JP2014010934A - Discharge element and discharge device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide: a discharge element increasing efficiency for carrying active species generated by discharge to the outside of a discharge element, facilitating drawing of an electrode and facilitating connection to the outside; and a discharge device.SOLUTION: A plurality of first electrodes and a plurality of second electrodes are arranged alternately in parallel on a same plane. The first electrodes and the second electrodes are bundled respectively and include electrically connected drawing terminals 31L, 32L, 31R and 32R. An electron weaving region DA is a part of fabric including the first electrodes and the second electrodes as a weft and silk thread as a warp. The first electrodes and the second electrodes are, for example, an aluminum wire having a surface on which a dielectric film is formed by anode oxidation.

Description

  The present invention relates to a discharge device used for generating ions and ozone, and a discharge device including the discharge device and a power supply circuit for generating a drive voltage.

  The discharge phenomenon that occurs through the dielectric exposed to the discharge space is called dielectric barrier discharge. Discharge devices that perform air cleaning, deodorization, and the like using dielectric barrier discharge are widely used.

Patent Document 1 discloses an ion generating element that generates ions by applying a voltage to an electrode formed on the surface and inside of a dielectric plate.
FIG. 1A is a perspective view of an ion generating element 1 disclosed in Patent Document 1, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. This ion generating element is embedded in a surface electrode 5 provided on the surface of the flat upper dielectric 3, embedded between the upper dielectric 3 and the lower dielectric 2, and provided parallel to the surface electrode 5. The lower dielectric 2, which is electrically connected to the electrode 6, the upper conductive portion 10 that is conductive to the surface electrode 5, the surface electrode contact 7 formed on the surface of the lower dielectric 3 that is conductive to the upper conductive portion 10, and the embedded electrode 6. The internal electrode contact 8 is formed on the surface.

  Patent Document 1 describes that the surface electrode 5 has a shape in which electric field concentration tends to occur, such as a lattice shape or a line shape. By adopting a shape in which electric field concentration tends to occur in this way, discharge can be performed even when the applied voltage is low.

Japanese Patent No. 3847105

  In the ion generating element disclosed in Patent Document 1, electrodes are opposed to each other with a dielectric interposed therebetween. Since plasma is generated on the surface of at least one of the electrodes, in the structure shown in FIG. 1, since the dielectric is plate-like, gas such as air cannot pass through the generated plasma and is generated by discharge. The efficiency of carrying active species out of the device is poor. Further, it is necessary to provide the surface electrode longitudinal conducting portion 11 and the internal electrode longitudinal conducting portion 12 for drawing out the surface electrode contact 7 and the internal electrode contact 8, and there is a problem that the structure is complicated and the number of manufacturing steps is large. is there.

  DISCLOSURE OF THE INVENTION Disclosed is a discharge element and a discharge device in which the above-described problems are to be solved, the efficiency of carrying active species generated by discharge to the outside of the discharge element is increased, the electrode is easily pulled out, and the external connection is facilitated The purpose is to provide.

(1) In the discharge element of the present invention, a plurality of first electrodes to which a first potential is applied and a plurality of second electrodes to which a second potential is applied are alternately arranged in parallel on the same plane,
The plurality of first electrodes and the plurality of second electrodes are respectively bundled and provided with lead terminals that are electrically connected.

(2) The array region of the plurality of first electrodes and the plurality of second electrodes is rectangular, and the plurality of first electrodes and the plurality of second electrodes are arranged on two opposite sides of the rectangular array region. It is preferable that each is pulled out.

(3) The array region of the plurality of first electrodes and the plurality of second electrodes is rectangular, and the plurality of first electrodes and the plurality of second electrodes are respectively disposed on one side of the rectangular array region. It is preferable that it is pulled out.

(4) It is preferable that at least one of the first electrode and the second electrode is formed of a metal wire (thread-like conductor).

(5) It is preferable that the metal wire has a dielectric film formed on the metal surface.

