JP2014016268A - Gas sensor - Google Patents

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JP2014016268A
JP2014016268A JP2012154546A JP2012154546A JP2014016268A JP 2014016268 A JP2014016268 A JP 2014016268A JP 2012154546 A JP2012154546 A JP 2012154546A JP 2012154546 A JP2012154546 A JP 2012154546A JP 2014016268 A JP2014016268 A JP 2014016268A
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light receiving
light
gas sensor
infrared
receiving unit
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JP5985909B2 (en
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Seiichi Tokuo
聖一 徳尾
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Asahi Kasei Electronics Co Ltd
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Asahi Kasei Electronics Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a gas sensor which can achieve the reduction in noise without the increase in size.SOLUTION: In a gas sensor, a light emission part, a light reception part, and a signal processor are arranged on one substrate. The light emission part and the light reception part are arranged in a manner to face each other. The signal processor is arranged between the light emission part and the light reception part which are arranged in a manner to face each other.

Description

本発明はガスセンサに関する。より詳細には、赤外線を用いたガスセンサに関する。   The present invention relates to a gas sensor. More specifically, the present invention relates to a gas sensor using infrared rays.

赤外線を用いたガスセンサとしては、特許文献１に記載の様なガスセンサが知られている。赤外線光源から発生られた光が、測定対象のガスが導入されるセルを通過し、その後、光学特性が異なるフィルタを通過した光が赤外線検出センサに入光し、赤外線検出センサの出力信号に応じて測定対象のガスの有無や濃度を検出している。   As a gas sensor using infrared rays, a gas sensor as described in Patent Document 1 is known. The light generated from the infrared light source passes through the cell into which the gas to be measured is introduced, and then the light that has passed through the filter having different optical characteristics enters the infrared detection sensor and depends on the output signal of the infrared detection sensor. The presence or concentration of the gas to be measured is detected.

特開平０８−７５６４２号公報Japanese Patent Application Laid-Open No. 08-75642

特許文献１に記載されているような従来のガスセンサでは、赤外線光源等の発光部と赤外線検出センサ等の受光部とが対向して配置されることは開示されているが、受光部からの信号を処理するための信号処理回路等の信号処理部は、ガスセンサの外部に配置する形態であった。   In the conventional gas sensor as described in Patent Document 1, it is disclosed that a light emitting unit such as an infrared light source and a light receiving unit such as an infrared detection sensor are disposed to face each other. The signal processing unit such as a signal processing circuit for processing the gas sensor is arranged outside the gas sensor.

このようにガスセンサの外部に信号処理部を配置すると、装置全体が大型化や、信号伝達時にノイズが増大するという弊害が生じ得る。   If the signal processing unit is arranged outside the gas sensor in this way, the entire apparatus may be enlarged, and noise may increase during signal transmission.

すなわち、本発明は、装置を大型化せずにかつノイズを低減させることが可能なガスセンサを提供することを目的とする。   That is, an object of the present invention is to provide a gas sensor capable of reducing noise without increasing the size of the apparatus.

本発明者らは上記課題を解決するために鋭意検討した結果、赤外線を含む光を発光する発光部と、受光した赤外線を含む光に応じて光電変換をする受光部と、前記受光部からの電気信号が入力される信号処理部と、を備えるガスセンサであって、前記発光部、受光部、および信号処理部は一つの基板上に配置され、前記発光部と前記受光部とは、対向配置され、前記信号処理部は、対向して配置される発光部と受光部の間に配置されることを特徴とするガスセンサにより、上記課題を解決できることを見出し、本発明を完成させた。   As a result of intensive studies to solve the above problems, the present inventors have found that a light emitting unit that emits light including infrared light, a light receiving unit that performs photoelectric conversion according to light including received infrared light, A signal processing unit to which an electric signal is input, wherein the light emitting unit, the light receiving unit, and the signal processing unit are disposed on a single substrate, and the light emitting unit and the light receiving unit are disposed to face each other. And the said signal processing part discovered that the said subject could be solved with the gas sensor characterized by being arrange | positioned between the light emission part and light-receiving part which are arrange | positioned facing, and completed this invention.

また、本発明のガスセンサの信号処理部は、更に前記発光部の光量を制御するための信号を出力することを特徴とする。   In addition, the signal processing unit of the gas sensor of the present invention further outputs a signal for controlling the light quantity of the light emitting unit.

また、本発明のガスセンサの受光部は、１つの受光部からなることを特徴とする。   Moreover, the light receiving part of the gas sensor of the present invention is characterized by comprising one light receiving part.

