JP2014037052A - Workpiece polishing method and polishing liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a rolling element manufacturing method capable of suppressing uneven coloring and glossiness on a surface, sufficiently removing damage generated during preprocessing of workpiece manufacturing, and efficiently obtaining a member of low surface roughness, a workpiece polishing method, polishing liquid, and a polishing device.SOLUTION: For workpiece polishing, abrasive grains including particles made of photocatalysts and having particle sizes of 140 to 550 nm, a fluorescent material, and a substance transmitting light to excite the photocatalyst and the fluorescent material, and solvents are used. A rolling element workpiece polishing device 1 includes a disk-like workpiece support part 20 for swingably supporting a workpiece W, and a disk-like polishing pad 30 disposed to be slid into contact with the surface of the workpiece W supported by the workpiece support part 20, and configured to polish the surface of the workpiece W via polishing liquid while being relatively rotated around a center axis with respect to the workpiece support part 20 to rotate the workpiece W.

Description

  The present invention relates to a rolling element manufacturing method, a workpiece polishing method, a polishing liquid, and a polishing apparatus. More particularly, the present invention relates to a rolling element manufacturing method, a workpiece polishing method, a polishing liquid, and a polishing apparatus useful for manufacturing members used in industrial machines, automobiles, airplanes, ships, electrical and electronic products, and the like.

  In industrial machines, automobiles, airplanes, ships, electrical and electronic products, etc., metal members that make rolling contact and / or sliding contact with other members such as rolling elements are used. In these industrial machines, automobiles, etc., there is a demand for improvement in life and reduction in noise and heat generation during operation. Therefore, it has been proposed to reduce the surface roughness of the metal member by polishing using a barrel polishing method, a superfinish polishing method, or the like. However, the barrel polishing method has the disadvantages that abrasive mark marks are likely to remain on the surface of the metal member and that it is difficult to ensure a sufficient surface roughness. In addition, the superfinish polishing method has a drawback that an apparatus used for polishing is expensive and it is difficult to ensure a sufficient surface roughness.

  On the other hand, as a method for polishing a metal member, for example, a metal member is irradiated under ultraviolet light using a polishing liquid containing catilon excited by ultraviolet light and titanium oxide or aluminum oxide excited by ultraviolet light and water. A polishing method has been proposed (see, for example, Non-Patent Document 1). Non-Patent Document 1 discloses a light source (not shown) for irradiating the polishing liquid with ultraviolet light, a polishing tank 102 having a polishing pad 121, a sun gear 131 and two planetary gears provided in the polishing tank 102. There is disclosed a polishing apparatus 101 including a planetary gear mechanism 103 having 132, a motor for rotating the planetary gear mechanism 103, and a speed reducer 105 for adjusting the rotation speed of the planetary gear mechanism 103 (see FIG. 31). ).

Yoshihiko Senjo and Takeshi Tanaka, “About the polishing phenomenon of copper by a fluorescent material excited by ultraviolet rays and a photocatalyst—Study on ultraviolet excitation processing”, Journal of Abrasive Technology, No. 51, Volume 4, pp. 232-237

However, when the polishing liquid described in Non-Patent Document 1 is used for polishing a hard work such as a rolling element work, the work surface is oxidized and blackened, or the work surface is glossy. Unevenness may occur. In this case, the workpiece may not be polished to a desired surface roughness, or scratches generated during pre-processing during the production of the workpiece may not be sufficiently removed.
Further, in the polishing apparatus described in Non-Patent Document 1, it is difficult to efficiently polish the curved surface portion even if the planar portion of the workpiece can be polished, and polishing to a desired surface roughness, It is difficult to sufficiently remove the scratches generated during the pre-processing at the time of workpiece manufacture.

  The present invention has been made in view of such circumstances, suppresses surface coloration and uneven gloss on the surface, and sufficiently removes scratches generated during pre-processing during the manufacture of workpieces. An object of the present invention is to provide a rolling element manufacturing method, a workpiece polishing method, a polishing liquid, and a polishing apparatus, which can efficiently obtain a member having a low surface roughness.

That is, the gist of the present invention is as follows.
(1) A method of manufacturing a rolling element including a polishing process for polishing a work for a rolling element,
In the polishing process, the workpiece is brought into contact with a polishing liquid containing particles made of a photocatalyst, a fluorescent material, abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively, and a solvent. It is a step of polishing the workpiece while irradiating the polishing liquid with the light,
A method for producing a rolling element, wherein the photocatalyst has a particle size of 140 to 550 nm,
(2) The method according to (1), wherein the abrasive grains are particles having a larger particle diameter than particles made of a photocatalyst.
(3) The method according to (1) or (2), wherein the abrasive has a particle size of 1000 to 30000 nm,
(4) The fluorescent material has the general formula (I):

Wherein R ¹ and R ² are each independently an alkyl group having 1 to 4 carbon atoms, R ³ and R ⁴ are each independently an alkyl group having 1 to 4 carbon atoms, and X is a halogen atom. )
The method according to any one of (1) to (3), which is a compound represented by:
(5) A method of polishing a workpiece,
The workpiece is brought into contact with a polishing liquid containing particles of a photocatalyst having a particle diameter of 140 to 550 nm, a fluorescent material, abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively, and a solvent. A method for polishing a workpiece, wherein the workpiece is polished while irradiating a polishing liquid with the light,
(6) The method according to (5), wherein the abrasive grains are particles having a larger particle diameter than particles made of a photocatalyst.
(7) A polishing liquid for polishing a workpiece,
A polishing liquid comprising: particles having a particle diameter of 140 to 550 nm made of a photocatalyst; a fluorescent material; abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material; and a solvent,
(8) The polishing liquid according to (7), wherein the abrasive grains are particles having a larger particle diameter than particles made of a photocatalyst.
(9) A polishing apparatus for polishing the surface of a rolling element workpiece using a polishing liquid,
A disc-shaped workpiece support for supporting the workpiece in a swingable manner;
The surface of the work supported by the work support is arranged so as to be slidable, and the work is rotated by rotating relative to the work support around the central axis while passing the polishing liquid. A disc-shaped polishing pad for polishing the surface of the workpiece,
A polishing liquid supply section for supplying the polishing liquid between the work support section and the polishing pad;
A polishing apparatus comprising:
(10) The polishing liquid is a polishing liquid comprising particles having a particle diameter of 140 to 550 nm made of a photocatalyst, a fluorescent material, abrasive grains that transmit light that excites the photocatalyst and the fluorescent material, and a solvent,
The polishing apparatus according to (9), further comprising a light source that emits light that excites the photocatalyst and the fluorescent material contained in the polishing liquid,
(11) The polishing apparatus according to (10), wherein at least an inner wall surface of the container reflects light that excites a photocatalyst and a fluorescent material.
(12) The polishing apparatus according to any one of (9) to (11), wherein the work support portion includes a work support hole that can accommodate the work in a swingable manner.
(13) In the workpiece support hole, the polishing pad is further provided on a side wall portion that comes into contact with the workpiece when the polishing pad is rotated relative to the workpiece support portion around a central axis. The polishing apparatus according to
(14) The polishing apparatus according to any one of (9) to (13), wherein the polishing liquid supply unit is arranged so as to supply the polishing liquid to a rotation center part of the polishing pad, and (15) The polishing pad main body has a polishing pad main body made of a plurality of raised fibers on the surface of the polishing pad on the side in contact with the workpiece, and the polishing pad main body is provided with grooves having a radial pattern ( The polishing apparatus according to any one of 9) to (14).

  According to the present invention, according to the rolling element manufacturing method, the workpiece polishing method, the polishing liquid, and the polishing apparatus of the present invention, the surface coloration and the gloss unevenness on the surface are suppressed, and the pre-processing in manufacturing the workpiece is performed. It is possible to sufficiently remove the scratches generated at the time, and it is possible to efficiently obtain a member having a low surface roughness.

It is a schematic explanatory drawing which shows the structure of the grinding | polishing apparatus which concerns on one Embodiment of this invention. (A) is plane explanatory drawing which shows the structure of the grinding | polishing apparatus which concerns on one Embodiment of this invention, (B) is sectional explanatory drawing in the AA line. It is a schematic explanatory drawing which shows the structure of the workpiece | work support part of the grinding | polishing apparatus which concerns on one Embodiment of this invention. (A) is plane explanatory drawing which shows the shape of the workpiece support hole of the workpiece | work support part of the grinding | polishing apparatus which concerns on one Embodiment of this invention, (B) is the workpiece | work of the workpiece | work support part of the grinding | polishing apparatus which concerns on one Embodiment of this invention. It is side surface explanatory drawing which shows the shape of a support hole. (A) is schematic explanatory drawing which shows the structure of the polishing pad of the polishing apparatus which concerns on one Embodiment of this invention, (B) is sectional explanatory drawing in the BB line of (A), (C) is one of (B). FIG. It is a schematic explanatory drawing which shows an example of the grinding | polishing part of the grinding | polishing apparatus which concerns on one Embodiment of this invention. It is a schematic explanatory drawing which shows an example of the grinding | polishing part of the grinding | polishing apparatus which concerns on one Embodiment of this invention. It is process drawing which shows an example of the procedure of the manufacturing method of the rolling element which concerns on one Embodiment of this invention. (A) Drawing substitute photograph which shows the result of observing the workpiece for copper cylindrical rollers before grinding | polishing in Example 2, (B) shows the result of observing the copper cylindrical rollers after grinding | polishing in Example 2. It is a drawing substitute photograph. (A) Drawing substitute photograph which shows the result of observing the workpiece | work for cylindrical rollers made from general structural steel SS41 before grinding | polishing in Example 7, (B) is general structural steel SS41 after grinding | polishing in Example 7. It is a drawing substitute photograph which shows the result of having observed the cylindrical roller. (A) Drawing substitute photograph which shows the result of observing the work for spherical roller made of bearing steel SUJ2 before grinding in Example 9, (B) is the spherical roller made of bearing steel SUJ2 after grinding in Example 9. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for spherical roller work made from bearing steel SUJ2 before grinding in Example 12, and (B) Polishing liquid containing abrasive grains with a particle diameter of 11500 nm in Example 12 (C) is a drawing-substituting photograph showing the result of observing a spherical roller made of bearing steel SUJ2 after being polished using, and in Example 12, after polishing with a polishing liquid containing abrasive grains having a particle diameter of 1000 nm It is drawing substitute photograph which shows the result of having observed the spherical roller made from bearing steel SUJ2. (A) Drawing substitute photograph which shows the result of having observed the work for balls made from hardened steel before grinding in Example 14, (B) Quenching after grinding in case of using an acute angle pad in Example 14 The drawing substitute photograph which shows the result of having observed the steel ball | bowl, (C) is the drawing substitute photograph which shows the result of having observed the hardened steel ball | bowl after grinding | polishing at the time of using a hemispherical pad in Example 14. FIG. . In Example 16, it is a drawing substitute photograph which shows the result of having observed the ball | bowl made from hardened steel after grinding | polishing at the time of using an acute-angle-shaped pad. (A) Drawing substitute photograph which shows the result of having observed the workpiece | work for hardened steel balls before grinding | polishing in the comparative example 3, (B) is hardening steel after grinding | polishing in the case of using the acute angle pad in the comparative example 3. It is a drawing substitute photograph which shows the result of having observed the ball made from. (A) Drawing substitute photograph which shows the result of having observed the work for balls made from hardened steel before grinding in comparative example 6, (B) is hardened steel after grinding in case of using acute angle pad in comparative example 6 It is a drawing substitute photograph which shows the result of having observed the ball made from. (A) Drawing substitute photograph which shows the result of observing the work for spherical roller made of bearing steel SUJ2 before grinding in Comparative Example 8, (B) is the spherical roller made of bearing steel SUJ2 after grinding in Comparative Example 8 It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the workpiece for cylindrical rollers made from bearing steel SUJ2 before grinding in Example 17, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in Example 17. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made from bearing steel SUJ2 before grinding in Example 18, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in Example 18. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of observing the workpiece | work for cylindrical rollers made from bearing steel SUJ2 before grinding | polishing in Example 19, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding | polishing in Example 19. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made from bearing steel SUJ2 before grinding in Example 20, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in Example 20. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made from bearing steel SUJ2 before grinding in comparative example 9, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in comparative example 9. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made of bearing steel SUJ2 before grinding in comparative example 10, (B) is the cylindrical roller made of bearing steel SUJ2 after grinding in comparative example 10 It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the workpiece for cylindrical rollers made from bearing steel SUJ2 before grinding in Example 21, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in Example 21 It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the workpiece for cylindrical rollers made from bearing steel SUJ2 before grinding in Example 22, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in Example 22. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made from bearing steel SUJ2 before grinding in Example 23, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding in Example 23 It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of observing the workpiece | work for cylindrical rollers made from bearing steel SUJ2 before grinding | polishing in Example 24, (B) is the cylindrical roller made from bearing steel SUJ2 after grinding | polishing in Example 24. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made of bearing steel SUJ2 before grinding in comparative example 11, (B) is the cylindrical roller made of bearing steel SUJ2 after grinding in comparative example 11. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of having observed the work for cylindrical rollers made of bearing steel SUJ2 before grinding in comparative example 12, (B) is the cylindrical roller made of bearing steel SUJ2 after grinding in comparative example 12. It is a drawing substitute photograph which shows the result of having observed. (A) Drawing substitute photograph which shows the result of observing the workpiece for cylindrical rollers made of bearing steel SUJ2 before grinding in Comparative Example 13, (B) is the cylindrical roller made of bearing steel SUJ2 after grinding in Comparative Example 13 It is a drawing substitute photograph which shows the result of having observed. It is a schematic explanatory drawing which shows the structure of the conventional grinding | polishing apparatus.

