-density microprojection region 141 is installed on the inner surface of the sheet 14 (for example, a graphite sheet).
次に、ステップ３０２にて、シート１４の内面にナノメートルオーダからサブミクロメートルオーダのサイズの低密度微小突起構造１４１ａを形成する。尚、低密度微小突起構造１４１ａの高さはサブミクロメートルオーダ以上たとえば0.5〜10μmである。すなわち、シート１４をプラズマエッチング装置に投入し、酸素（O2）ガスを用いてプラズマエッチング法によってエッチングを行う。この際、エッチング条件における圧力の値を変化させることで微笑突起の密度を変化させる。この結果、低密度微小突起構造１４１ａのピッチＰ１は、図２に示すごとく、比較的大きくなる。 Next, in step 302, a low-density microprojection structure 141a having a size of nanometer order to submicrometer order is formed on the inner surface of the sheet 14. The height of the low density microprojection structure 141a is not less than the order of submicrometers, for example, 0.5 to 10 μm. That is, the sheet 14 is put into a plasma etching apparatus, and etching is performed by a plasma etching method using oxygen (O 2 ) gas. At this time, the density of the smile protrusions is changed by changing the pressure value under the etching conditions. As a result, the pitch P1 of the low density microprojection structure 141a becomes relatively large as shown in FIG.
プラズマエッチング条件は、たとえば、次のごとくである。
RFパワー：500W
圧力：13.33Pa（100mTorr）を基準（中心）として、高密度領域では13.33Paより小さい値、低密度領域では13.33Paより大きい値に変化させる。
O2流量：200sccm
The plasma etching conditions are, for example, as follows.
RF power: 500W
Pressure: With 13.33 Pa (100 mTorr) as the reference (center), the value is changed to a value smaller than 13.33 Pa in the high density region and to a value larger than 13.33 Pa in the low density region.
O 2 flow rate: 200sccm
次に、ステップ３０３にて、ステップ３０１において設置されたマスクを撤去する。 Next, in step 303, the mask installed in step 301 is removed.
次に、ステップ３０４にて、シート１４の内面上に高密度微小突起領域１４２、１４３の範囲に対応する開口パターンを有するマスク（たとえば金属製マスク）を設置する。 Next, in step 304, a mask (for example, a metal mask) having an opening pattern corresponding to the range of the high-density microprojection regions 142 and 143 is placed on the inner surface of the sheet 14.
次に、ステップ３０５にて、シート１４の内面にナノメートルオーダからサブミクロメートルオーダのサイズの高密度微小突起構造１４２ａ、１４３ａを形成する。尚、高密度微小突起構造１４２ａ、１４３ａの高さはサブミクロメートルオーダ以上たとえば0.5〜10μmである。すなわち、シート１４をプラズマエッチング装置に投入し、酸素（O2）ガスを用いてプラズマエッチング法によってエッチングを行う。この際、エッチング条件における圧力の値を変化させることで微笑突起の密度を変化させる。この結果、高密度微小突起構造１４２ａ、１４３ａのピッチＰ２、Ｐ３は、図２に示すごとく、比較的小さくなる。 Next, in step 305, high-density microprojection structures 142 a and 143 a having a size of nanometer order to submicrometer order are formed on the inner surface of the sheet 14. The height of the high-density microprojection structures 142a and 143a is not less than the order of submicrometers, for example, 0.5 to 10 μm. That is, the sheet 14 is put into a plasma etching apparatus, and etching is performed by a plasma etching method using oxygen (O 2 ) gas. At this time, the density of the smile protrusions is changed by changing the pressure value under the etching conditions. As a result, the pitches P2 and P3 of the high-density microprojection structures 142a and 143a are relatively small as shown in FIG.
プラズマエッチング条件は、たとえば、次のごとくである。
RFパワー：500W
圧力：13.33Pa（100mTorr）を基準（中心）として、高密度領域では13.33Paより小さい値、低密度領域では13.33Paより大きい値に変化させる。
O2流量：200sccm
The plasma etching conditions are, for example, as follows.