(6) It is preferable that the dielectric film is formed by anodic oxidation of a metal surface.

(7) The metal wire is preferably an aluminum wire having a dielectric film formed on the surface by anodic oxidation.

(8) The first electrode and the second electrode are preferably wefts woven together with insulating warp.

(9) The first electrode and the second electrode are each woven together with an insulating warp, a portion woven with the first electrode and the insulating warp, the second electrode and the insulating warp The portion woven with the warp is preferably separated and pulled out in two layers.

(10) A discharge device of the present invention includes the discharge element according to any one of (1) to (9) above and a power supply circuit that applies a drive voltage to the discharge element.

  According to the present invention, active species generated by discharge can be efficiently carried out of the device. In addition, the electrode can be easily pulled out and can be easily connected to the outside.

FIG. 1A is a perspective view of an ion generating element 1 disclosed in Patent Document 1, and FIG. 1B is a cross-sectional view taken along the line AA in FIG. FIG. 2 is a plan view of the discharge element 101 of the first embodiment. FIG. 3A is a perspective view of a fabric formed by weaving the first electrodes 21a and 21b and the second electrodes 22a and 22b of the discharge element 101 with a jacquard loom. FIG. 4 is a simplified view of the entire fabric shown in FIG. FIG. 5A is a diagram (photograph) showing a state in which the lead terminals 31L, 32L, 31R, and 32R are connected after bundling aluminum wires. FIG. 5B is an enlarged view (photograph) of the electrode weaving area DA. FIG. 6 is a circuit diagram of a discharge device including a discharge element. FIG. 7 is a photograph of the discharge state in the three types of gases. FIG. 8 is a plan view of the discharge element 102 of the second embodiment. FIG. 9A is a perspective view of a fabric formed by plain weaving of the first electrodes 21a and 21b and the second electrodes 22a and 22b of the discharge element 102. FIG.

<< First Embodiment >>
The discharge element of 1st Embodiment is demonstrated with reference to each figure.
FIG. 2 is a plan view of the discharge element 101 of the first embodiment. The discharge element 101 includes a plurality of first electrodes 21a and 21b and a plurality of second electrodes 22a and 22b. A dielectric film is formed on the surface of the first electrode and the second electrode. The first electrode and the second electrode are alternately arranged in parallel on the same plane. FIG. 2 shows only two electrodes for the first electrode and the second electrode.

  The plurality of first electrodes 21 a and 21 b are bundled and electrically connected to the lead terminal 31. Similarly, the plurality of second electrodes 22 a and 22 b are bundled and electrically connected to the lead terminal 32. A first potential is applied to the lead terminal 31 and a second potential is applied to the lead terminal 32. That is, a predetermined AC or DC driving voltage is applied between the lead terminals 31 and 32. As a result, the drive voltage is applied between the first electrode 21a and the second electrode 22a adjacent thereto and between the first electrode 21b and the second electrodes 22a and 22b adjacent thereto. Between the first electrodes 21a and 21b and the second electrodes 22a and 22b is a discharge part DG. Since a dielectric film is formed on each electrode, dielectric barrier discharge occurs in these discharge portions DG.

  FIG. 3A is a perspective view of a fabric formed by weaving the first electrodes 21a and 21b and the second electrodes 22a and 22b of the discharge element 101 with a jacquard loom. FIG. 3B is a partially enlarged view thereof.

  In this woven fabric, the first electrode 21a, 21b and the second electrode 22a, 22b are used in the middle region of the weft yarn, the other region of the weft yarn is used as the electrically insulating yarn, and the warp yarn is used as the electrically insulating yarn in the jacquard loom It is a plain weave.

  The first electrodes 21a and 21b and the second electrodes 22a and 22b are aluminum wires having a diameter of 200 μm, for example. The electrically insulating yarn that is a part of the weft and the warp is, for example, a silk twisted yarn.

