JP2014013816A - Electrolyte impregnation apparatus and electrolyte injection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrolyte impregnation apparatus and an electrolyte injection method which inhibit insufficient injection of an electrolyte that is caused by lowering of a liquid surface of the electrolyte when the electrolyte is injected into a workpiece.SOLUTION: An electrolyte impregnation apparatus includes: an electrolyte vessel which is disposed in a chamber, the electrolyte vessel where a recessed part including a workpiece wetted groove for immersing a workpiece in an electrolyte and a liquid storage region continuously connecting with the workpiece wetted groove is formed on an upper surface and the electrolyte is stored in the workpiece wetted groove and the liquid storage region; a support mechanism which supports the workpiece at a position, where an upper end of an inlet port becomes lower than a liquid surface of the electrolyte, in the chamber; a vacuum pump which evacuates the chamber; a gas introduction mechanism which introduces a gas into the chamber in the vacuum state; and a liquid surface adjustment device which supplies the electrolyte to the electrolyte vessel according to a position of the liquid surface of the electrolyte in the electrolyte vessel to adjust the position of the liquid surface so that the position of the liquid surface, which is lowered by injection of the electrolyte into the workpiece, does not become lower than the upper end of the inlet port.

Description

  The present invention relates to an electrolytic solution impregnation apparatus and an electrolytic solution injection method for injecting an electrolytic solution into a workpiece immersed in the electrolytic solution.

  In the production of electrolytic capacitors, a method of injecting an electrolytic solution into a workpiece using a vacuum differential pressure method is employed. (For example, refer to Patent Document 1). In this case, the workpiece is immersed in the electrolytic solution so that the inlet of the electrolytic solution disposed on the surface of the workpiece is in the electrolytic solution. Since an expensive electrolytic solution adheres to the surface of the part immersed in the electrolytic solution of the workpiece, the surface area of the workpiece immersed in the electrolytic solution is preferably as small as possible from the viewpoint of suppressing the manufacturing cost and cleaning treatment. For this reason, it is preferable to immerse a workpiece | work in electrolyte solution so that the position of the injection port of a workpiece | work exists in the position which is not deep from the liquid level of electrolyte solution.

JP 2003-217991 A

  However, as the electrolytic solution is injected into the work, the liquid level of the electrolytic solution is lowered. As a result, there arises a problem that the work inlet becomes higher than the liquid level of the electrolytic solution and the electrolytic solution is not injected into the work. For this reason, a defective product occurs because a sufficient amount of electrolyte is not injected into the workpiece.

  In view of the above problems, the present invention provides an electrolytic solution impregnation apparatus and an electrolytic solution injection method capable of suppressing insufficient injection of electrolytic solution due to a decrease in the electrolytic solution level during injection of electrolytic solution into a workpiece.

  According to one aspect of the present invention, there is provided an electrolytic solution impregnating apparatus for injecting an electrolytic solution into a workpiece having an injection port disposed on a surface by a vacuum differential pressure method, wherein the (a) chamber and (b) the chamber are disposed in the chamber. An electrolytic process in which a concave part including a work wetted groove in which the work is immersed in the electrolytic solution and a liquid storage region connected to the work wetted groove is formed on the upper surface, and the electrolytic solution is stored in the work wetted groove and the liquid storage region. A support mechanism that supports the work in the chamber at a position where the upper end of the injection port is below the liquid level of the electrolytic solution by immersing at least a part of the work in the liquid bath and (c) the work wetted groove (D) a vacuum pump that evacuates the chamber; (e) a gas introduction mechanism that introduces gas into the vacuum chamber while the entire inlet is immersed in the electrolyte; and (f) a work piece Reduced by injecting electrolyte into Adjust the position of the liquid level by supplying the electrolyte to the electrolyte tank according to the position of the electrolyte in the electrolyte tank so that the position of the liquid level does not fall below the top of the inlet. An electrolytic solution impregnation device is provided that includes a liquid level adjustment device.

