JP2014018904A - Support system for processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a support system for a processing device, which can support a person using the processing device without dispatching a technician into the field.SOLUTION: A support system for a processing device comprises: a data setting section for setting processing condition; a controlling section for controlling processing on the basis of the processing condition set by the data setting section; a memory for automatically storing data set by the data setting section and operation history of the processing device; a server connected to the processing device through a communication line; a terminal device connected to the server; and communication means for transmitting the processing condition housed in the memory and the operation history to the server through the communication line. The communication means automatically transmits the processing condition and the operation history stored in the memory through the communication line to the server at every predetermined time. The terminal device can confirm at any time the processing condition and the operation history of the processing device on the basis of the data stored in the server.

Description

  The present invention relates to a support system for a processing apparatus such as a cutting apparatus or a grinding apparatus.

  In the manufacturing process of semiconductor devices and electronic components, a plate-shaped workpiece made of various materials such as semiconductor wafers and ceramic substrates is ground to a predetermined thickness by grinding with a grinding wheel mounted on the spindle of a grinding machine. Then, it is divided into individual device chips by a cutting blade or a laser processing device mounted on the spindle of the cutting device.

  In these processing devices, various conditions are set for the grinding wheel, cutting blade, and laser beam irradiation unit, such as rotational speed, relative movement speed with the workpiece, cutting speed or contact speed, position of various nozzles, etc. (See, for example, JP 2009-117776 A).

  These conditions are enormous, including the position of fine parts and data settings, etc. Even after delivering the processing equipment to the user who uses the processing equipment, the equipment manufacturer provides the know-how accumulated so far. Ordinarily, the user is followed in order to respond to the improvement request desired by the user.

JP 2009-117776 A

  However, in order to realize such follow-up, it is necessary to dispatch engineers from the equipment manufacturer to the factory where the processing equipment is installed, schedule adjustments with the users of the processing equipment, and the technician's travel time and costs, etc. Therefore, it is not possible to immediately follow up when needed.

  In addition, it may be understood that there is an error in the setting of the processing device or improvement can be made by just looking at the various processing conditions and operation history automatically stored by the processing device. Extracting and showing it to the engineers on the equipment manufacturer side is not a frequent response because it takes some knowledge and man-hours.

  The present invention has been made in view of these points, and an object of the present invention is to provide a support system for a processing apparatus that can support a user of the processing apparatus without dispatching an engineer to the site. That is.

  According to the present invention, there is a support system for a processing apparatus, a data setting unit that sets processing conditions, a control unit that controls processing based on the processing conditions set in the data setting unit, and a setting in the data setting unit A memory for automatically storing the recorded data and the operation history of the processing device, a server connected to the processing device via a communication line, a terminal device connected to the server, and the memory stored in the memory Communication means for transmitting the processing conditions and the operation history to the server via the communication line, and the communication means automatically transmits the processing conditions and the operation history stored in the memory every predetermined time. The processing device support system is characterized in that the processing device and the operation history of the processing device can be confirmed at any time from the data stored in the server. Temu is provided.

  According to the support system for a processing apparatus of the present invention, the processing condition data and operation history data of the processing apparatus automatically recorded in the memory are automatically stored in a server installed on the apparatus manufacturer side via a communication line at a predetermined time. Since the information is transmitted, the apparatus manufacturer can find out the problems that the processing apparatus has and the points that can be improved at an early stage, and can solve the problems without taking any effort on the apparatus user side.

It is an external appearance perspective view of a cutting device. It is a block diagram which shows the outline | summary of the support system of embodiment of this invention. It is a block diagram explaining the received data of a server.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a cutting device 2 as an example of a processing device is shown. The cutting device 2 includes a processing device main body 4 in which processing means such as a cutting unit 10 having a cutting blade is accommodated in a housing 8, and a touch panel type operation display monitor 6 attached to the housing 8 of the processing device main body 4. It is out.

  A chuck table 12 that holds a workpiece adjacent to the cutting unit 10 is disposed so as to be movable in the X-axis direction. Reference numeral 14 denotes a cassette mounting table (cassette elevator) on which a cassette 24 containing a plurality of workpieces 22 is placed, and is configured to be movable in the vertical direction.

