JP2014035813A - Light emission enhancement base plate and light-emitting device - Google Patents

Light emission enhancement base plate and light-emitting device Download PDF

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JP2014035813A
JP2014035813A JP2012174848A JP2012174848A JP2014035813A JP 2014035813 A JP2014035813 A JP 2014035813A JP 2012174848 A JP2012174848 A JP 2012174848A JP 2012174848 A JP2012174848 A JP 2012174848A JP 2014035813 A JP2014035813 A JP 2014035813A
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JP6027815B2 (en
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Kenichi Saito
健一 齋藤
Hidemi Suemori
秀美 末盛
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Hiroshima University NUC
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Abstract

PROBLEM TO BE SOLVED: To make it possible to improve light emission intensity of a light emitter.SOLUTION: A light emission enhancement base plate 1 is used to enhance light emission intensity of a light emitter and comprises a base plate 2 and a nano-particle layer 4 which is disposed on a surface of the base plate 2 and consists of a plurality of Si nano-particles 3 made of silicon. The nano-particle layer 4 is irradiated with light, thereby generating a localization electric field.

Description

本発明は、発光増強基板及び発光素子に関し、特にナノ粒子を利用した発光増強基板及び発光素子に関する。   The present invention relates to a light emission enhancing substrate and a light emitting element, and more particularly to a light emission enhancing substrate and a light emitting element using nanoparticles.

近年、有機EL素子等の発光素子の性能を向上するために、発光体から発生する光の強度を増強する方法について種々の研究が行われている。中でも、金属ナノ粒子を用いて、それが生じる表面プラズモンを利用した発光強度の増強方法についての研究が多く行われている。例えば、バイオチップに用いて、光の強度を増強する手段として期待されている。   In recent years, in order to improve the performance of light-emitting elements such as organic EL elements, various studies have been conducted on methods for enhancing the intensity of light generated from a light emitter. In particular, many studies have been conducted on methods for enhancing the emission intensity using surface plasmons where metal nanoparticles are generated. For example, it is expected as a means for enhancing the intensity of light when used in a biochip.

表面プラズモンとは、金又は銀等の金属のナノ粒子に対して光が照射されると、その表面の自由電子の集団振動により強い局在電場が生じる現象をいう。このような局在電場のエネルギーは発光体を強く励起して、発光体の光強度が数十倍程度増強されることがこれまでに多く報告されている。   Surface plasmon refers to a phenomenon in which when a nanoparticle of metal such as gold or silver is irradiated with light, a strong local electric field is generated by collective vibration of free electrons on the surface. It has been reported so far that the energy of such a local electric field strongly excites the illuminant and the light intensity of the illuminant is enhanced by several tens of times.

従来の多くの研究では、表面プラズモンにより光強度を増強するために、金又は銀等の金属ナノ粒子が用いられており、その理由は、上記のように、光強度を増強する局在電場は自由電子の集団振動によって生じるため、多くの自由電子を有する金属を用いることで、より強い局在電場を得ることができると考えられるからである。   In many conventional studies, metal nanoparticles such as gold or silver are used to enhance the light intensity by surface plasmons because, as described above, the localized electric field that enhances the light intensity is This is because it is caused by collective vibration of free electrons, and it is considered that a stronger localized electric field can be obtained by using a metal having many free electrons.

しかしながら、発光体をより励起させるために発光体と金属ナノ粒子とを接近させ過ぎると、発光体内で励起されたエネルギーが金属ナノ粒子に移動して、光強度が低減する現象(消光)が起こる。すなわち、この消光によって金属ナノ粒子による発光の増強度を著しく低減することとなる。特に、発光体と金属ナノ粒子との間の距離がナノメートルスケールになると、発光体から金属ナノ粒子へのエネルギー移動が顕著となり、消光による発光の増強度の低減も顕著となる。   However, if the illuminant and the metal nanoparticle are brought too close together to excite the illuminant, the energy excited in the illuminant moves to the metal nanoparticle, causing a phenomenon (quenching) in which the light intensity decreases (quenching). . That is, this quenching significantly reduces the intensity of light emission by the metal nanoparticles. In particular, when the distance between the illuminant and the metal nanoparticles is on a nanometer scale, energy transfer from the illuminant to the metal nanoparticles becomes significant, and the reduction in the intensity of light emission due to quenching becomes significant.

このような消光を抑制するために、発光体と金属ナノ粒子との距離を大きくしたり、それらの間にスペーサを導入したりする方法が知られている(例えば、非特許文献1等を参照。)。しかし、消光を抑制するために、発光体と金属ナノ粒子との間にスペーサを導入すると、そのスペーサにより金属ナノ粒子の自由電子によって生じる局在電場の強度も低減し、その結果、発光強度が低減することとなる。   In order to suppress such quenching, a method of increasing the distance between the light emitter and the metal nanoparticles or introducing a spacer between them is known (for example, see Non-Patent Document 1). .) However, when a spacer is introduced between the luminescent material and the metal nanoparticles to suppress quenching, the intensity of the localized electric field generated by the free electrons of the metal nanoparticles is also reduced by the spacer, and as a result, the emission intensity is reduced. Will be reduced.

また、このような方法の他に、間接遷移型の半導体であるガリウムリン(GaP)からなる微粒子を用いることにより、有機色素であるローダミンの発光強度を数十倍から100倍程度まで増強できることが非特許文献2に提示されている。GaP微粒子は、光照射により生成した散乱光を発生する局在電場により発光体を励起できることに加えて、消光を抑制できるため、金属ナノ粒子を用いた場合と同等の増強度を示すと示唆されている。また、消光の抑制は、GaPが間接遷移型半導体であるため、励起された発光体からGaP微粒子へのエネルギー移動を防ぐことができることによると考えられている。   In addition to such a method, the emission intensity of rhodamine, which is an organic dye, can be increased from several tens to 100 times by using fine particles made of gallium phosphide (GaP), which is an indirect transition type semiconductor. It is presented in Non-Patent Document 2. In addition to being able to excite the illuminant with a local electric field that generates scattered light generated by light irradiation, GaP fine particles can suppress quenching, suggesting that they have the same enhancement as when metal nanoparticles are used. ing. In addition, the suppression of quenching is considered to be due to the fact that GaP is an indirect transition semiconductor, and thus energy transfer from the excited light emitter to the GaP fine particles can be prevented.