  According to another aspect of the present invention, (a) a work wetted groove in which a workpiece to be treated is immersed in an electrolytic solution and a recess including a liquid storage region connected to the work wetted groove are formed on the upper surface. A step of storing the electrolytic solution tank in which the electrolytic solution is stored in the liquid contact groove and the liquid storage region in the chamber; and (b) after evacuating the chamber, at least a part of the work is electrolyzed by the work liquid contact groove. A step of supporting the workpiece in the chamber at a position where the upper end of the workpiece inlet is below the electrolyte level, and (c) a vacuum with the entire inlet immersed in the electrolyte. Injecting gas into the chamber in the state and injecting the electrolyte into the workpiece, and (d) depending on the position of the electrolyte surface in the electrolyte tank after injecting the electrolyte into the workpiece Supply the electrolyte to the electrolyte bath, and the electrolyte will be applied to the new workpiece. The position of the liquid surface to be lowered by being input in such a way not to a position below the upper end of the inlet, an electrolyte injection method comprising the step of adjusting the position of the liquid surface is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the electrolyte solution impregnation apparatus and electrolyte solution injection method which can suppress the injection | pouring insufficient of the electrolyte solution by the fall of the liquid level of the electrolyte solution at the time of injection | pouring of the electrolyte solution inside a workpiece | work can be provided.

It is a schematic diagram which shows the structure of the electrolyte solution impregnation apparatus which concerns on embodiment of this invention. It is a typical top view which shows the structure of the electrolyte solution tank of the electrolyte solution impregnation apparatus which concerns on embodiment of this invention. It is typical sectional drawing along the III-III direction of FIG. It is typical sectional drawing along the IV-IV direction of FIG. It is a schematic diagram which shows the example which inject | pours electrolyte solution into a some workpiece | work simultaneously by the electrolyte solution impregnation apparatus which concerns on embodiment of this invention. It is a typical top view which shows the structure of the electrolyte solution tank of a comparative example. It is a schematic diagram for demonstrating the liquid level adjustment method by the electrolyte solution impregnation apparatus which concerns on embodiment of this invention. It is a schematic diagram which shows the difference of a reference | standard position and a liquid level position. It is a flowchart for demonstrating the electrolyte solution injection method by the electrolyte solution impregnation apparatus which concerns on embodiment of this invention.

  Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. Further, the following embodiments exemplify apparatuses and methods for embodying the technical idea of the present invention, and the technical idea of the present invention is the structure, arrangement, etc. of the component parts described below. It is not something specific. The technical idea of the present invention can be variously modified within the scope of the claims.

  As shown in FIG. 1, an electrolytic solution impregnation apparatus 1 according to an embodiment of the present invention includes at least one of a chamber 10, an electrolytic solution tank 20 disposed in the chamber 10 and containing an electrolytic solution 200, and a workpiece 100. The support mechanism 30 that supports the workpiece 100 in the chamber 10, the vacuum pump 40 that evacuates the chamber 10 in which the workpiece 100 is stored, and the gas 500 in the vacuum chamber 10. Level adjustment for supplying the electrolytic solution 200 to the electrolytic solution tank 20 and adjusting the position of the liquid level 201 according to the position of the liquid level 201 of the electrolytic solution 200 in the electrolytic solution tank 20 Device 60.

  The inlet 110 arranged on the surface of the workpiece 100 is connected to a cavity inside the workpiece 100, and the electrolytic solution 200 is injected into the workpiece 100 from the inlet 110. The workpiece 100 is, for example, an electrolytic capacitor such as an electrolytic double layer capacitor (EDLC) or an electrolytic solution storage container such as a secondary battery.