RF power: 500W
Pressure: With 13.33 Pa (100 mTorr) as the reference (center), the value is changed to a value smaller than 13.33 Pa in the high density region and to a value larger than 13.33 Pa in the low density region.
O 2 flow rate: 200sccm
最後に、ステップ３０６にて、ステップ３０４において設置されたマスクを撤去する。 Finally, in step 306, the mask installed in step 304 is removed.
尚、ステップ３０２、３０５でのプラズマエッチング法は、電子サイクロトロン共鳴（ECR）エッチング法、反応性イオンエッチング（RIE）法、大気圧プラズマエッチング法等のいずれでもよく、また、処理ガスは、O2ガス以外のArガス、CO2ガス、H2ガス、CF4ガス等、及びこれらの混合ガスのいずれでもよい。 The plasma etching method in steps 302 and 305 may be any of an electron cyclotron resonance (ECR) etching method, a reactive ion etching (RIE) method, an atmospheric pressure plasma etching method, or the like, and the processing gas is O 2. Ar gas other than gas, CO 2 gas, H 2 gas, CF 4 gas, etc., and any of these mixed gases may be used.
微小突起構造１４１ａ、１４２ａ、１４３ａの例を図４に示す。図４の（Ａ）、（Ｂ）は撮影角度が異なる。図４に示すように、微小突起構造１４１ａ、１４２ａ、１４３ａの突起部のピッチＰ１、Ｐ２、Ｐ３はサイズ（幅）の数倍程度の範囲である。 Examples of the microprojection structures 141a, 142a, 143a are shown in FIG. 4A and 4B have different shooting angles. As shown in FIG. 4, the pitches P1, P2, and P3 of the protrusions of the minute protrusion structures 141a, 142a, and 143a are in the range of several times the size (width).
図５は本発明に係る液冷ジャケットの第２の実施の形態を示す上面図である。図５においては、図１の発熱源２、ラジエータ３Ａ、冷却ファン３Ｂ、リザーブタンク４、マイクロポンプ５及び配管６は同一であるので、図示省略してあり、液冷ジャケット１’のシート１４’のみを図示してある。 FIG. 5 is a top view showing a second embodiment of the liquid cooling jacket according to the present invention. In FIG. 5, the heat source 2, the radiator 3A, the cooling fan 3B, the reserve tank 4, the micro pump 5 and the pipe 6 in FIG. 1 are the same, and are not shown, and the sheet 14 ′ of the liquid cooling jacket 1 ′ is omitted. Only is shown.
図５においては、図１の場合と同様に、流入口１１’は中空部１３’の第１の角部に位置し、他方、流出口１２’は中空部１３’の第２の角部に位置する。第１、第２の角部は中空部１３’の対角方向に位置している。 In FIG. 5, as in FIG. 1, the inlet 11 ′ is located at the first corner of the hollow portion 13 ′, while the outlet 12 ′ is at the second corner of the hollow portion 13 ′. To position. The first and second corner portions are located in the diagonal direction of the hollow portion 13 '.
シート１４’の内面には、２つの微小突起領域つまり低密度微小突起領域１４１’及び高密度微小突起領域１４２’が流入口１１’から流出口１２’に向って設けられている。 On the inner surface of the sheet 14 ′, two microprojection regions, that is, a low-density microprojection region 141 ′ and a high-density microprojection region 142 ′ are provided from the inlet 11 ′ toward the outlet 12 ′.