1. A rolling element manufacturing method of the present invention is a rolling element manufacturing method including a polishing process for polishing a rolling element work, wherein the polishing process includes particles made of a photocatalyst and fluorescence. The workpiece is brought into contact with a polishing solution containing abrasive grains made of a material that transmits materials and light that excites the photocatalyst and the fluorescent material (hereinafter also referred to as “excitation light”) and a solvent, and the polishing solution In this step, the workpiece is polished while being irradiated with the light (excitation light), and the particle diameter of the photocatalyst is 140 to 550 nm.

  In the rolling element manufacturing method of the present invention, when polishing the rolling element workpiece, particles that are made of a photocatalyst having a particle diameter of 140 to 550 nm, a fluorescent material, and a substance that transmits light that excites the photocatalyst and the fluorescent material respectively. One feature is that the abrasive grains and the solvent are used together under irradiation with excitation light. Therefore, according to the rolling element manufacturing method of the present invention, it is possible to suppress the coloration of the surface of the workpiece and the unevenness of the gloss on the surface of the workpiece, and sufficiently remove the scratches generated during the pre-processing during the manufacturing of the workpiece. Therefore, a rolling element having a low surface roughness can be produced in a short time with high efficiency and at low cost.

  Since the rolling element produced by the method for producing a rolling element of the present invention has a low surface roughness, it is expected to reduce noise and heat generation during use. Further, when such a rolling element is used, for example, as a rolling element of a bearing, it is expected that the life of the bearing is extended.

  Conventionally, when polishing work is performed on a metal workpiece, when a polishing liquid composed of particles made of a photocatalyst, a fluorescent material, and a solvent is used as a polishing liquid, the particles made of a photocatalyst exhibit sufficient photocatalytic action. From the viewpoint of efficiently performing chemical polishing, it has been considered that particles having a small particle size and a large surface area are desirable. However, the present inventors tried to polish a metal work having a high hardness such as a rolling element work using such a polishing liquid. As a result, it was found that it was difficult to remove the scratches generated during the pre-processing during the production of the workpiece, and it was difficult to polish to a sufficient surface roughness. Therefore, the present inventors have conducted extensive research, and in addition to particles made of a photocatalyst, a fluorescent material, and a solvent, in addition to using abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, When particles having a particle diameter of 140 to 550 nm are used as particles made of a photocatalyst, a metal workpiece having a high hardness such as a rolling element workpiece is not colored and gloss unevenness on the workpiece surface is suppressed. It is possible to sufficiently remove the scratches generated during the pre-processing in the production of the workpiece, and to a low surface roughness that cannot be achieved by conventional super-finish polishing and barrel polishing in a short time. Was found to be efficiently polished. The present invention is based on such findings found by the present inventors.

  As shown in FIG. 8, the method for manufacturing a rolling element of the present invention includes, for example, a pre-processing step S1-1, a surface hardening processing step S1-2, and a polishing processing step S1-3. Examples of the rolling elements include cylindrical rollers, tapered rollers, balls, and spherical rollers, but the present invention is not limited to such examples.

  In the pre-processing step S1-1, the rolling element material is processed into a predetermined shape, and at least a grinding allowance is provided in a portion that forms a rolling sliding surface that makes rolling contact and / or sliding contact with the counterpart member. Obtain a raw material.

  The raw material may be any material suitable for manufacturing rolling elements. Examples of such rolling element materials include single metals; non-ferrous alloys; iron-based alloys such as general structural steel, mechanical structural steel, and bearing steel, but the present invention is limited to such examples. It is not a thing. In the rolling element manufacturing method of the present invention, bearing steel can be suitably used among these rolling element materials. Examples of the bearing steel include high carbon chromium bearing steels such as SUJ2, SUJ3, SUJ4, and SUJ5; Z steel (manufactured by Nippon Seiko Co., Ltd.), EP steel (manufactured by Nippon Seiko Co., Ltd.), SHX steel (Nippon Seiko Co., Ltd.). However, the present invention is not limited to such examples. In the present invention, a hardened steel obtained by subjecting a general structural steel or a mechanical structural steel to a quenching treatment can also be suitably used as the rolling element material.

  Next, in surface hardening treatment process S1-2, surface hardening processing is performed with respect to the shaped material obtained by pre-processing process S1-1, and the workpiece for rolling elements is obtained.

  Examples of the rolling element workpiece include a rolling element workpiece processed into a shape corresponding to the rolling element and having a grinding allowance, but the present invention is not limited to such examples.

  Examples of the surface hardening treatment include carburizing treatment, carbonitriding treatment, quenching treatment, induction hardening treatment, heat treatment such as tempering treatment, peening processing such as shot peening, etc. It is not limited. These surface hardening treatments can be performed by appropriately combining two or more types according to the type of rolling element to be manufactured. The hardness of the rolling element workpiece obtained in this step (Rockwell hardness) varies depending on the type of surface hardening treatment adopted in this step, the type of rolling element material, etc., but usually as a rolling element raw material. When high carbon chromium bearing steel is used, it is preferably 60 to 67, more preferably 61 to 65.

  Thereafter, in the polishing step S1-3, the rolling element workpiece is brought into contact with the polishing liquid and the polishing process is performed on a portion of the rolling element work that forms the rolling sliding surface while irradiating the polishing liquid with the light. Is applied to form a rolling sliding surface having a desired surface roughness to obtain a rolling element. For polishing the rolling element workpiece, for example, when the rolling element workpiece is a rolling element workpiece, a polishing apparatus described later can be used. In addition, the polishing liquid used for the manufacturing method of the rolling element of this invention is mentioned later.

  Since the polishing time of the rolling element workpiece varies depending on the size and type of the rolling element workpiece, it is preferable that the polishing time is appropriately set according to the size and type of the rolling element workpiece.

  Since the type of light irradiated to the polishing liquid varies depending on the type of the photocatalyst and fluorescent material contained in the polishing liquid, it can be appropriately selected according to the type of photocatalyst and fluorescent material contained in the polishing liquid. preferable. The light irradiation time is the same as the polishing time.

  From the viewpoint of obtaining a rolling element having a lower surface roughness, the temperature of the polishing liquid when polishing the rolling element workpiece is preferably 15 ° C. or higher, more preferably 20 ° C. or higher, and coloration due to excessive oxidation. From the viewpoint of preventing the generation of etch pits, it is preferably 50 ° C. or lower, more preferably 35 ° C. or lower.

  In the present invention, processes other than the polishing process S1-3 are not limited to the pre-process S1-1 and the surface hardening process S1-2, and other processes are performed as necessary. Can do. Moreover, in this invention, it is not necessary to perform surface hardening treatment process S1-2.

[Work polishing method]
The method for polishing a workpiece according to the present invention is a method for polishing a workpiece, comprising particles having a particle diameter of 140 to 550 nm made of a photocatalyst, a fluorescent material, and a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively. The workpiece is brought into contact with a polishing liquid containing abrasive grains and a solvent, and the workpiece is polished while irradiating the polishing liquid with the light.

  In the workpiece polishing method of the present invention, when polishing the surface of the workpiece, an abrasive comprising a photocatalyst particle having a particle diameter of 140 to 550 nm, a fluorescent material, and a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively. One feature is that a polishing liquid containing grains and a solvent is used. Therefore, according to the workpiece polishing method of the present invention, as a workpiece, for example, a workpiece made of bearing steel, a workpiece subjected to surface hardening treatment, or the like, even when a hard workpiece is used, the surface of the workpiece And the unevenness of gloss on the workpiece surface can be suppressed, and scratches generated during the pre-processing during the production of the workpiece can be sufficiently removed. Moreover, according to the workpiece polishing method of the present invention, it is possible to polish to a desired surface roughness with high polishing efficiency in a short time, and a member having a desired surface roughness can be obtained with high production efficiency. The polishing liquid used in the workpiece polishing method of the present invention will be described later.

  Examples of the material constituting the workpiece include metals, but the present invention is not limited to such examples. Examples of metals include single metals such as copper, nickel, and titanium; non-ferrous alloys such as beryllium copper, aluminum alloys, and cemented carbides; general structural steels and mechanical structural steels (for example, high carbon steels for mechanical structures) ), And ferrous alloys such as bearing steel and tool steel, but the present invention is not limited to such examples. According to the workpiece polishing method of the present invention, among these metals, polishing can be suitably performed without coloring a hard metal such as bearing steel.

  The workpiece may be a workpiece subjected to a surface hardening treatment.

  The workpiece hardness (Rockwell hardness) suitable for polishing by the workpiece polishing method of the present invention is preferably 60 to 67, more preferably 61 to 65.

  When the workpiece is polished, the metal workpiece is polished in the same manner as the workpiece except that a polishing solution obtained by removing only abrasive grains from the polishing solution is used instead of using the polishing solution. The conditions similar to the case where the surface of the workpiece is oxidized and colored (for example, the types of the photocatalyst, the fluorescent material and the solvent, the content of the photocatalyst particles and the fluorescent material in the polishing liquid, the pH of the polishing liquid, Polishing time, polishing temperature, etc.).