  The liquid level adjusting device 60 is arranged so that the position of the liquid level 201 that decreases when the electrolytic solution 200 is injected into the workpiece 100 does not fall below the upper end of the inlet 110 of the workpiece 100. Adjust. The adjustment of the position of the liquid level 201 by the liquid level adjusting device 60 is performed after the injection of the electrolytic solution 200 into the workpiece 100 is completed and before the step of injecting the electrolytic solution 200 into the new workpiece 100. That is, when the workpiece 100 is replaced, the position of the liquid level 201 is adjusted in advance so that the injection port 110 of the workpiece 100 into which the electrolytic solution 200 is injected next does not become higher than the liquid level 201 during the injection process of the electrolytic solution 200. Is done. In the step of injecting the electrolytic solution into the workpiece 100, the liquid level adjusting device 60 is disposed outside the chamber 10 as shown in FIG. Details of the function of the liquid level adjusting device 60 will be described later.

  The electrolyte bath 20 is supported by the lifting mechanism 70. Specifically, when the electrolytic solution 200 is injected into the workpiece 100, the electrolytic solution tank 20 is raised and stored in the chamber 10. After injecting the electrolytic solution 200 into the workpiece 100, the electrolytic solution tank 20 is lowered and moved to the outside of the chamber 10.

  FIG. 2 shows an example of the structure of the electrolytic solution tank 20. On the upper surface of the electrolytic solution tank 20, a concave portion made up of a workpiece contact groove 210 in which the workpiece 100 is immersed in the electrolyte solution 200 and liquid storage regions 221 and 222 connected to the workpiece contact groove 210 is formed on the upper surface. In addition, an electrolytic solution 200 is accommodated in the workpiece liquid contact groove 210 and the liquid storage regions 221 and 222.

  3 and 4 show a state in which the workpiece 100 is immersed in the workpiece contact groove 210. FIG. Since the electrolytic solution 200 is expensive, it is preferable to reduce the amount of the electrolytic solution 200 attached to the surface of the workpiece 100 as much as possible. For example, the injection port 110 is disposed around the corner of the bottom surface of the workpiece 100. Thereby, the surface area of the work immersed in the electrolytic solution 200 can be reduced. As a result, the amount of the electrolytic solution 200 that adheres to the surface of the workpiece 100 when the workpiece 100 is pulled out of the electrolytic solution 200 can be reduced.

  For this reason, the support mechanism 30 holds the workpiece 100 in an inclined posture so that the periphery of the corner where the injection port 110 of the workpiece 100 is disposed is the lowest position. Then, a part of the workpiece 100 including the injection port 110 is immersed in the electrolytic solution 200 through the workpiece contact groove 210. That is, as shown in FIG. 4, the workpiece 100 is supported so that the bottom surface of the workpiece 100 forms a certain angle with respect to the liquid level 201 of the electrolytic solution 200. At this time, the workpiece 100 is supported in the chamber 10 at a position where the upper end of the injection port 110 is below the liquid level 201 of the electrolytic solution 200.

  The gas introduction mechanism 50 introduces a gas 500 such as nitrogen gas into the vacuum chamber 10 in a state where the entire injection port 110 of the workpiece 100 is immersed in the electrolytic solution 200. Thereby, in the electrolytic solution impregnation apparatus 1, the electrolytic solution 200 is injected into the workpiece 100 by a vacuum differential pressure method using reduced pressure. As shown in FIG. 5, a plurality of workpieces 100 may be immersed in the electrolytic solution 200 through the workpiece wetted grooves 210. Thereby, the electrolyte solution 200 can be simultaneously injected into the plurality of workpieces 100.

  Here, the effect of the electrolytic solution tank 20 having the liquid storage regions 221 and 222 will be described. For example, as shown in FIG. 6, in the case of the electrolytic solution tank 20A in which only the workpiece contact groove 210 is formed on the upper surface without forming the liquid storage regions 221, 222, the electrolytic solution 200 stored in the electrolytic solution tank 20A. The amount of is small. For this reason, as the electrolytic solution 200 is injected into the workpiece 100, the liquid level 201 of the electrolytic solution 200 rapidly decreases. Therefore, in the middle of the injection process of the electrolytic solution 200, the liquid level 201 may be lower than the injection port 110 of the workpiece 100, and the injection of the electrolytic solution 200 may be insufficient.