低密度微小突起領域１４１’は流入口１１’と流出口１２’との間のシート１４’の内面の中央部の対角方向と直角方向に拡がりを有し、高密度微小突起領域１４２’は低密度微小突起領域１４１’を囲むように設けられている。このとき、低密度微小突起領域１４１’と高密度微小突起領域１４２’との間の冷媒液ＬＣの流れを確保するために、低密度微小突起領域１４１’と高密度微小突起領域１４２’とは接触している。 The low-density microprojection region 141 ′ has an extension in a direction perpendicular to the diagonal direction of the central portion of the inner surface of the sheet 14 ′ between the inlet 11 ′ and the outlet 12 ′, and the high-density microprojection region 142 ′ It is provided so as to surround the low-density microprojection region 141 ′. At this time, in order to ensure the flow of the refrigerant liquid LC between the low density microprojection area 141 ′ and the high density microprojection area 142 ′, the low density microprojection area 141 ′ and the high density microprojection area 142 ′ are In contact.
図６は図５のシート１４’の拡大断面図であって、（Ａ）はＡ−Ａ線拡大断面図、（Ｂ）はＢ−Ｂ線拡大断面図である。 6 is an enlarged cross-sectional view of the sheet 14 ′ in FIG. 5, (A) is an enlarged cross-sectional view taken along line AA, and (B) is an enlarged cross-sectional view taken along line BB.
図６に示すように、低密度微小突起領域１４１’及び高密度微小突起領域１４２’には、複数の微小突起（凹凸）構造１４１’ａ、１４２’ａが設けられている。低密度微小突起構造１４１’ａのピッチＰ１’は比較的大きく、たとえば、約5〜10μmであり、従って、低密度微小突起構造１４１’ａの密度は比較的小さくなっている。この結果、低密度微小突起構造１４１’ａの冷媒液ＬＣに対する親和力は比較的小さい。他方、高密度微小突起構造１４２’ａのピッチＰ２’は比較的小さく、たとえば、約0.5〜1μmであり、従って、高密度微小突起構造１４２’ａの密度は比較的大きくなっている。この結果、高密度微小突起構造１４２’ａの冷媒液ＬＣに対する親和力は比較的大きい。従って、流入口１１’から供給された冷媒液ＬＣは低密度微小突起領域１４１’の比較的小さい親和力に従って流出口１２’へ比較的ゆっくり流れる。他方、流入口１１’から供給された冷媒液ＬＣは高密度微小突起領域１４２’の比較的大きい親和力に従って流出口１２’へ比較的早く流れる。この場合、微小突起領域が形成されていないシート１４’の周囲部では、冷媒液ＬＣは、本来、流れにくいが、高密度微小突起領域１４２’から流れ込む冷媒液ＬＣによって冷媒液ＬＣが押し出される。従って、この冷媒液ＬＣが周辺部から流出口１２’へ流れる。また、高密度微小突起領域１４２’上の冷媒液ＬＣの流路長は低密度微小突起領域１４１’上の冷媒液ＬＣの流路長より短い。この結果、シート１４’上の流速は全体として均一となる。尚、上述の親和力を十分発揮させるために、かつ、微小突起構造１４１’ａ、１４２’ａの破損を防止するために、流入口１１’から供給される冷媒液ＬＣの流速を低く、たとえば、50mL/min以下とする。 As shown in FIG. 6, the low-density microprojection region 141 'and the high-density microprojection region 142' are provided with a plurality of microprojection (unevenness) structures 141'a and 142'a. The pitch P1 'of the low-density microprojection structure 141'a is relatively large, for example, about 5 to 10 µm. Therefore, the density of the low-density microprojection structure 141'a is relatively small. As a result, the affinity of the low density microprojection structure 141'a for the refrigerant liquid LC is relatively small. On the other hand, the pitch P2 'of the high-density microprojection structure 142'a is relatively small, for example, about 0.5 to 1 µm, and thus the density of the high-density microprojection structure 142'a is relatively large. As a result, the affinity of the high-density microprojection structure 142'a for the refrigerant liquid LC is relatively large. Accordingly, the refrigerant liquid LC supplied from the inflow port 11 ′ flows relatively slowly to the outflow port 12 ′ in accordance with the relatively small affinity of the low density microprojection region 141 ′. On the other hand, the refrigerant liquid LC supplied from the inflow port 11 ′ flows relatively quickly to the outflow port 12 ′ in accordance with the relatively high affinity of the high-density microprojection region 142 ′. In this case, the refrigerant liquid LC is inherently difficult to flow around the sheet 14 ′ where the microprojection area is not formed, but the refrigerant liquid LC is pushed out by the refrigerant liquid LC flowing from the high-density microprojection area 142 ′. Accordingly, the refrigerant liquid LC flows from the peripheral portion to the outlet 12 '. Further, the flow path length of the refrigerant liquid LC on the high-density microprojection area 142 ′ is shorter than the flow path length of the refrigerant liquid LC on the low-density microprojection area 141 ′. As a result, the flow velocity on the sheet 14 'is uniform as a whole. In order to sufficiently exhibit the above-mentioned affinity and to prevent the microprojection structures 141′a and 142′a from being damaged, the flow rate of the refrigerant liquid LC supplied from the inlet 11 ′ is reduced, for example, 50 mL / min or less.