  The workpiece can be polished on a pad capable of holding a polishing liquid. When the work is a rolling element work, for example, a polishing apparatus described later can be used.

  The workpiece polishing time varies depending on the size and type of the workpiece, the type of metal used in the workpiece, etc., so it is set appropriately according to the size and type of the workpiece, the type of material used in the workpiece, etc. It is preferable to do. When the work is a work made of bearing steel, for example, the work polishing time is usually preferably 15 to 120 minutes, more preferably 30 to 60 minutes.

  Since the type and wavelength of light applied to the polishing liquid vary depending on the type of the photocatalyst and fluorescent material contained in the polishing liquid, they are appropriately selected according to the type of photocatalyst and fluorescent material contained in the polishing liquid. It is preferable. The light irradiation time is the same as the polishing time.

  From the viewpoint of obtaining a member having a lower surface roughness, the temperature of the polishing liquid when polishing the workpiece is preferably 15 ° C. or higher, more preferably 20 ° C. or higher. From the viewpoint of preventing generation, it is preferably 50 ° C. or lower, more preferably 35 ° C. or lower.

[Polishing liquid]
The polishing liquid of the present invention is a polishing liquid for polishing a workpiece, and includes a particle having a particle diameter of 140 to 550 nm made of a photocatalyst, a fluorescent material, and a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively. It is characterized by containing an abrasive grain and a solvent. In the polishing liquid of the present invention, particles having a particle diameter of 140 to 550 nm made of the photocatalyst, a fluorescent material, abrasive grains that transmit light that excites the photocatalyst and the fluorescent material, and a solvent are used in combination. Even when using a metal workpiece with high hardness, high fatigue strength and high wear resistance such as bearing steel, the color of the workpiece surface and uneven gloss on the workpiece surface It is possible to sufficiently remove the scratches generated during the pre-processing during the manufacture of the workpiece, to polish with high polishing efficiency, and to efficiently obtain a member having a low surface roughness.

  The metal used for the workpiece is the same as the metal used for the workpiece in the workpiece polishing method described above. The polishing liquid of the present invention can be suitably used for polishing, for example, a hard work such as a rolling element work.

  The workpiece is the same as the workpiece in the workpiece polishing method described above.

  The photocatalyst may be an ultraviolet light responsive photocatalyst or a visible light responsive photocatalyst. Examples of the photocatalyst include metal oxides such as titanium oxide, zinc oxide, tungsten trioxide, cadmium oxide, indium oxide, silver oxide, manganese dioxide, copper oxide, iron (III) oxide, vanadium pentoxide, and tin dioxide. Metal sulfides such as cadmium sulfide, zinc sulfide, indium sulfide, copper sulfide, molybdenum sulfide, tungsten sulfide and bismuth sulfide; metal chalcogenides such as indium (III) selenide, tungsten selenide and cadmium telluride The present invention is not limited to such examples. The said photocatalyst may be used independently and may mix and use 2 or more types in the range which does not inhibit the objective of this invention. The photocatalyst may further carry a platinum atom, a silver atom or the like, or may further be doped with a nitrogen atom or a sulfur atom.

  Among the photocatalysts, titanium oxide is preferable from the viewpoint that it has excellent chemical stability, can withstand long-term use, and exhibits high adhesion to a workpiece to increase polishing efficiency. Examples of the titanium oxide include titanium dioxide such as anatase-type titanium dioxide, pulukite-type titanium dioxide, and rutile-type titanium dioxide. However, the present invention is not limited to such examples. Among these titanium oxides, titanium dioxide is excellent in terms of chemical stability, can withstand long-term use, and exhibits high adhesion to a workpiece to increase polishing efficiency. Preferably, anatase type titanium oxide is more preferable.

  The particle diameter of the particles composed of the photocatalyst is 140 nm or more, preferably 150 nm or more, more preferably 180 nm or more, and further preferably 200 nm or more, from the viewpoint of suppressing the coloration of the work and increasing the processing accuracy of the work. is there. The upper limit of the particle size of the particles made of the photocatalyst can be appropriately selected within a range having sufficient photocatalytic action, and is usually easy to obtain and handle, and preferably provides sufficient photocatalytic action. It is 550 nm or less, More preferably, it is 500 nm or less, More preferably, it is 450 nm or less. Such a particle size is appropriately set from the above range depending on the type of material used for the workpiece to be polished because the suitable photocatalytic action size varies depending on the type of material used for the workpiece to be polished. Is desirable.

  In the present specification, “particle diameter” refers to the number average particle diameter based on observation with a transmission electron microscope. When the particles are aggregated, the “particle diameter” means the number average particle diameter of the aggregated particles based on observation with a transmission electron microscope.

  The content of the particles composed of a photocatalyst in the polishing liquid is preferably 0.5% by mass or more, more preferably 2.5% by mass or more, and still more preferably from the viewpoint of suppressing the coloration of the work and increasing the polishing efficiency. From the viewpoint of suppressing excessive photocatalysis and increasing the processing accuracy of a metal workpiece to be polished, it is preferably 20% by mass or less, more preferably 15% by mass or less, and still more preferably 5.0% by mass or more. It is 10 mass% or less.

  The fluorescent material is a substance that is excited by being irradiated with light and emits fluorescence. The light that excites the fluorescent material is preferably the same as the light that excites the photocatalyst from the viewpoint of ensuring ease of operation during use.

  Examples of the fluorescent material include general formula (I):

Wherein R ¹ and R ² are each independently an alkyl group having 1 to 4 carbon atoms, R ³ and R ⁴ are each independently an alkyl group having 1 to 4 carbon atoms, and X is a halogen atom. )
The compounds represented by (Cathlon dye, etc.), spirone dyes, basic dyes, acid dyes (brilliant blue) and the like are exemplified, but the present invention is not limited to such examples. The said fluorescent material may be used independently and may be used in mixture of 2 or more types in the range which does not inhibit the objective of this invention. Among such fluorescent materials, a compound represented by the general formula (I) is preferable because of excellent reactivity with a metal used for a workpiece.

In the general formula (I), R ¹ and R ² are each independently an alkyl group having 1 to 4 carbon atoms. Examples of the alkyl group having 1 to 4 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, an n-butyl group, an isobutyl group, and a tert-butyl group. It is not limited to. R ¹ and R ² are preferably methyl groups from the viewpoint of increasing the polishing efficiency. In the general formula (I), R ³ and R ⁴ are each independently an alkyl group having 1 to 4 carbon atoms. Examples of the alkyl group having 1 to 4 carbon atoms are the same as those of the alkyl group having 1 to 4 carbon atoms in R ¹ and R ^2, but the present invention is not limited to such examples. R ³ and R ⁴ are preferably ethyl groups from the viewpoint of increasing the polishing efficiency. In general formula (I), X is a halogen atom. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, but the present invention is not limited only to such illustration. Among the compounds represented by the general formula (I), from the viewpoint of increasing the polishing efficiency, in the general formula (I), R ¹ and R ² are methyl groups, R ³ and R ⁴ are ethyl groups, and A compound wherein X is a chlorine atom [1H-benzimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride] is preferable. .

  The content of the particles composed of the photocatalyst in the polishing liquid is preferably 0.5% by mass or more, more preferably 2.5% by mass or more, and further preferably from the viewpoint of suppressing the coloration of the work and increasing the polishing efficiency. Is 5.0% by mass or more, and is preferably 20% by mass or less, more preferably 15% by mass or less, and still more preferably 10% by mass from the viewpoint of suppressing excessive photocatalysis and increasing the processing accuracy of the workpiece to be polished. % Or less. Moreover, it is preferable that the amount of the fluorescent material per 1 mol of the photocatalyst is 0.02 to 1.0 mol from the viewpoint of increasing the polishing efficiency and increasing the processing accuracy of the metal workpiece to be polished.

The abrasive grains are made of a material that transmits light that excites the photocatalyst and the fluorescent material, respectively. Examples of the substance used for the abrasive grains include a compound that transmits ultraviolet light such as aluminum oxide; a carbon material such as diamond; a compound that transmits visible light such as crystal, rutile, amethyst, and transparent zirconia. The said abrasive grain may be used independently and may mix and use 2 or more types in the range which does not inhibit the objective of this invention. The abrasive grains are preferably selected as appropriate depending on the type of photocatalyst, the type of fluorescent material, and the like because the type of light to be transmitted differs depending on the type of photocatalyst, the type of fluorescent material, and the like. For example, a compound in which the photocatalyst is titanium dioxide, the fluorescent material is general formula (I), R ¹ and R ² are methyl groups, R ³ and R ⁴ are ethyl groups, and X is a chlorine atom In the case of [1H-benzimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride], the abrasive grains are polished. In the liquid, since the polishing efficiency can be further enhanced by efficiently irradiating and exciting ultraviolet light to the titanium dioxide and the fluorescent material existing in the vicinity of the abrasive grains, a compound that transmits ultraviolet light, Preferably, the particles are made of aluminum oxide. Among the aluminum oxides, it is rich in toughness and generally has a shape suitable for obtaining a low surface roughness without having an excessively sharp cutting edge, and is chemically stable. Aluminum is preferred.

  The particle diameter of the abrasive grains is preferably 1000 nm or more, more preferably 2000 nm or more from the viewpoint of suppressing the coloration of the workpiece and increasing the polishing efficiency, and increases the processing accuracy of the surface of the workpiece, thereby increasing the surface roughness. From the viewpoint of reducing the thickness, it is preferably 30000 nm or less, more preferably 11500 nm or less, and still more preferably 4000 nm or less.

  In addition, when the workpiece to be polished using the polishing liquid is a metal workpiece subjected to surface hardening treatment, the polishing is performed with high polishing efficiency, and from the viewpoint of obtaining a metal member with low surface roughness, The abrasive grains are preferably particles having a larger particle diameter than particles made of a photocatalyst. In this case, the ratio (abrasive / photocatalyst) of the particle diameter of the abrasive grains to the particle diameter of the photocatalyst is preferably 20/11 or more, and suppresses the coloration of the work and processes the surface of the work. From the viewpoint of improving the accuracy, it is preferably 1500/7 or less.

  The content of the abrasive grains in the polishing liquid is preferably 0.5% by mass or more, more preferably 2.5% by mass or more, and further preferably from the viewpoint of suppressing the coloration of the workpiece and increasing the polishing efficiency. From the viewpoint of improving the processing accuracy of a metal workpiece to be polished, it is preferably 20% by mass or less, more preferably 15% by mass or less, and further preferably 10% by mass or less. Further, from the viewpoint of increasing the polishing efficiency and increasing the processing accuracy of the metal workpiece to be polished, the amount of abrasive grains per mole of the photocatalyst is preferably 0.07 to 3.7 moles.

  In addition, when the workpiece to be polished using the polishing liquid is a metal workpiece subjected to surface hardening treatment, the polishing is performed with high polishing efficiency, and from the viewpoint of obtaining a metal member with low surface roughness, It is preferable that the content of the abrasive grains in the polishing liquid is larger than the content of the photocatalyst in the polishing liquid.