  On the other hand, in the electrolytic solution tank 20 shown in FIG. 2, the electrolytic solution 200 is stored not only in the workpiece liquid contact groove 210 but also in the liquid storage regions 221 and 222. For this reason, the total amount of the electrolytic solution 200 accommodated in the electrolytic solution tank 20 is large. Therefore, the decrease in the liquid level 201 of the electrolytic solution 200 accompanying the injection of the electrolytic solution 200 into the workpiece 100 is gradual. As a result, insufficient injection of the electrolytic solution 200 due to a decrease in the liquid level 201 when the electrolytic solution 200 is injected into the workpiece 100 is suppressed.

  In addition, the shape and position of liquid storage area | regions, such as the liquid storage area | regions 221 and 222, are not restricted to what was shown in FIG. 2, For example, you may make a liquid storage area | region into polygons and rectangles other than round shape. Moreover, the number of liquid storage area | regions is not limited to two, For example, one may be sufficient.

  In the electrolytic solution impregnating apparatus 1 shown in FIG. 1, the liquid level adjusting device 60 is disposed in the electrolytic solution tank 20 so that the inlet 110 of the workpiece 100 is always at a position lower than the liquid level 201 of the electrolytic solution 200. The position of the liquid level 201 of 200 is adjusted. The function of the liquid level adjusting device 60 will be described below.

  As shown in FIG. 1, the liquid level adjustment device 60 includes a detection device 61 and an electrolytic solution supply device 62. As already described, the adjustment of the position of the liquid level 201 by the liquid level adjustment device 60 is performed when the workpiece 100 is replaced. When the position of the liquid surface 201 is adjusted, as shown in FIG. 7, the detection device 61 and the supply nozzle 65 of the electrolyte supply device 62 are arranged in the chamber 10. Alternatively, the electrolytic solution tank 20 is moved out of the chamber 10, and the electrolytic solution tank 20, the detection device 61, and the supply nozzle 65 are arranged outside the chamber 10 in the positional relationship of FIG. 7.

  The detection device 61 has a position (hereinafter referred to as “reference position H <b> 1”) that is maintained at a constant height in the electrolytic solution injection process regardless of the position of the liquid level 201 of the electrolytic solution 200, and the position of the liquid level 201. (Hereinafter referred to as “liquid level H2”).

  The place where the reference position H1 is measured is set, for example, on the upper surface of the electrolytic solution tank 20 or the like. Specifically, for example, a region indicated by a broken line in FIG. 2 (hereinafter referred to as “reference position measurement region 230”), which is a remaining region of the region where the workpiece wet groove 210 and the liquid storage regions 221 and 222 are formed. )). As the liquid level position H2, for example, the position of the liquid level 201 in the liquid storage region 221 is measured. The detection device 61 may employ an ultrasonic sensor that detects the reference position H1 and the liquid surface position H2 by irradiating the liquid surface 201 of the reference position measurement region 230 and the liquid storage region 221 with ultrasonic waves, respectively.

  The electrolytic solution supply device 62 supplies the electrolytic solution 200 to the electrolytic solution tank 20 according to the height difference between the reference position H1 and the liquid level position H2 defined as shown in FIG. Specifically, the electrolytic solution supply device 62 supplies the electrolytic solution 200 to the electrolytic solution tank 20 when the difference between the reference position H1 and the liquid level position H2 is larger than a preset value.

