JP2014015354A - Assembly and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an assembly having high junction reliability.SOLUTION: An assembly 1 includes a first member 11, a second member 12, and a glass film 13. The second member 12 is different in at least one of Young's modulus and thermal expansion coefficient from the first member 11. The glass film 13 is disposed between the first member 11 and the second member 12. A junction region A2 is formed over the first member 11, the glass film 13, and the second member 12.

Description

  The present invention relates to a joined body and a manufacturing method thereof.

  Conventionally, for example, Patent Document 1 proposes a method of joining a plurality of members using ultrashort pulse laser light on the order of femtoseconds to picoseconds. In this method, an ultrashort pulse laser beam is irradiated in a state where two members to be joined are pressed. A multiphoton absorption phenomenon appears in the filament region formed by this laser irradiation. As a result, the filament region is locally heated and the filament region is in a molten state. The two members are joined by solidifying the filament region in the molten state.

  In the joining method using the ultrashort pulse laser beam, since a minute filament region is locally heated, the joining can be performed without increasing the temperature of the member.

WO2008 / 035770 A1 Publication

  The joining method using an ultrashort pulse laser beam can be used for joining any member as long as one member transmits a pulse laser. Therefore, according to the joining method using ultrashort pulse laser light, for example, members having different Young's modulus and thermal expansion coefficient can be joined.

  However, when the Young's modulus and the coefficient of thermal expansion differ between the joined members, there is a problem that the reliability of the joining tends to be low. That is, there exists a problem that the joined member tends to peel.

  A main object of the present invention is to provide a bonded body having high bonding reliability.

  The joined body according to the present invention includes a first member, a second member, and a glass film. The second member is different from the first member in at least one of Young's modulus and thermal expansion coefficient. The glass film is disposed between the first member and the second member. A joining region is formed across the first member, the glass film, and the second member.

  The bonding region is preferably a region formed by solidifying after the filament region generated by the irradiation of the ultrashort pulse laser beam is in a molten state.

  It is preferable that the joining region is not exposed at the end face.

  The first member may be made of glass, and the second member may be made of tempered glass or ceramics.

  In the method for manufacturing a joined body according to the present invention, the first member and the second member, which are different from each other in at least one of Young's modulus and thermal expansion coefficient, are press-contacted via a glass film. Irradiate ultra-short pulse laser light in the state. Thereby, the joined body which has a joining area | region straddling a 1st member, a glass film, and a 2nd member is obtained.

  It is preferable that at least one of the first and second members and the glass film transmit ultrashort pulse laser light.

  According to the present invention, it is possible to provide a bonded body with high bonding reliability.

It is a schematic sectional drawing for demonstrating the joining process in one Embodiment of this invention. 1 is a schematic cross-sectional view of a part of a joined body manufactured in an embodiment of the present invention.

  Hereinafter, an example of the preferable form which implemented this invention is demonstrated. However, the following embodiment is merely an example. The present invention is not limited to the following embodiments.

  Moreover, in each drawing referred in embodiment etc., the member which has a substantially the same function shall be referred with the same code | symbol. The drawings referred to in the embodiments and the like are schematically described. A ratio of dimensions of an object drawn in a drawing may be different from a ratio of dimensions of an actual object. The dimensional ratio of the object may be different between the drawings. The specific dimensional ratio of the object should be determined in consideration of the following description.

  FIG. 1 is a schematic cross-sectional view for explaining a bonding step in the present embodiment. FIG. 2 is a schematic cross-sectional view of a part of the joined body manufactured in the present embodiment. In the present embodiment, the method of manufacturing the joined body 1 shown in FIG. 2 will be described mainly with reference to FIG. 1, and then the configuration of the joined body 1 will be described with reference to FIG. In FIG. 1 and FIG. 2, cross-sectional hatching is omitted for convenience of drawing.

  First, the first member 11, the second member 12, and the glass film 13 shown in FIG. 2 are prepared.

  The first member 11 and the second member 12 differ in at least one of Young's modulus and thermal expansion coefficient. The constituent materials of the first and second members 11 and 12 are not particularly limited. The first and second members 11 and 12 may be made of glass, ceramics, metal, or the like. For example, one of the first and second members 11 and 12 may be made of glass, and the other of the first and second members 11 and 12 may be made of tempered glass or ceramic. In the case where at least one of the first and second members 11 and 12 is made of tempered glass whose tempering characteristics change by being heated, the joining method of the present embodiment that can be joined while suppressing a temperature rise is particularly effective. is there. Moreover, it is preferable that at least one of the first and second members 11 and 12 transmits an ultrashort pulse laser beam 14 described later. In the case of the present embodiment, it is preferable that the first member 11 positioned on the incident side of the ultrashort pulse laser beam 14 transmits the ultrashort pulse laser beam 14.