  In FIG. 3A, the electrode weaving area DA is a rectangular portion plain-woven with the first electrodes 21a, 21b, etc., the second electrodes 22a, 22b, etc. and silk thread. As shown in FIG. 3 (B), in the electrode weaving area DA, the rigidity of the aluminum wires that are the first electrodes 21a, 21b, 21c, 21d, etc. and the second electrodes 22a, 22b, 22c, 22d, etc. Since it is higher than the rigidity of the silk thread 41 that is a warp, the first electrode and the second electrode are substantially linear, and the first electrode and the second electrode are alternately arranged in parallel on the same plane. And these 1st electrodes and 2nd electrodes are spaced apart by the silk thread 41, and the electrical insulation state is maintained. The distance between the electrodes is, for example, 70 to 80 μm.

  As shown in FIGS. 3 (A) and 3 (B), when weaving with a jacquard loom, the first electrodes 21a and 21b and the second electrodes 22a and 22b which are wefts are silk threads which are warps. And a portion woven with the first electrode (odd-numbered electrodes such as 21a and 21b) and silk, and a portion woven with the second electrode (even-numbered electrodes such as 22a and 22b) and silk Is pulled out by being separated into two layers of a first electrode weaving area LA1 and a second electrode weaving area LA2 at the leading portion LA of the electrode weaving area. In FIG. 3A, the first electrodes 21a, 21b and the like are drawn out to the first electrode weaving area LA1, and the second electrodes 22a, 22b and the like are drawn out to the second electrode weaving area LA2.

  Both sides (ear portions) of the two layers (one ear portion F1 appears in FIG. 3A) are integrated with a plain weave structure of silk and silk since the weft is also silk. Therefore, it is formed as a woven fabric having two bag-like portions as a whole.

  FIG. 4 is a simplified view of the entire fabric shown in FIG. The upper and lower sides of this fabric are ear portions F1 and F2 in which two layers are integrated, and the left and right sides of the central portion of the fabric are bag-like portions S. The electrode weaving area DA is drawn out to the left in FIG. 4 as lead portions LA1 and LA2 of the electrode weaving area, and is drawn to the right as lead parts LB1 and LB2 of the electrode weaving area. Odd-numbered first electrodes are drawn out in the first electrode weaving areas LA1, LB1, and even-numbered second electrodes are drawn out in the second electrode weaving areas LA2, LB2.

As described above, the array region of the plurality of first electrodes and the plurality of second electrodes is rectangular, and the plurality of first electrodes and the plurality of second electrodes are drawn out to one side of the rectangular array region.
The area of the electrode weaving area DA is, for example, 1 to ² cm ² .

  After forming such a woven fabric, the regions other than the electrode weaving area DA and the electrode weaving area leading portions LA1, LA2, LB1, and LB2 are cut off by cutting, and the silk threads of the electrode weaving region leading portions LA1, LA2, LB1, and LB2 Select only and bundle only aluminum wires.

  FIG. 5A is a view (photograph) showing a state in which the lead terminals 31L, 32L, 31R, and 32R are crimped after the aluminum wires are bundled. FIG. 5B is an enlarged view (photograph) of the electrode weaving area DA.

  After crimping the lead terminals 31L, 32L, 31R, and 32R in this way, an oxide film is formed on the surface of the aluminum wire by subjecting the aluminum wires (first electrode and second electrode) to chemical conversion treatment. The conditions for this chemical conversion treatment are, for example, as follows.

(1) Alkaline cleaning 0.1M sodium hydroxide aqueous solution at 40 ° C for 5 minutes (2) Chemical conversion treatment 0.1mM ammonium borate aqueous solution at 15 ° C 850V for 1 hour (3) Cleaning / drying FIG. The discharge device includes a discharge element 101, a current stabilizing choke coil L, and an AC power supply circuit AC. In this circuit, a predetermined drive voltage is applied between the lead terminals 31L (31R) and 32L (32R) to generate plasma by dielectric barrier discharge. FIG. 7 is a photograph of the discharge state in the three types of gases. 7A shows an example using He gas, FIG. 7B shows Ar gas, and FIG. 7C shows N ₂ gas.