また、本発明のガスセンサの受光部は、１つの受光部からなり、該受光部は、測定対象となるガスに対応する赤外線波長を通過させる赤外線透過特性を有する光学部材を備えることを特徴とする。   Further, the light receiving part of the gas sensor of the present invention comprises a single light receiving part, and the light receiving part includes an optical member having an infrared transmission characteristic that transmits an infrared wavelength corresponding to a gas to be measured. .

また、本発明のガスセンサの受光部は、２つの受光部からなり、該２つの受光部は、それぞれ異なる波長感度であることを特徴とする。   Moreover, the light receiving part of the gas sensor of the present invention comprises two light receiving parts, and the two light receiving parts have different wavelength sensitivities.

また、本発明のガスセンサの受光部は、２つの受光部からなり、該２つの受光部は、それぞれ異なる赤外線透過特性を有する光学部材を備えることを特徴とする。   The light receiving part of the gas sensor according to the present invention includes two light receiving parts, and the two light receiving parts include optical members having different infrared transmission characteristics.

また、本発明のガスセンサは、基板を覆うようにカバー部材を備え、該カバー部材が少なくとも一つの貫通孔を有することを特徴とする。   Moreover, the gas sensor of the present invention includes a cover member so as to cover the substrate, and the cover member has at least one through hole.

本発明によれば、装置を大型化せずにかつノイズを低減させることが可能なガスセンサを提供することが可能になる。   ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the gas sensor which can reduce a noise, without enlarging an apparatus.

本発明の第一の実施形態のガスセンサの断面図である。It is sectional drawing of the gas sensor of 1st embodiment of this invention. 本発明の第一の実施形態のガスセンサの上面図である。It is a top view of the gas sensor of a first embodiment of the present invention. 本発明の第二の実施形態のガスセンサの上面図である。It is a top view of the gas sensor of 2nd embodiment of this invention.

以下、本発明のガスセンサの実施形態を、図面を参照しながら説明する。   Hereinafter, embodiments of the gas sensor of the present invention will be described with reference to the drawings.

［ガスセンサ］
図１は本発明の第一の実施形態のガスセンサの断面図であり、図２は本発明の第一の実施形態のガスセンサの上面図（ただし、カバー部材は図示せず）である。 [Gas sensor]
FIG. 1 is a cross-sectional view of a gas sensor according to a first embodiment of the present invention, and FIG. 2 is a top view (however, a cover member is not shown) of the gas sensor according to the first embodiment of the present invention.

図１のガスセンサは、発光部１１０と、受光部１２０と、信号処理部１３０と基板１４０と、カバー部材１５０とを備えている。   The gas sensor shown in FIG. 1 includes a light emitting unit 110, a light receiving unit 120, a signal processing unit 130, a substrate 140, and a cover member 150.

発光部１１０は、赤外線を含む光を発光するものであれば特に制限されない。一例としては、赤外線発光素子や、電球などが挙げられるがこの限りではない。   The light emitting unit 110 is not particularly limited as long as it emits light including infrared rays. Examples include, but are not limited to, an infrared light emitting element and a light bulb.

受光部１２０は、赤外線を含む光を受光すると、その光に応じて出力電圧や電流を変化させる等により受光部から出力する電気信号を変化させるものであれば特に制限されない。一例としては、フォトトランジスタやフォトダイオードなどの量子型赤外線センサや、焦電センサやサーモパイルなどの熱型赤外線センサが挙げられる。   The light receiving unit 120 is not particularly limited as long as it receives light including infrared rays and changes an electric signal output from the light receiving unit by changing an output voltage or current according to the light. Examples include quantum infrared sensors such as phototransistors and photodiodes, and thermal infrared sensors such as pyroelectric sensors and thermopiles.

信号処理部１３０は、受光部から電気信号が入力され、所望の信号処理を行うことが可能なものであれば特に制限されない。信号処理部で行われる信号処理の具体例としては、発光部の光源の駆動信号を変化させるための光量制御信号を生成する信号処理や、発光部と受光部の間に設けられるスリットを制御して光量を制御するための光量制御信号を生成する信号処理や、アンプ等による入力信号の信号増幅や、入力信号の加減算処理や、入力信号に応じたガスの有無判定や、入力信号に応じたガス濃度演算などが挙げられる。   The signal processing unit 130 is not particularly limited as long as an electrical signal is input from the light receiving unit and can perform desired signal processing. Specific examples of signal processing performed by the signal processing unit include signal processing for generating a light amount control signal for changing the driving signal of the light source of the light emitting unit, and a slit provided between the light emitting unit and the light receiving unit. Signal processing to generate a light control signal for controlling the amount of light, signal amplification of the input signal by an amplifier, addition / subtraction processing of the input signal, gas presence / absence determination according to the input signal, and according to the input signal Gas concentration calculation etc. are mentioned.