  Reference numeral 16 denotes a display lamp that displays the operating status of the cutting device 2, which lights up in green when the cutting device is operating normally, and flashes red when some failure occurs. 18 and 20 are emergency stop buttons. When the operator presses the emergency stop buttons 18 and 20, the operation of the cutting device 2 can be immediately stopped.

  The cutting device 2 incorporates control means (controller) 30 for automatically controlling the cutting device 2 in order to perform processing based on predetermined processing conditions. As shown in the block diagram of FIG. 2, the control means 30 is constituted by a microcomputer, and a CPU (Central Processing Unit) 32 that executes arithmetic processing according to a control program, and a ROM (Read Only) that stores a control program and the like. Memory) 34, and a readable / writable RAM (random access memory) 36 for storing calculation results and the like.

  The RAM 36 stores processing condition data input by an operator (operator) through reading of a control program and processing conditions and the operation display monitor 6, and the ROM 34 and the RAM 36 function as a data setting unit 38.

  The ROM 34 stores a control program for automatically controlling the cutting unit 10 and the like based on predetermined machining conditions. In these processing conditions, data for processing such as the cutting depth of the cutting blade, the rotational speed of the cutting blade, the processing feed rate of the chuck table 12, and the default state (initial setting state) of the devices are specified. Contains data.

  The RAM 36 automatically stores operation history data of the cutting device 2. The operation history data includes data such as cutting groove kerf check data, workpiece conveyance error data, and cutting blade replacement data.

  The control unit 30 further includes a communication unit 42 for performing communication with the input / output interface 40 and the outside. The input / output interface 40 is connected to an operation display monitor 6 that functions as an input means for inputting machining conditions using a touch panel and also functions as a display means for displaying various information.

  Various drive devices such as a motor for rotating the cutting unit 10 and a motor for moving the chuck table 12 are connected to the input / output interface 40, and various drive devices are connected to the machining conditions based on the calculation results obtained by executing the control program. It is driven based on. The CPU 32 functions as a control unit that controls machining of the cutting device 2 based on various machining conditions set in the data setting unit 38.

  The communication means 42 is connected to a server 46 installed on the device manufacturer side via a communication line 44 such as an Internet line. The server 46 is connected to a terminal device 48 such as a personal computer.

  The communication means 42 is a server that is installed on the apparatus manufacturer side via the communication line 44 automatically every predetermined time with the machining conditions stored in the data setting unit 38 and the operation history of the cutting apparatus 2 recorded in the RAM 36. 46. As a result, in the server 46 installed on the apparatus manufacturer side, as shown in FIG. 3, the machining conditions and operation history of the cutting apparatus 2 are accumulated in a time series every predetermined time.

  Therefore, an engineer on the device manufacturer side can check the machining conditions and operation history of the cutting device 2 during the period to be checked by operating the terminal device 48 and accessing the server 46 at any time.

  Thereby, the problem which the cutting device 2 has, and the point which can be improved can be discovered at an early stage, and a problem can be solved, without spending the man-hour of the user side of the cutting device 2 at all.

  In the above-described embodiment, an example in which the support system of the present invention is applied to a cutting apparatus has been described. However, the support system of the present invention is also applicable to the support of other processing apparatuses such as a grinding apparatus, a polishing apparatus, and a laser processing apparatus. Can be applied.

2 Cutting device 6 Operation display monitor 10 Cutting unit 12 Chuck table 30 Control means (controller)
32 CPU
38 data setting unit 40 input / output interface 42 communication means 44 communication line 46 server 48 terminal device

Claims (1)

A support system for processing equipment,
A data setting section for setting machining conditions;
A control unit that controls processing based on the processing conditions set in the data setting unit;
A memory for automatically storing the data set in the data setting unit and the operation history of the machining apparatus;
A server connected to the processing device via a communication line;
A terminal device connected to the server;
Communication means for transmitting the processing conditions and the operation history stored in the memory to the server via the communication line,
The communication means automatically transmits the processing conditions and operation history stored in the memory every predetermined time to the server via a communication line,
The processing device support system, wherein the terminal device can confirm the machining conditions and the operation history of the machining device from the data stored in the server as needed.

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