  At this time, when the difference between the reference position H1 and the liquid level position H2 is larger than the set value, the liquid level 201 of the electrolytic solution 200 is changed to the inlet of the workpiece 100 during the injection process of the electrolytic solution 200 to the next workpiece 100. The set value is determined so that the possibility of lowering than the upper end of 110 is high. For example, considering the rise of the liquid level 201 caused by immersing the workpiece 100 in the electrolytic solution 200, the lowering of the liquid level 201 caused by injecting a predetermined amount of the electrolytic solution 200 into the new workpiece 100, etc. A set value that is a reference for starting to supply the electrolytic solution 200 to the electrolytic solution tank 20 so that the liquid level 201 of the electrolytic solution 200 does not fall below the upper end of the inlet 110 of the workpiece 100 until the liquid injection step is completed. Is determined.

  When the difference between the reference position H1 and the liquid surface position H2 is larger than the set value, the electrolytic solution supply device 62 uses the liquid supply line 66 that connects the electrolytic solution tank 63 in which the electrolytic solution 200 is stored and the supply nozzle 65 to each other. A signal S is transmitted to the supply valve 64 installed on the way. As a result, the supply valve 64 is opened, and the electrolytic solution 200 sent from the electrolytic solution tank 63 is supplied from the supply nozzle 65 to the electrolytic solution tank 20. The supply nozzle 65 is disposed, for example, above the liquid storage region 222 and supplies the electrolytic solution 200 from the liquid storage region 222 to the electrolytic solution tank 20.

  The amount of the electrolytic solution 200 supplied from the electrolytic solution tank 63 to the electrolytic solution tank 20 is set such that the liquid level position H2 is positioned below the reference position H1 by a certain distance. At this time, the electrolytic bath 20 is supplied to the electrolytic bath 20 so as not to overflow from the electrolytic bath 20 by shaking the electrolytic bath 20 or by immersing the workpiece 100 in the workpiece wetted groove 210. The amount of electrolytic solution 200 to be set is set. For example, the amount of the electrolytic solution 200 supplied from the electrolytic solution tank 63 to the electrolytic solution tank 20 is set so that the difference between the reference position H1 and the liquid level position H2 is about 0.2 mm.

  After the electrolytic solution 200 is supplied to the electrolytic solution tank 20 by a predetermined amount, the supply nozzle 65 is closed under the control of the electrolytic solution supply device 62, and the supply of the electrolytic solution 200 from the electrolytic solution tank 63 to the electrolytic solution tank 20 is performed. Stop.

  As described above, the liquid level adjustment device 60 supplies the electrolytic solution 200 to the electrolytic solution tank 20 so that the position of the liquid level 201 does not fall below the upper end of the injection port 110 in the electrolytic solution injection step. The position of the liquid level 201 is adjusted.

  Hereinafter, an example of a method of filling the workpiece 100 with the electrolytic solution 200 by the electrolytic solution impregnation apparatus 1 shown in FIG. 1 will be described with reference to FIG.

  First, in step S <b> 11, the electrolytic solution tank 20 in which the electrolytic solution 200 is stored in the workpiece liquid contact groove 210 and the liquid storage regions 221 and 222 is stored in the chamber 10. The workpiece 100 is also stored in the chamber 10. At this time, the support mechanism 30 supports the workpiece 100 such that the upper end of the inlet 110 of the workpiece 100 is below the liquid level 201 of the electrolyte 200 in the arrangement in which the electrolytic solution tank 20 is raised by the lifting mechanism 70.

  Next, in step S <b> 12, the inside of the chamber 10 is evacuated by evacuation by the vacuum pump 40. The pressure in the chamber 10 is about several Pascals, for example. Thereafter, the electrolyte tank 20 is raised by the lifting mechanism 70, and the work 100 is immersed up to the top of the injection port 110. Thereafter, in step S <b> 13, the gas 500 is introduced into the vacuum chamber 10 by the gas introduction mechanism 50 with the injection port 110 immersed in the electrolytic solution 200. The introduced gas 500 is nitrogen gas or the like. For example, the flow rate of the gas 500 introduced is adjusted so that the pressure in the chamber 10 becomes atmospheric pressure or atmospheric pressure or higher. As a result, the electrolytic solution 200 is injected into the workpiece 100 through the injection port 110.

