JP2014022567A - 半導体レーザモジュール - Google Patents
半導体レーザモジュール Download PDFInfo
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- JP2014022567A JP2014022567A JP2012159864A JP2012159864A JP2014022567A JP 2014022567 A JP2014022567 A JP 2014022567A JP 2012159864 A JP2012159864 A JP 2012159864A JP 2012159864 A JP2012159864 A JP 2012159864A JP 2014022567 A JP2014022567 A JP 2014022567A
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- semiconductor laser
- laser module
- heat
- heat conduction
- cooling element
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 85
- 239000000463 material Substances 0.000 claims abstract description 22
- 238000001816 cooling Methods 0.000 claims abstract description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 7
- 229910000833 kovar Inorganic materials 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 abstract description 10
- 238000001307 laser spectroscopy Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000013307 optical fiber Substances 0.000 description 7
- 238000010408 sweeping Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 5
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004611 spectroscopical analysis Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000000883 frequency modulation spectroscopy Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- 230000001629 suppression Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
【解決手段】本発明に係る半導体レーザモジュールは、半導体レーザチップ、ヒートシンク、及びサブマウントから成る半導体レーザキャリアと、電子冷却素子とから構成された半導体レーザモジュールであって、前記半導体レーザモジュールは、前記サブマウントと前記電子冷却素子との間に熱伝導調整板を更に備え、前記熱伝導調整板の材料の熱伝導率は、前記サブマウントの材料の熱伝導率よりも低いことを特徴とする。
【選択図】図3
Description
図3は、本発明に係る半導体レーザモジュールの部分を示す概略断面図である。
上記の(第1の実施形態)で説明した半導体レーザキャリアの部分を具備するような半導体レーザモジュールとしては、光ファイバ出力の半導体レーザモジュールが考えられる。
上記の(第1の実施形態)で説明した半導体レーザキャリアの部分を具備するような半導体レーザモジュールとしては、空間放射型の半導体レーザモジュールも考えられる。
2 ヒートシンク
3 サブマウント
4 電子冷却素子
5 レーザ光源
6 レーザ光
7 被検査物
8 光検出器
9 熱伝導調整板
10 パッケージ
11 サーミスタ
12 モニタPD
13 レンズ
14 アイソレータ
15 光ファイバ
16 窓
17 キャップ
18 ピン
Claims (3)
- 半導体レーザチップ、ヒートシンク、サブマウントから成る半導体レーザキャリアと、
電子冷却素子と
から構成された半導体レーザモジュールであって、
前記半導体レーザモジュールは、前記サブマウントと、前記電子冷却素子との間に熱伝導調整板を更に備え、
前記熱伝導調整板の材料の熱伝導率は、前記サブマウントの材料の熱伝導率よりも低いことを特徴とする半導体レーザモジュール。 - 前記熱伝導調整板は、アルミナ又はコバールを主原料とする材料から成ることを特徴とする請求項1に記載の半導体レーザモジュール。
- 前記半導体レーザチップは、InP系のDFBレーザチップであることを特徴とする請求項1又は2に記載の半導体レーザモジュール。
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JP2012159864A JP5858879B2 (ja) | 2012-07-18 | 2012-07-18 | 半導体レーザモジュール |
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JP2012159864A JP5858879B2 (ja) | 2012-07-18 | 2012-07-18 | 半導体レーザモジュール |
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JP2014022567A true JP2014022567A (ja) | 2014-02-03 |
JP5858879B2 JP5858879B2 (ja) | 2016-02-10 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018163926A (ja) * | 2017-03-24 | 2018-10-18 | 日本オクラロ株式会社 | 光送信モジュール、光モジュール、及び光伝送装置、並びにそれらの製造方法 |
KR102412054B1 (ko) | 2020-12-16 | 2022-06-22 | 재단법인 포항산업과학연구원 | 단일의 광 경로를 가지는 광 조사 모듈 및 이를 포함한 가스 분석 장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0786694A (ja) * | 1993-09-16 | 1995-03-31 | Toshiba Corp | 光伝送装置 |
JPH07111354A (ja) * | 1993-10-12 | 1995-04-25 | Nippon Telegr & Teleph Corp <Ntt> | 半導体レーザの駆動装置 |
JPH10200208A (ja) * | 1997-01-09 | 1998-07-31 | Nec Corp | 半導体レーザーモジュール |
-
2012
- 2012-07-18 JP JP2012159864A patent/JP5858879B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0786694A (ja) * | 1993-09-16 | 1995-03-31 | Toshiba Corp | 光伝送装置 |
JPH07111354A (ja) * | 1993-10-12 | 1995-04-25 | Nippon Telegr & Teleph Corp <Ntt> | 半導体レーザの駆動装置 |
JPH10200208A (ja) * | 1997-01-09 | 1998-07-31 | Nec Corp | 半導体レーザーモジュール |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018163926A (ja) * | 2017-03-24 | 2018-10-18 | 日本オクラロ株式会社 | 光送信モジュール、光モジュール、及び光伝送装置、並びにそれらの製造方法 |
US11081858B2 (en) | 2017-03-24 | 2021-08-03 | Lumentum Japan, Inc. | Optical transmitter module, optical module, optical transmission equipment and method of manufacturing thereof |
JP7022513B2 (ja) | 2017-03-24 | 2022-02-18 | 日本ルメンタム株式会社 | 光送信モジュール、光モジュール、及び光伝送装置、並びにそれらの製造方法 |
KR102412054B1 (ko) | 2020-12-16 | 2022-06-22 | 재단법인 포항산업과학연구원 | 단일의 광 경로를 가지는 광 조사 모듈 및 이를 포함한 가스 분석 장치 |
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