基板１４０は、発光部１１０、受光部１２０、信号処理部１３０を配置することが可能なものであれば特に制限されない。基板１４０の具体例としては、プリント基板や配線基板、サーキットボード、半導体基板、リードフレームなどが挙げられる。発光部１１０、受光部１２０、信号処理部１３０を表面実装することが可能な基板であることが好ましい。また、基板１４０には、処理した信号を出力するための出力端子を設けることができる。出力端子は、一般的には、基板１４０の発行部１２０等を取り付ける面の反対の面に取り付けられることが多いが、端子を設ける位置は、特に限定されるものではない。   The substrate 140 is not particularly limited as long as the light emitting unit 110, the light receiving unit 120, and the signal processing unit 130 can be disposed. Specific examples of the substrate 140 include a printed board, a wiring board, a circuit board, a semiconductor substrate, and a lead frame. A substrate on which the light emitting unit 110, the light receiving unit 120, and the signal processing unit 130 can be mounted on the surface is preferable. The substrate 140 can be provided with an output terminal for outputting a processed signal. In general, the output terminal is often attached to a surface opposite to the surface to which the issuing unit 120 or the like of the substrate 140 is attached, but the position where the terminal is provided is not particularly limited.

カバー部材１５０は、前記基板を覆うように配置されるものであれば特に制限されない。カバー部材の材質の一例としては、樹脂や金属を成形して得られる部材が挙げられる。また、カバー部材１５０を備える場合は、被検知対象のガスを発光部１１０と受光部１２０の間の空間に導入するための貫通孔１５１を備えていてもよい。貫通孔１５１は、本発明のガスセンサがガスの検知を容易にするために、受光部の受光面に直接ガスが入るような位置にあるのがよい。具体的にはカバー部材の上面中央部、さらに好ましくは、受光部の受光面に直接ガスが入るように発行部と受光部の間の受光部寄りの位置に配置するのがよい。一方で、貫通孔１５１以外の部分から、ガスセンサ内にガスを導入する場合は、貫通孔１５１を備えている必要はない。また、発光光を効率よく受光部へ届けるために、カバー部材１５０を光反射効率の高い材料を用いるか、カバー部材１５０の内部または全体の表面を光反射効処理しても良い。   The cover member 150 is not particularly limited as long as it is disposed so as to cover the substrate. An example of the material of the cover member is a member obtained by molding a resin or metal. Further, when the cover member 150 is provided, a through-hole 151 for introducing the gas to be detected into the space between the light emitting unit 110 and the light receiving unit 120 may be provided. The through hole 151 is preferably located at a position where the gas directly enters the light receiving surface of the light receiving unit so that the gas sensor of the present invention can easily detect the gas. Specifically, it is preferable that the cover member is disposed at a position near the light receiving part between the issuing part and the light receiving part so that the gas directly enters the center of the upper surface of the cover member, more preferably the light receiving surface of the light receiving part. On the other hand, when gas is introduced into the gas sensor from a portion other than the through-hole 151, the through-hole 151 does not need to be provided. Further, in order to efficiently deliver the emitted light to the light receiving unit, the cover member 150 may be made of a material having a high light reflection efficiency, or the inside or the entire surface of the cover member 150 may be subjected to a light reflection effect treatment.

発光部１１０、受光部１２０、および信号処理部１３０は基板１４０上に配置されている。発光部１１０と受光部１２０はその発光面と受光面が対向するように配置されている。信号処理部１３０は発光部１１０と受光部１２０の間に配置されている。このような配置を取ることにより、装置を大型化せずに、かつ、受光部からの信号が外部に出ることなく信号処理部に入力されるので、ノイズを低減することを可能にする。   The light emitting unit 110, the light receiving unit 120, and the signal processing unit 130 are disposed on the substrate 140. The light emitting unit 110 and the light receiving unit 120 are arranged so that the light emitting surface and the light receiving surface face each other. The signal processing unit 130 is disposed between the light emitting unit 110 and the light receiving unit 120. By adopting such an arrangement, it is possible to reduce noise since the signal from the light receiving unit is input to the signal processing unit without increasing the size of the apparatus and without going outside.