  The solvent may be any solvent suitable for suspending the photocatalyst, the fluorescent material, and the abrasive grains. Examples of such a solvent include water, but the present invention is not limited to such examples. The said solvent may be used independently and may mix and use 2 or more types.

  When the solvent used for the polishing liquid is water or a solvent containing water, the pH of the polishing liquid is preferably 2 or more, more preferably 3 or more, from the viewpoint of preventing coloration due to excessive oxidation and generation of etch pits. From the viewpoint of obtaining a member having a lower surface roughness, it is preferably 7 or less, more preferably 6 or less.

  In addition, the polishing liquid of this invention may further contain various adjuvants in the range which does not inhibit the objective of this invention.

2. Next, a polishing apparatus for polishing the surface of a metal rolling element work according to an embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic explanatory view showing a configuration of a polishing apparatus according to an embodiment of the present invention. FIG. 2A is a plan explanatory view showing a configuration of a polishing apparatus according to an embodiment of the present invention, and FIG. 2B is a cross-sectional explanatory view taken along line AA. In this embodiment, the case where a cylindrical roller workpiece is polished using the above-described polishing liquid will be described as an example. In FIG. 1 and FIG. 2A, the description of the polishing liquid is omitted from the viewpoint of simplification.

  The polishing apparatus 1 includes a polishing unit 2, a pedestal 3 that houses a drive unit and a control unit for driving and / or controlling the polishing unit 2, and a light source 4 (see FIG. 1).

  The polishing unit 2 includes a container 10, a disk-shaped workpiece support unit 20 that supports the cylindrical roller workpiece W, a disk-shaped polishing pad 30 that polishes the surface of the cylindrical roller workpiece W via a polishing liquid, A polishing liquid supply unit 40 that supplies the above-described polishing liquid is provided between the support unit 20 and the polishing pad 30 (see FIGS. 1, 2A, and 2B).

  The container 10 is a container having a bottomed cylindrical shape. The container 10 is made of a material having a property of reflecting light emitted from the light source 4. The material constituting the container 10 varies depending on the light irradiated from the light source 4, but for example, a material that reflects ultraviolet light such as polypropylene resin; polyethylene resin, polystyrene resin, acrylonitrile-butadiene-styrene resin (ABS resin), Examples thereof include materials that reflect visible light, such as phenol resins, melamine resins, and aluminum. In the present invention, the photocatalyst and the fluorescent material in the polishing liquid can be excited more efficiently by reflecting the light emitted from the light source 4 on the inner wall of the container 10. Therefore, in the present invention, only the inner wall of the container 10 may be made of a material having a property of reflecting light emitted from the light source 4.

  The work support unit 20 is accommodated in the container 10. On the central axis of the workpiece support 20, one end of the polishing liquid supply unit 40 is integrally provided so as to penetrate the workpiece support 20. As a result, the polishing liquid supply unit 40 can supply the polishing liquid to the center of rotation of the polishing pad 30. Further, in the present embodiment, the polishing liquid supply unit 40 is fixed to a not-shown top plate part, and is fixed by the polishing liquid supply unit 40 so that the workpiece support unit 20 cannot rotate around the central axis. Yes.

  The work support part 20 has a work support hole 21 penetrating in the axial direction (see FIGS. 2A and 2B). By accommodating the cylindrical roller workpiece W in the workpiece support hole 21, the cylindrical roller workpiece W is supported by the workpiece support portion 20 so as to be swingable. A part of the cylindrical roller workpiece W accommodated in the workpiece support hole 21 is immersed in the polishing liquid P supplied from the polishing liquid supply unit 40.

  A side wall pad 22 that is slidably contacted with the cylindrical roller workpiece W and polished is provided on the side wall portion of the workpiece support hole 21 in the moving direction of the cylindrical roller workpiece W (see FIG. 3). In FIG. 3, the work support hole 21 is partially omitted. The side wall pad 22 is in sliding contact with the cylindrical roller workpiece W when the polishing pad 30 is rotated relative to the workpiece support portion 20 around the central axis. A raised layer composed of a plurality of fibers is formed on the surface of the side wall pad 22 on the side in contact with the cylindrical roller workpiece W (not shown). The length of the fibers constituting the raised layer may be a length suitable for polishing the cylindrical roller workpiece W to such an extent that the rotation of the cylindrical roller workpiece W is not significantly hindered. The length of the fiber is usually 1 mm or more, more preferably 1.5 mm or more from the viewpoint of sufficiently polishing the cylindrical roller workpiece W, and from the viewpoint of sufficiently rotating the cylindrical roller workpiece W. , Preferably 3 mm or less, more preferably 2.5 mm or less.

The work support hole 21 has a rectangular shape when viewed from above the work support part 20 in the central axis direction (see FIGS. 4A and 21a). Here, the length a is expressed by the formula (1):
Length a = (2.0 to 2.5) × Cylindrical roller diameter D ₁ (1)
The length b satisfies the formula (2):
Length b = (3.0 to 4.0) × Cylindrical roller length L ₁ (2)
It is the length which satisfies.

  The polishing pad 30 is integrally disposed on the bottom of the container 10 so that the polishing pad 30 and the container 10 can rotate integrally. Further, the polishing pad 30 is disposed so as to be slidable in contact with the surface of the cylindrical roller workpiece W supported by the workpiece support section 20 (see FIG. 2B).

  The polishing pad 30 includes a plastic edge plate 31 and a polishing pad main body 32 (see FIGS. 5A and 5B). The polishing pad main body 32 is composed of a plurality of brushed fibers 32a, and is attached to the surface of the edged plate 31 on the sliding contact surface side with the cylindrical roller workpiece W (see FIGS. 5B and 5C). . The polishing pad main body 32 has a groove having a radial pattern that changes the centrifugal direction vector and the centripetal direction vector so that the cylindrical roller workpiece W alternately moves outside and inside the polishing pad 30 every 90 °. 33 is formed.

  The length of the fibers constituting the polishing pad main body 32 may be a length suitable for applying a rotational force to the cylindrical roller workpiece W and polishing the cylindrical roller workpiece W. The length of the fiber is usually preferably 2.0 mm or more, more preferably 2.3 mm or more from the viewpoint of sufficiently polishing the cylindrical roller workpiece W, and the cylindrical roller workpiece W is sufficiently rotated. From the viewpoint, it is preferably 3 mm or less, more preferably 2.5 mm or less. In addition, it is preferable that the length of the fiber which comprises the polishing pad main body 32 is longer than the length of the fiber which comprises the said side wall pad 22 from a viewpoint of grind | polishing the workpiece W for cylindrical rollers efficiently.

  As shown in FIG. 2, the pedestal 3 of the polishing apparatus 1 includes a rotating shaft 60 that rotates the container 10, a driving unit 70 that drives the rotating shaft 60, and a control unit that controls the operation of the driving unit 70. 80 are housed.

  The light source 4 generates light that excites the photocatalyst and the fluorescent material contained in the polishing liquid. Examples of such a light source 4 include an ultraviolet light lamp and a visible light lamp, but the present invention is not limited to such examples.

  In the polishing apparatus 1, the cylindrical roller workpiece W supported by the workpiece support unit 20 is rotated in the direction of the arrow by rotating the container 10 around the central axis in the direction of the arrow under irradiation with ultraviolet light, and the polishing pad 30. Further, it slides in contact with the side wall pad 22 (not shown) and swings in the central axis direction (see FIG. 6). Thereby, the work W for cylindrical rollers is grind | polished.

  In the present invention, for example, a workpiece for a rolling element such as a spherical roller workpiece, a ball workpiece, a tapered roller workpiece, a rod roller workpiece, or a needle roller workpiece can be used as the workpiece. For example, when a ball workpiece is used as the workpiece, in the polishing apparatus 1, the ball workpiece supported by the workpiece support portion 20 is driven by rotating the container 10 around the central axis in the arrow direction under irradiation of ultraviolet light. W rotates in the direction of the arrow to slidably contact the polishing pad 30 and the sidewall pad 22 (not shown) by point contact and swing in the central axis direction (see FIG. 7). Thereby, the workpiece | work W for balls is grind | polished.

  In the present invention, the shape of the work support hole can be selected as appropriate according to the shape of the work W.

For example, when the workpiece W is a spherical roller workpiece, examples of the workpiece support hole include the workpiece support hole 21b and the workpiece support hole 21c in FIG. 4A. However, the present invention is limited to such an example. It is not a thing. The front side wall 201 in the workpiece support hole 21b in the moving direction of the workpiece W has a dogleg shape when viewed from above the workpiece supporting portion 20 in the central axis direction, and is behind the workpiece W in the moving direction of the workpiece W in the workpiece supporting hole 21b. The side wall portion 202 has an inverted letter shape when viewed from above the workpiece support portion 20 in the central axis direction (see FIGS. 4A and 21b). Here, the length c of the workpiece support hole 21b is preferably the formula (3):
Length c = (1.5 to 2.0) × spherical roller diameter D ₂ (3)
The length satisfying the above, the length d is preferably the formula (4):
Length d = (1.5 to 2.0) × Spherical roller length L ₂ (4)
The length satisfying the above, the length e is preferably the formula (5):
Length e = 1 / 2d (5)
It is the length which satisfies. In FIG. 4A, the angles α and β are preferably 1 to 10 °. When the work support hole 21b is viewed from the side, the inclination angles γ and δ of the side wall are preferably 0 to 30 °, more preferably 0 to 15 ° C. [see FIG. 4 (B)]. On the other hand, the side wall 203 at the front of the workpiece W in the movement direction of the workpiece support hole 21c and the side wall 204 at the rear of the workpiece W in the movement direction are provided with R (see FIGS. 4A and 21c). At this time, in FIG. 4A, the length f of the work support hole 21b is preferably the formula (6):
Length f = (2.0 to 3.0) × Spherical roller diameter D ₂ (6)
The length satisfying the above, the length g is preferably the formula (7):
Length g = (2.5-3.0) × Spherical roller length L ₂ (7)
The length satisfying the above and the curvature of the side wall portions 203 and 204 are preferably represented by the formula (8):
Curvature = (1.0-1.59) × Surface curvature R ₂ (8)
It is the curvature that satisfies. In FIG. 4A, the angle ε is preferably 15 to 30 °.

Moreover, when the workpiece | work W is a ball | bowl workpiece | work, although the workpiece | work support hole 21d of FIG. 4 (A) is illustrated as a workpiece | work support hole, this invention is not limited only to this illustration. R is attached to the corners 205 and 206 on the central axis side in the workpiece support hole 21d (see FIGS. 4A and 21d). At this time, in FIG. 4A, the length h of the workpiece support hole 21d is preferably the formula (9):
Length h = (2.0-3.0) × Diameter of ball D ₃ (9)
The length satisfying the above, the length i is preferably the formula (10):
Length i = (2.0 to 3.0) × ball diameter D ₃ (10)
The length satisfying the above, and the curvature of the corners 205 and 206 are preferably the formula (11):
Curvature ≧ ball diameter D _3/2 (11)
It is the curvature that satisfies. In FIG. 5A, the angle ζ is preferably 10 to 20 °.