  The kind of glass which comprises the glass film 13 is not specifically limited. The glass film 13 may be made of, for example, silicate glass, borosilicate glass, borate glass, phosphate glass, or the like. Further, the glass film 13 having a width of about 1 mm to 10 mm can be used. The glass film 13 is preferably one that transmits ultrashort pulse laser light.

  In the present invention, the “glass film” refers to a glass material having a thickness of 200 μm or less.

  Next, the first member 11 and the second member 12 are brought into pressure contact with each other through the glass film 13. In this state, the super short pulse laser beam 14 is irradiated from the first member 11 side to the laminate of the first and second members 11 and 12 and the glass film 13. In this case, it is necessary that at least the first member 11 and the glass film 13 transmit the ultrashort pulse laser beam 14.

Here, “ultrashort pulse laser light” refers to a pulse laser having a pulse width of less than 1 × 10 ⁻⁹ seconds. As described in Patent Document 1, when ultrashort pulse laser light is incident on a medium such as glass, a third-order nonlinear optical effect and a refractive index reduction effect due to plasma formation occur. When these two effects are balanced, a phenomenon called filamentation that propagates with a minimum beam diameter over a predetermined distance occurs. A region where this filamentation occurs is called a filament region.

  In the present embodiment, the ultrashort pulse laser beam 14 is irradiated so that the filament region A1 is formed across the first member 11 and the second member 12 via the glass film 13. When the filament region A1 is formed in the laminate, a multiphoton absorption phenomenon occurs in the filament region A1. For this reason, the filament region A1 is selectively heated, and the filament region A1 enters a molten state. When the irradiation with the ultrashort pulse laser beam 14 is completed, the filament region A1 in a molten state is cooled and solidified. Thereby, as FIG. 2 shows, joining area | region A2 ranging over the 1st member 11, the glass film 13, and the 2nd member 12 is formed. Thereby, the joined body 1 is obtained.

  As shown in FIG. 2, the joined body 1 includes a first member 11, a second member 12, and a glass film 13 disposed between the first member 11 and the second member 12. Have. The joining area A <b> 2 is provided across the first member 11, the glass film 13, and the second member 12. The joining region A2 is not exposed on the end surface of the joined body 1.

  In FIG. 1 and FIG. 2, for convenience of drawing, the filament area A1 and the bonding area A2 are drawn wider than the actual area, respectively.

  By the way, when joining a 1st member and a 2nd member, it is normal to try to join a 1st member and a 2nd member directly. However, if the Young's modulus and the thermal expansion coefficient are different between the first member and the second member, the first member and the second member are caused by the residual stress generated by bonding or the stress generated when the temperature of the bonded body changes. And are easy to peel off.

  Here, in the joined body 1, the glass film 13 is interposed between the first member 11 and the second member 12, and the joining region A <b> 2 is the first member 11, the glass film 13, and the second member. It is formed across the member 12. For this reason, the residual stress produced by joining is easily relieved by the glass film 13. Further, the stress generated when the temperature of the bonded body 1 changes is easily relaxed by the glass film 13. Therefore, it is possible to obtain the joined body 1 having excellent joining reliability in which the first member 11 and the second member 12 are not easily separated. From the viewpoint of obtaining better bonding reliability, it is preferable that a plurality of bonding regions A2 are provided at intervals.

  In addition, the joining method of this embodiment is a method which becomes possible only by using the glass film 13 thinner than the length of the filament area | region A1.

DESCRIPTION OF SYMBOLS 1 ... Bonded body A1 ... Filament area | region A2 ... Bonding area | region 11 ... 1st member 12 ... 2nd member 13 ... Glass film 14 ... Ultrashort pulse laser beam

Claims (6)

A first member;
A second member that is different from at least one of Young's modulus and thermal expansion coefficient from the first member;
A glass film disposed between the first member and the second member;
With
A joined body in which a joining region is formed across the first member, the glass film, and the second member.   The joined body according to claim 1, wherein the joining region is a region formed by solidifying after a filament region generated by irradiation with an ultrashort pulse laser beam is in a molten state.   The joined body according to claim 1 or 2, wherein the joining region is not exposed at an end face. The first member is made of glass;
The joined body according to any one of claims 1 to 3, wherein the second member is made of tempered glass or ceramics.   The first member and the first member are irradiated with an ultrashort pulse laser beam in a state in which a second member having at least one of Young's modulus and thermal expansion coefficient different from each other is pressed through a glass film. By this, the manufacturing method of a conjugate | zygote which obtains the conjugate | zygote which has a joining area | region straddling the said 1st member, the said glass film, and a said 2nd member.   The method for manufacturing a joined body according to claim 5, wherein at least one of the first and second members and the glass film transmit the ultrashort pulse laser light.

Images