受光部１２０は、赤外線センサ１２１と、光学部材１２３を備えており、１つの受光部を形成している。光学部材１２３は赤外線センサ１２１の受光面側に配置され、測定対象となるガスに対応する赤外線波長のみを通過させる赤外線透過特性を有している。具体的には、測定対象となるガス成分により吸収される赤外線波長のみを透過させるように波長帯域が設定されている。   The light receiving unit 120 includes an infrared sensor 121 and an optical member 123, and forms one light receiving unit. The optical member 123 is disposed on the light receiving surface side of the infrared sensor 121 and has an infrared transmission characteristic that allows only the infrared wavelength corresponding to the gas to be measured to pass. Specifically, the wavelength band is set so that only the infrared wavelength absorbed by the gas component to be measured is transmitted.

測定対象となるガスが、ガスセンサに入ると、発光部１１０が発光した赤外線の光学部材１２３が透過する赤外線波長がガスにより吸収される。ガスにより吸収された赤外線の残りは、赤外線センサ１２１により検出される。ここで、赤外線の光量は、ガスの濃度によって変化する。したがって、ガスセンサに測定対称のガスが入ると、赤外線センサ１２１により検出される赤外線の光量が変化し、検出した光量の変化を信号処理部１３０において判定等することにより、ガスの検知を行なう。   When the gas to be measured enters the gas sensor, the infrared wavelength transmitted by the infrared optical member 123 emitted from the light emitting unit 110 is absorbed by the gas. The remaining infrared light absorbed by the gas is detected by the infrared sensor 121. Here, the amount of infrared light varies depending on the gas concentration. Therefore, when a measurement-symmetric gas enters the gas sensor, the amount of infrared light detected by the infrared sensor 121 changes, and the change in the detected light amount is determined by the signal processing unit 130 to detect the gas.

本発明の第二の実施形態のガスセンサとして、受光部１２０を、例えば２波長を検出するような構成にすることができる。図３は第二の実施形態のガスセンサの上面図である。第一の実施形態のように、１波長のみを検出する構成にした場合には、ガスセンサ内の温度変化や干渉ガス等によっても赤外線センサが出力する信号が変化してしまい、ガスの検知に誤差が生じてしまうことがあるが、２波長を検出する構成にした場合、その誤差を少なくすることが可能である。   As the gas sensor of the second embodiment of the present invention, the light receiving unit 120 can be configured to detect, for example, two wavelengths. FIG. 3 is a top view of the gas sensor of the second embodiment. As in the first embodiment, when only one wavelength is detected, the signal output from the infrared sensor changes due to temperature change in the gas sensor, interference gas, or the like, resulting in an error in gas detection. However, when two wavelengths are detected, the error can be reduced.

この場合、赤外線センサ１２１に加え、さらにもう１つの赤外線センサ１２２を設け、また、それぞれ赤外線透過特性が異なる光学部材１２３、１２４を、各赤外線センサ１２１、１２２の受光面側に備えている。ここで、赤外線センサ１２１及び光学部材１２３と、赤外線センサ１２２及び光学部材１２４とは、それぞれが一つずつの受光部を形成している。光学部材１２３と１２４とは、それぞれ異なる赤外線透過特性を有している。具体的には、光学部材１２３は測定対象となるガスにより吸収される赤外線波長のみを透過させるように波長帯域が設定される一方で、光学部材１２４は、測定対象となるガスにより吸収されない赤外線波長帯域または干渉ガスによる吸収の強い波長帯域とする。   In this case, in addition to the infrared sensor 121, another infrared sensor 122 is provided, and optical members 123 and 124 having different infrared transmission characteristics are provided on the light receiving surface side of the infrared sensors 121 and 122, respectively. Here, the infrared sensor 121 and the optical member 123, and the infrared sensor 122 and the optical member 124 each form one light receiving portion. The optical members 123 and 124 have different infrared transmission characteristics. Specifically, the wavelength band is set so that the optical member 123 transmits only the infrared wavelength absorbed by the gas to be measured, while the optical member 124 has an infrared wavelength that is not absorbed by the gas to be measured. Use a band or a wavelength band that is strongly absorbed by interference gas.