Furthermore, when the workpiece W is a tapered roller workpiece, the workpiece support hole 21e shown in FIG. 4A is exemplified as the workpiece support hole, but the present invention is not limited to such illustration. The work support hole 21e is reduced in diameter from the central axis side toward the outside (see FIGS. 4A and 21e). At this time, in FIG. 4A, the length j of the work support hole 21e is preferably expressed by the formula (12):
Length j = (1.0-2.0) × small end diameter D _{4 of} tapered roller (12)
The length satisfying the above, the length k is preferably the formula (13):
Length k = (2.0 to 2.5) × large end diameter D _{5 of} tapered roller (13)
The length satisfying the above, the length l is preferably the formula (14):
Length l = (3.0 to 4.0) × Length of tapered roller L ₄ (14)
It is the length which satisfies. 4A, the angle η is preferably 10 to 20 °, and the angle θ is preferably 10 to 20 °.

  In the present invention, the pattern of the groove 33 in the polishing pad 30 of the polishing apparatus 1 is not only a straight line but also a curve such as a parabola, a quadratic curve, a spiral, a logarithmic spiral, an involute curve, a cycloid curve, a sine curve, and a cosine curve. An ellipse; it may be formed by a circle or the like.

  In the present invention, the container 10 may be tilted by 20 to 40 ° with respect to the horizontal plane so that the pressure with the bottom pad when freely falling due to the weight of the work can be easily changed to a load. In this case, from the viewpoint of increasing the rotation and swinging of the workpiece W to increase the polishing efficiency, the workpiece support portion 20 is not provided, and the container 10 having a diameter smaller than the diameter of the polishing pad 30 is independent of the polishing pad 30. It may be provided on the polishing pad 30 so that it can be rotated.

  In the present invention, in order to polish fine parts efficiently, the container 10 is tilted by 20 to 40 ° with respect to the horizontal plane, and the workpiece pressing portion that presses the workpiece W against the polishing pad 30 instead of the workpiece support portion 20. May be provided on the polishing pad 30 so as to be able to rotate independently of the polishing pad 30.

  As described above, according to the present invention, a metal workpiece can be polished to a low surface roughness with a high polishing efficiency, so that it is possible to manufacture a metal member or the like that requires a low surface roughness and a high accuracy. Can be manufactured. Therefore, the rolling element manufacturing method, workpiece polishing method, polishing liquid and polishing apparatus of the present invention are hydraulic machines, machine tools, textile machines, construction machines, semiconductor manufacturing apparatuses and other industrial machines, automobiles, airplanes, ships, electricity It is useful for manufacturing members used in electronic products and the like.

  Next, the present invention will be described in more detail based on examples, but the present invention is not limited to such examples.

Example 1
Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated Co., Ltd.] 7.89 g (concentration in polishing liquid: 5 mass%), and a particle diameter made of aluminum oxide of 4000 nm 7.89 g (product name: white fused alumina, manufactured by Fujimi Incorporated, Ltd.) (concentration in polishing liquid: 5 mass%) and photocatalyst particles having a particle diameter of 180 nm made of titanium dioxide [Ishihara Techno ( Product name: Titanium oxide ST-41 for photocatalyst (concentration in polishing liquid: 5% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (diethylamino) -2-oxo -2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride, in general formula (I), R ¹ and R ² Is a methyl group, R ³ and R ⁴ are ethyl groups, and X is a chlorine atom (Hodogaya Chemical Co., Ltd., trade name: Catilon Brilliant Flavine GFH)] 0.754 g (in the polishing liquid) The polishing liquid (pH 5.63) was obtained by mixing 150 g of purified water and 150 g of purified water.

(Production Example 1)
For cylindrical rollers with a diameter of 15 mm and a length of 25 mm, a material made of pure copper (composition: 99% copper) is processed by drawing and cutting with an cutting tool (trade name: Diamond Tool DA1000, manufactured by Sumitomo Electric Industries, Ltd.) I got a work. The arithmetic average roughness Ra and the maximum height Ry of the part which forms the rolling sliding surface of the obtained cylindrical roller workpiece were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). As a result, the arithmetic average roughness Ra of the portion forming the rolling sliding surface of the cylindrical roller workpiece was 0.569 μm, and the maximum height Ry was 4.53 μm.

(Example 2)
The cylindrical roller workpiece obtained in Production Example 1 is set in the workpiece support hole of the polishing apparatus of the present invention having the polishing portion shown in FIG. 6, and the cylindrical roller using the polishing liquid obtained in Example 1 is used. The surface of the workpiece was polished. The polishing conditions were as follows: the rotational speed of the container: 100 min ⁻¹ , the rotational speed of the cylindrical roller workpiece: 2000 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 120 minutes, Temperature: 25 ° C., and used polishing pad and side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23. In Example 2, the result of observing the copper cylindrical roller workpiece before polishing is shown in FIG. 9A, and the result of observing the copper cylindrical roller workpiece after polishing is shown in FIG. 9B. Further, the arithmetic average roughness Ra and the maximum height Ry of the rolling sliding surface of the cylindrical roller after polishing were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). In addition, for the obtained cylindrical roller, the following criteria:
(1) The pre-processed scratches are removed.
(2) No gloss unevenness is observed over the entire surface of the obtained metal member.
(3) No coloration due to oxidation is observed.
It was evaluated by visual observation and a scanning laser microscope with an optical microscope [Lasertec Co., Ltd .: trade name: 1LM-21].

  From the results shown in FIGS. 9A and 9B, the surface of the cylindrical roller workpiece before polishing had many fine cutting marks and a dark brown oxide film. On the other hand, it can be seen that the surface of the cylindrical roller after polishing is smoothed. Moreover, since the arithmetic average roughness Ra of the polished cylindrical roller was 0.109 μm and the maximum height Ry was 1.46 μm, it was found that a cylindrical roller having a low surface roughness was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Production Example 2)
A cylindrical roller workpiece having a diameter of 15 mm and a length of 25 mm is obtained by drawing a material made of an aluminum alloy (AL5052) and precision cutting with a diamond cutting tool (trade name: diamond cutting tool DA1000, manufactured by Sumitomo Electric Industries, Ltd.). Obtained. The arithmetic average roughness Ra and the maximum height Ry of the part which forms the rolling sliding surface of the obtained cylindrical roller workpiece were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). As a result, the arithmetic average roughness Ra of the portion forming the rolling sliding surface of the cylindrical roller workpiece was 0.386 μm, and the maximum height Ry was 2.13 μm.

(Example 3)
The cylindrical roller workpiece obtained in Production Example 2 is set in the workpiece support hole of the polishing apparatus of the present invention having the polishing section shown in FIG. 6, and the cylindrical roller is obtained using the polishing liquid obtained in Example 1. The surface of the workpiece was polished. The polishing conditions were as follows: the rotation speed of the container: 150 min ⁻¹ , the rotation speed of the cylindrical roller work: 60 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 120 minutes, Temperature: 25 ° C., and used polishing pad and side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23. The arithmetic average roughness Ra and maximum height Ry of the rolling sliding surface of the cylindrical roller after polishing were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  As a result, the arithmetic average roughness Ra of the polished cylindrical roller was 0.109 μm, and the maximum height Ry was 0.98 μm, so that it was found that a cylindrical roller having a low surface roughness was obtained. . Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

Example 4
Abrasive grains made of aluminum oxide having a particle diameter of 4000 nm [manufactured by Fujimi Incorporated, trade name: White Fused Alumina] 16.7 g (concentration in polishing liquid: 10% by mass) and particle diameter of titanium dioxide 180 nm Photocatalyst particles [manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst] 7.89 g (concentration in polishing liquid: 5% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathillion Brilliant GFH)] 754 g (concentration in polishing liquid: 0.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid (pH 5.6). ) Was obtained.

(Production Example 3)
A material composed of titanium (composition: 99.0% by mass of titanium) is processed by drawing and precision cutting with cemented carbide tool [manufactured by Toshiba Tungaloy Co., Ltd., trade name: Tungaloy TNPL321C]. A 25 mm cylindrical roller workpiece was obtained. The arithmetic average roughness Ra and the maximum height Ry of the part which forms the rolling sliding surface of the obtained cylindrical roller workpiece were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). As a result, the arithmetic average roughness Ra of the portion forming the rolling sliding surface of the cylindrical roller workpiece was 0.653 μm, and the maximum height Ry was 3.56 μm.

(Example 5)
The cylindrical roller workpiece obtained in Production Example 3 is set in the workpiece support hole of the polishing apparatus of the present invention having the polishing portion shown in FIG. 6, and the cylindrical roller is obtained using the polishing liquid obtained in Example 4 The surface of the workpiece was polished. The polishing conditions were: the number of rotations of the container: 150 min ⁻¹ , the number of rotations of the cylindrical roller work: 2000 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 120 minutes, Temperature: 25 ° C., and used polishing pad and side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23. The arithmetic average roughness Ra and maximum height Ry of the rolling sliding surface of the cylindrical roller after polishing were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  As a result, since the arithmetic average roughness Ra of the polished cylindrical roller was 0.324 μm and the maximum height Ry was 1.89 μm, it was found that a cylindrical roller having a low surface roughness was obtained. . Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 6)
16.7 g of abrasive grains made of aluminum oxide with a particle diameter of 1000 nm (trade name: White Fused Alumina, manufactured by Fujimi Incorporated) (concentration in polishing liquid: 10% by mass), and a particle diameter of 180 nm made of titanium dioxide. Photocatalyst particles (manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst) 3.85 g (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH)] 3.85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4. 3) was obtained.

(Production Example 4)
A steel material made of general structural steel SS41 was processed by drawing and cutting with a precision lathe (trade name: LEO, manufactured by Wasino Kikai Co., Ltd.) to obtain a cylindrical roller workpiece having a diameter of 12 mm and a length of 12 mm. The arithmetic average roughness Ra and the maximum height Ry of the part which forms the rolling sliding surface of the obtained cylindrical roller workpiece were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). As a result, the arithmetic average roughness Ra of the portion forming the rolling sliding surface of the cylindrical roller workpiece was 0.196 μm, and the maximum height Ry was 1.453 μm.

(Example 7)
The cylindrical roller workpiece obtained in Production Example 4 is set in the workpiece support hole of the polishing apparatus of the present invention having the polishing portion shown in FIG. 6, and the cylindrical roller is obtained using the polishing liquid obtained in Example 6 The surface of the workpiece was polished. The polishing conditions were as follows: the number of rotations of the container: 130 to 150 min ⁻¹ , the number of rotations of the cylindrical roller work: 2500 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 60 minutes, polishing Liquid temperature: 25 ° C., polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15 -20. In Example 7, the result of observing the cylindrical roller workpiece made of general structural steel SS41 before polishing is shown in FIG. 10A, and the result of observing the cylindrical roller made of general structural steel SS41 after polishing is shown in FIG. Shown in B). The arithmetic average roughness Ra and maximum height Ry of the rolling sliding surface of the cylindrical roller after polishing were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 10A and 10B, the surface of the cylindrical roller workpiece before polishing had many fine cutting marks, whereas the surface of the cylindrical roller after polishing was It can be seen that it is smoothed. In addition, since the arithmetic average roughness Ra of the cylindrical roller after polishing was 0.0356 μm and the maximum height Ry was 0.65 μm, it is understood that a cylindrical roller having a low surface roughness was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 8)
16.7 g of abrasive grains made of aluminum oxide with a particle diameter of 1000 nm (trade name: White Fused Alumina, manufactured by Fujimi Incorporated) (concentration in polishing liquid: 10% by mass), and a particle diameter of 180 nm made of titanium dioxide. Photocatalyst particles [manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst] 7.89 g (concentration in polishing liquid: 5% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathillion Brilliant GFH)] 85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4.23). It was obtained.