図５のシート１４’の低密度微小突起領域１４１’、高密度微小突起領域１４２’の形成も、図１の液冷ジャケット１の低密度微小突起領域１４１及び高密度微小突起領域１４２、１４３と同様に、図３のフローチャートに基づいて行われる。この場合には、図３のステップ３０１のマスクの開口パターンは細長形の低密度微小突起領域１４１’に対応するパターンであり、ステップ３０４のマスクの開口パターンは円形の高密度微小突起領域１４２’に対応する。 The formation of the low-density microprojection region 141 ′ and the high-density microprojection region 142 ′ of the sheet 14 ′ in FIG. 5 is similar to the low-density microprojection region 141 and the high-density microprojection regions 142, 143 of the liquid cooling jacket 1 in FIG. Similarly, it is performed based on the flowchart of FIG. In this case, the opening pattern of the mask in step 301 in FIG. 3 is a pattern corresponding to the elongated low-density microprojection region 141 ′, and the mask opening pattern in step 304 is a circular high-density microprojection region 142 ′. Corresponding to
図７は本発明に係る液冷ジャケットの第３の実施の形態を示す上面図である。図７においては、図１の発熱源２、ラジエータ３Ａ、冷却ファン３Ｂ、リザーブタンク４、マイクロポンプ５及び配管６は同一であるので、図示省略してあり、液冷ジャケットのシート１４”のみを図示してある。 FIG. 7 is a top view showing a third embodiment of the liquid cooling jacket according to the present invention. In FIG. 7, the heat source 2, the radiator 3A, the cooling fan 3B, the reserve tank 4, the micro pump 5 and the pipe 6 in FIG. 1 are the same, and are not shown, and only the liquid cooling jacket sheet 14 ″ is shown. It is shown.
図７においては、図１の場合と同様に、流入口１１”は中空部１３”の第１の角部に位置し、他方、流出口１２”は中空部１３”の第２の角部に位置する。第１、第２の角部は中空部１３”の対角方向に位置している。 In FIG. 7, as in FIG. 1, the inlet 11 ″ is located at the first corner of the hollow portion 13 ″, while the outlet 12 ″ is at the second corner of the hollow portion 13 ″. To position. The first and second corners are located diagonally of the hollow part 13 ″.
シート１４”の内面には、２つの微小突起領域つまり低密度微小突起領域１４１”及び高密度微小突起領域１４２”が流入口１１”から流出口１２”に向って設けられている。 On the inner surface of the sheet 14 ″, two microprojection regions, that is, a low density microprojection region 141 ″ and a high density microprojection region 142 ″ are provided from the inlet 11 ″ to the outlet 12 ″.