W. Knoll他、Analytical Chemistry (Anal.Chem) 75(2003) P.2610W. Knoll et al., Analytical Chemistry (Anal.Chem) 75 (2003) P.2610 Shinji Hayashi他、Chemical Physics Letter 480(2009) P.100-104Shinji Hayashi et al., Chemical Physics Letter 480 (2009) P.100-104

しかしながら、GaP微粒子を用いて消光を抑制することができたとしても、結果的に金属ナノ粒子を用いた場合と同程度の光の増強度であるため、強い局在電場によって光をより強く増強できると共に消光をより強く抑制できて、光の増強度をより向上できるナノ粒子が求められる。   However, even if the quenching can be suppressed by using GaP fine particles, the light intensity is about the same as the case of using metal nanoparticles as a result. In addition, there is a demand for nanoparticles that can suppress quenching more strongly and can further enhance the enhancement of light.

本発明は、上記の問題に鑑みてなされたものであり、その目的は、局在電場を発生して発光体を強く励起すると共に、消光を強く抑制することにより、発光体の発光強度をより増強できる発光増強基板及び発光素子を得られるようにすることにある。   The present invention has been made in view of the above problems, and its purpose is to generate a localized electric field to strongly excite the illuminant and to strongly suppress quenching, thereby further increasing the emission intensity of the illuminant. An object of the present invention is to obtain a light emission enhancing substrate and a light emitting element that can be enhanced.

上記の目的を達成するために、本発明者らは、鋭意研究した結果、シリコン(Si)ナノ粒子は、光の照射を受けると、その光照射により生成した散乱光を生じる局在電場を発生し、さらに、消光を防ぐことができることを見出して本発明を完成した。   In order to achieve the above object, the present inventors have conducted intensive research. As a result, when silicon (Si) nanoparticles are irradiated with light, they generate a localized electric field that generates scattered light generated by the light irradiation. Furthermore, the present invention was completed by finding that quenching can be prevented.

すなわち、本発明に係る発光増強基板は、発光体の発光強度を増強するために用いられ、基板と、基板の表面に配設され、シリコンからなる複数のナノ粒子により構成されたナノ粒子層とを備え、ナノ粒子層は、光が照射されることによって局在電場を発生することを特徴とする。   That is, the light emission enhancing substrate according to the present invention is used to enhance the light emission intensity of the illuminant, and a substrate, a nanoparticle layer that is disposed on the surface of the substrate and is composed of a plurality of nanoparticles made of silicon, The nanoparticle layer is characterized by generating a localized electric field when irradiated with light.

本発明に係る発光増強基板では、基板の表面にシリコン(Si)からなる複数のナノ粒子(以下、Siナノ粒子という。)が配設されている。Siナノ粒子は、光の照射を受けることにより、上記の通り、その光照射により生成した散乱光を発生する局在電場を発生し、この局在電場によって発光体が励起されるため、発光体の発光強度を増強できる。さらに、Siは間接遷移型半導体であるため、GaPと同様に、励起された発光体からSiへのエネルギー移動を防ぐことができ、消光を防ぐことが可能となる。発明者らは、Siナノ粒子を用いることによって、発光強度を2000倍以上に向上できることを見出した。すなわち、Siナノ粒子を用いることにより、金属ナノ粒子等を用いて発光強度を増強するよりも著しく発光強度を増強することができる。また、Siは存在量が豊富であり、安価であるため、金属ナノ粒子を用いるよりもコストを低減することができる。   In the light emission enhancing substrate according to the present invention, a plurality of nanoparticles (hereinafter referred to as Si nanoparticles) made of silicon (Si) are disposed on the surface of the substrate. When Si nanoparticles are irradiated with light, as described above, a local electric field that generates scattered light generated by the light irradiation is generated, and the illuminant is excited by this local electric field. Can be enhanced. Furthermore, since Si is an indirect transition semiconductor, energy transfer from an excited light emitter to Si can be prevented and quenching can be prevented, similar to GaP. The inventors have found that the emission intensity can be improved 2000 times or more by using Si nanoparticles. That is, by using Si nanoparticles, the light emission intensity can be remarkably enhanced as compared with the case where the metal nanoparticles are used to enhance the light emission intensity. In addition, since Si is abundant and inexpensive, the cost can be reduced compared to using metal nanoparticles.

上記の通り、Siナノ粒子は強い局在電場を発生し、さらに、消光をふせぐことができて、金属ナノ粒子よりも有利な効果を奏するため、本発明の発光増強基板では、ナノ粒子層が金属を含む必要はない。   As described above, since the Si nanoparticles generate a strong local electric field, and further, can suppress quenching and have an advantageous effect over the metal nanoparticles, the emission enhancement substrate of the present invention has a nanoparticle layer. There is no need to include metal.

また、本発明者らは、粒径が240nm以上2000nm以下のSiナノ粒子が特に発光増強効果を有することを見出した。すなわち、本発明に係る発光増強基板において、Siナノ粒子は、その粒径が240nm以上2000nm以下であることが好ましい。   Further, the present inventors have found that Si nanoparticles having a particle size of 240 nm or more and 2000 nm or less have a light emission enhancing effect. That is, in the light emission enhancing substrate according to the present invention, the Si nanoparticles preferably have a particle size of 240 nm or more and 2000 nm or less.

また、本発明の発光増強基板に用いられるSiナノ粒子は、ボールミリング法により形成されてもよい。ボールミリング法を用いるとSiナノ粒子を容易に形成することができ、粒径の調整も簡便に行うことができる。   Moreover, the Si nanoparticles used in the light emission enhancing substrate of the present invention may be formed by a ball milling method. When the ball milling method is used, Si nanoparticles can be easily formed, and the particle size can be easily adjusted.