(Production Example 5)
A spherical surface having a diameter of 19 mm and a length of 15 mm at the center of a spherical roller having a convex wall portion obtained by subjecting a steel material made of bearing steel SUJ2 to plastic processing, cutting, heat treatment, grinding and barrel polishing. A roller work was obtained. The arithmetic average roughness Ra of the obtained workpiece was measured by a surface inspection machine (manufactured by Taylor Hobson Co., Ltd., trade name: Talysurf). As a result, the arithmetic average roughness Ra of the workpiece was 0.150 μm.

Example 9
The workpiece obtained in Production Example 5 is set in the workpiece support hole of the polishing apparatus of the present invention having the workpiece support hole shown in 21b of FIG. 4, and the polishing liquid obtained in Example 8 is used for the workpiece. The surface was polished. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 30 minutes, the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 9, the result of observing the spherical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 11A, and the result of observing the spherical roller made of bearing steel SUJ2 after polishing is shown in FIG. 11B. . The arithmetic average roughness Ra at the central portion of the spherical convex wall portion made of the bearing steel SUJ2 after polishing was measured by a surface inspection machine (made by Taylor Hobson Co., Ltd., trade name: Talysurf). Moreover, about the obtained spherical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [made by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 11 (A) and 11 (B), many fine cutting traces existed on the surface of the workpiece before polishing, whereas the surface of the spherical roller after polishing was smoothed. You can see that Further, since the arithmetic average roughness Ra at the center of the convex wall portion of the polished spherical roller was 0.035 μm, it can be seen that a spherical roller having a low surface roughness was obtained. When the workpiece was further polished for 15 minutes, the arithmetic average roughness Ra at the center of the convex wall portion of the spherical roller after polishing was 0.028 μm. Moreover, since the obtained spherical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 10)
16.7 g of abrasive grains made of aluminum oxide with a particle diameter of 11500 nm [manufactured by Fujimi Incorporated, trade name: white fused alumina] (concentration in polishing liquid: 10% by mass), and a particle diameter of 180 nm made of titanium dioxide Photocatalyst particles [manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst] 7.89 g (concentration in polishing liquid: 5% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathillion Brilliant GFH)] 85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4.2). ) Was obtained.

(Example 11)
16.7 g of abrasive grains made of aluminum oxide with a particle diameter of 1000 nm (trade name: White Fused Alumina, manufactured by Fujimi Incorporated) (concentration in polishing liquid: 10% by mass), and a particle diameter of 180 nm made of titanium dioxide. Photocatalyst particles [manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst] 7.89 g (concentration in polishing liquid: 5% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathillion Brilliant GFH)] 85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4.23). It was obtained.

(Production Example 6)
The steel material made of the bearing steel SUJ2 was subjected to plastic processing, cutting processing, and grinding processing to obtain a spherical roller workpiece having a diameter of 19 mm and a length of 15 mm at the center of the spherical roller having the convex wall portion. . The arithmetic average roughness Ra of the obtained workpiece was measured by a surface inspection machine (manufactured by Taylor Hobson Co., Ltd., trade name: Talysurf). As a result, the arithmetic average roughness Ra of the workpiece was 0.219 μm.

(Example 12)
The workpiece obtained in Production Example 6 is set in the workpiece support hole of the polishing apparatus of the present invention having the workpiece support hole shown in 21b of FIG. 4, and the polishing liquid obtained in Example 10 is used for the workpiece. The surface was polished. The polishing conditions were as follows: the rotation speed of the container: 130 to 150 min ⁻¹ , the rotation speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 120 minutes, and the temperature of the polishing liquid : 25 ° C., used polishing pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 is there.

Next, the surface of the workpiece after polishing was polished using the polishing liquid obtained in Example 11. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 30 minutes, the temperature of the polishing liquid : 25 ° C., used polishing pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 is there. In Example 12, FIG. 12A shows the result of observing a spherical roller workpiece made of bearing steel SUJ2 before polishing. Bearing steel SUJ2 after polishing with a polishing liquid containing abrasive grains having a particle diameter of 11500 nm FIG. 12B shows the result of observing the spherical roller workpiece, and FIG. 12C shows the result of observing the spherical roller made of bearing steel SUJ2 after polishing using a polishing liquid containing abrasive grains having a particle diameter of 1000 nm. Shown in In addition, the arithmetic average roughness Ra at the central portion of the convex wall portion of the spherical roller made of bearing steel SUJ2 after being polished using a polishing liquid containing abrasive grains having a particle diameter of 1000 nm is measured by a surface inspection machine [manufactured by Taylor Hobson Co., Ltd. , Trade name: Talysurf]. Moreover, about the obtained spherical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [made by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 12 (A) to 12 (C), the surface of the workpiece before polishing had many fine cutting marks, whereas the surface of the spherical roller became smoother as polishing progressed. It can be seen that Further, since the arithmetic average roughness Ra at the central portion of the convex wall portion of the spherical roller after polishing using a polishing liquid containing abrasive grains having a particle diameter of 1000 nm was 0.061 μm, it has a low surface roughness. It can be seen that spherical rollers were obtained. Moreover, since the obtained spherical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

  From the results of Examples 1 to 12 described above, it can be seen that by using the polishing apparatus and the polishing liquid of the present invention, the workpiece corresponding to the rolling element can be efficiently polished until the surface roughness becomes low. Moreover, it turns out that a practically sufficient member can be obtained by using the polishing apparatus and polishing liquid of this invention.

(Example 13)
16.7 g of abrasive grains made of aluminum oxide with a particle diameter of 1000 nm (trade name: White Fused Alumina, manufactured by Fujimi Incorporated) (concentration in polishing liquid: 10% by mass), and a particle diameter of 180 nm made of titanium dioxide. Photocatalyst particles (manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst) 3.85 g (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH)] 3.85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4. 3) was obtained.

(Production Example 7)
The high structural steel for machine structure S55C was subjected to plastic working, cutting, grinding, and subjected to quenching (1300 ° C., 30 minutes after water quenching) and polishing to obtain a steel material made of quenched steel. The obtained steel material made of hardened steel was processed by grinding and barrel polishing to obtain a ball work having a diameter of 16 mm. The arithmetic average roughness Ra and maximum height Ry of the obtained workpiece were measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). As a result, the arithmetic average roughness Ra of the workpiece was 0.12 μm, and the maximum height Ry was 1.51 μm.

(Example 14)
The workpiece obtained in Production Example 7 is set in the workpiece support hole of the polishing apparatus of the present invention having the polishing portion shown in FIG. 7, and the surface of the workpiece is polished using the polishing liquid obtained in Example 13 did. An acute angle pad or a hemispherical pad was used as the side wall pad. The polishing conditions were as follows: container rotation speed: 250 min ⁻¹ , work rotation speed: 3500 min ⁻¹ , ultraviolet intensity: 0.8 mW / cm ² , polishing time and light irradiation time: 60 minutes, polishing liquid temperature: 25 C., polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20. In Example 14, FIG. 13A shows the result of observing a hardened steel ball workpiece before polishing, and FIG. 13 shows the result of observing hardened steel ball after polishing when an acute pad is used. FIG. 13 (C) shows the result of observing hardened steel balls after polishing when a (B) hemispherical pad is used. In addition, the surf test is performed on the arithmetic average roughness Ra and the maximum height Ry of the hardened steel balls after polishing when using sharp-angled pads and the hardened steel balls after polishing when using hemispherical pads. [Measured by Mitutoyo Co., Ltd., trade name: SV-400]. Moreover, about the obtained ball | bowl, it was evaluated by visual observation and the scanning laser microscope with an optical microscope [Lasertec Corporation | KK brand name: 1LM-21] whether the said reference | standard (1)-(3) was satisfy | filled.

  From the results shown in FIGS. 13A to 13C, a large number of fine cutting marks were present on the surface of the workpiece before polishing, whereas an acute angle pad or a hemispherical pad was used. It can be seen that the surface of the hardened steel balls after polishing is smoothed. Further, the arithmetic average roughness Ra of the hardened steel balls after polishing when using an acute-angle pad is 0.043 μm, the maximum height Ry is 0.51 μm, and after polishing when using a hemispherical pad The arithmetic average roughness Ra of the hardened steel balls of 0.051 μm and the maximum height Ry of 0.62 μm indicate that balls having a low surface roughness were obtained. Moreover, since the obtained ball | bowl satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 15)
Abrasive grains made of aluminum oxide with a particle diameter of 11500 nm [manufactured by Fujimi Incorporated, trade name: White Fused Alumina] 16.7 g (concentration in polishing liquid: 10% by mass) and a particle diameter of titanium dioxide made of 180 nm Photocatalyst particles (manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst) 3.85 g (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH)] 3.85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid (pH .23) was obtained.

(Example 16)
In Example 14, a ball was obtained in the same manner as in Example 14 except that the polishing liquid obtained in Example 15 was used instead of the polishing liquid obtained in Example 13. In Example 16, the result of observing hardened steel balls after polishing in the case of using an acute pad is shown in FIG. Moreover, about the obtained ball | bowl, it was evaluated by visual observation and the scanning laser microscope with an optical microscope [Lasertec Corporation | KK brand name: 1LM-21] whether the said reference | standard (1)-(3) was satisfy | filled.

  From the results shown in FIG. 14, it can be seen that the balls obtained have a low surface roughness, similar to the balls obtained in Example 14. Moreover, since the obtained ball | bowl satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Comparative Example 1)
37.5 g of particles made of aluminum oxide having a particle diameter of 300 nm [manufactured by Fujimi Incorporated, trade name: White Fused Alumina] (concentration in polishing liquid: 20% by mass) and fluorescent material [1H-benzimidazo Lithium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH) )] 0.75 g (concentration in polishing liquid: 0.5 mass%) and 150 g of purified water were mixed to obtain a polishing liquid (pH 5.63).

(Comparative Example 2)
37.5 g of particles made of titanium dioxide having a particle diameter of 100 nm [manufactured by Hosokawa Micron Corporation, trade name: titanium oxide] (concentration in polishing liquid: 20% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathillion Brilliant GFH)] A polishing liquid (pH 5.63) was obtained by mixing 75 g (concentration in the polishing liquid: 0.5 mass%) and 150 g of purified water.

(Comparative Example 3)
In Example 14, the same operation as in Example 14 was performed, except that the polishing liquid obtained in Comparative Example 1 was used instead of the polishing liquid obtained in Example 13. In Comparative Example 3, FIG. 15A shows the result of observing a hardened steel ball workpiece before polishing, and FIG. 15 shows the result of observing hardened steel ball after polishing when using an acute pad. Shown in (B). Moreover, about the obtained ball | bowl, it was evaluated by visual observation and the scanning laser microscope with an optical microscope [Lasertec Corporation | KK brand name: 1LM-21] whether the said reference | standard (1)-(3) was satisfy | filled.

  From the results shown in FIG. 15, it can be seen that the surface of the ball is not polished but oxidized and blackened. Therefore, it can be seen that the obtained balls do not satisfy any of the above criteria and are insufficient in practice.