  Thereafter, in step S15 and subsequent steps, the electrolytic solution 200 is supplied to the electrolytic solution tank 20 according to the position of the liquid level 201 of the electrolytic solution 200 in the electrolytic solution tank 20, and the electrolytic solution 200 is injected into the new workpiece 100. Thus, the position of the liquid level 201 is adjusted so that the position of the liquid level 201 that is lowered does not fall below the upper end of the inlet 110. In this liquid level adjustment step, the liquid level adjustment device 60 adjusts the position of the liquid level 201 of the electrolytic solution 200 in the electrolytic solution tank 20 by the method already described.

  That is, in step S15, the detection device 61 detects the reference position H1 and the liquid level position H2. In step S16, the electrolytic solution supply device 62 determines whether or not the difference between the reference position H1 and the liquid level position H2 is greater than a preset set value. When the difference between the reference position H1 and the liquid level position H2 is larger than the set value, the process proceeds to step S17, and the electrolytic solution 200 is supplied to the electrolytic solution tank 20. Thereafter, the process proceeds to step S18.

  On the other hand, when the difference between the reference position H1 and the liquid level position H2 is equal to or smaller than the set value, the process proceeds to step S18, and a new workpiece 100 in which the electrolyte 200 is not injected is stored in the chamber 10. After step S18, the process returns to step S12, and the electrolytic solution 200 is injected into the new workpiece 100.

  In addition, by investigating the relationship between the amount of electrolyte 200 injected into workpiece 100 and the injection time in advance, the injection amount of electrolyte 200 into workpiece 100 can be controlled by the injection time. That is, it can be determined whether or not a sufficient amount of the electrolyte 200 has been injected into the workpiece 100 as time elapses after the injection of the electrolyte is started.

  As described above, in the electrolytic solution impregnation apparatus 1 according to the embodiment of the present invention, the position of the liquid level 201 of the electrolytic solution 200 in the electrolytic solution tank 20 that decreases as the electrolytic solution 200 is injected into the workpiece 100. However, the amount of the electrolytic solution 200 in the electrolytic solution tank 20 is adjusted so that it is always below the upper end of the inlet 110 of the workpiece 100. For this reason, the injection port 110 is immersed in the electrolytic solution 200 until the workpiece 100 is filled with the electrolytic solution 200. As a result, according to the electrolytic solution impregnation apparatus 1, insufficient injection of the electrolytic solution 200 due to a decrease in the liquid level 201 of the electrolytic solution 200 when the electrolytic solution 200 is injected into the workpiece 100 is suppressed.

  Furthermore, according to the electrolytic solution impregnation apparatus 1, the position of the liquid surface 201 of the electrolytic solution 200 can be adjusted so that the inlet 110 is immersed in the electrolytic solution 200 at the last minute. For this reason, there is little quantity of the electrolyte solution 200 adhering to the surface of the workpiece | work 100, and the required time of the process of wiping off the electrolyte solution 200 adhering to the workpiece | work 100 is shortened. Moreover, the consumption of the expensive electrolyte 200 can be suppressed by reducing the amount of the electrolyte 200 to be wiped off.

(Other embodiments)
As mentioned above, although this invention was described by embodiment, it should not be understood that the description and drawing which form a part of this indication limit this invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

  In the description of the embodiment described above, an example in which the reference position H1 and the liquid level position H2 are detected and whether or not the electrolytic solution 200 is injected into the electrolytic solution tank 20 using these differences is shown. However, for example, when the reference position H1 is always constant, it may be determined whether or not to inject the electrolyte 200 into the electrolyte bath 20 by detecting only the liquid level H2.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