本発明に係る発光増強基板は、発光素子に用いることが可能である。すなわち、本発明に係る発光素子は、透明基板と、該透明基板の上に形成された陽極と、該陽極の上に形成された正孔輸送層と、該正孔輸送層の上に形成された発光層と、該発光層の上に形成された電子輸送層と、該電子輸送層の上に形成された陰極とを備え、発光層と正孔輸送層との間には、シリコンからなる複数のナノ粒子により構成されたナノ粒子層が設けられている。   The light emission enhancing substrate according to the present invention can be used for a light emitting element. That is, the light emitting device according to the present invention is formed on a transparent substrate, an anode formed on the transparent substrate, a hole transport layer formed on the anode, and the hole transport layer. A light emitting layer, an electron transporting layer formed on the light emitting layer, and a cathode formed on the electron transporting layer, and is made of silicon between the light emitting layer and the hole transporting layer. A nanoparticle layer composed of a plurality of nanoparticles is provided.

本発明に係る発光素子によると、発光層と正孔輸送層との間には、上記のSiナノ粒子により構成されたナノ粒子層が設けられているため、Siナノ粒子による局在電場により発光層が励起され、且つ、消光を防止できるので発光層から強度が高い光を発することが可能となる。   According to the light emitting device according to the present invention, since the nanoparticle layer composed of the above Si nanoparticles is provided between the light emitting layer and the hole transport layer, light is emitted by the localized electric field by the Si nanoparticles. Since the layer is excited and quenching can be prevented, light having high intensity can be emitted from the light emitting layer.

本発明に係る発光増強基板及び発光素子によると、発光体を強く励起できると共に消光を防ぐことができるため、発光強度を顕著に向上することが可能となる。   According to the light emission enhancing substrate and the light emitting element according to the present invention, the light emitting body can be excited strongly and quenching can be prevented, so that the light emission intensity can be remarkably improved.

本発明の一実施形態に係る発光増強基板を模式的に示す断面図である。It is sectional drawing which shows typically the light emission enhancement board | substrate which concerns on one Embodiment of this invention. 本発明の一実施形態に係る発光素子を模式的に示す断面図である。It is sectional drawing which shows typically the light emitting element which concerns on one Embodiment of this invention. 本発明の実施例におけるSiナノ粒子の粉砕時間とその粒径との関係を示すグラフである。It is a graph which shows the relationship between the grinding | pulverization time of Si nanoparticle in the Example of this invention, and its particle size. 本発明の実施例における発光増強基板の表面のSEM像を示す図である。It is a figure which shows the SEM image of the surface of the light emission enhancement board | substrate in the Example of this invention. (a)は、本発明の実施例における発光増強基板を用いた場合と用いていない場合とにおけるクリスタルバイオレット溶液の蛍光スペクトルを示すグラフであり、(b)は、本発明の実施例における発光増強基板を用いることで得られたクリスタルバイオレット溶液の各波長における発光の増強度を示すグラフであり、(c)は、クリスタルバイオレット溶液の発光の増強度とSiナノ粒子の粒径との関係を示すグラフである。(A) is a graph which shows the fluorescence spectrum of the crystal violet solution in the case where it does not use with the case where the light emission enhancing substrate in the Example of this invention is used, (b) is the light emission enhancement in the Example of this invention. It is a graph which shows the luminescence enhancement in each wavelength of the crystal violet solution obtained by using a substrate, (c) shows the relationship between the luminescence enhancement of the crystal violet solution and the particle size of the Si nanoparticles. It is a graph. (a)は、本発明の実施例におけるSiナノ粒子の散乱スペクトルを示すグラフであり、(b)は、Siナノ粒子の粒径と散乱強度との関係を示すグラフである。(A) is a graph which shows the scattering spectrum of Si nanoparticle in the Example of this invention, (b) is a graph which shows the relationship between the particle size of Si nanoparticle, and scattering intensity.

以下、本発明を実施するための形態について図面を参照しながら説明する。なお、本発明は、以下の実施形態に限定されない。また、本発明の効果を奏する範囲を逸脱しない範囲で、適宜変更は可能である。   Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. The present invention is not limited to the following embodiment. Moreover, it can change suitably in the range which does not deviate from the range which has the effect of this invention.

まず、本発明の一実施形態に係る発光増強基板について図1を参照しながら説明する。図1は、本発明の一実施形態に係る発光増強基板を模式的に示す断面図である。   First, a light emission enhancing substrate according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a cross-sectional view schematically showing a light emission enhancing substrate according to an embodiment of the present invention.

図1に示すように、本実施形態に係る発光増強基板1は、発光体の発光強度を増強するために用いられ、基板2と、基板の表面に配設され、シリコン(Si)からなる複数のSiナノ粒子3により構成されたナノ粒子層4とを備え、ナノ粒子層4は、光が照射されることによって散乱光を生じる局在電場を発生することを特徴とする。   As shown in FIG. 1, a light emission enhancing substrate 1 according to the present embodiment is used to enhance the light emission intensity of a light emitter, and is disposed on a substrate 2 and the surface of the substrate, and is made of a plurality of silicon (Si). The nanoparticle layer 4 is composed of a Si nanoparticle 3, and the nanoparticle layer 4 generates a localized electric field that generates scattered light when irradiated with light.

本実施形態において、発光体とは、外部からの刺激により、当該発光体を構成する分子、イオン又は原子等の電子状態が基底状態から励起状態に励起された後、基底状態に移る際のエネルギーの差分を光として外部に放出するものをいう。なお、このような発光体からの発光は、所定の波長の光に発光体が励起されることによる発光(フォトルミネセンス)に限られず、例えば、電界の印加により発光体が励起されることによる発光(エレクトロルミネセンス)、又は化学反応により発光体が励起されることによる発光(ケミルミネセンス)等であってもよい。   In the present embodiment, the illuminant is energy when the electronic state such as molecules, ions, or atoms constituting the illuminant is excited from the ground state to the excited state by an external stimulus and then moves to the ground state. The difference is emitted to the outside as light. Note that light emission from such a light emitter is not limited to light emission (photoluminescence) caused by excitation of the light emitter with light of a predetermined wavelength, and for example, due to excitation of the light emitter by application of an electric field. It may be light emission (electroluminescence) or light emission (chemiluminescence) caused by excitation of a light emitter by a chemical reaction.