(Comparative Example 4)
In Example 14, the same operation as in Example 14 was performed, except that the polishing liquid obtained in Comparative Example 2 was used instead of the polishing liquid obtained in Example 13. About the obtained ball | bowl, it was evaluated by visual observation and the scanning laser microscope with an optical microscope [Lasertec Corporation | KK brand name: 1LM-21] whether the said reference | standard (1)-(3) was satisfy | filled. As a result, the surface of the ball was not polished and was oxidized and blackened. Therefore, it can be seen that the obtained balls do not satisfy any of the above criteria and are insufficient in practice.

(Comparative Example 5)
16.7 g of particles having a particle diameter of 300 nm made of aluminum oxide (manufactured by Fujimi Incorporated, trade name: White Fused Alumina) (concentration in polishing liquid: 10% by mass) and particles having a particle diameter of 100 nm made of titanium dioxide 3.85 g of particles (manufactured by Hosokawa Micron Corporation, trade name: titanium oxide) (concentration in polishing liquid: 2.5 mass%) and fluorescent material [1H-benzimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Catilon Brilliant Flavine GFH)] 3.85 g (in polishing liquid) Concentration: 2.5% by mass) and 150 g of purified water were mixed to obtain a polishing liquid (pH 4.23).

(Comparative Example 6)
In Example 14, the same operation as in Example 14 was performed, except that the polishing liquid obtained in Comparative Example 5 was used instead of using the polishing liquid obtained in Example 13. In Comparative Example 6, FIG. 16A shows the result of observing a hardened steel ball workpiece before polishing, and FIG. 16 shows the result of observing hardened steel ball after polishing when an acute pad is used. Shown in (B). Moreover, about the obtained ball | bowl, it was evaluated by visual observation and the scanning laser microscope with an optical microscope [Lasertec Corporation | KK brand name: 1LM-21] whether the said reference | standard (1)-(3) was satisfy | filled.

  From the results shown in FIG. 16, it can be seen that the surface of the ball is not polished but oxidized and blackened. Therefore, it can be seen that the obtained balls do not satisfy any of the above criteria and are insufficient in practice.

(Comparative Example 7)
5.26 g of particles having a particle diameter of 1000 nm made of aluminum oxide (manufactured by Fujimi Incorporated, trade name: White Fused Alumina) (concentration in polishing liquid: 5% by mass) and particles having a particle diameter of 100 nm made of titanium dioxide 11.1 g of particles (manufactured by Hosokawa Micron Corporation, trade name: titanium oxide) (concentration in polishing liquid: 10% by mass) and fluorescent material [1H-benzimidazolium, 2- [7- (diethylamino) -2 -Oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Catilon Brilliant Flavine GFH)] 8.01 g (concentration in polishing liquid: 7.5% by mass) and 100 g of purified water were mixed to obtain a polishing liquid (pH 4.23).

(Comparative Example 8)
In Example 9, the same operation as in Example 9 was performed except that the polishing liquid obtained in Comparative Example 7 was used instead of using the polishing liquid obtained in Example 8. In Comparative Example 8, the result of observing the spherical roller workpiece made of the bearing steel SUJ2 before polishing is shown in FIG. 17A, and the result of observing the spherical roller made of the bearing steel SUJ2 after polishing is shown in FIG. 17B. . Moreover, about the obtained spherical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [made by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 17A and 17B, it can be seen that the surface of the spherical roller is oxidized and blackened. Therefore, it can be seen that the obtained spherical roller does not satisfy any of the above criteria and is insufficient in practice.

(Example 17)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); Photocatalyst particles made of titanium dioxide having a particle diameter of 180 nm [manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst] (concentration in polishing liquid: 5% by mass) and fluorescent material [1H- Benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon) (Brilliant Flavine GFH)] 3.85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed and polished. A liquid (pH 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0236 μm, maximum height Ry: 0.481 μm) is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 17, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 18A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 18B. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 18 (A) and 18 (B), many deep cutting marks were present on the surface of the workpiece before polishing, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that Moreover, since the arithmetic average roughness Ra on the rolling sliding surface of the cylindrical roller after polishing was 0.0129 μm and the maximum height Ry was 0.230 μm, a cylindrical roller having a low surface roughness was obtained. I understand that. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 18)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 7.89 g of photocatalyst particles (made by Showa Denko KK, trade name: Super Titania F-10) made of titanium dioxide (concentration in polishing liquid: 5% by mass) and fluorescent material [1H-Benzimi Dazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Catilon Brilliant Flavine) GFH)] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid (p 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0272 μm, maximum height Ry: 0.563 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 18, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 19A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 19B. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 19 (A) and 19 (B), many deep cutting marks were present on the surface of the workpiece before polishing, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that Moreover, since the arithmetic average roughness Ra on the rolling sliding surface of the cylindrical roller after polishing was 0.0124 μm and the maximum height Ry was 0.288 μm, a cylindrical roller having a low surface roughness was obtained. I understand that. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 19)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 7.89 g of photocatalyst particles made of titanium dioxide having a particle diameter of 250 nm [manufactured by Showa Denko KK, trade name: Super Titania G-1] (concentration in polishing liquid: 5 mass%), and fluorescent material [1H-Benzimi Dazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Catilon Brilliant Flavine) GFH)] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid (p H4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0266 μm, maximum height Ry: 0.460 μm) is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 19, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 20A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 20B. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 20 (A) and 20 (B), many deep cutting marks were present on the surface of the workpiece before polishing, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that In addition, since the arithmetic average roughness Ra at the center of the rolling sliding surface of the cylindrical roller after polishing was 0.013 μm and the maximum height Ry was 0.266 μm, the cylindrical roller having a low surface roughness. It turns out that was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 20)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 7.89 g (trade name: KRONOS KA-10, product name: KRONOS KA-10, manufactured by Titanium Industry Co., Ltd.) having a particle diameter of 300 to 500 nm made of titanium dioxide, and a fluorescent material [1H-ben Dimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Brilliant) Flavin GFH)] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed. It was obtained Migakueki (pH4.23).

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0233 μm, maximum height Ry: 0.487 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 20, the result of observing the workpiece for cylindrical roller made of bearing steel SUJ2 before polishing is shown in FIG. 21A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 21B. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 21A and 21B, the surface of the workpiece before polishing had many deep cutting marks, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that In addition, since the arithmetic average roughness Ra at the center of the rolling sliding surface of the cylindrical roller after polishing was 0.00128 μm and the maximum height Ry was 0.266 μm, the cylindrical roller having a low surface roughness. It turns out that was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Comparative Example 9)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 7.89 g of photocatalyst particles made of titanium dioxide having a particle diameter of 30 nm [manufactured by Teika Co., Ltd., trade name: titanium dioxide AMT-600] (concentration in polishing liquid: 5 mass%), and fluorescent material [1H-benzimidazo Lithium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH) )] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0269 μm, maximum height Ry: 0.464 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Comparative Example 9, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 22A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 22B. . Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 22A and 22B, it can be seen that there are a large number of fine cutting marks on both the surface of the workpiece before polishing and the surface of the cylindrical roller after polishing. Therefore, it can be seen that the obtained cylindrical roller does not satisfy the standard (1) and is insufficient in practice.

(Comparative Example 10)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 7.89 g of photocatalyst particles made of titanium dioxide having a particle diameter of 100 nm [manufactured by Hosokawa Micron Co., Ltd., trade name: titanium dioxide] (concentration in polishing liquid: 5 mass%) and fluorescent material [1H-benzimidazolium, 2 -[7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH)] 3 .85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid (pH 4 .23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0268 μm, maximum height Ry: 0.580 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Comparative Example 10, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 23A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 23B. . Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 23A and 23B, it can be seen that both the surface of the workpiece before polishing and the surface of the cylindrical roller after polishing are less glossy and there are a large number of fine cutting marks. Therefore, it can be seen that the obtained cylindrical roller does not satisfy the above-mentioned criteria (1) and (2) and is insufficient in practical use.

(Example 21)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); Photocatalyst particles made of titanium dioxide having a particle diameter of 180 nm [manufactured by Ishihara Techno Co., Ltd., trade name: titanium oxide ST-41 for photocatalyst] (concentration in polishing liquid: 2.5% by mass) and fluorescent material [ 1H-benzimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name) : Cathilon Flavor Flavor GFH)] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed. A polishing liquid (pH 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0237 μm, maximum height Ry: 0.453 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 21, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 24A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 24 (A) and (B), many deep cutting marks were present on the surface of the workpiece before polishing, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that In addition, since the arithmetic average roughness Ra at the center of the rolling sliding surface of the cylindrical roller after polishing was 0.0120 μm and the maximum height Ry was 0.197 μm, the cylindrical roller having a low surface roughness. It turns out that was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 22)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 3.85 g of photocatalyst particles made of titanium dioxide having a particle diameter of 150 nm [manufactured by Showa Denko KK, trade name: Super Titania F-10] (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H- Benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon) (Brilliant Flavine GFH)] 3.85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed and polished. A liquid (pH 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0266 μm, maximum height Ry: 0.569 μm) is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 22, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 25A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 25B. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 25A and 25B, the surface of the workpiece before polishing had many deep cutting marks, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that Further, since the arithmetic average roughness Ra at the center of the rolling sliding surface of the cylindrical roller after polishing was 0.0096 μm and the maximum height Ry was 0.237 μm, the cylindrical roller having a low surface roughness. It turns out that was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 23)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 3.85 g of photocatalyst particles made of titanium dioxide having a particle diameter of 250 nm [manufactured by Showa Denko KK, trade name: Super Titania G-1] (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H- Benzimidazolium, 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon) (Brilliant Flavine GFH)] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid. (PH 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0232 μm, maximum height Ry: 0.501 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 23, the result of observing the workpiece for cylindrical roller made of bearing steel SUJ2 before polishing is shown in FIG. 26A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 26A and 26B, the surface of the workpiece before polishing had many deep cutting marks, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that Further, since the arithmetic average roughness Ra at the center of the rolling sliding surface of the cylindrical roller after polishing was 0.0093 μm and the maximum height Ry was 0.228 μm, the cylindrical roller having a low surface roughness. It turns out that was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Example 24)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 3.85 g of photocatalyst particles made of titanium dioxide having a particle diameter of 300 to 500 nm [manufactured by Titanium Industry Co., Ltd., trade name: KRONOS KA-10] (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H -Benzimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathillon Flavorine GFH)] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water It was obtained polishing liquid (pH4.23) Te.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0253 μm, maximum height Ry: 0.499 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Example 24, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 27A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 27B. . The arithmetic average roughness Ra of the rolling sliding surface of the cylindrical roller made of the bearing steel SUJ2 after polishing was measured by a surf test (trade name: SV-400, manufactured by Mitutoyo Corporation). Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 27A and 27B, the surface of the workpiece before polishing had many deep cutting marks, whereas the surface of the cylindrical roller after polishing was smoothed. You can see that In addition, since the arithmetic average roughness Ra at the center of the rolling sliding surface of the cylindrical roller after polishing was 0.0116 μm and the maximum height Ry was 0.289 μm, the cylindrical roller having a low surface roughness. It turns out that was obtained. Moreover, since the obtained cylindrical roller satisfy | fills all the said references | standards (1)-(3), it turns out that it has reached the practically sufficient level.