  Each gas was blown onto the electrode section at 2 L / min (nitrogen conversion), an alternating voltage was applied, and the voltage was gradually increased. The power source for this experiment was PHF-2K manufactured by HEIDEN Laboratory. The discharge was confirmed visually and by monitoring the voltage waveform of the oscilloscope.

  As shown in FIG. 7, it can be confirmed that plasma is generated over the entire surface of any electrode. Since a dielectric film is formed on the electrode surface, it can be seen that dielectric barrier discharge occurs.

  The discharge starting voltages were all about 450V. It is considered that discharge was possible at a low voltage because the electrode interval was kept constant.

  The discharge device described above is provided in the device together with a device that generates an airflow, and an ion generator, an ozone generator, and the like are configured.

  According to the discharge element of the first embodiment, the active species are generated in the space of the fabric structure by the discharge, so that the active species can be removed from the discharge element only by applying a gas flow by a blower or the like to the electrode weaving region. Can be carried efficiently. In addition, the electrode can be easily pulled out and can be easily connected to the outside.

<< Second Embodiment >>
FIG. 8 is a plan view of the discharge element 102 of the second embodiment. The discharge element 102 includes a plurality of first electrodes 21a and 21b and a plurality of second electrodes 22a and 22b. A dielectric film is formed on the surface of the first electrode and the second electrode. The first electrode and the second electrode are alternately arranged in parallel on the same plane. In FIG. 8, only two electrodes are shown for the first electrode and the second electrode, respectively.

  The plurality of first electrodes 21 a and 21 b are bundled and electrically connected to the lead terminal 31. Similarly, the plurality of second electrodes 22 a and 22 b are bundled and electrically connected to the lead terminal 32. The first electrodes 21a, 21b, etc. and the second electrodes 22a, 22b, etc. are drawn out in opposite directions. A first potential is applied to the lead terminal 31 and a second potential is applied to the lead terminal 32. That is, a predetermined AC or DC driving voltage is applied between the lead terminals 31 and 32. As a result, the drive voltage is applied between the first electrode 21a and the second electrode 22a adjacent thereto and between the first electrode 21b and the second electrodes 22a and 22b adjacent thereto. Between the first electrodes 21a and 21b and the second electrodes 22a and 22b is a discharge part DG. Since a dielectric film is formed on each electrode, dielectric barrier discharge occurs in these discharge portions DG.

  FIG. 9A is a perspective view of a fabric in which the first electrodes 21a and 21b and the second electrodes 22a and 22b of the discharge element 102 are configured by plain weaving with Nishijin weave (registered trademark). FIG. 9B is a partially enlarged view thereof.

  This fabric was plain woven with the first electrode 21a, 21b and the second electrode 22a, 22b in the middle region of the weft, the other region of the weft as the electrically insulating yarn, and the warp as the electrically insulating yarn. Is.

  The first electrodes 21a and 21b and the second electrodes 22a and 22b are aluminum wires having a diameter of 200 μm, for example. The electrically insulating yarn that is a part of the weft and the warp is, for example, a silk twisted yarn.

  In FIG. 9A, the electrode weaving area DA is a rectangular portion plain-woven with the first electrodes 21a, 21b, etc., the second electrodes 22a, 22b, etc. and silk thread. As shown in FIG. 9B, the rigidity of the aluminum wires that are the first electrodes 21a, 21b, 21c, 21d and the second electrodes 22a, 22b, 22c, 22d, etc. Therefore, the first electrode and the second electrode are substantially linear, and the first electrode and the second electrode are alternately arranged in parallel on the same plane. And these 1st electrodes and 2nd electrodes are spaced apart by the silk thread 41, and the electrical insulation state is maintained. The distance between the electrodes is, for example, 70 to 80 μm.