また、本実施形態の発光増強基板1に用いられる基板2は、ナノ粒子層4を表面に配設できるものであれば、その材料等は制限されない。例えば、基板2側から光を照射したい場合はガラス等からなる透明基板を用いることができ、そうでなければ、透明基板の他に樹脂等からなる基板を用いることもできる。   Moreover, the board | substrate 2 used for the light emission enhancement board | substrate 1 of this embodiment will not be restrict | limited as long as the nanoparticle layer 4 can be arrange | positioned on the surface. For example, when it is desired to irradiate light from the substrate 2 side, a transparent substrate made of glass or the like can be used. Otherwise, a substrate made of resin or the like can be used in addition to the transparent substrate.

また、本実施形態の発光増強基板1に用いられるSiナノ粒子3の材料となるSiは、特に純度に制限があるわけではなく、そのSiナノ粒子3が光の照射を受けることにより局在電場を発生することができれば、半導体素子に用いられるような高純度のものを用いる必要はない。また、局在電場をより増強するために、金属等の粒子を含ませる必要もない。金属粒子を含むことによって消光が起こり、これにより、発光の増強度が低減するおそれがあるためである。また、Siナノ粒子3の粒径は、240nm以上2000nm以下であることが好ましい。後に詳細に説明するが、Siナノ粒子3の粒径がその範囲にあると、発光の増強度を顕著に向上できる。また、Siナノ粒子3により構成されるナノ粒子層4において、基板2の表面の全面にSiナノ粒子3が覆われている必要はなく、図1に示すように、Siナノ粒子3同士の間に間隙があっても構わない。   In addition, Si as a material of the Si nanoparticles 3 used for the light emission enhancing substrate 1 of the present embodiment is not particularly limited in purity, and the localized electric field is generated when the Si nanoparticles 3 are irradiated with light. If it can generate | occur | produce, it is not necessary to use the high purity thing used for a semiconductor element. Further, it is not necessary to include particles such as metal in order to further enhance the local electric field. This is because quenching occurs due to the inclusion of metal particles, which may reduce the intensity of light emission. Moreover, it is preferable that the particle size of Si nanoparticle 3 is 240 nm or more and 2000 nm or less. As will be described in detail later, when the particle size of the Si nanoparticles 3 is within the range, the enhancement of light emission can be remarkably improved. Further, in the nanoparticle layer 4 composed of the Si nanoparticles 3, it is not necessary that the entire surface of the substrate 2 is covered with the Si nanoparticles 3, and as shown in FIG. It does not matter if there is a gap.

Siナノ粒子3は、Siを材料としていれば、その製造方法は特に限られず、例えばボールミリング法を用いることができる。ボールミリング法を用いると、Si粉末等から容易にSiナノ粒子を製造することでき、また、ボールミル装置の回転数及び粉砕時間等を調整することによって、その粒径を容易に調整することができる。   As long as Si nanoparticle 3 is made of Si, its manufacturing method is not particularly limited, and for example, a ball milling method can be used. Using the ball milling method, Si nanoparticles can be easily produced from Si powder and the like, and the particle size can be easily adjusted by adjusting the rotation speed and grinding time of the ball mill device. .

Siナノ粒子3を基板1に配設する方法としては、上記ボールミリング法において溶媒としてメタノール等のアルコールを用いた場合、Siナノ粒子3が分散したアルコール溶液を基板1に塗布し、その後、乾燥させることでSiナノ粒子3を基板1に配設できる。但し、基板1にSiナノ粒子3を配設できれば、この方法に限られず、例えば、真空蒸着等を用いても構わない。   As a method of disposing the Si nanoparticles 3 on the substrate 1, when alcohol such as methanol is used as a solvent in the ball milling method, an alcohol solution in which the Si nanoparticles 3 are dispersed is applied to the substrate 1 and then dried. By doing so, the Si nanoparticles 3 can be disposed on the substrate 1. However, this method is not limited as long as the Si nanoparticles 3 can be disposed on the substrate 1. For example, vacuum deposition or the like may be used.

上記のような構成により、本実施形態に係る発光増強基板は、その表面に発光体を設けると、例えばその発光体からの光を受けることにより、Siナノ粒子から構成されたナノ粒子層が高強度散乱光を生じる局在電場を発生し、この局在電場によって発光体を励起できるため、発光体の発光強度を増強できる。さらに、間接遷移型半導体であるSiによりナノ粒子層が構成されているため、励起された発光体からSiへのエネルギー移動を防ぐことができ、消光を防ぐことが可能となる。これにより、発光強度を著しく増強できる。   With the configuration as described above, when the light emission enhancing substrate according to this embodiment is provided with a light emitter on its surface, for example, by receiving light from the light emitter, a nanoparticle layer composed of Si nanoparticles is high. Since a local electric field that generates intensity scattered light is generated and the light emitter can be excited by the local electric field, the light emission intensity of the light emitter can be enhanced. Furthermore, since the nanoparticle layer is composed of Si that is an indirect transition semiconductor, energy transfer from the excited light emitter to Si can be prevented, and quenching can be prevented. Thereby, the emitted light intensity can be remarkably enhanced.

上記の通り、Siナノ粒子3は、発光強度を増強できるため、例えば目的とする物質を検出するために蛍光を利用するバイオセンサ、高輝度且つ低消費電力の照明又は有機ELディスプレイ等に用いられる発光素子に応用することも可能である。   As described above, since the Si nanoparticles 3 can enhance the emission intensity, for example, they are used in biosensors that use fluorescence to detect a target substance, illumination with high brightness and low power consumption, organic EL displays, and the like. It is also possible to apply to a light emitting element.