低密度微小突起領域１４１”は流入口１１”と流出口１２”との間のシート１４”の内面の中央部の対角方向及びその直角方向の両方に拡がりを有し、高密度微小突起領域１４２”は低密度微小突起領域１４１”を囲むように設けられている。このとき、低密度微小突起領域１４１”と高密度微小突起領域１４２”との間の冷媒液ＬＣの流れを確保するために、低密度微小突起領域１４１”と高密度微小突起領域１４２”とは接触している。 The low-density microprojection region 141 ″ has an extension in both the diagonal direction and the perpendicular direction of the central portion of the inner surface of the sheet 14 ″ between the inlet port 11 ″ and the outlet port 12 ″. 142 ″ is provided so as to surround the low-density microprojection region 141 ″. At this time, in order to ensure the flow of the refrigerant liquid LC between the low density microprojection region 141 ″ and the high density microprojection region 142 ″, the low density microprojection region 141 ″ and the high density microprojection region 142 ″ are In contact.
図８は図７のシート１４”の拡大断面図であって、（Ａ）はＡ−Ａ線拡大断面図、（Ｂ）はＢ−Ｂ線拡大断面図である。 8 is an enlarged cross-sectional view of the sheet 14 ″ of FIG. 7, wherein (A) is an AA line enlarged cross-sectional view and (B) is a BB line enlarged cross-sectional view.
図８に示すように、低密度微小突起領域１４１”及び高密度微小突起領域１４２”には、複数の微小突起（凹凸）構造１４１”ａ、１４２”ａが設けられている。低密度微小突起構造１４１”ａのピッチＰ１”は比較的大きく、たとえば、約5〜10μmであり、従って、低密度微小突起構造１４１”ａの密度は比較的小さくなっている。この結果、低密度微小突起構造１４１”ａの冷媒液ＬＣに対する親和力は比較的小さい。他方、高密度微小突起構造１４２”ａのピッチＰ２”は比較的小さく、たとえば、約0.5〜1μmであり、従って、高密度微小突起構造１４２”ａの密度は比較的大きくなっている。この結果、高密度微小突起構造１４２”ａの冷媒液ＬＣに対する親和力は比較的大きい。従って、流入口１１”から供給された冷媒液ＬＣは低密度微小突起領域１４１”の比較的小さい親和力に従って流出口１２”へ比較的ゆっくり流れる。他方、流入口１１”から供給された冷媒液ＬＣは高密度微小突起領域１４２”の比較的大きい親和力に従って流出口１２”へ比較的早く流れる。この場合、微小突起領域が形成されていないシート１４”の周囲部では、冷媒液ＬＣは、本来、流れにくいが、高密度微小突起領域１４２”から流れ込む冷媒液ＬＣによって冷媒液ＬＣが押し出される。従って、この冷媒液ＬＣが周辺部から流出口１２”へ流れる。また、高密度微小突起領域１４２”上の冷媒液ＬＣの流路長は低密度微小突起領域１４１”上の冷媒液ＬＣの流路長より短い。この結果、シート１４”上の流速は全体として均一となる。尚、上述の親和力を十分発揮させるために、かつ、微小突起構造１４１”ａ、１４２”ａの破損を防止するために、流入口１１”から供給される冷媒液ＬＣの流速を低く、たとえば、50mL/min以下とする。 As shown in FIG. 8, the low-density microprojection region 141 ″ and the high-density microprojection region 142 ″ are provided with a plurality of microprojection (unevenness) structures 141 ″ a and 142 ″ a. The pitch P1 ″ of the low-density microprojection structure 141 ″ a is relatively large, for example, about 5 to 10 μm. Therefore, the density of the low-density microprojection structure 141 ″ a is relatively small. The affinity for the refrigerant liquid LC of the density microprojection structure 141 ″ a is relatively small. On the other hand, the pitch P2 ″ of the high-density microprojection structure 142 ″ a is relatively small, for example, about 0.5 to 1 μm. Therefore, the density of the high-density microprojection structure 142 ″ a is relatively large. The affinity for the refrigerant liquid LC of the high-density microprojection structure 142 "a is relatively large. Accordingly, the refrigerant liquid LC supplied from the inlet 11 "flows relatively slowly to the outlet 12" according to the relatively small affinity of the low density microprojection region 141 ". On the other hand, the refrigerant liquid LC supplied from the inlet 11". Flows relatively quickly to the outlet 12 "according to the relatively high affinity of the dense microprojection region 142". In this case, the refrigerant liquid LC is inherently difficult to flow around the sheet 14 ″ where the microprojection area is not formed, but the refrigerant liquid LC is pushed out by the refrigerant liquid LC flowing from the high-density microprojection area 142 ″. Accordingly, the refrigerant liquid LC flows from the peripheral portion to the outlet 12 ″. The flow path length of the refrigerant liquid LC on the high density microprojection region 142 ″ is the flow of the refrigerant liquid LC on the low density microprojection region 141 ″. It is shorter than the path length. As a result, the flow velocity on the sheet 14 "is uniform as a whole. In order to sufficiently exhibit the above-described affinity and to prevent the microprojection structures 141 ″ a, 142 ″ a from being damaged, the flow rate of the refrigerant liquid LC supplied from the inlet 11 ″ is lowered, for example, 50 mL / min or less.