測定対象となるガスが、ガスセンサに入ると、発光部が発光した赤外線の光学部材１２３が透過する赤外線波長がガスにより吸収される。ガスにより吸収された赤外線の残りは、赤外線センサ１２１により検出される。したがって、ガスセンサに測定対称のガスが入ると、赤外線センサ１２１により検出される赤外線の光量が変化する。一方、光学部材１２４は、ガスにより吸収さない赤外線波長帯域を用いた場合赤外線がガスにより吸収された場合でも赤外線センサ１２２が検出する赤外線の光量は変化しない、また、干渉ガスによる吸収の強い波長帯域を用いた場合干渉ガスの影響があった割合に応じて赤外線センサ１２２が検出する赤外線の光量が変化する。   When the gas to be measured enters the gas sensor, the infrared wavelength transmitted by the infrared optical member 123 emitted from the light emitting portion is absorbed by the gas. The remaining infrared light absorbed by the gas is detected by the infrared sensor 121. Therefore, when a measurement-symmetric gas enters the gas sensor, the amount of infrared light detected by the infrared sensor 121 changes. On the other hand, when the optical member 124 uses an infrared wavelength band that is not absorbed by the gas, the amount of infrared light detected by the infrared sensor 122 does not change even when the infrared light is absorbed by the gas, and the wavelength strongly absorbed by the interference gas. When the band is used, the amount of infrared light detected by the infrared sensor 122 changes according to the ratio of the influence of the interference gas.

したがって赤外線センサ１２１が検出する赤外線の光量と、赤外線センサ１２２が検出する赤外線の光量との差分を計測することにより、検出対象のガスの有無や濃度を測定することが可能になる。   Therefore, by measuring the difference between the amount of infrared light detected by the infrared sensor 121 and the amount of infrared light detected by the infrared sensor 122, it is possible to measure the presence or concentration of the gas to be detected.

本発明は、二酸化炭素等の小型のガスセンサとして好適である。   The present invention is suitable as a small gas sensor such as carbon dioxide.

１１０ 発光部
１２０ 受光部
１２１、１２２ 赤外線センサ
１２３、１２４ 光学部材
１３０ 信号処理部
１４０ 基板
１５０ カバー部材
１５１ 貫通孔 110 Light-emitting part 120 Light-receiving part 121, 122 Infrared sensor 123, 124 Optical member 130 Signal processing part 140 Substrate 150 Cover member 151 Through-hole

Claims (7)

赤外線を含む光を発光する発光部と、受光した前記発光部からの赤外線を含む光の光量に応じた電気信号を出力する受光部と、前記受光部からの電気信号が入力される信号処理部と、を備えるガスセンサであって、
前記発光部、前記受光部、および前記信号処理部は一つの基板上に配置され、
前記発光部と前記受光部とは、対向配置され、
前記信号処理部は、対向して配置される前記発光部と前記受光部の間に配置されることを特徴とするガスセンサ。 A light emitting unit that emits light including infrared light, a light receiving unit that outputs an electrical signal corresponding to the amount of light including infrared light received from the light emitting unit, and a signal processing unit that receives an electrical signal from the light receiving unit A gas sensor comprising:
The light emitting unit, the light receiving unit, and the signal processing unit are disposed on one substrate,
The light emitting unit and the light receiving unit are disposed to face each other.
The gas sensor according to claim 1, wherein the signal processing unit is disposed between the light emitting unit and the light receiving unit that are disposed to face each other. 前記信号処理部が、更に前記発光部の光量を制御するための信号を出力する請求項１に記載のガスセンサ。   The gas sensor according to claim 1, wherein the signal processing unit further outputs a signal for controlling a light amount of the light emitting unit. 前記受光部は、１つの受光部からなる請求項１に記載のガスセンサ。   The gas sensor according to claim 1, wherein the light receiving unit includes one light receiving unit. 前記受光部は、１つの受光部からなり、該受光部は、測定対象となるガスに対応する赤外線波長を通過させる赤外線透過特性を有する光学部材を備える請求項３に記載のガスセンサ。   The gas sensor according to claim 3, wherein the light receiving unit includes one light receiving unit, and the light receiving unit includes an optical member having an infrared transmission characteristic that transmits an infrared wavelength corresponding to a gas to be measured. 前記受光部は、２つの受光部からなり、該２つの受光部は、それぞれ異なる波長感度である請求項１に記載のガスセンサ。   The gas sensor according to claim 1, wherein the light receiving unit includes two light receiving units, and the two light receiving units have different wavelength sensitivities. 前記受光部は、２つの受光部からなり、該２つの受光部は、それぞれ異なる赤外線透過特性を有する光学部材を備える請求項５に記載のガスセンサ。   The gas sensor according to claim 5, wherein the light receiving unit includes two light receiving units, and the two light receiving units include optical members having different infrared transmission characteristics. 前記基板を覆うようにカバー部材を備え、該カバー部材が少なくとも一つの貫通孔を有する請求項１〜６のいずれか一項に記載のガスセンサ。   The gas sensor according to claim 1, further comprising a cover member so as to cover the substrate, wherein the cover member has at least one through hole.
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