次に、本発明の一実施形態に係る発光素子について図2を参照しながら説明する。図2は、本実施形態に係る発光素子を模式的に示す断面図である。   Next, a light-emitting element according to an embodiment of the present invention will be described with reference to FIG. FIG. 2 is a cross-sectional view schematically showing the light emitting device according to this embodiment.

図2に示すように、本実施形態に係る発光素子10は、例えば有機ELディスプレイに用いられる発光素子であり、ガラスからなる透明基板11の上に、ITOからなる透明な陽極12が形成されている。陽極12の上には、正孔輸送層13が形成され、正孔輸送層13の上には、例えばp型有機半導体層14a及びn型有機半導体層14bからなる発光層14が形成されている。ここで、正孔輸送層13と発光層14との間には、シリコンからなるSiナノ粒子により構成されたナノ粒子層4が設けられている。発光層14の上には、電子輸送層15及びアルミニウムからなる陰極16が順次形成されている。   As shown in FIG. 2, the light emitting element 10 according to the present embodiment is a light emitting element used for an organic EL display, for example, and a transparent anode 12 made of ITO is formed on a transparent substrate 11 made of glass. Yes. A hole transport layer 13 is formed on the anode 12, and a light emitting layer 14 made of, for example, a p-type organic semiconductor layer 14 a and an n-type organic semiconductor layer 14 b is formed on the hole transport layer 13. . Here, between the hole transport layer 13 and the light emitting layer 14, a nanoparticle layer 4 composed of Si nanoparticles made of silicon is provided. On the light emitting layer 14, an electron transport layer 15 and a cathode 16 made of aluminum are sequentially formed.

このような構成によると、発光素子10に電圧が印可された際に、正孔及び電子が発光層14において結合することにより光が発生する。発光層14の表面に設けられたナノ粒子層4は発光層14からの光により局在電場を生じ、ナノ粒子層4が形成する局在電場によって発光層14が励起され、その発光強度が増強される。   According to such a configuration, when a voltage is applied to the light emitting element 10, light is generated by combining holes and electrons in the light emitting layer 14. The nanoparticle layer 4 provided on the surface of the light-emitting layer 14 generates a local electric field by the light from the light-emitting layer 14. The light-emitting layer 14 is excited by the local electric field formed by the nanoparticle layer 4, and the light emission intensity is enhanced. Is done.

なお、発光素子10に用いられたナノ粒子層4は、上記発光増強基板で用いたSiナノ粒子と同様のものを用いて形成され得る。すなわち、Siナノ粒子の材料となるSiは、特に純度に制限がなく、金属等の粒子を含ませる必要もない。また、Siナノ粒子の粒径は、240nm以上2000nm以下であることが好ましい。さらに、Siナノ粒子により構成されるナノ粒子層4において、正孔輸送層13と発光層14との界面の全面にSiナノ粒子が覆われている必要はなく、Siナノ粒子同士の間に間隙があっても構わない。Siナノ粒子は、Siを材料としていれば、その製造方法は特に限られず、例えばボールミリング法を用いることができる。   In addition, the nanoparticle layer 4 used for the light emitting element 10 can be formed using the same thing as the Si nanoparticle used with the said light emission enhancing substrate. That is, there is no particular limitation on the purity of Si used as the material for the Si nanoparticles, and it is not necessary to include particles such as metals. Moreover, it is preferable that the particle size of Si nanoparticle is 240 nm or more and 2000 nm or less. Further, in the nanoparticle layer 4 composed of Si nanoparticles, it is not necessary that the entire surface of the interface between the hole transport layer 13 and the light emitting layer 14 is covered with the Si nanoparticles, and there is a gap between the Si nanoparticles. There is no problem. As long as Si nanoparticles are made of Si, the production method is not particularly limited, and for example, a ball milling method can be used.

以上のように、本発明の一実施形態に係る発光増強基板及び発光素子によると、Siナノ粒子が生成する高強度散乱光を生じる局在電場により発光体を励起できて且つ消光を防止できるため、その発光強度を増強できる。   As described above, according to the light emission enhancing substrate and the light emitting element according to the embodiment of the present invention, the light emitter can be excited and the quenching can be prevented by the local electric field that generates the high-intensity scattered light generated by the Si nanoparticles. The emission intensity can be enhanced.

以下に、本発明に係る発光増強基板について詳細に説明するための実施例を示す。本実施例では、ボールミリング法により種々の粒径を有するSiナノ粒子を製造し、その粒径と発光強度の増強度との関係について検討した。   Below, the Example for demonstrating in detail about the light emission enhancing substrate which concerns on this invention is shown. In this example, Si nanoparticles having various particle diameters were produced by the ball milling method, and the relationship between the particle diameter and the increase in emission intensity was examined.

まず、Siナノ粒子の製造方法について説明する。本実施例では、Si粉末を材料とし、遊星型ボールミル装置(premium line P-7、FRITSCH社製)を用いたボールミリング法によりSiナノ粒子を製造した。具体的に、遊星型ボールミル装置のタングステンカーバイド(WC)からなる粉砕容器にWCからなる粉砕ボール(φ=3mm)とSi粉末を入れ、溶媒にメタノールを用いてSi粉末を粉砕した。ここで、遊星型ボールミル装置の回転数は600rpmとした。なお、ボールミリング法で、数センチ角に破断したシリコンウェハ(P型、N型及びイントリンシック)でもSiナノ粒子の生成を確認している。   First, a method for producing Si nanoparticles will be described. In this example, Si nanoparticles were produced by a ball milling method using Si powder as a material and a planetary ball mill apparatus (premium line P-7, manufactured by FRITSCH). Specifically, pulverized balls (φ = 3 mm) made of WC and Si powder were placed in a pulverized container made of tungsten carbide (WC) of a planetary ball mill apparatus, and Si powder was pulverized using methanol as a solvent. Here, the rotational speed of the planetary ball mill apparatus was 600 rpm. In addition, the production | generation of Si nanoparticle was confirmed also with the silicon wafer (P type, N type, and intrinsic) fractured | ruptured to several centimeter square by the ball milling method.