(Comparative Example 11)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 3.85 g of photocatalyst particles made of titanium dioxide having a particle diameter of 30 nm [manufactured by Teika Co., Ltd., trade name: titanium dioxide AMT-600] (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H-ben Dimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Brilliant) Flavin GFH)] 3.85 g (concentration in polishing liquid: 2.5% by mass) and 150 g of purified water were mixed to prepare a polishing liquid ( pH 4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0232 μm, maximum height Ry: 0.439 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Comparative Example 11, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 28A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 28B. . Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 28A and 28B, it can be seen that there are a large number of fine cutting marks on both the surface of the workpiece before polishing and the surface of the cylindrical roller after polishing. Therefore, it can be seen that the obtained cylindrical roller does not satisfy the standard (1) and is insufficient in practice.

(Comparative Example 12)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 1000 nm [trade name: White Fused Alumina, manufactured by Fujimi Incorporated] (concentration in polishing liquid: 5% by mass); 3.85 g of photocatalyst particles made of titanium dioxide having a particle diameter of 100 nm [manufactured by Hosokawa Micron Co., Ltd., trade name: titanium dioxide] (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H-benzimidazolium , 2- [7- (Diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Cathilon Flavorne GFH) ] 3.85 g (concentration in polishing liquid: 2.5 mass%) and 150 g of purified water were mixed to prepare a polishing liquid (p H4.23) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0259 μm, maximum height Ry: 0.487 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Comparative Example 12, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 29A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 29B. . Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 29A and 29B, it can be seen that there are a large number of fine cutting marks on both the surface of the workpiece before polishing and the surface of the cylindrical roller after polishing. Therefore, it can be seen that the obtained cylindrical roller does not satisfy the standard (1) and is insufficient in practice.

(Comparative Example 13)
(1) Preparation of polishing liquid Abrasive grains made of aluminum oxide having a particle diameter of 500 to 700 nm [manufactured by Fujimi Incorporated, trade name: white fused alumina] 37.5 g (concentration in polishing liquid: 20% by mass) And 3.85 g of photocatalyst particles made of titanium dioxide having a particle diameter of 100 nm [manufactured by Hosokawa Micron Co., Ltd., trade name: titanium dioxide] (concentration in polishing liquid: 2.5 mass%), and fluorescent material [1H-Benzimi Dazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride (manufactured by Hodogaya Chemical Co., Ltd., trade name: Catilon Brilliant Flavine) GFH)] 0.378 g (concentration in polishing liquid: 0.25% by mass) and 150 g of purified water were mixed. Thus, a polishing liquid (pH 6.17) was obtained.

(2) Polishing of cylindrical roller workpiece Cylindrical roller workpiece made of bearing steel SUJ2 [Tosei Seiki Co., Ltd., outer diameter: 19 mm, roller length: 19 mm superfinished cylindrical roller workpiece (arithmetic mean roughness) (Ra: 0.0262 μm, maximum height Ry: 0.535 μm)] is set in the work support hole of the polishing apparatus of the present invention having the work support hole shown in 21b of FIG. The surface of the workpiece was polished using the obtained polishing liquid. The polishing conditions were: the rotational speed of the container: 130 to 150 min ⁻¹ , the rotational speed of the workpiece: 2200 min ⁻¹ , the ultraviolet intensity: 0.8 mW / cm ² , the polishing time and the light irradiation time: 90 minutes, and the temperature of the polishing liquid : 25 ° C. and polishing pad used: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-23, used side wall pad: manufactured by Myonaka Pile Woven Co., Ltd., trade name: rubbing cloth Y15-20 It is. In Comparative Example 13, the result of observing the cylindrical roller workpiece made of bearing steel SUJ2 before polishing is shown in FIG. 30A, and the result of observing the cylindrical roller made of bearing steel SUJ2 after polishing is shown in FIG. 30B. . Moreover, about the obtained cylindrical roller, it was evaluated by visual observation and a scanning laser microscope with an optical microscope [manufactured by Lasertec Co., Ltd .: trade name: 1LM-21] as to whether or not the above criteria (1) to (3) were satisfied. .

  From the results shown in FIGS. 30A and 30B, it can be seen that there are a large number of fine cutting marks on both the surface of the workpiece before polishing and the surface of the cylindrical roller after polishing. Therefore, it can be seen that the obtained cylindrical roller does not satisfy the standard (1) and is insufficient in practice.

  From the above results, in a polishing liquid containing photocatalyst particles, abrasive grains, a fluorescent material, and a solvent, the photocatalyst particles having a particle diameter of 140 to 550 nm, preferably 150 to 500 nm, are used to reduce the surface roughness. It can be seen that the workpiece can be polished efficiently, and a member having a practically sufficient level that satisfies all of the criteria (1) to (3) can be obtained. In addition, it is shown that the abrasive grains preferably have a larger particle diameter than the photocatalyst particles.

  From the results of Examples 14 and 16, it is considered that the particle diameter of the abrasive grains is desirably at least 1000 nm. In addition, it is thought that the upper limit of the particle diameter of an abrasive grain should just be a magnitude | size which can suppress the coloring of a workpiece | work and can achieve low surface roughness, Usually, a particle diameter of 30000 nm or less, Preferably, it is considered that abrasive grains of 11500 nm or less can be used.

  In Examples 2, 3, 5, 7, 9, and 14, the efficiency (polishing efficiency) for reducing the surface roughness per unit surface area to unit time is determined from the surface roughness before and after polishing, the surface area of the workpiece, and the polishing time. As a result, it was found that the workpiece could be polished with the polishing efficiency shown in Table 1. In Examples 2, 3, 5, 7, 9, and 14, since the workpiece and the polishing pad were in point contact or line contact, the contact width was approximately 10 μm and the surface area was calculated.

  On the other hand, according to the method described in Non-Patent Document 1, a 15 mm diameter and 3.5 mm thick disk made of pure copper (composition: 99% copper) was annealed at 450 ° C. for 360 minutes to obtain an abrasive made of aluminum oxide. A sample piece (surface roughness Ra: 0.026 μm) obtained by polishing with grains (# 6000) is polished using the polishing liquid obtained in Comparative Example 1 or 2 and the polishing apparatus shown in FIG. The elapsed time when the lowest surface roughness from the start of polishing is defined as the polishing time. From the surface roughness before polishing, the lowest surface roughness, the surface area of the workpiece, and the polishing time, The polishing efficiency of the described method was as shown in Table 2.

  Comparing each of the polishing efficiencies in the case where the material is pure copper (Example 2, Comparative Examples 1 and 2), according to the method of the present invention, the workpiece is polished with higher polishing efficiency than the method described in the conventional non-patent document 1. It can be seen that it can be polished.

  Further, general formulas (I) other than 1H-benzimidazolium, 2- [7- (diethylamino) -2-oxo-2H-1-benzopyran-3-yl] -1,3-dimethyl-, chloride are used as fluorescent materials. In the case of using the compound represented by), it is expected that the same results as in Examples 1 to 26 are obtained.

  As described above, the polishing liquid of the present invention containing particles having a particle diameter of 140 to 550 nm made of a photocatalyst, a fluorescent material, abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively, and a solvent. By using it, it is possible to efficiently polish a workpiece, especially a workpiece with high hardness such as a rolling element workpiece, until the surface roughness is low, and suppress uneven coloring of the workpiece surface and uneven gloss on the workpiece surface. In addition, it can be seen that scratches generated during the pre-processing during the production of the workpiece are sufficiently removed, and a rolling element having a low surface roughness can be produced with high production efficiency.

DESCRIPTION OF SYMBOLS 1 Polishing apparatus 2 Polishing part 3 Base 4 Light source 10 Container 20 Work support part 21 Work support hole 21b Work support hole 21c Work support hole 21d Work support hole 21e Work support hole 22 Side wall pad 30 Polishing pad 31 Edged plate 32 Polishing pad main body 32a Fiber 33 Groove 40 Polishing liquid supply part 60 Rotating shaft 70 Drive part 80 Control part 201 Side wall part 202 Side wall part 203 Side wall part 204 Side wall part 205 Corner part 206 Corner part

Claims (15)

A method for manufacturing a rolling element including a polishing process for polishing a workpiece for a rolling element,
In the polishing process, the workpiece is brought into contact with a polishing liquid containing particles made of a photocatalyst, a fluorescent material, abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively, and a solvent. It is a step of polishing the workpiece while irradiating the polishing liquid with the light,
The photocatalyst has a particle size of 140 to 550 nm.   The method according to claim 1, wherein the abrasive grains are particles having a larger particle diameter than particles made of a photocatalyst.   The method according to claim 1 or 2, wherein a particle diameter of the abrasive grains is 1000 to 30000 nm. The fluorescent material has the general formula (I):

Wherein R ¹ and R ² are each independently an alkyl group having 1 to 4 carbon atoms, R ³ and R ⁴ are each independently an alkyl group having 1 to 4 carbon atoms, and X is a halogen atom. )
The method according to claim 1, wherein the compound is represented by the formula: A method of polishing a workpiece,
The workpiece is brought into contact with a polishing liquid containing particles of a photocatalyst having a particle diameter of 140 to 550 nm, a fluorescent material, abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, respectively, and a solvent. A method for polishing a workpiece, comprising polishing the workpiece while irradiating the polishing liquid with the light.   The method according to claim 5, wherein the abrasive grains are particles having a larger particle diameter than particles made of a photocatalyst. A polishing liquid for polishing a workpiece,
A polishing liquid comprising particles having a particle diameter of 140 to 550 nm made of a photocatalyst, a fluorescent material, abrasive grains made of a substance that transmits light that excites the photocatalyst and the fluorescent material, and a solvent.   The polishing liquid according to claim 7, wherein the abrasive grains are particles having a larger particle diameter than particles made of a photocatalyst. A polishing apparatus for polishing the surface of a rolling element workpiece using a polishing liquid,
A disc-shaped workpiece support for supporting the workpiece in a swingable manner;
The surface of the work supported by the work support is arranged so as to be slidable, and the work is rotated by rotating relative to the work support around the central axis while passing the polishing liquid. A disc-shaped polishing pad for polishing the surface of the workpiece,
A polishing liquid supply section for supplying the polishing liquid between the work support section and the polishing pad;
A polishing apparatus comprising: The polishing liquid is a polishing liquid containing particles having a particle diameter of 140 to 550 nm made of a photocatalyst, a fluorescent material, abrasive grains that transmit light that excites the photocatalyst and the fluorescent material, and a solvent,
The polishing apparatus according to claim 9, further comprising a light source that emits light that excites a photocatalyst and a fluorescent material contained in the polishing liquid.   The polishing apparatus according to claim 10, wherein at least an inner wall surface of the container reflects light that excites the photocatalyst and the fluorescent material.   The polishing apparatus according to any one of claims 9 to 11, wherein the work support portion has a work support hole that can accommodate the work in a swingable manner.   The polishing according to claim 12, wherein a polishing pad is further provided on a side wall portion that comes into contact with the workpiece when the polishing pad is rotated relative to the workpiece support portion around the central axis in the workpiece support hole. apparatus.   The polishing apparatus according to claim 9, wherein the polishing liquid supply unit is disposed so as to supply the polishing liquid to a center of rotation of the polishing pad.   A polishing pad body made of a plurality of raised fibers is provided on the surface of the polishing pad on the side in contact with the workpiece, and a groove having a radial pattern is formed in the polishing pad body. The polishing apparatus according to any one of 9 to 14.