図７のシート１４”の低密度微小突起領域１４１”、高密度微小突起領域１４２”の形成も、図１の液冷ジャケット１の低密度微小突起領域１４１及び高密度微小突起領域１４２、１４３と同様に、図３のフローチャートに基づいて行われる。この場合には、図３のステップ３０１のマスクの開口パターンは細長形の低密度微小突起領域１４１”に対応するパターンであり、ステップ３０４のマスクの開口パターンは円形の高密度微小突起領域１４２”に対応する。 The formation of the low-density microprojection area 141 ″ and the high-density microprojection area 142 ″ of the sheet 14 ″ in FIG. 7 is the same as the low-density microprojection area 141 and the high-density microprojection areas 142, 143 of the liquid cooling jacket 1 in FIG. 3 is performed based on the flowchart of Fig. 3. In this case, the opening pattern of the mask in step 301 in Fig. 3 is a pattern corresponding to the elongated low-density microprojection region 141 ", and the mask in step 304 is used. The opening pattern corresponds to a circular high-density microprojection region 142 ″.
図９は本発明に係る第１の実施の形態の変更例を示し、図９の（Ａ）、（Ｂ）は図２の（Ａ）、（Ｂ）に対応する。図９においては、中空部１３の上面、つまり、加熱源２を搭載すべき搭載面の反対面もシート１４と同一のシート１４Ｓによって規定する。このシート１４Ｓはシート１４の低密度微小突起領域１４１及び高密度微小突起領域１４２、１４３に対向した同一の低密度微小突起領域及び高密度微小突起領域を有する。シート１４とシート１４Ｓとは熱伝導性部材１３ｃ等によって結合されている。 FIG. 9 shows a modification of the first embodiment according to the present invention, and FIGS. 9A and 9B correspond to FIGS. 2A and 2B. In FIG. 9, the upper surface of the hollow portion 13, that is, the opposite surface of the mounting surface on which the heating source 2 is to be mounted is defined by the same sheet 14 </ b> S as the sheet 14. The sheet 14S has the same low density microprojection area and high density microprojection area facing the low density microprojection area 141 and the high density microprojection areas 142 and 143 of the sheet 14. The sheet 14 and the sheet 14S are coupled by a heat conductive member 13c or the like.
図１０は本発明に係る第２の実施の形態の変更例を示し、図１０の（Ａ）、（Ｂ）は図６の（Ａ）、（Ｂ）に対応する。図１０においては、中空部１３’の上面、つまり、加熱源２を搭載すべき搭載面の反対面もシート１４’と同一のシート１４’Ｓによって規定する。このシート１４’Ｓはシート１４’の低密度微小突起領域１４１’及び高密度微小突起領域１４２’に対向した同一の低密度微小突起領域及び高密度微小突起領域を有する。シート１４’とシート１４’Ｓとは熱伝導性部材１３ｃ等によって結合されている。 FIG. 10 shows a modification of the second embodiment according to the present invention, and FIGS. 10 (A) and 10 (B) correspond to FIGS. 6 (A) and 6 (B). In FIG. 10, the upper surface of the hollow portion 13 ', that is, the opposite surface of the mounting surface on which the heating source 2 is to be mounted is also defined by the sheet 14'S that is the same as the sheet 14'. The sheet 14'S has the same low density microprojection area and high density microprojection area facing the low density microprojection area 141 'and the high density microprojection area 142' of the sheet 14 '. The sheet 14 'and the sheet 14'S are coupled by a heat conductive member 13c or the like.