ここで、所望の粒径のSiナノ粒子を得るために、粒径と粉砕時間との関係を調べた。粉砕時間を30分、90分、165分及び180分として、各条件において生成されたSiナノ粒子の平均粒径を測定した結果を図3に示す。平均粒径は、走査型電子顕微鏡(Scanning Electron Microscope:SEM)を用いて数個の粒子の粒径を測定して、その平均を算出した。なお、本明細書でいう粒径は、上記の方法で測定及び算出された平均粒径のことをいう。   Here, in order to obtain Si nanoparticles having a desired particle size, the relationship between the particle size and the pulverization time was examined. FIG. 3 shows the results of measuring the average particle size of the Si nanoparticles generated under each condition with the pulverization time being 30 minutes, 90 minutes, 165 minutes and 180 minutes. The average particle size was calculated by measuring the particle size of several particles using a scanning electron microscope (SEM). In addition, the particle diameter as used in this specification means the average particle diameter measured and calculated by said method.

図3に示すように、粉砕時間を長くするに従ってSiナノ粒子の粒径が小さくなった。具体的に、粉砕時間を30分、90分、165分及び180分とすると、Siナノ粒子の粒径がそれぞれ2000nm、700nm、500nm及び300nmとなった。また、粉砕時間を180分とし、そのときに得られた溶液の上澄み液を採取すると、該上澄み液中に分散されたSiナノ粒子の粒径は240nmであった(図中の白抜きの菱形)。このように、ボールミリング法を用いてSiナノ粒子を製造すると、粉砕時間によりその粒径を制御できるため、容易に所望の粒径のSiナノ粒子を得ることができる。以下、上記の各粒径のSiナノ粒子を製造する際には、上記の各粉砕時間を用いた。   As shown in FIG. 3, the particle size of the Si nanoparticles became smaller as the pulverization time was increased. Specifically, when the pulverization time was 30 minutes, 90 minutes, 165 minutes, and 180 minutes, the particle diameters of the Si nanoparticles were 2000 nm, 700 nm, 500 nm, and 300 nm, respectively. When the pulverization time was 180 minutes and the supernatant of the solution obtained at that time was collected, the particle size of the Si nanoparticles dispersed in the supernatant was 240 nm (open diamonds in the figure) ). As described above, when the Si nanoparticles are produced by using the ball milling method, the particle size can be controlled by the pulverization time, so that Si nanoparticles having a desired particle size can be easily obtained. Hereinafter, when the Si nanoparticles having the above-mentioned particle sizes were produced, the above-described pulverization times were used.

次に、上記ボールミリング法によって製造したSiナノ粒子が分散しているメタノール溶液をITOガラスの表面に塗布し、その後、それを乾燥した。これにより、ITOガラスからなる基板の上にSiナノ粒子からなるSiナノ粒子層が形成された発光増強基板を製造した。   Next, a methanol solution in which Si nanoparticles produced by the ball milling method were dispersed was applied to the surface of ITO glass, and then dried. As a result, a light emission enhancing substrate in which a Si nanoparticle layer made of Si nanoparticles was formed on a substrate made of ITO glass was manufactured.

続いて、この発光増強基板の表面状態をSEMを用いて観察した。その結果を図4に示す。なお、ここでは、粉砕時間を165分にして製造された粒径が500nm程度のSiナノ粒子を有する発光増強基板を観察した。   Subsequently, the surface state of the light emission enhancement substrate was observed using SEM. The result is shown in FIG. Here, the emission enhancing substrate having Si nanoparticles having a particle size of about 500 nm manufactured with a pulverization time of 165 minutes was observed.

図4に示すように、発光増強基板の表面に、Siナノ粒子が配設されていることが観察できた。なお、Siナノ粒子は、基板の表面の全面を覆ってはおらず、Siナノ粒子同士の間に間隙がある部分も観察された。また、Siナノ粒子の形状は、球形等ではなく、それぞれ規則的な形状を示してはいなかった。   As shown in FIG. 4, it was observed that Si nanoparticles were disposed on the surface of the light emission enhancing substrate. Note that the Si nanoparticles did not cover the entire surface of the substrate, and a portion having a gap between the Si nanoparticles was also observed. Further, the shape of the Si nanoparticles was not spherical or the like, and each did not show a regular shape.

次に、上記のように製造した発光増強基板におけるSiナノ粒子の粒径と発光体の発光の増強度との関係を検討した。   Next, the relationship between the particle size of the Si nanoparticles in the light emission enhancement substrate manufactured as described above and the enhancement of light emission of the light emitter was examined.

本実施例では、発光体として有機色素分子であるクリスタルバイオレット(CV)を用い、濃度が10−3MのCV溶液(溶媒はメタノール)を調製した。この調製したCV溶液をステンレス製の薄層セル上に置いた発光増強基板の上に満たした後に、発光増強基板の上にカバーガラスを置き、CVの蛍光スペクトルを測定した。なお、このとき用いた発光増強基板のSiナノ粒子の粒径は500nmである。また、その対照として発光増強基板を用いずに蛍光スペクトルを測定した。このとき、ITOガラス基板の上にナノ粒子層を設けていないこと以外は発光強度基板を用いた場合と同一の条件で測定している。 In this example, crystal violet (CV), which is an organic dye molecule, was used as a light emitter, and a CV solution having a concentration of 10 −3 M (solvent was methanol) was prepared. After the prepared CV solution was filled on a light emission enhancing substrate placed on a thin layer cell made of stainless steel, a cover glass was placed on the light emission enhancing substrate, and the fluorescence spectrum of CV was measured. Note that the particle size of the Si nanoparticles of the light emission enhancing substrate used at this time is 500 nm. As a control, a fluorescence spectrum was measured without using a light emission enhancing substrate. At this time, the measurement is performed under the same conditions as in the case of using the emission intensity substrate except that the nanoparticle layer is not provided on the ITO glass substrate.