DESCRIPTION OF SYMBOLS 1 ... Electrolyte impregnation apparatus 10 ... Chamber 20 ... Electrolyte tank 30 ... Support mechanism 40 ... Vacuum pump 50 ... Gas introduction mechanism 60 ... Liquid level adjustment apparatus 61 ... Detection apparatus 62 ... Electrolyte supply apparatus 63 ... Electrolyte tank 64 ... Supply valve 65 ... Supply nozzle 66 ... Liquid feed line 70 ... Elevating mechanism 100 ... Workpiece 110 ... Injection port 200 ... Electrolyte solution 201 ... Liquid level 210 ... Workpiece liquid contact groove 221, 222 ... Liquid storage area 230 ... Reference position measurement area 500 …gas

Claims (7)

An electrolyte impregnation apparatus for injecting an electrolyte into a workpiece having an injection port on the surface by a vacuum differential pressure method,
A chamber;
A concave portion including a work wetted groove in which the work is immersed in an electrolyte and a liquid storage region connected to the work wetted groove is formed on the upper surface, and the work wetted groove and the liquid stored An electrolytic solution tank in which the electrolytic solution is stored in a region;
A support mechanism for immersing at least a part of the workpiece in the electrolytic solution in the workpiece wet groove and supporting the workpiece in the chamber at a position where an upper end of the injection port is lower than a liquid level of the electrolytic solution When,
A vacuum pump for evacuating the chamber;
A gas introduction mechanism for introducing a gas into the chamber in a vacuum state in a state where the entire injection port is immersed in the electrolyte solution;
The position of the liquid level, which is lowered when the electrolytic solution is injected into the workpiece, is not lower than the upper end of the injection port. In response, an electrolytic solution impregnation apparatus comprising: a liquid level adjustment device that adjusts the position of the liquid level by supplying the electrolytic solution to the electrolytic solution tank. The liquid level adjustment device,
A reference position that is maintained at a constant height regardless of the position of the liquid level, and a detection device that detects the liquid level position of the liquid level;
An electrolyte supply device that supplies the electrolyte solution to the electrolyte container when a difference in height between the reference position and the liquid level position is larger than a preset value. 2. The electrolytic solution impregnation apparatus according to 1.   The electrolytic solution impregnation apparatus according to claim 2, wherein the detection device detects the reference position and the liquid level position by irradiating ultrasonic waves.   4. The liquid level adjustment device adjusts the position of the liquid level according to the position of the liquid level of the electrolytic solution after the electrolytic solution is injected into the workpiece. 5. 2. The electrolytic solution impregnation apparatus according to item 1. A work wetted groove in which a workpiece to be treated is immersed in an electrolytic solution and a recess including a liquid storage region connected to the work wetted groove are formed on the upper surface, and the electrolytic solution is formed in the work wetted groove and the liquid storage region. Storing the electrolytic solution tank in which is stored in the chamber;
After evacuating the chamber, at least a part of the workpiece is immersed in the electrolyte in the workpiece wet groove, and the upper end of the workpiece inlet is below the electrolyte level. Supporting the workpiece in the chamber;
Injecting the electrolyte into the workpiece by introducing a gas into the chamber in a vacuum state with the entire injection port immersed in the electrolyte; and
The electrolytic solution is supplied to the electrolytic solution tank according to the position of the liquid level of the electrolytic solution in the electrolytic solution tank after the electrolytic solution is injected into the workpiece, and the electrolytic solution is applied to the new workpiece. Adjusting the position of the liquid level so that the position of the liquid level that is lowered by the liquid injection does not fall below the upper end of the injection port. Method. Adjusting the position of the liquid level comprises:
Detecting a reference position maintained at a constant height regardless of the position of the liquid level, and a liquid level position of the liquid level;
Supplying the electrolytic solution to the electrolytic solution container when a difference in height between the detected reference position and the liquid level position is larger than a preset set value. 5. The electrolyte solution injection method according to 5.   The electrolytic solution injection method according to claim 6, wherein the reference position and the liquid level position are detected by irradiating ultrasonic waves.

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