図１１は本発明に係る第３の実施の形態の変更例を示し、図１１の（Ａ）、（Ｂ）は図８の（Ａ）、（Ｂ）に対応する。図１１においては、中空部１３”の上面、つまり、加熱源２を搭載すべき搭載面の反対面もシート１４”と同一のシート１４”Ｓによって規定する。このシート１４”Ｓはシート１４”の低密度微小突起領域１４１”及び高密度微小突起領域１４２”に対向した同一の低密度微小突起領域及び高密度微小突起領域を有する。シート１４”とシート１４”Ｓとは熱伝導性部材１３ｃ等によって結合されている。 FIG. 11 shows a modification of the third embodiment according to the present invention, and FIGS. 11A and 11B correspond to FIGS. 8A and 8B. In FIG. 11, the upper surface of the hollow portion 13 ″, that is, the opposite surface of the mounting surface on which the heating source 2 is to be mounted is defined by the same sheet 14 ″ S as the sheet 14 ″. The low density microprojection area 141 ″ and the high density microprojection area 142 ″ of the same low density microprojection area and the high density microprojection area. The sheet 14 ″ and the sheet 14 ″ S are thermally conductive members 13c. Combined by etc.
本発明は上述の発明の実施の形態と自明な範囲での種々の変更にも適用できる。 The present invention can also be applied to various modifications within the obvious scope of the above-described embodiments.
１：液冷ジャケット
２：発熱源
２１：LED素子
２２：ベース基板
３Ａ：ラジエータ
３Ｂ：冷却ファン
４：リザーブタンク
５：マイクロポンプ
６：配管
１１、１１’、１１”：流入口
１２、１２’、１２”：流出口
１３、１３’、１３”：中空部
１４、１４’、１４”、１４Ｓ、１４’Ｓ、１４”Ｓ：シート
１４１、１４１’、１４１”、１４１Ｓ、１４１’Ｓ、１４１”Ｓ：低密度微小突起領域
１４２、１４３、１４２’、１４２”、１４２Ｓ、１４３Ｓ、１４２’Ｓ、１４２”Ｓ：高密度微小突起領域
１４１ａ、１４１’ａ、１４１”ａ：低密度微小突起構造
１４２ａ、１４３ａ、１４２’ａ、１４２”ａ：高密度微小突起構造
ＬＣ：冷媒液
1: Liquid cooling jacket 2: Heat generation source 21: LED element 22: Base substrate 3A: Radiator 3B: Cooling fan 4: Reserve tank 5: Micro pump 6: Pipes 11, 11 ′, 11 ″: Inflow ports 12, 12 ′ 12 ": Outlet 13, 13 ', 13": Hollow portions 14, 14', 14 ", 14S, 14'S, 14" S: Sheets 141, 141 ', 141 ", 141S, 141'S, 141" S: Low-density microprojection regions 142, 143, 142 ′, 142 ″, 142S, 143S, 142 ′S, 142 ″ S: High-density microprojection regions 141a, 141′a, 141 ″ a: Low-density microprojection structure 142a , 143a, 142'a, 142 "a: high-density microprojection structure LC: refrigerant liquid
Claims (8)
前記中空部を規定しかつ発熱源を搭載すべき搭載面を規定する第１のシートを具備し、
前記第１のシートの内面に前記冷媒液に対する親和力の異なる複数の突起領域を設けることにより前記冷媒液の流速を制御するようにしたことを特徴とする液冷ジャケット。 In the liquid cooling jacket that forms a hollow portion between the inlet into which the refrigerant liquid flows and the outlet from which the refrigerant liquid flows out,
Comprising a first sheet defining the hollow portion and defining a mounting surface on which a heat source is to be mounted;
A liquid cooling jacket, wherein a flow rate of the refrigerant liquid is controlled by providing a plurality of projecting regions having different affinity for the refrigerant liquid on an inner surface of the first sheet.