さらに、これらの測定を、上記の各粒径(240nm、300nm、500nm、700nm及び2000nm)のSiナノ粒子を有する発光増強基板を用いて行い、それぞれの粒径の場合におけるCVの発光の増強度を算出した。具体的に、発光増強基板を用いた場合の発光強度の値を、発光増強基板を用いていない場合の発光強度の値で割った値を増強度として示している。なお、蛍光スペクトルは、共焦点顕微分光装置(LabRAM HR-800、HORIBA Jobin Yvon社製)を用いて測定した。また、励起光は波長が633nmのHe−Neレーザを用い、対物レンズは100倍(N.A.=0.6、SLMPLN100x、オリンパス社製)を用いた。   Furthermore, these measurements were performed using a light emission enhancing substrate having Si nanoparticles with each of the above particle sizes (240 nm, 300 nm, 500 nm, 700 nm and 2000 nm), and the enhancement of CV emission at each particle size. Was calculated. Specifically, the value obtained by dividing the value of the emission intensity when the emission enhancement substrate is used by the value of the emission intensity when the emission enhancement substrate is not used is shown as the enhancement intensity. The fluorescence spectrum was measured using a confocal microspectroscope (LabRAM HR-800, manufactured by HORIBA Jobin Yvon). The excitation light used was a He—Ne laser having a wavelength of 633 nm, and the objective lens was 100 times (NA = 0.6, SLMPLN100x, manufactured by Olympus).

以上のようにして測定した結果について図5(a)〜(c)を参照しながら説明する。図5(a)は、粒径が500nmのSiナノ粒子が配設された発光増強基板を用いた場合のCVの蛍光スペクトルと、発光増強基板を用いずに測定したCVの蛍光スペクトルとを示している。なお、発光強度基板を用いずに測定した光強度は、極めて小さく図中に示すことが困難であったため、得られた値を300倍にして示している。図5(b)は、(a)における発光増強基板を用いた場合のCVの各波長の発光の増強度を示すグラフであり。図5(c)は、粒径が240nm、300nm、500nm、700nm及び2000nmのSiナノ粒子がそれぞれ配設された発光増強基板を用いた場合の、CVの発光(波長が633nm)の増強度を示したグラフである。   The results measured as described above will be described with reference to FIGS. FIG. 5A shows a CV fluorescence spectrum in the case of using a light emission enhancement substrate on which Si nanoparticles having a particle size of 500 nm are arranged, and a CV fluorescence spectrum measured without using the light emission enhancement substrate. ing. In addition, since the light intensity measured without using the light emission intensity substrate was extremely small and difficult to show in the figure, the obtained value is shown by 300 times. FIG.5 (b) is a graph which shows the increase | augmentation intensity | strength of light emission of each wavelength of CV at the time of using the light emission enhancing substrate in (a). FIG. 5 (c) shows the enhancement of CV emission (wavelength is 633 nm) when using an emission enhancement substrate on which Si nanoparticles having a particle size of 240 nm, 300 nm, 500 nm, 700 nm, and 2000 nm are respectively disposed. It is the shown graph.

図5(a)及び(b)に示すように、発光増強基板を用いると、CVの発光強度が顕著に増強した。具体的に、粒径が500nmのSiナノ粒子を有する発光増強基板を用いると、波長によってはCVの発光を最大で約2400倍にまで増強できた。また、各粒径のSiナノ粒子における波長が633nmの光の増強度を比較すると、図5(c)に示すように、発光増強基板のSiナノ粒子の粒径が240nm以上2000nm以下の範囲では、どの粒径であってもCVの発光強度を増強できた。中でも粒径が500nmの場合が最もCVの発光強度を増強し、約2000倍の増強度を示した。なお、上記範囲の粒径で最も増強度が小さかった2000nmの粒径のものを用いても、約165倍の増強度を確認できた。   As shown in FIGS. 5A and 5B, when the light emission enhancing substrate was used, the light emission intensity of CV was remarkably enhanced. Specifically, when a light emission enhancing substrate having Si nanoparticles having a particle size of 500 nm was used, CV light emission could be enhanced up to about 2400 times depending on the wavelength. In addition, when comparing the intensity of light having a wavelength of 633 nm in Si nanoparticles of each particle size, as shown in FIG. 5C, the particle size of the Si nanoparticles of the light emission enhancing substrate is in the range of 240 nm to 2000 nm. The emission intensity of CV could be enhanced at any particle size. In particular, when the particle diameter was 500 nm, the emission intensity of CV was enhanced most, and the intensity increased about 2000 times. In addition, even when the grain size of 2000 nm, which had the smallest enhancement in the above range, was used, it was confirmed that the enhancement was about 165 times.

次に、電子を強制振動することにより強いレイリー散乱が観察できるため、これを利用して、上記のような発光強度の増強効果がSiナノ粒子上の散乱光を生み出す局在電場によるのか検討するために、各粒径(240nm、300nm、500nm、700nm及び2000nm)のSiナノ粒子の散乱強度を測定した。図6(a)は、各粒径のSiナノ粒子の散乱スペクトルを示し、図6(b)は、波長が633nmの光に対する上記の各粒径の散乱強度を示すグラフである。なお、散乱スペクトルは、上記蛍光スペクトルの測定と同一の装置を用い、ハロゲン光源ユニット(KL1500LCD、Carl Zeiss社製)によってリング状白色光を対物レンズの周囲に照射し、暗視野顕微鏡を用いて測定した。   Next, since strong Rayleigh scattering can be observed by forcibly oscillating electrons, whether or not the enhancement effect of the emission intensity as described above is due to the localized electric field that generates scattered light on the Si nanoparticles is examined. Therefore, the scattering intensity of Si nanoparticles with each particle size (240 nm, 300 nm, 500 nm, 700 nm, and 2000 nm) was measured. FIG. 6A shows a scattering spectrum of Si nanoparticles having each particle diameter, and FIG. 6B is a graph showing the scattering intensity of each particle diameter with respect to light having a wavelength of 633 nm. The scattering spectrum was measured using a dark field microscope using the same device as the above fluorescence spectrum measurement, irradiating a ring-shaped white light around the objective lens with a halogen light source unit (KL1500LCD, manufactured by Carl Zeiss). did.