  After the plain weaving, the first electrode (odd-numbered electrodes such as 21a and 21b) and the second electrode (even-numbered electrodes such as 22a and 22b) are drawn out and bundled. At that time, the first electrode and the second electrode are pulled out separately on the left and right.

  As described above, the arrangement region of the plurality of first electrodes and the plurality of second electrodes is rectangular, and the plurality of first electrodes and the plurality of second electrodes are respectively drawn out on two opposite sides of the rectangular arrangement region. As a result, the first electrode and the second electrode are not close to each other at a position other than the discharge portion, and it is easy to ensure an insulating state.

  The method of forming an oxide film (dielectric film) on the surface of the aluminum wire (first electrode and second electrode) is the same as the method shown in the first embodiment.

  The discharge element of the second embodiment also has the same effect as the discharge element of the first embodiment.

<< Third Embodiment >>
In the third embodiment, another method for forming a dielectric film on an aluminum wire that is a first electrode and a second electrode will be described.

  In the first embodiment, an oxide film is formed by chemical conversion treatment. In the third embodiment, an oxide film (dielectric film) is formed by alumite treatment. The conditions for this processing are as follows, for example.

(1) Alkaline cleaning 0.1M sodium hydroxide aqueous solution 40 ° C 5 minutes (2) Anodizing (alumite) treatment 1.0M sulfuric acid aqueous solution 5 ° C 22V 100Hz 6 minutes (3) Chemical conversion 0.1mM ammonium borate aqueous solution 15 ° C 850V 1 hour ( 4) Washing / Drying It was confirmed that plasma was generated under the same conditions as in the first embodiment for the discharge element using the anodized aluminum wire as the first electrode and the second electrode.

  According to the third embodiment, an alumite treatment can provide a discharge electrode with a longer life than when an oxide film (dielectric film) is formed by chemical conversion treatment.

  In the example described above, an aluminum wire is used. However, other metal wires can be used as long as they are highly ductile, can form a dielectric film, and have a low resistance.

AC ... AC power supply circuit DA ... electrode weaving region DG ... discharge portion F1, F2 ... ear portion L ... current stabilizing choke coils LA1, LB1 ... first electrode weaving region LA2, LB2 ... second electrode weaving Area S: bag-like portions 21a, 21b, 21c, 21d ... first electrodes 22a, 22b, 22c, 22d ... second electrodes 31, 32 ... terminals 31L, 32L, 31R, 32R ... terminals 41 ... silk threads 101, 102 ... discharge element

Claims (10)

A plurality of first electrodes and a plurality of second electrodes are alternately arranged in parallel on the same plane,
A discharge element comprising a lead terminal in which the plurality of first electrodes and the plurality of second electrodes are bundled and electrically connected.   The array region of the plurality of first electrodes and the plurality of second electrodes is rectangular, and the plurality of first electrodes and the plurality of second electrodes are respectively drawn out on two opposite sides of the rectangular array region. The discharge element according to claim 1.   The array region of the plurality of first electrodes and the plurality of second electrodes is rectangular, and the plurality of first electrodes and the plurality of second electrodes are drawn out to one side of the rectangular array region, The discharge element according to claim 1.   The discharge element according to claim 1, wherein at least one of the first electrode and the second electrode is made of a metal wire.   The discharge element according to claim 4, wherein the metal wire has a dielectric film formed on a metal surface.   The discharge element according to claim 5, wherein the dielectric film is formed by anodic oxidation of a metal surface.   The discharge element according to claim 6, wherein the metal wire is an aluminum wire having a dielectric film formed on a surface thereof by anodization of aluminum.   The discharge element according to any one of claims 4 to 7, wherein the first electrode and the second electrode are wefts woven together with insulating warps.   The first electrode and the second electrode are each woven together with an insulating warp, and a portion woven with the first electrode and the insulating warp, and the second electrode and the insulating warp. The discharge element according to claim 8, wherein the woven portion is separated and drawn out in two layers.   A discharge device comprising the discharge element according to claim 1 and a power supply circuit for applying a drive voltage to the discharge element.