前記流入口と前記流出口との間の前記第１のシートの内面の中央部の前記対角方向に拡がりを有する第１の突起領域を設けると共に、前記第１のシートの内面に前記第１の突起領域を挟むように第２、第３の突起領域を設け、
前記第１の突起領域の突起の密度を前記第２、第３の突起領域の突起の密度より小さくした請求項２に記載の液冷ジャケット。 The inflow port is located at a first corner of the hollow portion, and the outflow port is located at a second corner of the hollow portion in a diagonal direction of the first corner;
A first protrusion region having a diagonally widened central portion of the inner surface of the first sheet between the inflow port and the outflow port is provided, and the first sheet is provided on the inner surface of the first sheet. The second and third protrusion regions are provided so as to sandwich the protrusion region of
The liquid cooling jacket according to claim 2, wherein the density of the protrusions in the first protrusion area is smaller than the density of the protrusions in the second and third protrusion areas.
前記流入口と前記流出口との間の前記第１のシートの内面の中央部の前記対角方向の垂直方向に拡がりを有する第１の突起領域を設けると共に、前記第１のシートの内面に前記第１の突起領域を囲むように第２の突起領域を設け、
前記第１の突起領域の突起の密度を前記第２の突起領域の突起の密度より小さくした請求項２に記載の液冷ジャケット。 The inflow port is located at a first corner of the hollow portion, and the outflow port is located at a second corner of the hollow portion in a diagonal direction of the first corner;
A first projection region having a spread in the diagonally perpendicular direction at a central portion of the inner surface of the first sheet between the inflow port and the outflow port is provided, and on the inner surface of the first sheet Providing a second protrusion region so as to surround the first protrusion region;
The liquid cooling jacket according to claim 2, wherein the density of the protrusions in the first protrusion area is smaller than the density of the protrusions in the second protrusion area.
前記流入口と前記流出口との間の前記第１のシートの内面の中央部の前記対角方向及びその垂直方向の両方に拡がりを有する第１の突起領域を設けると共に、前記第１のシートの内面に前記第１の突起領域を囲むように第２の突起領域を設け、
前記第１の突起領域の突起の密度を前記第２の突起領域の突起の密度より小さくした請求項２に記載の液冷ジャケット。 The inflow port is located at a first corner of the hollow portion, and the outflow port is located at a second corner of the hollow portion in a diagonal direction of the first corner;
The first sheet is provided with a first projecting region having a spread in both the diagonal direction and the vertical direction of the central portion of the inner surface of the first sheet between the inlet and the outlet. A second projection region is provided on the inner surface of the first projection region so as to surround the first projection region,
The liquid cooling jacket according to claim 2, wherein the density of the protrusions in the first protrusion area is smaller than the density of the protrusions in the second protrusion area.
該第２のシートの内面に前記第１のシートの内面の前記各突起領域に対向して前記各突起領域と同一の複数の突起領域を設けた請求項１〜７のいずれかに記載の液冷ジャケット。
And further comprising a second sheet defining the hollow portion and defining the opposite surface of the mounting surface,
The liquid according to any one of claims 1 to 7, wherein a plurality of protrusion areas identical to the protrusion areas are provided on the inner surface of the second sheet so as to face the protrusion areas on the inner surface of the first sheet. Cold jacket.
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| JP2012198284A JP2014053532A (en) | 2012-09-10 | 2012-09-10 | Liquid-cooled jacket |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012198284A JP2014053532A (en) | 2012-09-10 | 2012-09-10 | Liquid-cooled jacket |
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2012
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