図6(a)に示すように、Siナノ粒子は、その粒径毎に異なる散乱スペクトルを示した。各粒径において、散乱強度がピークとなる光の波長も異なることがわかる。また、波長が633nmの光に対する散乱強度を各粒径で比較すると、図6(b)に示すように、粒径が500nmが最大で、それより大きくなる又は小さくなるに従って、散乱強度が小さくなった。これは、上記発光の増強度とも相関し、Siナノ粒子による発光強度の増強は、Siナノ粒子が光照射を受けて生じた局在電場によるものであると示唆された。   As shown to Fig.6 (a), Si nanoparticle showed the scattering spectrum which changes for every particle size. It can be seen that the wavelength of light at which the scattering intensity reaches a peak is different for each particle size. Further, when the scattering intensity for light having a wavelength of 633 nm is compared with each particle diameter, as shown in FIG. 6B, the scattering intensity decreases as the particle diameter becomes 500 nm at the maximum and becomes larger or smaller. It was. This correlates with the increase in the emission intensity, suggesting that the enhancement of the emission intensity by the Si nanoparticles is due to the local electric field generated when the Si nanoparticles are irradiated with light.

本発明は、発光体から発する光の強度を増強でき、目的とする物質を検出するために蛍光を利用するバイオセンサ、及び有機ELディスプレイ又はLED照明等に用いられる発光素子等に利用可能である。   INDUSTRIAL APPLICABILITY The present invention can increase the intensity of light emitted from a light emitter, and can be used for a biosensor that uses fluorescence to detect a target substance, and a light-emitting element used in an organic EL display or LED illumination. .

1 発光増強基板
2 基板
3 (Si)ナノ粒子
4 ナノ粒子層
10 発光素子
11 透明基板
12 陽極
13 正孔輸送層
14 発光層
14a p型有機半導体層
14b n型有機半導体層
15 電子輸送層
16 陰極
DESCRIPTION OF SYMBOLS 1 Luminescence enhancement board | substrate 2 Substrate 3 (Si) nanoparticle 4 Nanoparticle layer 10 Light emitting element 11 Transparent substrate 12 Anode 13 Hole transport layer 14 Light emitting layer 14a p-type organic semiconductor layer 14b n-type organic semiconductor layer 15 Electron transport layer 16 Cathode

Claims (5)

発光体の発光強度を増強するために用いられる発光増強基板であって、
基板と、
前記基板の表面に配設され、シリコンからなる複数のナノ粒子により構成されたナノ粒子層とを備え、
前記ナノ粒子層は、光が照射されることによって局在電場を発生することを特徴とする発光増強基板。
A light emission enhancing substrate used to enhance the light emission intensity of a light emitter,
A substrate,
A nanoparticle layer disposed on the surface of the substrate and composed of a plurality of nanoparticles made of silicon;
The emission enhancement substrate, wherein the nanoparticle layer generates a localized electric field when irradiated with light.
前記ナノ粒子層は、金属を含まないことを特徴とする請求項1に記載の発光増強基板。   The light emission enhancement substrate according to claim 1, wherein the nanoparticle layer does not contain a metal. 前記ナノ粒子は、その粒径が240nm以上2000nm以下であることを特徴とする請求項1又は2に記載の発光増強基板。   The emission enhancement substrate according to claim 1 or 2, wherein the nanoparticles have a particle size of 240 nm or more and 2000 nm or less. 前記ナノ粒子は、ボールミリング法により形成されていることを特徴とする請求項1〜3のいずれか1項に記載の発光増強基板。   The emission enhancement substrate according to any one of claims 1 to 3, wherein the nanoparticles are formed by a ball milling method. 透明基板と、該透明基板の上に形成された陽極と、該陽極の上に形成された正孔輸送層と、該正孔輸送層の上に形成された発光層と、該発光層の上に形成された電子輸送層と、該電子輸送層の上に形成された陰極とを備えた発光素子であって、
前記発光層と前記正孔輸送層との間には、シリコンからなる複数のナノ粒子により構成されたナノ粒子層が設けられていることを特徴とする発光素子。
A transparent substrate; an anode formed on the transparent substrate; a hole transport layer formed on the anode; a light emitting layer formed on the hole transport layer; A light emitting device comprising: an electron transport layer formed on the cathode; and a cathode formed on the electron transport layer,
Between the said light emitting layer and the said positive hole transport layer, the nanoparticle layer comprised by the several nanoparticle which consists of silicon is provided, The light emitting element characterized by the above-mentioned.
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JP2018190597A (en) * 2017-05-08 2018-11-29 国立大学法人広島大学 Electric field enhancement board

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JP2006143861A (en) * 2004-11-18 2006-06-08 Stanley Electric Co Ltd Luminescent material
JP2011213848A (en) * 2010-03-31 2011-10-27 Hiroshima Univ Method for producing nanoparticle, method for producing light-emitting powder using the same, and light-emitting element using the light-emitting powder produced by the method for producing light-emitting powder
WO2013157563A1 (en) * 2012-04-20 2013-10-24 コニカミノルタ株式会社 Organic electroluminescence element

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Publication number Priority date Publication date Assignee Title
JP2006143861A (en) * 2004-11-18 2006-06-08 Stanley Electric Co Ltd Luminescent material
JP2011213848A (en) * 2010-03-31 2011-10-27 Hiroshima Univ Method for producing nanoparticle, method for producing light-emitting powder using the same, and light-emitting element using the light-emitting powder produced by the method for producing light-emitting powder
WO2013157563A1 (en) * 2012-04-20 2013-10-24 コニカミノルタ株式会社 Organic electroluminescence element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018190597A (en) * 2017-05-08 2018-11-29 国立大学法人広島大学 Electric field enhancement board

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